CN106563970A - Method for detecting pressure distribution in oil cavity of hydrostatic guideway - Google Patents

Method for detecting pressure distribution in oil cavity of hydrostatic guideway Download PDF

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Publication number
CN106563970A
CN106563970A CN201610988371.4A CN201610988371A CN106563970A CN 106563970 A CN106563970 A CN 106563970A CN 201610988371 A CN201610988371 A CN 201610988371A CN 106563970 A CN106563970 A CN 106563970A
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Prior art keywords
pressure
oil
guide rail
oil pocket
pressure distribution
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CN201610988371.4A
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CN106563970B (en
Inventor
王波
刘远航
乔政
吴言功
赖志锋
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Harbin Institute of Technology
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Harbin Institute of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/007Arrangements for observing, indicating or measuring on machine tools for managing machine functions not concerning the tool
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00Arrangements for observing, indicating or measuring on machine tools

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

The invention discloses a method for detecting the pressure distribution in an oil cavity of a hydrostatic guideway. The method comprises the following steps: 1, hydraulic oil is sent by a hydraulic station into each oil cavity through an oil inlet channel and a throttling device, so that a guideway moving part can be floated; 2, the guideway moving part is moved to an oil cavity pressure measuring station, pressure oil in the oil cavity enters a pressure measuring channel, a pressure sensor takes a signal pressure signal as the input and begins to read the pressure value at a certain positon in the oil cavity, and the signal processing and the real-time display are performed; 3, after that, the oil cavity pressure of a corresponding position is recorded each time after the guideway moving part is moved by a small displacement, so that a curve of the pressure distribution in the oil cavity of the hydrostatic guideway can be obtained; and 4, according to the obtained curve of the pressure distribution, the impact of the pressure distribution in the oil cavity on the performance of the hydrostatic guideway is researched. According to the method disclosed by the invention, an oil cavity pressure testing point is arranged on the hydrostatic guideway, thereby effectively solving the problem about how to detect the pressure distribution in the oil cavity of the hydrostatic guideway.

Description

A kind of detection method of hydrostatic slideway oil pocket pressure distribution
Technical field
The present invention relates to a kind of method of detection super-precision machine tools liquid static-pressure support part important parameter, tool Body is related to a kind of detection method of hydrostatic slideway oil pocket pressure distribution.
Background technology
Hydrostatic slideway is the important supporting member of super-precision machine tools, with kinematic accuracy height, carries big, rigidity It is high, the features such as damping characteristic is good, little, anti-vibration performance of creeping is good.Hydrostatic slideway is by formation between movement parts and base Lubricating pad plays supporting role, in the design and assembling process of hydrostatic slideway, by installing section in each oil pocket oiler Stream device reaches the purpose for adjusting oil pocket pressure, improving guide rail rigidity.The oil pocket pressure of hydrostatic slideway is one of crucial importance Technical parameter, for hydrostatic slideway design, assembling is instructed, optimize guide rail structure parameter and detection and improve guide rail The performances such as bearing capacity, rigidity have great importance.But, the oil pocket inner space of hydrostatic slideway is limited, movement parts with It is the Small Distance of dozens of micron between guiderail base, and hydraulic oil is communicated through sealing oil edge with air, rapid pressure drop, It is difficult on the premise of guide rail structure is not changed with regard to direct measurement oil pocket pressure;It is only to pass through to survey that the measurement of oil pocket pressure is now mostly Amount charge oil pressure, further according to experience oil pocket pressure is calculated, this method is difficult to accurately obtain oil pocket pressure, especially for not The conditions such as same rail types, oil pocket shape are difficult to propose general oil pocket pressure calculation empirical equation and method.
In the hydrostatic slideway course of work, although system is furnished with defecator, but impurity unavoidably enters oil Road affects the performance of the important track segments such as reducer, or even causes certain blocking, and when clogging occurs in guide rail, Due to there are multiple reducers, it is difficult to it is determined that the particular location and quantity of blocking reducer, by detecting that oil pocket pressure can be straight Blocking quantity and position that ground judges reducer are seen, on the other hand, because reducer aperture is less, its consistency is to guide rail performance Have a significant impact, by measuring oil pocket pressure, the concordance of each reducer can be easily determined;In addition, being obtained by detection The distribution situation of oil pocket internal pressure, rule of thumb the derivation of equation can go out theoretical bearing capacity, rigidity of hydrostatic slideway etc. Performance parameter, further compares with experimental result, and empirical equation is modified, be hydrostatic slideway optimization design with And further research provides support.
The content of the invention
The present invention is based on hydrostatic slideway motor system, there is provided a kind of quick, high precision test side of oil pocket pressure Method, it is significant to detecting the performance of hydrostatic slideway and status monitoring, the Design and optimization of guide rail etc..
The purpose of the present invention is achieved through the following technical solutions:
A kind of detection method of hydrostatic slideway oil pocket pressure distribution, using the detection of hydrostatic slideway oil pocket pressure distribution Device detected, specifically includes following steps:
First, hydraulic oil is sent into by each oil pocket through oil inlet passage, reducer by Hydraulic Station, floats guide rail movement parts;
2nd, guide rail movement parts are made to move to oil pocket pressure measurement positions, the pressure oil in oil pocket is entered in pressure measxurement passage, pressure Force transducer starts reading out the pressure value of certain position in oil pocket with fuel injection pressure signal as input, shows through signal processing and in real time Show;
3rd, hereafter make guide rail movement parts move the oil pocket pressure that correspondence position is all recorded after a thin tail sheep every time, obtain liquid Pressure distribution curve in hydrostatic slideway oil pocket;
4th, according to the pressure distribution curve for obtaining, impact of the oil pocket pressure distribution to hydrostatic slideway performance is studied.
In the present invention, the detection means of described kind of hydrostatic slideway oil pocket pressure distribution includes guiderail base, rail-sides Plate, oil inlet passage, oil pocket module, pressure transducer, slide carriage, guide rail clip, pressure measxurement passage, wherein:
The guide rail side plate, guide rail clip and guiderail base constitute guide rail, and guide rail side plate is fixedly mounted on guiderail base, guide rail Pressing plate is fixedly mounted on guide rail side plate, is punched on guide rail side plate, guide rail clip and guiderail base logical as pressure measxurement Road;
The pressure transducer is arranged at the oil-out of pressure measxurement passage;
The oil pocket module and slide carriage constitute guide rail movement parts, and oil pocket module is arranged in guide rail, and slide carriage is fixedly mounted on oil pocket In module, slide carriage side is provided with oil inlet passage, and oil inlet passage is communicated with the oil circuit of oil pocket module.
In the present invention, it is all kinds of that the oil pocket pressure detection method can be widely used in square shape, in-line, king's font etc. The pressure detecting of shape oil pocket.
In the present invention, the pressure transducer is arranged symmetrically in hydrostatic slideway both sides, pressure measxurement passage length compared with It is short;Meanwhile, it is the static pressure of oil pocket that oil pocket is tonometric, can quickly and accurately be measured using high-precision pressure transducer Oil pocket pressure simultaneously reads pressure value by way of numerical monitor, is convenient for measuring.
The present invention not only can exactly measure pressure distribution state in oil pocket, and can detect each oil pocket and make Whether reducer there are blocking or other unusual conditions, judges quantity, position and each section that reducer is blocked The concordance of stream device performance, can be calculated making a concerted effort for each oil pocket generation, be to verify and correct liquid static-pressure guide rail structure to set The empirical equation of meter provides experimental data reference, further instructs the design and assembling of hydrostatic slideway motor system.Compare In prior art, the present invention has advantages below:
(1)The present invention quickly and accurately can simultaneously measure the oil pocket pressure of six oil pockets of hydrostatic slideway, be easy to guide rail The research of the characteristic such as assembling and guide rail bearing capacity, rigidity;
(2)The present invention can quickly and accurately detect whether the reducer used in oil pocket blocking occurs, and detect blocking The particular location and quantity of reducer;
(3)The present invention easily can be estimated to the concordance of reducer, it is ensured that hydrostatic slideway performance.
Description of the drawings
Fig. 1 is the overall structure diagram of the detection means of hydrostatic slideway oil pocket pressure distribution.
Fig. 2 is the sectional view of oil pocket pressure measxurement channel design.
Specific embodiment
Technical scheme is further described below in conjunction with the accompanying drawings, but is not limited thereto, it is every to this Inventive technique scheme is modified or equivalent, without deviating from the spirit and scope of technical solution of the present invention, all should be covered In protection scope of the present invention.
As shown in figure 1, the detection means of the hydrostatic slideway oil pocket pressure distribution of present invention offer includes guiderail base 1st, guide rail side plate 2, oil inlet passage 3, oil pocket module 4, pressure transducer 5, slide carriage 6, guide rail clip 7, pressure measxurement passage 8.Its In:
Guide rail side plate 2, guide rail clip 3 and guiderail base 1 constitute guide rail, and guide rail side plate 2 is fixedly mounted on guiderail base 1, leads Rail pressure plate 3 is fixedly mounted on guide rail side plate 2;
Oil pocket module 4 and slide carriage 6 constitute guide rail movement parts, and oil pocket module 4 is arranged in guide rail, and slide carriage 6 is fixedly mounted on oil pocket In module 4;
Oil inlet passage 3 is provided with the side of slide carriage 6, oil inlet passage 3 is communicated with the oil circuit of oil pocket module 4, is supplied for oil supply chamber module 4 Oil;
Punch on guide rail side plate 2, guide rail clip 7 and guiderail base 1 as pressure measxurement passage 8, the aperture at oil-in It is designed as 1 ~ 2mm;
Pressure transducer 5 is arranged at the oil-out of pressure measxurement passage 8, can simultaneously measure upper and lower, side oil pocket oil pocket pressure Power, the pressure transducer that its middle guide both sides is installed can ensure that the pressure distribution of each oil pocket can be measured.
When carrying out oil pocket pressure detecting, hydraulic oil is sent into by each oil through oil inlet passage 3, reducer by Hydraulic Station Chamber so that one layer of oil film is formed between guiderail base 1 and oil pocket module 4 floats guide rail movement parts, now, the liquid in oil pocket Force feed has certain pressure.Guide rail movement parts are made to move to oil pocket pressure measurement positions, pressure transducer 5 starts reading out oil pocket The pressure value of interior certain position;Hereafter make guide rail slide carriage 6 move a thin tail sheep every time, that is, change pressure measxurement passage 8 it is right Oil pocket position, the pressure value that shows of pressure transducer is read again;Until obtaining the pressure distribution in whole oil pocket.
During measurement, design input pressure is 1MPa, and oil pocket pressure can be obtained for the 50 ~ 60% of charge oil pressure by empirical equation;This Invention adopts resolution and is detected for the SMC-ISE80 type pressure transducer oil pocket pressure of 0.001MPa, its specified pressure Scope is -0.100 ~ 1.000MPa, and repeated measure precision is ± 0.2%FS, and response time is 2.5ms, and is shown with 7 sections of LCD Function, can quickly and accurately measure oil pocket pressure and be shown.According to the pressure collected inside from sealing oil edge to oil pocket Power is distributed, and can obtain the pressure distribution situation in oil pocket, draws oil pocket pressure distribution curve, it is known that the pressure inside oil pocket point Cloth is more consistent, and the pressure distribution approximately linear of sealing oil edge successively decreases, and the linearity is preferably, demonstrates the theory and simulation result Correctness.In addition, obtain the pressure of each oil pocket by detection, can determine whether out in each oil pocket whether is reducer The concordance of blocking, the quantity that blocking reducer occurs and position and reducer performance, is easy to study the assembling of guide rail and lead The characteristics such as rail bearing capacity, rigidity.
The present invention reserve Measurement channel in ultra-precision machine tool rail end position, each Measurement channel respectively with guide rail Upper and lower, side oil pocket connection;Arrange high-precision digital display amount pressure transducer on each Measurement channel to measure, show guide rail The oil pocket pressure of each lubricating pad;When guide rail slide carriage moves to pressure measurement positions, hydraulic oil reaches pressure and passes by Measurement channel Sensor simultaneously shows oil pocket pressure.The present invention is efficiently solved by arranging oil pocket pressure testing point on hydrostatic slideway The test problems of hydrostatic slideway oil cavity pressure distribution, while can detect whether guide rail reducer blocks, verifies Whether Guide Rail Design and assembling are reasonable, detect that whether consistent and each pair of oil pocket of reducer performance that each oil pocket is used is produced Wait crucial technical parameter with joint efforts, further instruct the design to guide rail, the research of assembling.

Claims (4)

1. a kind of detection method of hydrostatic slideway oil pocket pressure distribution, it is characterised in that the detection method is quiet using liquid The detection means of pressure rail oil cavity pressure distribution is detected that the detection means includes that guiderail base, guide rail side plate, oil-feed are led to Road, oil pocket module, pressure transducer, slide carriage, guide rail clip, pressure measxurement passage, wherein:
The guide rail side plate, guide rail clip and guiderail base constitute guide rail, and guide rail side plate is fixedly mounted on guiderail base, guide rail Pressing plate is fixedly mounted on guide rail side plate, is punched on guide rail side plate, guide rail clip and guiderail base logical as pressure measxurement Road;
The pressure transducer is arranged at the oil-out of pressure measxurement passage;
The oil pocket module and slide carriage constitute guide rail movement parts, and oil pocket module is arranged in guide rail, and slide carriage is fixedly mounted on oil pocket In module, slide carriage side is provided with oil inlet passage, and oil inlet passage is communicated with the oil circuit of oil pocket module;
The detection method is comprised the following steps that:
First, hydraulic oil is sent into by each oil pocket through oil inlet passage, reducer by Hydraulic Station, floats guide rail movement parts;
2nd, guide rail movement parts are made to move to oil pocket pressure measurement positions, the pressure oil in oil pocket is entered in pressure measxurement passage, pressure Force transducer starts reading out the pressure value of certain position in oil pocket with fuel injection pressure signal as input, shows through signal processing and in real time Show;
3rd, hereafter make guide rail movement parts move the oil pocket pressure that correspondence position is all recorded after a thin tail sheep every time, obtain liquid Pressure distribution curve in hydrostatic slideway oil pocket;
4th, according to the pressure distribution curve for obtaining, impact of the oil pocket pressure distribution to hydrostatic slideway performance is studied.
2. the detection method of hydrostatic slideway oil pocket pressure distribution according to claim 1, it is characterised in that the pressure Aperture design at the oil-in of power Measurement channel is 1 ~ 2mm.
3. the detection method of hydrostatic slideway oil pocket pressure distribution according to claim 1, it is characterised in that the pressure The resolution of force transducer is 0.001MPa, and specified pressure limit is -0.100 ~ 1.000MPa, repeated measure precision for ± 0.2%FS, response time is 2.5ms.
4. it is according to claim 1 detection hydrostatic slideway oil pocket pressure distribution method, it is characterised in that the oil Chamber is shaped as square shape, in-line or king's font.
CN201610988371.4A 2016-11-10 2016-11-10 A kind of detection method of hydrostatic slideway oil pocket pressure distribution Active CN106563970B (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111360581A (en) * 2020-04-22 2020-07-03 机械科学研究总院海西(福建)分院有限公司 Device and method for testing guiding precision of hydrostatic guide rail pair under actual working condition
CN112077616A (en) * 2020-09-10 2020-12-15 中国工程物理研究院机械制造工艺研究所 Hydrostatic pressure guide rail system with actively controllable oil film thickness
CN112692592A (en) * 2019-10-22 2021-04-23 固安航天兴邦机械制造有限公司 Accurate high strength slip table
CN113664524A (en) * 2021-08-19 2021-11-19 机械科学研究总院海西(福建)分院有限公司 Method for assembling ultra-precise hydrostatic guide rail pair
CN116493958A (en) * 2023-06-21 2023-07-28 季华实验室 Dovetail type hydrostatic support machine tool guide rail

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CN1514218A (en) * 2003-07-30 2004-07-21 浙江大学 Valve pocket moving type hydralic valve inner flow field pressure distribution measuring device
EP1866123B1 (en) * 2005-04-06 2010-09-15 Jörg Hohmann Hydraulic threaded bolt clamping device and method for tightening large screws by means of said hydraulic threaded bolt clamping device
CN102507064A (en) * 2011-11-25 2012-06-20 江苏大学 Detection device of pressure distribution of laser impact waves
CN202494541U (en) * 2011-12-31 2012-10-17 北京理工大学 Device for measuring oil film pressure of sliding bearing
JP5375491B2 (en) * 2009-09-29 2013-12-25 株式会社ジェイテクト Fluid holding device
US20150285698A1 (en) * 2014-04-03 2015-10-08 Seiko Epson Corporation Pressure distribution sensor, method of measuring pressure distribution, and robot hand

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1514218A (en) * 2003-07-30 2004-07-21 浙江大学 Valve pocket moving type hydralic valve inner flow field pressure distribution measuring device
EP1866123B1 (en) * 2005-04-06 2010-09-15 Jörg Hohmann Hydraulic threaded bolt clamping device and method for tightening large screws by means of said hydraulic threaded bolt clamping device
JP5375491B2 (en) * 2009-09-29 2013-12-25 株式会社ジェイテクト Fluid holding device
CN102507064A (en) * 2011-11-25 2012-06-20 江苏大学 Detection device of pressure distribution of laser impact waves
CN202494541U (en) * 2011-12-31 2012-10-17 北京理工大学 Device for measuring oil film pressure of sliding bearing
US20150285698A1 (en) * 2014-04-03 2015-10-08 Seiko Epson Corporation Pressure distribution sensor, method of measuring pressure distribution, and robot hand

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112692592A (en) * 2019-10-22 2021-04-23 固安航天兴邦机械制造有限公司 Accurate high strength slip table
CN111360581A (en) * 2020-04-22 2020-07-03 机械科学研究总院海西(福建)分院有限公司 Device and method for testing guiding precision of hydrostatic guide rail pair under actual working condition
CN112077616A (en) * 2020-09-10 2020-12-15 中国工程物理研究院机械制造工艺研究所 Hydrostatic pressure guide rail system with actively controllable oil film thickness
CN113664524A (en) * 2021-08-19 2021-11-19 机械科学研究总院海西(福建)分院有限公司 Method for assembling ultra-precise hydrostatic guide rail pair
CN113664524B (en) * 2021-08-19 2024-05-14 机械科学研究总院海西(福建)分院有限公司 Assembling method of ultra-precise hydrostatic guideway pair
CN116493958A (en) * 2023-06-21 2023-07-28 季华实验室 Dovetail type hydrostatic support machine tool guide rail

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