CN110793715A - Dynamic calibration device for miniature ultrahigh pressure sensor - Google Patents
Dynamic calibration device for miniature ultrahigh pressure sensor Download PDFInfo
- Publication number
- CN110793715A CN110793715A CN201911141002.1A CN201911141002A CN110793715A CN 110793715 A CN110793715 A CN 110793715A CN 201911141002 A CN201911141002 A CN 201911141002A CN 110793715 A CN110793715 A CN 110793715A
- Authority
- CN
- China
- Prior art keywords
- pressure sensor
- ultrahigh pressure
- micro
- dynamic calibration
- miniature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
A dynamic calibration device for a miniature ultrahigh pressure sensor comprises a target plate device, wherein the target plate device is fixedly provided with the miniature ultrahigh pressure sensor, a flyer driving device is arranged above the miniature ultrahigh pressure sensor, a flyer output port of the flyer driving device is aligned with a sensitive element of the miniature ultrahigh pressure sensor, and the flyer driving device is connected with the target plate device through a bolt; the flyer driving device comprises a shell, wherein a micro detonator, a flyer and an accelerating chamber are sequentially fixed on the shell from top to bottom through a limiting hole structure; the target plate device comprises a base, wherein a bearing block is fixed on the base through a limiting hole structure; the invention adopts MEMS technology to realize the miniaturization and the thinning of the flying piece, thereby meeting the requirement that the size of the flying piece is close to the size of a sensitive element of the miniature ultrahigh pressure sensor, improving the precision of a dynamic calibration curve of the miniature ultrahigh pressure sensor, having low cost of a calibration device and being suitable for the dynamic calibration of the miniature ultrahigh pressure sensor.
Description
Technical Field
The invention belongs to the technical field of pressure sensor testing, and particularly relates to a dynamic calibration device for a miniature ultrahigh pressure sensor.
Background
With the continuous development of MEMS initiating explosive devices, micro-nano energetic materials and the like, the micro ultrahigh pressure sensor is widely applied to the characterization of the output performance of micro-scale charging. In order to ensure a certain testing precision, the dynamic calibration of the miniature ultrahigh pressure sensor becomes a key problem to be solved urgently.
In the existing calibration method of the ultrahigh pressure sensor, light gas gun loading is the most common calibration means, and the basic principle is as follows: the flyer in the light gas gun is accelerated in the launching tube and then impacts the target plate to generate shock waves in the target plate, so that one pressure acts on the sensor, and meanwhile, a test system consisting of a constant current source and an oscilloscope is used for measuring the relative change value of the output voltage of the ultrahigh pressure sensor. A series of pressure values and corresponding voltage relative change values can be obtained by changing the speed of the flyer, and a dynamic calibration curve of the sensor can be obtained through data processing. However, the method has some disadvantages when applied to a miniature ultrahigh pressure sensor: firstly, each batch of ultrahigh-pressure sensors should be subjected to sampling dynamic calibration, and the single-batch calibration cost of the light gas cannon is very high, so that the use cost of the sensors is undoubtedly increased, and the popularization and application of the sensors are further limited; secondly, the bore diameter (the diameter of the flyer and the size of the target plate are similar to the bore diameter) of the light gas gun is far larger than the size of a sensitive element of the miniature ultrahigh pressure sensor, so that the pressure born by the sensor is approximate to the pressure at a certain point of the target plate. However, in practice, it is difficult to ensure that the impact load on the target plate is equal everywhere, so the pressure borne by the sensor is not equal to the pressure calculated according to the speed of the flyer, and a certain error is generated in the calibration curve.
Therefore, in order to obtain a more accurate dynamic calibration curve of the miniature ultrahigh pressure sensor and reduce the calibration cost, the two disadvantages must be simultaneously solved.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a dynamic calibration device for a miniature ultrahigh pressure sensor, wherein the miniaturization and the thinning of a flying piece are realized by adopting an MEMS (micro-electromechanical systems) process, the precision of a dynamic calibration curve of the miniature ultrahigh pressure sensor is improved, the cost of the calibration device is low, and the calibration device is suitable for the dynamic calibration of the miniature ultrahigh pressure sensor.
In order to achieve the purpose, the invention adopts the technical scheme that:
a dynamic calibration device for a miniature ultrahigh pressure sensor comprises a target plate device 4, wherein the miniature ultrahigh pressure sensor 3 is fixed on the target plate device 4, a flyer driving device 2 is arranged above the miniature ultrahigh pressure sensor 3, a flyer output port of the flyer driving device 2 is aligned with a sensitive element of the miniature ultrahigh pressure sensor 3, and the flyer driving device 2 is connected with the target plate device 4 through a bolt 1.
The flying piece driving device 2 comprises a shell 2-2, a micro detonator 2-4, a flying piece 2-5 and an accelerating chamber 2-3 are sequentially fixed on the shell 2-2 from top to bottom through a limiting hole structure, and a micro detonator lead 2-1 is led out from a lead port.
The shell 2-2 is provided with a first bolt hole 2-2a, a lead port 2-2b, a micro detonator limiting hole 2-2c and a flying piece limiting hole 2-2d, a micro detonator 2-4 is fixed in the micro detonator limiting hole 2-2c, and a flying piece 2-5 and an accelerating chamber 2-3 are sequentially fixed in the flying piece limiting hole 2-2d from top to bottom.
The accelerating chamber 2-3 is made of silicon materials through an MEMS (micro electro mechanical systems) process or ceramic materials through laser processing, and the diameter of the accelerating chamber 2-3 is 1.1 times of the maximum size of a sensitive element of the miniature ultrahigh pressure sensor 3.
The micro detonator 2-4 comprises explosive 2-4a, a charging cavity 2-4b, an energy conversion element 2-4c and an insulating substrate 2-4e, wherein two lead holes 2-4d are formed in the insulating substrate 2-4e, and the diameter of the explosive 2-4a is 0.5-5 mm; the charging cavities 2-4b are made of silicon materials through MEMS (micro-electromechanical systems) process.
The flyer 2-5 is made of organic glass materials through MEMS (micro electro mechanical systems) process, the thickness is in the sub-millimeter magnitude, and the specific numerical value is determined according to the required flyer speed.
The target plate device 4 comprises a base 4-1, and a bearing block 4-2 is fixed on the base 4-1 through a limiting hole structure.
The center of the base 4-1 is provided with a bearing block limiting hole 4-1b, and the periphery of the bearing block limiting hole 4-1b is provided with four second bolt holes 4-1 a.
The pressure bearing block 4-2 comprises an organic glass carrier 4-2b, an alignment mark 4-2a is arranged on the surface of the organic glass carrier 4-2b, and the thickness of the alignment mark 4-2a is about 100 nm.
The bolt 1 connects the flying piece driving device 2 with the target plate device 4 through a first bolt hole 2-2a and a second bolt hole 4-1 a.
The miniature ultrahigh pressure sensor 3 is adhered to the target plate device 4, and the thickness is about 150 mu m.
The invention has the beneficial effects that:
the micro detonator 2-4, the flying piece 2-5 and the accelerating chamber 2-3 are processed and manufactured by adopting an MEMS (micro electro mechanical System) process, so that the miniaturization and the thinning of the shearing flying piece are realized, and the requirement that the size of the flying piece is close to that of a sensitive element of a miniature ultrahigh pressure sensor is met; the alignment of the sensitive element of the miniature ultrahigh pressure sensor 3 and the acceleration chamber 2-3 is realized through the connection of the alignment mark 4-2a and the bolt 1, so that the precision of a dynamic calibration curve is improved; the parts of the whole dynamic calibration device are mainly manufactured by means of MEMS technology or precision machining and the like, so that small-batch production of the dynamic calibration device can be realized, the dynamic calibration cost is reduced, and the popularization and application of the miniature ultrahigh pressure sensor 3 are promoted.
Drawings
Fig. 1 is a schematic structural view of the present invention, wherein fig. (a) is a top view, and fig. (b) is a half sectional view a-a of fig. (a).
Fig. 2 is a schematic structural view of the flying chip driving device, in which fig. (a) is a top view and fig. (b) is a sectional view taken along line a-a of fig. (a).
Fig. 3 is a schematic structural view of the housing, in which fig. (a) is a top view and fig. (b) is a sectional view taken along line a-a of fig. (a).
Fig. 4 is a schematic view of the acceleration chamber.
Fig. 5 is a schematic structural diagram of the micro detonator.
Fig. 6 is a schematic structural diagram of the flyer.
FIG. 7 is a schematic structural view of the target plate device, wherein FIG. (a) is a top view and FIG. (b) is a sectional view taken along line A-A of FIG. (a).
Fig. 8 is a schematic structural view of the base, wherein fig. (a) is a top view and fig. (b) is a sectional view taken along line a-a of fig. (a).
Fig. 9 is a schematic structural diagram of a pressure-bearing block.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings.
Referring to fig. 1, the dynamic calibration device for the miniature ultrahigh pressure sensor comprises a target plate device 4, wherein the miniature ultrahigh pressure sensor 3 is fixed on the target plate device 4, a flyer driving device 2 is arranged above the miniature ultrahigh pressure sensor 3, a flyer output port of the flyer driving device 2 is aligned with a sensitive element of the miniature ultrahigh pressure sensor 3, and the flyer driving device 2 is connected with the target plate device 4 through a bolt 1.
Referring to fig. 2 and 3, the flying piece driving device 2 comprises a shell 2-2, a lead port 2-2b, a micro detonator limiting hole 2-2c and a flying piece limiting hole 2-2d are arranged on the shell 2-2, and the micro detonator limiting hole 2-2c and the flying piece limiting hole 2-2d are manufactured through precision machining, so that the micro detonator 2-4, the flying piece 2-5 and the acceleration chamber 2-3 can be precisely aligned; a micro detonator 2-4 is fixed in the micro detonator limiting hole 2-2c through glue, a micro detonator lead 2-1 is led out from a lead port 2-2b, and a flyer 2-5 and an acceleration chamber 2-3 are sequentially fixed in the flyer limiting hole 2-2d from top to bottom through the glue; four first bolt holes 2-2a are formed on the periphery of the shell 2-2 and used for connecting the bolts 1.
Referring to fig. 4, the acceleration chamber 2-3 is made of silicon materials through an MEMS process, or made of ceramic materials through laser processing, the diameter of the acceleration chamber 2-3 is 1.1 times of the maximum size of the sensitive element of the micro ultra-high pressure sensor 3, and the acceleration chamber 2-3 is mainly used for shearing the pressed flyer 2-5 into a circular flyer with the same inner diameter along the inner diameter edge, and accelerating the circular flyer in the chamber.
Referring to FIG. 5, the micro detonator 2-4 comprises an explosive 2-4a, a charging cavity 2-4b, a transducer element 2-4c and an insulating substrate 2-4 e; two lead holes 2-4d are formed in the insulating substrate 2-4e, and the micro detonator lead 2-1 is vertically led out from the lead holes 2-4d, so that the vertical assembly of the micro detonator 2-4 is facilitated; the diameter of the explosive 2-4a is 0.5-5 mm; the charging cavities 2-4b are made of silicon materials through MEMS (micro-electromechanical systems) technology; the energy conversion elements 2-4c are made of polysilicon, Pt, Ti or Ni-Cr alloy materials.
Referring to fig. 6, the flyers 2-5 are made of organic glass materials through MEMS (micro-electromechanical systems) process, the thickness is in a sub-millimeter level, and the specific value depends on the required speed of the flyers.
Referring to fig. 7 and 8, the target plate device 4 includes a base 4-1, a bearing block limiting hole 4-1b is formed in the center of the base 4-1, and the bearing block limiting hole 4-1b is manufactured by precision machining, so that the accurate positioning of the bearing block 4-2 can be ensured; the bearing block 4-2 is fixed in the bearing block limiting hole 4-1b through glue; the pressure bearing block 4-2 is provided with an alignment mark 4-2a, the sensitive element of the miniature ultrahigh pressure sensor 3 is aligned with the center of the organic glass carrier 4-2b through the alignment mark 4-2a, and is fixed by glue.
Four second bolt holes 4-1a are also formed in the periphery of the base 4-1 and used for connecting the bolts 1.
Referring to fig. 9, the pressure bearing block 4-2 comprises an organic glass carrier 4-2b, an alignment mark 4-2a is arranged on the surface of the organic glass carrier 4-2b, which is beneficial to aligning the sensitive element of the miniature ultra-high pressure sensor 3 with the center of the organic glass carrier 4-2b, and the thickness of the alignment mark 4-2a is about 100 nm.
The miniature ultrahigh pressure sensor 3 is adhered to the target plate device 4, and the thickness is about 150 mu m.
The working principle of the test system of the invention is as follows:
when a test experiment is carried out, the micro detonator 2-4 is detonated through the micro detonator lead 2-1, energy generated by explosion acts on the flying piece 2-5, and the flying piece 2-5 is sheared into a round flying piece along the inner diameter edge of the acceleration chamber 2-3 and simultaneously is accelerated to a certain speed and then impacts on a sensitive element of the micro ultrahigh pressure sensor 3. The thickness of the miniature ultrahigh pressure sensor 3 is thin, and the flyer 2-5 and the pressure bearing block 4-2 are made of organic glass materials, so that the symmetrical collision condition is met; under the symmetric collision condition, the impact pressure P borne by the miniature ultrahigh-pressure sensor 3 after being impacted can be calculated by the following formula:
in the formula, ρ0The density of the flyer is 2-5; c and lambda are rain Gong Nuo parameters of the material of the bearing block 4-2; w is the velocity at which the flyer 2-5 impacts the miniature ultra-high pressure sensor 3.
As can be seen from equation (1), the impact pressure P is mainly related to the velocity W of the flying disc, which can be measured by a photonic doppler velocity measurement system (PDV). The flying piece speed is influenced by factors such as the charging density and the charging size of the micro detonator 2-4, the size and the material of the flying piece 2-5 and the like. When the factors are not changed, the micro detonator 2-4 drives the flying piece 2-5 to impact the micro ultrahigh pressure sensor 3 at a stable speed, the micro ultrahigh pressure sensor 3 generates a changed current in a circuit after being subjected to the impact pressure P, and a calibration data point (P) can be obtained1,I1) (ii) a If the flying piece speed is changed by changing the charging density and the charging size of the micro detonators 2 to 4 or the size and the material of the flying pieces 2 to 5, the circuit current also changes correspondingly, so that a plurality of calibration data points can be obtained, and the dynamic calibration curve of the micro ultrahigh pressure sensor 3 can be obtained by fitting the data points.
Claims (10)
1. A dynamic calibration device for a miniature ultrahigh pressure sensor comprises a target plate device (4), and is characterized in that: a micro ultra-high pressure sensor (3) is fixed on the target plate device (4), a flyer driving device (2) is arranged above the micro ultra-high pressure sensor (3), a flyer output port of the flyer driving device (2) is aligned with a sensitive element of the micro ultra-high pressure sensor (3), and the flyer driving device (2) is connected with the target plate device (4) through a bolt (1).
2. The dynamic calibration device for the miniature ultrahigh pressure sensor according to claim 1, wherein: the flying piece driving device (2) comprises a shell (2-2), a micro detonator (2-4), a flying piece (2-5) and an accelerating chamber (2-3) are sequentially fixed on the shell (2-2) from top to bottom through a limiting hole structure, and a micro detonator lead (2-1) is led out from a lead port.
3. The dynamic calibration device for the miniature ultrahigh pressure sensor according to claim 2, wherein: the shell (2-2) is provided with a first bolt hole (2-2a), a lead port (2-2b), a micro detonator limiting hole (2-2c) and a flying piece limiting hole (2-2d), a micro detonator (2-4) is fixed in the micro detonator limiting hole (2-2c), and a flying piece (2-5) and an accelerating chamber (2-3) are sequentially fixed in the flying piece limiting hole (2-2d) from top to bottom.
4. The dynamic calibration device for the miniature ultrahigh pressure sensor according to claim 2, wherein: the acceleration chamber (2-3) is made of silicon materials through an MEMS (micro electro mechanical systems) process or is made of ceramic materials through laser processing, and the diameter of the acceleration chamber (2-3) is 1.1 times of the maximum size of a sensitive element of the miniature ultrahigh pressure sensor (3).
5. The dynamic calibration device for the miniature ultrahigh pressure sensor according to claim 2, wherein: the micro detonator (2-4) comprises an explosive (2-4a), a charging cavity (2-4b), an energy conversion element (2-4c) and an insulating substrate (2-4e), wherein two lead holes (2-4d) are formed in the insulating substrate (2-4e), and the diameter of the explosive (2-4a) is 0.5-5 mm; the charging cavities (2-4b) are made of silicon materials through MEMS (micro electro mechanical systems) process.
6. The dynamic calibration device for the miniature ultrahigh pressure sensor according to claim 2, wherein: the flyer (2-5) is made of organic glass materials through MEMS (micro electro mechanical systems) process, the thickness is in the sub-millimeter magnitude, and the specific value depends on the required flyer speed.
7. The dynamic calibration device for the miniature ultrahigh pressure sensor according to claim 1, wherein: the target plate device (4) comprises a base (4-1), and a bearing block (4-2) is fixed on the base (4-1) through a limiting hole structure.
8. The dynamic calibration device for the miniature ultrahigh pressure sensor according to claim 7, wherein: the center of the base (4-1) is provided with a bearing block limiting hole (4-1b), and the periphery of the bearing block limiting hole (4-1b) is provided with four second bolt holes (4-1 a).
9. The dynamic calibration device for the miniature ultrahigh pressure sensor according to claim 7, wherein: the bearing block (4-2) comprises an organic glass carrier (4-2b), an alignment mark (4-2a) is arranged on the surface of the organic glass carrier (4-2b), and the thickness of the alignment mark (4-2a) is about 100 nm.
10. The dynamic calibration device for the miniature ultrahigh pressure sensor according to claim 1, wherein: the miniature ultrahigh pressure sensor (3) is adhered to the target plate device (4) and has the thickness of about 150 mu m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911141002.1A CN110793715A (en) | 2019-11-20 | 2019-11-20 | Dynamic calibration device for miniature ultrahigh pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911141002.1A CN110793715A (en) | 2019-11-20 | 2019-11-20 | Dynamic calibration device for miniature ultrahigh pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110793715A true CN110793715A (en) | 2020-02-14 |
Family
ID=69445515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911141002.1A Pending CN110793715A (en) | 2019-11-20 | 2019-11-20 | Dynamic calibration device for miniature ultrahigh pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110793715A (en) |
Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3946607A (en) * | 1975-07-25 | 1976-03-30 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus for measuring chamber pressure |
| US4410825A (en) * | 1981-04-10 | 1983-10-18 | Lobastov George S | Piezoelectric pressure transducer with threaded damper bar |
| CN1693863A (en) * | 2005-06-09 | 2005-11-09 | 西安交通大学 | Superhigh pressure dynamic pressure sensor |
| CN101825419A (en) * | 2010-04-20 | 2010-09-08 | 中国科学技术大学 | Exploding device with multi-varying section and detonator applying same |
| CN101887080A (en) * | 2010-06-24 | 2010-11-17 | 电子科技大学 | Method for testing ytterbium meter dynamic piezo-resistance |
| CN102221306A (en) * | 2011-06-15 | 2011-10-19 | 中国工程物理研究院流体物理研究所 | Ultrahigh-speed loading system of plane metal flying sheet |
| CN103196617A (en) * | 2013-03-21 | 2013-07-10 | 西安交通大学 | Cylinder type ultra-high-pressure sensor of side cavity oil charging structure |
| CN103245574A (en) * | 2013-05-04 | 2013-08-14 | 太原科技大学 | Method and device for driving loading of metal flying piece by multistage detonation of explosive |
| CN205483372U (en) * | 2016-03-09 | 2016-08-17 | 中国兵器工业第二一三研究所 | Minute yardstick powder charge detonation pressure testing arrangement |
| CN107121021A (en) * | 2017-04-25 | 2017-09-01 | 北京理工大学 | A kind of metal bridge foil discharge-induced explosion transducing member |
| CN107702602A (en) * | 2017-08-28 | 2018-02-16 | 南京理工大学 | A kind of MEMS priming systems transducing member ignition ability test device |
| CN207280309U (en) * | 2017-09-22 | 2018-04-27 | 中国兵器工业第二一三研究所 | Small size Explosive sequence based on silicon substrate chip containing energy |
| CN108120542A (en) * | 2017-12-15 | 2018-06-05 | 西安交通大学 | A kind of minute yardstick powder charge detonation pressure dynamic test system |
| CN108680290A (en) * | 2018-06-22 | 2018-10-19 | 西安交通大学 | A kind of hyperpressure field measurement device |
-
2019
- 2019-11-20 CN CN201911141002.1A patent/CN110793715A/en active Pending
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3946607A (en) * | 1975-07-25 | 1976-03-30 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus for measuring chamber pressure |
| US4410825A (en) * | 1981-04-10 | 1983-10-18 | Lobastov George S | Piezoelectric pressure transducer with threaded damper bar |
| CN1693863A (en) * | 2005-06-09 | 2005-11-09 | 西安交通大学 | Superhigh pressure dynamic pressure sensor |
| CN101825419A (en) * | 2010-04-20 | 2010-09-08 | 中国科学技术大学 | Exploding device with multi-varying section and detonator applying same |
| CN101887080A (en) * | 2010-06-24 | 2010-11-17 | 电子科技大学 | Method for testing ytterbium meter dynamic piezo-resistance |
| CN102221306A (en) * | 2011-06-15 | 2011-10-19 | 中国工程物理研究院流体物理研究所 | Ultrahigh-speed loading system of plane metal flying sheet |
| CN103196617A (en) * | 2013-03-21 | 2013-07-10 | 西安交通大学 | Cylinder type ultra-high-pressure sensor of side cavity oil charging structure |
| CN103245574A (en) * | 2013-05-04 | 2013-08-14 | 太原科技大学 | Method and device for driving loading of metal flying piece by multistage detonation of explosive |
| CN205483372U (en) * | 2016-03-09 | 2016-08-17 | 中国兵器工业第二一三研究所 | Minute yardstick powder charge detonation pressure testing arrangement |
| CN107121021A (en) * | 2017-04-25 | 2017-09-01 | 北京理工大学 | A kind of metal bridge foil discharge-induced explosion transducing member |
| CN107702602A (en) * | 2017-08-28 | 2018-02-16 | 南京理工大学 | A kind of MEMS priming systems transducing member ignition ability test device |
| CN207280309U (en) * | 2017-09-22 | 2018-04-27 | 中国兵器工业第二一三研究所 | Small size Explosive sequence based on silicon substrate chip containing energy |
| CN108120542A (en) * | 2017-12-15 | 2018-06-05 | 西安交通大学 | A kind of minute yardstick powder charge detonation pressure dynamic test system |
| CN108680290A (en) * | 2018-06-22 | 2018-10-19 | 西安交通大学 | A kind of hyperpressure field measurement device |
Non-Patent Citations (4)
| Title |
|---|
| 娄文忠等: "《高动态微***与MEMS引信技术（下）》", 30 April 2016, 国防工业出版社 * |
| 张凡等: "硅基微***驱动飞片的速度计算研究", 《火工品》 * |
| 蒋庄德等: "硅压阻式微压力传感器的研制及性能测试", 《功能材料与器件学报》 * |
| 金柯等: "爆轰驱动飞片击靶波形精密控制技术", 《高压物理学报》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101968495B (en) | Cantilever beam acceleration transducer manufactured by micro-machining on single side of single silicon chip and method | |
| CN100552453C (en) | Symmetry straight beam structure condenser type micro-acceleration sensor and preparation method thereof | |
| CN101101306B (en) | Piezoelectric ceramic sinusoidal excitation acceleration meter calibration method and device | |
| CN105445494B (en) | A kind of MOEMS accelerometers and its manufacturing method based on plane annular chamber | |
| CN108254106A (en) | A kind of silicon silica glass silicon four-layer structure resonant mode MEMS pressure sensor preparation method | |
| CN109945746A (en) | The preparation method of chip Exploding Foil | |
| Mirshekari et al. | Microscale shock tube | |
| CN107063224B (en) | SOI micro-hemispherical gyroscope sensitive structure | |
| Zhang et al. | Design and implementation of a novel membrane-island structured MEMS accelerometer with an ultra-high range | |
| CN100356177C (en) | High precision tunnel type accelerometer and preparation method thereof | |
| US20110138902A1 (en) | Mems microphone array on a chip | |
| CN110793715A (en) | Dynamic calibration device for miniature ultrahigh pressure sensor | |
| CN106950396B (en) | Speed measurement method for driving flyer of exploding foil initiator | |
| CN102175305A (en) | Single chip integrated trivector vibration sensor | |
| CN112269116A (en) | Method for testing vacuum packaging performance of integrated circuit tube shell level | |
| CN112034203B (en) | High-precision tunnel type accelerometer and preparation method thereof | |
| CN1401980A (en) | Method for mfg. microstructure resonance beam pressure sensor using SiNx as beam | |
| CN112816733A (en) | Piezoelectric anemometer and manufacturing method thereof | |
| CN106650013B (en) | Reliability simulation method of micro-accelerometer in high-speed rotation environment | |
| CN109506640A (en) | A kind of oscillation gyro automatic assembling apparatus and its method | |
| CN110531115B (en) | MEMS piezoresistive triaxial impact accelerometer chip with pure axial deformation sensitive beam and preparation method thereof | |
| CN110715583B (en) | Microscale explosive loading and explosion velocity testing system | |
| Geng et al. | Design and fabrication of hollow mushroom-like cilia MEMS vector hydrophone | |
| Banerjee et al. | A Monolithically integrated multisensor platform | |
| CN106370330B (en) | One kind utilizing curent change detection micro-structure impact stress wave pulsewidth and peak method based on piece impact strength detection testing machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200214 |
|
| RJ01 | Rejection of invention patent application after publication |