CN109001170A - A kind of space fluorescence spectrum measuring apparatus and method - Google Patents

A kind of space fluorescence spectrum measuring apparatus and method Download PDF

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Publication number
CN109001170A
CN109001170A CN201810858326.6A CN201810858326A CN109001170A CN 109001170 A CN109001170 A CN 109001170A CN 201810858326 A CN201810858326 A CN 201810858326A CN 109001170 A CN109001170 A CN 109001170A
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CN
China
Prior art keywords
laser
fluorescence spectrum
measuring apparatus
sample
baffle
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CN201810858326.6A
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Chinese (zh)
Inventor
金策
刘涛
熊明
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Research Institute of Physical and Chemical Engineering of Nuclear Industry
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Research Institute of Physical and Chemical Engineering of Nuclear Industry
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Priority to CN201810858326.6A priority Critical patent/CN109001170A/en
Publication of CN109001170A publication Critical patent/CN109001170A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/6402Atomic fluorescence; Laser induced fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/6456Spatial resolved fluorescence measurements; Imaging

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  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

The invention discloses a kind of space fluorescence spectrum measuring apparatus and methods; device includes providing module, spectrometer and computer with reaction vessel, laser; the present apparatus measures the measuring device of space fluorescence spectrum for alkali metal under conditions of different othermohygrometers; protective gas is provided when testing and the adjustment of measuring air pressure can be carried out for the property of sample to be tested; and the acquisition of fluorescence data is carried out using the tracking probe that can carry out horizontal position adjustment, the fluorescence spectrum suitable for alkali metal is tested.

Description

A kind of space fluorescence spectrum measuring apparatus and method
Technical field
The invention belongs to laser spectrum tech fields, and in particular to a kind of space fluorescence spectrum measuring apparatus and method.
Background technique
Laser spectrum tech has been an emerging science growing up on the basis of classical spectrum since laser technology occurs Technology.With the scientific and technological progress of every field, the limiting snesibility of analysis, the resolution ratio of spectrum, time and space are measured Resolution ratio suffers from very big promotion.The development of spectroscopy is particularly important to pushing the development of physics to serve.And it surveys Quantity space fluorescence spectrum is a branch of laser spectrum measurement, also has important meaning for the research of physical phenomenon Justice.Because space fluorescence spectrum has different air pressure and temperature for different substances especially alkali metal in measurement and wants It asks, so to design a set of measurement dress for measuring space fluorescence spectrum under conditions of different othermohygrometers dedicated for alkali metal It sets.
Summary of the invention
It is an object of the invention to overcome the deficiencies of the prior art and provide a kind of for measuring the measurement of space fluorescence spectrum Device.
The present invention is achieved by the following technical solutions:
A kind of space fluorescence spectrum measuring apparatus, including for being heated to sample and providing the anti-of closed air environment Container is answered, the laser for exciting sample to issue fluorescence signal provides module, for acquiring the fluorescence signal of sample and being converted to The spectrometer of fluorescence data;
The reaction vessel includes closed at both ends and horizontally disposed transparent cylinder, with the perpendicular company of transparent cylinder Logical and its built-in heating mechanism heating cylinder, and be connected to the reaction vessel vacuum pump for providing vacuum environment, For providing the air distributing device of protective gas and for the gas cleaning plant of purification, the gas cleaning plant includes circulation Pump and purification device;
The laser provides the laser that module is launched and injects cylinder and focus on the metal vapors formed after sample heating On;
The spectrometer is set to the reaction vessel side to acquire fluorescence, including that can carry out horizontal position adjustment Tracking probe and monochromator.
In the above-mentioned technical solutions, the heating mechanism is crucible, and the crucible is by being set to outside reaction vessel Heating coil heated.
In the above-mentioned technical solutions, it includes laser, spectroscope, wavemeter and beam expanding lens that the laser, which provides module, The shoot laser of the laser after spectroscope and beam expanding lens by being irradiated on the metal vapors that sample is formed after the heating.
In the above-mentioned technical solutions, the circulating pump includes the support frame for being provided with left plate and right side plate, is arranged on the right side Between side plate and left plate and it is driven the baffle that left and right moves back and forth, two sections are correspondingly arranged between left plate and baffle and right side Bellows between plate and baffle, the bellows both ends are sealedly and fixedly connected with baffle, left plate or right side plate respectively;It is described The lumen of bellows controlled be connected to through air inlet pipeline or outlet pipe with gas piping.
In the above-mentioned technical solutions, it is provided with lead screw between the left plate of support frame as described above and right side plate, is set on lead screw It is equipped with that be connected with baffle can be along the screw slide of guide screw movement;One end of the lead screw is provided with for controlling motor positive and inverse Limit switch, limit switch makes circulating pump the by matching manipulation circulating pump second stepper motor with interlocking relay Two stepping motor drives lead screw Direct/Reverse alternate rotation, and then realizes screw slide and the baffle being arranged on right side Reciprocating motion between plate and left plate.
In the above-mentioned technical solutions, left air cavity, the baffle and the right side are formed in the bellows between the baffle and left plate Right air cavity is formed in the bellows of side sheet room, and the first solenoid vacuum valve is set between the air inlet of the air inlet pipeline and left air cavity Door, is arranged the second ELECTROMAGNETIC VACUUM valve between the air inlet and right air cavity of air inlet pipeline, in the gas outlet and a left side of outlet pipe Third ELECTROMAGNETIC VACUUM valve is set between air cavity, the 4th solenoid vacuum valve is set between the gas outlet and right air cavity of outlet pipe Door.
In the above-mentioned technical solutions, the purification device includes shell, filter, getter and temperature control armouring calandria, shell Getter is placed at the middle part of body, and filter is arranged in the two sides of getter, and temperature control armouring calandria is arranged in external in shell.
In the above-mentioned technical solutions, the getter is zirconium vanadium iron.
In the above-mentioned technical solutions, the filter is in honeycomb.
A kind of space fluorescence spectral measuring method, carries out according to the following steps:
Step 1: sample to be tested is placed in crucible, it will be vacuumized in reaction vessel by vacuum pump, filled by distribution It sets and is filled with protective gas into reaction vessel;
Step 2: opening laser, the shoot laser of laser is made to pass through spectroscope and beam expanding lens vertical irradiation into reaction In container;
Step 3: being heated by heating coil to the sample in crucible, sample forms metal vapors after being heated, Laser irradiation is in metal vapors;
Step 4: open driver, driver drive the first stepper motor make tracking probe along Laser emission direction into Row moves horizontally and acquires fluorescence data;
Step 5: computer is obtained collected fluorescence data and is analyzed and processed using fluorescence measurement software.
In the above-mentioned technical solutions, in said step 1, to improve the protective gas purity being filled with, gas purification is filled It sets opening and circulating purification is carried out to protective gas.
The advantages and benefits of the present invention are: the present apparatus measures sky for alkali metal under conditions of different othermohygrometers Between fluorescence spectrum measuring device, when testing provide protective gas and can be directed to sample to be tested property carry out test gas The adjustment of pressure, and using the acquisition for the tracking probe progress fluorescence data that can carry out horizontal position adjustment, it is suitable for alkali gold The fluorescence spectrum of category is tested.
Detailed description of the invention
Fig. 1 is Integral connection structure schematic diagram of the present invention.
Fig. 2 is measurement module attachment structure schematic diagram.
Fig. 3 is tracking sonde configuration schematic diagram.
Fig. 4 provides module connection structure schematic diagram for laser.
Fig. 5 is evaporating principle schematic diagram.
Fig. 6 is purification device structural schematic diagram.
Wherein, 1 is reaction vessel, and 2 be air distributing device, and 3 be circulating pump, and 4 be purification device, and 5 be vacuum pump, and 6 be air pressure Meter, 7 be measurement module, and 8 provide module for laser, and 9 be monochromator, and 10 be computer, and 11 be driver, and 12 be tracking probe, 13 be the first stepper motor, and 14 be motorized precision translation stage, and 15 be measuring probe, and 16 be wavemeter, and 17 be laser, and 18 be to expand Mirror, 19 be spectroscope, and 20 be metal vapors, and 21 be laser, and 22 be crucible, and 23 be heating coil, and 24 be to excite fluorescence area, 25 It is filter for shell, 26,27 be getter, and 28 be temperature control armouring calandria, and 29 be the first ELECTROMAGNETIC VACUUM valve, and 30 be the second electricity Magnetic vacuum valve, 31 be third ELECTROMAGNETIC VACUUM valve, and 32 be the 4th ELECTROMAGNETIC VACUUM valve, and 33 be second stepper motor, and 34 be silk Thick stick, 35 be screw slide, and 36 be bellows, and 37 be baffle, and 38 be air inlet pipeline, and 39 be outlet pipe, and 40 be circulation pump frame, 42 be support frame, and 43 be sliding rail.
It for those of ordinary skill in the art, without creative efforts, can be according to above attached Figure obtains other relevant drawings.
Specific embodiment
In order to enable those skilled in the art to better understand the solution of the present invention, combined with specific embodiments below furtherly Bright technical solution of the present invention.
Embodiment 1
A kind of space fluorescence spectrum measuring apparatus, including for being heated to sample and providing the anti-of closed air environment Container 1 is answered, the laser for exciting sample to issue fluorescence signal provides module 8, for acquiring fluorescence signal and the conversion of sample At the spectrometer of fluorescence data, and receives fluorescence data and carry out the computer 10 of analysis comparison;
The reaction vessel is built-in with the crucible 22 for heating sample, and the reaction vessel connection is for providing vacuum ring The vacuum pump 5 in border, the air distributing device 2 for providing protective gas and for the gas cleaning plant of purification;
It includes laser 17, spectroscope 19, wavemeter 16 and beam expanding lens 18, the laser that the laser, which provides module, Shoot laser by being irradiated in the vertical direction of the crucible in reaction vessel after spectroscope and beam expanding lens, to focus on sample 20 on the metal vapors that product are formed after the heating;
The spectrometer includes the tracking probe 12 and monochromator 9 that can carry out horizontal position adjustment.
The reaction vessel is horizontally disposed transparent tube structure.The reaction vessel connection barometer 6 is anti-to test Answer air pressure in container.The crucible is heated by being set to the heating coil 23 outside reaction vessel.
Carry out alkali metal space fluorescence spectral measuring when, the sample emission wavelength used for 490nm, laser it is defeated Wavelength regulation is 980nm out, can select different type, no according to the difference of alkali metal Fluorescence Characteristic excitation wavelength to be measured The laser of co-wavelength, select in the present embodiment be the production of coherent company femto-second laser Mari-f900.
(1) sample to be tested is placed in crucible, will be vacuumized in reaction vessel by vacuum pump, by air distributing device to Protective gas is filled in reaction vessel;To improve the protective gas purity being filled with, gas cleaning plant is opened to protective gas Carry out circulating purification;
(2) laser is switched on and preheats 40min or so, keep the shoot laser of laser vertical by spectroscope and beam expanding lens It irradiates into reaction vessel;By beam expanding lens adjust laser beam spot sizes size, the variation of wavemeter real-time monitoring optical maser wavelength, Laser needed for spectroscope provides real-time online measuring for wavemeter;
(3) sample in crucible is heated by heating coil, sample forms metal vapors, laser after being heated It is irradiated in metal vapors;
(4) driver is opened, driver driving stepper motor makes tracking probe along the carry out level shifting of Laser emission direction It moves and acquires fluorescence data;
(5) computer is obtained collected fluorescence data and is analyzed using fluorescence measurement software Libraview Processing.
Embodiment 2
A kind of space fluorescence spectrum measuring apparatus, including for being heated to sample and providing the anti-of closed air environment Container 1 is answered, the laser for exciting sample to issue fluorescence signal provides module 8, for acquiring fluorescence signal and the conversion of sample At the spectrometer of fluorescence data, and receives fluorescence data and carry out the computer 10 of analysis comparison;
The reaction vessel is built-in with the crucible 22 for heating sample, and the reaction vessel connection is for providing vacuum ring The vacuum pump 5 in border, the air distributing device 2 for providing protective gas and for the gas cleaning plant of purification;
It includes laser 17, spectroscope 19, wavemeter 16 and beam expanding lens 18, the laser that the laser, which provides module, Shoot laser by being irradiated in the vertical direction of the crucible in reaction vessel after spectroscope and beam expanding lens, to focus on sample 20 on the metal vapors that product are formed after the heating;
The spectrometer includes the tracking probe 12 and monochromator 9 that can carry out horizontal position adjustment.
The sample is solid-state alkali metal.The gas cleaning plant includes circulating pump 3 and purification device 4, purification device Including shell 25, honeycomb filter 26, zirconium vanadium iron getter 27 and temperature control armouring calandria 28, zirconium vanadium iron is placed at the middle part of shell Getter, is arranged honeycomb filter in the two sides of getter, and temperature control armouring calandria is arranged in external in shell.The tracking is visited Head includes the first stepper motor 13, motorized precision translation stage 14 and measuring probe 15, and being provided on the first stepper motor can be along its water Smoothly dynamic motorized precision translation stage is provided with measuring probe on motorized precision translation stage.First stepper motor is connected with driver, drives Dynamic device provides driving force for stepper motor.
Embodiment 3
On the basis of embodiment 2, the structure of the circulating pump is as described below: circulating pump includes being provided with left plate and the right side The support frame 42 of side plate is arranged between right side plate and left plate and is driven the reciprocal baffle 37 in left and right, and two sections are correspondingly arranged at Bellows 36 between left plate and baffle and between right side plate and baffle, the bellows both ends respectively with baffle, left plate Or right side plate is sealedly and fixedly connected;The lumen of the bellows is controlled through air inlet pipeline 38 or outlet pipe 39 and gas piping Connection;
Support frame as described above bottom setting circulation pump frame 40;
The sliding rail 43 that baffle slides on for baffle is crossed in setting between the left plate and right side plate of support frame as described above;
It is provided with lead screw 34 between the left plate and right side plate of support frame as described above, is provided on lead screw and is connected with baffle The screw slide 35 that can be slided along lead screw;
One end of the lead screw is provided with the limit switch for controlling motor positive and inverse, limit switch by with it is interlocking Relay matches manipulation circulating pump second stepper motor 33, makes circulating pump second stepper motor driving lead screw Direct/Reverse alternating Rotation, and then realize the reciprocating motion of screw slide and the baffle being arranged between right side plate and left plate;
Left air cavity, shape in the bellows between the baffle and right side plate are formed in bellows between the baffle and left plate At right air cavity, the first ELECTROMAGNETIC VACUUM valve 29 is set, in air inlet pipeline between the air inlet of the air inlet pipeline and left air cavity Second ELECTROMAGNETIC VACUUM valve 30 is set between air inlet and right air cavity, is arranged between the gas outlet and left air cavity of outlet pipe The 4th ELECTROMAGNETIC VACUUM valve 32 is arranged in three ELECTROMAGNETIC VACUUM valves 31 between the gas outlet and right air cavity of outlet pipe.
When carrying out the circulation of protective gas using circulating pump: the rotation of second stepper motor passes to frame by shaft coupling and exists The screw slide on pump frame is recycled, screw slide can reciprocatingly move with the positive and negative rotation of lead screw, and whole system is controlled by PLC The second ELECTROMAGNETIC VACUUM valve, third ELECTROMAGNETIC VACUUM valve are opened in the reciprocating motion of stepper motor processed when baffle moves downward, and are closed Close the first ELECTROMAGNETIC VACUUM valve, the 4th ELECTROMAGNETIC VACUUM valve;The first ELECTROMAGNETIC VACUUM valve, the 4th are opened when baffle moves downward ELECTROMAGNETIC VACUUM valve closes the second ELECTROMAGNETIC VACUUM valve, third ELECTROMAGNETIC VACUUM valve;Gas in this way in system can be uninterrupted By purification device, and so on, in formation system gas recycle.Circulating pump, which often makes a round trip, can recycle 1L gas, press According to most fast 45 calculating reciprocal per minute of circulating pump, the limit of circulating pump recycles 45L per minute.
Illustrative description has been done to the present invention above, it should explanation, the case where not departing from core of the invention Under, any simple deformation, modification or other skilled in the art can not spend the equivalent replacement of creative work equal Fall into protection scope of the present invention.

Claims (12)

1. a kind of space fluorescence spectrum measuring apparatus, it is characterised in that: including for being heated to sample and providing closing gas The reaction vessel in pressure ring border, the laser for exciting sample to issue fluorescence signal provide module, and the fluorescence for acquiring sample is believed Number and be converted to the spectrometer of fluorescence data;
The reaction vessel includes closed at both ends and horizontally disposed transparent cylinder, with the transparent cylinder it is perpendicular be connected to and The heating cylinder of its built-in heating mechanism, and be connected to the reaction vessel vacuum pump for providing vacuum environment, be used for The air distributing device and gas cleaning plant for purification that protective gas is provided, the gas cleaning plant include circulating pump and Purification device;
The laser provides the laser that module is launched and injects cylinder and focus on the metal vapors formed after sample heating;
The spectrometer is set to the reaction vessel side to acquire fluorescence, the tracking including that can carry out horizontal position adjustment Probe and monochromator.
2. a kind of space fluorescence spectrum measuring apparatus according to claim 1, it is characterised in that: the heating mechanism is Crucible, the crucible are heated by being set to the heating coil outside reaction vessel.
3. a kind of space fluorescence spectrum measuring apparatus according to claim 1, it is characterised in that: the laser provides module Including laser, spectroscope, wavemeter and beam expanding lens, the shoot laser of the laser after spectroscope and beam expanding lens by shining It penetrates on the metal vapors that sample is formed after the heating.
4. a kind of space fluorescence spectrum measuring apparatus according to claim 1, it is characterised in that: the circulating pump includes setting It is equipped with the support frame of left plate and right side plate, is arranged between right side plate and left plate and is driven the baffle that left and right moves back and forth, Two sections of bellowss being correspondingly arranged between left plate and baffle and between right side plate and baffle, the bellows both ends respectively with Baffle, left plate or right side plate are sealedly and fixedly connected;The lumen of the bellows it is controlled through air inlet pipeline or outlet pipe with Gas piping connection.
5. a kind of space fluorescence spectrum measuring apparatus according to claim 4, it is characterised in that: on a left side for support frame as described above It is provided with lead screw between side plate and right side plate, is provided with that be connected with baffle can be along the screw slide of guide screw movement on lead screw;Institute The one end for stating lead screw is provided with limit switch for controlling motor positive and inverse, and limit switch with interlocking relay by matching Manipulation circulating pump second stepper motor is closed, circulating pump second stepper motor is made to drive lead screw Direct/Reverse alternate rotation, Jin Ershi The reciprocating motion of existing screw slide and the baffle being arranged between right side plate and left plate.
6. a kind of space fluorescence spectrum measuring apparatus according to claim 4, it is characterised in that: the baffle and left plate Between bellows in form left air cavity, right air cavity is formed in the bellows between the baffle and right side plate, the air inlet pipeline First ELECTROMAGNETIC VACUUM valve is set between air inlet and left air cavity, is arranged second between the air inlet and right air cavity of air inlet pipeline Third ELECTROMAGNETIC VACUUM valve is arranged, in outlet pipe in ELECTROMAGNETIC VACUUM valve between the gas outlet and left air cavity of outlet pipe 4th ELECTROMAGNETIC VACUUM valve is set between gas outlet and right air cavity.
7. a kind of space fluorescence spectrum measuring apparatus according to claim 1, it is characterised in that: the purification device includes Getter is placed at the middle part of shell, filter, getter and temperature control armouring calandria, shell, and filter is arranged in the two sides of getter, Temperature control armouring calandria is arranged in external in shell.
8. a kind of space fluorescence spectrum measuring apparatus according to claim 7, it is characterised in that: the getter is zirconium vanadium Iron.
9. a kind of space fluorescence spectrum measuring apparatus according to claim 7, it is characterised in that: the filter is in honeycomb Shape.
10. a kind of space fluorescence spectrum measuring apparatus according to claim 1, it is characterised in that: the tracking probe packet Include stepper motor, motorized precision translation stage and measuring probe, be provided on stepper motor can along its level sliding motorized precision translation stage, Measuring probe is provided on motorized precision translation stage.
11. a kind of space fluorescence spectral measuring method, carries out according to the following steps:
Step 1: sample to be tested is placed in crucible, will be vacuumized in reaction vessel by vacuum pump, by air distributing device to Protective gas is filled in reaction vessel;
Step 2: being heated by heating coil to the sample in crucible, sample forms metal vapors, laser after being heated It is irradiated in metal vapors;
Step 3: opening laser, the shoot laser of laser is made to pass through spectroscope and beam expanding lens vertical irradiation into reaction vessel It is interior;
Step 4: opening driver, driver driving stepper motor makes tracking probe along the carry out level shifting of Laser emission direction It moves and acquires fluorescence data.
12. a kind of space fluorescence spectral measuring method according to claim 11, it is characterised in that: in the step 1 In, gas cleaning plant is opened while being filled with protective gas, circulating purification is carried out to protective gas.
CN201810858326.6A 2018-07-31 2018-07-31 A kind of space fluorescence spectrum measuring apparatus and method Pending CN109001170A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112584597A (en) * 2019-09-30 2021-03-30 中国科学院大连化学物理研究所 Device for activating large-volume getter and enhancing adsorption rate by heating and radio frequency discharge plasma
CN112584598A (en) * 2019-09-30 2021-03-30 中国科学院大连化学物理研究所 Getter radio frequency activation device
CN112584595A (en) * 2019-09-30 2021-03-30 中国科学院大连化学物理研究所 Device for activating getter and enhancing absorption rate of getter by radio frequency discharge plasma
CN112569894A (en) * 2019-09-30 2021-03-30 中国科学院大连化学物理研究所 Device for activating large-volume getter and enhancing adsorption rate by radio frequency discharge plasma
CN114588738A (en) * 2020-12-07 2022-06-07 中国科学院大连化学物理研究所 Double-ring radio frequency capacitive coupling discharge plasma enhanced getter device

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CN205120569U (en) * 2015-10-26 2016-03-30 北京农业信息技术研究中心 Variable spectral detection ware of giving medicine to poor free of charge
CN206038510U (en) * 2016-08-31 2017-03-22 青岛明华电子仪器有限公司 Spectrum appearance constant temperature shock mounting and install device's ultraviolet flue gas analyzer
CN107293939A (en) * 2017-08-03 2017-10-24 中国人民解放军国防科学技术大学 A kind of adaptive narrow linewidth semiconductor laser frequency regulator

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JPH04363647A (en) * 1990-11-26 1992-12-16 Mitsubishi Heavy Ind Ltd Visualization method of alkali metal vapor
CN1667792A (en) * 2004-03-08 2005-09-14 上海翔山实业有限责任公司 Improved totally helical fluorescent lamp
CN1975387A (en) * 2006-12-12 2007-06-06 天津理工大学 Alkaline earth metal atom effective detecting method
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112584597A (en) * 2019-09-30 2021-03-30 中国科学院大连化学物理研究所 Device for activating large-volume getter and enhancing adsorption rate by heating and radio frequency discharge plasma
CN112584598A (en) * 2019-09-30 2021-03-30 中国科学院大连化学物理研究所 Getter radio frequency activation device
CN112584595A (en) * 2019-09-30 2021-03-30 中国科学院大连化学物理研究所 Device for activating getter and enhancing absorption rate of getter by radio frequency discharge plasma
CN112569894A (en) * 2019-09-30 2021-03-30 中国科学院大连化学物理研究所 Device for activating large-volume getter and enhancing adsorption rate by radio frequency discharge plasma
CN112569894B (en) * 2019-09-30 2022-03-08 中国科学院大连化学物理研究所 Device for activating large-volume getter and enhancing adsorption rate by radio frequency discharge plasma
CN114588738A (en) * 2020-12-07 2022-06-07 中国科学院大连化学物理研究所 Double-ring radio frequency capacitive coupling discharge plasma enhanced getter device
CN114588738B (en) * 2020-12-07 2022-11-15 中国科学院大连化学物理研究所 Double-ring radio frequency capacitive coupling discharge plasma enhanced getter device

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Application publication date: 20181214