CN207280309U - Small size Explosive sequence based on silicon substrate chip containing energy - Google Patents
Small size Explosive sequence based on silicon substrate chip containing energy Download PDFInfo
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- CN207280309U CN207280309U CN201721225137.2U CN201721225137U CN207280309U CN 207280309 U CN207280309 U CN 207280309U CN 201721225137 U CN201721225137 U CN 201721225137U CN 207280309 U CN207280309 U CN 207280309U
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- powder charge
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- containing energy
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Abstract
The utility model discloses a kind of small size Explosive sequence based on silicon substrate chip containing energy, including silicon substrate chip containing energy, transmission powder charge, film flying, acceleration thorax, booster explosive powder charge.Silicon substrate chip attachment containing energy is on fuze detonating control circuit, under fuse is in a safe condition, silicon substrate chip containing energy and the mass block face of fuze safety insurance institution.Fuse is under uninsured state, and silicon substrate chip containing energy is opposite with the one side that powder charge is transmitted on mass block.The another side of powder charge and the one side face of film flying are transmitted, the another side of film flying accelerates the another side of thorax to be contacted with booster explosive powder charge with accelerating the one side of thorax to be in close contact.Silicon substrate chip containing energy, transmission powder charge, film flying, acceleration thorax, booster explosive charge center align at this time, form detonation passage.The utility model small size Explosive sequence employs the energy amplification mode of priming driven flyer plates Impact Initiation next stage powder charge, and size of powder charge is small, and explosive payload is few, effectively reduces the axial dimension of Explosive sequence, beneficial to the Miniaturization Design of fuse.
Description
Technical field
The utility model belongs to priming system technical field, relates generally to a kind of small size Explosive sequence, more particularly to a kind of
Small size Explosive sequence based on silicon substrate chip containing energy.
Background technology
MEMS (Micro Electro-Mechanical System) fuse safety insurance device has small, cost
Low, many advantages, such as reliability is high so that conventional fuse has more space multi-sensor detection circuits and main charge, carries
The high accuracy and lethality of ammunition.As the hot spot of domestic and international weapons and ammunitions area research, microsize Explosive sequence is made
It is one of key technology of MEMS Fuze Technology Development Gonna breakthroughs for the explosive train of MEMS fuses.
It is situated between in disclosed document or patent in typical microsize Explosive sequence such as United States Patent (USP) US7055437B1
Continue, it is as shown in Figure 1 using dislocation type structure design, charge constitution.Powder charge such as lead azide is inputted, charge diameter is
0.38mm-1.27mm, is highly 1.27mm-2.54mm.Powder charge such as CL-20 powder charges are transmitted, length 0.38mm-1.27mm is wide
Spend for 0.38mm-1.27mm, thickness 0.2mm-0.76mm.By main charge such as CL-20 bases booster explosive, a diameter of 0.38mm-
1.27mm, highly more than 0.76mm.Powder charge is wherein transmitted on the mass block of safety locking motion, in the secure state, is folded
Lead azide powder charge is staggered with transmitting powder charge, realizes that physics separates.Under uninsured state, lead azide powder charge is filled with transmitting
Medicine, by main charge, output powder charge align, formed detonation passage.
The Explosive sequence is reduced step by step using sensitivity, and the energy amplification mode that energy increases step by step, charge constitution is complicated, dress
Dose is big, more demanding to charge process under the conditions of small size, and a variety of powder charges make it that Explosive sequence assembly difficulty is big.It is unfavorable for
The integration of compactization design of Explosive sequence.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of small size Explosive sequence for weapons and ammunitions, especially
A kind of small size Explosive sequence based on silicon substrate chip containing energy.
In order to solve the above technical problems, the small size Explosive sequence bag provided by the utility model based on silicon substrate chip containing energy
Silicon substrate chip containing energy is included, powder charge, film flying is transmitted, accelerates thorax, booster explosive powder charge.Silicon substrate chip containing energy includes transducing member, original
Position powder charge electrode, priming powder charge etc., the transducing member include bridge zone, pad.Silicon substrate chip attachment containing energy is in fuze action
In control circuit, receive fused signal and input energy.When fuse is in a safe condition, silicon substrate chip containing energy is protected with fuze safety
The mass block face of dangerous mechanism, realizes the safety of sympathetic initiation of Explosive sequence.When fuse is in uninsured state, silicon substrate chip containing energy
Connect the one side that powder charge is transmitted on mass block.The another side for transmitting powder charge connects the one side of film flying, and the another side of film flying is with accelerating thorax
Simultaneously it is in close contact, accelerates the another side of thorax to be contacted with booster explosive powder charge.When fuse is in uninsured state, silicon substrate core containing energy
Piece, transmit powder charge, film flying, accelerate thorax, booster explosive charge center to align, and forms detonation passage.
The overall technology effect of the utility model is embodied in the following aspects：
(1) the utility model small size Explosive sequence uses the energy of micro- detonator driven flyer plates Impact Initiation next stage powder charge
Amplification mode is measured, is conducive to the reliable propagation of explosion of Small dimension charge.
(2) the utility model small size Explosive sequence using the propagation of explosion hole on security mechanism mass block as accelerate thorax one
Part, simplifies charge constitution design, effectively reduces the axial dimension of size of powder charge, explosive payload and Explosive sequence, be beneficial to
The integration of compactization design of fuse.
Brief description of the drawings
The utility model shares 4 width attached drawings
Fig. 1 is the utility model small size Explosive sequence structure composition schematic diagram under safe condition.
Fig. 2 is the utility model small size Explosive sequence structure composition schematic diagram under releasing state.
Fig. 3 is the utility model small size detonation sequence silicon substrate composition structure diagram of the chip containing energy.
Fig. 4 is the top view of the transducing member of the utility model small size detonation sequence silicon substrate chip containing energy.
Embodiment
Below in conjunction with the accompanying drawings and preferred embodiment is described in further detail the utility model.
Embodiment 1
Such as Fig. 1, shown in Fig. 2, small size detonation sequence includes silicon substrate chip 1 containing energy, transmits powder charge 2, film flying 3, accelerates thorax
4th, booster explosive powder charge 5.Silicon substrate chip 1 containing energy is mounted on fuze detonating control circuit, receives fused signal and input energy
Amount.When fuse is in a safe condition, silicon substrate chip 1 containing energy connects the mass block of fuze safety insurance institution, realizes Explosive sequence
Safety of sympathetic initiation.
Fuse is under uninsured state, and silicon substrate chip 1 containing energy connects the one side that powder charge 2 is transmitted on sliding block.Transmit powder charge 2
Another side connect the one side of film flying 3, the another side of film flying 3 with accelerate the one side of thorax 4 to be in close contact, accelerate the another side of thorax 4 with
Booster explosive powder charge 5 contacts.When fuse is in uninsured state, silicon substrate containing can chip 1, transmit powder charge 2, film flying 3, accelerate thorax 4,
5 central alignment of booster explosive powder charge, forms detonation passage.The transmission powder charge 2 can be the more sensitive explosive of heat sensitivity, detonation
Medicine, such as too amine, lead azide, silver azide, have selected silver azide in the preferred embodiment.Charge diameter is 1mm-
2mm, shot elevation 0.5mm-1mm, in the preferred embodiment, charge diameter have selected 2mm, shot elevation 1mm.It is described
The material of film flying 3 in the preferred embodiment, can have selected titanium with selective polymer or metal, such as polyimides, titanium, aluminium.
The thickness of film flying 3 can be 10 μm -80 μm, have selected 40 μm in the preferred embodiment.It is described accelerate thorax 4 material can be
Ceramics, stainless steel, silicon etc., have selected ceramics in the preferred embodiment.Accelerate thorax 4 a diameter of 0.4mm-1mm, height 0.4-
1mm, accelerates the diameter of thorax 4 to have selected 1mm, highly have selected 1mm in the preferred embodiment.The booster explosive powder charge 5 can be with
Selection meets GJB4165-2001《Fuse booster explosive general specification》High explosive, in the preferred embodiment, have selected six
Nitro stilbene, charge diameter 3mm, is highly 3mm.
As shown in figure 3, silicon substrate chip 1 containing energy includes transducing member 6, powder charge electrode 7 in situ, priming powder charge 8 etc..Transducing
Member 6 is in contact with powder charge in situ with the one side of electrode 7, and the another side of powder charge electrode 7 in situ is contacted with priming powder charge 8.Institute
The suitable electrochemical deposition Porous Cu such as heavily doped silicon, copper, the material of porous nickel can be selected by stating powder charge electrode 7 in situ, at this
Heavily doped silicon is have selected in preferred embodiment, as in-situ preparation priming powder charge 8；The thickness of powder charge electrode 7 in situ is 7 μ
M-20 μm, in the preferred embodiment, thickness have selected 10 μm.The priming powder charge 8, can select lead azide, nitrine
Change silver-colored, porous copper azide etc., have selected nanometer porous copper azide in the preferred embodiment.Charge diameter can be
0.4mm-2mm, have selected 1mm in the preferred embodiment, and shot elevation can be 0.5mm-1mm, in the preferred embodiment
It has selected 1mm.
As shown in figure 4, transducing member 6 includes bridge zone 9, pad 10, the material of bridge zone 9 can select heavily doped polysilicon, again
The materials such as doped monocrystalline silicon, nichrome, in the preferred embodiment, bridge zone 9 material selection nichrome.The width of bridge zone 9
Degree can select 0.025 μm -0.25 μm, and length can select 0.025 μm -0.25 μm, and thickness can select 0.3 μm -1.5 μm.
In the preferred embodiment, 0.1 μm of width of the size selection of bridge zone 9,0.1 μm of length, 1 μm of thickness.The pad 10, material
The materials such as copper, gold can be selected, in the preferred embodiment, the material selection of pad 10 gold, size are 2mm (length) × 2mm
(width).
The mechanism of the utility model：When needing the utility model to act on, fuse the control of catch fire circuit contains to silicon substrate
The transducing first 6 of energy chip 1 is powered, and the transducing member 6 of silicon substrate chip 1 containing energy converts electrical energy into thermal energy detonation silicon substrate and contains energy chip 1
Powder charge 8, containing can chip 1 act on.The chip 1 containing energy acts on detonation and transmits powder charge 2, transmits powder charge 2 and acts on, and the warp of driven flyer plates 3 adds
With certain speed impacts booster explosive powder charge 5, the next stage powder charge of the detonation ammunition of booster explosive powder charge 5 or main dress after the fast acceleration of thorax 4
Medicine, realizes the function of the utility model.
Claims (9)
1. a kind of small size Explosive sequence based on silicon substrate chip containing energy, including silicon substrate contain energy chip (1), transmit powder charge (2), fly
Piece (3), accelerate thorax (4), booster explosive powder charge (5), it is characterised in that silicon substrate chip containing energy (1) is mounted on fuze action control
On circuit processed, receive fused signal and input energy,
Under fuse is in a safe condition, silicon substrate chip containing energy (1) and the mass block face of fuze safety insurance institution, silicon substrate contain energy
Chip (1) misplaces with transmitting powder charge (2), realizes the safety of sympathetic initiation of Explosive sequence；
Fuse is under uninsured state, and silicon substrate chip containing energy (1), which connects, transmits dress on the mass block of fuze safety insurance institution
The one side of medicine (2), the another side for transmitting powder charge (2) connect the one side of film flying (3), and the another side of film flying (3) is with accelerating the one of thorax (4)
Face contact, accelerate thorax (4) another side contact with booster explosive powder charge (5), at this time silicon substrate containing energy chip (1), transmission powder charge (2),
Film flying (3), accelerate thorax (4), booster explosive powder charge (5) central alignment, forms detonation passage, silicon substrate chip containing energy (1) effect, detonation
Powder charge (2) is transmitted, transmits and booster explosive powder charge (5) is hit after powder charge (2) driven flyer plates (3) accelerated thorax (4) accelerates, booster explosive dress
Medicine (5) detonation.
2. the small size Explosive sequence according to claim 1 based on silicon substrate chip containing energy, it is characterised in that the transmission
Powder charge (2) is too amine, lead azide or silver azide, charge diameter 1mm-2mm, shot elevation 0.5mm-1mm.
3. the small size Explosive sequence according to claim 1 based on silicon substrate chip containing energy, it is characterised in that the film flying
(3) material is polyimides, titanium or aluminium, and thickness is 10 μm -80 μm.
4. the small size Explosive sequence according to claim 1 based on silicon substrate chip containing energy, it is characterised in that the acceleration
The material of thorax (4) is ceramics, stainless steel or silicon, a diameter of 0.4mm-1mm, height 0.4-1mm.
5. the small size Explosive sequence according to claim 1 based on silicon substrate chip containing energy, it is characterised in that the propagation of explosion
Medicine powder charge (5) is hexanitro-stilbene, and charge diameter 3mm, is highly 3mm.
6. the small size Explosive sequence according to claim 1 based on silicon substrate chip containing energy, it is characterised in that the silicon substrate
The chip containing energy (1) includes transducing first (6), powder charge electrode (7) in situ, priming powder charge (8), transducing member (6) and powder charge in situ
It is in contact with the one side of electrode (7), powder charge in situ is contacted with the another side of electrode (7) with priming powder charge (8).
7. the small size Explosive sequence according to claim 6 based on silicon substrate chip containing energy, it is characterised in that the original position
Powder charge electrode (7) is heavily doped silicon or heavily doped composition brass, and thickness is 7 μm -20 μm.
8. the small size Explosive sequence according to claim 6 based on silicon substrate chip containing energy, it is characterised in that the detonation
Medicine powder charge (8) is lead azide, silver azide or porous copper azide, charge diameter 0.4mm-2mm.
9. the small size Explosive sequence according to claim 6 based on silicon substrate chip containing energy, it is characterised in that the transducing
First (6) include bridge zone (9), pad (10), and the material of bridge zone (9) is heavily doped polysilicon, heavy doping monocrystalline silicon or nichrome,
0.025 μm -0.25 μm of width, 0.025 μm -0.25 μm of length, 0.3 μm -1.5 μm of thickness, pad (10) material for copper or
Gold, size are 2mm × 2mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721225137.2U CN207280309U (en) | 2017-09-22 | 2017-09-22 | Small size Explosive sequence based on silicon substrate chip containing energy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721225137.2U CN207280309U (en) | 2017-09-22 | 2017-09-22 | Small size Explosive sequence based on silicon substrate chip containing energy |
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| Publication Number | Publication Date |
|---|---|
| CN207280309U true CN207280309U (en) | 2018-04-27 |
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| CN201721225137.2U Expired - Fee Related CN207280309U (en) | 2017-09-22 | 2017-09-22 | Small size Explosive sequence based on silicon substrate chip containing energy |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108592707A (en) * | 2018-07-27 | 2018-09-28 | 中国工程物理研究院化工材料研究所 | A kind of micro electronmechanical intelligent and safe priming device and preparation method thereof |
| CN109751929A (en) * | 2019-01-15 | 2019-05-14 | 西安交通大学 | A kind of enclosed type MOEMS fuze safety mechanism |
| CN110137090A (en) * | 2019-05-15 | 2019-08-16 | 北京足智科技有限公司 | A kind of semiconductor bridge chip and preparation method thereof |
| CN110793715A (en) * | 2019-11-20 | 2020-02-14 | 西安交通大学 | Dynamic calibration device for miniature ultrahigh pressure sensor |
| CN113314470A (en) * | 2021-05-12 | 2021-08-27 | 湘潭大学 | Self-destructible chip device packaging structure and method integrating energy-containing semiconductor bridge |
-
2017
- 2017-09-22 CN CN201721225137.2U patent/CN207280309U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108592707A (en) * | 2018-07-27 | 2018-09-28 | 中国工程物理研究院化工材料研究所 | A kind of micro electronmechanical intelligent and safe priming device and preparation method thereof |
| CN108592707B (en) * | 2018-07-27 | 2023-11-03 | 中国工程物理研究院化工材料研究所 | Micro-electromechanical intelligent safe initiation device and preparation method thereof |
| CN109751929A (en) * | 2019-01-15 | 2019-05-14 | 西安交通大学 | A kind of enclosed type MOEMS fuze safety mechanism |
| CN109751929B (en) * | 2019-01-15 | 2020-06-02 | 西安交通大学 | Locking type MOEMS fuse safety mechanism |
| CN110137090A (en) * | 2019-05-15 | 2019-08-16 | 北京足智科技有限公司 | A kind of semiconductor bridge chip and preparation method thereof |
| CN110793715A (en) * | 2019-11-20 | 2020-02-14 | 西安交通大学 | Dynamic calibration device for miniature ultrahigh pressure sensor |
| CN113314470A (en) * | 2021-05-12 | 2021-08-27 | 湘潭大学 | Self-destructible chip device packaging structure and method integrating energy-containing semiconductor bridge |
| CN113314470B (en) * | 2021-05-12 | 2024-04-05 | 湘潭大学 | Self-destructible chip device packaging structure and method for integrated energetic semiconductor bridge |
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Legal Events
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180427 Termination date: 20180922 |