CN109900262A - Gyroscope - Google Patents
Gyroscope Download PDFInfo
- Publication number
- CN109900262A CN109900262A CN201910276698.2A CN201910276698A CN109900262A CN 109900262 A CN109900262 A CN 109900262A CN 201910276698 A CN201910276698 A CN 201910276698A CN 109900262 A CN109900262 A CN 109900262A
- Authority
- CN
- China
- Prior art keywords
- rod
- annulus
- support plate
- vibrating member
- annular support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The present invention provides a kind of gyroscopes, including annular support plate and vibrating member, vibrating member includes annulus and multiple elastic joint parts along the circumferentially-spaced circular setting of annulus, each elastic joint part includes the arc body of rod, first body of rod being connected between the arc body of rod and annulus periphery wall and second body of rod being fixed on annular support plate from the extension of the arc body of rod that interval is set to annulus periphery, and each arc body of rod is along one and the circumferentially-spaced of annulus concentric.Gyroscope provided by the invention, vibrating member are set up on annular support plate, and when being made vibrating member rotate by extraneous active force, electric current changes, and detects angular speed;Multiple elastic joint parts are arranged not only to have maintained the elasticity of rotation but also unnecessary vibration can be inhibited;And elastic joint part is provided with the arc body of rod with annulus concentric, so that entirely vibrating member structure is without acute angle, while keeping elasticity and resisting non-essential vibration performance, it is easier to manufacture.
Description
[technical field]
The present invention relates to gyroscope technology field, specifically a kind of gyroscope.
[background technique]
Gyroscope is a kind of angular speed detecting apparatus.
The gyroscope of the prior art, structure is complicated, while keeping the elasticity of rotation, can generate some non-essential vibrations
It is dynamic, so that the precision of rotation detection is high not enough.
Therefore, it is necessary to provide a kind of stable gyroscope of vibration.
[summary of the invention]
The purpose of the present invention is to provide a kind of gyroscope, inessential vibration can be inhibited, and easy to manufacture.
Technical scheme is as follows:
A kind of gyroscope is provided, including annular support plate and is set up in the vibrating member of the annular support plate side, it is described
Vibrating member includes annulus and multiple circumferentially-spaced around being set to the elastic connection of the annulus periphery along the annulus
Portion, each elastic joint part includes arc-shaped extension and interval is set to the arc body of rod of the annulus periphery, connection
It first body of rod between the arc body of rod and the annulus periphery wall and is fixed on from arc body of rod extension described
Second body of rod on annular support plate, each arc body of rod is along one and the circumferentially-spaced of the annulus concentric.
Preferably, each elastic joint part includes the arc body of rod, two first bodies of rod and one
A second body of rod, described two first bodies of rod extend from the both ends of the arc body of rod respectively connects the outer of the annulus
Peripheral wall, second body of rod connect the arc body of rod and the annular support plate.
Preferably, second body of rod is connected to the midpoint of the arc body of rod;And/or
The junction of second body of rod and the annular support plate is provided with the pin for electric connection.
Preferably, second body of rod connect the angle to be formed and first body of rod and the ring with the arc body of rod
Shape portion connects the angle to be formed both greater than or equal to 90 degree.
Preferably, the quantity of the elastic joint part is even number, and the even number elastic joint part is circumferentially at equal intervals
Distribution.
Preferably, the annular support plate has hollow inner hole, central axis and the annulus of the hollow inner hole
Center overlapping of axles.
Preferably, the hollow inner hole is positive polygonal hole.
Preferably, the number of edges in the regular polygon hole is even number, and the number of edges in the regular polygon hole and the elasticity are even
The quantity of socket part is identical, and each second body of rod corresponds the midpoint on each side in regular polygon hole respectively and is connected to
On the annular support plate.
Preferably, the vibrating member is made of metal;And/or
The vibrating member is integrally formed.
Preferably, the gyroscope further includes substrate, and the side back to the vibrating member of the annular support plate is laminated
It is fixed on the substrate.
The beneficial effects of the present invention are: the present invention provides a kind of gyroscope, and vibrating member is set up on annular support plate, when
When by extraneous active force vibrating member being rotated, electric current changes, and then detects angular speed;Structure of the invention
Simply, multiple elastic joint parts are arranged not only to have maintained the elasticity of rotation but also unnecessary vibration can be inhibited;And elastic joint part
It is provided with the arc body of rod with annulus concentric, so that entire vibrating member structure is keeping elasticity and resisting inessential without acute angle
Vibration performance while, it is easier to manufacture.
[Detailed description of the invention]
Fig. 1 is the structural exploded view for the gyroscope that the embodiment of the present invention provides;
Fig. 2 is the overall structure diagram for the gyroscope that the embodiment of the present invention provides;
Fig. 3 is the cross-sectional view of A-A in Fig. 2;
Fig. 4 is the top view for the gyroscope that the embodiment of the present invention provides.
[specific embodiment]
The invention will be further described with embodiment with reference to the accompanying drawing.
With reference to Fig. 1 and Fig. 2, a preferred embodiment of the present invention provides a kind of gyroscope 100, including substrate 10, circumferential support
Plate 20 and the vibrating member 30 for being set up in 20 side of annular support plate, vibrating member 30 include annulus 31 and multiple along annulus 31 weeks
To spacer ring around the elastic joint part 32 for being set to 31 periphery of annulus, each elastic joint part 32 include arc-shaped extension and
Interval is set to the arc body of rod 321 of 31 periphery of annulus, first be connected between 31 periphery wall of the arc body of rod 321 and annulus
The body of rod 322 and extend second body of rod 323 that is fixed on annular support plate 20 from the arc body of rod 321, each arc body of rod 321 is along one
A circumferentially-spaced with 31 concentric of annulus.Elastic joint part 32 and 20 junction of annular support plate are provided with for electricity
Property connection pin 324, annular support plate 20 is made of silica, and vibrating member 30 is made of metal.Pin 324, which is in, to be continued
The state of energization, so that vibrating member 30 is also at conduction state.Vibrating member 30 is set up on annular support plate 20, in normal condition
Under, electric current is normal, no fluctuation;If annulus 31 is acted on by extraneous pressure, elastic joint part 32 can rotate, thus meeting
Electric current is caused to change, by the variation of electric current, gyroscope 100 can detect corresponding angular speed variation.The present invention is real
100 simple structure of gyroscope for applying example offer is arranged multiple elastic joint parts 32 and had not only maintained the elasticity of rotation but also can inhibit
Unnecessary vibration;And elastic joint part 32 is provided with the arc body of rod 321 with 31 concentric of annulus, so that entire vibrating member
30 structures are without acute angle, while keeping elasticity and resisting non-essential vibration performance, it is easier to manufacture.
With reference to Fig. 1 and Fig. 4, it is preferable that each elastic joint part 32 includes 321, two the first bars of an arc body of rod
Body 322 and second body of rod 323, two first bodies of rod 322 extend connection annulus 31 from the both ends of the arc body of rod 321 respectively
Periphery wall.Distance is maintained between two adjacent elastic joint parts 32, it can be to avoid elastic joint part 32 in vibration phase
It collides between mutually, to improve the accurate reliability of testing result.
Preferably, second body of rod 323 is connected to the midpoint of the arc body of rod 321.Second body of rod 323 and the arc body of rod 321
It connects the angle formed and first body of rod 322 connect the angle formed with annulus 31 both greater than or equal to 90 degree.Vibrating member 30
Overall structure without acute angle, under the premise of keeping the elasticity of rotation and resisting inessential vibratory, it is easier to manufacture.
Preferably, the quantity of elastic joint part 32 is even number, and even number elastic joint part 32 is circumferentially spacedly distributed.
Elastic joint part 32 is arranged along the circumferentially-spaced of one and 31 concentric of annulus, uniform and stable connection of arranging, from
And can make gyroscope 100 resists inessential vibratility stronger.
Preferably, annulus 31 is annular in shape, and structure is simple, convenient for being manufactured, and is convenient for even number elastic connection
The symmetrical connection in portion 32.It of courses, annulus 31 or other regular polygon shapes.
Preferably, vibrating member 30 is integrally formed.Vibrating member 30 is manufactured using integrally formed mode, is both beneficial to vibrating member
30 overall stability so that resisting inessential vibratility stronger, and is convenient to the industrial manufacturing.
With reference to Fig. 1 and Fig. 3, it is preferable that the outer contoured shape of annular support plate 20 is rectangle, and annular support plate 20 has
Hollow inner hole 21, the central axis of hollow inner hole 21 and the center overlapping of axles of annulus 31.Vibrating member 30 is set up in annular support plate
On 20, the position of 20 face vibrating member 30 of annular support plate is arranged to through-hole, when avoidable vibrating member 30 vibrates, elasticity
Interconnecting piece 32 collides with annular support plate 20, so that influencing testing result.
Preferably, hollow inner hole 21 is positive polygonal hole, and the number of edges in regular polygon hole is even number, and the side in regular polygon hole
Number is identical as the quantity of elastic joint part 32, and each second body of rod 323 corresponds the midpoint on each side in regular polygon hole respectively and prolongs
It stretches and is connected on annular support plate 20, so set, the overall stability of vibrating member 30 can be made more preferable.Implement in the present invention
In example, the quantity of elastic joint part 32 and the number of edges in regular polygon hole are all eight.It of courses, the number of edges in regular polygon hole can be
Any other even number, it is ensured that elastic joint part 32 arrange uniformly and stable connection, so as to inhibit inessential vibration.
Preferably, gyroscope 100 includes substrate 10, and annular support plate 20 is fixed on back to the stacking of the side of vibrating member 30
On substrate 10.Preferably, substrate 10 is rectangular slab.Herein, substrate 10 is added, the whole intensity of gyroscope 100 can be increased.
Gyroscope 100 provided in an embodiment of the present invention detects the principle of angular speed are as follows: vibrating member 30 is set up in circumferential support
On plate 20, when being made vibrating member 30 rotate by extraneous active force, electric current changes, and then detects angle speed
Degree.The elasticity that multiple elastic joint parts 32 had both maintained rotation is arranged in 100 simple structure of gyroscope provided in an embodiment of the present invention
It can inhibit unnecessary vibration again;And elastic joint part 32 is provided with the arc body of rod 321 with 31 concentric of annulus, so that
Entire 30 structure of vibrating member is without acute angle, while keeping elasticity and resisting non-essential vibration performance, it is easier to manufacture.
Above-described is only embodiments of the present invention, it should be noted here that for those of ordinary skill in the art
For, without departing from the concept of the premise of the invention, improvement can also be made, but these belong to protection model of the invention
It encloses.
Claims (10)
1. a kind of gyroscope, which is characterized in that including annular support plate and it is set up in the vibrating member of the annular support plate side,
The vibrating member includes annulus and multiple circumferentially-spaced around being set to the elasticity of the annulus periphery along the annulus
Interconnecting piece, each elastic joint part include it is arc-shaped extension and interval be set to the annulus periphery the arc body of rod,
It first body of rod that is connected between the arc body of rod and the annulus periphery wall and is fixed on from arc body of rod extension
Second body of rod on the annular support plate, each arc body of rod is along one and the circle spacing point of the annulus concentric
Cloth.
2. gyroscope according to claim 1, which is characterized in that each elastic joint part includes the arc
The shape body of rod, two first bodies of rod and second body of rod, described two first bodies of rod are respectively from the arc body of rod
Both ends extend the periphery wall for connecting the annulus, second body of rod connects the arc body of rod and the circumferential support
Plate.
3. gyroscope according to claim 2, which is characterized in that second body of rod is connected in the arc body of rod
At point;And/or
The junction of second body of rod and the annular support plate is provided with the pin for electric connection.
4. gyroscope according to claim 3, which is characterized in that second body of rod connect to be formed with the arc body of rod
Angle and first body of rod connect with the annulus angle to be formed both greater than or be equal to 90 degree.
5. gyroscope according to claim 4, which is characterized in that the quantity of the elastic joint part is even number, and described
Even number elastic joint part is circumferentially spacedly distributed.
6. gyroscope according to any one of claims 2 to 5, which is characterized in that the annular support plate has in hollow
Hole, the central axis of the hollow inner hole and the center overlapping of axles of the annulus.
7. gyroscope according to claim 6, which is characterized in that the hollow inner hole is positive polygonal hole.
8. gyroscope according to claim 7, which is characterized in that the number of edges in the regular polygon hole is even number, and described
The number of edges in regular polygon hole is identical as the quantity of the elastic joint part, and each second body of rod corresponds described just more respectively
It midpoint in Xing Kongge and is connected on the annular support plate.
9. gyroscope according to any one of claims 1 to 5, which is characterized in that the vibrating member is made of metal;And/
Or,
The vibrating member is integrally formed.
10. gyroscope according to any one of claims 1 to 5, which is characterized in that the gyroscope further includes substrate, institute
State being fixed on the substrate back to the stacking of the side of the vibrating member for annular support plate.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910276698.2A CN109900262B (en) | 2019-04-08 | 2019-04-08 | Gyroscope |
PCT/CN2019/083326 WO2020206712A1 (en) | 2019-04-08 | 2019-04-19 | Gyroscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910276698.2A CN109900262B (en) | 2019-04-08 | 2019-04-08 | Gyroscope |
Publications (2)
Publication Number | Publication Date |
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CN109900262A true CN109900262A (en) | 2019-06-18 |
CN109900262B CN109900262B (en) | 2021-08-10 |
Family
ID=66954732
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201910276698.2A Active CN109900262B (en) | 2019-04-08 | 2019-04-08 | Gyroscope |
Country Status (2)
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CN (1) | CN109900262B (en) |
WO (1) | WO2020206712A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110631569A (en) * | 2019-10-12 | 2019-12-31 | 东南大学 | MEMS single-ring annular vibration gyro structure |
CN112857351A (en) * | 2021-04-15 | 2021-05-28 | 中北大学 | Double-ring type micromechanical gyroscope structure with wide range and high precision |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090100930A1 (en) * | 2007-09-11 | 2009-04-23 | Stmicroelectronics S.R.L. | High sensitivity microelectromechanical sensor with rotary driving motion |
EP1212585B1 (en) * | 1999-09-17 | 2010-08-04 | Kionix, Inc. | Electrically decoupled micromachined gyroscope |
CN102089620A (en) * | 2008-07-12 | 2011-06-08 | 大西洋惯性***有限公司 | Improvements in or relating to vibrating structure gyroscopes |
CN102246003A (en) * | 2008-12-09 | 2011-11-16 | 株式会社村田制作所 | Oscillating gyro element and manufacturing method therefor |
CN102252665A (en) * | 2011-04-20 | 2011-11-23 | 上海交通大学 | Packaging structure for all-solid-state oscillating micro gyroscope |
CN104132658A (en) * | 2013-04-30 | 2014-11-05 | 大西洋惯性***有限公司 | Mems sensor |
CN106289215A (en) * | 2016-10-21 | 2017-01-04 | 中北大学 | A kind of holohedral symmetry U-shaped beam MEMS annular vibration gyro harmonic oscillator structure |
CN106643685A (en) * | 2016-11-07 | 2017-05-10 | 中北大学 | Brand new U-shaped foldable beam silicon micro-annular vibration gyroscope |
CN206341427U (en) * | 2016-10-25 | 2017-07-18 | 瑞声科技(新加坡)有限公司 | Mems microphone |
CN107607100A (en) * | 2017-10-19 | 2018-01-19 | 北方电子研究院安徽有限公司 | A kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure |
EP3441719A1 (en) * | 2017-08-07 | 2019-02-13 | Atlantic Inertial Systems Limited | Angular rate sensor |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2322196B (en) * | 1997-02-18 | 2000-10-18 | British Aerospace | A vibrating structure gyroscope |
GB9817347D0 (en) * | 1998-08-11 | 1998-10-07 | British Aerospace | An angular rate sensor |
GB0122256D0 (en) * | 2001-09-14 | 2001-11-07 | Bae Systems Plc | Vibratory gyroscopic rate sensor |
CN2618143Y (en) * | 2003-05-30 | 2004-05-26 | 财团法人工业技术研究院 | Annular body and bearing structure of vibration style annular gyroscope |
GB0625005D0 (en) * | 2006-12-15 | 2007-01-24 | Bae Systems Plc | Improvements in or relating to a gyroscope |
CN104165623B (en) * | 2014-08-08 | 2017-02-15 | 上海交通大学 | Internal-external double-electrode type miniature hemispherical resonance gyroscope and preparation method thereof |
CN106643686B (en) * | 2016-11-07 | 2020-04-17 | 中北大学 | Silicon micro-ring vibration gyro harmonic oscillator structure with fully-symmetrical folding elastic beams |
-
2019
- 2019-04-08 CN CN201910276698.2A patent/CN109900262B/en active Active
- 2019-04-19 WO PCT/CN2019/083326 patent/WO2020206712A1/en active Application Filing
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1212585B1 (en) * | 1999-09-17 | 2010-08-04 | Kionix, Inc. | Electrically decoupled micromachined gyroscope |
US20090100930A1 (en) * | 2007-09-11 | 2009-04-23 | Stmicroelectronics S.R.L. | High sensitivity microelectromechanical sensor with rotary driving motion |
CN102089620A (en) * | 2008-07-12 | 2011-06-08 | 大西洋惯性***有限公司 | Improvements in or relating to vibrating structure gyroscopes |
CN102246003A (en) * | 2008-12-09 | 2011-11-16 | 株式会社村田制作所 | Oscillating gyro element and manufacturing method therefor |
CN102252665A (en) * | 2011-04-20 | 2011-11-23 | 上海交通大学 | Packaging structure for all-solid-state oscillating micro gyroscope |
CN104132658A (en) * | 2013-04-30 | 2014-11-05 | 大西洋惯性***有限公司 | Mems sensor |
CN106289215A (en) * | 2016-10-21 | 2017-01-04 | 中北大学 | A kind of holohedral symmetry U-shaped beam MEMS annular vibration gyro harmonic oscillator structure |
CN206341427U (en) * | 2016-10-25 | 2017-07-18 | 瑞声科技(新加坡)有限公司 | Mems microphone |
CN106643685A (en) * | 2016-11-07 | 2017-05-10 | 中北大学 | Brand new U-shaped foldable beam silicon micro-annular vibration gyroscope |
EP3441719A1 (en) * | 2017-08-07 | 2019-02-13 | Atlantic Inertial Systems Limited | Angular rate sensor |
CN107607100A (en) * | 2017-10-19 | 2018-01-19 | 北方电子研究院安徽有限公司 | A kind of silicon micro mechanical angular oscillation gyro shock resistance elastic bolster guide structure |
Non-Patent Citations (2)
Title |
---|
YONGCUN HAO 等: "A novel packaging stress isolation structure for SOI based MEMS gyroscopes", 《2016 IEEE SENSORS》 * |
栾清磊 等: "圆柱壳体振动陀螺谐振子的品质因数研究", 《传感技术学报》 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110631569A (en) * | 2019-10-12 | 2019-12-31 | 东南大学 | MEMS single-ring annular vibration gyro structure |
CN112857351A (en) * | 2021-04-15 | 2021-05-28 | 中北大学 | Double-ring type micromechanical gyroscope structure with wide range and high precision |
CN112857351B (en) * | 2021-04-15 | 2022-03-25 | 中北大学 | Double-ring type micromechanical gyroscope structure with wide range and high precision |
Also Published As
Publication number | Publication date |
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WO2020206712A1 (en) | 2020-10-15 |
CN109900262B (en) | 2021-08-10 |
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