CN110822903B - Electric heating furnace body - Google Patents
Electric heating furnace body Download PDFInfo
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- CN110822903B CN110822903B CN201911182187.0A CN201911182187A CN110822903B CN 110822903 B CN110822903 B CN 110822903B CN 201911182187 A CN201911182187 A CN 201911182187A CN 110822903 B CN110822903 B CN 110822903B
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- heating
- furnace
- furnace body
- wire
- electric heating
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
- F27D11/02—Ohmic resistance heating
Abstract
The invention discloses an electric heating furnace body which comprises a furnace shell, a heat insulation layer, an inner cavity and a heating device, wherein the inner cavity is arranged in the furnace shell, the heat insulation layer is arranged between the inner cavity and the furnace shell, two ends of the furnace shell are respectively provided with an end cover and a furnace door, the heating device comprises at least one group of heating wires which are annularly arranged, the heating wires are arranged between the heat insulation layer and the inner cavity, the heating wires are formed by an armored heating wire which is arranged in an S shape along the circumferential direction, two ends of the armored heating wire are respectively connected with a heater cold end, the heater cold ends are fixed on the end covers, and the groups of heating wires are sequentially arranged along the axial direction. The inner cavity, namely the reaction cavity, and the furnace shell are made into an integrated furnace body structure, so that the transportation and installation links of a quartz tube are eliminated, the whole furnace wire of the original structure is replaced by the armored heating wire, the heat capacity of the furnace wire is reduced, complicated wire winding and insulator clamping are eliminated, the cold end of the heater for connecting with the armored heating wire is arranged on the end cover and is not arranged on the outer circumferential surface of the furnace shell, and the breakage in the transportation and installation process is avoided.
Description
Technical Field
The invention relates to a solar cell preparation device, in particular to an electric heating furnace body.
Background
In the production process of the solar cell, two important links are provided, namely surface coating diffusion, which is usually completed in a furnace body in a tubular PECVD furnace and a diffusion furnace. The furnace body (or called as an electric heater) is a core component of the tubular PECVD and diffusion furnaces, the furnace body generally adopts a quartz tube as a process reaction chamber, the quartz tube is easy to break and damage in the processes of transportation, installation, debugging and use due to the fragility of quartz materials, the defects of a notch at the position of the tube opening, cracks of the tube body and the like can cause air leakage of a vacuum system, the quartz tube also needs to be frequently replaced in the use process, the production efficiency is influenced, and the maintenance cost is increased.
In the prior art, the furnace body is sequentially from outside to inside: a furnace shell 1, a heat preservation cotton blanket 101 and furnace wires 102. Two ends of the furnace body are provided with cotton rings 103, adjacent furnace wires 102 are separated by insulators 104, a lead row 105 is led out along the radius direction by welding, a quartz tube is arranged in the furnace body, two ends of the quartz tube are sealed by an end cover 4 and a furnace door 5 to form a reaction cavity, the furnace wires are used for heating and vacuumizing, a graphite boat carries a battery piece, and a film coating process is carried out on the quartz tube.
However, the radial sealing ring is pressed and sealed with the quartz tube by the sealing flange in the quartz tube vacuum reaction chamber, and the requirements on the processing precision and the installation skill of the sealing flange are very high. During the installation and debugging process, the experience of installation and debugging personnel is very depended on, the gas leakage can be caused when the installation and the pressing are not in place, the quartz tube can be fractured when the installation and the pressing are too tight, the collision between the sealing flange and the quartz tube can be caused when the operation is improper during the installation process, and the gas leakage can be caused when the sealing flange collides with the opening of the quartz tube; during the use process, the carrier containing the reactant is required to fall on the inner wall of the quartz tube, and the quartz tube bears the gravity for a long time, so that the tube wall is broken and air leakage is possible. The furnace wire processing process is complex, because the furnace wire has high rigidity, the resistivity and the inner diameter of a furnace wire winding are required to meet specified requirements, and the workload of tool, lead welding, cotton blanket laying, insulator clamping (the number of insulators in each furnace body is 13 × 181 ═ 2353) and the like is large in the furnace body assembly process. The lead wire is fragile with stove silk welding department, and easy breaking takes place, and the welding still can have certain influence to the resistance, and the lead wire is arranged on the face of cylinder, can not roll when the furnace body is placed, otherwise appears bumping bad lead wire row easily.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide an electric heating furnace body which integrates a reaction cavity and a furnace shell, eliminates the links of carrying and installing a quartz tube and replaces the whole furnace wire with a plurality of sections of armored electric heating wires.
In order to solve the technical problems, the invention adopts the following technical scheme:
the utility model provides an electric heating furnace body, includes stove outer covering, insulating layer, interior cavity and heating device, interior cavity is located in the stove outer covering, the insulating layer is located between interior cavity and the stove outer covering, the both ends of stove outer covering are equipped with end cover and furnace gate respectively, heating device includes the heater strip that at least a set of annular was arranged, the heater strip is located between insulating layer and the interior cavity, the heater strip is arranged along the circumferencial direction S-shaped by an armor heating wire and is formed, a heater cold junction is respectively connected at the both ends of armor heating wire, the heater cold junction is fixed on the end cover, and each group' S heater strip is arranged in proper order along the axial.
As a further improvement of the above technical solution, each group of heating wires is provided with a thermocouple, and the thermocouple is fixed on the end cap.
As a further improvement of the technical scheme, the armored electric heating wire comprises a stainless steel shell, an insulator and a heating element, wherein the heating element is arranged in the stainless steel shell and is separated from the stainless steel shell through the insulator.
As a further improvement of the technical scheme, a locking piece for preventing the heating wires from moving is arranged between the heat insulation layer and the inner cavity.
As a further improvement of the technical scheme, the locking piece is a bolt, the bolt sequentially penetrates through the thermal insulation layer and the inner cavity, and threaded holes matched with the bolt are formed in the thermal insulation layer and the inner cavity.
As a further improvement of the above technical solution, the thermal insulation layer comprises at least one layer of blanket containing pickaxe cotton.
As a further improvement of the technical scheme, the thermocouples are annularly arranged on the end cover, the cold ends of the heaters are annularly arranged on the end cover, and the cold ends of the heaters are positioned on the periphery of the thermocouples.
As a further improvement of the technical scheme, the inner cavity is a quartz cavity.
As a further improvement of the technical scheme, sealing flanges are arranged at two ends of the furnace shell, the end cover is connected with the sealing flange at one end, and the furnace door is connected with the sealing flange at the other end.
Compared with the prior art, the invention has the advantages that:
according to the electric heating furnace body, the traditional whole furnace wire is replaced by the multi-section armored electric heating wire, the pretreatment of the furnace wire is omitted, the clamping of an insulator is omitted, the specific heat capacity is reduced, and the energy consumption is reduced; the traditional furnace wire is circularly wound on a cylinder along the axis direction in a spiral shape, and generates a magnetic field after being electrified, the armored electric heating wire in the invention is wound on an arc surface back and forth to offset the magnetic field, and the temperature distribution in the furnace body is more uniform; the traditional furnace body requires a whole furnace wire (the furnace body is scrapped because the welding part is easily burnt out after being electrified), and the waste of the furnace wire is large, and the armoured electric heating wire in the invention is independent in multiple sections, so that the waste is avoided; the lead row which needs to be welded with the furnace wires on the furnace shell is placed on the end face of the furnace shell, the armored electric heating wire terminal is prevented from rolling by the furnace body in the carrying or placing process, the lead row is prevented from being damaged, and meanwhile, the welding of the lead is avoided; the reaction cavity (inner cavity) and the heating device are integrated, a quartz tube does not need to be arranged independently, and the carrying and the installation of the quartz tube are avoided.
Drawings
Fig. 1 is a schematic structural diagram of a heating furnace body in the prior art.
Fig. 2 is a schematic view of the internal structure of a heating furnace body in the prior art.
Fig. 3 is a schematic structural view of a furnace wire and an insulator of a heating furnace body in the prior art.
Fig. 4 is a schematic front view of the electric heating furnace body of the present invention.
Fig. 5 is a schematic axial structural view of the electric heating furnace body of the present invention.
Fig. 6 is a schematic view of the structure of an sheathed heating wire according to the present invention.
Fig. 7 is a schematic diagram of the structure of the cold end of the heater of the present invention.
The reference numerals in the figures denote:
1. a furnace shell; 101. a heat-insulating cotton blanket; 102. furnace wires; 103. cotton rings; 104. an insulator; 105. a lead row; 11. sealing the flange; 2. a thermal insulation layer; 3. an inner cavity; 4. an end cap; 41. mounting a plate; 5. a furnace door; 6. heating wires; 61. armouring the electric heating wire; 611. a stainless steel housing; 612. an insulator; 613. a heating element; 7. a cold end of the heater; 71. a serial number; 8. a thermocouple; 9. and (4) bolts.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples of the specification.
As shown in fig. 4 to 7, the electric heating furnace body of the embodiment, including furnace shell 1, insulating layer 2, interior cavity 3 and heating device, interior cavity 3 is located in furnace shell 1, insulating layer 2 is located between interior cavity 3 and the furnace shell 1, the both ends of furnace shell 1 are equipped with end cover 4 and furnace gate 5 respectively, heating device includes the heater strip 6 that at least a set of annular was arranged, heater strip 6 is located between insulating layer 2 and the interior cavity 3, heater strip 6 is arranged by an armor heating wire 61 along circumferencial direction S shape and is formed, a heater cold junction 7 is respectively connected at the both ends of armor heating wire 61, heater cold junction 7 is fixed on end cover 4, each set of heater strip 6 arranges in proper order along the axial.
In the embodiment, six groups of heating wires 6 are taken as an example, and the six groups of heating wires 6 are sequentially arranged along the axial direction of the furnace shell 1. Every group heater strip is joined in marriage two heater cold junctions 7, and heater cold junction 7 is connected with armor heating wire 61 in the inside one end of furnace body, and one end is connected with the power cord in addition, belongs to the transition structure who connects power and armor heating wire 61. The heater cold ends 7 connected to both ends of all the sheathed heating wires 61 are arranged on the end cap 4. The graphite boat for loading the battery piece is directly placed in the inner cavity 3 to heat the battery piece.
The electric heating furnace body has the advantages that the inner cavity 3, namely the reaction cavity, and the furnace shell 1 are made into an integrated furnace body structure, the transportation and installation links of a quartz tube are omitted, the armored heating wire 61 is used for replacing the whole furnace wire of the original structure, the heat capacity of the furnace wire is reduced (the original furnace wire generally needs 60 kilograms, energy is consumed when the furnace wire is heated from the normal temperature to the reaction temperature, the temperature reduction time is longer), the complex wire winding and insulator clamping are omitted, the armored heating wire 61 is flexible, the cold end 7 of the heater for connecting with the armored heating wire 61 is installed on the end cover 4 and is not arranged on the outer circumferential surface of the furnace shell 1, and the breakage in the transportation and installation processes is avoided. The heater wires 6 may be provided in six or more groups, and selected according to the length of the furnace body.
In this embodiment, serial number mark is carried out to heater cold junction 7, adds serial number 71 and makes the sign, avoids the confusion. Each group of heating wires 6 is provided with a thermocouple 8, and the thermocouple 8 is arranged on the end cover 4. Each group of sheathed heating wires 61 forms a temperature zone, the temperature can be controlled independently, and the thermocouple 8 is used for measuring the instantaneous temperature of each temperature zone. Specifically, a mounting plate 41 is provided in the central region of the end cap 4. the thermocouple 8 is mounted on the mounting plate 41, and the heater cold end 7 is also mounted on the mounting plate 41. The thermocouples 8 are arranged on the mounting plate 41 in a ring shape, and the cold ends 7 of the heaters are arranged on the mounting plate 41 in a ring shape and are respectively arranged on circles which take the center of the end cover 4 as the center and have different radiuses (the cold ends 7 of the heaters are positioned on the periphery of the thermocouples 8).
In this embodiment, the sheathed heating wire 61 includes a stainless steel case 611, an insulator 612, and a heating element 613, the heating element 613 is provided in the stainless steel case 611 and is separated from the stainless steel case 611 by the insulator 612, and the insulator 612 is preferably magnesium oxide. The maximum temperature born by the armored heating wire 61 is 750 ℃, the armored heating wire is used for heating and providing a heat source for the reaction chamber, and the surface of the armored heating wire 61 cannot be seriously scratched, bruised, cracked, pitted and other adverse phenomena. In this embodiment, two heating elements 613 are preferable. Besides, the number of the carbon atoms may be single or plural.
In this embodiment, a locking member for preventing the heating wire 6 from moving is arranged between the heat insulation layer 2 and the inner cavity 3. The retaining member is preferably bolt 9, and bolt 9 wears to locate in proper order on insulating layer 2 and interior cavity 3, and all be equipped with on insulating layer 2 and the interior cavity 3 with bolt 9 complex screw hole, through rotatory bolt 9, screw up interior cavity 3 and insulating layer 2, clip heater strip 6 to prevent that heater strip 6 from producing and sliding or removing.
In this embodiment, the furnace shell 1 has sealing flanges 11 welded at both ends thereof, the end cover 4 is connected to the sealing flange 11 at one end thereof, and the furnace door 5 is connected to the sealing flange 11 at the other end thereof. The heat insulation layer 2 comprises three layers of cotton blankets containing pickaxes with good heat insulation effect. The inner cavity 3 is designed to have an effective inner diameter d of 460mm, the inner cavity 3 is preferably a quartz cavity, and the quartz material has the characteristics of high temperature resistance and corrosion resistance. Besides, other high-temperature and corrosion resistant materials can be used instead.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make numerous possible variations and modifications to the present invention, or modify equivalent embodiments to equivalent variations, without departing from the scope of the invention, using the teachings disclosed above. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical spirit of the present invention should fall within the protection scope of the technical scheme of the present invention, unless the technical spirit of the present invention departs from the content of the technical scheme of the present invention.
Claims (7)
1. An electric heating furnace body is characterized in that: including stove outer covering (1), insulating layer (2), interior cavity (3) and heating device, interior cavity (3) are located in stove outer covering (1), between interior cavity (3) and stove outer covering (1) are located to insulating layer (2), interior cavity (3) are the quartz cavity, interior cavity (3) and stove outer covering (1) formula structure as an organic whole remove the transport and the installation link of quartz cavity from, the both ends of stove outer covering (1) are equipped with end cover (4) and furnace gate (5) respectively, heating device includes heater strip (6) that at least a set of annular was arranged, heater strip (6) are located between insulating layer (2) and interior cavity (3), heater strip (6) are arranged by an armor heating wire (61) along circumferencial direction S shape and are formed, a heater cold junction (7) are respectively connected at the both ends of armor heating wire (61), heater cold junction (7) are fixed on end cover (4), each group of heating wires (6) are sequentially arranged along the axial direction, and locking pieces for preventing the heating wires (6) from moving are arranged between the heat insulation layer (2) and the inner cavity (3).
2. The electric heating furnace body of claim 1, characterized in that: each group of heating wires (6) is provided with a thermocouple (8), and the thermocouple (8) is fixed on the end cover (4).
3. The electric heating furnace body of claim 1, characterized in that: the armored heating wire (61) comprises a stainless steel shell (611), an insulator (612) and a heating element (613), wherein the heating element (613) is arranged in the stainless steel shell (611) and is separated from the stainless steel shell (611) through the insulator (612).
4. The electric heating furnace body of claim 1, characterized in that: the retaining member is bolt (9), bolt (9) wear to locate on insulating layer (2) and interior cavity (3) in proper order, and all be equipped with on insulating layer (2) and interior cavity (3) with bolt (9) complex screw hole.
5. The electric heating furnace body according to any one of claims 1 to 3, characterized in that: the heat insulation layer (2) comprises at least one layer of cotton blanket containing pickaxe.
6. The electric heating furnace body of claim 2, characterized in that: the thermocouples (8) are annularly arranged on the end cover (4), the cold ends (7) of the heaters are annularly arranged on the end cover (4), and the cold ends (7) of the heaters are positioned on the periphery of the thermocouples (8).
7. The electric heating furnace body according to any one of claims 1 to 3, characterized in that: the furnace shell (1) is provided with sealing flanges (11) at two ends, the end cover (4) is connected with the sealing flange (11) at one end, and the furnace door (5) is connected with the sealing flange (11) at the other end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911182187.0A CN110822903B (en) | 2019-11-27 | 2019-11-27 | Electric heating furnace body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911182187.0A CN110822903B (en) | 2019-11-27 | 2019-11-27 | Electric heating furnace body |
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| Publication Number | Publication Date |
|---|---|
| CN110822903A CN110822903A (en) | 2020-02-21 |
| CN110822903B true CN110822903B (en) | 2022-02-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911182187.0A Active CN110822903B (en) | 2019-11-27 | 2019-11-27 | Electric heating furnace body |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2446744Y (en) * | 2000-09-12 | 2001-09-05 | 浙江春晖集团公司 | Armoured electric heating component with built-in electric thermo-couple |
| CN201898631U (en) * | 2010-11-15 | 2011-07-13 | 上海胜迪实业有限公司 | Armored tiny spiral double-pipe electrical heating wire |
| CN202329128U (en) * | 2011-11-16 | 2012-07-11 | 宜兴市前锦炉业设备有限公司 | Multi-temperature-area tubular furnace |
| CN204045554U (en) * | 2014-07-18 | 2014-12-24 | 中国电子科技集团公司第四十八研究所 | A kind of water-cooled body of heater for High temperature diffusion oxidation furnace |
| CN104571176A (en) * | 2014-12-05 | 2015-04-29 | 上海卫星装备研究所 | High-precision zone control temperature simulation device |
| CN105571320A (en) * | 2016-02-18 | 2016-05-11 | 西北工业大学 | Multi-temperature-zone tube furnace based on real-time temperature measurement |
-
2019
- 2019-11-27 CN CN201911182187.0A patent/CN110822903B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2446744Y (en) * | 2000-09-12 | 2001-09-05 | 浙江春晖集团公司 | Armoured electric heating component with built-in electric thermo-couple |
| CN201898631U (en) * | 2010-11-15 | 2011-07-13 | 上海胜迪实业有限公司 | Armored tiny spiral double-pipe electrical heating wire |
| CN202329128U (en) * | 2011-11-16 | 2012-07-11 | 宜兴市前锦炉业设备有限公司 | Multi-temperature-area tubular furnace |
| CN204045554U (en) * | 2014-07-18 | 2014-12-24 | 中国电子科技集团公司第四十八研究所 | A kind of water-cooled body of heater for High temperature diffusion oxidation furnace |
| CN104571176A (en) * | 2014-12-05 | 2015-04-29 | 上海卫星装备研究所 | High-precision zone control temperature simulation device |
| CN105571320A (en) * | 2016-02-18 | 2016-05-11 | 西北工业大学 | Multi-temperature-zone tube furnace based on real-time temperature measurement |
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| CN110822903A (en) | 2020-02-21 |
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