CN112584597A - Device for activating large-volume getter and enhancing adsorption rate by heating and radio frequency discharge plasma - Google Patents
Device for activating large-volume getter and enhancing adsorption rate by heating and radio frequency discharge plasma Download PDFInfo
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- CN112584597A CN112584597A CN201910937360.7A CN201910937360A CN112584597A CN 112584597 A CN112584597 A CN 112584597A CN 201910937360 A CN201910937360 A CN 201910937360A CN 112584597 A CN112584597 A CN 112584597A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
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- H—ELECTRICITY
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- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/42—Heating elements having the shape of rods or tubes non-flexible
Abstract
A device for heating and radio frequency discharge plasma to activate a large-volume getter and enhance the adsorption rate comprises a vacuum chamber, a vacuum pumping system component, a gas supply system component, an electric heating system, a radio frequency power supply system and a gas pressure acquisition system component. When the vacuum chamber obtains vacuum through the vacuum pumping system components such as a ball valve, a mechanical pump and the like, and the gas type and the pressure intensity are adjusted by the gas supply system components such as a gas supply source, a mass flowmeter and the like, the getter arranged in the hollow cylinder with the hole in the wall surface is activated to suck gas through the electric heating system consisting of the electric heating rod, the heating power supply and the ground wire, and the radio frequency power supply system consisting of the radio frequency power supply, the high-frequency coaxial wire and the radio frequency coupling coil is started to generate plasma. The gas suction rate is improved after the generation of plasma is monitored by acquisition system components such as a vacuum gauge, a vacuum gauge display, a digital information acquisition card and a computer.
Description
Technical Field
The invention belongs to the fields of thermal, electromagnetic and material application, and particularly relates to a device for activating a large-volume getter and enhancing the adsorption rate by heating and radio frequency discharge plasma
Background
Currently, many fields of industrial application and basic scientific research are carried out in vacuum environment, including coating, heat treatment, micro-electro-mechanical systems, surface science, atomic physics, nanotechnology, semiconductor industry, etc. For the vacuum technology, the working range and efficiency are directly affected by the size of the internal vacuum environment and the vacuum degree, and particularly after the 21 st century, with the continuous improvement of various application indexes and the deepening of basic subject research, the operation and research environment of the vacuum technology need high vacuum or even ultrahigh vacuum of different degrees for maintenance, which also puts higher requirements and challenges on the process of the vacuum packaging process and the means for obtaining the subsequent vacuum environment. Therefore, in addition to the conventional vacuum acquisition means such as mechanical pump, molecular pump, cryopump, etc., the vacuum adsorption technology developed based on getter materials is also receiving attention and has shown more important role.
Non-Evaporable getters (NEG) have been used in scientific research and industrial production of electric vacuum devices, ultra-high vacuum getters, atomic energy industries, and the like, due to their characteristics of low equilibrium gas pressure, large gas-absorbing capacity, high gas-absorbing rate, and the like. Generally, the getter materials of this type require heating treatment during operation, and the getter has a gettering function, which is called the getter activation process. The conventional process of activating the getter generally uses a heating wire or a heating rod to heat, and the getter is activated at a high temperature and starts to absorb gas.
However, although NEG has unique advantages and has been widely used in high vacuum and ultra-high vacuum devices, with the acceleration of industrialization process in new century in China, the limitations of this type of gettering mode are gradually reflected: industrial devices are no longer limited to small vacuum devices (such as a chemical laser adsorption system), amplification is often required, and when a large device obtains high vacuum, a getter is still required to be used for adsorption treatment on the basis of a conventional acquisition means. The technical problem is how to ensure the encapsulation and the air suction of the large-volume getter. Secondly, when the getter is activated by heating, the electrothermal conversion efficiency is relatively low, the getter can be activated to absorb gas to achieve the purpose of obtaining higher vacuum usually after a period of time, and particularly for the getter materials in an amplified industrial device and a large volume, the getter materials can be activated for a longer time, so that not only energy needs to be stably and continuously injected for a long time, but also the applicability is lower in flexible, mobile and quick activated getter occasions. The getter has selectivity to the adsorption of part of the gas, and the gas suction rate can be greatly influenced according to the different types of the gas. At the same time, considerable differences are associated with the temperature and time of getter activation. For a part of the gas which is difficult to absorb, such as nitrogen, high temperature of several hundred degrees centigrade is often required to activate the getter, and the gettering rate after activation is slow. How to effectively increase the amount of the getter is very important for the absorption rate of the gas which is difficult to absorb.
The presence of these problems sometimes limits the overall functional utility of the getter and it is important to find a device that can be adapted to the current needs of high volume getter applications and that has an increased activation time and improved sorption rate.
Disclosure of Invention
The present invention has been made in view of the above facts, and aims to provide a device for heating and rf discharge plasma to activate a large-volume getter and enhance the gettering rate, in view of the problems of long activation time and slow gettering rate of a portion of gas in the conventional heated getter. The invention can be suitable for the application requirements of large-size devices requiring large-size getters, can effectively make up for the defect of long activation time of the large-size getters in a simple heating method through heating and radio frequency electromagnetic field coupling modes, can increase the number of active particles correspondingly through plasmas generated by discharge, improves the defect of slow gas suction rate of the getters for some gases difficult to adsorb, and further accelerates the gas suction rate of a system.
In order to realize the purpose of the invention, the following technical scheme is adopted for realizing the purpose:
an apparatus for heating and rf discharge plasma activating a bulk getter and enhancing the rate of sorption, comprising:
the device comprises a vacuum chamber, a vacuum pumping system assembly, an air supply system assembly, an air pressure acquisition system assembly, an electric heating system and a radio frequency power supply system;
the vacuum chamber comprises a hollow container which is made of insulating materials and is provided with openings at the upper end and the lower end; the open end of the hollow container is sealed by a sealing flange; a hollow cylinder with a getter arranged inside and an opening at the upper end and a closed lower end is arranged in the middle of the hollow container, and a plurality of through holes are uniformly distributed on the side wall surface of the hollow cylinder;
an electric heating element (such as an electric bar or an electric heating tube) for heating the getter is arranged in the hollow cylinder body, and the electric heating element is electrically connected with an external power supply;
a radio frequency coupling coil is wound on the outer wall surface of the middle part of the hollow container, one end of the radio frequency coupling coil is connected with the radio frequency voltage output end of a radio frequency power supply through a high-frequency coaxial line, and the other end of the radio frequency coupling coil is grounded;
the vacuum chamber is communicated with a vacuum pumping system component (such as an inlet of a vacuum pump) and a gas supply system component (such as a gas supply source) through pipelines; an air pressure acquisition system component (such as a vacuum gauge) for measuring the internal pressure of the vacuum chamber is arranged on the vacuum chamber.
The vacuum chamber is mainly used for generating a vacuum environment, and a getter is placed in the vacuum chamber and mainly comprises a hollow container and a sealing flange; the hollow container is made of a sealable and high-temperature-resistant insulating material, such as quartz or ceramic; the shape of the hollow cylinder is that the outer wall of the bottom end of the hollow cylinder is provided with a radial annular boss; the bottom end of the hollow container is sealed by a sealing flange (an upper cover and a lower cover) and a graphite sealing gasket, a screw and a nut, and the top end of the hollow container is sealed by a sealing flange (an upper cover and a lower cover), a sealing O-ring, a screw and a nut; the lower cover and the upper cover of the sealing flange at the bottom end of the hollow container are sealed by a graphite sealing gasket and screws and nuts, and the lower cover of the sealing flange at the bottom end of the vacuum cavity is welded with a through interface, so that a heating rod in an electric heating system can be inserted into the vacuum cavity through an adaptive joint and sealed; the lower cover and the upper cover of the sealing flange at the top end of the hollow container are sealed by screws and nuts through sealing O rings; in addition, the upper cover of the sealing flange at the top end of the vacuum cavity is provided with two open interfaces which are respectively connected with the air pressure acquisition system assembly, the vacuum pumping system assembly and the air supply system assembly.
The vacuum pumping system component comprises two ball valves with controllable gas flow and a mechanical pump; the mechanical pump is hermetically connected with the vacuum chamber through the two ball valves, the air feed pipe and the adaptive joint, so that the vacuum chamber reaches a low-pressure vacuum level;
the gas supply system component comprises a gas supply source and a vacuum mass flow meter, the gas supply source is hermetically connected with the vacuum chamber through the vacuum mass flow meter, the gas supply pipe and the adapter, the type and the pressure of gas in the vacuum chamber can be adjusted by changing the gas supply source, and the flow rate of the gas can be controlled by the mass flow meter.
The sealing flange is one or more than two of metal materials such as stainless steel, aluminum, iron, copper and alloy thereof, the air supply pipe can be one or more than two of metal hard pipes such as stainless steel, iron and the like, and can also be one or more than two of high-temperature and high-pressure resistant insulating pipes such as polytetrafluoroethylene, Teflon and the like; the adaptive joint can be one or more than two of a flange, a KF joint, a stainless steel straight joint and a tetrafluoro straight joint; the two ball valves can control the vacuum pumping speed of the mechanical pump; the mass flow meter can control the steady state air pressure in the vacuum chamber at a constant air flow rate.
The getter containing cylinder body is a hollow cylinder with a hole in the wall surface, and a detachable threaded sealing cover is arranged at an opening at the upper end of the getter containing cylinder body; the hollow cylinder with the through hole on the wall surface is made of metal materials and is used for containing getter materials; the lower end of the cylinder is welded with the lower cover of the flange at the bottom end of the vacuum cavity into a whole, and the center line of the cylinder is superposed with the center line of the straight-through interface welded on the lower cover of the flange at the bottom end of the vacuum cavity; the upper end of the hollow cylinder with the hole on the wall surface is provided with a thread, and the getter material can be filled, contained and replaced by opening and closing the threaded sealing cover.
The outer diameter of the hollow cylinder with the hole on the wall surface is smaller than the inner diameter of the hollow container, and the length of the hollow cylinder is smaller than the length of the hollow container, so that the hollow cylinder needs to be placed in the hollow container during working.
The electric heating rod, the power supply and the ground wire form an electric heating system. The electric heating element is an electric heating rod made of materials such as iron-chromium-aluminum or nickel-chromium electrothermal alloy and the like, and the power supply can be an alternating current power supply or a direct current power supply; when the electric heating system works, one end of each of the two leads of the electric heating rod is connected with the high voltage of the heating power supply, and the other end of each of the two leads of the electric heating rod is connected with the low voltage end of the heating power supply and the ground wire.
The radio frequency power supply, the high-frequency coaxial line, the grounding wire and the radio frequency coupling coil form a radio frequency power supply system; the radio frequency coupling coil is sleeved outside the hollow container and is respectively connected to the high-voltage output end of the radio frequency power supply and the grounding wire through a high-frequency coaxial wire and a conducting wire, so that a radio frequency electric field is generated on the coupling coil, and the effect of generating plasma inside the vacuum chamber is achieved;
the electric heating rod is inserted into the hollow cylinder with holes on the wall surface for containing the getters through a through port of the lower cover of the sealing flange at the bottom end of the vacuum cavity. The sealing flange at the bottom end of the whole vacuum cavity is grounded; when the electric heating system works to activate the getter, when the output power of the radio frequency power supply acts on the vacuum chamber through the radio frequency coupling coil, plasma can be generated in the vacuum chamber, and meanwhile, radio frequency energy is coupled into the sealing flange at the bottom end of the vacuum chamber containing the getter and grounded and the hollow cylinder with holes in the wall surface, so that the getter can be quickly activated by the device, the gas suction rate of the getter in the vacuum chamber is increased through active ingredients generated in the plasma, and the time of the whole vacuum chamber reaching an expected vacuum target is shortened.
The radio frequency power supply consists of a power generator and a matcher, wherein a radio frequency signal is generated by the power generator and is regulated and output by the matcher, and the output power is 50-10000 watts; the rf coupling coil is a spiral metal coil, the material of the rf coupling coil may be one or more of copper, iron, nickel, stainless steel, and other metals or alloys, and the winding of the spiral coil may be a metal wire or a metal tube.
The air pressure acquisition system component consists of a vacuum gauge, a vacuum gauge display, a digital information acquisition card and a computer; the vacuum gauge is connected with the vacuum chamber through an air pipe and an adaptive joint, and the air pressure value is read by a vacuum gauge display through a transmission line. The display of the vacuum gauge can be connected with a computer through a data transmission line and a collection card, and can directly collect the air pressure change curve through corresponding software on the computer.
Drawings
FIG. 1 is a schematic diagram of a device for heating and RF discharge plasma activation of a bulk getter and enhanced gettering rate, wherein the reference numbers: 1-a hollow container; 2-sealing the flange upper cover at the bottom end of the vacuum cavity; 3-sealing a lower cover of the flange at the bottom end of the vacuum cavity; 4-graphite sealing gasket; 5-a screw; 6-a nut; 7-a pass-through interface; 8, sealing a lower cover of the flange at the top end of the vacuum cavity; 9-sealing the flange upper cover at the top end of the vacuum cavity; 10-sealing an O-ring; 11-a vent interface; 12-an air supply pipe; 13-an adaptation interface; 14-valve control 1; 15-valve control 2; 16-a mechanical pump; 17-a mass flow meter; 18-a gas supply source; 19-a hollow cylinder; 20-threaded cap; 21-a getter; 22-an electrical heating rod; 23-a wire; 24-a heating power supply; 25-ground line; 26-a radio frequency power supply; 27-high frequency coaxial line; 28-a radio frequency coupling coil; 29-vacuum gauge; 30-vacuum gauge display; 31-digital information acquisition card; 32-computer
The views in the drawings are schematic and not drawn to scale. However, the same or similar parts in different figures are given the same reference numerals.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the drawings of the embodiments of the present invention, and further detailed description will be given, but the embodiments of the present invention are not limited thereto.
The figure is a schematic diagram of a device for heating and RF discharge plasma activating a bulk getter and enhancing the rate of sorption, comprising a vacuum chamber, a vacuum pumping system component, a gas supply system component, an electrical heating system, an RF power supply system, a gas pressure acquisition system component, and a getter.
The vacuum chamber consists of 1-hollow container; 2-sealing the flange upper cover at the bottom end of the vacuum cavity; 3-sealing a lower cover of the flange at the bottom end of the vacuum cavity; 4-graphite sealing gasket; 5-a screw; 6-a nut; 7-a pass-through interface; 8, sealing a lower cover of the flange at the top end of the vacuum cavity; 9-sealing the flange upper cover at the top end of the vacuum cavity; 10-sealing O ring.
The hollow container is made of an insulating material capable of being sealed and resisting high temperature, is in the shape of a hollow cylinder with a radial annular boss on the outer wall of the bottom end, and is mainly used for providing a low-pressure environment and serving as a carrier for generating plasma. The bottom end of the hollow container needs to pass through an upper cover of the sealing flange; sealing the lower cover of the flange; a graphite sealing gasket; a screw; the nut is sealed. The lower cover of the sealing flange at the bottom end of the vacuum cavity is welded with the through interface, and a heating rod in the electric heating system can be inserted into the vacuum cavity through the adaptive joint and sealed. The top end of the hollow container is sealed by a sealing flange, and the lower cover and the upper cover of the sealing flange are sealed by sealing O rings and screws and nuts. The upper cover of the sealing flange at the top end of the vacuum cavity is provided with a plurality of open 11-vent interfaces which are respectively connected with an air pressure vacuum pumping system component, an air supply system component and an acquisition system component.
The vacuum pumping system component consists of 12-air supply pipes; 13-an adaptation interface; 14-ball valve 1; 15-ball valve 2; 16-mechanical pump. The air feed pipe is a metal pipe or a high-voltage-resistant insulating pipe and is connected with the vacuum chamber, the adaptive interface, the ball valve 1, the ball valve 2 and the mechanical pump. The mechanical pump is started to pump the gas in the vacuum chamber to obtain vacuum, and the initial vacuum degree and the pumping speed of the mechanical pump are controllable through the ball valve 1 and the ball valve 2.
The air supply system component consists of 12-air supply pipes; 13-an adaptation interface; 17-a mass flow meter; 18-supply gas source. Similarly, the air feed pipe is connected with the vacuum chamber and is connected with the mass flowmeter and the air feed source through the adaptive interface. The gas supply source can inject different kinds of gas into the vacuum chamber at a constant speed through the mass flow meter and change the pressure, so that the kinds and the pressure of the gas in the vacuum chamber can be adjusted.
The getter containing component is 19-a hollow cylinder; 20-a threaded cover, and the hollow cylinder is a hollow metal cylinder with a through hole on the wall surface and is used for containing 21-getter. The lower end of the hollow cylinder body and the lower flange cover at the bottom end of the vacuum cavity are welded into a whole, and the central line of the hollow cylinder body is superposed with the central line of the through interface welded on the lower cover at the bottom end of the vacuum cavity. The upper end of the hollow cylinder body is provided with threads, and the getter can be added, contained and replaced by screwing or opening the threaded sealing cover. The outer diameter and the length of the hollow cylinder with the hole on the wall surface are both smaller than those of the hollow container, and the hollow cylinder needs to be placed in the hollow container during working.
The electric heating system consists of 22-electric heating rods; 23-a wire; 24-a heating power supply; 25-ground wire, the electric heating rod is made of materials such as iron-chromium-aluminum, nickel-chromium electrothermal alloy and the like, is inserted into the hollow cylinder body for containing the getter through a through interface of the lower cover of the sealing flange at the bottom end of the vacuum cavity, and is sealed through an adaptive joint. One end of a lead at two ends of the electric heating rod is connected with the high-voltage output end of the heating power supply, and the other end of the lead is connected with the low-voltage end of the heating power supply and the ground wire. The heating power supply can be an alternating current power supply or a direct current power supply.
The radio frequency power supply system consists of 26-radio frequency power supply; 27-high frequency coaxial line; 28-radio frequency coupling coil. The radio frequency power supply consists of a power generator and a matcher, can output a radio frequency signal of 50-10000 watts, and needs to act on a radio frequency coupling coil to work. The radio frequency coupling coil is a spiral metal coil, is nested outside the vacuum chamber and is respectively connected with the high-voltage output end of the radio frequency power supply and the ground wire through a high-frequency coaxial wire and a lead, so that plasma can be generated inside the vacuum chamber when the power of the radio frequency power supply is output.
The air pressure acquisition system component consists of a 29-vacuum gauge; 30-vacuum gauge display; 31-digital information acquisition card; 32-computer composition. The gauge is connected to the vacuum chamber via an air feed tube for monitoring the pressure and changes therein, the indication being readable from a gauge display. Meanwhile, the pressure change displayed on the display of the barometer can be acquired by the digital information acquisition card and software on a computer, so that the pressure change condition in the vacuum chamber can be effectively and rapidly measured.
The device firstly extracts gas in the vacuum chamber through the vacuum-pumping system component to obtain a lower air pressure environment when the getter works. The working air pressure and the gas type can be properly adjusted within a certain range through the gas supply system component. The bottom end of the vacuum cavity is connected with a ground wire through a sealing flange, the radio frequency power supply is started after the getter in the hollow cylinder with the hole in the wall surface is heated and activated through the heating system, the radio frequency power supply system can further couple energy into the getter containing assembly and enable the inside of the vacuum cavity to generate plasma, the activation time of the getter is prolonged by means of the coupling energy of the electric heating and radio frequency power supply system, and meanwhile, the gas suction rate of the getter in the whole device can be increased through active species generated in the plasma.
In summary, the device for activating a bulk getter and enhancing the gettering rate by heating and rf discharge plasma is a novel technique, and the inventors expect that the invention will be protected within the scope defined by the claims.
Claims (10)
1. An apparatus for heating and rf discharge plasma activating a bulk getter and enhancing the rate of sorption, comprising:
the device comprises a vacuum chamber, a vacuum pumping system assembly, an air supply system assembly, an air pressure acquisition system assembly, an electric heating system and a radio frequency power supply system;
the vacuum chamber comprises a hollow container which is made of insulating materials and is provided with openings at the upper end and the lower end; the open end of the hollow container is sealed by a sealing flange; a hollow cylinder with a getter arranged inside and an opening at the upper end and a closed lower end is arranged in the middle of the hollow container, and a plurality of through holes are uniformly distributed on the side wall surface of the hollow cylinder;
an electric heating element (such as an electric bar or an electric heating tube) for heating the getter is arranged in the hollow cylinder body, and the electric heating element is electrically connected with an external power supply;
a radio frequency coupling coil is wound on the outer wall surface of the middle part of the hollow container, one end of the radio frequency coupling coil is connected with the radio frequency voltage output end of a radio frequency power supply through a high-frequency coaxial line, and the other end of the radio frequency coupling coil is grounded;
the vacuum chamber is communicated with a vacuum pumping system component (such as an inlet of a vacuum pump) and a gas supply system component (such as a gas supply source) through pipelines; an air pressure acquisition system component (such as a vacuum gauge) for measuring the internal pressure of the vacuum chamber is arranged on the vacuum chamber.
2. The apparatus of claim 1, wherein: the vacuum chamber is mainly used for generating a vacuum environment, and a getter is placed in the vacuum chamber and mainly comprises a hollow container and a sealing flange;
the hollow container is made of a sealable and high-temperature-resistant insulating material, such as quartz or ceramic; the shape of the hollow cylinder is that the outer wall of the bottom end of the hollow cylinder is provided with a radial annular boss; the bottom end of the hollow container is sealed by a sealing flange (an upper cover and a lower cover) and a graphite sealing gasket, a screw and a nut, and the top end of the hollow container is sealed by a sealing flange (an upper cover and a lower cover), a sealing O-ring, a screw and a nut; the lower cover and the upper cover of the sealing flange at the bottom end of the hollow container are sealed by a graphite sealing gasket and screws and nuts, and the lower cover of the sealing flange at the bottom end of the vacuum cavity is welded with a through interface, so that a heating rod in an electric heating system can be inserted into the vacuum cavity through an adaptive joint and sealed; the lower cover and the upper cover of the sealing flange at the top end of the hollow container are sealed by screws and nuts through sealing O rings; in addition, the upper cover of the sealing flange at the top end of the vacuum cavity is provided with two open interfaces which are respectively connected with the air pressure acquisition system assembly, the vacuum pumping system assembly and the air supply system assembly.
3. The apparatus of claim 1, wherein: the vacuum pumping system component comprises two ball valves with controllable gas flow and a mechanical pump; the mechanical pump is hermetically connected with the vacuum chamber through the two ball valves, the air feed pipe and the adaptive joint, so that the vacuum chamber reaches a low-pressure vacuum level;
the gas supply system component comprises a gas supply source and a vacuum mass flow meter, the gas supply source is hermetically connected with the vacuum chamber through the vacuum mass flow meter, the gas supply pipe and the adapter, the type and the pressure of gas in the vacuum chamber can be adjusted by changing the gas supply source, and the flow rate of the gas can be controlled by the mass flow meter.
4. The device according to claim 1, 2 or 3, wherein the sealing flange is made of one or more metal materials such as stainless steel, aluminum, iron, copper and alloy thereof, the air supply pipe can be made of one or more metal hard pipes such as stainless steel and iron, and can also be made of one or more high-temperature and high-pressure resistant insulating pipes such as polytetrafluoroethylene and Teflon; the adaptive joint can be one or more than two of a flange, a KF joint, a stainless steel straight joint and a tetrafluoro straight joint; the two ball valves can control the vacuum pumping speed of the mechanical pump; the mass flow meter can control the steady state air pressure in the vacuum chamber at a constant air flow rate.
5. The apparatus of claim 1, wherein: the getter containing cylinder body is a hollow cylinder with a hole in the wall surface, and a detachable threaded sealing cover is arranged at an opening at the upper end of the getter containing cylinder body; the hollow cylinder with the through hole on the wall surface is made of metal materials and is used for containing getter materials; the lower end of the cylinder is welded with the lower cover of the flange at the bottom end of the vacuum cavity into a whole, and the center line of the cylinder is superposed with the center line of the straight-through interface welded on the lower cover of the flange at the bottom end of the vacuum cavity; the upper end of the hollow cylinder with the hole on the wall surface is provided with a thread, and the getter material can be filled, contained and replaced by opening and closing the threaded sealing cover.
6. The apparatus of claim 5, wherein: the outer diameter of the hollow cylinder with the hole on the wall surface is smaller than the inner diameter of the hollow container, and the length of the hollow cylinder is smaller than the length of the hollow container, so that the hollow cylinder needs to be placed in the hollow container during working.
7. The apparatus of claim 1, wherein: the electric heating system is composed of an electric heating rod, a power supply and a ground wire. The electric heating element is an electric heating rod made of materials such as iron-chromium-aluminum or nickel-chromium electrothermal alloy and the like, and the power supply can be an alternating current power supply or a direct current power supply; when the electric heating system works, one end of each of the two leads of the electric heating rod is connected with the high voltage of the heating power supply, and the other end of each of the two leads of the electric heating rod is connected with the low voltage end of the heating power supply and the ground wire.
8. The apparatus of claim 1, wherein: the radio frequency power supply, the high-frequency coaxial line, the grounding wire and the radio frequency coupling coil form a radio frequency power supply system; the radio frequency coupling coil is sleeved outside the hollow container and is respectively connected to the high-voltage output end of the radio frequency power supply and the grounding wire through a high-frequency coaxial wire and a conducting wire, so that a radio frequency electric field is generated on the coupling coil, and the effect of generating plasma inside the vacuum chamber is achieved;
the electric heating rod is inserted into the hollow cylinder with holes on the wall surface for containing the getters through a through port of the lower cover of the sealing flange at the bottom end of the vacuum cavity. The sealing flange at the bottom end of the whole vacuum cavity is grounded; when the electric heating system works to activate the getter, when the output power of the radio frequency power supply acts on the vacuum chamber through the radio frequency coupling coil, plasma can be generated in the vacuum chamber, and meanwhile, radio frequency energy is coupled into the sealing flange at the bottom end of the vacuum chamber containing the getter and grounded and the hollow cylinder with holes in the wall surface, so that the getter can be quickly activated by the device, the gas suction rate of the getter in the vacuum chamber is increased through active ingredients generated in the plasma, and the time of the whole vacuum chamber reaching an expected vacuum target is shortened.
9. The apparatus of claim 1 or 8, wherein: the radio frequency power supply consists of a power generator and a matcher, wherein a radio frequency signal is generated by the power generator and is regulated and output by the matcher, and the output power is 50-10000 watts; the rf coupling coil is a spiral metal coil, the material of the rf coupling coil may be one or more of copper, iron, nickel, stainless steel, and other metals or alloys, and the winding of the spiral coil may be a metal wire or a metal tube.
10. The apparatus of claim 1, wherein: the air pressure acquisition system component consists of a vacuum gauge, a vacuum gauge display, a digital information acquisition card and a computer; the vacuum gauge is connected with the vacuum chamber through an air pipe and an adaptive joint, and the air pressure value is read by a vacuum gauge display through a transmission line. The display of the vacuum gauge can be connected with a computer through a data transmission line and a collection card, and can directly collect the air pressure change curve through corresponding software on the computer.
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| CN113409961A (en) * | 2021-06-03 | 2021-09-17 | 长春理工大学 | Low-energy nuclear reaction device for generating overheat by electromagnetic trigger gas and metal and heat generating method thereof |
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