CN112077616A - Hydrostatic pressure guide rail system with actively controllable oil film thickness - Google Patents

Hydrostatic pressure guide rail system with actively controllable oil film thickness Download PDF

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Publication number
CN112077616A
CN112077616A CN202010947524.7A CN202010947524A CN112077616A CN 112077616 A CN112077616 A CN 112077616A CN 202010947524 A CN202010947524 A CN 202010947524A CN 112077616 A CN112077616 A CN 112077616A
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China
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oil film
guide rail
thrust plate
base
cavity
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CN112077616B (en
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李星占
岳友飞
苏星
魏巍
李加胜
阳红
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Institute of Mechanical Manufacturing Technology of CAEP
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Institute of Mechanical Manufacturing Technology of CAEP
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B23Q1/385Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports in which the thickness of the fluid-layer is adjustable
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/01Frames, beds, pillars or like members; Arrangement of ways
    • B23Q1/017Arrangements of ways

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

The invention discloses a hydrostatic pressure guide rail system with actively controllable oil film thickness, which comprises: the device comprises a base, a thrust plate component, a slide carriage, a pressure cover plate, a temperature sensing device and a displacement sensing device; the base, the thrust plate component and the slide carriage form a main oil film cavity; the temperature sensing device collects temperature data of the main oil film cavity; the pressure cover plate and the thrust plate assembly form an auxiliary oil film cavity, and the displacement sensing device acquires displacement data of the thrust plate assembly at the auxiliary oil film cavity so as to obtain thickness data of the main oil film; the pressure and the flow of the auxiliary oil film cavity are adjusted based on the real-time data of the temperature and the thickness of the main oil film, and the pressure and the flow of the main oil film cavity are not changed, so that the bearing capacity and the rigidity of the hydrostatic guide rail can be guaranteed while the thickness of the main oil film is controlled. The main oil film is indirectly controlled by controlling the auxiliary oil film, so that the control of the main oil film is realized, and the change of the rigidity and the load capacity of the guide rail is avoided.

Description

Hydrostatic pressure guide rail system with actively controllable oil film thickness
Technical Field
The invention relates to the technical field of optical part ultra-precision machining equipment, in particular to a hydrostatic pressure guide rail system with actively controllable oil film thickness.
Background
The hydrostatic pressure guide rail is a linear motion guide rail which inputs hydraulic oil with pressure into an oil cavity of a guide rail working surface through a throttle to form a pressure oil film so as to form pure liquid friction between the guide rail surfaces. Compared with the traditional linear guide device, the linear guide device has the characteristics of wide working speed range, high motion precision, small friction coefficient, low driving power, long service life, good dynamic and static rigidity and the like. Based on the above, the hydrostatic guide rail is widely applied in the fields of precision machining, ultra-precision machining and measurement.
The hydrostatic guideway is generally composed of a base, a thrust plate and a slide carriage, and a pressure oil film is formed by the combined action of the base, the thrust plate and the slide carriage. The thickness of the pressure oil film has important influence on the rigidity and the bearing capacity of the whole guide rail, and further influences the machining precision of a workpiece, so that the key is to ensure the accurate oil film thickness. The main factors affecting the oil film thickness include: 1) the structure of the guide rail deforms under the pressure of hydraulic oil; 2) after long-time movement and friction, the viscosity of hydraulic oil is reduced and the thermal deformation of the guide rail is realized; 3) machining and assembling errors of the guide rail; 4) the load of the guide rail varies. At present, in engineering, in order to ensure the optimal initial design oil film thickness, the following methods are generally adopted: 1) the structure size is increased in the design stage to resist the structural deformation under the action of a high-pressure oil film; 2) the deformation of the guide rail under the action of pressure and temperature is compensated in the design stage, the initial oil film gap is reduced, and the deformation is balanced; 3) and a heat dissipation flow channel is additionally arranged to reduce thermal deformation.
The above passive control method can secure a proper film thickness at the initial design state. However, the usage scenario of the hydraulic guide rail is a dynamic process, and the viscosity and the load of the hydraulic oil change at any moment. Taking viscosity as an example, the temperature of the oil cavity is increased and the viscosity of hydraulic oil is reduced in the processing process, so that the rigidity and the bearing capacity are changed, and the optimal oil film thicknesses corresponding to different temperatures are different. Therefore, active control becomes a new method for adjusting the oil film thickness of the hydrostatic guideway, and the current methods for active control of the oil film generally include: 1) a flow closed-loop control method based on displacement feedback; 2) a flow closed-loop control method based on pressure feedback; 3) a pressure and flow closed-loop control method based on displacement feedback; 4) a pressure and flow closed-loop control method based on displacement and temperature feedback.
The active control method can control the thickness of the oil film in the whole working process of the hydraulic guide rail, not only can ensure the oil film with fixed thickness, but also can change and adjust the thickness of the oil film according to the environment and the use condition. However, the above active control method mainly uses the direct change of the pressure or flow in the oil cavity of the guide rail as an implementation means, and the pressure and flow of the oil cavity in the original design of the guide rail are changed while the oil film thickness control is realized, so that the rigidity and the load capacity of the guide rail are also changed.
Disclosure of Invention
The invention provides a hydrostatic guideway system with actively controllable oil film thickness, which is characterized in that a pressure cover plate is additionally arranged on the outer side of an upper stop push plate of a hydraulic guideway, the upper stop push plate and the pressure cover plate form an auxiliary oil film cavity, and the pressure and the flow of the auxiliary oil film cavity are adjusted based on the pressure and temperature feedback in the working process, so that the pressure and the flow of a main oil film cavity are not changed, the bearing capacity and the rigidity of the hydrostatic guideway are ensured, and the thickness of the main oil film is controlled.
The invention is realized by the following technical scheme:
the invention provides a hydrostatic pressure guide rail system with actively controllable oil film thickness, which comprises: the device comprises a base, a thrust plate component, a slide carriage, a pressure cover plate, a temperature sensing device and a displacement sensing device;
the thrust plate assembly is arranged above the base, the base and the thrust plate assembly form a first guide rail and a second guide rail which are bilaterally symmetrical, and the slide carriage slides in the first guide rail and the second guide rail; the base, the thrust plate component and the slide carriage form a main oil film cavity; the temperature sensing device collects temperature data of the main oil film cavity;
the pressure cover plate is arranged above the thrust plate component; the pressure cover plate and the thrust plate component form an auxiliary oil film cavity, and the displacement sensing device acquires displacement data of the thrust plate component at the auxiliary oil film cavity.
The working principle of the scheme is as follows: according to the hydrostatic guideway system with the actively controllable oil film thickness, the temperature sensor is arranged on the base to collect the temperature data of the main oil film, the displacement sensor is arranged to collect the displacement data of the thrust plate assembly, and the real-time data of the thickness of the main oil film is obtained through the displacement data of the thrust plate assembly. The pressure and the flow of the auxiliary oil film cavity are adjusted based on the real-time data of the temperature and the thickness of the main oil film, but the pressure and the flow of the main oil film cavity are not changed, so that the thickness of the main oil film can be controlled, and the bearing capacity and the rigidity of the hydrostatic guide rail are guaranteed. In the active control method in the prior art, the thickness of the main oil film is mainly changed and adjusted according to the external use environment and the use condition, the actual condition in the main oil film cavity is not considered, and in addition, the main oil film is changed when the active control is carried out; since the thickness of the main oil film directly affects the rigidity and the load capacity of the guide rail, directly changing the thickness of the main oil film can cause the pressure and the flow of the oil cavity in the original design of the guide rail to change, and the rigidity and the load capacity of the guide rail to change. The adjusting object in the technical scheme is the auxiliary oil film, and the main oil film is indirectly controlled by controlling the auxiliary oil film, so that the control of the main oil film is realized, and the change of the rigidity and the load capacity of the guide rail is avoided.
The thrust plate assembly comprises two symmetrical upper thrust plates and two symmetrical lower thrust plates, a group of upper thrust plate and lower thrust plate are respectively arranged on the left side and the right side of the base, the upper thrust plate, the lower thrust plate and the base on the left side of the base form a semi-enclosed C-shaped structure as a first guide rail, and the upper thrust plate, the lower thrust plate and the base on the right side of the base form a semi-enclosed C-shaped structure as a second guide rail.
In the first guide rail and the second guide rail, a groove is arranged on the surface of the base containing the guide rail and is used as a lower main oil film cavity, and a groove is arranged on the side surface of the lower thrust plate containing the guide rail and is used as a side main oil film cavity; the lower main oil film cavity is at least provided with 2 groups, and the side main oil film cavity is at least provided with 2 groups;
grooves with the same specification are correspondingly arranged above the upper thrust plate and below the pressure cover plate respectively to serve as auxiliary oil film cavities, and at least 2 groups of the auxiliary oil film cavities are arranged;
oil sealing edges with the same width are arranged on the periphery of the lower main oil film cavity, the side main oil film cavity and the auxiliary oil film cavity.
The further optimization scheme is that rectangular grooves completely surrounding the auxiliary oil film cavity are formed in a pressure cover plate and an upper stop push plate on the periphery of the auxiliary oil film cavity, and the pressure cover plate and the rectangular grooves of the upper stop push plate are sealed through rubber sealing strips;
the edge of the oil sealing edge of the auxiliary oil film cavity of the upper stop push plate is provided with a non-full-circumference through groove with the width of 2 mm.
An initial gap exists between the pressure cover plate and the upper stop push plate, an auxiliary oil film is formed when oil is introduced, and hydraulic oil of the auxiliary oil film overflows to the oil return tank together with hydraulic oil of the main oil film through the non-full-circumference through groove of the upper stop push plate.
The edge of pressure cover plate is equipped with the rectangle recess, is equipped with the sealing rubber strip in the rectangle recess, and it goes up to form sealed condition after the push pedal assembly, prevents that hydraulic oil from leaking.
The further optimization scheme is that grooves forming the auxiliary oil film cavity on the pressure cover plate are provided with pressure cover plate oil inlet holes, and the joint of the tail end of each pressure cover plate oil inlet hole and the auxiliary oil film cavity is provided with a throttling plug.
The further optimization proposal is that the clearance between the slide carriage and the first guide rail and the second guide rail is 10-40 μm.
The further optimization scheme is that a displacement sensor is arranged in the middle of two adjacent groups of auxiliary oil film cavities in the vertical direction, and a measuring head of the displacement sensor is in contact with the upper stop push plate.
The further optimization scheme is that a temperature sensor is arranged in one lower main oil film cavity of the first guide rail and the second guide rail, and a measuring head of the temperature sensor is flush with the plane of the lower main oil film cavity.
The further optimization scheme is that oil inlets are formed in the base and the thrust plate assembly, and hydraulic oil with the same pressure flows through the oil inlets.
The further optimization scheme is that the method further comprises the following steps: the upper connecting plate, the lower connecting plate and the reinforcing block;
the reinforcing block penetrates through the slide carriage, the top of the reinforcing block is connected with the upper thrust plate, and the bottom of the reinforcing block is connected with the base;
the upper and lower connecting plates are connected with the base, the thrust plate assembly and the pressure cover plate.
In order to reduce the uneven oil film thickness caused by the cantilever beam structure of the upper stop push plate of the hydrostatic guideway, the end part of the slide carriage in the moving direction is provided with a lower connecting plate and an upper connecting plate which form a closed frame structure with the thrust plate, so that the static deformation of the guideway is reduced; through the through grooves formed in the left side and the right side of the middle of the slide carriage in the moving direction, the reinforcing block connects the pressure cover plate, the upper stop push plate and the base through the two through grooves, a fully-closed structure is formed for an oil film, and the thickness unevenness of the oil film is reduced.
After the oil is introduced into the guide rail, the displacement data of the upper stop push plate is detected through a measuring head of the displacement sensor, so that the thickness of the main oil film is obtained, the thickness of the main oil film is compared with the designed thickness of the initial oil film, the oil outlet pressure of the electric control pressure reducing valve to the auxiliary oil film cavity between the pressure cover plate and the upper stop push plate is controlled, and the deformation caused by the pressure of the first guide rail and the pressure of the second guide rail main oil cavity to the guide rail is compensated. In the moving process, the temperature of the hydraulic oil rises, the corresponding optimal oil film thickness changes, and the guide rail generates thermal deformation due to the heat conduction of the hydraulic oil due to the temperature rise of the hydraulic oil. And based on the relationship between the temperature and the viscosity and the relationship between the viscosity and the rigidity and the bearing capacity, controlling the oil outlet pressure of the electric control pressure reducing valve on an auxiliary oil cavity between the pressure cover plate and the upper stop push plate, and feeding back the displacement of the upper stop push plate through a displacement sensor to form closed-loop control on the thickness of the main oil film. The pressure cover plate is additionally arranged on the outer side of the upper stop push plate of the hydraulic guide rail to form an auxiliary oil film cavity, and the pressure and the flow of the auxiliary oil film cavity are adjusted based on pressure and temperature feedback, so that the bearing capacity and the rigidity are guaranteed while the pressure and the flow of the main oil film cavity are not changed, and the thickness of the main oil film is controlled.
In conclusion, the oil film thickness dynamic regulation and control device has excellent oil film thickness dynamic regulation and control capability, realizes that the oil film is in the optimal thickness range in the whole processing process, ensures the rigidity and the bearing capability, and reduces the whole structure size. Under the condition that the pressure cover plate provides extra pressure, the difficulty of initial design and assembly is reduced, and the initial deformation of the guide rail under hydraulic oil can be ignored in the design stage, so that the whole guide rail has higher tolerance capability during machining and assembly.
The invention has the following advantages and beneficial effects:
1. compared with the traditional hydrostatic guide rail, the hydrostatic guide rail system with the actively controllable oil film thickness has the advantages that the pressure cover plate is arranged on the upper thrust plate to form the auxiliary oil film cavity, the thickness of the main oil film is changed by actively changing the hydraulic oil pressure in the auxiliary oil film cavity, and meanwhile, the deformation of the guide rail caused by the hydraulic oil pressure and the heating of the structure can be counteracted, so that the guide rail works in the optimal oil film gap, and the bearing capacity and the rigidity of the guide rail are ensured;
2. the traditional hydrostatic guide rail has larger design size for overcoming the structural deformation caused by high-pressure hydraulic oil, and the invention ensures the thickness of an oil film between an upper stop push plate and a slide carriage by using the larger deformation of a pressure cover plate, thereby reducing the overall structural size and realizing high rigidity and high load by using smaller volume.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention.
FIG. 1 is a schematic structural diagram of an oil film thickness active controllable hydrostatic guideway system of the present invention;
FIG. 2 is a schematic structural diagram of the oil film thickness active controllable hydrostatic guideway oil inlet hole position of the present invention;
FIG. 3 is a schematic diagram of the installation position of an oil film thickness active controllable hydrostatic guideway sensor according to the present invention;
FIG. 4 is a schematic view of a base structure of the present invention;
FIG. 5 is a schematic view of the pressure cover plate of the present invention;
FIG. 6 is a schematic structural view of an upper stop push plate according to the present invention;
FIG. 7 is a schematic structural view of an upper stop push plate according to the present invention;
FIG. 8 is a schematic view of a lower thrust plate according to the present invention;
FIG. 9 is a schematic view of the structure of the slide carriage of the present invention;
fig. 10 is a schematic view of the structure of the guide rail of the present invention.
Reference numbers and corresponding part names in the drawings:
1-base, 2-thrust plate component, 21-upper stop push plate, 22-lower thrust plate, 3-main oil film cavity, 31-lower main oil film cavity, 32-side main oil film cavity, 4-slide carriage, 5-auxiliary oil film cavity, 6-pressure cover plate, 61-pressure cover plate oil inlet hole, 62-throttle plug, 7-temperature sensor, 8-displacement sensor, 90-first guide rail, 91-second guide rail, 10-oil seal edge, 11-rectangular groove, 12-rubber seal strip, 13-reinforcing block, 14-non-full-circumference through groove, 15-oil inlet hole, 16-upper connecting plate and 17-lower connecting plate.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
Example 1
As shown in fig. 1 and shown in the drawings, the embodiment provides a hydrostatic guideway with actively controllable oil film thickness, and a carriage 4, a thrust plate assembly 2 and a reinforcing block 13 are arranged on a base 1. Wherein base 1 and thrust plate subassembly 2 form bilateral symmetry's first guide rail 90 and second guide rail 91 jointly, distribute in base 1 both sides, and first guide rail 90 and second guide rail 91 all form half and surround "C" type structure respectively. A pressure cover plate 6 is arranged right above the upper thrust plate 21.
The carriage 4 has a structure as shown in FIG. 9, and the clearance between the first rail sliding surface of the carriage 4 and the first rail 90 is 10 μm to 40 μm.
The clearance between the second guide rail sliding surface of the carriage 4 and the second guide rail 91 is 10 μm to 40 μm.
The base 1 and the thrust plate component are internally provided with guide rail oil inlet holes which are communicated with hydraulic oil with the same pressure.
The base 1 is structurally shown in FIG. 4;
base 1, thrust plate subassembly 2 and pressure cap board 6 use bolted connection, and the screw thread is located both sides about base 1, and thrust plate subassembly 2 is equipped with the through-hole, and pressure cap board 6 is equipped with the counter bore.
The first guide rail 90 and the second guide rail 92 of the base 1 and the thrust plate component 2 are respectively provided with a lower main oil film cavity 31 and a side main oil film oil cavity 32, and the periphery of each oil film cavity is provided with an oil sealing edge 10 with the same width.
As shown in fig. 6 and 7, the edge of the oil sealing edge of each auxiliary oil film cavity of the upper stop push plate 21 is provided with a non-full-circumference through groove 14 with a width of 2mm, so that the oil cavities on the whole upper stop push plate 21 can be deformed uniformly, and the oil film thickness tends to be consistent. The non-full-circumference channel 14 can also be used as an oil return flow channel to return to the oil tank together with the hydraulic oil in the hydrostatic guideway.
As shown in fig. 5, the pressure cover plate 6 is provided with a groove and an oil seal edge 10 as the auxiliary oil film cavity 5, wherein the groove and the oil seal edge have the same size after the vertical projection of the oil film of the upper thrust plate 21.
The gap between the upper stop push plate 21 and the pressure cover plate 6 at the oil sealing position is 25 μm. The contact surface of the pressure cover plate 6 and the upper stop push plate 21 is provided with a rectangular groove 11 which can completely surround an oil film, and a rubber sealing strip 12 is arranged in the rectangular groove 11 and used for preventing hydraulic oil from leaking.
As shown in FIG. 2, each oil chamber of the pressure cover plate 6 is provided with a pressure cover plate oil inlet 61, and the junction of the orifice end of the pressure cover plate oil inlet 61 and the oil chamber is provided with a throttle plug 62. The throttling plug 62 throttles the pressure in the oil inlet hole of the pressure cover plate, so that the pressure is close to the pressure of an oil cavity in the guide rail, reverse deformation caused by overlarge pressure difference between two surfaces of the upper stop push plate is avoided, and the pressure close to the pressure of the oil cavity can further enable the pressure cover plate to have a wider adjusting range.
As shown in fig. 3, a displacement sensor 8 is arranged in the vertical direction in the middle of two oil film cavities on the pressure cover plate 6, and the displacement sensor 8 is connected with the pressure cover plate 6 by self-threading. The probe of the displacement sensor 8 is in contact with the upper stop push plate 21. The pressure cover plate 6 and the upper stop push plate 21 are provided with a sealing structure around a measuring head of the displacement sensor 8, a circular groove is arranged at the contact position of the upper stop push plate 21 and the displacement sensor, and a rubber sealing ring is arranged in the circular groove to ensure that the displacement sensor is not in direct contact with an oil film. The displacement sensor 12 is used for detecting the deformation of the guide rail after the initial oil feeding and the displacement data generated by the thermal deformation in the machining process, so that the electrically controlled pressure reducing valve is controlled to adjust the output pressure, the change of the thickness of the main oil film caused by the deformation is counteracted, and the oil film thickness is enabled to approach the initial set value.
Example 2
As shown in figure 10, based on the embodiment 1, the base 1 is further optimized, and a reinforcing block 13 is arranged in the middle of the moving direction of the slide carriage 4 at the middle of the cantilever positions of the first guide rail 90, the second guide rail 91 and the upper stop push plate 21.
The end of the base 1 in the moving direction of the slide carriage 4 is provided with a lower link plate 17 and an upper link plate 16. The upper and lower headers 16 and 17 are connected to the base 1, the thrust plate 21, and the pressure cover plate 6, respectively, using bolts. The slide carriage 4 is provided with through grooves at the left and right sides of the middle part of the moving direction thereof, and the reinforcing blocks 13 pass through the grooves without contacting.
The base 1, the reinforcing block 13, the upper stop push plate 21 and the pressure cover plate 6 are connected by bolts. The combined action of the reinforcing block 13, the upper connecting plate 16 and the lower connecting plate 17 enables the first guide rail sliding surface and the second guide rail sliding surface to form a force closed structure, so that an oil film with uniform thickness is formed, and the bearing characteristic of the guide rail is improved.
One of the oil cavities of the first guide rail 90 and one of the oil cavities of the second guide rail 91 of the base 1 are respectively provided with a through hole perpendicular to the oil cavities, a temperature sensor 7 is arranged in each through hole, the sensors are connected with each other through threads, and a measuring head of the temperature sensor 7 is flush with the plane of the oil cavities. The temperature sensor 7 can additionally consider the influence of the hydraulic oil temperature on the bearing capacity and rigidity of the oil film, so that the thickness of the oil film is in an optimal clearance.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (10)

1. A hydrostatic guideway system with actively controllable oil film thickness, comprising: the device comprises a base (1), a thrust plate assembly (2), a slide carriage (4), a pressure cover plate (6), a temperature sensing device (7) and a displacement sensing device (8);
the thrust plate assembly (2) is arranged above the base (1), the base (1) and the thrust plate assembly (2) form a first guide rail (90) and a second guide rail (91) which are bilaterally symmetrical, and the slide carriage (4) slides in the first guide rail (90) and the second guide rail (91); the base (1), the thrust plate component (2) and the slide carriage (4) form a main oil film cavity (3); the temperature sensing device (7) collects temperature data of the main oil film cavity;
the pressure cover plate (6) is arranged above the thrust plate component (2); the pressure cover plate (6) and the thrust plate component (2) form an auxiliary oil film cavity (5), and the displacement sensing device (8) collects displacement data of the thrust plate component (2) at the auxiliary oil film cavity (5).
2. The hydrostatic guideway system with actively controllable oil film thickness according to claim 1, characterized in that the thrust plate assembly (2) comprises two symmetrical upper thrust plates (21) and two symmetrical lower thrust plates (22), a set of upper thrust plate (21) and lower thrust plate (22) are respectively installed on the left and right sides of the base (1), the upper thrust plate (21), the lower thrust plate (22) and the base (1) on the left side of the base (1) form a semi-enclosed "C" type structure as the first guideway (90), and the upper thrust plate (21), the lower thrust plate (22) and the base (1) on the right side of the base (1) form a semi-enclosed "C" type structure as the second guideway (91).
3. The hydrostatic guideway system with actively controllable oil film thickness according to claim 1, characterized in that in the first guideway (90) and the second guideway (91), the surface of the base (1) containing the guideway is provided with a groove as a lower main oil film cavity (31), and the side surface of the lower thrust plate (22) containing the guideway is provided with a groove as a side main oil film cavity (32); the lower main oil film cavities (31) are at least provided with 2 groups, and the side main oil film cavities (32) are at least provided with 2 groups;
grooves with the same specification are correspondingly arranged above the upper thrust plate (21) and below the pressure cover plate (6) respectively to serve as auxiliary oil film cavities (5), and at least 2 groups of the auxiliary oil film cavities (5) are arranged;
the peripheries of the lower main oil film cavity (31), the side main oil film cavity (32) and the auxiliary oil film cavity (5) are provided with oil sealing edges (10) with the same width.
4. The hydrostatic guideway system with actively controllable oil film thickness according to claim 3, characterized in that the pressure cover plate (6) and the upper stop push plate (21) around the auxiliary oil film cavity (5) are provided with rectangular grooves (11) completely surrounding the auxiliary oil film cavity, the rectangular grooves (11) of the pressure cover plate (6) and the upper stop push plate (21) are sealed by rubber sealing strips (12);
the edge of the oil sealing edge of the auxiliary oil film cavity (5) of the upper stop push plate (21) is provided with a non-full-circumference through groove (14) with the width of 2 mm.
5. The hydrostatic guideway system with actively controllable oil film thickness according to claim 3, characterized in that the grooves on the pressure cover plate (6) forming the auxiliary oil film cavity (5) are all provided with pressure cover plate oil inlets (61), and the junction of the tail end of the pressure cover plate oil inlet (61) and the auxiliary oil film cavity (5) is provided with a throttle plug (62).
6. Hydrostatic guideway system according to claim 1, characterized in that the gap between the carriage (4) and the first (90) and second (91) guideway is 10-40 μm.
7. The hydrostatic guideway system of claim 1, wherein the oil film thickness is actively controllable by: and a displacement sensor (8) is arranged in the middle of two adjacent groups of auxiliary oil film cavities (5) in the vertical direction, and a measuring head of the displacement sensor (8) is contacted with the upper stop push plate (21).
8. The hydrostatic guideway system of claim 1, wherein the oil film thickness is actively controllable by: a temperature sensor (7) is arranged in one lower main oil film cavity (31) of the first guide rail (90) and the second guide rail (91), and a measuring head of the temperature sensor (7) is flush with the plane of the lower main oil film cavity (31).
9. The hydrostatic guideway system of claim 1, wherein the oil film thickness is actively controllable by: the base (1) and the thrust plate component (2) are internally provided with oil inlets (15), and the oil inlets (15) are communicated with hydraulic oil with the same pressure.
10. The hydrostatic guideway system of claim 1, further comprising: an upper yoke plate (16), a lower yoke plate (17) and a reinforcing block (13);
the reinforcing block (3) penetrates through the slide carriage (4), the top of the reinforcing block (13) is connected with the upper thrust plate (21), and the bottom of the reinforcing block is connected with the base (1);
the upper connecting plate (16) and the lower connecting plate (17) are connected with the base (1), the thrust plate assembly (2) and the pressure cover plate (6).
CN202010947524.7A 2020-09-10 2020-09-10 Hydrostatic pressure guide rail system with actively controllable oil film thickness Active CN112077616B (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
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CN112846825A (en) * 2021-01-29 2021-05-28 中国工程物理研究院机械制造工艺研究所 Hydrostatic guide rail and temperature maintenance system based on improved precision
CN113275905A (en) * 2021-07-26 2021-08-20 山东交通职业学院 Hydraulic unloading structure for upright column of large-scale processing machine tool
CN113275905B (en) * 2021-07-26 2021-09-28 山东交通职业学院 Hydraulic unloading structure for upright column of large-scale processing machine tool
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CN116944898A (en) * 2023-09-19 2023-10-27 北京广工精密技术有限公司 Hydrostatic guideway with locking function
CN116944898B (en) * 2023-09-19 2023-11-28 北京广工精密技术有限公司 Hydrostatic guideway with locking function

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