CN111584655B - Method for improving ohmic contact - Google Patents
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- CN111584655B CN111584655B CN202010431428.7A CN202010431428A CN111584655B CN 111584655 B CN111584655 B CN 111584655B CN 202010431428 A CN202010431428 A CN 202010431428A CN 111584655 B CN111584655 B CN 111584655B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/112—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor
- H01L31/113—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor
- H01L31/1136—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor the device being a metal-insulator-semiconductor field-effect transistor
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1864—Annealing
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a method for improving ohmic contact in the technical field of semiconductors, which comprises the following steps of high-temperature electric excitation treatment: the temperature of the two-dimensional semiconductor transistor device is increased to 410-450K and maintained, meanwhile, voltage is continuously applied to two-dimensional semiconductor two-end electrodes in the two-dimensional semiconductor transistor device, and then the voltage application is stopped and the temperature of the two-dimensional semiconductor transistor device is reduced to room temperature. The method improves the ohmic contact of the two-dimensional semiconductor in a mode of continuously applying voltage to the two-dimensional semiconductor at the temperature of 410-450K, improves the overall performance of the two-dimensional semiconductor transistor device, belongs to a back-end process for preparing the device, and has the advantages of simple operation, short time consumption, high reliability and the like.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a method for improving ohmic contact.
Background
Two-dimensional semiconductor materials have recently received much attention in the field of optoelectronics because of their unique optoelectronic properties. Such as graphene, transition metal sulfides, black phosphorus and other two-dimensional semiconductor materials, and novel optoelectronic devices based on new effects and new mechanisms of the materials are continuously developed, so that a good foundation is laid for the application of a new generation of optoelectronic technology. The transition metal sulfide is a typical semiconductor material, has the forbidden band width of 1-2eV, has the characteristics of tunable optical characteristics, mechanical flexibility, breakdown voltage resistance and the like in the design of a nano photoelectronic device, and provides a wider path for the application and development of multifunctional devices by combining different Van der Waals heterojunction devices constructed by two-dimensional semiconductors.
A field effect transistor is a typical device structure commonly used in the design of two-dimensional semiconductor optoelectronic devices, and the electrical contact between a two-dimensional semiconductor and a metal has a decisive role in the final performance of the device, including on-state current, photocurrent, high-frequency signal processing, mobility, and the like. However, in most two-dimensional semiconductor field effect transistor devices, interface impurities and the like are usually present between a two-dimensional semiconductor and a metal due to processes and the like, interdiffusion is difficult to form between the two-dimensional semiconductor and the metal, and the device performance is often seriously affected by large contact resistance between the two-dimensional semiconductor and a three-dimensional metal electrode.
For the conventional semiconductor material, doping is an effective method for reducing contact resistance, but the method is not suitable for the two-dimensional semiconductor material, and in addition, due to the lack of dangling bonds on the surface of the two-dimensional semiconductor material, chemical bonds are difficult to form with the metal material, so that the contact resistance is increased.
Disclosure of Invention
The method for improving the ohmic contact is used for improving the ohmic contact of the two-dimensional semiconductor transistor device in a high-temperature electric excitation mode so as to solve the problem of how to reduce the ohmic contact of a two-dimensional semiconductor material, and the high-temperature electric excitation mode belongs to a back-end process for device preparation, can effectively reduce the contact resistance of the two-dimensional semiconductor and improves the overall performance of the two-dimensional semiconductor transistor device.
The embodiment of the application provides a method for improving ohmic contact, which comprises the following steps of high-temperature electric excitation treatment:
the temperature of the two-dimensional semiconductor transistor device is increased to 410-450K and maintained, meanwhile, voltage is continuously applied to two-dimensional semiconductor two-end electrodes in the two-dimensional semiconductor transistor device, and then the voltage application is stopped and the temperature of the two-dimensional semiconductor transistor device is reduced to room temperature.
The method for improving the ohmic contact has the beneficial effects that: further eliminating impurities between the two-dimensional semiconductor and the metal by applying and maintaining a voltage across the two-dimensional semiconductor, thereby improving ohmic contact of the two-dimensional semiconductor; meanwhile, the electric excitation is applied at the high temperature of 410-450K, which is more favorable for eliminating poor contact caused by interface factors, so that the method can better improve ohmic contact by performing the electric excitation on the two-dimensional semiconductor at the high temperature aiming at the two-dimensional semiconductor material; in addition, the two-dimensional semiconductor transistor device is generally required to be annealed at the temperature of 475K, and the temperature of the technical scheme is lower than 475K, so that the damage probability of the two-dimensional semiconductor is reduced, and the two-dimensional semiconductor transistor device can be operated circularly; in addition, the high-temperature electric excitation step in the technical scheme belongs to a rear-end process for preparing the device, can effectively improve and reduce contact resistance and improve the overall performance of the device, and has the advantages of simplicity in operation, short consumed time, high reliability and the like.
The method for improving ohmic contact can be further improved, and specifically, the method comprises the following steps:
in one embodiment of the present application, the voltage is not greater than 5V. Applying voltages higher than 5V easily leads to diode semiconductor damage.
In one embodiment of the present application, the voltage is applied for a duration of 5-10 s. The duration time of the applied voltage is less than 5s, and the effect of improving ohmic contact is not obvious; the applied voltage duration is more than 10s, easily causing diode semiconductor damage.
In one embodiment of the present application, a method for manufacturing a two-dimensional semiconductor transistor device includes the steps of:
s1, preparing a substrate;
s2, preparing a buried gate electrode on the substrate in the step S1;
s3, preparing an insulating gate dielectric on the substrate in the step S1, wherein the gate dielectric covers the buried gate electrode in the step S2;
s4, preparing a two-dimensional semiconductor, and transferring the two-dimensional semiconductor to the gate dielectric in the step S3;
s5, preparing source electrode graphs and drain electrode graphs at two ends of the two-dimensional semiconductor in the step S4, and preparing a metal source electrode and a metal drain electrode according to the source electrode graphs and the drain electrode graphs, so that the two-dimensional semiconductor transistor device is prepared.
In one embodiment of the present application, in the step S1, the substrate material is high-resistivity silicon, quartz plate or sapphire, and preferably high-resistivity silicon.
In one embodiment of the present application, in the step S1, the substrate needs to be sequentially cleaned with acetone, anhydrous alcohol, and deionized water.
In one embodiment of the present application, in the step S3, the gate dielectric material is silicon dioxide, aluminum oxide or hafnium oxide.
In one embodiment of the present application, the thickness of the two-dimensional semiconductor in step S4 is 1-10nm, and the thickness of the electrode in step S5 is 50-100 nm.
One or more technical solutions provided in the embodiments of the present application have at least the following technical effects or advantages:
1. the ohmic contact of the two-dimensional semiconductor is improved in a mode of continuously applying voltage to the two-dimensional semiconductor, so that the overall performance of the two-dimensional semiconductor transistor device is improved;
2. the two-dimensional semiconductor is kept in a high-temperature state while voltage is continuously applied to the two-dimensional semiconductor, so that ohmic contact of the two-dimensional semiconductor is better improved;
3. generally, the two-dimensional semiconductor transistor device needs to be annealed at the temperature of 475K, and the temperature of the method is 410-450K and is lower than 475K, so that the damage probability of the two-dimensional semiconductor is reduced, and the method can be operated circularly;
4. the high-temperature electric excitation step in the method belongs to a back-end process for preparing a two-dimensional semiconductor transistor device, and has the advantages of simple operation, short time consumption and high reliability.
Drawings
FIG. 1 is a schematic diagram of a two-dimensional semiconductor transistor device structure;
FIG. 2 is a graph showing a comparison of channel currents before and after a high-temperature electrical excitation process for a two-dimensional semiconductor transistor device according to the fifth embodiment;
FIG. 3 is a graph comparing current-voltage data of two-dimensional semiconductors at room temperature of 310K and at elevated temperature of 430K in example six.
The structure comprises an insulating substrate 1, a buried gate electrode 2, a gate dielectric 3, a two-dimensional semiconductor 4, a metal source 5 and a metal drain 6.
Detailed Description
The present invention is further illustrated by the following detailed description, which is to be construed as merely illustrative and not limitative of the remainder of the disclosure, and modifications and variations such as those ordinarily skilled in the art are intended to be included within the scope of the present invention as defined in the appended claims.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In describing the invention, it is not necessary for a schematic representation of the above terminology to be directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples of the invention and features of different embodiments or examples described herein may be combined and combined by those skilled in the art without contradiction.
The embodiment of the application provides a method for improving ohmic contact, and the two-dimensional semiconductor ohmic contact is improved by utilizing a high-temperature electric excitation mode to solve the problem of how to reduce the ohmic contact of a two-dimensional semiconductor material.
In order to solve the above problems, the technical solution in the embodiment of the present application has the following general idea:
the first embodiment is as follows:
as shown in fig. 1, a method for fabricating a two-dimensional semiconductor transistor device includes the steps of:
s1, substrate preparation: cleaning an insulating substrate 1 with acetone, absolute ethyl alcohol and deionized water in sequence, wherein the insulating substrate 1 is made of high-resistance silicon, quartz plates or sapphire, and the high-resistance silicon is selected;
s2, preparing a buried gate electrode: preparing a buried gate electrode 2 on the insulating substrate 1 cleaned in the step S1 by adopting a metal mask method and combining thermal evaporation, wherein the buried gate electrode 2 is made of titanium/gold, the lower layer is titanium with the thickness of 5nm, and the upper layer is gold with the thickness of 15 nm;
s3, preparing a gate dielectric: preparing an insulating gate dielectric 3 on the insulating substrate 1 cleaned in the step S1 by adopting an atomic layer deposition technology, wherein the gate dielectric 3 covers the buried gate electrode 2 in the step S2, the gate dielectric 3 is made of silicon dioxide, aluminum oxide or hafnium oxide, and the hafnium oxide with the thickness of 30nm is selected;
s4, preparing a two-dimensional semiconductor: preparing a two-dimensional semiconductor 4 by using a fixed-point transfer technology, and transferring the two-dimensional semiconductor 4 onto the gate dielectric 3 in the step S3, wherein the two-dimensional semiconductor 4 is made of molybdenum disulfide with the thickness of 5 nm;
s5, source and drain electrode preparation: and (2) respectively preparing source electrode graphs and drain electrode graphs at two ends of the two-dimensional semiconductor 4 in the step S4 by utilizing an ultraviolet lithography method or an electron beam lithography method, and preparing a metal source electrode 5 and a metal drain electrode 6 by adopting a thermal evaporation or electron beam evaporation technology and combining a stripping technology according to the source electrode graphs and the drain electrode graphs, wherein the metal source electrode 5 and the metal drain electrode 6 are made of chromium/gold, the lower layer is chromium with the thickness of 15nm, and the upper layer is gold with the thickness of 45nm, so that the two-dimensional semiconductor transistor device is prepared.
Example two:
a method for improving ohmic contact comprises a high-temperature electric excitation processing step, which comprises the following steps:
placing the two-dimensional semiconductor transistor device manufactured in step S5 in the first embodiment on a temperature-changing probe station, raising the temperature to 450K after vacuuming, maintaining the temperature, continuously applying a voltage of 0.5V to the two-dimensional semiconductor terminal electrodes in the two-dimensional semiconductor transistor device, applying the voltage for 10S, and then lowering the temperature of the two-dimensional semiconductor transistor device to room temperature.
After the high-temperature electric excitation treatment, the ohmic contact of the two-dimensional semiconductor is obviously reduced, and the overall performance of the two-dimensional semiconductor transistor device is effectively improved.
Example three:
a method for improving ohmic contact comprises a high-temperature electric excitation processing step, which comprises the following steps:
placing the two-dimensional semiconductor transistor device manufactured in step S5 in the first embodiment on a temperature-changing probe station, raising the temperature to 430K after vacuum pumping, maintaining the temperature, continuously applying a voltage of 5V to the two-dimensional semiconductor terminal electrodes in the two-dimensional semiconductor transistor device, applying a voltage for 7S, and then lowering the temperature of the two-dimensional semiconductor transistor device to room temperature.
After the high-temperature electric excitation treatment, the ohmic contact of the two-dimensional semiconductor is obviously reduced, and the overall performance of the two-dimensional semiconductor transistor device is effectively improved.
Example four:
a method for improving ohmic contact comprises a high-temperature electric excitation processing step, which comprises the following steps:
placing the two-dimensional semiconductor transistor device manufactured in step S5 in the first embodiment on a temperature-changing probe station, raising the temperature to 410K after vacuum pumping, maintaining the temperature, continuously applying a voltage of 2V to the two-dimensional semiconductor terminal electrodes in the two-dimensional semiconductor transistor device, applying the voltage for 5S, and then lowering the temperature of the two-dimensional semiconductor transistor device to room temperature.
After the high-temperature electric excitation treatment, the ohmic contact of the two-dimensional semiconductor is obviously reduced, and the overall performance of the two-dimensional semiconductor transistor device is effectively improved.
Example five:
respectively carrying out channel resistance detection on the two-dimensional semiconductor transistor device prepared in the first embodiment and the two-dimensional semiconductor transistor device subjected to the four-high-temperature electric excitation treatment in the first embodiment; the detection method comprises the following steps: placing a two-dimensional semiconductor transistor device to be detected on a temperature-changing probe station, and testing the output characteristic of the device under the current room temperature condition under the vacuum condition; the results of the detection are shown in FIG. 2. The dotted line in fig. 2 represents the output characteristic of the two-dimensional semiconductor transistor device before the high-temperature electrical excitation process, and the channel resistance of the device is 3.8 megaohms at a voltage of 1V; the solid line shows the output characteristic of the two-dimensional semiconductor transistor device after the high-temperature electrical excitation processing, and the channel resistance of the device is 1 megaohm when the voltage is 1V.
The channel resistance of the two-dimensional semiconductor transistor device subjected to high-temperature electric excitation treatment is reduced from 3.8 megaohms to 1 megaohms, and the ohmic contact of the two-dimensional semiconductor transistor device is obviously reduced, so that the ohmic contact of the two-dimensional semiconductor device can be effectively improved by the high-temperature electric excitation treatment.
Example six:
respectively continuously applying 1V voltage to the two-dimensional semiconductor transistor device prepared in the first embodiment at room temperature of 310K and at high temperature of 430K, keeping the voltage for 10S, and then respectively carrying out channel resistance detection; the detection method is as described in example five; the detection result is shown in fig. 3, the dotted line represents the output characteristic of the two-dimensional semiconductor transistor device after the electric excitation is applied under the condition of 310K at room temperature, and the channel resistance of the device is 3.8 megaohms when the voltage is 1V; the solid line shows the output characteristics of the two-dimensional semiconductor transistor device after electric excitation is applied at room temperature of 430K, and the channel resistance of the device is 0.5 megaohms at a voltage of 1V.
It is obvious that applying electrical stimulation to ohmic contacts at room temperature is not an improvement, and applying electrical stimulation at high temperatures is beneficial for improving ohmic contacts of two-dimensional semiconductors.
According to the technical scheme, the two-dimensional semiconductor ohmic contact is improved in a high-temperature electric excitation mode, the overall performance of the two-dimensional semiconductor transistor device is improved, and the method has the advantages of being simple in operation, short in time consumption, high in reliability and the like.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
Claims (7)
1. A method for improving ohmic contact is characterized by comprising a high-temperature electric excitation processing step, which comprises the following steps:
the temperature of the two-dimensional semiconductor transistor device is increased to 410-450K and maintained, meanwhile, voltage is continuously applied to two-dimensional semiconductor two-end electrodes in the two-dimensional semiconductor transistor device, then the voltage application is stopped, and the temperature of the two-dimensional semiconductor transistor device is reduced to room temperature, wherein the voltage is not more than 5V.
2. The method of improving ohmic contact of claim 1, wherein: the voltage is applied for a time period of 5-10 s.
3. A method of improving ohmic contact according to any of claims 1-2, wherein: the preparation method of the two-dimensional semiconductor transistor device comprises the following steps:
s1, preparing a substrate;
s2, preparing a buried gate electrode on the substrate in the step S1;
s3, preparing an insulating gate dielectric on the substrate in the step S1, wherein the gate dielectric covers the buried gate electrode in the step S2;
s4, preparing a two-dimensional semiconductor, and transferring the two-dimensional semiconductor to the gate dielectric in the step S3;
s5, preparing source electrode graphs and drain electrode graphs at two ends of the two-dimensional semiconductor in the step S4, and preparing a metal source electrode and a metal drain electrode according to the source electrode graphs and the drain electrode graphs, so that the two-dimensional semiconductor transistor device is prepared.
4. A method of improving ohmic contact according to claim 3, wherein: in step S1, the substrate is made of high-resistance silicon, quartz or sapphire.
5. A method of improving ohmic contact according to claim 3, wherein: in the step S1, the substrate needs to be sequentially cleaned with acetone, anhydrous alcohol, and deionized water.
6. A method of improving ohmic contact according to claim 3, wherein: in step S3, the gate dielectric material is silicon dioxide, aluminum oxide or hafnium oxide.
7. A method of improving ohmic contact according to claim 3, wherein: the thickness of the two-dimensional semiconductor in the step S4 is 1-10nm, and the thickness of the electrode in the step S5 is 50-100 nm.
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