CN110517842A - Electromagnetic coupling device and the burnishing device with it, rheomagnetic are capable of measuring device - Google Patents
Electromagnetic coupling device and the burnishing device with it, rheomagnetic are capable of measuring device Download PDFInfo
- Publication number
- CN110517842A CN110517842A CN201910810297.0A CN201910810297A CN110517842A CN 110517842 A CN110517842 A CN 110517842A CN 201910810297 A CN201910810297 A CN 201910810297A CN 110517842 A CN110517842 A CN 110517842A
- Authority
- CN
- China
- Prior art keywords
- generating assembly
- field generating
- magnetic pole
- carbon brush
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008878 coupling Effects 0.000 title claims abstract description 51
- 238000010168 coupling process Methods 0.000 title claims abstract description 51
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 51
- 238000005498 polishing Methods 0.000 claims abstract description 74
- 230000005684 electric field Effects 0.000 claims abstract description 57
- 238000000518 rheometry Methods 0.000 claims abstract description 47
- 238000009413 insulation Methods 0.000 claims abstract description 27
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 18
- 230000005611 electricity Effects 0.000 claims abstract description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 64
- 229910052799 carbon Inorganic materials 0.000 claims description 64
- 239000012530 fluid Substances 0.000 claims description 30
- 230000001360 synchronised effect Effects 0.000 claims description 16
- 238000005259 measurement Methods 0.000 claims description 13
- 230000004888 barrier function Effects 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 5
- 238000012545 processing Methods 0.000 abstract description 15
- 238000011160 research Methods 0.000 abstract description 9
- 238000012360 testing method Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract 1
- 238000003801 milling Methods 0.000 description 15
- 239000000463 material Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 8
- 230000033001 locomotion Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000003754 machining Methods 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- SZVJSHCCFOBDDC-UHFFFAOYSA-N ferrosoferric oxide Chemical compound O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000002270 dispersing agent Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 101000911390 Homo sapiens Coagulation factor VIII Proteins 0.000 description 1
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 102000057593 human F8 Human genes 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000010534 mechanism of action Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910001172 neodymium magnet Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229940047431 recombinate Drugs 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
- G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
- G01N11/14—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by using rotary bodies, e.g. vane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/02—Permanent magnets [PM]
- H01F7/0231—Magnetic circuits with PM for power or force generation
- H01F7/0242—Magnetic drives, magnetic coupling devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
- G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
- G01N11/14—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material by using rotary bodies, e.g. vane
- G01N2011/147—Magnetic coupling
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Power Engineering (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Electromagnetism (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention relates to the technical fields of precision optics processing, more specifically, it is related to electromagnetic coupling device and the burnishing device with it, rheomagnetic is capable of measuring device, including pedestal, electric field generating assembly, magnetic field generating assembly, first rotary components, second rotary components and the insulation rib above electric field generating assembly, first rotary components are connect with electric field generating assembly, second rotary components are connect with magnetic field generating assembly, electric field generating assembly, magnetic field generating assembly is connect with pedestal, the magnetic field that insulation rib inner part is furnished with the electric field of electric field generating assembly generation and magnetic field generating assembly generates.The present invention, which passes through, changes electric field generation part-structure and the various forms of electricity of field structure realization, magnetic coupling fields, and the research for electromagnetism rheology chain string control mode and electromagnetism rheology polishing mode provides Equipment Foundations；And can be tested applied to electromagnetism rheology polishing test, rheomagnetic, push the polishing of electromagnetism rheology in the extensive use of optical precision manufacture field.
Description
Technical field
The present invention relates to precision optics processing technical field, more particularly, to electromagnetic coupling device and with its
Burnishing device, rheomagnetic are capable of measuring device.
Background technique
Information science technology is in high speed development, and application of the semiconductor material in microelectronic component field is further extensive, together
When is used for performance, and more stringent requirements are proposed, and common semiconductor material includes monocrystalline silicon, sapphire and monocrystalline silicon carbide
Deng.General semiconductor wafer manufacture will will reach good service performance by processes such as slice, grinding, polishings, on the one hand brilliant
The surface accuracy of piece needs to reach ultra-smooth degree (roughness Ra reaches 1nm or less), and surface precision also has higher requirements (face shape
Precision reaches 0.5 micron or less), the continuous expansion of another aspect wafer size also brings bigger choose to Ultraprecise polished processing
War.Existing is mainly both at home and abroad high-efficient grinding, Ultraprecise polished, chemical machinery throwing to the processing unit (plant) of large-sized semiconductor wafer
Light, Magnetorheological Polishing and polishing processing based on face grinding machine etc..Wherein, Technique of Magnetorheological Finishing is imitated using magnetorheological rheology
The method that half fixed flexible polishing head is engaged in polishing should be generated, because opposite polishing technology can effectively reduce work pieces process
Blind crack and the residual stress on surface and be used widely.
Although electromagnetic coupling formula burnishing device is developed successively, more or less have the defects that it is certain, such as: China
Patent CN103192297B discloses a kind of magnetorheological coupling processing method of chemical cluster of single crystal silicon carbide wafer, is based on Fenton
Reaction corrosion monocrystal SiC reaction, Magnetorheological Polishing principle, the cluster mechanism of action propose that the coupling of chemical reaction and machining is thrown
Light method effectively increases the processing efficiency of certain size monocrystal SiC, but processing method adaptability is weak, cannot be widely applied
In the polishing of other wafer materials, and its magnetic pole cluster degree is lower；103317413 B of Chinese patent CN discloses one
Kind electromagnetism self-excitation vibration electric current becomes coupling polishing method and device, introduces the high speed of electromagnetism self-excited vibration realization electric field generation device
Longitudinally reciprocating motion acts on to generate longitudinal direction to the flexible bistrique generated by electric rheological effect, raising processing efficiency, but due to
Using single-point polishing method, the demand of large-sized wafer processing is not adapted to.Influence electromagnetic coupling formula burnishing device performance
Factor it is very much, and there has been no the experimental rigs of effective quality of finish influence factor at present, hinder electromagnetism rheology in optics
The application in Precision Machining field.
Summary of the invention
It is an object of the invention to overcome the deficiencies of the prior art and provide a kind of electromagnetic coupling device and with its polishing
Device, rheomagnetic are capable of measuring device, it can be achieved that various forms of electromagnetic coupling fields, and is directed to various forms of electromagnetic couplings
Field can be carried out measurement to rheomagnetic, and the research for electromagnetism rheology chain string control mode and electromagnetism rheology polishing mode provides
Basis.
In order to solve the above technical problems, the technical solution adopted by the present invention is that:
A kind of electromagnetic coupling device is provided, including pedestal, electric field generating assembly, magnetic field generating assembly, driving electric field occur
The second rotary components and be set to electric field generating assembly that the first rotary components, the driving magnetic field generating assembly of component rotation rotate
The insulation rib of top, first rotary components are connect with electric field generating assembly, and second rotary components and magnetic field occur
Component connection, the electric field generating assembly, magnetic field generating assembly are connect with pedestal, and the insulation rib inner part is furnished with electric field
The magnetic field that the electric field and magnetic field generating assembly that generating assembly generates generate.
Electromagnetic coupling device of the invention, electric field generating assembly, the cooperation of electromagnetism generating assembly form electricity in insulation rib
Magnetic coupling field, the parameter by changing electric field generating assembly generates different distributions structure, different size of electric field, by changing magnetic
The parameter of field generating assembly generates the permanent magnetism being differently formed and moves field, and the structure of same electric field and different magnetic field is not electromagnetism rheology chain string
The research of control mode and electromagnetism rheology polishing mode provides Equipment Foundations.
Further, the electric field generating assembly includes electrode group, electrode chassis, electrode disk beam barrel, the first carbon brush, first
Carbon brush holder, the second carbon brush, the second carbon brush holder, the first conducting ring and the second conducting ring:
First carbon brush holder is fixedly installed in electrode disk beam barrel, first carbon brush is fixed on the first carbon brush holder and first
The first conductive sheet is equipped between carbon brush and the first carbon brush holder, first carbon brush is attached at the bottom on electrode chassis and first is conductive
It is located between the first carbon brush and electrode chassis；
Second carbon brush holder is fixedly installed in electrode disk beam barrel, second carbon brush is fixed on the second carbon brush holder and second
The second conductive sheet is equipped between carbon brush and the second carbon brush holder, second carbon brush is attached at the bottom on electrode chassis and second is conductive
It is located between the second carbon brush and electrode chassis；
First conducting ring is electrically connected with the anode of the electrode group, and second conducting ring is negative with the electrode group
Pole electrical connection, first conductive sheet, the second conductive sheet and straight ac high voltage source are connected；
The electrode group is embedded at electrode chassis and the upper surface on electrode chassis and is equipped with abrasion-proof insulating layer.
The electric energy of straight ac high voltage source is transmitted to electrode group by the first conductive sheet, the first carbon brush, the first conducting ring
Anode is transmitted to the cathode of electrode group by the second conductive sheet, the second carbon brush, the second conducting ring, thus in the positive and negative anodes of electrode
Between form electric field, by way of changing the type of electrode group, straight ac high voltage source voltage swing and frequency shift electric field
And electric field strength.
Further, the electrode chassis is installed on electrode disk shaft, and the electrode disk shaft is set to outside electrode disk beam barrel
Week and between electrode disk shaft and electrode disk beam barrel be equipped with first bearing, electrode disk shaft periphery is connected with first pulley.
Further, first rotary components include first motor and the first synchronous belt, the first motor installation
In pedestal, first synchronous belt is connected between first motor and first pulley.First motor work passes through the first synchronous belt
First pulley rotation is driven, first pulley drives the rotation of electrode disk shaft, due to setting between electrode disk shaft and electrode disk beam barrel
There is first bearing, electrode disk shaft can the rotation of comparative electrode dish axle cylinder.
Further, the magnetic field generating assembly includes magnetic pole, magnetic pole fixing axle, magnetic pole sliding block and magnetic pole guide rail, institute
One end that magnetic pole sliding block is installed on magnetic pole fixing axle is stated, the other end of magnetic pole fixing axle is equipped with the inner hole of installation magnetic pole, the magnetic
Pole sliding block is connect with magnetic pole guide rail.
Further, the magnetic pole guide rail is installed on magnetic pole rotating cylinder, and it is fixed that magnetic pole rotating cylinder periphery is connected with magnetic pole
Beam barrel, the magnetic pole dead axle cylinder are connect with pedestal, be connected between the magnetic pole rotating cylinder and magnetic pole dead axle cylinder second bearing and
The periphery of magnetic pole rotating cylinder is connected with the second belt wheel.
Further, second rotary components include the second motor and the second synchronous belt, the second motor installation
In pedestal, second synchronous belt is connected between the second motor and the second belt wheel.The work of second motor passes through the second synchronous belt
The second belt wheel is driven to rotate, the second belt wheel drives the rotation of magnetic pole rotating cylinder, due to connecting between magnetic pole rotating cylinder and magnetic pole dead axle cylinder
It is connected to second bearing, magnetic pole rotating cylinder can the rotation of opposing polarities dead axle cylinder；The present invention can lead by adjusting magnetic pole sliding block with magnetic pole
Realize the static magnetic field of electrode chassis disk to dynamically so that magnetic pole is rotated with certain eccentricity in relative position between rail
Magnetic field transformation.
The present invention also provides a kind of burnishing devices, including polishing shaft, for the fixture of clamping workpiece and such as preceding institute
The electromagnetic coupling device stated, the fixture are connected to polishing shaft bottom, the throwing of electromagnetism rheology are loaded with inside the insulation rib
Light liquid, the workpiece bottom contact setting with electromagnetism rheology polishing fluid.
Burnishing device of the invention, fixture clamping workpiece simultaneously rotate, workpiece surface and electromagnetism under the drive of polishing shaft
Relative motion occurs between rheology polishing fluid, realizes the efficient Ultra-smooth machining of workpiece surface.
The present invention also provides a kind of rheomagnetics to be capable of measuring device, including foregoing burnishing device, rotation are surveyed
Power inductor and signal transmitter, the rotation dynamometry inductor are connected to one end of polishing shaft, the signal transmitter
It is connect with rotation dynamometry inductor signal, the insulation rib outer cover is equipped with energy barrier cover.
Rheomagnetic of the invention is capable of measuring device, and fixture clamping workpiece simultaneously rotates, work under the drive of polishing shaft
Relative motion occurs between part surface and electromagnetism rheology polishing fluid, realizes the efficient Ultra-smooth machining of workpiece surface, passes through simultaneously
Rotate the size of dynamometry inductor test polishing force, it is easy to accomplish the monitoring and research polishing force to polishing process polishing force are big
The small influence to polishing effect.
Device is capable of measuring the present invention also provides a kind of rheomagnetic, including measurement rotor, torquemeter and such as preceding institute
The electromagnetic coupling device stated, measurement rotor are connect with torquemeter, are loaded with electromagnetism rheology polishing fluid, institute inside the insulation rib
The end for stating measurement rotor stretches in electromagnetism rheology polishing fluid, and the insulation rib outer cover is equipped with energy barrier cover.
Rheomagnetic of the invention is capable of measuring device, and measurement rotor is stretched in magnetorheological fluid, tested by torquemeter
The torque of rotor is measured, and converts and obtains the shear stress and viscosity of emr fluid.The present invention can be used for studying electromagnetism rheology
Rheological property of the liquid under not same electric field and different magnetic field coupling is that electromagnetism rheology chain string control mode and electromagnetism rheology are thrown
The research of light mode provides data basis.
Compared with prior art, the beneficial effects of the present invention are:
Electromagnetic coupling device of the invention can part-structure occurs for electric field and field structure realizes not similar shape by changing
The electricity of formula, magnetic coupling field, the research for electromagnetism rheology chain string control mode and electromagnetism rheology polishing mode provide Equipment Foundations；This
The electromagnetic coupling device of invention can be used for carrying out electromagnetism rheology polishing test, the polishing force measurement of electromagnetism rheology polishing and electromagnetism
Rheology liquid performance test polishes influence factor for research electromagnetism rheology and has founded experimental condition, promotes the polishing of electromagnetism rheology in light
Learn the extensive use in Precision Machining field.
Detailed description of the invention
Fig. 1 is the cross-sectional view of one electromagnetic coupling device of embodiment；
Fig. 2 is the perspective view of one electromagnetic coupling device of embodiment；
Fig. 3 is the part detail view of the electric field generating assembly of one electromagnetic coupling device of embodiment；
Fig. 4 is the Section A-A cross-sectional view of the electric field generating assembly of electromagnetic coupling device in Fig. 3；
Fig. 5 is the enlarged drawing of the local B of the electric field generating assembly of electromagnetic coupling device in Fig. 4；
Fig. 6 is the structural schematic diagram of the concentric ring group electrode group of one electromagnetic coupling device of embodiment；
Fig. 7 is the structural schematic diagram of the stripe shape group electrode group of one electromagnetic coupling device of embodiment；
Fig. 8 is the structural schematic diagram of the dot matrix type electrode group of one electromagnetic coupling device of embodiment；
Fig. 9 is the structural schematic diagram of two burnishing device of embodiment；
Figure 10 is the structural schematic diagram that three rheomagnetic of embodiment is capable of measuring device；
Figure 11 is the structural schematic diagram that example IV rheomagnetic is capable of measuring device；
In attached drawing: 100- pedestal；101- mounting hole；200- electric field generating assembly；201- electrode group；202- electrode chassis；
203- electrode disk beam barrel；The first carbon brush of 204-；The first carbon brush holder of 205-；The second carbon brush of 206-；The second carbon brush holder of 207-；208-
One conducting ring；The second conducting ring of 209-；210- anode；211- cathode；212- abrasion-proof insulating layer；213- elongated slot；214- shields copper
Piece；215- electrode disk shaft；216- first bearing；217- changeover panel；300- magnetic field generating assembly；301- magnetic pole；302- magnetic pole
Fixing axle；303- magnetic pole sliding block；304- magnetic pole guide rail；305- magnetic pole rotating cylinder；306- magnetic pole dead axle cylinder；307- second bearing；
The first rotary components of 400-；401- first pulley；402- first motor；The first synchronous belt of 403-；The first rotation Ii miter of 404-；
The second rotary components of 500-；The second belt wheel of 501-；The second motor of 502-；The second synchronous belt of 503-；The second rotation Ii miter of 505-；
600- insulation rib；700- burnishing device；701- polishes shaft；702- fixture；800- rheomagnetic is capable of measuring device；801-
Rotate dynamometry inductor；802- signal transmitter；803- energy barrier cover；804- measures rotor；805- torquemeter.
Specific embodiment
The present invention is further illustrated With reference to embodiment.Wherein, attached drawing only for illustration,
What is indicated is only schematic diagram, rather than pictorial diagram, should not be understood as the limitation to this patent；Reality in order to better illustrate the present invention
Example is applied, the certain components of attached drawing have omission, zoom in or out, and do not represent the size of actual product；To those skilled in the art
For, the omitting of some known structures and their instructions in the attached drawings are understandable.
The same or similar label correspond to the same or similar components in the attached drawing of the embodiment of the present invention；It is retouched in of the invention
In stating, it is to be understood that if the orientation or positional relationship for having the instructions such as term " on ", "lower", "left", "right" is based on attached drawing
Shown in orientation or positional relationship, be merely for convenience of description of the present invention and simplification of the description, rather than indication or suggestion is signified
Device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore positional relationship is described in attached drawing
Term only for illustration, should not be understood as the limitation to this patent, for the ordinary skill in the art, can
To understand the concrete meaning of above-mentioned term as the case may be.
Embodiment one
The embodiment of electromagnetic coupling device of the invention as shown in Figure 1 to Figure 8 shows the, including pedestal 100, electric field generating assembly
200, the first rotary components 400, driving magnetic field generating assembly that magnetic field generating assembly 300, driving electric field generating assembly 200 rotate
The second rotary components 500 and the insulation rib 600 above electric field generating assembly 200 of 300 rotations, the first rotary components
400 connect with electric field generating assembly 200, and the second rotary components 500 are connect with magnetic field generating assembly 300, electric field generating assembly
200, magnetic field generating assembly 300 is connect with pedestal 100, and the generation of electric field generating assembly 200 is distributed with inside the rib 600 that insulate
The magnetic field that electric field and magnetic field generating assembly 300 generate.Assembling is installed on for the ease of the electromagnetic coupling device of the present embodiment,
The pedestal 100 of the present embodiment may be configured as door type structure, and multiple mounting holes 101 are arranged to pacify in the bottom of door type structure
Dress.For the present embodiment when implementing, electric field generating assembly 200, the cooperation of electromagnetism generating assembly form electromagnetism coupling in insulation rib 600
Field is closed, the parameter by changing electric field generating assembly 200 generates different distributions structure, different size of electric field, by changing magnetic
The parameter of field generating assembly 300 generates the permanent magnetism being differently formed and moves field, thus the electromagnetic coupling field being variously formulated.
As shown in Figures 3 to 5, electric field generating assembly 200 includes electrode group 201, electrode chassis 202, electrode disk beam barrel
203, the first carbon brush 204, the first carbon brush holder 205, the second carbon brush 206, the second carbon brush holder 207, the first conducting ring 208 and second
Conducting ring 209:
First carbon brush holder 205 is fixedly installed in electrode disk beam barrel 203, the first carbon brush 204 is fixed on the first carbon brush holder 205 and
The first conductive sheet is equipped between first carbon brush 204 and the first carbon brush holder 205, the first carbon brush 204 is attached at the bottom on electrode chassis 202
Portion and the first conducting ring 208 are set between the first carbon brush 204 and electrode chassis 202；
Second carbon brush holder 207 is fixedly installed in electrode disk beam barrel 203, the second carbon brush 206 is fixed on the second carbon brush holder 207 and
The second conductive sheet is equipped between second carbon brush 206 and the second carbon brush holder 207, the second carbon brush 206 is attached at the bottom on electrode chassis 202
Portion and the second conducting ring 209 are set between the second carbon brush 206 and electrode chassis 202；
First conducting ring 208 is electrically connected with the anode 210 of electrode group 201, and the second conducting ring 209 is negative with electrode group 201
Pole 211 is electrically connected, and the first conductive sheet, the second conductive sheet and straight ac high voltage source are connected；Wherein, the electricity of straight ac high voltage source
Pressure range is 0~10kV, and frequency range is 0Hz~50Hz.
Electrode group 201 is embedded at electrode chassis 202 and the upper surface on electrode chassis 202 and is equipped with abrasion-proof insulating layer 212, prevents
Electrode chassis 202 is worn, and the service life on electrode chassis 202 is extended；Wherein, the thickness of abrasion-proof insulating layer 212 can 0.3mm~
It is adjusted in the range of 1mm, alumina ceramic coating can be used in the abrasion-proof insulating layer 212 of the present embodiment.
Electrode group 201 can need may be configured as various shapes row according to the simulation of different coupled electromagnetic fields in the present embodiment
Mode for cloth: such as concentric ring group electrode group 201, stripe shape group electrode group 201, dot matrix type electrode group 201, respectively such as Fig. 6, Fig. 7, Fig. 8
It is shown.But it should be recognized that electrode group 201 of the invention is not limited to above-mentioned shape arrangement mode, in practical application, electric
The position of pole group 201, quantity can be adjusted according to demand.
For the ease of the installation of electrode group 201, opened in the lower surface position corresponding with electrode group 201 on electrode chassis 202
Equipped with elongated slot 213, conducting wire is set in elongated slot 213 and electrode group 201 is welded, adjacent electrode connects opposite conducting wire, wire end
It is welded respectively with the first conducting ring 208, the second conducting ring 209, the first conductive sheet, the second conductive sheet extraction wire and the straight height that exchanges
Voltage source is connected, and the positive and negative anodes that the voltage that straight ac high voltage source generates can be directed to electrode group 201 are arranged such.
It is generated after high-voltage electricity in order to avoid electrode disk beam barrel 203, magnetic field generating assembly 300 etc. are passed through electrode group 201
Electric field has an impact, and the present embodiment is provided with shielding copper sheet 214 between electrode group 201 and magnetic field generating assembly 300.
For the ease of the first conducting ring 208, the second conducting ring 209, the installation and positioning for shielding copper sheet 214, the present embodiment
It can be respectively set in the bottom surface on electrode chassis 202 matched with the first conducting ring 208, the second conducting ring 209, shielding copper sheet 214
Locating notch.
In order to avoid the interference between the first conducting ring 208, the second conducting ring 209, first carbon brush 204 of the present embodiment,
Second carbon brush 206 is not symmetrical about 202 center line of electrode chassis, and the first conducting ring 208 and the second conducting ring 209 will not be sent out
It is raw to be overlapped.And in order to guarantee the stationarity of electromagnetic coupling device movement, the electrode chassis 202 of the present embodiment, insulation rib 600,
Changeover panel 210 is arranged concentrically.
In the present embodiment, aluminium oxide ceramics can be used in electrode chassis 202, zirconia ceramics is made, but without limitation
Property regulation, electrode chassis 202 also can be used other insulating materials be made；201 material of electrode group of the present embodiment uses fine copper, aluminium
Or stainless steel material is made, but property provides without limitation, other conductive un-conducted magnetic material systems also can be used in 201 material of electrode group
.
In order to realize that electric field changes particle action direction in emr fluid and the rotation of emr fluid is to reach throwing
The purpose of light, the electrode chassis 202 of the present embodiment are installed on electrode disk shaft 215, and electrode disk shaft 215 is set to electrode disk beam barrel
First bearing 216 is equipped between 203 peripheries and electrode disk shaft 215 and electrode disk beam barrel 203,215 periphery of electrode disk shaft connects
It is connected to first pulley 401；First rotary components 400 include first motor 402 and the first synchronous belt 403, and first motor 402 is pacified
Loaded on pedestal 100, the first synchronous belt 403 is connected between first motor 402 and first pulley 401, as shown in Figure 2.So set
It sets, when first motor 402 works, first pulley 401 can be driven to rotate by the transmission of first pulley 401, electrode disk turns
Axis 215 drives electrode disc spins, meanwhile, the first carbon brush 204 is in the first conducting ring 208, the second carbon brush 206 in the second conducting ring
It is slided on 209.
In the present embodiment, electrode disk shaft 215 is concentrically mounted on the periphery of electrode disk beam barrel 203 by first bearing 216,
But the setting of electrode disk shaft 215 and 203 relative position of electrode disk beam barrel is made to obtain stable movement effects
It is preferred that being not intended as restrictive regulation.
Separately it should be noted that the transmission between the present embodiment first motor 402 and electrode disk shaft 215 uses belt band
The kind of drive of wheel, but the present invention should not necessarily be limited by this, and chain sprocket, gear drive etc. also can be used and be able to drive electrode disk shaft
The kind of drive of 215 rotations.The present embodiment first motor 402 drives the rotation formula of pole disk shaft to be also not necessarily limited to complete 360 °
Rotation, can be by making pole disk shaft in preset angle in the working method that the first rotation Ii miter 404 and first motor 402 is arranged
It is rotated in degree range.
As shown in Figure 1, magnetic field generating assembly 300 includes magnetic pole 301, magnetic pole fixing axle 302, magnetic pole sliding block 303 and magnetic
Pole guide rail 304, magnetic pole sliding block 303 are installed on one end of magnetic pole fixing axle 302, and the other end of magnetic pole fixing axle 302 is equipped with installation
The inner hole of magnetic pole 301, magnetic pole sliding block 303 are connect with magnetic pole guide rail 304.Wherein, magnetic pole guide rail 304 is installed on magnetic pole rotating cylinder
305,305 periphery of magnetic pole rotating cylinder is connected with magnetic pole dead axle cylinder 306, and magnetic pole dead axle cylinder 306 is connect with pedestal 100, magnetic pole rotation
Second bearing 307 is connected between cylinder 305 and magnetic pole dead axle cylinder 306 and the periphery of magnetic pole rotating cylinder 305 is connected with the second belt wheel
501；Second rotary components 500 include the second motor 502 and the second synchronous belt 503, and the second motor 502 is installed on pedestal 100,
Second synchronous belt 503 is connected between the second motor 502 and the second belt wheel 501, as shown in Figure 2.So set, when the second motor
When 502 work, the second belt wheel 501 can be driven to rotate by the transmission of the second belt wheel 501, magnetic pole rotating cylinder 305 follows second
Belt wheel 501 rotates, and magnetic pole 301 rotates, and constantly changes magnetic field to the action direction of insulation 600 inside emr fluid of rib, compels
Structural chain string in the electromagnetism rheology polishing pad to be formed is set constantly to recombinate update, to realize the purpose of uniform polish.
Wherein, magnetic pole sliding block 303 and magnetic pole guide rail 304 are set, it can be by adjusting magnetic pole sliding block 303 and magnetic pole guide rail 304
Between relative position so that magnetic pole 301 is rotated with certain eccentricity, realize the static magnetic field of 202 disk of electrode chassis to
Dynamic magnetic field transformation；Magnetic pole fixing axle 302 is hollow structure, is connected in electric field generating assembly 200 with straight ac high voltage source
Conducting wire can be drawn from the inside of the hollow structure.
Separately it should be noted that the transmission between the second motor of the present embodiment 502 and electrode disk shaft 215 uses belt band
The kind of drive of wheel, but the present invention should not necessarily be limited by this, and chain sprocket, gear drive etc. also can be used and be able to drive electrode disk shaft
The kind of drive of 215 rotations.The second motor of the present embodiment 502 drives the rotation formula of pole disk shaft to be also not necessarily limited to complete 360 °
Rotation, can be by making pole disk shaft in preset angle in the working method that the second rotation Ii miter 505 and first motor 402 is arranged
It is rotated in degree range.
In the present embodiment, the material of magnetic pole 301 is neodymium iron boron, and magnetic field strength range is 1000GS-3000GS, and and magnetic
The contact of pole 301 or adjacent part material are all made of non-magnet material, such as aluminium alloy, stainless steel, plastic or other material.
Embodiment two
The present embodiment is the embodiment that embodiment one is used as burnishing device 700, including polishes shaft 701, for clamping work
The fixture 702 of part and such as preceding electromagnetic coupling device, fixture 702 are connected to polishing 701 bottom of shaft, insulate in rib 600
Portion is loaded with electromagnetism rheology polishing fluid, and workpiece bottom contacts setting with electromagnetism rheology polishing fluid, as shown in Figure 9.
When the present embodiment is implemented, specifically sequentially include the following steps:
Burnishing device 700 is mounted on precise vertical CNC milling machine, as shown in figure 9, the characteristics of being directed to processing object, In
It is 1000GS~3000GS that magnetic pole 301, which is additionally arranged at the bottom gasket or adjusts the magnetic field strength of gasket thickness control workpiece surface, is passed through
The rotating eccentricity of the relative position control magnetic pole 301 of magnetic pole guide rail 304 and magnetic pole sliding block 303 is adjusted away from for 0mm~5mm, according to
Whether need to limit and needs to install the first rotation Ii miter 404 and the second rotation Ii miter 505 to distinguish coordination electrode chassis 202
With the rotary spacing of magnetic pole 301, the structure snd size of electrode group 201 are selected；
Workpiece is mounted on fixture 702, fixture 702 is mounted on the lower section of polishing shaft 701, polishing 701 upper section of shaft with
Milling machine spindle connection, workpiece lower surface and abrasion-proof insulating layer 212 keep end face horizontal, pass through milling machine Z axis up and down motion system tune
Spacing is 0.5mm~3mm between whole workpiece lower surface and abrasion-proof insulating layer 212；
Electromagnetism rheology polishing fluid is configured according to processing object, electromagnetism rheology polishing fluid includes that 70wt%~85wt% viscosity is
The silicone oil of 50CS~500CS, 10wt%~30wt% micron order Fe3O4 particle, 1wt%~5wt% dispersing agent, 2wt%~
10wt% micron order polishes abrasive grain and a small amount of stabilization additives, passes through vibration of ultrasonic wave 10 after being sufficiently stirred after each component is mixed
~30 minutes, form electromagnetism rheology polishing fluid.
Electromagnetism rheology polishing fluid is uniformly poured on to insulation rib 600, electrode chassis 202 and the abrasion-proof insulating of polissoir
In the cavity of layer 212, start the second motor 502, magnetic pole 301 is under the drive of the second belt and the second belt wheel 501 with certain
Eccentricity rotation realizes that the static magnetic field of 202 disk of electrode chassis changes to dynamic magnetic field, and electromagnetism rheology polishing fluid is in dynamic magnetic
Real-time abrasive material is formed under the action of updates the flexible polishing pad restored from sharp and shape；
It is that electrode group 201 provides suitable voltage size and frequency by straight ac high voltage source according to the feature of processing object
The alterating and direct current of rate, adjacent electrode form the high voltage electric field of 1000kV/mm~5000kV/mm, electric field in 202 disk of electrode chassis
The shear stress and viscosity of flexible polishing pad, while different electricity are further increased to the coupling of flexible polishing pad with magnetic field
The shape of pole group 20121 can make the removal rate of polishing pad different location generate variation, and then can be moved by optimization track,
Realize planarization polishing；
Start milling machine spindle, revolving speed is 60rpm~1000rpm, and workpiece and electromagnetic coupling flexible polishing head form opposite fortune
It is dynamic, realize the efficient Ultra-smooth machining of workpiece surface.
By above step, the present embodiment can carry out precision optics processing by electromagnetic coupling field, can obtain preferable
Polishing effect and the extensive scope of application.
Embodiment three
The present embodiment is that the rheomagnetic of the burnishing device 700 of Application Example two is capable of measuring device 800, is used for electromagnetism
The Mechanics Performance Testing of burnishing device 700 is coupled, as shown in Figure 10, burnishing device 700, rotation dynamometry including such as embodiment two
Inductor 801 and signal transmitter 802, rotation dynamometry inductor 801 are connected to one end of polishing shaft 701, signal transmission
Device 802 is connect with rotation 801 signal of dynamometry inductor, is covered with energy barrier cover 803 outside insulation rib 600.
When the present embodiment is implemented, specifically sequentially include the following steps:
Rheomagnetic is capable of measuring device 800 to be mounted on precise vertical CNC milling machine, workpiece is mounted on fixture
702, fixture 702 is mounted on the lower section of polishing shaft 701, and polishing 701 upper section of shaft is connect with milling machine spindle, and milling machine spindle passes through
It is connected by rotation dynamometry inductor 801, signal transmitter 802 is fixed on milling machine, workpiece lower surface and abrasion-proof insulating layer 212
Keep end face horizontal, energy barrier cover 803 is concentric with insulation rib 600 and passes through energy barrier cover 803, energy barrier cover 803
It is fixed between electric field generation part and dynamometer；
Electromagnetism rheology polishing fluid is configured according to processing object, electromagnetism rheology polishing fluid includes that 70wt%~85wt% viscosity is
The silicone oil of 50CS~500CS, 10wt%~30wt% micron order Fe3O4 particle, 1wt%~5wt% dispersing agent, 2wt%~
10wt% micron order polishes abrasive grain and a small amount of stabilization additives, passes through vibration of ultrasonic wave 10 after being sufficiently stirred after each component is mixed
~30 minutes, electromagnetism rheology polishing fluid is formed, electromagnetism rheology polishing fluid is uniformly poured on to insulation rib 600, the electricity of polissoir
In the cavity of pole chassis 202 and abrasion-proof insulating layer 212；
Adjust magnetic field structure and parameter, electric field structure and parameter and milling machine working process parameter；Start milling machine spindle,
Starting rotation dynamometry inductor 801, setting acquisition time are positive pressure signal and torque signal in 30s, 60s, 120s, are surveyed
During power, by milling machine Z axis up and down motion system call interception workpiece lower surface and 212 spacing of abrasion-proof insulating layer be 0.1mm~
3mm, dynamometry terminate, and milling machine spindle stops.
By above step, the present embodiment can study influence of the revolving speed to polishing effect of burnishing device 700, to obtain more
Good precision optics material surface processing effect provides Research foundation.
Example IV
The rheomagnetic for the electromagnetic coupling device of Application Example one is capable of measuring device 800 as shown in figure 11, is used for
The test of the rheological property of electromagnetism rheology polishing fluid, including measurement rotor 804, torquemeter 805 and such as the electromagnetism of embodiment one
Coupling device, measurement rotor 804 are connect with torquemeter 805, are loaded with electromagnetism rheology polishing fluid inside the rib 600 that insulate, are measured
The end of rotor 804 stretches in electromagnetism rheology polishing fluid, is covered with energy barrier cover 803 outside insulation rib 600.
When the present embodiment is implemented, specifically sequentially include the following steps:
Experimental rig is mounted on precise vertical CNC milling machine, and installation insulation rib 600 in 202 upper surface of electrode chassis is surveyed
Amount rotor 804 is arranged concentrically in the inner hole of insulation rib 600, and measurement rotor 804 passes through 805 connecting machine tool main shaft of torquemeter,
Energy field shielding case is concentric with insulation rib 600 and is fixed between electric field generating assembly 200 and torquemeter 805, does not install first
Rotation Ii miter 404 and the second rotation Ii miter 505；
Configure different component and component ratio a small amount of electromagnetism rheology polishing fluid, be placed in measurement rotor 804 and it is wear-resisting absolutely
In the gap of edge layer 212；
Adjust magnetic field structure and parameter, electromagnetic structure parameter；
It is 1mm, locking milling by milling machine Z axis up and down motion system call interception workpiece lower surface and 212 spacing of abrasion-proof insulating layer
Bed main shaft, starting torque instrument 805, setting acquisition time are the torque signal in 60S, start first motor 402, the second motor
502 realize that the rotation of electrode chassis 202 and magnetic pole 301 rotate, and revolving speed is 60rpm~200rpm, as the identical Shi Weijing of the two revolving speed
Magnetic field, whens the two revolving speed is not equal, emr fluid is acted on by moving field；
Dynamometry terminates, and main shaft stops, and closes straight ac high voltage source；Electricity is obtained by formula scales according to the torque of acquisition
The shear stress and viscosity of Magnetorheologicai polishing liquid.
By above step, the electric current rheology polishing fluid of different compositions can be studied in different magnetic field form, electric field form
Electromagnetic coupling field in rheological property, provide Research foundation to obtain better precision optics material surface processing effect.
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair
The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description
To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this
Made any modifications, equivalent replacements, and improvements etc., should be included in the claims in the present invention within the spirit and principle of invention
Protection scope within.
Claims (10)
1. electromagnetic coupling device, which is characterized in that including pedestal (100), electric field generating assembly (200), magnetic field generating assembly
(300), the first rotary components (400) of driving electric field generating assembly (200) rotation, driving magnetic field generating assembly (300) rotation
The second rotary components (500) and be set to electric field generating assembly (200) above insulation rib (600), it is described first rotation
Component (400) is connect with electric field generating assembly (200), and second rotary components (500) and magnetic field generating assembly (300) are even
It connects, the electric field generating assembly (200), magnetic field generating assembly (300) are connect with pedestal (100), the insulation rib (600)
The magnetic field that the electric field of electric field generating assembly (200) generation is distributed in inside and magnetic field generating assembly (300) generates.
2. electromagnetic coupling device according to claim 1, which is characterized in that the electric field generating assembly (200) includes electricity
Pole group (201), electrode chassis (202), electrode disk beam barrel (203), the first carbon brush (204), the first carbon brush holder (205), the second carbon
Brush (206), the second carbon brush holder (207), the first conducting ring (208) and the second conducting ring (209):
First carbon brush holder (205) is fixedly installed in electrode disk beam barrel (203), first carbon brush (204) is fixed on first
The first conductive sheet, first carbon brush are equipped between carbon brush holder (205) and the first carbon brush (204) and the first carbon brush holder (205)
(204) it is attached at the bottom on electrode chassis (202) and the first conducting ring (208) is set to the first carbon brush (204) and electrode chassis
(202) between；
Second carbon brush holder (207) is fixedly installed in electrode disk beam barrel (203), second carbon brush (206) is fixed on second
The second conductive sheet, second carbon brush are equipped between carbon brush holder (207) and the second carbon brush (206) and the second carbon brush holder (207)
(206) it is attached at the bottom on electrode chassis (202) and the second conducting ring (209) is set to the second carbon brush (206) and electrode chassis
(202) between；
First conducting ring (208) is electrically connected with the anode (210) of the electrode group (201), second conducting ring (209)
It is electrically connected with the cathode (211) of the electrode group (201), first conductive sheet, the second conductive sheet and straight ac high voltage source
It connects；
The electrode group (201) is embedded at electrode chassis (202) and the upper surface of electrode chassis (202) and is equipped with abrasion-proof insulating layer
(212)。
3. electromagnetic coupling device according to claim 2, which is characterized in that the electrode chassis (202) is installed on electrode
Disk shaft (215), the electrode disk shaft (215) is set on electrode disk beam barrel (203) periphery and electrode disk shaft (215) and electrode
First bearing (216) are equipped between dish axle cylinder (203), electrode disk shaft (215) periphery is connected with first pulley (401).
4. electromagnetic coupling device according to claim 3, which is characterized in that first rotary components (400) include the
One motor (402) and the first synchronous belt (403), the first motor (402) are installed on pedestal (100), and described first is synchronous
Band (403) is connected between first motor (402) and first pulley (401).
5. electromagnetic coupling device according to any one of claims 1 to 4, which is characterized in that the magnetic field generating assembly
It (300) include magnetic pole (301), magnetic pole fixing axle (302), magnetic pole sliding block (303) and magnetic pole guide rail (304), the magnetic-pole sliding
Block (303) is installed on one end of magnetic pole fixing axle (302), and the other end of magnetic pole fixing axle (302) is equipped with installation magnetic pole (301)
Inner hole, the magnetic pole sliding block (303) connect with magnetic pole guide rail (304).
6. electromagnetic coupling device according to claim 5, which is characterized in that the magnetic pole guide rail (304) is installed on magnetic pole
Rotating cylinder (305), magnetic pole rotating cylinder (305) periphery are connected with magnetic pole dead axle cylinder (306), the magnetic pole dead axle cylinder (306)
Connect with pedestal (100), be connected between the magnetic pole rotating cylinder (305) and magnetic pole dead axle cylinder (306) second bearing (307) and
The periphery of magnetic pole rotating cylinder (305) is connected with the second belt wheel (501).
7. electromagnetic coupling device according to claim 6, which is characterized in that second rotary components (500) include the
Two motors (502) and the second synchronous belt (503), second motor (502) are installed on pedestal (100), and described second is synchronous
Band (503) is connected between the second motor (502) and the second belt wheel (501).
8. a kind of burnishing device, which is characterized in that including polishing shaft (701), for the fixture (702) and such as of clamping workpiece
The described in any item electromagnetic coupling devices of claim 1 to 7, the fixture (702) are connected to polishing shaft (701) bottom, institute
It states and is loaded with electromagnetism rheology polishing fluid inside insulation rib (600), the workpiece bottom contacts setting with electromagnetism rheology polishing fluid.
9. a kind of rheomagnetic is capable of measuring device, which is characterized in that including burnishing device as claimed in claim 8, rotation
Dynamometry inductor (801) and signal transmitter (802), the rotation dynamometry inductor (801) are connected to polishing shaft (701)
One end, the signal transmitter (802) with rotation dynamometry inductor (801) signal connect, insulation rib (600) outer cover
Equipped with energy barrier cover (803).
10. a kind of rheomagnetic is capable of measuring device, which is characterized in that including measurement rotor (804), torquemeter (805) and
Electromagnetic coupling device as described in any one of claim 1 to 7, measurement rotor (804) are connect with torquemeter (805), described exhausted
Electromagnetism rheology polishing fluid is loaded with inside edge rib (600), the end of measurement rotor (804) stretches to the polishing of electromagnetism rheology
In liquid, energy barrier cover (803) are covered with outside the insulation rib (600).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910810297.0A CN110517842B (en) | 2019-08-29 | 2019-08-29 | Electromagnetic coupling device and polishing device with same and electromagnetic rheological property measuring device |
| PCT/CN2019/117610 WO2021035971A1 (en) | 2019-08-29 | 2019-11-12 | Electromagnetic coupling device, polishing device having same, and electromagnetic rheological property measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910810297.0A CN110517842B (en) | 2019-08-29 | 2019-08-29 | Electromagnetic coupling device and polishing device with same and electromagnetic rheological property measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110517842A true CN110517842A (en) | 2019-11-29 |
| CN110517842B CN110517842B (en) | 2024-03-15 |
Family
ID=68629159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910810297.0A Active CN110517842B (en) | 2019-08-29 | 2019-08-29 | Electromagnetic coupling device and polishing device with same and electromagnetic rheological property measuring device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN110517842B (en) |
| WO (1) | WO2021035971A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117260516A (en) * | 2023-11-22 | 2023-12-22 | 北京特思迪半导体设备有限公司 | Eccentric driving mechanism and polishing machine |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010064493A1 (en) * | 2008-12-03 | 2010-06-10 | キヤノンアネルバ株式会社 | Plasma processing apparatus, apparatus for manufacturing magnetoresistive element, method for forming magnetic thin film and program for controlling film formation |
| CN105328516A (en) * | 2015-11-18 | 2016-02-17 | 广东工业大学 | Dynamic magnetic field self-sharpening finishing device for flexible magnetorheological finishing pad and finishing method for dynamic magnetic field self-sharpening finishing device |
| US20190080829A1 (en) * | 2017-09-12 | 2019-03-14 | Dexter Magnetic Technologies, Inc. | Magnet array with near sinusoidal field output |
| CN210667955U (en) * | 2019-08-29 | 2020-06-02 | 广东工业大学 | Electromagnetic coupling device, polishing device with same and electromagnetic rheological property measuring device |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7074114B2 (en) * | 2003-01-16 | 2006-07-11 | Micron Technology, Inc. | Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpieces |
| CN103317413B (en) * | 2013-07-04 | 2016-03-30 | 北京理工大学 | Electromagnetism self-excited vibration ER effect composite polishing method and device |
| CN105458840B (en) * | 2015-12-29 | 2017-12-29 | 广东工业大学 | A kind of magnetostatic dynamic field MRF mechanism experimental rig and its processing method |
| CN106312796B (en) * | 2016-10-20 | 2018-05-15 | 广东工业大学 | Two-sided planarization system of processing |
-
2019
- 2019-08-29 CN CN201910810297.0A patent/CN110517842B/en active Active
- 2019-11-12 WO PCT/CN2019/117610 patent/WO2021035971A1/en active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010064493A1 (en) * | 2008-12-03 | 2010-06-10 | キヤノンアネルバ株式会社 | Plasma processing apparatus, apparatus for manufacturing magnetoresistive element, method for forming magnetic thin film and program for controlling film formation |
| CN105328516A (en) * | 2015-11-18 | 2016-02-17 | 广东工业大学 | Dynamic magnetic field self-sharpening finishing device for flexible magnetorheological finishing pad and finishing method for dynamic magnetic field self-sharpening finishing device |
| US20190080829A1 (en) * | 2017-09-12 | 2019-03-14 | Dexter Magnetic Technologies, Inc. | Magnet array with near sinusoidal field output |
| CN210667955U (en) * | 2019-08-29 | 2020-06-02 | 广东工业大学 | Electromagnetic coupling device, polishing device with same and electromagnetic rheological property measuring device |
Non-Patent Citations (1)
| Title |
|---|
| 路家斌等: "《电磁流变效应微磨头抛光加工电磁协同作用机理》", 《摩擦学学报》, vol. 30, no. 2, 31 March 2010 (2010-03-31), pages 190 - 196 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117260516A (en) * | 2023-11-22 | 2023-12-22 | 北京特思迪半导体设备有限公司 | Eccentric driving mechanism and polishing machine |
| CN117260516B (en) * | 2023-11-22 | 2024-03-08 | 北京特思迪半导体设备有限公司 | Eccentric driving mechanism and polishing machine |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021035971A1 (en) | 2021-03-04 |
| CN110517842B (en) | 2024-03-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105328516B (en) | The dynamic magnetic field of magnetic rheologic flexible polishing pad is from sharp burnishing device and its polishing method | |
| CN106312796B (en) | Two-sided planarization system of processing | |
| CN103624634B (en) | A kind of thicker-walled ceramic pipe internal surface magnetic grinding finishing method and device thereof | |
| CN110281085B (en) | Cluster magnetorheological grinding and polishing device and application method thereof | |
| CN201120584Y (en) | Magnet swinging polisher | |
| CN103273385B (en) | Surface contact magneto-rheological flat polishing device and method with uniform magnetic field | |
| CN110524317A (en) | A kind of polishing method of electromagnetic coupling polissoir and its electromagnetic coupling control state of the abrasive grain | |
| CN104608047B (en) | High-precision spherical part batch production device and method | |
| CN105904333A (en) | Double-side polishing device and method capable of controlling rigidity of polishing pad through cluster dynamic magnetic field | |
| CN106938407A (en) | The dynamic magnetorheological finishing device and its polishing method of a kind of controllable moving field | |
| WO2022261998A1 (en) | Ultra-smooth planarization polishing method and apparatus | |
| CN110695775A (en) | Device and process for ultrasonically grinding double-panel parts | |
| CN103834782B (en) | A kind of steel sphere surface peening device | |
| CN105458840A (en) | Magnetostatic moving field magnetorheological polishing mechanism test device and processing method thereof | |
| CN110517842A (en) | Electromagnetic coupling device and the burnishing device with it, rheomagnetic are capable of measuring device | |
| CN107617933A (en) | A kind of dynamic magnetic field magnetorheological finishing device | |
| CN210667955U (en) | Electromagnetic coupling device, polishing device with same and electromagnetic rheological property measuring device | |
| CN208262426U (en) | A kind of device of the magnetorheological auxiliary V-groove high-efficiency high-accuracy polishing Ceramic Balls of cluster | |
| CN105014484A (en) | Magnetic field generation device of magnetorheological polishing equipment | |
| CN110193756A (en) | Magnetorheological polishing device | |
| CN100484709C (en) | Bidimensional fluid vibration ultra smooth surface polishing equipment and its polishing method | |
| CN113579987A (en) | Method and device for polishing free-form surface by curvature self-adaptive cluster magneto-rheological process | |
| CN206578639U (en) | A kind of dynamic magnetorheological finishing device of controllable moving field | |
| CN112476065B (en) | Non-resonant vibration auxiliary magnetorheological polishing device and method for processing optical element | |
| CN209811891U (en) | Compound precision pipe equipment that grinds |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |