CN101887080A - Method for testing ytterbium meter dynamic piezo-resistance - Google Patents

Method for testing ytterbium meter dynamic piezo-resistance Download PDF

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CN101887080A
CN101887080A CN 201010208478 CN201010208478A CN101887080A CN 101887080 A CN101887080 A CN 101887080A CN 201010208478 CN201010208478 CN 201010208478 CN 201010208478 A CN201010208478 A CN 201010208478A CN 101887080 A CN101887080 A CN 101887080A
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resistance
ytterbium
meter
pressure
testing
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杜晓松
蒋亚东
肖华
胡佳
曾贵
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University of Electronic Science and Technology of China
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Abstract

The invention discloses a method for testing ytterbium meter dynamic piezo-resistance. A testing circuit comprises a pulse constant current source, an ytterbium meter Rg, a fixed resistor R2 and a high-speed oscilloscope, wherein the ytterbium meter Rg is connected into an oscilloscope by a coaxial cable after being connected in parallel with the fixed resistor R2; the change of the resistance of the ytterbium meter under a pressure is calculated according to initial values of the ytterbium meter and the fixed resistor R2 by using platform potentials read by the oscilloscope before and after reaching the pressure, wherein the value principle of the R2 is that the resistance after being connected in parallel does not exceed a critical value of cable reflection under the pressure; R2 is as large as possible so as to maintain effective amplitude of a signal; and the value of the R2 is relative to the pressure, namely the pressure is higher, the better value of the R2 is smaller. The method for testing a high-resistance ytterbium meter dynamic piezo-resistance of the invention has the characteristics of very simple circuit and calculation, avoids cable reflection caused by impedance mismatching, and solves the problem that a high pressure cannot be tested by a high-resistance ytterbium meter.

Description

A kind of method of testing of ytterbium meter dynamic piezo-resistance
Technical field
The present invention relates to dynamic super-voltage force sensor technologies field, be specifically related to a kind of method of testing of ytterbium meter dynamic piezo-resistance.
Background technology
Copper-manganese meter and ytterbium meter belong to piezoresistive pressure sensor, are mainly used in the high voltage transient of shock wave under the conditions such as test blast, impact.The copper-manganese meter roughly is divided into two kinds by initial resistivity value: a kind of is that static resistance is the double lead pressure gauge about 50 Ω, and cooperating is the bridge-type metering circuit of pulse constant pressure source power supply with it; Another kind is that static resistance is the low-resistance four lead-in wire pressure gauges of 0.05-0.5 Ω, cooperating be pulsed constant current supply.The resistance lowering of copper-manganese meter mainly is in order to weaken the bypass effect that high pressure effect lower sensor encapsulating material insulating property are degenerated and to be caused, make low-resistance copper-manganese meter can test higher pressure (＞20GPa).And the ytterbium meter is because the factor of phase transition under high pressure, and its range is limited to below the 4GPa.At this pressure stage, the polymer encapsulated material does not have tangible high pressure turbine by effect.Therefore, be more suitable for,, reduce and disturb to increase signal in the pressure gauge that adopts high value.
But for ytterbium meter (no matter high resistant or low-resistance), severe nonlinear can appear in the voltage signal of exporting when adopting bridge measurement (relation of U～Δ R/R).This is because the sensitivity of ytterbium very high (be about copper-manganese meter more than 30 times), and Δ R/R can be up to 400%, considerably beyond the test specification of electric bridge.Bridge measurement also exists the computing formula complexity, shortcomings such as debugging trouble.
And if do not adopt electric bridge, and directly read the voltage (method of testing as shown in Figure 1) at ytterbium meter two ends with oscillograph, for low-resistance ytterbium meter is no problem, see document: Teng Lin, Yang Bangchao, Du Xiaosong etc., the preparation of magnetron sputtering ytterbium film and pressure drag characteristic, vacuum science and technology journal, 2004,24 (6): 472.But, but have problems for high resistant ytterbium meter.Because measuring object is the transient pulse signal, requires the impedance matching of test circuit each several part.Although the static resistance of high resistant ytterbium meter is 50 Ω, with concentric cable be impedance matching, under pressure, its resistance is much larger than 50 Ω, impedance is no longer mated, thereby the cable reflection phenomenon occurs, as shown in Figure 2.And,, can not cause the situation of impedance mismatching because the absolute change amount of resistance has only several ohm for low-resistance ytterbium meter.
Summary of the invention
Problem to be solved by this invention is: how a kind of method of testing of ytterbium meter dynamic piezo-resistance is provided, with the problem of resolved impedance spectroscopy coupling, and can keeps the signal amplitude of sensor to large extent.
Technical matters proposed by the invention is to solve like this: a kind of method of testing of ytterbium meter dynamic piezo-resistance is provided, it is characterized in that, may further comprise the steps:
1. build measurement circuit: with ytterbium meter R gWith fixed resistance R 2After the parallel connection, an end inserts oscillograph with concentric cable, and an end connects pulsed constant current supply by another concentric cable, and with ytterbium meter R gPlace the dynamically pressure testing device;
2. before the pressure-loaded, test ytterbium meter R gStatic resistance R G0And fixed resistance R 2, the initial value of parallel resistance then
Figure BSA00000182246600021
3. after dynamic pressure loads, read pressure by oscillograph and arrive plateau potential V before 0And pressure arrives plateau potential V afterwards p, the parallel resistance R after stressed pObtain by (1) formula
R p R 0 = V P V 0 - - - ( 1 )
Basis (2) formula is by R again pObtain stressed back ytterbium meter R gResistance R Gp
1 R p = 1 R gp + 1 R 2 - - - ( 2 ) ;
4. under different dynamic pressures, choose the fixed resistance R of different resistances 2: the size according to pressure before pressure-loaded is estimated R Gp, change R again 2Obtain R by (2) formula pAnd make R pBe slightly less than the critical value R of impedance mismatching Reflection
Method of testing according to ytterbium meter dynamic piezo-resistance provided by the present invention is characterized in that, the critical value R of impedance mismatching ReflectionDetermine by the static simulation experiment: give one the 50 above fixed resistance power supply of Ω with a pulsed constant current supply, then the voltage signal at these resistance two ends directly being imported oscillograph reads, the manual activation pulsed constant current supply, in oscillograph, observe the waveform forward position, as the waveform forward position is clean step signal, then an impedance matching; If the waveform forward position is step-like, then impedance does not match, and cable reflection occurred.
Method of testing according to ytterbium meter dynamic piezo-resistance provided by the present invention is characterized in that, the static resistance R of ytterbium meter G0Standard resistance range be 20-70 Ω.
Method of testing according to ytterbium meter dynamic piezo-resistance provided by the present invention is characterized in that, the internal resistance R of pulsed constant current supply 1Greater than 10k Ω.
Method of testing according to ytterbium meter dynamic piezo-resistance provided by the present invention is characterized in that, the dynamic high-pressure force test device is one-level light-gas gun or plane wave generator.
Essence of the present invention is no longer directly to read signal on the ytterbium meter with oscillograph, but behind a fixed resistance in parallel on the ytterbium meter, reads the signal after the parallel connection.Although like this ytterbium meter under pressure resistance can increase several times, the increase amplitude of parallel resistance is dwindled greatly and is limited within the suitable scope, the situation of impedance mismatching no longer occurs.
Beneficial effect of the present invention: the present invention is based on the improvement on the existing low-resistance ytterbium instrumentation method for testing, and this improvement is simple, only needs parallel resistance of many increases to get final product, thereby has realized the measurement to high resistant ytterbium meter dynamic piezo-resistance signal.The method of testing of ytterbium meter dynamic piezo-resistance of the present invention not only can be used for the demarcation of ytterbium meter, for the ytterbium meter of having demarcated, also can utilize this method that unknown pressure is tested.Need to prove, when institute's measuring pressure is low, the resistance value R of ytterbium meter GpThe critical value R that does not surpass cable reflection ReflectionThe time, need not to adopt the method for parallel resistance.
Description of drawings
Fig. 1 is the method for testing of existing low-resistance ytterbium meter;
Fig. 2 is when adopting the method for testing of low-resistance ytterbium meter, the cable reflection phenomenon of high resistant ytterbium meter pressure drag signal;
Fig. 3 is the method for testing of high resistant ytterbium meter of the present invention;
Fig. 4 is when adopting method of testing of the present invention, the test waveform of high resistant ytterbium meter.
Embodiment
Below in conjunction with accompanying drawing the present invention is further described:
The method of testing of ytterbium meter dynamic piezo-resistance of the present invention, by a pulsed constant current supply, a ytterbium meter R g, a fixed resistance R 2Build measurement circuit with a high-speed oscilloscope, ytterbium meter R gStandard resistance range be 20-70 Ω, the internal resistance R of pulsed constant current supply 1Greater than 10k Ω, ytterbium meter R gPlace the dynamic high-pressure force test device, the dynamic high-pressure force test device is one-level light-gas gun or plane wave generator, and testing procedure is as follows:
1. with ytterbium meter R gWith fixed resistance R 2After the parallel connection, insert oscillograph with 50 Ω concentric cable again;
2. before the pressure-loaded, test the static resistance R of ytterbium meter G0And fixed resistance R 2, the initial value of parallel resistance then
Figure BSA00000182246600041
After dynamic pressure loads, read pressure by high-speed oscilloscope and arrive plateau potential V before 0And pressure arrives plateau potential V afterwards p, the parallel resistance R after stressed pObtain by (1) formula
R p R 0 = V P V 0 - - - ( 1 )
Basis (2) formula is by R again pObtain the resistance R of stressed back ytterbium meter Gp
1 R p = 1 R gp + 1 R 2 - - - ( 2 )
3. under different dynamic pressures, choose the fixed resistance R of different resistances 2, method is that the size according to pressure is estimated R before pressure-loaded Gp, change R again 2Obtain R by (2) formula pAnd make R pBe slightly less than the critical value R of impedance mismatching Reflection, the critical value R of impedance mismatching ReflectionCan determine by the static simulation experiment, method is to give one the 50 above fixed resistance power supply of Ω with a pulsed constant current supply, then the voltage signal at these resistance two ends directly being imported oscillograph reads, the manual activation pulsed constant current supply, in oscillograph, observe the waveform forward position, if the forward position is a clean step signal, impedance matching is described; And if the signal leading edge is step-like, illustrate that impedance does not match, and cable reflection occurred.
Method of testing provided by the present invention not only can be used for the demarcation of ytterbium meter, for the ytterbium meter of having demarcated, also can utilize this method that unknown pressure is tested.
Essence of the present invention is no longer directly to read signal on the ytterbium meter with oscillograph, but behind a fixed resistance in parallel on the ytterbium meter, reads the signal after the parallel connection.Although like this ytterbium meter under pressure resistance can increase several times, the increase amplitude of parallel resistance is dwindled greatly and is limited within the suitable scope, the situation of impedance mismatching no longer occurs.But paraller resistanc method can be sacrificed the signal amplitude of ytterbium meter.For this reason, for keep big signal and don't cable reflection occurs as far as possible, should choose the parallel resistance R of big resistance as far as possible 2R 2Choose also relevant with the size of institute measuring pressure: under little pressure, selectable R 2Relatively large; And under higher pressure, selectable R 2Less relatively.Calculate this problem that illustrates with simple mathematical below:
Suppose the static resistance R of ytterbium meter G0Be 50 Ω, the critical value of cable reflection is 75 Ω.In pressure P 1The time, the resistance of ytterbium meter increases to R Gp=100 Ω, any parallel resistance R at this moment less than 300 Ω 2Can avoid cable reflection.Suppose R 2Get 300 Ω, the parallel resistance initial value R before the pressure effect 0Be 42.86 Ω, the parallel resistance value R under the pressure effect pBe 75 Ω, the pressure drag signal has increased 75/ 42.86-1=0.75 doubly increases amplitude with the signal of ytterbium meter itself and compares for 1 times, and paraller resistanc method has kept 75% useful signal.And as the parallel resistance R that adopts 50 Ω 2The time, can only keep 33.3% useful signal.As seen, under same pressure, should select big parallel resistance R as far as possible 2
Can calculate the best parallel resistance R under the different pressures in a manner described 2Suppose to increase to P when pressure 2The time, the resistance of ytterbium meter increases to R Gp=200 Ω, then best R 2Be 120 Ω, the pressure drag signal has increased 75/ 35.29-1=1.125 doubly increases amplitude with the signal of ytterbium meter itself and compares for 3 times, and paraller resistanc method only can keep 37.5% useful signal.As seen, along with increasing of pressure, best parallel resistance R 2Value diminish, the useful signal amplitude narrows.However, because the signal of ytterbium meter self is very strong under the high pressure, reading of signal is no problem fully.
Embodiment 1
At first need to determine to produce the critical resistance value R of cable reflection ReflectionAdopt a pulsed constant current supply, a fixed resistance R 2Build as shown in Figure 1 debug lines with a 1GHz high-speed figure oscillograph.The internal resistance of pulsed constant current supply is 10k Ω, pulsewidth 130 μ s.Initial R 2Select 100 Ω for use, behind the manual triggers constant current source, in oscillograph, observed similar step signal, illustrate to have cable reflection with Fig. 2.R then 2Use the fixed resistance of one 75 Ω instead, after the manual activation, what present in oscillograph is a complete square wave signal, and the signal leading edge does not have step, illustrates that cable reflection can not occur this moment.Therefore with R ReflectionBe defined as 75 Ω.
Next being the pressure drag signal testing of ytterbium meter, is that our prepared film ytterbium meter is carried out the high pressure calibration experiment.As shown in Figure 3, adopt a pulsed constant current supply, a ytterbium meter R g, a fixed resistance R 2Build measurement circuit with a 1GHz high-speed figure oscillograph.Ytterbium meter and fixed resistance R 2Insert oscillograph with concentric cable again after the parallel connection.Ytterbium meter static resistance is about 50 Ω, is the gate type thin film ytterbium meter that at first is equipped with the photoetching legal system then with sputter, and substrate and encapsulating material all are polyimide.The test of dynamic piezo-resistance is carried out in the one-level light-gas gun, and the ytterbium meter is clipped in the middle of two organic glass, produces dynamic pressure with aluminium film flying bump.
Shown in Figure 4 is wherein once representational experimental result.Before this this experiment, the dynamic pressure of preparing to apply to the ytterbium meter is about 2GPa, and the static resistance of ytterbium meter is 46.5 Ω, and the resistance of estimating the ytterbium meter will increase about 2.5 times.Therefore best parallel resistance R 2Should be about 130 Ω, chosen the resistance of one 101 Ω in the experiment, then parallel resistance initial value R 0Be 31.84 Ω.Recording real force value after the experiment is 1.87GPa.As shown in Figure 4, measured waveform is complete, is a comparatively desirable signal that is similar to square wave, and step-like reflected signal does not appear in the forward position.Plateau potential V before pressure arrives 0For-1.03V, the plateau potential V after pressure arrives pFor-1.89V, then calculate parallel resistance R under the pressure effect by (1) formula pBe 58.43 Ω, calculate the resistance R of ytterbium meter under the pressure effect again by (2) formula GpBe 138.6 Ω, then the ytterbium meter before and after the pressure effect resistance be changed to 1.98 relatively.

Claims (5)

1. the method for testing of a ytterbium meter dynamic piezo-resistance is characterized in that, may further comprise the steps:
1. build measurement circuit: with ytterbium meter R gWith fixed resistance R 2After the parallel connection, an end inserts oscillograph with concentric cable, and an end connects pulsed constant current supply by another concentric cable, and with ytterbium meter R gPlace the dynamically pressure testing device;
2. before the pressure-loaded, test ytterbium meter R gStatic resistance R G0And fixed resistance R 2, the initial value of parallel resistance then
Figure FSA00000182246500011
3. after dynamic pressure loads, read pressure by oscillograph and arrive plateau potential V before 0And pressure arrives plateau potential V afterwards p, the parallel resistance R after stressed pObtain by (1) formula
R p R 0 = V P V 0 - - - ( 1 )
Basis (2) formula is by R again pObtain stressed back ytterbium meter R gResistance R Gp
1 R p = 1 R gp + 1 R 2 - - - ( 2 )
4. under different dynamic pressures, choose the fixed resistance R of different resistances 2: the size according to pressure before pressure-loaded is estimated R Gp, change R again 2Obtain R by (2) formula pAnd make R pBe slightly less than the critical value R of impedance mismatching Reflection
2. the method for testing of ytterbium meter dynamic piezo-resistance according to claim 1, it is characterized in that, the critical value R reflection of impedance mismatching is determined by the static simulation experiment: give one the 50 above fixed resistance power supply of Ω with a pulsed constant current supply, then the voltage signal at these resistance two ends directly being imported oscillograph reads, the manual activation pulsed constant current supply, observing the waveform forward position in oscillograph, is clean step signal, then an impedance matching as the waveform forward position; If the waveform forward position is step-like, then impedance does not match, and cable reflection occurred.
3. the method for testing of ytterbium meter dynamic piezo-resistance according to claim 1 is characterized in that, the static resistance R of ytterbium meter G0Standard resistance range be 20-70 Ω.
4. the method for testing of ytterbium meter dynamic piezo-resistance according to claim 1 is characterized in that, the internal resistance R of pulsed constant current supply 1Greater than 10k Ω.
5. the method for testing of ytterbium meter dynamic piezo-resistance according to claim 1 is characterized in that, the dynamic high-pressure force test device is one-level light-gas gun or plane wave generator.
CN 201010208478 2010-06-24 2010-06-24 Method for testing ytterbium meter dynamic piezo-resistance Pending CN101887080A (en)

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Cited By (5)

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CN103743335A (en) * 2013-12-24 2014-04-23 西北核技术研究所 Method and device of circular dynamic large strain measurement
CN105403748A (en) * 2015-12-12 2016-03-16 西安交通大学 Measurement apparatus and method for generating pulse voltages on the basis of flexoelectric dynamic effect
CN106528911A (en) * 2016-09-14 2017-03-22 西安电子科技大学 Apparatus for building VHDL-AMS simulation model of power supply
CN107462760A (en) * 2017-06-20 2017-12-12 中国电力科学研究院 A kind of high-voltage switch gear transient state earth testing system being used under forceful electric power magnetic environment
CN110793715A (en) * 2019-11-20 2020-02-14 西安交通大学 Dynamic calibration device for miniature ultrahigh pressure sensor

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103743335A (en) * 2013-12-24 2014-04-23 西北核技术研究所 Method and device of circular dynamic large strain measurement
CN103743335B (en) * 2013-12-24 2017-03-29 西北核技术研究所 A kind of ring dynamic strain measurement method and device greatly
CN105403748A (en) * 2015-12-12 2016-03-16 西安交通大学 Measurement apparatus and method for generating pulse voltages on the basis of flexoelectric dynamic effect
CN106528911A (en) * 2016-09-14 2017-03-22 西安电子科技大学 Apparatus for building VHDL-AMS simulation model of power supply
CN106528911B (en) * 2016-09-14 2019-10-25 西安电子科技大学 A kind of device for establishing power supply VHDL-AMS simulation model
CN107462760A (en) * 2017-06-20 2017-12-12 中国电力科学研究院 A kind of high-voltage switch gear transient state earth testing system being used under forceful electric power magnetic environment
CN110793715A (en) * 2019-11-20 2020-02-14 西安交通大学 Dynamic calibration device for miniature ultrahigh pressure sensor

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Application publication date: 20101117