CN219959022U - High-temperature diffusion furnace and diffusion device - Google Patents
High-temperature diffusion furnace and diffusion device Download PDFInfo
- Publication number
- CN219959022U CN219959022U CN202321156410.6U CN202321156410U CN219959022U CN 219959022 U CN219959022 U CN 219959022U CN 202321156410 U CN202321156410 U CN 202321156410U CN 219959022 U CN219959022 U CN 219959022U
- Authority
- CN
- China
- Prior art keywords
- diffusion furnace
- heating wire
- high temperature
- temperature diffusion
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000009792 diffusion process Methods 0.000 title claims abstract description 114
- 238000010438 heat treatment Methods 0.000 claims abstract description 97
- 238000000034 method Methods 0.000 claims abstract description 14
- 230000002093 peripheral effect Effects 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 238000004321 preservation Methods 0.000 claims 5
- 238000012423 maintenance Methods 0.000 abstract description 5
- 230000002035 prolonged effect Effects 0.000 abstract description 4
- 230000005540 biological transmission Effects 0.000 abstract description 3
- 238000001125 extrusion Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 17
- 238000009413 insulation Methods 0.000 description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 10
- 239000010453 quartz Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 230000009286 beneficial effect Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 229920000742 Cotton Polymers 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052863 mullite Inorganic materials 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Abstract
The utility model discloses a high-temperature diffusion furnace, which comprises a diffusion furnace tube and a heating wire, wherein an accommodating channel is arranged in the diffusion furnace tube; the heating wire is wound on the peripheral wall of the diffusion furnace tube; wherein the cross section of the heating wire is non-circular. By adopting the structure, the noncircular heating wire still has good structural strength under the high-temperature process condition of 1050 ℃, and the heating wire can still keep the original state after long-time high-temperature operation, thereby greatly reducing the probability of extrusion damage to the diffusion furnace tube of the heating wire due to deformation and protrusion and protecting the high-temperature diffusion furnace. The utility model also discloses a diffusion device which comprises a gas transmission assembly and the high-temperature diffusion furnace. By adopting the high-temperature diffusion furnace, the service life of the high-temperature diffusion furnace can be prolonged, and the maintenance cost of the diffusion device is reduced.
Description
Technical Field
The utility model relates to the technical field of solar cells, in particular to a high-temperature diffusion furnace and a diffusion device.
Background
It is known that a silicon wafer is a main component for manufacturing a solar cell, an enterprise needs to adopt a high-temperature diffusion furnace to dope the silicon wafer in the production process so that a PN junction is formed inside the silicon wafer, specifically, in the manufacturing process of the solar cell, the surface of the silicon wafer needs to be subjected to diffusion process treatment in the high-temperature diffusion furnace, the conductivity type of the surface layer of the semiconductor chip is changed mainly by using a method of diffusing impurity atoms into the semiconductor chip, so that a P-N junction is formed, and the method is also a main process for forming the P-N junction.
At present, TOPCon batteries occupy the main stream of the market, when a silicon wafer of the TOPCon batteries is manufactured, the silicon wafer is required to be put into a high-temperature diffusion furnace for diffusion doping boron to form a PN junction, the highest process temperature is required to reach 1050 ℃ in the diffusion process, and the high-temperature diffusion furnace is a great test, and the current high-temperature diffusion furnace generally comprises the following structure: including inside hollow furnace body, the inside of furnace body is provided with the quartz boiler tube, and the passageway of holding that is used for placing the silicon chip is offered to the inside of quartz boiler tube, and the periphery wall winding of quartz boiler tube has the heater strip that the circular shape of cross-section of heater strip can generate heat, and the heater strip is along the length direction spiral winding of quartz boiler tube and form the multiturn heating collar, and the heater strip is located between the inner wall of furnace body and the periphery wall of quartz boiler tube.
Although the high-temperature diffusion furnace can meet the requirement of enterprises for diffusion doping of silicon wafers under the condition that the temperature is up to 1050 ℃, after the high-temperature diffusion furnace is used for 3 to 4 months, a round heating wire emits deformation protrusions, and the heating wire is wound on the peripheral wall of a quartz furnace tube, so that the heating wire easily extrudes the peripheral wall of the quartz furnace tube in the deformation protrusion process, and accordingly the quartz furnace tube is cracked or damaged, and the production of the high-temperature diffusion furnace is seriously affected.
Disclosure of Invention
The present utility model aims to solve one of the problems of the prior art at least to some extent. Therefore, the first aspect of the utility model provides a high-temperature diffusion furnace, which can reduce the deformation probability of the heating wire under the high-temperature condition as much as possible and is helpful for protecting the high-temperature diffusion furnace; the second aspect of the utility model provides a diffusion device adopting the high-temperature diffusion furnace, which is beneficial to reducing the maintenance cost of the diffusion device.
A high temperature diffusion according to the first aspect of the present utility model comprises: the diffusion furnace tube is internally provided with a containing channel; the heating wire is wound on the outer peripheral wall of the diffusion furnace tube; wherein, the cross section shape of the heating wire is non-circular.
The high-temperature diffusion furnace provided by the utility model has the following beneficial effects:
by adopting the heating wire with the non-circular cross section shape to heat the diffusion furnace tube, the non-circular heating wire still has good structural strength under the high-temperature process condition of 1050 ℃, so that the heating wire can still keep the original shape after long-time high-temperature operation, the probability of extrusion damage to the diffusion furnace tube due to deformation and protrusion of the heating wire is greatly reduced, the service life of the diffusion furnace tube is prolonged, the high-temperature diffusion furnace is protected, and the maintenance cost is reduced.
In some embodiments, the heating wire is spirally wound on the peripheral wall of the diffusion furnace tube and forms a plurality of heating rings;
at least one insulating piece is arranged between two adjacent heating rings, one end of the insulating piece is abutted with one heating ring, and the other end of the insulating piece is abutted with the other heating ring.
In some embodiments, both ends of the insulating member are provided with an open slot adapted to the outline of the heating ring, and the heating ring is embedded in the open slot.
In some embodiments, the cross-sectional shape of the heating wire is rectangular, and the open slot is a rectangular slot.
In some embodiments, the furnace further comprises a furnace body with a hollow inside, and the furnace body is sleeved on the periphery of the heating wire.
In some embodiments, an insulating layer is circumferentially arranged on the inner wall of the furnace body, and the insulating layer is located between the inner wall of the furnace body and the outer wall of the heating wire.
In some embodiments, the furnace body is a metal cylinder, and the heat-insulating layer is tightly attached to the inner wall of the metal cylinder.
In some embodiments, the heat-insulating layer is disposed in the middle of the inner wall of the furnace body, and the inner walls of the two ends of the furnace body are provided with placing slot positions, and each placing slot position is provided with a heat-insulating ring.
In some embodiments, the cross-sectional shape of the heating wire is a convex or oval shape or an i-shape.
The diffusion device according to the second aspect of the utility model comprises a gas transmission assembly and the high-temperature diffusion furnace, wherein the gas transmission assembly is used for transmitting process gas into the accommodating channel.
The diffusion device provided by the utility model has the following beneficial effects:
by adopting the high-temperature diffusion furnace, the service life of the high-temperature diffusion furnace can be prolonged, and the maintenance cost of the diffusion device is reduced.
Drawings
FIG. 1 is a schematic view of a high temperature diffusion furnace according to certain embodiments of the present utility model;
fig. 2 is a schematic exploded view of the high temperature diffusion furnace shown in fig. 1;
FIG. 3 is an enlarged schematic view at A in FIG. 1;
FIG. 4 is an enlarged schematic view at B in FIG. 1;
FIG. 5 is a schematic cross-sectional structure of a first embodiment of a heating wire in the high temperature diffusion furnace shown in FIG. 1;
FIG. 6 is a schematic cross-sectional structure of a second embodiment of a heating wire in the high temperature diffusion furnace shown in FIG. 1;
FIG. 7 is a schematic cross-sectional structure of a third embodiment of a heating wire in the high temperature diffusion furnace shown in FIG. 1;
fig. 8 is a schematic cross-sectional structure of a fourth embodiment of a heating wire in the high-temperature diffusion furnace shown in fig. 1.
Detailed Description
Examples of the present embodiment are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The examples described below by referring to the drawings are illustrative only for the explanation of the present embodiment and are not to be construed as limiting the present embodiment.
The drawings used in the present embodiment are schematic and schematic, and are merely for convenience in describing the present embodiment and for simplifying the description, and thus should not be construed as limiting the present embodiment.
In the description of the present embodiment, the meaning of a plurality is one or more, the meaning of a plurality is two or more, and greater than, less than, exceeding, etc. are understood to exclude the present number, and the meaning of above, below, within, etc. are understood to include the present number. The description of the first and second is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.
In the description of the present embodiment, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly, and those skilled in the art may reasonably determine the specific meaning of the above terms in the present embodiment in combination with the specific contents of the technical solution.
Fig. 1 to 8 are schematic views of a certain embodiment of a high temperature diffusion furnace of the present utility model.
Referring to fig. 1 to 5, a high temperature diffusion furnace (hereinafter, sometimes simply referred to as a "high temperature diffusion furnace") according to the present embodiment is used to perform a diffusion process treatment on a silicon wafer so that a PN junction is formed inside the silicon wafer, and in particular, in a manufacturing process of a solar cell, a surface of the silicon wafer needs to be subjected to a diffusion process treatment in the high temperature diffusion furnace, which mainly changes a conductivity type of a surface layer of a semiconductor chip by using a method in which impurity atoms diffuse into the inside of the semiconductor chip, thereby forming a P-N junction, which is also a main process for forming a P-N junction.
In this embodiment, the diffusion furnace tube 100 is a cylindrical tube made of quartz material, and the interior of the cylindrical tube is hollow and forms the above-mentioned receiving channel 110, i.e. the receiving channel 110 extends along the length direction of the diffusion furnace tube 100 and penetrates through the whole diffusion furnace tube 100, and the above-mentioned receiving channel 110 can be used for placing a silicon wafer to be subjected to diffusion process treatment. The outer peripheral wall of the diffusion furnace tube 100 is provided with a heating wire 200 capable of heating by the passage of electricity, specifically, the heating wire 200 is wound around the outer peripheral wall of the diffusion furnace tube 100, so that the diffusion furnace tube 100 can be better heated when the heating wire 200 is energized, in order to enhance the structural strength of the heating wire 200 at a high temperature, in this embodiment, the heating wire 200 wound around the outer peripheral wall of the diffusion furnace tube 100 is a non-circular heating wire, that is, the cross section of the heating wire 200 is non-circular. The cross section of the heating wire 200 is a cross section perpendicular to the longitudinal direction of the heating wire 200.
The high-temperature diffusion furnace of the embodiment heats the diffusion furnace tube 100 by adopting the heating wire 200 with the non-circular cross section, and the non-circular heating wire 200 still has good structural strength under the high-temperature process condition of 1050 ℃, so that the heating wire 200 can still keep the original state after long-time high-temperature operation, the probability that the heating wire 200 extrudes and damages the diffusion furnace tube 100 due to deformation and protrusion is greatly reduced, the service life of the diffusion furnace tube 100 is prolonged, the high-temperature diffusion furnace is protected, and the maintenance cost is reduced.
Referring to fig. 2 to 4, in order to make the heating wire 200 heat the diffusion furnace tube 100 better, in some embodiments of the present utility model, the heating wire 200 of the high temperature diffusion furnace is disposed along the length direction of the diffusion furnace tube 100, specifically, the heating wire 200 is spirally wound around the outer circumferential wall of the diffusion furnace tube 100 and forms a plurality of heating rings 210 along the length direction of the diffusion furnace tube 100, at least one insulating member 300 is disposed between two adjacent heating rings 210, and in this embodiment, a plurality of insulating members 300 are disposed between two adjacent heating rings 210, and it should be noted that the number of insulating members 300 disposed between two adjacent heating rings 210 may be one, two, three, or more, and may be specifically determined according to practical needs. Each insulating member 300 is disposed between two adjacent heating rings 210, one end of the insulating member 300 abuts against one of the heating rings 210, and the other end of the insulating member 300 abuts against the other heating ring 210. By adopting the above structure, the heating wire 200 can uniformly heat the entire diffusion furnace tube 100, so that the temperature inside the diffusion furnace tube 100 is kept substantially uniform, and two adjacent heating rings 210 are spaced apart by the insulating member 300, which not only prevents the heating wire 200 from being shorted, but also can fix the heating wire 200, so that the heating wire 200 can be fixedly mounted on the outer peripheral wall of the diffusion furnace tube 100, and in this embodiment, the insulating member 300 can also be connected with the outer peripheral wall of the diffusion furnace tube 100, specifically according to practical needs.
In order to make the insulating member 300 better locate the heating rings 210, in some embodiments of the present utility model, two ends of the insulating member 300 located between two adjacent heating rings 210 are provided with structures for locating the heating rings 210, specifically, two ends of the insulating member 300 are provided with open slots 310 adapted to the outline of the heating rings 210. When the insulating member 300 is installed between two adjacent heating rings 210, one heating ring 210 is fitted into the open groove 310 at one end of the insulating member 300, and the other heating ring 210 is fitted into the open groove 310 at the other end of the insulating member 300. The adjacent two heating rings 210 are positioned or limited by the open grooves 310 at both ends of the insulating member 300, so that the heating rings 210 are prevented from moving relative to the insulating member 300, and thus the insulating member 300 has a better effect of fixing the adjacent two heating rings 210, and the heating wire 200 is prevented from being short-circuited.
Referring to fig. 3 to 5, in order to facilitate the production process of the heating wire 200 and the insulating member 300, in some embodiments of the present utility model, the cross-sectional shape of the heating wire 200 is rectangular, and the open groove 310 is a rectangular groove corresponding to the outline of the heating wire 200. The cross section of the heating wire 200 in this embodiment is rectangular, and the open slot 310 is rectangular, so that the production and processing of the two are simpler and more convenient, which is helpful for reducing the production and processing costs of the heating wire 200 and the insulating member 300.
The cross-sectional shape of the heating wire 200 may be other than the rectangle described above, and referring to fig. 6 to 8, the cross-sectional shape of the heating wire 200 may be a convex shape, an oval shape, or an i-shape, or the cross-sectional shape of the heating wire 200 may be other irregular shape, not limited to the rectangle, and may be specifically determined according to actual needs.
Referring to fig. 1 to 3, in order to better protect the diffusion furnace tube 100, the high temperature diffusion furnace according to some embodiments of the present utility model further includes a furnace body 400 having a length not shorter than that of the diffusion furnace tube 100, in this embodiment, the furnace body 400 is a hollow cylinder, and the diffusion furnace tube 100 spirally wound with the heating wire 200 is installed inside the furnace body 400, so that the furnace body 400 is sleeved on the outer circumference of the heating wire 200. Through adopting above-mentioned structure, furnace body 400 both can prevent that the foreign object from colliding and contacting the peripheral lateral wall of diffusion furnace tube 100, helps protecting diffusion furnace tube 100 from external force collision damage, keeps apart heater strip 200 through furnace body 400 in addition, can avoid personnel to contact heater strip 200 and/or diffusion furnace tube 100 of high temperature and scalded, can protect personal safety.
In order to reduce heat loss from the outside during operation of the high temperature diffusion furnace, in some embodiments of the present utility model, the heat insulation layer 500 is circumferentially disposed on the inner wall of the furnace body 400, that is, the heat insulation layer 500 is an annular member disposed around the inner wall of the furnace body 400, and the heat insulation layer 500 is sleeved on the periphery of the heating wire 200, so that the heat insulation layer 500 is located between the inner wall of the furnace body 400 and the outer wall of the heating wire 200. In order to improve the heat insulation effect of the heat insulation layer 500, in this embodiment, the heat insulation layer 500 is made of polycrystalline mullite fiber cotton, so that the heat insulation layer 500 has good high temperature resistance and heat insulation performance. Of course, the heat insulating layer 500 is made of other heat insulating materials, and may be specifically determined according to practical needs.
In order to enhance the structural strength of the furnace body 400, in some embodiments of the present utility model, the furnace body 400 is a metal cylinder, and the heat insulation layer 500 is closely attached to the inner wall of the metal cylinder. In this embodiment, the furnace body 400 is a stainless steel cylinder made of stainless steel, the heat-insulating layer 500 is tightly attached to the inner wall of the stainless steel cylinder, the furnace body 400 is better fixed by the heat-insulating layer 500, and the furnace body 400 is not easy to deform, so that the use requirement of a user is met. By adopting the metal material workpiece furnace body 400, the production and the manufacture of the furnace body 400 are facilitated, the furnace body 400 has good structural strength, is not easy to damage in the follow-up process, and has longer service life. Besides the furnace body 400 made of stainless steel, other materials that are resistant to high temperature and have good structural strength, such as iron or aluminum alloy, may be used, and may be specifically determined according to practical needs.
To further enhance the heat insulation performance of the high temperature diffusion furnace, in some embodiments of the present utility model, the heat insulation layer 500 is disposed in the middle of the inner wall of the metal cylinder, and the inner walls of both ends of the metal cylinder are provided with the placing slots 410, and each placing slot 410 is provided with the heat insulation ring 600. In this embodiment, the heat-insulating ring 600 is made of polycrystalline mullite fiber cotton, so that the heat-insulating ring 600 has good high temperature resistance and heat insulation performance. Of course, the heat insulating layer 500 is made of other heat insulating materials, and may be specifically determined according to practical needs. According to the embodiment, the two heat insulation rings 600 are arranged at the two ends of the inner wall of the furnace body 400, so that heat can be effectively prevented from being dissipated outwards from the two ends of the furnace body 400, the heat insulation performance of the high-temperature diffusion furnace is further enhanced, and the energy consumption of the high-temperature diffusion furnace is reduced.
Referring to fig. 1 to 8, a diffusion apparatus according to some embodiments of the present utility model includes a gas delivery assembly for delivering a process gas into an accommodating passage 110 of a diffusion furnace tube 100, and the high temperature diffusion furnace described above.
The diffusion device adopts all the technical schemes of the high-temperature diffusion furnace in the above embodiment, so that the diffusion device has at least all the beneficial effects brought by the technical schemes in the above embodiment, and the description is omitted here.
While examples of the present embodiment have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the embodiments, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A high temperature diffusion furnace, comprising:
the diffusion furnace tube is internally provided with a containing channel;
the heating wire is wound on the outer peripheral wall of the diffusion furnace tube;
wherein, the cross section shape of the heating wire is non-circular.
2. The high temperature diffusion furnace according to claim 1, wherein: the heating wires are spirally wound on the peripheral wall of the diffusion furnace tube and form a plurality of heating rings;
at least one insulating piece is arranged between two adjacent heating rings, one end of the insulating piece is abutted with one heating ring, and the other end of the insulating piece is abutted with the other heating ring.
3. The high temperature diffusion furnace according to claim 2, wherein: the two ends of the insulating piece are provided with open grooves matched with the outline of the heating ring, and the heating ring is embedded in the open grooves.
4. A high temperature diffusion furnace according to claim 3, wherein: the cross section of the heating wire is rectangular, and the open slot is a rectangular slot.
5. The high temperature diffusion furnace according to claim 1, wherein: the furnace body is sleeved on the periphery of the heating wire.
6. The high temperature diffusion furnace according to claim 5, wherein: the heat preservation is arranged on the circumference of the inner wall of the furnace body, and the heat preservation is positioned between the inner wall of the furnace body and the outer wall of the heating wire.
7. The high temperature diffusion furnace according to claim 6, wherein: the furnace body is a metal cylinder, and the heat preservation layer is clung to the inner wall of the metal cylinder.
8. The high temperature diffusion furnace according to claim 7, wherein: the heat preservation set up in the middle part of furnace body inner wall, just the both ends inner wall of furnace body all is provided with and sheds the trench, every shelve the trench and all be provided with the heat preservation circle.
9. The high temperature diffusion furnace according to claim 1 or 2 or 3 or 5 or 6 or 7 or 8, characterized in that: the cross section of the heating wire is in a convex shape or an elliptic shape or an I-shaped shape.
10. The diffusion device is characterized in that: a high temperature diffusion furnace as claimed in any one of claims 1 to 9 and including a gas delivery assembly for delivering process gas into the interior of the containment duct.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321156410.6U CN219959022U (en) | 2023-05-12 | 2023-05-12 | High-temperature diffusion furnace and diffusion device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321156410.6U CN219959022U (en) | 2023-05-12 | 2023-05-12 | High-temperature diffusion furnace and diffusion device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219959022U true CN219959022U (en) | 2023-11-03 |
Family
ID=88539595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321156410.6U Active CN219959022U (en) | 2023-05-12 | 2023-05-12 | High-temperature diffusion furnace and diffusion device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219959022U (en) |
-
2023
- 2023-05-12 CN CN202321156410.6U patent/CN219959022U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10273580B2 (en) | Heating device | |
| CN219959022U (en) | High-temperature diffusion furnace and diffusion device | |
| CN105222597A (en) | A kind of horizontal diffusion furnace fast cooling body of heater | |
| CN205483310U (en) | Real core armoured thermocouple of single tube multiple spot | |
| US20140103024A1 (en) | Heater device and heat treatment apparatus | |
| CN213956012U (en) | Tubular heating furnace body structure | |
| CN111524835A (en) | Semiconductor processing equipment | |
| JP5505865B2 (en) | Insulated tube and superconducting cable | |
| CN103697476B (en) | A kind of flat double-P type radiant tube | |
| CN215643820U (en) | High temperature resistant copper core cable | |
| CN110527987A (en) | Reaction chamber | |
| CN110822903B (en) | Electric heating furnace body | |
| CN218249467U (en) | Exhaust gas purification device and treatment equipment | |
| CN221053898U (en) | Heating jacket device | |
| JP2017154414A (en) | Pricking roller | |
| CN220977134U (en) | Auxiliary sleeve of furnace tube machine | |
| CN212559940U (en) | Water drum structure of batch feeder | |
| CN220224441U (en) | Tubular diffusion oxidation furnace and semiconductor diffusion oxidation equipment | |
| CN215177090U (en) | Heat exchanger with high heat exchange rate | |
| CN214706971U (en) | Stable heat-shrinkable tube | |
| CN219634304U (en) | Vulcanizing medium heater and new energy vulcanizing machine comprising same | |
| CN209065734U (en) | A kind of heat-transfer device and the quartz ampoule with water-cooling flange | |
| CN214799938U (en) | Fin electric heating tube | |
| CN219995861U (en) | Rotary kiln and functional module thereof | |
| CN211702411U (en) | Vacuum high-temperature heating wire fixing structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |