CN113146153A - Manufacturing method of embossing template and embossing template - Google Patents
Manufacturing method of embossing template and embossing template Download PDFInfo
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- CN113146153A CN113146153A CN202110379159.9A CN202110379159A CN113146153A CN 113146153 A CN113146153 A CN 113146153A CN 202110379159 A CN202110379159 A CN 202110379159A CN 113146153 A CN113146153 A CN 113146153A
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- template
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- diaphragm
- melting
- aluminum foil
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
Abstract
The invention discloses a manufacturing method of an embossing template and the embossing template, and the specific manufacturing method comprises the following steps of S1, providing a cylindrical alloy roller; s2, providing a metal membrane; s3, providing a low-melting-point welding material alloy; s4, penetrating outside the diaphragm by using laser as a heat source to form a cavity hole; and S5, polishing and grinding the cooled diaphragm after cooling, and cleaning, wherein the convex part can be attached with a machine raw material layer after cleaning, thereby obtaining the imprinting template. The manufacturing method of the imprinting template comprises the steps of firstly coating a layer of metal membrane on the outer circumferential surface of a cylindrical hard roller to obtain an intermediate cylinder, then spraying low-melting-point solder alloy to the outer part of the membrane to form a convex part or forming the convex part in a sputtering mode, punching the membrane by using laser engraving, cooling, and attaching an organic raw material layer with a protection function to the outer part of the convex part, so that the manufacturing efficiency is integrally improved.
Description
Technical Field
The invention relates to the technical field of imprinting, in particular to an imprinting template and a manufacturing method thereof.
Background
Embossing and overprinting are meant to mean that one color block is overprinted on another color block. However, attention is paid to the overlapping printing of black characters on color images during printing, and the patterns under the black characters are not hollowed out, otherwise, white edges of the black characters are exposed when the overprinting is not performed. Nanoimprint technology has attracted much attention from researchers and engineers by virtue of its high efficiency, high resolution, and low cost, and a review of MIr is even one of ten technologies that have the potential to change the world. The nano-imprinting technique can be mainly divided into three processes of soft imprinting, hot imprinting and step-by-step mold pressing exposure according to the characteristics of the template.
Nanotechnology is one of the most active technologies at present, and compared with other high and new technologies, nanotechnology has interdisciplinary disciplines with many fields, such as nanobiology, nanomedicine, nanochemistry, and the like. The key of the nano technology lies in the formation of the nano-scale structure, and the invention of the nano-imprinting technology has important significance for the processing of the nano-scale structure.
The nano-imprint template in the prior art is easy to deform, and the efficiency is lower in the process of manufacturing the imprint shape, so that the production is influenced. For this reason, a corresponding technical scheme needs to be designed to solve the existing technical problems.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides an imprint template and a manufacturing method thereof, and solves the problems that: the nano-imprint template in the prior art is easy to deform, and has low efficiency in the process of manufacturing the imprint shape, thereby influencing the production.
(II) technical scheme
In order to achieve the purpose, the invention is realized by the following technical scheme: a method for manufacturing an imprint template and the imprint template comprises the following steps,
s1, providing a cylindrical alloy roller;
s2, providing a metal diaphragm, and coating the diaphragm on the outer circumferential surface of the hard roller to form a frame appearance;
s3, providing a low-melting-point welding material alloy, heating the low-melting-point welding material alloy to a liquid state, injecting the low-melting-point welding material alloy into a high-temperature-resistant spray gun, and spraying the circumferential surface of the diaphragm to form a convex part;
s4, penetrating outside the diaphragm by using laser as a heat source to form a cavity hole;
and S5, polishing and grinding the cooled diaphragm after cooling, and cleaning, wherein the convex part can be attached with a machine raw material layer after cleaning, thereby obtaining the imprinting template.
In a further preferred embodiment of the present invention, in step S2, the metal diaphragm material is an aluminum material, and the aluminum material is pre-treated, the pre-treatment comprising the steps of,
a, preparing HNO with the concentration of 1.3-1.4mol/L3The temperature of the preparation liquid is controlled to be 26-32 ℃, hydrogen peroxide is used for burning the aluminum foil, and the processing time is set to be 20-45 seconds;
b, the aluminum foil in the step A is processed again to prepare 0.4-0.5mol/L HNO3 solution, 2-10% phosphoric acid is prepared, the two solutions are mixed, the heating temperature is controlled to be 35-65 ℃, and the aluminum foil is soaked for 20-100 seconds;
and C, cleaning the aluminum foil in the step B for 2-4 times by using clear water, removing mixed liquid on the surface of the aluminum foil, pressing the aluminum foil into a sheet shape by using a roll shaft, and bending the sheet into a hollow cylinder.
As a further preferable mode of the present invention, in step 3, the low melting point solder alloy comprises the following raw material components by weight: 4.6 percent of tin, 44.7 percent of bismuth, 20.6 percent of lead, 5.2 percent of chromium, 15.1 percent of indium, 2.1 percent of cadmium and 7.7 percent of stibium.
As a further preferable mode of the present invention, in step S3, the low melting point solder alloy is made into the convex portion by magnetron sputtering, and the auxiliary operation is performed by using a controlled atmosphere, and argon gas and methane are mixed, wherein the ratio of argon gas: methane 1: 1.5, the processing thickness of the convex part is controlled to be 15um-20 mm.
In a further preferred embodiment of the present invention, the laser output has a wavelength of 16. mu.m to 29.6. mu.m, a power of 80W to 420W, and a frequency of 160 MHz.
As a further preferable mode of the invention, the laser drilling is firstly used on the bottom surface of the metal membrane in a pulse control mode, then a round or square diffusion point is drilled by laser, the depth is gradually enlarged and adjusted, the aperture is controlled to be between 4.8um and 1.25mm, and the depth is controlled to be between 5.5um and 2.4 mm.
In a further preferred embodiment of the present invention, the organic material layer is one of a heat-curable adhesive, an ultraviolet-curable adhesive, a resin material adhesive, and a silane coupling adhesive.
The die plate comprises a die plate body, wherein the die plate body is cylindrical and hollow, a strip-shaped opening is formed in the outer wall of one side of the die plate body, a plurality of cavity holes are formed in the circumferential surface of the die plate body, and a plurality of protruding parts are further formed in the circumferential surface of the die plate body.
(III) advantageous effects
The invention provides an embossing template and a manufacturing method thereof. The method has the following beneficial effects:
the manufacturing method of the imprinting template comprises the steps of firstly coating a layer of metal membrane on the outer circumferential surface of a cylindrical hard roller to obtain an intermediate cylinder, then spraying low-melting-point solder alloy to the outer part of the membrane to form a convex part or forming the convex part in a sputtering mode, punching the membrane by using laser engraving, cooling, and attaching an organic raw material layer with a protection function to the outer part of the convex part, so that the manufacturing efficiency is integrally improved.
Drawings
FIG. 1 is a schematic diagram of a frame structure according to the principle of the present invention;
figure 2 is a schematic diagram of the structure of an imprint template of the present invention.
In the figure, 1, an alloy roller; 2. a template body; 3. a bore; 4. a raised portion.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-2, an embodiment of the present invention provides a technical solution: a method for manufacturing an imprint template and the imprint template comprises the following steps,
s1, providing a cylindrical alloy roller;
s2, providing a metal diaphragm, and coating the diaphragm on the outer circumferential surface of the hard roller to form a frame appearance;
s3, providing a low-melting-point welding material alloy, heating the low-melting-point welding material alloy to a liquid state, injecting the low-melting-point welding material alloy into a high-temperature-resistant spray gun, and spraying the circumferential surface of the diaphragm to form a convex part;
s4, penetrating outside the diaphragm by using laser as a heat source to form a cavity hole;
and S5, polishing and grinding the cooled diaphragm after cooling, and cleaning, wherein the convex part can be attached with a machine raw material layer after cleaning, thereby obtaining the imprinting template.
In step S2, the metal membrane material is an aluminum material, and the aluminum material is pre-treated, the pre-treatment includes the following steps,
a, preparing HNO with the concentration of 1.3-1.4mol/L3The temperature of the preparation liquid is controlled to be 26-32 ℃, hydrogen peroxide is used for burning the aluminum foil, and the processing time is set to be 20-45 seconds;
b, the aluminum foil in the step A is processed again to prepare 0.4-0.5mol/L HNO3 solution, 2-10% phosphoric acid is prepared, the two solutions are mixed, the heating temperature is controlled to be 35-65 ℃, and the aluminum foil is soaked for 20-100 seconds;
and C, cleaning the aluminum foil in the step B for 2-4 times by using clear water, removing mixed liquid on the surface of the aluminum foil, pressing the aluminum foil into a sheet shape by using a roll shaft, and bending the sheet into a hollow cylinder.
In step 3, the low-melting-point welding material alloy comprises the following raw material components in percentage by weight: 4.6 percent of tin, 44.7 percent of bismuth, 20.6 percent of lead, 5.2 percent of chromium, 15.1 percent of indium, 2.1 percent of cadmium and 7.7 percent of stibium.
In step S3, the low melting point solder alloy may be fabricated by magnetron sputtering, and the controlled atmosphere is used for the auxiliary operation, and argon gas is selected for mixing with methane, argon gas: methane 1: 1.5, the processing thickness of the convex part is controlled to be 15um-20 mm.
The wavelength of the laser output by the laser is 16-29.6 μm, the power is 80-420W, and the frequency is 160 MHz.
The laser drilling is firstly used on the bottom surface of the metal membrane in a pulse control mode, then circular or square diffusion points are drilled by laser, the depth is gradually enlarged and adjusted, the aperture is controlled to be between 4.8um and 1.25mm, and the depth is controlled to be between 5.5um and 2.4 mm.
The organic raw material layer is one of heat curing glue, ultraviolet curing glue, resin material glue or silane coupling glue.
The die plate comprises a die plate body, wherein the die plate body is cylindrical, the interior of the die plate body is hollow, a strip-shaped opening is formed in the outer wall of one side of the die plate body, a plurality of cavity holes are formed in the circumferential surface of the die plate body, and a plurality of protruding parts are further arranged on the circumferential surface of the die plate body.
Example one
Providing a cylindrical alloy roller, wherein the alloy roller is made of high-temperature-resistant metal, then manufacturing a membrane, the membrane is made of aluminum material, and the aluminum material is pretreated to prepare HNO with the concentration of 1.3-1.4mol/L3The temperature of the preparation liquid is controlled to be 26-32 ℃, hydrogen peroxide is used for burning the aluminum foil, the processing time is set to be 20-45 seconds, the aluminum foil in the step A is processed again, and 0.4-0.5mol/L HNO is prepared3Preparing 2-10% phosphoric acid, mixing the two solutions, controlling the heating temperature at 35-65 ℃, soaking the aluminum foil for 20-100 seconds, cleaning the aluminum foil in the step B with clear water for 2-4 times, removing the mixed liquid on the surface of the aluminum foil, pressing the aluminum foil into sheets by using a roll shaft, and bending the sheets into a hollow cylinder;
providing 4.6% of tin, 44.7% of bismuth, 20.6% of lead, 5.2% of chromium, 15.1% of indium, 2.1% of cadmium and 7.7% of antimony, wherein the low-melting-point welding material alloy is used for manufacturing a convex part by a magnetron sputtering mode, a controllable atmosphere is used for carrying out auxiliary operation, and argon and methane are selected for mixing, wherein the argon: methane 1: 1.5, the processing thickness of the convex part is controlled to be 15 um;
adjusting the wavelength of laser output by the laser to be 18 mu m, the power to be 240W and the frequency to be 160MHz, firstly using a pulse control mode on the bottom surface of the metal diaphragm, then using the laser to beat a round or square diffusion point and gradually expanding and adjusting the depth, wherein the aperture is controlled to be 4.8um, and the depth is controlled to be 5.5 um;
and after cooling, polishing and grinding the cooled diaphragm, cleaning, and attaching ultraviolet curing glue to the raised part after cleaning to obtain the imprinting template.
Example two
Providing a cylindrical alloy roller, wherein the alloy roller is made of high-temperature-resistant metal, then manufacturing a membrane, the membrane is made of aluminum material, and the aluminum material is pretreated to prepare HNO with the concentration of 1.3-1.4mol/L3The temperature of the preparation liquid is controlled to be 26-32 ℃, hydrogen peroxide is used for burning the aluminum foil, the processing time is set to be 20-45 seconds, the aluminum foil in the step A is processed again, and 0.4-0.5mol/L HNO is prepared3Preparing 2-10% phosphoric acid, mixing the two solutions, controlling the heating temperature at 35-65 ℃, soaking the aluminum foil for 20-100 seconds, cleaning the aluminum foil in the step B with clear water for 2-4 times, removing the mixed liquid on the surface of the aluminum foil, pressing the aluminum foil into sheets by using a roll shaft, and bending the sheets into a hollow cylinder;
providing low-melting-point welding material alloys of 4.6% of tin, 44.7% of bismuth, 20.6% of lead, 5.2% of chromium, 15.1% of indium, 2.1% of cadmium and 7.7% of antimony, fully mixing the alloys, heating the low-melting-point welding material alloys to be in a liquid state, injecting the low-melting-point welding material alloys into a high-temperature-resistant spray gun, and spraying the circumferential surface of the membrane to form a convex part;
adjusting the wavelength of laser output by the laser to be 16 mu m, the power to be 80W and the frequency to be 160MHz, firstly using a pulse control mode on the bottom surface of the metal diaphragm, then using the laser to beat a round or square diffusion point and gradually expanding and adjusting the depth to be between 1.25mm and 2.4 mm;
and after cooling, polishing and grinding the cooled diaphragm, cleaning, and attaching ultraviolet curing glue to the raised part after cleaning to obtain the imprinting template.
The invention 1, alloy roller; 2. a template body; 3. a bore; 4. the raised portions, the components being either common standard components or components known to those skilled in the art, the structure and principle of which are known to those skilled in the art, either through technical manuals or through routine experimentation, the problem solved by the present invention is that the nano-imprint templates in the prior art are susceptible to deformation, and the efficiency is lower in the process of manufacturing the imprinting shape, which affects the production, the manufacturing method of the imprinting template of the invention coats a layer of metal membrane on the outer circumference of the cylindrical hard roller to obtain a middle cylinder, then spraying low-melting-point solder alloy to the outside of the diaphragm to form a convex part or forming the convex part in a sputtering mode, and simultaneously punching the diaphragm by using laser engraving, and then cooling, and attaching an organic raw material layer with a protection function to the outside of the convex part, so that the manufacturing efficiency is integrally improved.
While there have been shown and described what are at present considered the fundamental principles and essential features of the invention and its advantages, it will be apparent to those skilled in the art that the invention is not limited to the details of the foregoing exemplary embodiments, but is capable of other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (8)
1. A method of making an imprint template, comprising: the specific manufacturing method comprises the following steps of,
s1, providing a cylindrical alloy roller;
s2, providing a metal diaphragm, and coating the diaphragm on the outer circumferential surface of the hard roller to form a frame appearance;
s3, providing a low-melting-point welding material alloy, heating the low-melting-point welding material alloy to a liquid state, injecting the low-melting-point welding material alloy into a high-temperature-resistant spray gun, and spraying the circumferential surface of the diaphragm to form a convex part;
s4, penetrating outside the diaphragm by using laser as a heat source to form a cavity hole;
and S5, polishing and grinding the cooled diaphragm after cooling, and cleaning, wherein the convex part can be attached with a machine raw material layer after cleaning, thereby obtaining the imprinting template.
2. A method of fabricating an imprint template according to claim 1, wherein: in step S2, the metal membrane material is an aluminum material, and the aluminum material is pre-treated, the pre-treatment includes the following steps,
a, preparing HNO with the concentration of 1.3-1.4mol/L3The temperature of the preparation liquid is controlled to be 26-32 ℃, hydrogen peroxide is used for burning the aluminum foil, and the processing time is set to be 20-45 seconds;
b, the aluminum foil in the step A is processed again to prepare 0.4-0.5mol/L HNO3 solution, 2-10% phosphoric acid is prepared, the two solutions are mixed, the heating temperature is controlled to be 35-65 ℃, and the aluminum foil is soaked for 20-100 seconds;
and C, cleaning the aluminum foil in the step B for 2-4 times by using clear water, removing mixed liquid on the surface of the aluminum foil, pressing the aluminum foil into a sheet shape by using a roll shaft, and bending the sheet into a hollow cylinder.
3. A method of fabricating an imprint template according to claim 1, wherein: in step 3, the low-melting-point welding material alloy comprises the following raw material components in percentage by weight: 4.6 percent of tin, 44.7 percent of bismuth, 20.6 percent of lead, 5.2 percent of chromium, 15.1 percent of indium, 2.1 percent of cadmium and 7.7 percent of stibium.
4. A method of fabricating an imprint template according to claim 1, wherein: in step S3, the low melting point solder alloy may be fabricated by magnetron sputtering, and the controlled atmosphere is used for the auxiliary operation, and argon gas is selected for mixing with methane, argon gas: methane 1: 1.5, the processing thickness of the convex part is controlled to be 15um-20 mm.
5. A method of fabricating an imprint template according to claim 1, wherein: the wavelength of the laser output by the laser is 16-29.6 μm, the power is 80-420W, and the frequency is 160 MHz.
6. A method of fabricating an imprint template according to claim 5, wherein: the laser drilling is firstly used on the bottom surface of the metal membrane in a pulse control mode, then circular or square diffusion points are drilled by laser, the depth is gradually enlarged and adjusted, the aperture is controlled to be between 4.8um and 1.25mm, and the depth is controlled to be between 5.5um and 2.4 mm.
7. A method of fabricating an imprint template according to claim 1, wherein: the organic raw material layer is one of heat curing glue, ultraviolet curing glue, resin material glue or silane coupling glue.
8. An imprinting template manufactured by the method of claim 1, comprising a template body, wherein the template body is cylindrical and hollow, a strip-shaped opening is arranged on the outer wall of one side of the template body, a plurality of cavities are arranged on the circumferential surface of the template body, and a plurality of convex parts are arranged on the circumferential surface of the template body.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110379159.9A CN113146153A (en) | 2021-04-08 | 2021-04-08 | Manufacturing method of embossing template and embossing template |
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| CN202110379159.9A CN113146153A (en) | 2021-04-08 | 2021-04-08 | Manufacturing method of embossing template and embossing template |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101770164A (en) * | 2009-01-06 | 2010-07-07 | 上海市纳米科技与产业发展促进中心 | Impressing hard template in nanostructure |
| CN102043330A (en) * | 2009-10-21 | 2011-05-04 | 财团法人工业技术研究院 | Method for manufacturing cylinder die core for nanoimprint |
| CN102436140A (en) * | 2011-10-18 | 2012-05-02 | 华中科技大学 | Method for preparing nanoimprint template |
| CN105700292A (en) * | 2016-04-21 | 2016-06-22 | 深圳市华星光电技术有限公司 | Manufacturing method of nano-imprint template and nano-imprint template |
| US20170151598A1 (en) * | 2014-05-29 | 2017-06-01 | Agency For Science, Technology And Research | Imprinting Metallic Substrates at Hot Working Temperatures |
| CN107378273A (en) * | 2017-08-23 | 2017-11-24 | 成都新柯力化工科技有限公司 | A kind of low-cost aluminum Alloy by Laser cheesing techniques |
-
2021
- 2021-04-08 CN CN202110379159.9A patent/CN113146153A/en not_active Withdrawn
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101770164A (en) * | 2009-01-06 | 2010-07-07 | 上海市纳米科技与产业发展促进中心 | Impressing hard template in nanostructure |
| CN102043330A (en) * | 2009-10-21 | 2011-05-04 | 财团法人工业技术研究院 | Method for manufacturing cylinder die core for nanoimprint |
| CN102436140A (en) * | 2011-10-18 | 2012-05-02 | 华中科技大学 | Method for preparing nanoimprint template |
| US20170151598A1 (en) * | 2014-05-29 | 2017-06-01 | Agency For Science, Technology And Research | Imprinting Metallic Substrates at Hot Working Temperatures |
| CN105700292A (en) * | 2016-04-21 | 2016-06-22 | 深圳市华星光电技术有限公司 | Manufacturing method of nano-imprint template and nano-imprint template |
| CN107378273A (en) * | 2017-08-23 | 2017-11-24 | 成都新柯力化工科技有限公司 | A kind of low-cost aluminum Alloy by Laser cheesing techniques |
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