CN101330794B - Jet apparatus capable of blocking discharging from generating low temperature plasma by atmos medium - Google Patents
Jet apparatus capable of blocking discharging from generating low temperature plasma by atmos medium Download PDFInfo
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- CN101330794B CN101330794B CN2008100181656A CN200810018165A CN101330794B CN 101330794 B CN101330794 B CN 101330794B CN 2008100181656 A CN2008100181656 A CN 2008100181656A CN 200810018165 A CN200810018165 A CN 200810018165A CN 101330794 B CN101330794 B CN 101330794B
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Abstract
A jetting device for a low-temperature plasma generated by the atmospheric dielectric barrier discharge relates to the technical field of the application of gas discharge plasma. Inert gas and air are used as working gas; the plasma generated in a discharge area is blown out in the form of jet; the problem of limited application range caused by the narrow parallel-plate dielectric barrier discharge area and a high plasma macroscopic temperature can be solved. The device has the structural characteristics that a hollow pipe-shaped connector is connected with a hollow dielectric pipe; an electrode coated with insulation dielectric is fixed at the center of the dielectric pipe; an annular electrode is closely attached to the outer wall of the dielectric pipe; the working gas enters the dielectric pipe from a flow meter and a retaining valve through the connector; the plasma is blown out to form the plasma jetting. The jetting device has the advantages of low plasma macroscopic temperature, large electron energy, wide expanded range, low cost, low energy consumption and high reliability; furthermore, the jetting device can used in the fields of sterilization and disinfection, the surface modification of complex-shaped material, waste gas treatment, ozone synthesis, as well as the physical and chemical fields of the discharge light source plasma.
Description
Technical field
The invention belongs to the gas discharge technical field, relate to a kind of generation device of discharge plasma.
Background technology
There is a large amount of active particles in the low temperature plasma; The active particle kind that chemical reactor produced than common is more, activity is stronger; Be easier to react with material surface that is contacted and biological cell; Therefore in a lot of fields extremely application prospects is arranged all, for example ozone is synthetic, material surface modifying, plasma etching, solid film deposition, sterilization, air pollution are handled or the like.In the prior art, though be easy to generate discharge plasma relatively uniformly under the low pressure, its production process needs vacuum environment, and this brings inconvenience to application; Comparatively speaking, the generation of plasma does not need expensive vacuum equipment under the atmospheric pressure, and domestic and international in recent years researcher pays special attention to the characteristic and the application of plasma under the normal pressure.
Dielectric barrier discharge (DBD) is as a kind of special gas discharge form; Through between electrode, introducing block media, can be when discharge takes place freely the increasing of restriction discharging current, stoped the formation of sparkover between electrode or arc discharge; Have the moderate characteristics of discharge energy density; And can take multiple discharging structure, mist and condition of work (input power, supply frequency, air pressure, air-flow), and have stronger adaptability, be fit to very much industrial applications.But common parallel plate-type atmospheric dielectric barrier discharge occurs over just the narrow and small zone between the two-plate because of region of discharge; Subject plasma produces the restriction of condition simultaneously; The temperature of the plasma that produces compares higher, thereby its industrial applicability has certain limitation.
Summary of the invention
To above-mentioned technical problem, the present invention proposes following technical scheme:
A kind of atmospheric dielectric barrier discharge produces the low-temperature plasma jet device; Comprise; Source of the gas, flowmeter, check-valves, and be linked in sequence, be provided with electrode and power supply through pipeline, an end of hollow tubular connector is connected with check-valves through pipeline; Its other end is connected with hollow medium Guan Yiduan hermetic seal; The axial location of medium tube is provided with central electrode, and an end of central electrode extends the outer wall of hollow medium pipe and connects an end of power supply, and the external electrode that the outer wall of hollow medium pipe is provided with its outer wall matches is connected the other end of power supply.
The tubular structure that said hollow medium pipe is both ends open, be made up of quartz glass, aluminium oxide ceramics or pmma material.Be arranged on the central electrode of hollow medium tube's axis position and all be coated with dielectric on the extending part.
The said external electrode that is arranged on the hollow medium pipe outer wall can be the structure of ring-type, and its physical dimension is selectable.Ring electrode on the said outer wall that is arranged on the hollow medium pipe is one at least, and its quantity can determine according to concrete technical scheme.The central electrode that is arranged on hollow medium tube's axis position is connected with power frequency, intermediate frequency or repetitive frequency pulsed high voltage source with ring-type external electrode on the outer wall of hollow medium pipe.
Closely be connected with hollow medium tube through the hollow tubular connector; The electrode that is covered by dielectric is introduced from hollow medium pipe side and is fixed in the medium tube axial location; The ring-type external electrode of width and adjustable number is close to the outer wall of hollow medium pipe; Power supply power supply back produces plasma at medium tube inwall and interelectrode zone, and working gas is taken into account check-valves via flow and got in the medium tube through pipeline, and plasma is blown out the formation plasma jet.
Low-temperature plasma jet device of the present invention; Its structure has solved common parallel plate-type atmospheric dielectric barrier discharge device preferably and has caused the problem that is of limited application because of region of discharge is narrow and small; The low temperature plasma that makes the atmospheric dielectric barrier discharge generation is to spatial spread; Because macroscopical temperature of the plasma flow that device of the present invention produced is a normal temperature, can be used for the surface treatment of the material of heat resistance difference; The plasma flow that in addition produces can have difformity, therefore can carry out the modification processing to immovable material and complicated shape material surface easily, is more suitable in industrial applications.
Description of drawings
The fluidic device structural representation of Fig. 1, low temperature plasma of the present invention;
Fig. 2 a, external voltage 2kV, plasma flow graph when the argon gas flow velocity is 5.88m/s;
Fig. 2 b, external voltage 2kV, plasma flow graph when the argon gas flow velocity is 11.76m/s;
The fluidic device of Fig. 3, low temperature plasma of the present invention is handled the bacterial suspension design sketch;
Embodiment
Below in conjunction with accompanying drawing to further explain of the present invention;
A kind of atmospheric dielectric barrier discharge produces the fluidic device of low temperature plasma; Comprise that source of the gas 6, flowmeter 7, check-valves 8 are linked in sequence through pipeline; And be provided with electrode and power supply; One end of hollow tubular connector 1 is connected with check-valves 8 through pipeline, and its other end is connected with the 2 one end hermetic seals of hollow medium pipe, and connector 1 can be insulating material or metal material and the structure that combines formation of insulating material.The electrode 3 that is covered by dielectric is introduced from medium tube 2 sides and is fixed in medium tube 2 central authorities along axial location; Constitute central electrode 3; Central electrode 3 can be processed by tungsten, copper, stainless steel, aluminium and other metallic conduction materials; All be coated with dielectric 4 on central electrode 3 and the extending part thereof, the dielectric 4 that covers on the central electrode 3 can be polytetrafluoroethylene, epoxy resin, other insulating material of quartz glass.
One end of central electrode 3 extends the outer wall of hollow medium pipe 2, and is connected an end of power supply.The outer wall of hollow medium pipe 2 is provided with the ring-type external electrode 5 that matches with its outer wall shape; The ring-type external electrode 5 of width and adjustable number is close on the outer wall of medium tube 2; Said ring-type external electrode 5 is one at least, also can be provided with according to the needs of actual conditions, and external electrode 5 can be the structure of ring-type; Its structure, size and material are selectable, and external electrode 5 can be processed by metallic conduction materials such as copper, stainless steel and aluminium.
Be fixed in the central electrode 3 of medium tube 2 axis is connected with the both positive and negative polarity of power supply respectively with ring-type external electrode 5 on hollow medium pipe 2 outer walls along axial location.Said power supply can be power frequency, intermediate frequency or repetitive frequency pulsed high voltage source, also can be other power supplys.
The fluidic device of said low temperature plasma; The hollow medium pipe 2 that is connected with said hollow tubular connector 1 hermetic seal is hollow open structures of a kind of both ends open, can be the tubular structure of being processed by quartz glass, aluminium oxide ceramics or pmma material.
A kind of atmospheric dielectric barrier discharge produces the low-temperature plasma jet device; Open the switch and the flowmeter 7 of working gas 6; Gas gets into hollow medium pipe 2 through connector 1 through connecting line via flowmeter 7 and check-valves 8; Regulate flowmeter 7 and can control the gas flow rate size that gets into hollow medium pipe 2, regulate power supply 9 and can control the height that applies voltage, to the different techniques scheme; But many of external electrode 5 separation; Zone between medium tube inner tubal wall and central electrode produces plasma, because working gas gets into through pipeline in the cavity of hollow medium pipe 2 via flowmeter 7 and check-valves 8, the plasma that produces is blown out form plasma fluid 10.The working gas that the present invention uses can be high-purity inert gas or argon gas, helium, nitrogen, oxygen or compressed air etc.
The fluidic device that atmospheric dielectric barrier discharge of the present invention produces low temperature plasma solves the narrow and small problem in common parallel plate-type atmospheric dielectric barrier discharge zone preferably; Make the usage space of the low temperature plasma of atmospheric dielectric barrier discharge generation be able to expansion, be more suitable for industrialized application; Simultaneously; Experimental observation and measurement data according to us are learnt; The jet plasma macroscopic view temperature that device of the present invention produced is a normal temperature; Can make jet plasma have difformity to different techniques project setting technical parameter, thereby further widen the range of application of plasma technique in fields such as industry, medical science, weaving, food or scientific researches.
Fig. 2 and Fig. 3 are two concrete embodiment of the present invention, wherein:
Fig. 2 a, external voltage 2kV, plasma flow graph when the argon gas flow velocity is 5.88m/s;
Fig. 2 b, external voltage 2kV, plasma flow graph when the argon gas flow velocity is 11.76m/s;
As can be seen from the figure, the plasma of one-tenth flows to medium tube external space expansion, can solve common parallel plate-type atmospheric dielectric barrier discharge device well and cause the problem that is of limited application because of region of discharge is narrow and small; With macroscopical temperature of the plasma jet that thermocouple measurement produced, be about 20 ℃, can be used for the surface treatment of the material of heat resistance difference.
Fig. 3 handles the bacterial suspension design sketch for medical field uses intermediate frequency high voltage source plasma jet; Wherein, argon gas flow velocity 11.76m/s applies voltage 2kV; The culture dish that fills the Escherichia coli suspension-turbid liquid is placed 2cm place, medium tube below; Handled 3 minutes, bacterium is basic all dead, obtains the ideal effect little, that germicidal efficiency is high that consumes energy.
Claims (3)
1. an atmospheric dielectric barrier discharge produces the fluidic device of low temperature plasma; Comprise; Source of the gas (6), flowmeter (7), check-valves (8), electrode and power supply; Said source of the gas (6), flowmeter (7), check-valves (8) are linked in sequence through pipeline, it is characterized in that: an end of hollow tubular connector (1) is connected with check-valves (8) through pipeline, and its other end is connected with (2) the one end hermetic seals of hollow medium pipe; The axial location of medium tube (2) is provided with central electrode (3); One end of central electrode (3) extends the outer wall of hollow medium pipe (2) and connects an end of power supply (9), is arranged at intervals with two external electrodes (5) that match with its outer wall shape on the outer wall of hollow medium pipe (2), and said two external electrodes (5) all connect the other end of power supply (9); Be arranged on the central electrode (3) of hollow medium pipe (2) axial location and be coated with dielectric (4); The material of said dielectric (4) is polytetrafluoroethylene, epoxy resin or quartz glass.
2. produce the fluidic device of low temperature plasma according to the said atmospheric dielectric barrier discharge of claim 1; It is characterized in that: said hollow medium pipe (2) is a both ends open, the hollow tubular structures that is made up of quartz glass, aluminium oxide ceramics or pmma material.
3. atmospheric dielectric barrier discharge according to claim 1 and 2 produces the low-temperature plasma jet device, it is characterized in that: said power supply (9) is power frequency, intermediate frequency or repetitive frequency pulsed high voltage source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100181656A CN101330794B (en) | 2008-05-09 | 2008-05-09 | Jet apparatus capable of blocking discharging from generating low temperature plasma by atmos medium |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2008100181656A CN101330794B (en) | 2008-05-09 | 2008-05-09 | Jet apparatus capable of blocking discharging from generating low temperature plasma by atmos medium |
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| CN101330794A CN101330794A (en) | 2008-12-24 |
| CN101330794B true CN101330794B (en) | 2012-07-04 |
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