CN104148952A - Direct-driven closed type hydrostatic pressure vertical guide rail system of nanoscale precision - Google Patents
Direct-driven closed type hydrostatic pressure vertical guide rail system of nanoscale precision Download PDFInfo
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- CN104148952A CN104148952A CN201410394913.6A CN201410394913A CN104148952A CN 104148952 A CN104148952 A CN 104148952A CN 201410394913 A CN201410394913 A CN 201410394913A CN 104148952 A CN104148952 A CN 104148952A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
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- Magnetic Bearings And Hydrostatic Bearings (AREA)
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Abstract
The invention relates to a direct-driven closed type hydrostatic pressure vertical guide rail system of nanoscale precision. The direct-driven closed type hydrostatic pressure vertical guide rail system mainly comprises a linear motor part, a sliding block type hydrostatic guide rail, a vertical movement worktable part, a high-precision position detecting unit, a balance weight, an automatic braking unit, a guide rail hydraulic system and a control system. The direct-driven closed type hydrostatic pressure vertical guide rail system is characterized in that the a linear motor driving manner, the sliding block type hydrostatic guide rail and closed-loop control are adopted, the vertical movement worktable can bear loads of 40 or more kilograms, the good contact rigidity and the good frictional wear feature are achieved, the vertical worktable moves evenly, the low-speed creeping phenomenon does not exist, and the good work stability is achieved. The positioning precision of the vertical guide rail system with the work stroke of 100 mm is smaller than or equal to +/-200 nm, and the repeated positioning precision of the vertical guide rail system with the work stroke of 100 mm is smaller than or equal to +/-100 nm. A balance weight air cylinder with the braking function is adopted, and the technical bottleneck that when the direct-driven hydrostatic pressure vertical guide rail system moves, braking cannot be achieved in a power-off state is effectively avoided.
Description
Technical field
The present invention relates to a kind of nano-precision of supporting microfabrication high-speed main spindle vertical motion and directly drive closed hydrostatic slideway system, be adapted to especially the advanced manufacturing technology fields such as high speed micro-nano machining, nano level accurate measurement.
Background technology
Difficult processing high-performance key component occupies extremely important status in Modern weapon system, aerospace equipment and emerging strategic industry, balance flexible couplings as two in dynamically tuned gyro, DTG monoblock type, high accuracy silicon nitride ceramic ball bearing, inertial platform etc., its workmanship and precision have been embodied a concentrated reflection of integration capability and the level of China's Aero-Space, armament systems and high-end manufacturing system, to affect weapon accuracy at target, the core component of spacecraft navigation performance and key industry equipment.Minute manufacturing technique and the equipment of difficult processing high-performance key component, undertaking the magnificent mission that develops China's most advanced branches of science and Defence business development.At present, China is in this technical field, and there is a big difference with advanced industrialized country.In this technical field, China is carried out to blockade on new techniques abroad, seriously hindered the development of China in this technical field, to China's most advanced branches of science development and national security, cause great threat.Taking the two balance flexible couplings of dynamically tuned gyro, DTG monoblock type as example, its feature is, 4 groups of thin muscle (inside and outside torsion bar) are vital key features, thin muscle thickness is 35-40 μ m, length reaches 8mm, indirectly form by processing 2 diameter≤2mm apertures, requiring 8 thin muscle uniformity is 0.5 μ m, the symmetry of 4 groups of thin muscle, coplane degree, vertically and the vertical degree of horizontal thin muscle plane etc. all requirement be less than 1 μ m, therefore, require micro-nano machining tool, especially High Rotation Speed precision and the stability thereof of spindle unit, positioning precision and the repetitive positioning accuracy etc. of infeed mean has high requirement, as the nano-precision guide track system that moves both vertically, and the positioning precision < of guide track system (1/3～1/2) operation tolerance.
So far, similar patent is:
The vertical lathe structure of hydrostatic bearing " adopt " that in June, 2014, EUROPEAN PATENT OFFICE was authorized (EP2641691A1); On April 2nd, 2014, Patent Office of the People's Republic of China disclosed " adopting the closed static pressure guideway structure of linear drives " (CN103692223A).But the hydrostatic slideway that above-mentioned two patents and other linear electric motors drive is all the guide rail in horizontal plane work, all do not relate to and directly drive the key technology such as load and braking that enclosed fluid pressure upright guide rail system must solve, thereby do not belong to upright guide rail system category.
USPO has announced the water-cooled high-precision Z-theta stage of Aerotech company of the U.S. on September 2nd, 2008, US 7,420,298 B2:Water Cooled High Precision Z-theta stage (comprise coherent reference patent: No.6511504 " manufacture the method for identical expandable stent; No.5759192 " the directly method and apparatus of cutting metal support "; No.6521865 " is applied to the pulsed optical fibre laser diced system that medical treatment is implanted ").The principal right of this patent requires, one has the high accuracy platform of the rotating shaft (θ axle) that moves horizontally (Z) and be parallel to mobile axis, adopt a pair of brushless linear motor to drive horizontal shifting platform, be mainly used in the Laser Processing of expandable stent or the relevant slewing parts of implant into body.The limitation of this patent is: 1) because this high accuracy platform is horizontal positioned, therefore do not need electric rotating machine component weight to propose harsh restriction; 2) electric rotating machine is used for driving the parts such as expandable stent, only needs lower rotary speed; 3) because be to adopt Laser Processing, therefore process does not exist and cuts (mill) and cut power.Also, the Z axis that this patent relates to is horizontal direction, does not belong to upright guide rail system category.
Summary of the invention
The technical problem to be solved in the present invention is: for supporting vertical motion, impulse stroke 100mm, positioning precision ± 200nm, repetitive positioning accuracy ± 100nm, the maximum load 40Kg of high-speed main spindle.
In order to solve the problems of the technologies described above, technical scheme of the present invention has been to provide a kind of enclosed fluid pressure upright guide rail system of directly driving of nano-precision, it is characterized in that: comprise linear electric motors parts, drive static pressure slide block vertical motion by linear electric motors parts, both sides at static pressure slide block are symmetrically furnished with respectively slide block type hydrostatic slideway assembly, on each slide block type hydrostatic slideway assembly, be formed with vertical groove, vertical groove positioned opposite on the slide block type hydrostatic slideway assembly of both sides, thereby the vertical groove of homonymy is stretched into respectively in the both sides of static pressure slide block, the interior slide block type hydrostatic slideway assembly that makes static pressure slide block and both sides forms matched in clearance, only can vertically move up and down and form closed hydrostatic slideway by slide block type hydrostatic slideway component limitations static pressure slide block, on static pressure slide block, be provided with multiple flow controllers and in static pressure slide block, be formed with multiple oil pockets, flow controller is corresponding one by one with oil pocket, thereby the oil that guide rail hydraulic system provides is flowed in oil pocket corresponding with it in static pressure slide block and is formed oil film on vertical groove surface by flow controller, improve the precision of static pressure slide block vertical motion by controlling the thickness of oil film and the kinematic accuracy of linear electric motors parts,
High-speed main spindle vertical motion workbench is fixed on static pressure slide block, drive high-speed main spindle vertical motion workbench vertical motion by static pressure slide block, the read head of precise grating chi is fixed on the side of high-speed main spindle vertical motion workbench, the ruler of precise grating chi is fixed on the slide block type hydrostatic slideway assembly of homonymy and is parallel to the direction of motion of high-speed main spindle vertical motion workbench, is received in real time the actual amount of movement of high-speed main spindle axially-movable workbench by the ruler of precise grating chi;
Both sides at high-speed main spindle vertical motion workbench are symmetrically furnished with respectively the counterweight cylinder for realizing braking function, the cylinder body of counterweight cylinder is fixed on high-speed main spindle vertical motion workbench, and the end of the push rod of counterweight cylinder is fixedly mounted in the counterweight cylinder mounting seat that is positioned at counterweight cylinder below.
Preferably, described linear electric motors parts comprise linear electric motors and two motor extreme position limit switches, two motor extreme position limit switches lay respectively at top and the below of linear electric motors, by two limit of sports record of two motor extreme position limit switch straight limit motor ranges.
Preferably, also comprise column, column middle part fluting, two described slide block type hydrostatic slideway assemblies lay respectively at the left and right sides of groove, motor mounting plate is positioned at groove, described linear electric motors are fixed on motor mounting plate, and two described motor extreme position limit switches are separately fixed at upper end and the lower end of motor mounting plate; The primary coil of linear electric motors is arranged on described static pressure slide block, ventilates from the top of motor mounting plate, and the primary coil of linear electric motors is dispelled the heat.
Preferably, described slide block type hydrostatic slideway assembly comprises line slideway, is fixed with pressing plate on the top of line slideway, jointly forms described vertical groove by line slideway and pressing plate; Described oil film is formed on line slideway surface; The ruler of described precise grating chi is fixed on pressing plate.
Preferably, described high-speed main spindle vertical motion workbench comprises moving slide unit and the support for fixing high-speed main spindle, and moving slide unit is fixed on described static pressure slide block, and support is fixed on moving slide unit; The read head of described precise grating chi is fixed on the side of moving slide unit; The cylinder body of two described counterweight cylinders is separately fixed at the both sides of moving slide unit.
Preferably, braking hoop, brake piston, spring and pressing plate bar are at least installed in each described counterweight cylinder, in the time of emergency power off, gases at high pressure moment stops air feed, spring extends and promotes pressing plate bar, makes braking hoop embrace piston rod, thereby realizes braking function.
Preferably, described guide rail hydraulic system comprises oil inlet pipe, flowline, fuel tank, clarifier, coolant pump and oil pump, oil inlet pipe is connected with the oil-in of described flow controller, the oil-out of flow controller is connected by oil pipe with oil pocket corresponding in described static pressure slide block, oil pocket is connected with clarifier on one side by flowline, clarifier is connected with fuel tank via coolant pump, has oil pump in fuel tank, and oil pump pumps into described flow controller by the oil in fuel tank by oil inlet pipe.
Preferably, the measurement category of described precise grating chi is more than or equal to the total kilometres of described slide block type hydrostatic slideway assembly.
The present invention relates to directly drive the load of enclosed fluid pressure upright guide rail system and solution and the method for braking, and can repair that guide track system foozle is caused topples, therefore can perform well in the reliable of vertical direction workbench and accurately drive.
Brief description of the drawings
Fig. 1 is that high accuracy vertical straight of the present invention is driven hydrostatic slideway system three-dimensional profile schematic diagram;
Fig. 2 is that high accuracy vertical straight of the present invention is driven the top view of hydrostatic slideway system.
Detailed description of the invention
For the present invention is become apparent, hereby with preferred embodiment, and coordinate accompanying drawing to be described in detail below.Should be understood that these embodiment are only not used in and limit the scope of the invention for the present invention is described.In addition should be understood that those skilled in the art can make various changes or modifications the present invention after having read the content of the present invention's instruction, these equivalent form of values fall within the application's appended claims limited range equally.
The enclosed fluid pressure upright guide rail system of directly driving of a kind of nano-precision provided by the invention comprises linear electric motors 1, when linear electric motors 1 assemble, first linear electric motors 1 secondary coil is arranged on motor mounting plate 11, then two motor extreme position limit switches 13 are arranged on motor mounting plate 11, finally mounted motor mounting plate 11 are arranged in the groove at column 12 middle parts.Two motor extreme position limit switches 13, in order to two limit of sports record of straight limit motor 1 stroke, in the time that high-speed main spindle vertical motion workbench 4 moves to extreme position, send alarm signal to carry out brake operating and to realize safety protection function.Motor mounting plate 11 adopts foundry goods, is convenient to processing, installs and changes, and have cooling air channel above this motor mounting plate 11, and the heat producing when can effectively linear electric motors 1 be moved conducts.
When assembling slide block, first flow controller 6 is arranged on static pressure slide block 5,6 flow controllers 6 of each installation are installed at upper and lower two ends, in static pressure slide block 5, be formed with multiple oil pockets, flow controller 6 is corresponding one by one with oil pocket, comprises oily film formed oil circuit in guide rail, therefore in static pressure slide block 5, can effectively save space, make mechanism's compactness.Again the primary coil of linear electric motors 1 and static pressure slide block 5 are assembled together, afterwards high-speed main spindle vertical motion workbench 4 and static pressure slide block 5 are assembled together, then the read head of precise grating chi 7 is arranged on read head support, then support is arranged on high-speed main spindle vertical motion workbench 4.
When assembling guide rail, the ruler part of precise grating chi 7 is arranged on pressing plate 3, then pressing plate 3 is arranged on line slideway 2, then line slideway 2 and pressing plate 3 thereof are arranged on column 12, and adjust linearity and flatness arrival matching requirements.
Finally, the slide block assembling and the guide rail assembling are assembled together, form static pressure slide block guide rail system.In this static pressure slide block guide rail system, line slideway 2 and pressing plate 3 respectively have two covers, are symmetrical set respectively static pressure slide block 5 and line slideway 2 and pressing plate 3 matched in clearance in static pressure slide block 5 both sides.Static pressure slide block 5 drives high-speed main spindle vertical motion workbench 4 vertically to move up and down, and limits other frees degree by guide rail structure, and forms closed hydrostatic slideway.
Thereby the oil that guide rail hydraulic system provides is flowed in oil pocket corresponding with it in static pressure slide block 5 and is formed oil film on line slideway 2 surfaces by flow controller 6, improves the kinematic accuracy of vertical hydrostatic guide rail system by controlling the thickness of oil film and the kinematic accuracy of linear electric motors 1.
The measurement category of precise grating chi 7 is more than or equal to guide rail total kilometres.Precise grating chi 7 is made up of read head and ruler two parts.The read head of precise grating chi 7 is installed in the moving slide unit side of high-speed main spindle vertical motion workbench 4, and the ruler partial parallel of precise grating chi 7 is in the moving slide unit direction of motion, and a side is arranged on pressing plate 3.And receive in real time the actual amount of movement of high-speed main spindle vertical motion workbench 4.The object that proposes high precision position detecting unit is, by precise grating chi 7 to high-speed main spindle vertical motion workbench 4 actual displacements test, analysis and calculation displacement error, so that table feed motion is carried out to real-Time Compensation, and improve the kinematic accuracy of workbench.
Guide rail hydraulic system comprises oil inlet pipe, flowline, fuel tank, clarifier, coolant pump and oil pump, oil inlet pipe is connected with the oil-in of flow controller 6, the oil-out of flow controller 6 is connected by oil pipe with the oil pocket of static pressure slide block 5 interior correspondences, oil pocket is connected with clarifier on one side by flowline, clarifier is connected with fuel tank via coolant pump, in fuel tank, have oil pump, oil pump pumps into flow controller 6 by the oil in fuel tank by oil inlet pipe
Subsequently, counterweight cylinder mounting seat 10 is assemblied on column 12, again the movable part of counterweight cylinder 8 is arranged on to the both sides of high-speed main spindle vertical motion workbench 4, then the standing part of counterweight cylinder 8 is arranged in counterweight cylinder mounting seat 10, finally assembles movable part and the standing part of counterweight cylinder 8.Finally oil-containing groove is arranged on column 12, and good and sound protective cover, assemble.
Two counterweight cylinder 8 left and right each one symmetrical, wherein, the cylinder body of counterweight cylinder 8 is arranged on high-speed main spindle vertical motion workbench 4 as moving-member, the push rod of counterweight cylinder 8 is arranged in counterweight cylinder mounting seat 10 as standing part, and counterweight cylinder mounting seat 10 is arranged on column 12.Counterweight cylinder 8 drives hydrostatic slideway system for straight vertical moving equilibrium is provided, and to reduce the intensity of load of high-speed main spindle vertical motion workbench 8, improves its stable working.Braking hoop, brake piston, spring and pressing plate bar are installed in counterweight cylinder 8, and in the time of emergency power off, gases at high pressure moment stops air feed, and spring extends and promotes pressing plate bar, makes braking hoop embrace piston rod, thereby realizes braking function.Therefore, can realize the function of vertical installation line motor cut-off braking, realize safety protection function.In the time there is the accidents such as power-off, this band-type brake unit can be controlled at the decline slippage of vertical motion slide unit in 10 microns.
The moving slide unit of line slideway 2, pressing plate 3 and high-speed main spindle vertical motion workbench 4 all adopts grouan material, diminishbb weight account for upright guide rail system gross weight or load 5% or more than.
The present invention, in the time of work, drives static pressure slide block 5 by linear electric motors, and static pressure slide block 5 drives high-speed main spindle vertical motion workbench 4 to realize the motion of vertical direction.Oil is flowed in oil pocket corresponding with it in static pressure slide block 5 by flow controller 6, and oil film thickness can carry out self adaptation adjusting by flow controller 6.Static pressure slide block 5 and flow controller 6 be vertically motion up and down between line slideway 2 and pressing plate 3, and other frees degree are all retrained by the structure of guide rail, forms how much sealings.Ventilate from the top of motor mounting plate 11, the primary coil of linear electric motors 1 is dispelled the heat.Receive in real time the displacement value of high-speed main spindle vertical motion workbench 4 by precise grating chi 7, analysis and calculation displacement error, to carry out real-Time Compensation to table feed motion.Adopt counterweight cylinder 8 to drive hydrostatic slideway system for vertical straight moving equilibrium is provided, in the time that the problems such as power-off appear in vertical motion guide track system, counterweight cylinder 8 has braking function, can make 4 of high-speed main spindle vertical motion workbench decline 10 microns.Two photoelectric sensor switch 13 on guide rail, can ensure that high-speed main spindle vertical motion workbench 4 sends alarm signal while moving to extreme position, and carry out brake operating.
High-precision high-speed main shaft vertical motion of the present invention directly drives hydrostatic slideway system by hydrostatic slideway slide block, and be applied to vertical direction, by the mode of the thickness of oil film and the kinematic accuracy of linear electric motors in control hydrostatic slideway, improve the displacement accuracy of vertical hydrostatic guide rail system.By precise grating chi to workbench actual displacement test, analysis and calculation displacement error, so that table feed motion is carried out to real-Time Compensation, improve the displacement accuracy of workbench.The present invention has also effectively solved the cooling problem of linear electric motors.And reduce the intensity of load of high-speed main spindle vertical motion workbench 4 by the counterweight cylinder 8 with braking function, improve its stable working, and power-off brake problem while having solved linear electric motors 1 for vertical direction.
Contrast Related product: Aerotech company of the U.S. is world-renowned high accuracy platform manufacturer, its product providing is at present a lot, require (upright guide rail workbench with the present invention, impulse stroke≤100mm, positioning precision≤± 200nm (0.2um), repetitive positioning accuracy≤± 100nm (0.1um), maximum load 40Kg) product that is close has multiple, taking ATS20015 product as example, its maximum load is 40Kg, stroke 150mm, but precision index is: adopt the positioning precision of ball-screw and Aerotech controller to be ± 1um (1000nm), repetitive positioning accuracy ± 0.5um (500nm).
Claims (8)
1. the enclosed fluid pressure upright guide rail system of directly driving of a nano-precision, it is characterized in that: comprise linear electric motors parts, drive static pressure slide block (5) vertical motion by linear electric motors parts, both sides at static pressure slide block (5) are symmetrically furnished with respectively slide block type hydrostatic slideway assembly, on each slide block type hydrostatic slideway assembly, be formed with vertical groove, vertical groove positioned opposite on the slide block type hydrostatic slideway assembly of both sides, static pressure slide block (5) thus both sides stretch into respectively in the vertical groove of homonymy and make static pressure slide block (5) and the slide block type hydrostatic slideway assembly of both sides form matched in clearance, only can vertically move up and down and form closed hydrostatic slideway by slide block type hydrostatic slideway component limitations static pressure slide block (5), on static pressure slide block (5), be provided with multiple flow controllers (6) and be formed with multiple oil pockets in static pressure slide block (5), flow controller (6) is corresponding one by one with oil pocket, the oil that guide rail hydraulic system provides flows into static pressure slide block (5) by flow controller (6) thereby forms oil film on vertical groove surface in the interior oil pocket corresponding with it, improve the precision of static pressure slide block (5) vertical motion by controlling the thickness of oil film and the kinematic accuracy of linear electric motors parts,
High-speed main spindle vertical motion workbench (4) is fixed on static pressure slide block (5), drive high-speed main spindle vertical motion workbench (4) vertical motion by static pressure slide block (5), the read head of precise grating chi (7) is fixed on the side of high-speed main spindle vertical motion workbench (4), the ruler of precise grating chi (7) is fixed on the slide block type hydrostatic slideway assembly of homonymy and is parallel to the direction of motion of high-speed main spindle vertical motion workbench (4), received in real time the actual amount of movement of high-speed main spindle vertical motion workbench (4) by the ruler of precise grating chi (7),
Symmetrically be furnished with respectively the counterweight cylinder (8) for realizing braking function in the both sides of high-speed main spindle vertical motion workbench (4), it is upper that the cylinder body of counterweight cylinder (8) is fixed on high-speed main spindle vertical motion workbench (4), and the end of the push rod of counterweight cylinder (8) is fixedly mounted in the counterweight cylinder mounting seat (10) that is positioned at counterweight cylinder (8) below.
2. the enclosed fluid pressure upright guide rail system of directly driving of a kind of nano-precision as claimed in claim 1, it is characterized in that: described linear electric motors parts comprise linear electric motors (1) and two motor extreme position limit switches (13), two motor extreme position limit switches (13) lay respectively at top and the below of linear electric motors (1), by two limit of sports record of two motor extreme position limit switches (13) straight limit motors (1) stroke.
3. the enclosed fluid pressure upright guide rail system of directly driving of a kind of nano-precision as claimed in claim 3, it is characterized in that: also comprise column (12), column (12) middle part fluting, two described slide block type hydrostatic slideway assemblies lay respectively at the left and right sides of groove, motor mounting plate (11) is positioned at groove, it is upper that described linear electric motors (1) are fixed on motor mounting plate (11), and two described motor extreme position limit switches (13) are separately fixed at upper end and the lower end of motor mounting plate (11); It is upper that the primary coil of linear electric motors (1) is arranged on described static pressure slide block (5), ventilates from the top of motor mounting plate (11), and the primary coil of linear electric motors (1) is dispelled the heat.
4. the enclosed fluid pressure upright guide rail system of directly driving of a kind of nano-precision as claimed in claim 1, it is characterized in that: described slide block type hydrostatic slideway assembly comprises line slideway (2), be fixed with pressing plate (3) on the top of line slideway (2), jointly form described vertical groove by line slideway (2) and pressing plate (3); Described oil film is formed on line slideway (2) surface; The ruler of described precise grating chi (7) is fixed on pressing plate (3).
5. the enclosed fluid pressure upright guide rail system of directly driving of a kind of nano-precision as claimed in claim 1, it is characterized in that: described high-speed main spindle vertical motion workbench (4) comprises moving slide unit and the support (9) for fixing high-speed main spindle, it is upper that moving slide unit is fixed on described static pressure slide block (5), and support (9) is fixed on moving slide unit; The read head of described precise grating chi (7) is fixed on the side of moving slide unit; The cylinder body of two described counterweight cylinders (8) is separately fixed at the both sides of moving slide unit.
6. the enclosed fluid pressure upright guide rail system of directly driving of a kind of nano-precision as claimed in claim 1, it is characterized in that: braking hoop, brake piston, spring and pressing plate bar are at least installed in each described counterweight cylinder (8), in the time of emergency power off, gases at high pressure moment stops air feed, spring extends and promotes pressing plate bar, make braking hoop embrace piston rod, thereby realize braking function.
7. the enclosed fluid pressure upright guide rail system of directly driving of a kind of nano-precision as claimed in claim 1, it is characterized in that: described guide rail hydraulic system comprises oil inlet pipe, flowline, fuel tank, clarifier, coolant pump and oil pump, oil inlet pipe is connected with the oil-in of described flow controller (6), the oil-out of flow controller (6) is connected by oil pipe with oil pocket corresponding in described static pressure slide block (5), oil pocket is connected with clarifier on one side by flowline, clarifier is connected with fuel tank via coolant pump, in fuel tank, there is oil pump, oil pump pumps into described flow controller (6) by the oil in fuel tank by oil inlet pipe.
8. the enclosed fluid pressure upright guide rail system of directly driving of a kind of nano-precision as claimed in claim 1, is characterized in that: the measurement category of described precise grating chi (7) is more than or equal to the total kilometres of described slide block type hydrostatic slideway assembly.
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| CN201410394913.6A CN104148952B (en) | 2014-08-12 | 2014-08-12 | A kind of nano-precision directly drive enclosed fluid pressure upright guide rail system |
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Cited By (13)
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| CN104440136A (en) * | 2014-11-26 | 2015-03-25 | 安徽宇宙机床有限公司 | Movable table device of numerically-controlled milling machine |
| CN106312674A (en) * | 2016-10-31 | 2017-01-11 | 福建省正丰数控科技有限公司 | Magnetic suspension machining center counterweight system |
| CN106425479A (en) * | 2016-10-31 | 2017-02-22 | 福建省正丰数控科技有限公司 | Magnetic suspension gantry processing center |
| CN107498364A (en) * | 2017-09-27 | 2017-12-22 | 上海明索重型机械股份有限公司 | The ram driving structure of Digit Control Machine Tool |
| CN108817993A (en) * | 2018-08-09 | 2018-11-16 | 中国工程物理研究院机械制造工艺研究所 | A kind of vertical liquid hydrostatic slideway servo feed system |
| CN109108720A (en) * | 2018-10-16 | 2019-01-01 | 意特利（上海）科技有限公司 | A kind of machine ram balancing device |
| CN109578436A (en) * | 2019-01-25 | 2019-04-05 | 哈尔滨工业大学 | A kind of high-precision is without friction vertical motion guide rail |
| US10456881B1 (en) | 2018-11-22 | 2019-10-29 | Industrial Technology Research Institute | Machine tool |
| CN112077616A (en) * | 2020-09-10 | 2020-12-15 | 中国工程物理研究院机械制造工艺研究所 | Hydrostatic pressure guide rail system with actively controllable oil film thickness |
| CN112222647A (en) * | 2020-09-01 | 2021-01-15 | 大族激光科技产业集团股份有限公司 | Guide structure and lifting device |
| CN113352108A (en) * | 2021-06-16 | 2021-09-07 | 海门市创豪工业设计有限公司 | Automatic change cross slip table for machine tool |
| CN113997115A (en) * | 2022-01-04 | 2022-02-01 | 中机智能装备创新研究院(宁波)有限公司 | Power-off protection method and device for hydrostatic guide rail used in vertical direction |
| CN116160261A (en) * | 2023-04-21 | 2023-05-26 | 江苏领臣精密机械有限公司 | Protection mechanism of hydrostatic guideway |
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| CN108817993A (en) * | 2018-08-09 | 2018-11-16 | 中国工程物理研究院机械制造工艺研究所 | A kind of vertical liquid hydrostatic slideway servo feed system |
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| US10456881B1 (en) | 2018-11-22 | 2019-10-29 | Industrial Technology Research Institute | Machine tool |
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| CN113352108A (en) * | 2021-06-16 | 2021-09-07 | 海门市创豪工业设计有限公司 | Automatic change cross slip table for machine tool |
| CN113997115A (en) * | 2022-01-04 | 2022-02-01 | 中机智能装备创新研究院(宁波)有限公司 | Power-off protection method and device for hydrostatic guide rail used in vertical direction |
| CN116160261A (en) * | 2023-04-21 | 2023-05-26 | 江苏领臣精密机械有限公司 | Protection mechanism of hydrostatic guideway |
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