CN103196617A - Cylinder type ultra-high-pressure sensor of side cavity oil charging structure - Google Patents
Cylinder type ultra-high-pressure sensor of side cavity oil charging structure Download PDFInfo
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- CN103196617A CN103196617A CN2013100917054A CN201310091705A CN103196617A CN 103196617 A CN103196617 A CN 103196617A CN 2013100917054 A CN2013100917054 A CN 2013100917054A CN 201310091705 A CN201310091705 A CN 201310091705A CN 103196617 A CN103196617 A CN 103196617A
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Abstract
A cylinder type ultra-high-pressure sensor of a side cavity oil charging structure comprises an elastic element base, wherein the upper portion of the elastic element base is a pressure bearing cylinder, a pressure bearing hole is formed in the center of the pressure bearing cylinder, and the side wall of the pressure bearing cylinder is provided with one or more than one oil charging cavity. A Wheatstone bridge of a sensitive element is connected with a patch board through a gold wire lead, one end of a cable is connected with the output of the patch board, the other end of the cable is connected with an external circuit, incompressible silicone oil is filled in the oil charging cavity, pressure of measured media directly acts inside the pressure bearing hole, the oil charging cavity produces size deformation which is directly proportional to the measured pressure, and the deformation is transmitted to the sensitive element through the incompressible silicone oil. On the basis of the monocrystalline silicon piezoresistive effect, resistance of four voltage dependent resistors on the sensitive element changes, under drive of a stabilized power source, the four voltage dependent resistors constitute the Wheatstone bridge to output electric signals which are directly proportional to the measured pressure, and therefore detection of ultra-high-pressure can be conducted. The cylinder type ultra-high-pressure sensor can bear pressure more than 1.5 GPa.
Description
Technical field
The present invention relates to a kind of pressure transducer, particularly the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber.
Background technology
Pressure transducer all becomes the emphasis of research and development all the time because of great demand, so far existing a lot of products are based on principle of work such as pressure resistance type, piezoelectric type and strain-types, the range of these sensors mainly concentrates between the 1MPa to 100MPa, for the hyperpressure sensor of high range and the then difficult realization of micro-pressure sensor of lower range.The application requirements that exists many hyperpressures to measure in industrial development and the national defense construction, not only the application scenario is a lot of in the commercial production, and same armament systems also need to monitor in real time reaching other pressure of GPa level.But because foreign technology blocks and China's correlation technique development is later, this respect is immature always, and the superhigh pressure sensor product is less.Mainly contain SOI silicon piezoresistive pressure sensor, SOS(Silicon on Sapphire in the existing market) pressure transducer, sputtered thin film pressure transducer and adopt the silicon foil gauge or pressure transducer that high temperature paper tinsel formula foil gauge is made etc.From measurement mechanism, these sensors all are based on electricresistance effect; On structure, the flexible member of these sensors and sensitive element can divide and be integrated and fabricated structure two classes.Major advantage with piezoresistance, pressure sensor of elastic sensing element integral structure comprises: 1) precision and highly sensitive, the follow-up signal treatment circuit there is not specific (special) requirements, and application cost is lower; 2) in light weight, Dynamic response is high, utilized bandwidth is up to more than the 1MHz; 3) stable performance, reliability height, because the work elastic strain of silicon is low to moderate microstrain, maximum displacement is at submicron order, thereby do not have wearing and tearing, fatigue and catabiosis, the life-span reaches 10
7Inferior above pressure cycling; 4) silicon adopts MEMS(Micro Mechanical-electro System, micromachine electronic system) making of technology realization mass, cost is low etc.But also have following problem: 1) the maximum amount journey is no more than 150MPa; 2) measured medium not only will with the sheathing material compatibility, simultaneously also must with silicon, glass and encapsulating material compatibility, thereby range of application relative narrower.
Flexible member and sensitive element are that the main advantage of the hyperpressure sensor of fabricated structure is: 1) range is big, as reaching more than the 1000MPa; 2) metallic elastic component and pressure interface are to be processed by a whole high-strength stainless steel, can select different materials according to different applicating mediums (as corrosive medium), are suitable for the measured medium wide ranges; 3) the pressure inside sealing does not exist O type circle, sealing reliability height.But this class sensor also has certain weak point: 1) if sensitive element is based on the metallic resistance effect, pressure transducer as sputtered film or employing high temperature paper tinsel formula metal strain plate, because the resistivity of metal is little, the sensitivity of sensor very little (only several mV/V), thereby poor signal to noise, follow-up signal processing circuit is had relatively high expectations; 2) if sensitive element measure by the displacement of measuring elastic body and producing, then need strict control sensitive element and elastomeric position relation in the encapsulation process, otherwise the stability of sensor will be affected, general drum type brake hyperpressure sensor increase wall thickness is influential to the sensitivity meeting of sensor in addition, and the output of sensor is diminished.
Summary of the invention
In order to overcome the shortcoming of above-mentioned prior art, the object of the present invention is to provide the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber, not only effectively utilize the anamorphic effect of cylinder, and compare with the hyperpressure sensor of general cylindrical structure bigger barrel thickness is arranged, load-bearing capacity is stronger, can reach more than the 1.5GPa, and sensor has avoided the pressure transducer of displacement effect to need the technological difficulties of strict control package position relation.
In order to achieve the above object, the technical scheme taked of the present invention is:
The drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber, comprise flexible member base 1, flexible member base 1 top is pressure-bearing cylinder 3, are pressure-bearing holes 2 at the center of pressure-bearing cylinder 3, the sidewall of pressure-bearing cylinder 3 is provided with one or more oil-filled chamber 7, when being provided with an oil-filled chamber 7, it is the monotrysian type structure, the top of the upper end of oil-filled chamber 7 and pressure-bearing cylinder 3 communicates, sensitive element 9 is assemblied in the upper end of oil-filled chamber 7, sensitive element 9 is provided with Wheatstone bridge, by spun gold lead-in wire 10 Wheatstone bridge is connected with card extender 4; Card extender 4 is installed in the top of pressure-bearing cylinder 3, and shell 5 is contained on the flexible member base 1, and flexible member base 1 the first half is surrounded by shell 5, and all parts except cable 6 are all surrounded by shell; One end of cable 6 links to each other with the output of card extender 4; The other end of cable 6 is fixed and is passed shell 5 by the solidus cap and is connected with external circuit, and oil-filled chamber 7 sidewalls have oil-filled seal bore 8, are full of incompressible silicone oil in the oil-filled chamber 7.
When being provided with more than one oil-filled chamber 7, it is open grain structure, positive center, the hole of oil-filled chamber 7 is along being arranged in pressure-bearing cylinder 3 sidewalls of circular shaft symmetry that with pressure-bearing hole 2 is the center of circle, the top of pressure-bearing cylinder 3 is provided with loam cake 12, sensitive element 9 is installed on the loam cake 12, sensitive element 9 is provided with Wheatstone bridge, by spun gold lead-in wire 10 input of Wheatstone bridge with card extender 4 is connected; Card extender 4 is installed in the top of loam cake 12, and shell 5 is contained on the flexible member base 1, and flexible member base 1 the first half is surrounded by shell 5, and all parts except cable 6 are all surrounded by shell, and an end of cable 6 links to each other with the output of card extender 4; Shell 5 is fixed and passed to the other end of cable 6 by the solidus cap, is connected with external circuit, and oil-filled chamber 7 sidewalls have oil-filled seal bore 8, is full of incompressible silicone oil in the oil-filled chamber 7.
Described loam cake 12 is oblate rod structure, there is oil-through hole 14 at positive center, the face that loam cake 12 contacts with pressure-bearing cylinder 3 had oil groove 11, cross oil groove 11 and be petal distribution, crossing oil groove 11 is connected with oil-through hole 14, the marginal position of loam cake 12 is provided with second quasi-mark 13-2, when guaranteeing that loam cake 12 contacts with pressure-bearing cylinder 3, crosses oil groove 11 and is communicated with oil-filled chamber 7.
Described pressure-bearing cylinder 3 is cylindrical barrel, through bearing the pressure of 1.5GPa after the self-enhancement processing, and form elastic layer and ductile bed, and elastic layer is interior, and ductile bed is outside, pressure-bearing hole 2 is at ductile bed, directly contact measured medium, oil-filled chamber 7 is the blind hole at pressure-bearing tube 3 sidewalls, and opening direction is opposite with pressure-bearing hole 2, be arranged in elastic layer, the edge at pressure-bearing cylinder 3 tops of open grain structure is provided with first quasi-mark 13-1.
Described sensitive element 9 is the presser sensor chips by the MEMS fabrication techniques, and perimeter mounted is at oil-filled chamber 7 one ends.
Described pressure-bearing cylinder 3 is to adopt the high-strength material spring steel to make.
Because pressure-bearing cylinder 3 is for having adopted the self-enhancement thick cyclinder of high-strength material, compare with the cylinder that general use self-enhancement is handled, oil-filled chamber is in pressure-bearing cylinder interior sidewall, the autofrettaged cylinder materials for support is continued to have in the oil-filled chamber outside, make pressure-bearing cylinder 3 that thicker thickness be arranged, known by theory calculating, this structure can be born the pressure of 1.5GPa, overcome the little shortcoming of silica-base material structure measurement range, and bigger at the transducer range on autofrettaged cylinder surface than general sensitive element, security is better.Because this high-strength material and measuring media compatibility are good, this sensor also overcomes the general narrower shortcoming of silica-base material integrated transducer range of application; Because sensitive element 9 is the sensitive elements that adopt the MEMS fabrication techniques, piezoresistance coefficient is higher.So the output sensitivity of sensor can reach more than the 20mV/V, the output sensitivity (only several mV/V) that is higher than the pressure transducer of sputtered film or employing high temperature paper tinsel formula metal strain plate far away, therefore sensitivity and signal to noise ratio (S/N ratio) are all better, have reduced the requirement to follow-up modulate circuit; Because the way of contact of the pressure transducer of the way of contact of flexible member base and sensitive element and sputtered film or employing high temperature paper tinsel formula metal strain plate is different, the difference of thermal expansivity is very little to the performance impact of sensor between the two, and therefore stability also can promote significantly; After owing to be heated, oil-filledly there is positive temperature coefficient in cylinder at the sensitive element end with institute, so can select the chip of negative temperature coefficient for use, and these two kinds of temperatures coefficient compensate mutually, can make sensor have desirable temperature coefficient.
Description of drawings
Fig. 1 is the structural representation of monotrysian type sensor of the present invention.
Fig. 2 is the structural representation of porous type sensor of the present invention.
Fig. 3-a is loam cake 12 structural front view of porous type sensor.
Fig. 3-b is the loam cake 12 structure upward views of porous type sensor.
Fig. 4-a is the front view of the structure of porous type pressure-bearing cylindrical portions may.
Fig. 4-b is the vertical view of Fig. 4-a.
Fig. 5 is the principle of work sketch.
Embodiment
Below in conjunction with accompanying drawing to structural principle of the present invention, principle of work more detailed description.
With reference to figure 1, the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber, comprise flexible member base 1, flexible member base 1 top is pressure-bearing cylinder 3, is pressure-bearing holes 2 at the center of pressure-bearing cylinder 3, and it is the monotrysian type structure that the sidewall of pressure-bearing cylinder 3 is provided with an oil-filled chamber 7(), the top of the upper end of oil-filled chamber 7 and pressure-bearing cylinder 3 communicates, sensitive element 9 is assemblied in the upper end of oil-filled chamber 7, and sensitive element 9 is provided with Wheatstone bridge, by spun gold lead-in wire 10 Wheatstone bridge is connected with card extender 4; Card extender 4 is installed in the top of pressure-bearing cylinder 3, and shell 5 is contained on the flexible member base 1, and flexible member base 1 the first half is surrounded by shell 5, and all parts except cable 6 are all surrounded by shell; One end of cable 6 links to each other with the output of card extender 4; Shell 5 is fixed and passed to the other end of cable 6 by the solidus cap, is connected with external circuit, and oil-filled chamber 7 sidewalls have oil-filled seal bore 8, is full of incompressible silicone oil in the oil-filled chamber 7; Pressure-bearing cylinder 3 is to adopt high-strength material spring steel 60SI2CrVA to make, and the thick cyclinder of process self-enhancement processing.
With reference to figure 2, the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber, comprise flexible member base 1, flexible member base 1 top is pressure-bearing cylinder 3, are pressure-bearing holes 2 at the center of pressure-bearing cylinder 3, it is open grain structure that the sidewall of pressure-bearing cylinder 3 is provided with more than one oil-filled chamber 7(), positive center, the hole of oil-filled chamber 7 is along being arranged in pressure-bearing cylinder 3 sidewalls of circular shaft symmetry that with pressure-bearing hole 2 is the center of circle, the top of pressure-bearing cylinder 3 is provided with loam cake 12, sensitive element 9 is installed on the loam cake 12, sensitive element 9 is provided with Wheatstone bridge, by spun gold lead-in wire 10 input of Wheatstone bridge with card extender 4 is connected; Card extender 4 is installed in the top of loam cake 12, and shell 5 is contained on the flexible member base 1, and flexible member base 1 the first half is surrounded by shell 5, and all parts except cable 6 are all surrounded by shell, and an end of cable 6 links to each other with the output of card extender 4; Shell 5 is fixed and passed to the other end of cable 6 by the solidus cap, is connected with external circuit, and oil-filled chamber 7 sidewalls have oil-filled seal bore 8, is full of incompressible silicone oil in the oil-filled chamber 7; Pressure-bearing cylinder 3 is to adopt high-strength material spring steel 60SI2CrVA to make, and the thick cyclinder of process self-enhancement processing.
With reference to Fig. 3, loam cake 12 is oblate rod structure, there is oil-through hole 14 at positive center, the face that loam cake contacts with the pressure-bearing cylinder had oil groove 11, cross oil groove 11 and be petal distribution, cross oil groove 11 and be connected with oil-through hole 14, marginal position is provided with the second alignment mark 13-2, when guaranteeing that loam cake 12 contacts with pressure-bearing cylinder 3, cross oil groove 11 and be communicated with oil-filled chamber 7.
With reference to figure 4, described pressure-bearing cylinder 3 is cylindrical barrel, can bear the pressure of 1.5GPa after handling through self-enhancement, and form elastic layer and ductile bed, elastic layer is interior, ductile bed outside, pressure-bearing hole 2 directly contacts measured medium at ductile bed, oil-filled chamber 7 is the blind hole at pressure-bearing tube 3 sidewalls, opening direction is opposite with pressure-bearing hole 2, is arranged in elastic layer, and oil-filled chamber 7 perforate modes have monotrysian type and porous type dual mode; The pressure-bearing cylinder 3 of open grain structure is because will aim at loam cake 12, so there is the first alignment mark 13-1 at the edge at pressure-bearing cylinder 3 tops; Sensitive element 9 is the presser sensor chips by the MEMS fabrication techniques, and perimeter mounted is at oil-filled chamber 7 one ends.
Principle of work of the present invention is:
With reference to figure 5, measured medium pressure acts directly in the pressure-bearing hole 2 of flexible member base 1 pressure-bearing cylinder 3 inside, after handling through self-enhancement, can bear pressure-bearing cylinder 3 pressure of 1.5GPa, take place and the cubic deformation amount that is directly proportional by measuring pressure behind oil-filled chamber 7 pressurizeds, this deflection is delivered on the sensitive element 9 on oil-filled chamber 7 tops by incompressible silicone oil then, based single crystal silicon piezoresistive effect, four voltage dependent resistor (VDR) resistances on the sensitive element 9 change, under the stabilized power source excitation, form the output of Hui Sitong full-bridge and the electric signal that is directly proportional by measuring pressure by four voltage dependent resistor (VDR)s, thereby carry out the detection of UHV (ultra-high voltage) pressure, owing to the cubic deformation of the size that makes sensitive element 9 in the design and oil-filled chamber generation is flux matched, so sensitivity can reach more than the 20mV/V.Adopt the sensor of the inventive method preparation, its technical parameter can reach following requirement:
(1) measurement range: 0～1.5GPa
(2) precision: be better than 1%FS
(3) full scale output: greater than 20mV/V
(4) serviceability temperature scope: the serviceability temperature scope that depends on sensitive chip and silicone oil
(5) overload capacity: 120%FS
(6) serviceable life: 〉=10
6Inferior.
Claims (5)
1. the drum type brake hyperpressure sensor of the oil-filled structure in side chamber, comprise flexible member base 1, it is characterized in that: flexible member base (1) top is pressure-bearing cylinder (3), be pressure-bearing hole (2) at the center of pressure-bearing cylinder (3), the sidewall of pressure-bearing cylinder (3) is provided with one or more oil-filled chamber (7), when being provided with an oil-filled chamber (7), it is the monotrysian type structure, the top of the upper end of oil-filled chamber (7) and pressure-bearing cylinder (3) communicates, sensitive element (9) is assemblied in the upper end of oil-filled chamber (7), sensitive element (9) is provided with Wheatstone bridge, by spun gold lead-in wire (10) Wheatstone bridge is connected with card extender (4); Card extender (4) is installed in the top of pressure-bearing cylinder (3), and shell (5) is contained on the flexible member base (1), and flexible member base (1) the first half is surrounded by shell (5), and all parts except cable (6) are all surrounded by shell; One end of cable (6) links to each other with the output of card extender (4); Shell (5) is fixed and passed to the other end of cable (6) by the solidus cap, is connected with external circuit, and oil-filled chamber (7) sidewall has oil-filled seal bore (8), and oil-filled chamber is full of incompressible silicone oil in (7);
When being provided with more than one oil-filled chamber (7), it is open grain structure, positive center, the hole of oil-filled chamber (7) is along being arranged in pressure-bearing cylinder (3) sidewall of circular shaft symmetry that with pressure-bearing hole (2) is the center of circle, the top of pressure-bearing cylinder (3) is provided with loam cake (12), sensitive element (9) is installed on the loam cake (12), sensitive element (9) is provided with Wheatstone bridge, by spun gold lead-in wire (10) input of Wheatstone bridge with card extender (4) is connected; Card extender (4) is installed in the top of loam cake (12), shell (5) is contained on the flexible member base (1), flexible member base (1) the first half is surrounded by shell (5), all parts except cable (6) are all surrounded by shell, and an end of cable (6) links to each other with the output of card extender (4); Shell (5) is fixed and passed to the other end of cable (6) by the solidus cap, is connected with external circuit, and oil-filled chamber (7) sidewall has oil-filled seal bore (8), and oil-filled chamber is full of incompressible silicone oil in (7).
2. the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber according to claim 1, it is characterized in that: described loam cake (12) is oblate rod structure, there is oil-through hole (14) at positive center, the face that loam cake (12) contacts with pressure-bearing cylinder (3) had oil groove (11), cross oil groove (11) and be petal distribution, crossing oil groove (11) is connected with oil-through hole (14), the marginal position of loam cake (12) is provided with second quasi-mark (13-2), guarantee loam cake (12) and pressure-bearing cylinder (3) when contacting, mistake oil groove (11) is communicated with oil-filled chamber (7).
3. the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber according to claim 1, it is characterized in that: described pressure-bearing cylinder (3) is cylindrical barrel, through bearing the pressure of 1.5GPa after the self-enhancement processing, and formation elastic layer and ductile bed, elastic layer is interior, ductile bed outside, pressure-bearing hole (2) is at ductile bed, directly contact measured medium, oil-filled chamber (7) is the blind hole at pressure-bearing tube (3) sidewall, opening direction is opposite with pressure-bearing hole (2), is arranged in elastic layer, and the edge at pressure-bearing cylinder (3) top of open grain structure is provided with first quasi-mark (13-1).
4. the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber according to claim 1, it is characterized in that: described sensitive element (9) is the presser sensor chip by the MEMS fabrication techniques, perimeter mounted is at oil-filled chamber (7) one ends.
5. the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber according to claim 1 is characterized in that: described pressure-bearing cylinder (3) is to adopt the high-strength material spring steel to make.
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| CN201310091705.4A CN103196617B (en) | 2013-03-21 | 2013-03-21 | Cylinder type ultra-high-pressure sensor of side cavity oil charging structure |
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| CN103196617B CN103196617B (en) | 2014-10-15 |
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Cited By (3)
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| CN104535250A (en) * | 2014-12-16 | 2015-04-22 | 西安交通大学 | High-temperature resistant ultrahigh pressure sensor of self-reinforced cylindrical double-liquid-cavity structure |
| CN110793715A (en) * | 2019-11-20 | 2020-02-14 | 西安交通大学 | Dynamic calibration device for miniature ultrahigh pressure sensor |
| CN112539775A (en) * | 2020-11-16 | 2021-03-23 | 希优(常州)智能科技有限公司 | High-voltage-resistant electronic system based on oil filling in pressure guide shell and preparation process thereof |
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| CN110793715A (en) * | 2019-11-20 | 2020-02-14 | 西安交通大学 | Dynamic calibration device for miniature ultrahigh pressure sensor |
| CN112539775A (en) * | 2020-11-16 | 2021-03-23 | 希优(常州)智能科技有限公司 | High-voltage-resistant electronic system based on oil filling in pressure guide shell and preparation process thereof |
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| CN103196617B (en) | 2014-10-15 |
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