CN112079120B - Pressing mechanism for unloading of wafer storage box - Google Patents
Pressing mechanism for unloading of wafer storage box Download PDFInfo
- Publication number
- CN112079120B CN112079120B CN202010853872.8A CN202010853872A CN112079120B CN 112079120 B CN112079120 B CN 112079120B CN 202010853872 A CN202010853872 A CN 202010853872A CN 112079120 B CN112079120 B CN 112079120B
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- CN
- China
- Prior art keywords
- fixed
- plate
- wafer storage
- lifting
- top surface
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G67/00—Loading or unloading vehicles
- B65G67/02—Loading or unloading land vehicles
- B65G67/24—Unloading land vehicles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F11/00—Lifting devices specially adapted for particular uses not otherwise provided for
- B66F11/04—Lifting devices specially adapted for particular uses not otherwise provided for for movable platforms or cabins, e.g. on vehicles, permitting workmen to place themselves in any desired position for carrying out required operations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F2700/00—Lifting apparatus
- B66F2700/09—Other lifting devices
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Structural Engineering (AREA)
- Aviation & Aerospace Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a pressing mechanism for unloading a wafer storage box, which comprises a rack, wherein a lifting mechanism is arranged on a top plate of the rack, a lifting plate of the lifting mechanism is positioned right above the top plate of the rack, a transverse moving mechanism is fixed on the top surface of the lifting plate, a connecting plate is fixed on the top surface of a transverse moving block of the transverse moving mechanism, an extending connecting plate is fixed on the top surface of the connecting plate, a pressing cylinder is fixed on the top surface of the end part of the extending connecting plate, a push rod of the pressing cylinder penetrates through the bottom surface of the end part of the extending connecting plate and is fixed with a guide plate, a pressing support column is fixed in the middle of the bottom surface of the guide plate, and a protective elastic block is fixed on the bottom surface of the pressing support column. The wafer storage box on the discharging table can be tightly pressed, the mounting plate of the conveying trolley is convenient to lift and separate from the wafer storage box, manual auxiliary disassembly is not needed, and the wafer storage box is high in automation degree and good in effect.
Description
Technical Field
The invention relates to the technical field of semiconductor manufacturing, in particular to a pressing mechanism for unloading a wafer storage box.
Background
Among the present semiconductor equipment, it needs to be with the sealed storage box of a plurality of places of wafer, then, need with transport trolley or manual transport, place it on the blowing bench, and the manual transport is placed general poor effect, the amount of manual labor is big, adopt transport trolley to carry, it can set up fixing device at the top of wafer storage box, store the box with the wafer and fix and carry, it carries the back that targets in place, can place on the blowing bench, at this moment, fixing device need dismantle, current fixing device generally adopts bulb plunger etc. to carry out automatic clamping and puts, when it dismantles, need extract it from bulb plunger, it needs artifical auxiliary operation, the effect is poor, degree of automation is limited.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides a pressing mechanism for unloading a wafer storage box, which can press the wafer storage box placed on an unloading table, is convenient for lifting a mounting plate of a conveying trolley and separating the wafer storage box, does not need manual auxiliary disassembly, and has high automation degree and good effect.
The technical solution of the invention is as follows:
a pressing mechanism for unloading a wafer storage box comprises a rack, wherein a lifting mechanism is installed on a top plate of the rack, a lifting plate of the lifting mechanism is located right above the top plate of the rack, a transverse moving mechanism is fixed on the top surface of the lifting plate, a connecting plate is fixed on the top surface of a transverse moving block of the transverse moving mechanism, an extending connecting plate is fixed on the top surface of the connecting plate, a pressing cylinder is fixed on the top surface of the end part of the extending connecting plate, a push rod of the pressing cylinder penetrates through the bottom surface of the end part of the extending connecting plate and is fixed with a guide plate, a pressing support column is fixed in the middle of the bottom surface of the guide plate, and a protective elastic block is fixed on the bottom surface of the pressing support column;
the top of the wafer storage box is provided with a clamping positioning column, the clamping positioning column is used for being matched and positioned with the mounting plate above the wafer storage box, and the clamping positioning column is pressed through the protective elastic block during working, so that the mounting plate is lifted and separated.
The lifting mechanism comprises a lifting motor, the lifting motor is fixed in the middle of the bottom surface of the top plate of the rack, an output shaft of the lifting motor penetrates through the top surface of the top plate of the rack and is connected with a vertical threaded sleeve through a coupler, a vertical screw is in threaded connection with the vertical threaded sleeve, and a lifting plate is fixed at the top end of the vertical screw.
The bottom surface of the lifting plate is fixed with a plurality of vertical guide rods, the vertical guide rods are inserted in guide through holes formed in a top plate of the rack, and the bottom ends of all the vertical guide rods extend out of the bottom surface of the guide through holes and are fixed on the top surface of the same limiting annular block.
A plurality of guide sleeves are fixed on the top surface of the top plate of the rack, and the vertical guide rods are inserted in the corresponding guide sleeves.
The transverse moving mechanism comprises vertical plates fixed to the left portion and the right portion of the top face of the lifting plate, two ends of a transverse moving screw are hinged to the two vertical plates through bearings, a moving motor is fixed to the outer side wall of one of the vertical plates and drives the transverse moving screw to rotate, and a transverse moving block is screwed on the transverse moving screw.
The top surface of the lifting plate between the two vertical plates is fixed with a guide strip, the bottom surface of the transverse moving block is fixed with a sliding block, and the guide strip is inserted in a sliding groove formed in the bottom surface of the sliding block.
A plurality of upper guide rods are fixed on the top surface of the guide plate, and the upper guide rods are inserted in upper guide through holes formed in the extending connecting plate.
An upper guide sleeve body is fixed on the top surface of the extension connecting plate, and an upper guide rod is inserted in the corresponding upper guide sleeve body.
The invention has the beneficial effects that: it can store the box with placing the wafer on the blowing bench and compress tightly, makes things convenient for the mounting panel of travelling bogie to promote and store the box separation with the wafer, need not artifical supplementary dismantlement, and its degree of automation is high, and is effectual.
Drawings
FIG. 1 is a partial cross-sectional view of the present invention;
FIG. 2 is an enlarged view of a portion of FIG. 1;
fig. 3 is a partial schematic structural diagram of a pressing state when the pressing support column and the discharge table are used for placing the wafer storage box.
Detailed Description
Example (b): as shown in fig. 1 to 3, a pressing mechanism for unloading a wafer storage box includes a frame 10, a lifting mechanism 20 is mounted on a top plate of the frame 10, a lifting plate 21 of the lifting mechanism 20 is located right above the top plate of the frame 10, a lateral moving mechanism 30 is fixed on a top surface of the lifting plate 21, a connecting plate 40 is fixed on a top surface of a lateral moving block 31 of the lateral moving mechanism 30, an extending connecting plate 41 is fixed on a top surface of the connecting plate 40, a pressing cylinder 42 is fixed on a top surface of an end portion of the extending connecting plate 41, a push rod of the pressing cylinder 42 penetrates through a bottom surface of the end portion of the extending connecting plate 41 and is fixed with a guide plate 43, a pressing support column 44 is fixed on a middle portion of a bottom surface of the guide plate 43, and a protective elastic block 45 is fixed on a bottom surface of the pressing support column 44.
The top of the wafer storage box 100 is provided with a clamping positioning column 101, the clamping positioning column 101 is used for being matched and positioned with the mounting plate 200 above the wafer storage box 100, the clamping positioning column 101 is pressed through the protective elastic block 45 in work, and the mounting plate 200 is lifted and separated.
Further, the lifting mechanism 20 includes a lifting motor 22, the lifting motor 22 is fixed in the middle of the bottom surface of the top plate of the rack 10, an output shaft of the lifting motor 22 passes through the top surface of the top plate of the rack 10 and is connected with a vertical threaded sleeve 23 through a coupling, a vertical screw 24 is screwed in the vertical threaded sleeve 23, and a lifting plate 21 is fixed at the top end of the vertical screw 24.
Further, a plurality of vertical guide rods 25 are fixed on the bottom surface of the lifting plate 21, the vertical guide rods 25 are inserted into the guide through holes 11 formed in the top plate of the frame 10, and the bottom ends of all the vertical guide rods 25 extend out of the bottom surface of the guide through holes 11 and are fixed on the top surface of the same limiting ring block 26.
Further, a plurality of guide sleeves 12 are fixed on the top surface of the top plate of the housing 10, and the vertical guide rods 25 are inserted into the corresponding guide sleeves 12.
Further, the transverse moving mechanism 30 includes vertical plates 32 fixed to the left and right of the top surface of the lifting plate 21, two ends of a transverse moving screw 33 are hinged to the two vertical plates 32 through bearings, a moving motor 34 is fixed to the outer side wall of one of the vertical plates 32, an output shaft of the moving motor 34 is a spline shaft, the spline shaft is inserted in a spline hole formed in one end of the transverse moving screw 33, the moving motor 34 drives the transverse moving screw 33 to rotate, and the transverse moving block 31 is screwed on the transverse moving screw 33.
Further, a guide bar 1 is fixed on the top surface of the lifting plate 21 between the two vertical plates 32, a sliding block 35 is fixed on the bottom surface of the transverse moving block 31, and the guide bar 1 is inserted and sleeved in a sliding groove formed in the bottom surface of the sliding block 35.
Further, a plurality of upper guide rods 46 are fixed to the top surface of the guide plate 43, and the upper guide rods 46 are inserted into upper guide through holes 411 formed in the extension coupling plate 41.
Further, an upper guide sleeve 47 is fixed to a top surface of the extension coupling plate 41, and the upper guide rod 46 is inserted into the corresponding upper guide sleeve 47.
In use, as shown in fig. 3, after the wafer storage box 100 is placed on the material placing table, the lifting motor 22 operates to adjust the height position of the lifting plate 21, so as to ensure the position between the pressing support column 44 and the clamping positioning column 101 at the top of the wafer storage box 100, then the moving motor 34 operates to move the pressing support column 44 to the position right above the top surface of the clamping positioning column 101, and then the pressing support column 44 descends by being pushed by the push rod of the pressing cylinder 42 to press the protective elastic block 45 against the top surface of the clamping positioning column 101, at this time, the mounting plate 200 above the wafer storage box 100 is lifted (which lifts the mounting plate 200 by winding and shrinking the conveyor belt on the conveyor trolley), and during lifting, as the protective elastic block 45 presses against the top surface of the clamping positioning column 101, the positioning sleeve 201 fixed in the middle of the bottom surface of the mounting plate 200 is lifted together, make the steel ball that is fixed with ball plunger 300 on the inside wall of position sleeve 201 shift out from the location shrinkage pool that the shaping has on the outside wall of clamping locating column 101, realize that mounting panel 200 and wafer store the box 100 and separate, then, the push rod that compresses tightly cylinder 42 contracts back, and simultaneously, mobile motor 34 moves, make and compress tightly support column 44 lateral shifting return, then, the conveyer belt on the transport trolley continues to coil, thoroughly promotes the return with mounting panel 200, realize unloading, its degree of automation is high, and is effectual.
Claims (8)
1. The utility model provides a wafer storage box is unloaded and is used hold-down mechanism, includes frame (10), its characterized in that: a lifting mechanism (20) is installed on a top plate of the rack (10), a lifting plate (21) of the lifting mechanism (20) is located right above the top plate of the rack (10), a transverse moving mechanism (30) is fixed on the top surface of the lifting plate (21), a connecting plate (40) is fixed on the top surface of a transverse moving block (31) of the transverse moving mechanism (30), an extending connecting plate (41) is fixed on the top surface of the connecting plate (40), a pressing cylinder (42) is fixed on the top surface of the end part of the extending connecting plate (41), a push rod of the pressing cylinder (42) penetrates through the bottom surface of the end part of the extending connecting plate (41) and is fixed with a guide plate (43), a pressing support column (44) is fixed in the middle of the bottom surface of the guide plate (43), and a protective elastic block (45) is fixed on the bottom surface of the pressing support column (44);
the top of the wafer storage box (100) is provided with a clamping positioning column (101), the clamping positioning column (101) is used for being matched and positioned with the mounting plate (200) above the wafer storage box (100), the clamping positioning column (101) is pressed through the protective elastic block (45) in work, and the mounting plate (200) is lifted and separated.
2. The pressing mechanism for unloading a wafer storage cassette of claim 1, wherein: the lifting mechanism (20) comprises a lifting motor (22), the lifting motor (22) is fixed in the middle of the bottom surface of the top plate of the rack (10), an output shaft of the lifting motor (22) penetrates through the top surface of the top plate of the rack (10) and is connected with a vertical threaded sleeve (23) through a coupler, a vertical screw rod (24) is screwed in the vertical threaded sleeve (23), and a lifting plate (21) is fixed at the top end of the vertical screw rod (24).
3. The pressing mechanism for unloading a wafer storage cassette of claim 2, wherein: the bottom surface of the lifting plate (21) is fixed with a plurality of vertical guide rods (25), the vertical guide rods (25) are inserted in guide through holes (11) formed in a top plate of the rack (10), and the bottom ends of all the vertical guide rods (25) extend out of the bottom surface of the guide through holes (11) and are fixed on the top surface of the same limiting annular block (26).
4. The pressing mechanism for unloading a wafer storage cassette of claim 3, wherein: a plurality of guide sleeves (12) are fixed on the top surface of the top plate of the rack (10), and the vertical guide rods (25) are inserted in the corresponding guide sleeves (12).
5. The pressing mechanism for unloading a wafer storage cassette of claim 1, wherein: the transverse moving mechanism (30) comprises vertical plates (32) fixed to the left portion and the right portion of the top face of the lifting plate (21), two ends of a transverse moving screw rod (33) are hinged to the two vertical plates (32) through bearings, a moving motor (34) is fixed to the outer side wall of one vertical plate (32), the moving motor (34) drives the transverse moving screw rod (33) to rotate, and a transverse moving block (31) is in threaded connection with the transverse moving screw rod (33).
6. The pressing mechanism for unloading a wafer storage cassette of claim 5, wherein: a guide strip (1) is fixed on the top surface of the lifting plate (21) between the two vertical plates (32), a sliding block (35) is fixed on the bottom surface of the transverse moving block (31), and the guide strip (1) is inserted and sleeved in a sliding groove formed in the bottom surface of the sliding block (35).
7. The pressing mechanism for unloading a wafer storage cassette of claim 1, wherein: a plurality of upper guide rods (46) are fixed on the top surface of the guide plate (43), and the upper guide rods (46) are inserted into upper guide through holes (411) formed in the extension connecting plate (41).
8. The pressing mechanism for unloading a wafer storage cassette of claim 7, wherein: an upper guide sleeve body (47) is fixed on the top surface of the extending connecting plate (41), and an upper guide rod (46) is inserted in the corresponding upper guide sleeve body (47).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010853872.8A CN112079120B (en) | 2020-08-24 | 2020-08-24 | Pressing mechanism for unloading of wafer storage box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010853872.8A CN112079120B (en) | 2020-08-24 | 2020-08-24 | Pressing mechanism for unloading of wafer storage box |
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| Publication Number | Publication Date |
|---|---|
| CN112079120A CN112079120A (en) | 2020-12-15 |
| CN112079120B true CN112079120B (en) | 2021-12-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010853872.8A Active CN112079120B (en) | 2020-08-24 | 2020-08-24 | Pressing mechanism for unloading of wafer storage box |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104576461A (en) * | 2014-12-31 | 2015-04-29 | 上海新阳半导体材料股份有限公司 | Cover opening device for wafer storage box |
| CN104617016A (en) * | 2014-12-31 | 2015-05-13 | 上海新阳半导体材料股份有限公司 | Wafer processing unit |
| CN106865189A (en) * | 2017-02-22 | 2017-06-20 | 王松 | A kind of PCB points of plate delivery cartridge automatic lifting conveying mechanism |
| CN109119369A (en) * | 2017-06-23 | 2019-01-01 | 上海微电子装备（集团）股份有限公司 | Wafer transfer box and wafer automatic transfer system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100640105B1 (en) * | 2001-04-19 | 2006-10-30 | 무라타 기카이 가부시키가이샤 | Automated guided vehicle, automated guided vehicle system and wafer conveyance method |
-
2020
- 2020-08-24 CN CN202010853872.8A patent/CN112079120B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104576461A (en) * | 2014-12-31 | 2015-04-29 | 上海新阳半导体材料股份有限公司 | Cover opening device for wafer storage box |
| CN104617016A (en) * | 2014-12-31 | 2015-05-13 | 上海新阳半导体材料股份有限公司 | Wafer processing unit |
| CN106865189A (en) * | 2017-02-22 | 2017-06-20 | 王松 | A kind of PCB points of plate delivery cartridge automatic lifting conveying mechanism |
| CN109119369A (en) * | 2017-06-23 | 2019-01-01 | 上海微电子装备（集团）股份有限公司 | Wafer transfer box and wafer automatic transfer system |
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| Publication number | Publication date |
|---|---|
| CN112079120A (en) | 2020-12-15 |
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Effective date of registration: 20211125 Address after: 318050 Nanshan village, Luoyang street, Luqiao District, Taizhou, Zhejiang Applicant after: Taizhou Yiyuan Plastic Industry Co.,Ltd. Address before: 318050 side of Changpu village vegetable market, Lunan street, Luqiao District, Taizhou City, Zhejiang Province Applicant before: Taizhou Laolin Decoration Co.,Ltd. |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A clamping mechanism for unloading wafer storage box Effective date of registration: 20230213 Granted publication date: 20211210 Pledgee: Zhejiang Luqiao Taizhou rural commercial bank Limited by Share Ltd. Pledgor: Taizhou Yiyuan Plastic Industry Co.,Ltd. Registration number: Y2023330000362 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20230717 Granted publication date: 20211210 Pledgee: Zhejiang Luqiao Taizhou rural commercial bank Limited by Share Ltd. Pledgor: Taizhou Yiyuan Plastic Industry Co.,Ltd. Registration number: Y2023330000362 |