CN110904455A - Side etching and R-angle etching process for boss steel sheet - Google Patents

Side etching and R-angle etching process for boss steel sheet Download PDF

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Publication number
CN110904455A
CN110904455A CN201911260466.4A CN201911260466A CN110904455A CN 110904455 A CN110904455 A CN 110904455A CN 201911260466 A CN201911260466 A CN 201911260466A CN 110904455 A CN110904455 A CN 110904455A
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steel sheet
etching
boss
boss steel
film
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徐新涛
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Guangde Junrui Electronic Technology Co Ltd
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Guangde Junrui Electronic Technology Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions
    • C23F1/28—Acidic compositions for etching iron group metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/14—Cleaning or pickling metallic material with solutions or molten salts with alkaline solutions
    • C23G1/19—Iron or steel

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

The invention relates to a side etching and R angle etching process for a boss steel sheet, which specifically comprises the following steps: cleaning, coating, drying, exposing, developing, compounding a PET film on the surface A, etching for the first time, compounding a PET film on the surface B, tearing off the PET film on the surface A, etching for the second time, tearing off the PET film on the surface B, removing the film, inspecting and packaging; according to the boss steel sheet side etching and R angle etching process, the existing concave boss etching process is improved, the PET films are respectively attached to the two sides of the concave-convex table and torn off after time, the PET films are respectively attached to the two sides of the concave-convex table through two times of etching, the two sides of the concave-convex table are respectively shielded, the two times of etching are conducted at different depths, the side edge of a product is straight, the R angle is less than 0.2mm, the side etching is less than 0.02mm, and therefore the 3C electronic design of the lighter and thinner product is facilitated; greatly improves the actual effect of the etched product and meets the requirements in actual production.

Description

Side etching and R-angle etching process for boss steel sheet
Technical Field
The invention relates to the technical field of electronic product design, in particular to a boss steel sheet side etching and R angle etching process.
Background
As semiconductor device dimensions continue to shrink, the accuracy required to form such small devices increases. Not only has it become difficult to shrink the size of semiconductor chips, but even more so, the size of the individual features forming the electrical interconnects.
Many processes are performed to manufacture semiconductor chips. Patterning is one of these processes. In the patterning process, a mask, such as a hardmask, is formed over one or more layers to be patterned. The hardmask is then used to expose the underlayer or underlayers to an etchant to remove the exposed material (i.e., the material not covered by the hardmask or photomask) and to transfer the pattern of the hardmask to the underlayer or underlayers.
Under the current common etching conditions, the R angle of the etched boss product is about 0.25mm, the side etching is about 0.05mm, and the latest requirements of the electronic industry on the boss product cannot be met: r angle <0.2mm, lateral erosion <0.02 mm.
Disclosure of Invention
In order to solve the problems, the invention aims to provide a boss steel sheet side etching and R angle etching process, aiming at enabling the R angle of an etched product to be less than 0.2mm and the side etching to be less than 0.02 mm.
In order to realize the purpose of the invention, the adopted technical scheme is as follows:
a side etching and R angle etching process for a boss steel sheet specifically comprises the following steps:
1) cleaning: immersing the convex plate steel sheet to be etched into a deoiling agent for deoiling treatment, washing the deoiled convex plate steel sheet by using clear water, carrying out microetching treatment by using etching liquid, quickly cleaning the etched convex plate steel sheet by using alkali liquor, washing the etched convex plate steel sheet by using clear water, and drying the material;
2) coating and drying: in a dust-free environment, uniformly coating a layer of liquid photoresist on the surface of a cleaned boss steel sheet to be etched in a screen printing roll coating mode, keeping the surface of the boss steel sheet clean, avoiding direct irradiation of sunlight or a fluorescent lamp, keeping good ventilation in the coating process, and heating after coating to dry the film surface of the liquid photoresist;
3) exposure: the negative film of the boss steel sheet is downward and is tightly attached to the surface of a photosensitive film, then the film is moved to a UV light source for irradiation, so that the cross-linking polymerization reaction is generated, the surface of a liquid photoresist film is hardened, the boss steel sheet is vacuumized while exposure is carried out, and the boss steel sheet is immediately taken out after the exposure is stopped;
4) developing: placing the boss steel sheet in a developing machine, controlling the temperature, the transmission speed and the spraying pressure of a developing solution, adding a quantitative defoaming agent into the developing solution, taking out the boss steel sheet when no glue is left on the surface of the boss steel sheet, fully washing the boss steel sheet by using clear water, and drying the boss steel sheet;
5) compounding a PET film on the A surface: attaching the surface A of the developed boss steel sheet to a PET film, and ensuring that the PET film is completely attached to the surface A of the boss steel sheet without bubbles, so that the surface A is completely shielded;
6) first etching: placing the boss steel sheet subjected to surface A shielding in etching solution for etching, controlling the etching temperature and the etching time, stirring the etching solution to scour the etched surface of the boss steel sheet, taking out the boss steel sheet after reaching the required etching depth, and washing the surface A of the boss steel sheet completely with clear water;
7) compounding a PET film on the B surface: attaching a PET film to the B surface of the developed boss steel sheet, and ensuring that the PET film is completely attached to the B surface of the boss steel sheet without bubbles, so that the B surface is completely shielded;
8) tearing off the compound PET film on the surface A: tearing off the PET film on the surface A of the boss steel sheet, cleaning the surface A by using a degreasing agent, and cleaning the surface A by using clear water, wherein the cleaning process ensures that the PET film on the surface B is tightly attached to the boss steel sheet and does not fall off;
9) secondary etching: placing the boss steel sheet subjected to B-surface shielding in etching solution for etching, controlling the etching temperature and the etching time, stirring the etching solution to scour the etched surface of the boss steel sheet, taking out the boss steel sheet after reaching the required etching depth, and washing the B surface of the boss steel sheet by using clear water;
10) tearing off the compound PET film on the B surface: tearing off the PET film on the B surface of the boss steel sheet, cleaning the A, B surface of the boss steel sheet by using a degreasing agent, cleaning the A, B surface by using clear water, and drying the boss steel sheet in the air after cleaning;
11) removing the film: placing the boss steel sheet with the etched double surfaces in a spraying film removing machine, setting the film removing temperature and the spraying pressure of the film removing machine, spraying the film removing liquid onto the upper surface of the boss steel sheet for film removal, taking out the boss steel sheet after the film removal is finished, washing the boss steel sheet clean with clear water, and coating a thin layer of grease on the surface of the boss steel sheet after drying;
12) checking and packaging: and checking whether the etched boss steel sheet meets the requirement, grinding and polishing the corners of the boss steel sheet, and packaging the qualified boss steel sheet.
Preferably, the degreaser in step 1 of the etching process is a mixed solution of sodium hydroxide, sodium carbonate and sodium phosphate, wherein the concentration of the sodium hydroxide is 5-9g/L, the concentration of the sodium carbonate is 25-35g/L, and the concentration of the sodium phosphate is 20-30 g/L.
Preferably, the etching solution in the etching process steps 1, 6 and 9 is a mixed solution of ferric chloride, 30-35% hydrochloric acid, nitric acid, sulfuric acid and a stabilizer, wherein the concentration of ferric chloride is 500-600g/L, the concentration of 30-35% hydrochloric acid is 100-150g/L, the concentration of nitric acid is 10-18g/L, concentrated sulfuric acid is 10-20g/L, and the stabilizer is 0.3-1.5 g/L.
Preferably, the alkali solution in the etching process step 1 is a mixed solution of sodium hydroxide, potassium hydroxide and sodium carbonate, wherein the concentration of the sodium hydroxide is 2-5g/L, the concentration of the sodium carbonate is 5-8g/L, and the concentration of the potassium hydroxide is 2-5 g/L.
Preferably, the screen printing in the etching process step 2 adopts a 50-250 mesh screen, the substrate plate is vertically placed for drying after coating, the drying temperature of the membrane surface is 70-90 ℃, and the drying time is 10-25 min.
Preferably, the power of the UV light source is 5-10Kw, the vacuum degree is 0.08-0.1Mpa, and the exposure amount is 100-300mj/cm in the exposure in step 3 of the etching process2。
Preferably, in the etching process step 4, the developing solution is 1.5-2.5% sodium carbonate solution, the temperature of the developing solution is 30-35 ℃, the developing time is 35-45s, and the spraying pressure of the developing solution is 1.5-2.5kg/cm2The conveying speed is 1-1.5 m/min.
Preferably, the etching temperature in the etching process steps 6 and 9 is 50-60 ℃, and the etching time is 10-20 min.
Preferably, the film removing liquid in the etching process step 11 is 5-15% sodium carbonate solution, the film removing temperature is 50-70 ℃, and the spraying pressure of the film removing liquid is 1.5-2.5kg/cm2。
The invention has the beneficial effects that: according to the etching process, the existing concave-convex platform etching process is improved, the PET films are respectively attached to the two sides of the concave-convex platform and torn off after time, the PET films are respectively attached to the two sides of the concave-convex platform and torn off twice, the two sides of the concave-convex platform are respectively shielded, the two etching depths are different, the side edge of the product is straight, the R angle is less than 0.2mm, the side erosion is less than 0.02mm, and therefore the 3C electronic design of the lighter and thinner product is facilitated; greatly improves the actual effect of the etched product and meets the requirements in actual production.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the following embodiments of the present invention, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
A side etching and R angle etching process for a boss steel sheet specifically comprises the following steps:
1) cleaning: immersing the convex plate steel sheet to be etched into a deoiling agent for deoiling treatment, washing the deoiled convex plate steel sheet by using clear water, carrying out microetching treatment by using etching liquid, quickly cleaning the etched convex plate steel sheet by using alkali liquor, washing the etched convex plate steel sheet by using clear water, and drying the material;
the degreaser is a mixed solution of sodium hydroxide, sodium carbonate and sodium phosphate, wherein the concentration of the sodium hydroxide is 5g/L, the concentration of the sodium carbonate is 35g/L, and the concentration of the sodium phosphate is 20 g/L;
the etching solution is a mixed solution of ferric chloride, 35% hydrochloric acid, nitric acid, sulfuric acid and a stabilizer, wherein the concentration of the ferric chloride is 500g/L, the concentration of the 35% hydrochloric acid is 100g/L, the concentration of the nitric acid is 18g/L, the concentration of concentrated sulfuric acid is 10g/L, and the concentration of the stabilizer is 1.5 g/L;
the alkali liquor is a mixed liquor of sodium hydroxide, potassium hydroxide and sodium carbonate, wherein the concentration of the sodium hydroxide is 2g/L, the concentration of the sodium carbonate is 8g/L, and the concentration of the potassium hydroxide is 2 g/L;
2) coating and drying: in a dust-free environment, uniformly coating a layer of liquid photoresist on the surface of a cleaned boss steel sheet to be etched in a screen printing roll coating mode, keeping the surface of the boss steel sheet clean, avoiding direct irradiation of sunlight or a fluorescent lamp, keeping good ventilation in the coating process, and heating after coating to dry the film surface of the liquid photoresist;
the screen printing adopts a 250-mesh screen, the substrate plate is vertically placed for drying after being coated, the drying temperature of the membrane surface is 70 ℃, and the drying time is 25 min;
3) exposure: the negative film of the boss steel sheet is downward and is tightly attached to the surface of a photosensitive film, then the film is moved to a UV light source for irradiation, so that the cross-linking polymerization reaction is generated, the surface of a liquid photoresist film is hardened, the boss steel sheet is vacuumized while exposure is carried out, and the boss steel sheet is immediately taken out after the exposure is stopped;
the power of the UV light source is 5Kw, the vacuum degree is 0.1Mpa, and the exposure amount is 100mj/cm2；
4) Developing: placing the boss steel sheet in a developing machine, controlling the temperature, the transmission speed and the spraying pressure of a developing solution, adding a quantitative defoaming agent into the developing solution, taking out the boss steel sheet when no glue is left on the surface of the boss steel sheet, fully washing the boss steel sheet by using clear water, and drying the boss steel sheet;
the developing solution is 2.5% sodium carbonate solution, the temperature of the developing solution is 30 ℃, the developing time is 45s, and the injection pressure of the developing solution is 1.5kg/cm2The conveying speed is 1.5 m/min;
5) compounding a PET film on the A surface: attaching the surface A of the developed boss steel sheet to a PET film, and ensuring that the PET film is completely attached to the surface A of the boss steel sheet without bubbles, so that the surface A is completely shielded;
6) first etching: placing the boss steel sheet subjected to surface A shielding in etching solution for etching, controlling the etching temperature and the etching time, stirring the etching solution to scour the etched surface of the boss steel sheet, taking out the boss steel sheet after reaching the required etching depth, and washing the surface A of the boss steel sheet completely with clear water;
the etching solution is a mixed solution of ferric chloride, 35% hydrochloric acid, nitric acid, sulfuric acid and a stabilizer, wherein the concentration of the ferric chloride is 500g/L, the concentration of the 35% hydrochloric acid is 100g/L, the concentration of the nitric acid is 18g/L, concentrated sulfuric acid is 1g/L, and the concentration of the stabilizer is 1.5 g/L;
the etching temperature during etching is 50 ℃, and the etching time is 20 min;
7) compounding a PET film on the B surface: attaching a PET film to the B surface of the developed boss steel sheet, and ensuring that the PET film is completely attached to the B surface of the boss steel sheet without bubbles, so that the B surface is completely shielded;
8) tearing off the compound PET film on the surface A: tearing off the PET film on the surface A of the boss steel sheet, cleaning the surface A by using a degreasing agent, and cleaning the surface A by using clear water, wherein the cleaning process ensures that the PET film on the surface B is tightly attached to the boss steel sheet and does not fall off;
9) secondary etching: placing the boss steel sheet subjected to B-surface shielding in etching solution for etching, controlling the etching temperature and the etching time, stirring the etching solution to scour the etched surface of the boss steel sheet, taking out the boss steel sheet after reaching the required etching depth, and washing the B surface of the boss steel sheet by using clear water;
the etching solution is a mixed solution of ferric chloride, 35% hydrochloric acid, nitric acid, sulfuric acid and a stabilizer, wherein the concentration of the ferric chloride is 500g/L, the concentration of the 35% hydrochloric acid is 100g/L, the concentration of the nitric acid is 18g/L, the concentration of concentrated sulfuric acid is 10g/L, and the concentration of the stabilizer is 1.5 g/L;
the etching temperature during etching is 50 ℃, and the etching time is 20 min;
10) tearing off the compound PET film on the B surface: tearing off the PET film on the B surface of the boss steel sheet, cleaning the A, B surface of the boss steel sheet by using a degreasing agent, cleaning the A, B surface by using clear water, and drying the boss steel sheet in the air after cleaning;
11) removing the film: placing the boss steel sheet with the etched double surfaces in a spraying film removing machine, setting the film removing temperature and the spraying pressure of the film removing machine, spraying the film removing liquid onto the upper surface of the boss steel sheet for film removal, taking out the boss steel sheet after the film removal is finished, washing the boss steel sheet clean with clear water, and coating a thin layer of grease on the surface of the boss steel sheet after drying;
the film removing solution is 5% sodium carbonate solution, the film removing temperature is 70 ℃, and the spraying pressure of the film removing solution is 1.5kg/cm2；
12) Checking and packaging: and checking whether the etched boss steel sheet meets the requirement, grinding and polishing the corners of the boss steel sheet, and packaging the qualified boss steel sheet.
Example 2
A side etching and R angle etching process for a boss steel sheet specifically comprises the following steps:
1) cleaning: immersing the convex plate steel sheet to be etched into a deoiling agent for deoiling treatment, washing the deoiled convex plate steel sheet by using clear water, carrying out microetching treatment by using etching liquid, quickly cleaning the etched convex plate steel sheet by using alkali liquor, washing the etched convex plate steel sheet by using clear water, and drying the material;
the degreaser is a mixed solution of sodium hydroxide, sodium carbonate and sodium phosphate, wherein the concentration of the sodium hydroxide is 9g/L, the concentration of the sodium carbonate is 25g/L, and the concentration of the sodium phosphate is 30 g/L;
the etching solution is a mixed solution of ferric chloride, 30% hydrochloric acid, nitric acid, sulfuric acid and a stabilizer, wherein the concentration of the ferric chloride is 600g/L, the concentration of the 30% hydrochloric acid is 150g/L, the concentration of the nitric acid is 18g/L, the concentration of concentrated sulfuric acid is 20g/L, and the concentration of the stabilizer is 1.5 g/L;
the alkali liquor is a mixed liquor of sodium hydroxide, potassium hydroxide and sodium carbonate, wherein the concentration of the sodium hydroxide is 5g/L, the concentration of the sodium carbonate is 5g/L, and the concentration of the potassium hydroxide is 5 g/L;
2) coating and drying: in a dust-free environment, uniformly coating a layer of liquid photoresist on the surface of a cleaned boss steel sheet to be etched in a screen printing roll coating mode, keeping the surface of the boss steel sheet clean, avoiding direct irradiation of sunlight or a fluorescent lamp, keeping good ventilation in the coating process, and heating after coating to dry the film surface of the liquid photoresist;
the screen printing adopts a 50-mesh screen, the substrate plate is vertically placed for drying after being coated, the drying temperature of the membrane surface is 90 ℃, and the drying time is 10 min;
3) exposure: the negative film of the boss steel sheet is downward and is tightly attached to the surface of a photosensitive film, then the film is moved to a UV light source for irradiation, so that the cross-linking polymerization reaction is generated, the surface of a liquid photoresist film is hardened, the boss steel sheet is vacuumized while exposure is carried out, and the boss steel sheet is immediately taken out after the exposure is stopped;
the power of the UV light source is 10Kw, the vacuum degree is 0.08Mpa, and the exposure amount is 300mj/cm2；
4) Developing: placing the boss steel sheet in a developing machine, controlling the temperature, the transmission speed and the spraying pressure of a developing solution, adding a quantitative defoaming agent into the developing solution, taking out the boss steel sheet when no glue is left on the surface of the boss steel sheet, fully washing the boss steel sheet by using clear water, and drying the boss steel sheet;
the developing solution is 1.5% sodium carbonate solution, the temperature of the developing solution is 35 ℃, the developing time is 35s, and the injection pressure of the developing solution is 2.5kg/cm2The conveying speed is 1 m/min;
5) compounding a PET film on the A surface: attaching the surface A of the developed boss steel sheet to a PET film, and ensuring that the PET film is completely attached to the surface A of the boss steel sheet without bubbles, so that the surface A is completely shielded;
6) first etching: placing the boss steel sheet subjected to surface A shielding in etching solution for etching, controlling the etching temperature and the etching time, stirring the etching solution to scour the etched surface of the boss steel sheet, taking out the boss steel sheet after reaching the required etching depth, and washing the surface A of the boss steel sheet completely with clear water;
the etching solution is a mixed solution of ferric chloride, 30% hydrochloric acid, nitric acid, sulfuric acid and a stabilizer, wherein the concentration of the ferric chloride is 600g/L, the concentration of the 30% hydrochloric acid is 150g/L, the concentration of the nitric acid is 10g/L, the concentration of concentrated sulfuric acid is 20g/L, and the concentration of the stabilizer is 0.3 g/L;
the etching temperature during etching is 60 ℃, and the etching time is 10 min;
7) compounding a PET film on the B surface: attaching a PET film to the B surface of the developed boss steel sheet, and ensuring that the PET film is completely attached to the B surface of the boss steel sheet without bubbles, so that the B surface is completely shielded;
8) tearing off the compound PET film on the surface A: tearing off the PET film on the surface A of the boss steel sheet, cleaning the surface A by using a degreasing agent, and cleaning the surface A by using clear water, wherein the cleaning process ensures that the PET film on the surface B is tightly attached to the boss steel sheet and does not fall off;
9) secondary etching: placing the boss steel sheet subjected to B-surface shielding in etching solution for etching, controlling the etching temperature and the etching time, stirring the etching solution to scour the etched surface of the boss steel sheet, taking out the boss steel sheet after reaching the required etching depth, and washing the B surface of the boss steel sheet by using clear water;
the etching solution is a mixed solution of ferric chloride, 30% hydrochloric acid, nitric acid, sulfuric acid and a stabilizer, wherein the concentration of the ferric chloride is 600g/L, the concentration of the 30% hydrochloric acid is 150g/L, the concentration of the nitric acid is 10g/L, the concentration of concentrated sulfuric acid is 20g/L, and the concentration of the stabilizer is 0.3 g/L;
the etching temperature during etching is 60 ℃, and the etching time is 10 min;
10) tearing off the compound PET film on the B surface: tearing off the PET film on the B surface of the boss steel sheet, cleaning the A, B surface of the boss steel sheet by using a degreasing agent, cleaning the A, B surface by using clear water, and drying the boss steel sheet in the air after cleaning;
11) removing the film: placing the boss steel sheet with the etched double surfaces in a spraying film removing machine, setting the film removing temperature and the spraying pressure of the film removing machine, spraying the film removing liquid onto the upper surface of the boss steel sheet for film removal, taking out the boss steel sheet after the film removal is finished, washing the boss steel sheet clean with clear water, and coating a thin layer of grease on the surface of the boss steel sheet after drying;
the film removing solution is 15% sodium carbonate solution, the film removing temperature is 50 ℃, and the spraying pressure of the film removing solution is 2.5kg/cm2；
12) Checking and packaging: and checking whether the etched boss steel sheet meets the requirement, grinding and polishing the corners of the boss steel sheet, and packaging the qualified boss steel sheet.
According to the invention, the existing concave-convex platform etching process is improved, the PET films are respectively attached to the two sides of the concave-convex platform and torn off after the moment, the PET films are respectively attached to the two sides of the concave-convex platform and torn off twice through etching twice, the two sides are respectively shielded, the two times of etching are carried out at different depths, the side edge of the product is straight, the R angle is less than 0.2mm, the side erosion is less than 0.02mm, and the lighter and thinner product can be conveniently designed by 3C electronics; greatly improves the actual effect of the etched product and meets the requirements in actual production.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (9)

1. A side etching and R angle etching process for a boss steel sheet is characterized in that: the etching process specifically comprises the following steps:
1) cleaning: immersing the convex plate steel sheet to be etched into a deoiling agent for deoiling treatment, washing the deoiled convex plate steel sheet by using clear water, carrying out microetching treatment by using etching liquid, quickly cleaning the etched convex plate steel sheet by using alkali liquor, washing the etched convex plate steel sheet by using clear water, and drying the material;
2) coating and drying: in a dust-free environment, uniformly coating a layer of liquid photoresist on the surface of a cleaned boss steel sheet to be etched in a screen printing roll coating mode, keeping the surface of the boss steel sheet clean, avoiding direct irradiation of sunlight or a fluorescent lamp, keeping good ventilation in the coating process, and heating after coating to dry the film surface of the liquid photoresist;
3) exposure: the negative film of the boss steel sheet is downward and is tightly attached to the surface of a photosensitive film, then the film is moved to a UV light source for irradiation, so that the cross-linking polymerization reaction is generated, the surface of a liquid photoresist film is hardened, the boss steel sheet is vacuumized while exposure is carried out, and the boss steel sheet is immediately taken out after the exposure is stopped;
4) developing: placing the boss steel sheet in a developing machine, controlling the temperature, the transmission speed and the spraying pressure of a developing solution, adding a quantitative defoaming agent into the developing solution, taking out the boss steel sheet when no glue is left on the surface of the boss steel sheet, fully washing the boss steel sheet by using clear water, and drying the boss steel sheet;
5) compounding a PET film on the A surface: attaching the surface A of the developed boss steel sheet to a PET film, and ensuring that the PET film is completely attached to the surface A of the boss steel sheet without bubbles, so that the surface A is completely shielded;
6) first etching: placing the boss steel sheet subjected to surface A shielding in etching solution for etching, controlling the etching temperature and the etching time, stirring the etching solution to scour the etched surface of the boss steel sheet, taking out the boss steel sheet after reaching the required etching depth, and washing the surface A of the boss steel sheet completely with clear water;
7) compounding a PET film on the B surface: attaching a PET film to the B surface of the developed boss steel sheet, and ensuring that the PET film is completely attached to the B surface of the boss steel sheet without bubbles, so that the B surface is completely shielded;
8) tearing off the compound PET film on the surface A: tearing off the PET film on the surface A of the boss steel sheet, cleaning the surface A by using a degreasing agent, and cleaning the surface A by using clear water, wherein the cleaning process ensures that the PET film on the surface B is tightly attached to the boss steel sheet and does not fall off;
9) secondary etching: placing the boss steel sheet subjected to B-surface shielding in etching solution for etching, controlling the etching temperature and the etching time, stirring the etching solution to scour the etched surface of the boss steel sheet, taking out the boss steel sheet after reaching the required etching depth, and washing the B surface of the boss steel sheet by using clear water;
10) tearing off the compound PET film on the B surface: tearing off the PET film on the B surface of the boss steel sheet, cleaning the A, B surface of the boss steel sheet by using a degreasing agent, cleaning the A, B surface by using clear water, and drying the boss steel sheet in the air after cleaning;
11) removing the film: placing the boss steel sheet with the etched double surfaces in a spraying film removing machine, setting the film removing temperature and the spraying pressure of the film removing machine, spraying the film removing liquid onto the upper surface of the boss steel sheet for film removal, taking out the boss steel sheet after the film removal is finished, washing the boss steel sheet clean with clear water, and coating a thin layer of grease on the surface of the boss steel sheet after drying;
12) checking and packaging: and checking whether the etched boss steel sheet meets the requirement, grinding and polishing the corners of the boss steel sheet, and packaging the qualified boss steel sheet.
2. The side etching and R-angle etching process for convex steel sheet according to claim 1, wherein the process comprises the following steps: the degreaser in the etching process step 1 is a mixed solution of sodium hydroxide, sodium carbonate and sodium phosphate, wherein the concentration of the sodium hydroxide is 5-9g/L, the concentration of the sodium carbonate is 25-35g/L, and the concentration of the sodium phosphate is 20-30 g/L.
3. The side etching and R-angle etching process for convex steel sheet according to claim 1, wherein the process comprises the following steps: the etching solution in the steps 1, 6 and 9 of the etching process is a mixed solution of ferric chloride, 30-35% hydrochloric acid, nitric acid, sulfuric acid and a stabilizer, wherein the concentration of the ferric chloride is 500-600g/L, the concentration of the 30-35% hydrochloric acid is 100-150g/L, the concentration of the nitric acid is 10-18g/L, the concentration of concentrated sulfuric acid is 10-20g/L, and the concentration of the stabilizer is 0.3-1.5 g/L.
4. The side etching and R-angle etching process for convex steel sheet according to claim 1, wherein the process comprises the following steps: the alkali liquor in the etching process step 1 is a mixed liquor of sodium hydroxide, potassium hydroxide and sodium carbonate, wherein the concentration of the sodium hydroxide is 2-5g/L, the concentration of the sodium carbonate is 5-8g/L, and the concentration of the potassium hydroxide is 2-5 g/L.
5. The side etching and R-angle etching process for convex steel sheet according to claim 1, wherein the process comprises the following steps: and in the etching process step 2, a 50-250-mesh screen is adopted for screen printing, the substrate plate is vertically placed for drying after being coated, the drying temperature of the membrane surface is 70-90 ℃, and the drying time is 10-25 min.
6. The side etching and R-angle etching process for convex steel sheet according to claim 1, wherein the process comprises the following steps: the power of the UV light source is 5-10Kw, the vacuum degree is 0.08-0.1Mpa, and the exposure amount is 100-300mj/cm during the exposure in the step 3 of the etching process2。
7. The side etching and R-angle etching process for convex steel sheet according to claim 1, wherein the process comprises the following steps: in the etching process step 4, the developing solution is 1.5-2.5% sodium carbonate solution, the temperature of the developing solution is 30-35 ℃, the developing time is 35-45s, and the injection pressure of the developing solution is 1.5-2.5kg/cm2The conveying speed is 1-1.5 m/min.
8. The side etching and R-angle etching process for convex steel sheet according to claim 1, wherein the process comprises the following steps: the etching temperature in the etching process steps 6 and 9 is 50-60 ℃, and the etching time is 10-20 min.
9. According to claimThe side etching and R angle etching process of the boss steel sheet, which is described in the claim 1, is characterized in that: in the etching process step 11, the stripping solution is 5-15% sodium carbonate solution, the stripping temperature is 50-70 ℃, and the spraying pressure of the stripping solution is 1.5-2.5kg/cm2。
CN201911260466.4A 2019-12-10 2019-12-10 Side etching and R-angle etching process for boss steel sheet Withdrawn CN110904455A (en)

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