CN111826619A - 一种塑胶金属化的电镀预镀工艺 - Google Patents

一种塑胶金属化的电镀预镀工艺 Download PDF

Info

Publication number
CN111826619A
CN111826619A CN202010722631.XA CN202010722631A CN111826619A CN 111826619 A CN111826619 A CN 111826619A CN 202010722631 A CN202010722631 A CN 202010722631A CN 111826619 A CN111826619 A CN 111826619A
Authority
CN
China
Prior art keywords
metal
electroplating
plating process
layer
process according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010722631.XA
Other languages
English (en)
Inventor
林孝发
林孝山
胡征宇
刘小龙
王汉春
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jomoo Kitchen and Bath Co Ltd
Original Assignee
Jomoo Kitchen and Bath Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jomoo Kitchen and Bath Co Ltd filed Critical Jomoo Kitchen and Bath Co Ltd
Priority to CN202010722631.XA priority Critical patent/CN111826619A/zh
Publication of CN111826619A publication Critical patent/CN111826619A/zh
Priority to EP21187530.7A priority patent/EP3943638A1/en
Pending legal-status Critical Current

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325Electric arc evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • C23C14/022Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025Metallic sublayers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/20Metallic material, boron or silicon on organic substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/20Metallic material, boron or silicon on organic substrates
    • C23C14/205Metallic material, boron or silicon on organic substrates by cathodic sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3464Sputtering using more than one target
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/04Electroplating: Baths therefor from solutions of chromium
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/04Electroplating: Baths therefor from solutions of chromium
    • C25D3/06Electroplating: Baths therefor from solutions of chromium from solutions of trivalent chromium
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/12Electroplating: Baths therefor from solutions of nickel or cobalt
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10Electroplating with more than one layer of the same or of different metals
    • C25D5/12Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
    • C25D5/14Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium two or more layers being of nickel or chromium, e.g. duplex or triplex layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/54Electroplating of non-metallic surfaces
    • C25D5/56Electroplating of non-metallic surfaces of plastics
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/34Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411Constructional aspects of the reactor
    • H01J37/345Magnet arrangements in particular for cathodic sputtering apparatus
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/34Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411Constructional aspects of the reactor
    • H01J37/3461Means for shaping the magnetic field, e.g. magnetic shunts

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Electrochemistry (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

本发明公开了一种塑胶金属化的电镀预镀工艺,其是采用电弧离子镀或磁控溅射工艺于塑胶工件表面依次形成金属结合层和金属过渡层,然后采用电弧离子镀于金属过渡层上沉积金属导电层;其中至少金属导电层的制备工艺包括:于金属靶材和放置塑胶工件的真空室之间设置磁过滤装置,使由靶材产生的带正电荷的金属离子通过磁过滤装置偏转后进入真空室并沉积到所述塑胶工件表面。本发明通过使金属靶材蒸发出来的粒子通过带电磁场偏转的磁过滤装置,中性粒子团无法沉积到工件表面,不存在传统PVD工艺中聚集的金属粒子团(大颗粒)沉积到膜层表面的情况,使膜更为平整,金属化后的塑胶工件可经电镀获得高品质镜面外观。

Description

一种塑胶金属化的电镀预镀工艺
技术领域
本发明涉及塑胶金属化的技术领域,尤其涉及一种塑胶金属化的电镀预镀工艺。
背景技术
塑胶金属化的目的是为了让原本不导电的塑胶工件表面沉积一层可导电的金属膜层,塑胶金属镀膜技术包括喷涂、物理气相沉积(PVD)、电镀等工艺。现有运用喷涂加物理气相沉积的方式获得电镀铬外观工件,这种工艺适用于产品形状比较简单的平面形工件,对于较复杂的工件形状存在漆膜及PVD膜层厚度不均匀的缺点,该工艺也会产生VOC等有机物排放,并不是完全绿色环保。电镀工艺具有能给产品带来高品质的外观、高耐用性等其他技术难以比拟的优势,但电镀工艺只能直接用于有限的几种塑胶表面,且电镀前处理工序对环境污染严重,因此需要进行预处理。
可选的电镀预处理工艺包括PVD等,PVD工艺原理是通过氩离子轰击使靶材表面产生瞬时高温使材料蒸发,部分材料会以聚集的金属粒子团(大颗粒)形态沉积到工件表面,聚集的粒子团经过后续电镀工序的放大,导致工件表面存在大量可见的颗粒,无法媲美传统电镀高品质外观标准。
发明内容
本发明的目的在于克服现有技术存在的不足,提供一种塑胶金属化的电镀预镀工艺。
为了实现以上目的,本发明的技术方案为:
一种塑胶金属化的电镀预镀工艺,包括以下步骤:
1)对塑胶工件进行离子源清洗;
2)采用电弧离子镀或磁控溅射工艺于塑胶工件表面形成金属结合层;
3)采用电弧离子镀或磁控溅射工艺于金属结合层上形成金属过渡层;
4)采用电弧离子镀于金属过渡层上形成金属导电层;
其中,步骤2)、3)和4)中,至少步骤4)的工艺包括:于金属靶材和放置塑胶工件的真空室之间设置磁过滤装置,使由靶材产生的带正电荷的金属离子通过磁过滤装置偏转后进入真空室并沉积到所述塑胶工件表面。
可选的,所述金属结合层为铬、锆、钛中的一种,厚度为40~150nm。
可选的,所述金属过渡层是通过共沉积的方式,将与所述金属结合层相同的金属靶材和与所述金属导电层相同的金属靶材共沉积形成混合金属镀层,厚度为40~150nm。
可选的,步骤3)中,至少与所述金属导电层相同的金属靶材和所述真空室之间设有所述磁过滤装置。
可选的,所述金属导电层为铜、镍、铝中的一种,厚度为100~1000nm。
可选的,步骤1)中,将塑胶工件放入真空室内,开启转架,抽真空至低于0.005Pa,通入氩气使真空度下降到0.1~2Pa,离子源设定1000-3000V清洗200-600s后恢复真空同时所述塑胶工件降温。
可选的,所述磁过滤装置包括弯管和磁产生装置,所述靶材设于所述弯管的入口,所述真空室设于所述弯管的出口,所述入口的法线和所述出口的法线互相垂直,所述磁产生装置通过调节线圈的电流大小使磁力线平行于弯管。
可选的,还包括向所述弯管上施加100~500V的正偏压。
可选的,所述塑胶工件的材料包括ABS、PC、PMMA和PET。
可选的,步骤4)之后进行电镀工艺,所述电镀的工序为焦铜——酸铜——半光镍——全光镍——光亮铬,或者焦铜——酸铜——全光镍——光亮铬;其中所述光亮铬是三价铬或六价铬。
本发明的有益效果为:
采用电弧离子镀或磁控溅射工艺使金属靶材蒸发,蒸发出来的粒子通过带电磁场偏转的磁过滤装置,中性粒子团无法沉积到工件表面,带正电荷的金属离子在洛伦磁力作用下偏转后进入到真空室沉积到工件表面形成金属膜层,由于膜层几乎都是由金属离子沉积而来,不存在传统PVD工艺中聚集的金属粒子团(大颗粒)沉积到膜层表面的情况,使膜更为平整,金属化后的塑胶工件可经电镀获得高品质镜面外观。
附图说明
图1为实施例的磁过滤装置的原理示意图;
图2为实施例1和对比例得到的电镀膜层表面的电镜照片。
具体实施方式
以下结合附图和具体实施例对本发明做进一步解释。
以下具体说明一种塑胶金属化的电镀预镀工艺的步骤。
步骤1),对塑胶工件进行离子源清洗增加工件表面活性、增强金属膜层与塑胶基底结合力。具体,将塑胶工件放入PVD设备的真空室内,开启转架,抽真空至低于0.005Pa,通入氩气使真空度下降到0.1~2Pa,离子源设定1000-3000V清洗200-600s后恢复真空同时所述塑胶工件降温。塑胶工件的材料包括但不限于ABS、PC、PMMA和PET等。
步骤2),采用电弧离子镀或磁控溅射工艺于塑胶工件表面形成金属结合层。金属结合层选用铬、锆、钛等高熔点金属以增强金属膜层与塑胶基底的结合力。金属结合层的厚度约为40-150nm。
步骤3),采用电弧离子镀或磁控溅射工艺于金属结合层上形成金属过渡层。金属过渡层是通过共沉积的方式,将与金属结合层相同的金属靶材和与金属导电层相同的金属靶材共沉积形成混合金属镀层。金属过渡层的厚度为40-150nm。
步骤4),采用电弧离子镀工艺于金属过渡层上形成金属导电层。金属导电层选用铜、镍、铝等良导电金属以提供高导电特性,便于后续电镀工艺的进行。金属导电层的厚度为100-1000nm。
上述步骤2)、3)和4)中,至少步骤4)的工艺包括:于金属靶材和放置塑胶工件的真空室之间设置磁过滤装置,使由金属靶材产生的带正电荷的金属离子通过磁过滤装置偏转后进入真空室并沉积到所述塑胶工件表面。
参考图1,一实施例的磁过滤装置是弯管结构并设有磁产生装置,靶材设于弯管的入口,真空室设于弯管的出口,入口的法线和出口的法线优选互相垂直,即弯管是90°偏转,此外,也可根据实际情况设置其他角度。由磁产生装置产生的磁场磁力线平行于弯管,从而洛伦磁力平行弯管,由金属靶材蒸发出来的粒子通过磁过滤装置,带正电荷的金属离子在洛伦磁力作用下沿着弯管偏转后由出口进入到真空室,沉积到工件表面形成金属膜层,中性粒子团(大颗粒)无法沉积到工件表面,从而控制形成的金属膜层具有平整、致密、均匀的外观。向所述弯管上施加100~500V的正偏压避免金属离子沉积到弯管上。
本发明中,至少金属导电层的制备工艺使用磁过滤装置,确保整个预镀工艺形成的金属层表面平整、致密、均匀的外观,此外,根据实际需求,金属结合层、金属过渡层制备工艺的部分或全部也可以使用磁过滤装置。
预镀工艺完成后,进行电镀工艺,电镀工艺包括焦铜——酸铜——半光镍——全光镍——光亮铬,可根据实际生产需要,调整酸铜后的工艺,例如焦铜——酸铜——全光镍——光亮铬,光亮铬可以是三价铬、六价铬。传统的电镀工艺还包括粗化——催化——解胶——化学镍等一系列前处理工艺,粗化废水含大量重铬酸废液,本发明省略了上述前工艺。
实施例1
在塑胶花洒表面进行塑胶金属化的电镀工艺。
步骤1)工件清洗并烘干,放入真空室内,开启转架,抽真空至低于0.005Pa,通入氩气使真空度下降到0.3Pa,离子源设定1500V清洗300s后恢复真空同时工件降温;
步骤2)磁控溅射铬靶,电流设定20A,沉积180s后恢复真空同时工件降温,形成厚度约40nm的铬层;
步骤3)磁控溅射铬靶,电流设定20A;采用磁过滤装置,电弧铜靶,电流设定150A;600s内逐渐降低磁控溅射铬靶电流至10A后恢复真空同时工件降温,形成厚度约50nm的铬铜合金层;
步骤4)采用磁过滤装置,电弧铜靶,电流设定150A沉积铜层厚度约至300nm后结束镀膜。
步骤5)电镀具体工艺:焦铜——酸铜——半光镍——全光镍——光亮铬。上述工序可参考常规电镀工艺。工件进行电镀处理得到镜面铬外观。
对比例
与实施例1的差别在于,对比例全部不采用磁过滤装置,其余参数相同。
参考图2,实施例1(A)和对比例(B)得到的电镀膜层表面的电镜照片可见,实施例1得到了镜面外观的电镀层,膜层平整、致密,品质高。而对比例外观麻点较多,不能达到高品质产品要求。
实施例1得到的电镀膜层经检测,具有与传统电镀膜层相近的机械性能和耐用性能。
上述实施例仅用来进一步说明本发明的一种塑胶金属化的电镀预镀工艺,但本发明并不局限于实施例,凡是依据本发明的技术实质对以上实施例所作的任何简单修改、等同变化与修饰,均落入本发明技术方案的保护范围内。

Claims (10)

1.一种塑胶金属化的电镀预镀工艺,其特征在于包括以下步骤:
1)对塑胶工件进行离子源清洗;
2)采用电弧离子镀或磁控溅射工艺于塑胶工件表面形成金属结合层;
3)采用电弧离子镀或磁控溅射工艺于金属结合层上形成金属过渡层;
4)采用电弧离子镀于金属过渡层上形成金属导电层;
其中,步骤2)、3)和4)中,至少步骤4)的工艺包括:于金属靶材和放置塑胶工件的真空室之间设置磁过滤装置,使由靶材产生的带正电荷的金属离子通过磁过滤装置偏转后进入真空室并沉积到所述塑胶工件表面。
2.根据权利要求1所述的电镀预镀工艺,其特征在于:所述金属结合层为铬、锆、钛中的一种,厚度为40~150nm。
3.根据权利要求1所述的电镀预镀工艺,其特征在于:所述金属过渡层是通过共沉积的方式,将与所述金属结合层相同的金属靶材和与所述金属导电层相同的金属靶材共沉积形成混合金属镀层,厚度为40~150nm。
4.根据权利要求3所述的电镀预镀工艺,其特征在于:步骤3)中,至少与所述金属导电层相同的金属靶材和所述真空室之间设有所述磁过滤装置。
5.根据权利要求1所述的电镀预镀工艺,其特征在于:所述金属导电层为铜、镍、铝中的一种,厚度为100~1000nm。
6.根据权利要求1所述的电镀预镀工艺,其特征在于:步骤1)中,将塑胶工件放入真空室内,开启转架,抽真空至低于0.005Pa,通入氩气使真空度下降到0.1~2Pa,离子源设定1000-3000V清洗200-600s后恢复真空同时所述塑胶工件降温。
7.根据权利要求1所述的电镀预镀工艺,其特征在于:所述磁过滤装置包括弯管和磁产生装置,所述靶材设于所述弯管的入口,所述真空室设于所述弯管的出口,所述入口的法线和所述出口的法线互相垂直,所述磁产生装置通过调节线圈的电流大小使磁力线平行于弯管。
8.根据权利要求7所述的电镀预镀工艺,其特征在于:还包括向所述弯管上施加100~500V的正偏压。
9.根据权利要求1所述的电镀预镀工艺,其特征在于:根据权利要求1所述的电镀预镀工艺,其特征在于:所述塑胶工件的材料包括ABS、PC、PMMA和PET。
10.根据权利要求1所述的电镀预镀工艺,其特征在于:步骤4)之后进行电镀工艺,所述电镀的工序为焦铜——酸铜——半光镍——全光镍——光亮铬,或者焦铜——酸铜——全光镍——光亮铬;其中所述光亮铬是三价铬或六价铬。
CN202010722631.XA 2020-07-24 2020-07-24 一种塑胶金属化的电镀预镀工艺 Pending CN111826619A (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202010722631.XA CN111826619A (zh) 2020-07-24 2020-07-24 一种塑胶金属化的电镀预镀工艺
EP21187530.7A EP3943638A1 (en) 2020-07-24 2021-07-23 Method for metallizing plastic by pre-plating for electroplating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010722631.XA CN111826619A (zh) 2020-07-24 2020-07-24 一种塑胶金属化的电镀预镀工艺

Publications (1)

Publication Number Publication Date
CN111826619A true CN111826619A (zh) 2020-10-27

Family

ID=72924802

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010722631.XA Pending CN111826619A (zh) 2020-07-24 2020-07-24 一种塑胶金属化的电镀预镀工艺

Country Status (2)

Country Link
EP (1) EP3943638A1 (zh)
CN (1) CN111826619A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112391658A (zh) * 2021-01-21 2021-02-23 宁波四维尔工业有限责任公司 一种塑料电镀的前处理工艺

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4303033A1 (de) * 2022-07-05 2024-01-10 Ulbrichts GmbH Beschichtetes formteil und entsprechendes herstellungsverfahren
CN115287587A (zh) * 2022-07-21 2022-11-04 厦门建霖健康家居股份有限公司 一种在塑料基材上镀拉丝膜的方法

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2594277Y (zh) * 2003-01-15 2003-12-24 北京师范大学 视线外磁过滤金属蒸气真空弧等离子体沉积源
CN1472360A (zh) * 2003-06-26 2004-02-04 上海交通大学 离子注入复合镀膜设备
US20070187229A1 (en) * 2003-10-21 2007-08-16 Aksenov Ivan I Filtered cathodic-arc plasma source
CN101363114A (zh) * 2007-12-12 2009-02-11 中国科学院金属研究所 一种磁场增强电弧离子镀沉积工艺
CN102127764A (zh) * 2011-01-28 2011-07-20 厦门建霖工业有限公司 一种在塑胶基材表面实施半干法电镀的方法
CN102634761A (zh) * 2011-09-29 2012-08-15 李刘合 截面为带状的真空阴极电弧等离子体的磁过滤方法
CN103590082A (zh) * 2013-12-03 2014-02-19 厦门建霖工业有限公司 一种无磷、无六价铬环保型塑胶电镀方法
CN105908134A (zh) * 2016-04-13 2016-08-31 北京师范大学 一种制备聚四氟乙烯电路板的方法和设备
CN106868463A (zh) * 2017-03-03 2017-06-20 北京航空航天大学 真空阴极弧离子镀装置及控制弧斑刻蚀区域的方法
CN110195212A (zh) * 2019-05-09 2019-09-03 厦门建霖健康家居股份有限公司 一种电弧离子镀膜的方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6923891B2 (en) * 2003-01-10 2005-08-02 Nanofilm Technologies International Pte Ltd. Copper interconnects

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2594277Y (zh) * 2003-01-15 2003-12-24 北京师范大学 视线外磁过滤金属蒸气真空弧等离子体沉积源
CN1472360A (zh) * 2003-06-26 2004-02-04 上海交通大学 离子注入复合镀膜设备
US20070187229A1 (en) * 2003-10-21 2007-08-16 Aksenov Ivan I Filtered cathodic-arc plasma source
CN101363114A (zh) * 2007-12-12 2009-02-11 中国科学院金属研究所 一种磁场增强电弧离子镀沉积工艺
CN102127764A (zh) * 2011-01-28 2011-07-20 厦门建霖工业有限公司 一种在塑胶基材表面实施半干法电镀的方法
CN102634761A (zh) * 2011-09-29 2012-08-15 李刘合 截面为带状的真空阴极电弧等离子体的磁过滤方法
CN103590082A (zh) * 2013-12-03 2014-02-19 厦门建霖工业有限公司 一种无磷、无六价铬环保型塑胶电镀方法
CN105908134A (zh) * 2016-04-13 2016-08-31 北京师范大学 一种制备聚四氟乙烯电路板的方法和设备
CN106868463A (zh) * 2017-03-03 2017-06-20 北京航空航天大学 真空阴极弧离子镀装置及控制弧斑刻蚀区域的方法
CN110195212A (zh) * 2019-05-09 2019-09-03 厦门建霖健康家居股份有限公司 一种电弧离子镀膜的方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112391658A (zh) * 2021-01-21 2021-02-23 宁波四维尔工业有限责任公司 一种塑料电镀的前处理工艺

Also Published As

Publication number Publication date
EP3943638A1 (en) 2022-01-26

Similar Documents

Publication Publication Date Title
CN111826619A (zh) 一种塑胶金属化的电镀预镀工艺
US20080156638A1 (en) Process for sputtering aluminum or copper onto aluminum or magnalium alloy substrates
CN102181861B (zh) 一种金属合金的表面处理方法
US20120193241A1 (en) Method for applying semi-dry electroplating method on surface of plastic substrate
CN102392246B (zh) 一种金属表面处理工艺
CN103590082B (zh) 一种无磷、无六价铬环保型塑胶电镀方法
CN102943293A (zh) 一种有拉丝纹路电镀件的制作工艺
CN105803458B (zh) 一种非晶合金的表面处理方法
CN108914069A (zh) Rpvd绿色镀膜技术
CN105779943A (zh) 一种物理气相沉积氟硅烷制备疏水膜的方法
CN107779833A (zh) 一种复合镀膜工艺
US20120129004A1 (en) Housing and method for manufacturing housing
CN111005026B (zh) 一种碳纤维基复合材料及其制备方法
CN107675136A (zh) 一种工件表面pvd镀膜的方法
CN111826615A (zh) 一种对黄铜或锌合金基材镀膜的方法
CN108315735B (zh) 一种耐蚀性的绿色复合零价铬表面处理方法
CN1699623A (zh) 非金属材料制品表面金属化的方法
CN1209953C (zh) 一种塑料手机壳内表面电磁屏蔽膜层的制备方法
CN101386976A (zh) 一种在镁合金表面磁控溅射TiN薄膜的工艺
CN111809151A (zh) 一种用于黄铜、锌合金基材的镀膜工艺
CN113549869A (zh) 一种具有残古纹效果的真空镀膜方法
CN109136864A (zh) 一种在磁钢表面真空涂覆铝锡复合涂层的方法
US20220025538A1 (en) Method for metallizing plastic by pre-plating for electroplating
CN1243464C (zh) 形成电磁波干扰遮蔽膜的方法
CN111962035A (zh) 一种镁基或铝基滤波器腔体镀层及其制备方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20201027