CN113917205B - Probe card device and fan-out type probe thereof - Google Patents
Probe card device and fan-out type probe thereof Download PDFInfo
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- CN113917205B CN113917205B CN202010652078.7A CN202010652078A CN113917205B CN 113917205 B CN113917205 B CN 113917205B CN 202010652078 A CN202010652078 A CN 202010652078A CN 113917205 B CN113917205 B CN 113917205B
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- 239000000523 sample Substances 0.000 title claims abstract description 149
- 238000006243 chemical reaction Methods 0.000 claims description 17
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 125000006850 spacer group Chemical group 0.000 description 4
- 238000005192 partition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07392—Multiple probes manipulating each probe element or tip individually
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
The invention discloses a probe card device and a fan-out probe thereof. The stroke section is linear and defines a length direction, and the stroke section comprises two end parts. The stroke section can be bent by the forces of the two end sections respectively in opposite directions to each other. The fan-out section and the test section are respectively connected with the two tail end parts of the travel section, the fan-out section is provided with a transfer point far away from the travel section, and the test section is provided with a propping point far away from the travel section. The switching point is separated from the propping point by a fan-out distance in a fan-out direction perpendicular to the length direction. Accordingly, the probe card device is designed through the structure of the fan-out type probes, so that the distances among the switching points of the fan-out type probes can be pulled apart, and the production cost and the efficiency of the probe card device are effectively improved.
Description
Technical Field
The present invention relates to a conductive probe, and more particularly, to a probe card apparatus and a fan-out probe thereof.
Background
In the existing conductive probes which need to be stressed to bend to provide a stroke, the stressed bent stroke section is in a straight line shape, and two end points of the existing conductive probes are positioned in the extending direction of the stroke section. The construction of existing conductive probes results in the need for densely wired and complex pitch conversion boards between them and the circuit board to transfer signals.
Accordingly, the present inventors considered that the above-mentioned drawbacks could be improved, and have intensively studied and combined with the application of scientific principles, and finally have proposed an invention which is reasonable in design and effectively improves the above-mentioned drawbacks.
Disclosure of Invention
The embodiment of the invention provides a probe card device and a fan-out probe thereof, which can effectively improve the defects possibly generated by the existing conductive probes.
The embodiment of the invention discloses a probe card device, which comprises: a first guide plate unit and a second guide plate unit disposed at a distance from each other; and a plurality of fan-out probes penetrating the first guide plate unit and the second guide plate unit, and each fan-out probe comprises: the stroke section is linear and is defined with a length direction, and two tail ends of the stroke section are respectively accommodated in the first guide plate unit and the second guide plate unit; the fan-out section is connected with one tail end part of the travel section, penetrates out of the first guide plate unit and is provided with a transfer point far away from the travel section; the test section is connected to the other end part of the travel section, penetrates out of the second guide plate unit and is provided with a propping point far away from the travel section; the switching point is separated from the propping point by a fan-out distance in a fan-out direction perpendicular to the length direction; the distance between two switching points in any two adjacent fan-out probes is larger than the distance between two propping points, and the first guide plate unit and the second guide plate unit can be obliquely staggered with each other, so that the travel sections of the fan-out probes are bent towards the same direction.
Preferably, the probe card apparatus further comprises a circuit board and a pitch conversion board connected to the circuit board, and the plurality of fan-out probes are fixed to the pitch conversion board.
Preferably, the probe card apparatus further comprises a circuit board, and the plurality of fan-out probes are fixed to the circuit board at their transfer points.
Preferably, the propping points of the fan-out probes are arranged in a row, the arrangement direction of the propping points is parallel to a straight line direction of the vertical length direction and the fan-out direction, and the transfer points of the fan-out probes are staggered.
Preferably, the propping points of the fan-out probes are arranged in two rows, and the arrangement direction of each row of propping points is parallel to a straight line direction between the vertical length direction and the fan-out direction; the distance between two propping points which belong to different columns and are adjacently arranged is smaller than the distance between two corresponding switching points.
Preferably, the plurality of fan-out probes are arranged in N columns, and the arrangement direction of each column of the top points is parallel to a straight line direction of the vertical length direction and the fan-out direction, and N is a positive integer not greater than three.
Preferably, the fan-out distance of the plurality of fan-out probes comprises at least two different values.
Preferably, the fan-out section of each fan-out probe comprises: an extension part, which is formed by extending the corresponding tail end part of the self-travel section along the fan-out direction; the switching part is formed by extending the extending part along the length direction, and the tail end of the switching part is a switching point; and two flank parts respectively extending from opposite ends of the extending part along the fan-out direction, and respectively protruding out of the adapting part and the corresponding end part.
The embodiment of the invention also discloses a fan-out probe of the probe card device, which comprises: a stroke section which is linear and defines a length direction, and comprises two end parts; wherein the stroke section can be bent by respectively stressing the two end parts in opposite directions; a fan-out section connected to one of the end portions of the run section, and having a point of attachment remote from the run section; the test section is connected with the other end part of the travel section and is provided with a propping point far away from the travel section; the switching point is separated from the propping point by a fan-out distance in a fan-out direction perpendicular to the length direction.
Preferably, the fan-out section comprises: an extension part, which is formed by extending the corresponding tail end part of the self-travel section along the fan-out direction; the switching part is formed by extending the extending part along the length direction, and the tail end of the switching part is a switching point; and two flank parts respectively extending from opposite ends of the extending part along the fan-out direction, and respectively protruding out of the adapting part and the corresponding end part.
In summary, according to the probe card apparatus disclosed in the embodiments of the present invention, the fan-out distance between the transfer points and the propping points is designed by the fan-out probe (e.g., the fan-out distance is between the transfer points and the propping points), so that the distances between the transfer points of the fan-out probes can be pulled apart, and thus the production cost and efficiency of the probe card apparatus can be effectively improved (e.g., the manufacturing difficulty of the pitch conversion board can be reduced, or the pitch conversion board is omitted from the probe card apparatus).
For a further understanding of the nature and the technical aspects of the present invention, reference should be made to the following detailed description of the invention and the accompanying drawings, which are included to illustrate and not to limit the scope of the invention.
Drawings
Fig. 1 is a schematic perspective view of a probe card apparatus according to a first embodiment of the invention.
Figure 2 is a schematic top view of the probe head of figure 1.
Fig. 3 is a perspective view of a plurality of fan-out probes of fig. 1.
Fig. 4 is a schematic plan view of a fan-out probe according to a first embodiment of the present invention.
Fig. 5 is a schematic plan view of another aspect of the fan-out probe of fig. 4.
Fig. 6 is a schematic plan view of yet another aspect of the fan-out probe of fig. 4.
Fig. 7 is a schematic perspective view of another embodiment of a probe card apparatus (only fan-out probes are shown) according to the first embodiment of the present invention.
Fig. 8 is a schematic top view of fig. 7.
Fig. 9 is a schematic perspective view of a probe card apparatus according to a second embodiment of the invention.
Fig. 10 is a perspective view of a probe head of a probe card apparatus according to a third embodiment of the invention.
Detailed Description
The following specific examples are presented to illustrate the embodiments of the present invention disclosed herein with respect to a probe card apparatus and fan-out probes thereof, and those skilled in the art will appreciate the advantages and effects of the present invention from the disclosure herein. The invention is capable of other and different embodiments and its several details are capable of modifications and various other uses and applications, all of which are obvious from the description, without departing from the spirit of the invention. The drawings of the present invention are merely schematic illustrations, and are not intended to be drawn to actual dimensions. The following embodiments will further illustrate the related art content of the present invention in detail, but the disclosure is not intended to limit the scope of the present invention.
It will be understood that, although the terms "first," "second," "third," etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are used primarily to distinguish one element from another element or signal from another signal. In addition, the term "or" as used herein shall include any one or combination of more of the associated listed items as the case may be.
Example one
Please refer to fig. 1 to 8, which illustrate a first embodiment of the present invention. As shown in fig. 1, the present embodiment discloses a probe card apparatus 1000, which includes a probe head 100 and a circuit board 200 abutted against one side of the probe head 100 (e.g. the top side of the probe head 100 in fig. 1), and the other side of the probe head 100 (e.g. the bottom side of the probe head 100 in fig. 1) is used for propping against a test object (device under test, DUT) (not shown, e.g. a semiconductor wafer). That is, the probe card apparatus 1000 of the present embodiment is provided with any pitch conversion plate (space transformer) at a position between the probe head 100 and the circuit board 200, and the probe card apparatus 1000 is directly connected to the circuit board 200 with the probe head 100.
It should be noted that, in order to facilitate understanding of the present embodiment, the drawings only show a partial configuration of the probe card apparatus 1000, so as to clearly show the configuration and connection relationship of each component of the probe card apparatus 1000, but the present invention is not limited to the drawings. The respective component configurations of the probe head 100 and the connection relationships thereof will be described below.
As shown in fig. 1 and 2, the probe head 100 includes a first guide plate unit 1, a second guide plate unit 2 spaced apart from the first guide plate unit 1, a spacer 3 clamped between the first guide plate unit 1 and the second guide plate unit 2, and a plurality of fan-out probes 4 penetrating the first guide plate unit 1 and the second guide plate unit 2.
It should be noted that, in the present embodiment, the fan-out probe 4 is described with the first guide plate unit 1, the second guide plate unit 2 and the partition plate 3, but the present invention is not limited thereto. For example, in other embodiments of the invention not shown, the fan-out probes 4 may be applied (e.g., sold) separately or used with other components.
In this embodiment, the first guide unit 1 includes a first guide plate, and the second guide unit 2 includes a second guide plate. However, in other embodiments of the present invention, which are not shown, the first guide plate unit 1 may include a plurality of first guide plates (and spacers interposed between two adjacent first guide plates), and the second guide plate unit 2 may also include a plurality of second guide plates (and spacers interposed between two adjacent second guide plates), the plurality of first guide plates may be disposed offset from each other, the plurality of second guide plates may be disposed offset from each other, and the first guide plate unit 1 may be disposed offset from each other with respect to the second guide plate unit 2.
Furthermore, the partition plate 3 may have a ring-shaped structure, and the partition plate 3 is clamped at the corresponding peripheral portions of the first guide plate unit 1 and the second guide plate unit 2, but the present invention is not limited thereto. For example, in other embodiments not shown, the spacer 3 of the probe card apparatus 1000 may be omitted or replaced by other components.
It should be noted that, since the configurations of the fan-out probes 4 are substantially the same in the present embodiment, only a single configuration of the fan-out probe 4 is described below for convenience of description, but the present invention is not limited thereto. For example, in other embodiments of the invention not shown, the configuration of a plurality of said fan-out probes 4 may also differ; alternatively, the probe head 100 may include a plurality of fan-out probes 4 and at least one conventional conductive probe having a linear shape.
In order to facilitate understanding of the structure of the fan-out probe 4, the structure of the fan-out probe 4 will be described below in the case where the first guide plate unit 1 is not disposed in a staggered manner with respect to the second guide plate unit 2.
As shown in fig. 1, 3 and 4, the fan-out probe 4 is illustrated with a rectangular cross-section in the present embodiment, but the present invention is not limited thereto. The fan-out probe 4 includes a stroke section 41, and a fan-out section 42 and a test section 43 respectively connected to opposite ends of the stroke section 41, and the fan-out probe 4 is illustrated in the embodiment as a single piece structure formed integrally.
The stroke section 41 is linear and defines a length direction L. The stroke section 41 includes a deformation portion 411 and two end portions 412 respectively connected to two ends of the deformation portion 411, and the two end portions 412 are respectively accommodated in the first guide plate unit 1 and the second guide plate unit 2. Furthermore, the stroke section 41 can be bent (the deformation portion 411 is elastically) by the two end portions 412 being forced in opposite directions, so as to provide the stroke required for the fan-out probe 4 to operate through the bent stroke section 41. It should be noted that, when any conductive probe includes a stroke section that is not linear or cannot be elastically bent by force, the conductive probe is different from the fan-out probe 4 according to the present embodiment.
The fan-out section 42 and the test section 43 are respectively connected to the two end portions 412, the fan-out section 42 passes through the first guide plate unit 1 and has a transfer point 424 away from the travel section 41, and the test section 43 passes through the second guide plate unit 2 and has an abutting point 431 away from the travel section 41. The switching point 424 is separated from the propping point 431 by a fan-out distance FD in a fan-out direction F perpendicular to the length direction L, and the specific value of the fan-out distance FD can be adjusted and changed according to design requirements, which is not limited to the embodiment.
In more detail, the fan-out section 42 in the present embodiment includes an extension 421, and an adapter 422 and two side wings 423 connected to the extension 421. The extension portion 421 extends from the corresponding end portion 412 of the stroke segment 41 along the fan-out direction F, the switching portion 422 extends from the extension portion 421 along the length direction L (toward a side away from the stroke segment 41), and the switching point 424 is at an end of the switching portion 422. Further, the length of the extension 421 in the fan-out direction F can be adjusted and changed according to design requirements, so as to effectively change the fan-out distance FD between the switching point 424 and the propping point 431.
Furthermore, the switching portion 422 is formed by extending substantially vertically from an end of the extending portion 421 (e.g. the right end of the extending portion 421 in fig. 4) away from the stroke section 41, but the invention is not limited thereto. For example, as shown in fig. 5, the switching portion 422 may be formed by extending from the top edge of the extending portion 421 in a tapered shape along the length direction L, so that the switching portion 422 has a substantially trapezoid shape.
In addition, two of the side wing portions 423 are formed to extend in the fan-out direction F (away from each other) from opposite ends of the extension portion 421, respectively, and the two side wing portions 423 protrude from the switching portion 422 and the corresponding end portion 412, respectively. In addition, the fan-out section 42 includes two side wing portions 423 in the present embodiment, but the present invention is not limited thereto. For example, as shown in fig. 5 and 6, the fan-out section 42 may omit two of the side wing portions 423; alternatively, in other embodiments of the invention not shown, the fan-out section 42 may omit only one of the side wing portions 423.
The above is a description of the configuration of the single fan-out probe 4 of the present embodiment, and the following describes the collocation relationship between the fan-out probes 4 and other components. As shown in fig. 1, 3 and 4, the probe card apparatus 1000 is designed by the configuration of the fan-out probes 4 (e.g. the transfer points 424 are separated from the propping points 431 by the fan-out distance FD), so that the distances between the transfer points 424 of the fan-out probes 4 can be pulled apart, thereby facilitating the direct fixation to the circuit board 200 (i.e. the probe card apparatus 1000 may omit a pitch conversion board), and thus effectively improving the production cost and efficiency of the probe card apparatus 1000.
Furthermore, the distance D424 between two of the switching points 424 in any two adjacent fan-out probes 4 is larger than the distance D431 between two of the abutting points 431, and the first guide plate unit 1 and the second guide plate unit 2 can be obliquely offset from each other (e.g. the first guide plate unit 1 in FIG. 1 is offset from the second guide plate unit 2 along an oblique angle with an acute angle with respect to the fan-out direction F on a plane perpendicular to the length direction L), so that the stroke sections 41 of the fan-out probes 4 are bent in the same direction. Alternatively, the plurality of probes that cannot bend in the same direction are different from the plurality of fan-out probes 4 included in the probe card apparatus 1000 of the present embodiment.
In more detail, the plurality of the propping points 431 of the fan-out probe 4 may be arranged in N rows (N is preferably a positive integer not greater than three) in the present embodiment, and the arrangement direction of each row of the propping points 431 is parallel to a straight line direction S perpendicular to the length direction L and the fan-out direction F. That is, the type of the object to be tested by the probe card apparatus 1000 is preferably a peripheral chip, but the invention is not limited thereto. For example, in other embodiments not shown in the present disclosure, the propping points 431 of the fan-out probes 4 may be arranged along any path according to design requirements.
In order to facilitate understanding of the above-described features of the present embodiment, examples in which N is 1 and 2 will be described below. As shown in fig. 3, the abutting points 431 of the fan-out probes 4 are aligned in a row, and the alignment direction thereof is parallel to the straight direction S, and the switching points 424 of the fan-out probes 4 are staggered with each other. Alternatively, as shown in fig. 7 and 8, the abutting points 431 of the plurality of fan-out probes 4 are arranged in two rows, and the arrangement direction of the abutting points 431 of each row is parallel to the straight line direction S; the distance D431a between two abutting points 431, which are arranged adjacently and belong to different columns, is smaller than the distance D424a between two corresponding switching points 424.
Example two
Please refer to fig. 9, which illustrates a second embodiment of the present invention. Since the present embodiment is similar to the first embodiment, the same parts of the two embodiments will not be described again, and the differences between the present embodiment and the first embodiment are described as follows:
in this embodiment, the probe card apparatus 1000 further includes a pitch conversion board 300 connected to the circuit board 200 and the fan-out probes 4, and each fan-out probe 4 is fixed to the pitch conversion board 300 by the switching point 424; that is, the fan-out probes 4 are electrically coupled to the circuit board 200 through the pitch conversion board 300 in the present embodiment.
Accordingly, the probe card apparatus 1000 is designed by the configuration of the fan-out probes 4 (e.g. the transfer points 424 are separated from the propping points 431 by the fan-out distance FD), so that the distances between the transfer points 424 of the fan-out probes 4 can be pulled apart, thereby facilitating the reduction of the manufacturing difficulty of the pitch conversion board 300.
Example III
Please refer to fig. 10, which illustrates a third embodiment of the present invention. Since the present embodiment is similar to the first and second embodiments, the same parts of the two embodiments will not be described again, and the differences between the first and second embodiments are described below:
in this embodiment, the fan-out distances FD of the fan-out probes 4 include at least two different values; that is, the probe head 100 may employ a plurality of fan-out probes 4 with different fan-out distances FD, so as to meet different design requirements, and further facilitate the arrangement of the transfer points 424 of the plurality of fan-out probes 4 to be directly fixed on the circuit board (not shown in the figure); that is, the fan-out probes 4 of the present embodiment may replace the function of the pitch conversion plate by having different values of the fan-out distance FD.
[ technical Effect of embodiments of the invention ]
In summary, according to the probe card apparatus disclosed in the embodiments of the present invention, the fan-out distance between the transfer points and the propping points is designed by the fan-out probe (e.g., the fan-out distance is between the transfer points and the propping points), so that the distances between the transfer points of the fan-out probes can be pulled apart, thereby effectively improving the production cost and efficiency of the probe card apparatus (e.g., the manufacturing difficulty of the pitch conversion plate can be reduced, or the pitch conversion plate is omitted from the probe card apparatus).
In addition, in the probe card apparatus disclosed in the embodiment of the present invention, the fan-out distances of the fan-out probes include at least two different values to meet different design requirements, so that the transfer point layout of the fan-out probes is suitable for being directly fixed on the circuit board (i.e. omitting the use of a pitch conversion board).
The foregoing disclosure is only illustrative of the preferred embodiments of the present invention and is not to be construed as limiting the scope of the invention, as all changes which come within the meaning and range of equivalency of the description and drawings are therefore intended to be embraced therein.
Claims (8)
1. A probe card apparatus, the probe card apparatus comprising:
a first guide plate unit and a second guide plate unit disposed at a distance from each other; and
the fan-out probes penetrate through the first guide plate unit and the second guide plate unit, and each fan-out probe comprises:
a stroke section which is linear and is defined with a length direction, wherein two tail ends of the stroke section are respectively accommodated in the first guide plate unit and the second guide plate unit;
a fan-out section connected to one of the end portions of the stroke section, the fan-out section penetrating the first guide plate unit and having a transfer point remote from the stroke section; and
A test section connected to the other end of the travel section, the test section penetrating the second guide plate unit and having an abutment point away from the travel section; the switching point is separated from the propping point by a fan-out distance in a fan-out direction perpendicular to the length direction;
the distance between two transfer points in any two adjacent fan-out probes is larger than the distance between two propping points, and the first guide plate unit and the second guide plate unit can be obliquely staggered with each other so that the travel sections of the fan-out probes bend towards the same direction;
wherein, each fan-out section of fan-out probe includes:
an extension part extending from the corresponding end part of the travel section along the fan-out direction;
the transfer part is formed by gradually extending from the extension part along the length direction and is trapezoidal, and the tail end of the transfer part is the transfer point.
2. The probe card apparatus of claim 1, further comprising a circuit board and a pitch conversion board connected to the circuit board, wherein the transfer points of the fan-out probes are fixed to the pitch conversion board.
3. The probe card apparatus of claim 1, further comprising a circuit board, and wherein the transfer points of the fan-out probes are fixed to the circuit board.
4. The probe card apparatus of claim 1, wherein the plurality of fan-out probes are arranged in a row with the contact points being parallel to a line direction perpendicular to the length direction and the fan-out direction, and the plurality of switching points of the fan-out probes are staggered with each other.
5. The probe card apparatus of claim 1, wherein the plurality of the top abutments of the fan-out probes are arranged in two rows, and an arrangement direction of the top abutments of each row is parallel to a straight line direction perpendicular to the length direction and the fan-out direction; the distance between two propping points which belong to different columns and are adjacently arranged is smaller than the distance between two corresponding switching points.
6. The probe card apparatus of claim 1, wherein the plurality of the top abutments of the fan-out probes are arranged in N columns, and an arrangement direction of the top abutments of each column is parallel to a straight line direction perpendicular to the length direction and the fan-out direction, N being a positive integer not greater than three.
7. The probe card apparatus of claim 1, wherein the fan-out distances of a plurality of the fan-out probes comprise at least two different values.
8. A fan-out probe of a probe card apparatus, the fan-out probe of the probe card apparatus comprising:
a stroke section which is linear and defines a length direction, and comprises two end parts; wherein the stroke section is capable of being bent by being forced in opposite directions to each other by the two end portions, respectively;
a fan-out section connected to one of said end portions of said run section, and said fan-out section having a point of attachment remote from said run section; and
a test section connected to the other of the end portions of the travel section, and having an abutment point remote from the travel section; the switching point is separated from the propping point by a fan-out distance in a fan-out direction perpendicular to the length direction;
wherein, the fan-out section includes:
an extension part extending from the corresponding end part of the travel section along the fan-out direction;
the transfer part is formed by gradually extending from the extension part along the length direction and is trapezoidal, and the tail end of the transfer part is the transfer point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010652078.7A CN113917205B (en) | 2020-07-08 | 2020-07-08 | Probe card device and fan-out type probe thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010652078.7A CN113917205B (en) | 2020-07-08 | 2020-07-08 | Probe card device and fan-out type probe thereof |
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| Publication Number | Publication Date |
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| CN113917205A CN113917205A (en) | 2022-01-11 |
| CN113917205B true CN113917205B (en) | 2024-01-19 |
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| CN202010652078.7A Active CN113917205B (en) | 2020-07-08 | 2020-07-08 | Probe card device and fan-out type probe thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114609418A (en) * | 2022-05-10 | 2022-06-10 | 武汉精立电子技术有限公司 | Conduction mechanism and crimping jig |
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| CN1665011A (en) * | 2004-03-02 | 2005-09-07 | 旺矽科技股份有限公司 | Multifunctional probe card |
| EP2107380A1 (en) * | 2008-04-01 | 2009-10-07 | Technoprobe S.p.A | Testing head having vertical probes configured to improve the electric contact with a device to be tested |
| WO2010095521A1 (en) * | 2009-02-23 | 2010-08-26 | 日本発條株式会社 | Probe guard |
| JP2011133354A (en) * | 2009-12-24 | 2011-07-07 | Nhk Spring Co Ltd | Contact probe and probe unit |
| TW201250257A (en) * | 2011-04-12 | 2012-12-16 | Technoprobe Spa | Testing head for a test equipment of electronic devices |
| TW201913104A (en) * | 2017-08-25 | 2019-04-01 | 中華精測科技股份有限公司 | Vertical probe card probe device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7172431B2 (en) * | 2004-08-27 | 2007-02-06 | International Business Machines Corporation | Electrical connector design and contact geometry and method of use thereof and methods of fabrication thereof |
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2020
- 2020-07-08 CN CN202010652078.7A patent/CN113917205B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1665011A (en) * | 2004-03-02 | 2005-09-07 | 旺矽科技股份有限公司 | Multifunctional probe card |
| EP2107380A1 (en) * | 2008-04-01 | 2009-10-07 | Technoprobe S.p.A | Testing head having vertical probes configured to improve the electric contact with a device to be tested |
| WO2010095521A1 (en) * | 2009-02-23 | 2010-08-26 | 日本発條株式会社 | Probe guard |
| JP2011133354A (en) * | 2009-12-24 | 2011-07-07 | Nhk Spring Co Ltd | Contact probe and probe unit |
| TW201250257A (en) * | 2011-04-12 | 2012-12-16 | Technoprobe Spa | Testing head for a test equipment of electronic devices |
| TW201913104A (en) * | 2017-08-25 | 2019-04-01 | 中華精測科技股份有限公司 | Vertical probe card probe device |
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| Publication number | Publication date |
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| CN113917205A (en) | 2022-01-11 |
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