CN106938407A - The dynamic magnetorheological finishing device and its polishing method of a kind of controllable moving field - Google Patents
The dynamic magnetorheological finishing device and its polishing method of a kind of controllable moving field Download PDFInfo
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- CN106938407A CN106938407A CN201710094141.8A CN201710094141A CN106938407A CN 106938407 A CN106938407 A CN 106938407A CN 201710094141 A CN201710094141 A CN 201710094141A CN 106938407 A CN106938407 A CN 106938407A
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- dynamic
- rotary tray
- controllable moving
- moving field
- magnetorheological finishing
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- 238000005498 polishing Methods 0.000 title claims abstract description 61
- 238000000034 method Methods 0.000 title claims abstract description 28
- 238000012545 processing Methods 0.000 claims abstract description 27
- 239000003082 abrasive agent Substances 0.000 claims abstract description 23
- 239000011159 matrix material Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 11
- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000004804 winding Methods 0.000 claims description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 8
- 239000008367 deionised water Substances 0.000 claims description 8
- 229910021641 deionized water Inorganic materials 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 239000000428 dust Substances 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims description 5
- 239000013556 antirust agent Substances 0.000 claims description 4
- 239000002270 dispersing agent Substances 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims description 3
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- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 8
- 230000015572 biosynthetic process Effects 0.000 abstract description 4
- 230000008859 change Effects 0.000 abstract description 4
- 238000000518 rheometry Methods 0.000 abstract description 3
- 230000008569 process Effects 0.000 description 13
- 238000010586 diagram Methods 0.000 description 7
- 230000033228 biological regulation Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 5
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- 230000008901 benefit Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
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- 206010057855 Hypotelorism of orbit Diseases 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- POIUWJQBRNEFGX-XAMSXPGMSA-N cathelicidin Chemical compound C([C@@H](C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CO)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H]([C@@H](C)CC)C(=O)NCC(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)CC)C(=O)N[C@@H](C(C)C)C(=O)N[C@@H](CCC(N)=O)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)CC)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CC(O)=O)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H](CC(N)=O)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](C(C)C)C(=O)N1[C@@H](CCC1)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)O)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CO)C(O)=O)NC(=O)[C@H](CC=1C=CC=CC=1)NC(=O)[C@H](CC(O)=O)NC(=O)CNC(=O)[C@H](CC(C)C)NC(=O)[C@@H](N)CC(C)C)C1=CC=CC=C1 POIUWJQBRNEFGX-XAMSXPGMSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
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- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/002—Grinding heads
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a kind of dynamic magnetorheological finishing device of controllable moving field and its polishing method, including burnishing device rotating mechanism and controllable moving field generation mechanism, burnishing device rotating mechanism includes driving motor, drive, Rotary tray, cup polishing disk etc., and controllable moving field generation mechanism includes frequency changing power device, electric wire group, wire rotating joint, magnet exciting coil etc..The present invention can adjust size of current and alternative frequency to change the magnetic field intensity and change procedure that magnet exciting coil is produced by frequency changing power device, improve abrasive material DYNAMIC DISTRIBUTION and its processing characteristics in " the micro- bistrique " produced in polishing disk by magnetic rheology effect, micro- bistrique formation flexible polishing pad that cluster is produced is carried out high efficiency processing to workpiece in the presence of rotating mechanism.
Description
Technical field
It is used for photoelectron/semiconductor microelectronics substrate the present invention relates to Ultraprecision Machining field, more particularly to one kind
And the plane planarization processing of optical surface, dynamic magnetorheological finishing device and its polishing method with controllable moving field.
Background technology
With the progress and the growth of demand of science and technology, the requirement more and more higher to optical element optical property, it is desirable to its
Surface accuracy needs to reach ultra-smooth degree (roughness Ra reaches below 1nm), and surface figure accuracy also has higher requirement (shape essence
Degree reaches less than 0.5 micron).And in last decade more popular LED application fields, monocrystalline silicon (Si), monocrystalline germanium (Ge),
GaAs (GaAs), monocrystalline silicon carbide (SiC) and sapphire (Al2O3) etc. are used as its semiconductor substrate materials, also require that tool
There is super flat and ultra-smooth surface (roughness Ra reaches below 0.3nm) that the requirement of epitaxial film growth could be met, and will
Ask zero defect, not damaged.Optical element and the essential process of semiconductor chip, its traditional handicraft master are processed into planarization
If high-efficient grinding, Ultraprecise polished, chemically mechanical polishing and MRF, its crudy and precision directly determine light
Learn the performance of device and semiconductor devices.
Technique of Magnetorheological Finishing (Magnetorheological finishing, MRF) be 1990s by
KORDONSKI and its partner electromagnetism, hydrodynamics, analytical chemistry, process technology etc. are combined and proposed one
Kind new optical surface processing method, with polishing effect it is good, do not produce subsurface damage, be adapted to complex surface processing etc. and pass
The advantage united not available for polishing, has evolved into a kind of revolutionary optical surface processing method, is particularly suitable for axial symmetry aspheric
The Ultra-precision Turning in face, is widely used in the last manufacturing procedure on massive optics surface, but during reality processing, meeting
There is the low problem of processing efficiency.
In order to improve magnetorheological polishing efficiency, patent CN200610132495.9 is based on MRF principle and cluster
The mechanism of action proposes a kind of planarization abrasive polishing method and its burnishing device based on magnetic rheology effect, and has carried out a large amount of
Experimental study, it has been found that the continuous updating and projection for being difficult to " micro- bistrique " using polishing fluid endless form make workpiece surface
Processing uniformity problem is difficult to solve.For plane machining homogeneity question, patent CN201510801886.4 proposes one kind
Dynamic magnetic field fully realizes magnetic rheologic flexible polishing from sharp magnetic rheologic flexible polishing pad generating means and its polishing method
Pad is processed to the constant pressure of workpiece in process, and can make abrasive material in process real-time update from sharp, but by
The limitation of apparatus structure in the patent, because " micro- bistrique " spacing that magnetic rheology effect is produced is larger, workpiece in process
Idle stroke is longer, have impact on processing efficiency, and needs to dismantle polishing disk progress permanent magnet replacing, step when changing magnetic field intensity
It is rapid comparatively laborious.
The present invention proposes a kind of magnetorheological planarization burnishing device of the dynamic of controllable moving field on the basis of the studies above
And its polishing method, optimize structure, replace permanent magnet with magnet exciting coil, magnetic field range is adjusted in the way of changing size of current
And intensity, on the premise of " micro- bistrique " is from sharp renewal, the spacing between " micro- bistrique " is shortened, extends effective process time,
Magnetic rheologic flexible polishing pad processing characteristics is improved, magnetorheological polishing efficiency is improved, realizes the uniform processing of workpiece.
The content of the invention
It is an object of the invention to overcome the deficiencies of the prior art and provide one kind is high in machining efficiency, apparatus structure is simple, behaviour
Make dynamic magnetorheological finishing device convenient and with controllable moving field.
Another object of the present invention is to overcome the deficiencies in the prior art, there is provided a kind of polishing based on above-mentioned burnishing device
Method.
The purpose of the present invention is achieved through the following technical solutions：
A kind of dynamic magnetorheological finishing device of controllable moving field, the burnishing device must add applied to semiconductor chip
Work, mainly including base, driver element, Rotary tray, cup polishing disk, the stop sleeve for support Rotary tray and is used for
The controllable moving field unit for controlling magnetic field strong and weak.The stop sleeve is fixed in the middle part of base vertically, and the driver element is set
On base.The Rotary tray is made up of pan portion and neck, in the neck insertion stop sleeve of Rotary tray, and single with driving
Member drive connection, is rotated by driver element with Rotary tray.The cup polishing disk is fixedly mounted on the pan portion of Rotary tray
On, cup polishing disk is polished workpiece built with magnetic flow liquid after Rotary tray rotation.
Specifically, the controllable moving field unit includes frequency changing power device, wire rotating joint and some groups of excitation wires
Circle.The magnet exciting coil is arranged in the pan portion of Rotary tray, and the frequency changing power device is fixed on base, the electric wire rotation
Adapter is arranged on the bottom of Rotary tray neck, is connected respectively with magnet exciting coil and frequency changing power device by electric wire, uses
Wire rotating joint can make still to protect in the case where Rotary tray rotates at a high speed between frequency changing power device and magnet exciting coil
Hold electrical connection.After being powered up, each magnet exciting coil produces the magnetic field of certain strength, so that magnetic flow liquid forms some
" micro- bistrique ", these " micro- bistriques " can be rotated with the rotation of Rotary tray, so as to realize Ultra-precision Turning to workpiece.
Specifically, the driver element is used to rotate with Rotary tray, mainly including driving motor, driving wheel and driven
Wheel.The driving motor is fixed on base, and the driving wheel is arranged on the output shaft of driving motor, and the driven pulley is installed
In the neck of Rotary tray, it is fixedly connected with Rotary tray.The driven pulley is connected by transmission belt with capstan drive, by passing
Dynamic motor-driven rotation pallet rotation.When driving motor starts, its output shaft will be dynamic by driving wheel, transmission belt and driven pulley
Power is transported on Rotary tray.
Further, the burnishing device also includes being arranged on bearing (ball) cover on Rotary tray neck, a pair of turntable shafts
Hold, inner sleeve and outer sleeve.The bearing (ball) cover is installed between the pan portion and stop sleeve of Rotary tray, for by Rotary tray
Main shaft orientation ensures precision when it is rotated inside stop sleeve, prevents that Rotary tray upper end from occurring in rotation process
Beat phenomenon, influences processing effect.The turntable bearing is arranged in stop sleeve, and the inner sleeve and outer sleeve, which are arranged at, to be turned
Between dish axle is held, in the neck insertion inner sleeve of the Rotary tray, the inner sleeve is inserted in outer sleeve.The inner sleeve and
Outer sleeve plays fixation to turntable bearing, is mainly used in inner ring and the outer ring of locating turntable bearing.
As the preferred scheme of the present invention, the frequency changing power device uses low-frequency high-voltage alternating source.It is preferred that, it is described
Frequency changing power device uses the alternating source that voltage is 0.1-5Hz for 0.5KV-5KV and frequency.The frequency changing power device can be with
Using waveforms such as resonance wave, sawtooth waveforms, triangular waves, while it is low-frequency high-voltage AC power to ensure, so designs and be advantageous in that
A travelling-magnetic-field is advantageously formed, magnetic field and " micro- bistrique " renewal frequency can be realized by changing the size of voltage and frequency
Regulation, so as to obtain more preferable polishing effect.
Further, the magnet exciting coil includes coil-winding matrix and the copper cash of some numbers of turn, the coil-winding base
Coiling cylinder is equidistantly provided with body, the copper cash is wrapped on coiling cylinder.It is described as the preferred scheme of the present invention
The direction of winding of two neighboring coiling cylinder on coil-winding matrix is on the contrary, so that the end face of coiling cylinder forms many
Individual N poles, S extremely alternate loop checking installation magnetic field, produce electromagnetic force in the presence of alternating source, realize the annular drive of " micro- bistrique "
It is dynamic.
Another object of the present invention is achieved through the following technical solutions：
A kind of polishing method of the dynamic magnetorheological finishing device of controllable moving field, this method specifically includes following steps：
Step S1:Workpiece is attached in tool heads using paraffin, workpiece lower surface is parallel with cup polishing disk upper surface, adjusted
It is 0.5mm -5mm to save the gap between workpiece lower surface and cup polishing disk；
Step S2:According to processing workpiece the characteristics of and processing request, add in deionized water in following three kinds of abrasive materials
At least two abrasive materials, three kinds of abrasive materials be respectively concentration be 2%~15% micron order abrasive material, concentration be 2%~15% sub-micro
Meter level abrasive material, concentration are 2%~15% nano-size abrasive materials, and the sub-micron that concentration is 2%~20% is added in deionized water
Level carbonyl iron dust and the micron order carbonyl iron dust that concentration is 3%~15%, and concentration is added for 3%~15% dispersant and dense
Spend the antirust agent for 1%~6%, abrasive material is sufficiently stirred for after adding and by vibration of ultrasonic wave 5~30 minutes, formed magnetorheological
Liquid；
Step S3:Magnetic flow liquid is poured into cup polishing disk, according to processing workpiece the characteristics of and processing request, regulation become
The output current size of frequency power device, so as to produce magnetic field, forms several micro- mills of dynamic in the upper surface of cup polishing disk
Head, this slightly bistrique constitute polishing workpiece flexible polishing pad；
Step S4:Start driving motor, drive Rotary tray to rotate at a high speed by transmission belt, and driving instrument head height speed
Rotation and low speed oscillations, uniform polish is carried out to workpiece surface material.
Working process and principle of the invention are：The present invention produces dynamic magnetic field using alternating electric field by magnet exciting coil,
And the principle based on travelling-magnetic-field produces annular motive force to magnetic flow liquid, make magnetic flow liquid in cup polishing panel surface formation ring
" the micro- bistrique " of shape rotation.Driving motor makes " micro- bistrique " in cup polishing disk to turn at a high speed by being rotated with Rotary tray
Dynamic, while workpiece itself is also rotating and swung, so design can make the more smooth, processing efficiency of workpiece surface polishing higher.
In addition, passing through the optimum organization of excitation alternating source frequency and voltage, it is possible to achieve magnetic field dynamic change is simultaneously accurately controlled.
Compared with prior art, the present invention has further the advantage that：
(1) the dynamic magnetorheological finishing device of controllable moving field provided by the present invention replaces permanent magnet using magnet exciting coil
The quick regulation of magnetic field range and intensity can be realized according to process requirements.
(2) the dynamic magnetorheological finishing device use of controllable moving field provided by the present invention can accurate adjustment magnetic field intensity
Magnet exciting coil, eliminate dismounting cup polishing disk tedious steps, the overall structure of burnishing device more optimized, more closed
Reason.
(3) the dynamic magnetorheological finishing device of controllable moving field provided by the present invention is produced many using multigroup magnet exciting coil
Individual flexible micro- bistrique, and make the hypotelorism between micro- bistrique, so as to delay effective process time, greatly increase and add
Work efficiency rate, obtains preferable processing effect.
Brief description of the drawings
Fig. 1 is the structure sectional view for the dynamic magnetorheological finishing device that the present invention is provided.
Fig. 2 is the micro- bistrique schematic diagram for the dynamic magnetorheological finishing device formation that the present invention is provided.
Fig. 3 is the polishing schematic diagram of the dynamic magnetorheological finishing device of controllable moving field of the invention.
Fig. 4 is the stereogram of single coil coiling matrix provided by the present invention.
Fig. 5 is the fundamental diagram of single coil coiling matrix provided by the present invention.
Fig. 6 is fundamental diagram of the magnet exciting coil provided by the present invention based on travelling-magnetic-field.
Label declaration in above-mentioned accompanying drawing：
1- driving motors, the fixing screws of 2- first, 3- driving wheels, 4- flat keys, 5- transmission belts, 6- driven pulleys, the rotation of 7- electric wires
Adapter, the fixing screws of 8- second, 9- electric wires group, 10- bases, the fixing screws of 11- the 3rd, 12- frequency changing power devices, 13-
Four fixing screws, 14- magnet exciting coils, 15- Rotary tray, the fixing screws of 16- the 5th, 17- cups polishing disk, 18- bearing (ball) covers,
19- stop sleevees, 20- turntable bearings, 21- inner sleeves, 22- outer sleeves, the fixing screws of 23- the 6th, 24- magnetic fields, 25- coils around
Line matrix, 26- MRFs working solution, 27- flexible polishings pad, 28- workpiece, 29- tool heads.
Embodiment
To make the objects, technical solutions and advantages of the present invention clearer, clear and definite, develop simultaneously embodiment pair referring to the drawings
The present invention is described further.
Embodiment 1：
As shown in Figure 1, Figure 2 and Figure 3, should the invention discloses a kind of dynamic magnetorheological finishing device of controllable moving field
Burnishing device mainly includes driving motor 1, the first fixing screws 2, driving wheel 3, flat key 4, transmission belt 5, driven pulley 6, electric wire
Swivel joint 7, the second fixing screws 8, electric wire 9, base 10, the 3rd fixing screws 11, frequency changing power device 12, the 4th fixes spiral shell
Nail 13, magnet exciting coil 14, Rotary tray 15, the 5th fixing screws 16, cup polishing disk 17, bearing (ball) cover 18, stop sleeve 19,
Turntable bearing 20, inner sleeve 21, outer sleeve 22, the 6th fixing screws 23, magnetic field 24.Wherein driving motor 1 and variable-frequency power sources are filled
Put 12 to be fixed on base 10 with the first fixing screws 2 and the 3rd fixing screws 13 respectively, driving wheel 3 is connected to electricity with flat key 4
On the output shaft of machine, driven pulley 6 and Rotary tray 15 are linked together by the second fixing screws 8, and cup polishing disk 17 is again logical
Cross the 5th fixing screws 16 to be connected on Rotary tray 15, magnet exciting coil 14 is fixed on rotating disk upper end with the 4th fixing screws 13
Face, while coil is connected on frequency changing power device 12 by electric wire group 9 and wire rotating joint 7, and in Rotary tray 15
Lower end axle portion is provided with a pair of turntable bearings 20, and the inner ring of bearing and outer ring are compressed by inner sleeve 21 and outer sleeve 22 respectively
Fixed, bearing upper end has end cap 18 to be positioned, and lower end is positioned by driven pulley 6, has 19 pairs of stop sleeve in Bearing outer
Outer sleeve 22 is fixed on the positioning, and plays a supporting role simultaneously, and stop sleeve 19 is fixed on base 10 with the 6th fixing screws 23
On.Transmission belt 5 connects driving wheel 3 and driven pulley 6, and whole burnishing device is rotated under the drive of motor, and magnet exciting coil 14 is powered
Afterwards, a dynamic magnetic field 24 is formed.
In the present embodiment, " micro- bistrique " is as shown in Figure 2 in polishing disk inner plane position view in flexible polishing pad 27.
The invention also discloses a kind of polishing method of the dynamic magnetorheological finishing device of controllable moving field, the tool of this method
Body step is as follows：
Step S1:Workpiece 28 is attached in tool heads 29 using paraffin, the lower surface of workpiece 28 and the upper table of cup polishing disk 17
Face is parallel, and the gap between the regulation lower surface of workpiece 28 and cup polishing disk 17 is 1mm；
Step S2:According to the characteristics of a diameter of 100mm monocrystalline silicon carbide and processing request, add in deionized water dense
The particle diameter that degree is 4% be 4 microns diamond abrasive, concentration be 3% particle diameter be 200 Nano diamond abrasive materials, deionized water
It is middle to add the nanoscale carbonyl iron dust of particle diameter 500 that concentration is 3% and the micron order carbonyl iron dust of particle diameter 4 that concentration is 3%, and add
The antirust agent that the dispersant and concentration that concentration is 3% are 3%, by vibration of ultrasonic wave 30 minutes after being sufficiently stirred for, forms magnetic current
Become liquid 26；
Step S3:MRF working solution 26 is poured into cup polishing disk 17, the defeated of frequency changing power device 12 is adjusted
Go out size of current, produce the magnetic field 24 of certain limit and sufficient intensity, several dynamics are formed in the upper surface of cup polishing disk 17
The flexible polishing pad 27 of " micro- bistrique " composition；
Step S4:Start driving motor 1, regulation rotating speed is 120rpm, drives Rotary tray 15 to rotate at a high speed, driving instrument
First 29 rotating speed be -200rpm, 10 beats/min of swing speed, amplitude of oscillation 10mm, process time is 90min, realizes carbide silicon face
The high efficiency ultra-smooth uniform polish of material.
Fig. 3 is refer to, Fig. 3 is the polishing schematic diagram of the dynamic magnetorheological finishing device of controllable moving field of the invention.
In the embodiment of the present invention, magnet exciting coil 14 is that the copper cash conducted electricity very well by some numbers of turn is wound on multiple coil-windings
Constitute, and be fixed on by the 4th fixing screws 13 on Rotary tray on matrix 25.Two adjacent circles of coil-winding matrix 25
On cylinder conductive copper wire around in opposite direction, the principle based on travelling-magnetic-field so that 6 cylinder end faces formation N poles of matrix,
The loop checking installation magnetic field of S poles separately, in the case where AC power is powered, the magnetic induction intensity component By perpendicular to magnetic flow liquid 26 is produced
Raw induced-current Jz, and then electromagnetic force Fx is produced, realize " micro- bistrique " annular driving effect.
Fig. 4 and Fig. 5 are refer to, Fig. 4 is single coil coiling matrix schematic three dimensional views and fundamental diagram in the present invention, schemed
6 be fundamental diagram of the magnet exciting coil based on travelling-magnetic-field of the present invention.
In the above-described embodiments, frequency changing power device 12 select low-frequency high-voltage alternating source, be specifically as follows 0.5-5kV and
Frequency is 0.1-5Hz alternating source, the selection not limited to this of certain power supply.
In above-described embodiment, processing object is not limited only to monocrystalline silicon carbide, can also process other semi-conducting material material,
Such as monocrystalline silicon, sapphire etc., but need according to the characteristics of processing object and processing request, following three are added in deionized water
At least two abrasive materials in kind of abrasive material, three kinds of abrasive materials be respectively concentration be 2%~15% micron order abrasive material, concentration be 2%~
15% submicron order abrasive material, concentration are 2%~15% nano-size abrasive materials, and added in deionized water concentration be 2%~
20% submicron order carbonyl iron dust and concentration is 3%~15% micron order carbonyl iron dust, and it is 3%~15% to add concentration
Dispersant and antirust agent that concentration is 1%~6%, by vibration of ultrasonic wave 5~30 minutes after being sufficiently stirred for, forming processing should
The corresponding magnetic flow liquid 26 of material.
The present invention produces dynamic magnetic field using alternating electric field by magnet exciting coil 14, and the principle based on travelling-magnetic-field is produced
Annular motive force, forms micro- bistrique of ring rotation on the surface of cup polishing disk 17, passes through excitation alternating source frequency and voltage
Optimum organization, realize that magnetic field is dynamically controllable, with magnet exciting coil 14 substitution permanent magnet can not only realize magnetic field range and intensity
Quick regulation, eliminate the tedious steps of dismounting cup polishing disk 17, and overall structure more optimizes, and shortens flexible micro- mill
Spacing between head improves processing efficiency so as to extend effective process time.
Above-described embodiment is preferably embodiment, but embodiments of the present invention are not by above-described embodiment of the invention
Limitation, other any Spirit Essences without departing from the present invention and the change made under principle, modification, replacement, combine, simplification,
Equivalent substitute mode is should be, is included within protection scope of the present invention.
Claims (8)
1. a kind of dynamic magnetorheological finishing device of controllable moving field, it is characterised in that including base, driver element, rotate support
Disk, cup polishing disk, stop sleeve and the controllable moving field unit for controlling magnetic field power；The stop sleeve is fixed vertically
Portion in the base, the driver element is arranged on base, and the Rotary tray is made up of pan portion and neck, the neck of Rotary tray
In portion's insertion stop sleeve, it is connected with driver element；The cup polishing disk is fixedly mounted in the pan portion of Rotary tray；
The controllable moving field unit includes frequency changing power device, wire rotating joint and some groups of magnet exciting coils；The excitation
Coil is arranged in the pan portion of Rotary tray, and the frequency changing power device is fixed on base, and the wire rotating joint is installed
In the bottom of Rotary tray neck, it is electrically connected respectively with magnet exciting coil and frequency changing power device by electric wire.
2. the dynamic magnetorheological finishing device of controllable moving field according to claim 1, it is characterised in that the driving list
Member includes driving motor, driving wheel and driven pulley；The driving motor is fixed on base, and the driving wheel is arranged on transmission electricity
On the output shaft of machine, the driven pulley is arranged on the neck of Rotary tray, is fixedly connected with Rotary tray；The driven pulley passes through
Transmission belt is connected with capstan drive, by driving motor driving Rotary tray rotation.
3. the dynamic magnetorheological finishing device of controllable moving field according to claim 2, it is characterised in that also including setting
Bearing (ball) cover, a pair of turntable bearings, inner sleeves and outer sleeve for fixing turntable bearing on Rotary tray neck；It is described
Bearing (ball) cover is arranged between the pan portion of Rotary tray and stop sleeve, and the turntable bearing is arranged in stop sleeve, described
Inner sleeve and outer sleeve are arranged between turntable bearing, and the inner sleeve is inserted in outer sleeve.
4. the dynamic magnetorheological finishing device of controllable moving field according to claim 1, it is characterised in that the variable-frequency electric
Source device uses low-frequency high-voltage alternating source.
5. the dynamic magnetorheological finishing device of controllable moving field according to claim 4, it is characterised in that the variable-frequency electric
Source device uses the alternating source that voltage is 0.1-5Hz for 0.5KV-5KV and frequency.
6. the dynamic magnetorheological finishing device of controllable moving field according to claim 1, it is characterised in that the excitation wire
Circle includes equidistantly being provided with coiling cylinder, institute on the copper cash of coil-winding matrix and some numbers of turn, the coil-winding matrix
Copper cash is stated to be wrapped on coiling cylinder.
7. the dynamic magnetorheological finishing device of controllable moving field according to claim 6, it is characterised in that the coil around
The direction of winding of two neighboring coiling cylinder on line matrix is opposite.
8. a kind of polishing method of the dynamic magnetorheological finishing device of controllable moving field as described in any one of claim 1 to 7,
It is characterised in that it includes following steps：
Step S1:Workpiece is attached in tool heads using paraffin, workpiece lower surface is parallel with cup polishing disk upper surface, adjusts work
Gap between part lower surface and cup polishing disk is 0.5mm -5mm；
Step S2:According to processing workpiece the characteristics of and processing request, add in deionized water in following three kinds of abrasive materials at least
Two kinds of abrasive materials, three kinds of abrasive materials be respectively concentration be 2%~15% micron order abrasive material, concentration be 2%~15% submicron order
Abrasive material, concentration are 2%~15% nano-size abrasive materials, and the submicron order carbonyl that concentration is 2%~20% is added in deionized water
Base iron powder and concentration are 3%~15% micron order carbonyl iron dust, and add dispersant that concentration is 3%~15% and concentration is
1%~6% antirust agent, abrasive material is sufficiently stirred for after adding and by vibration of ultrasonic wave 5~30 minutes, forms magnetic flow liquid；
Step S3:Magnetic flow liquid is poured into cup polishing disk, according to processing workpiece the characteristics of and processing request, adjust variable-frequency electric
The output current size of source device, so as to produce magnetic field, forms several micro- bistriques of dynamic in the upper surface of cup polishing disk, this
Bistrique constitutes the flexible polishing pad of polishing workpiece slightly；
Step S4:Start driving motor, drive Rotary tray to rotate at a high speed by transmission belt, and the speed rotation of driving instrument head height
And low speed oscillations, uniform polish is carried out to workpiece surface material.
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| CN107253101A (en) * | 2017-08-04 | 2017-10-17 | 南京理工大学 | Water-base magnetic rheology closed type flexible rubbing head based on normal force |
| CN107481832A (en) * | 2017-08-04 | 2017-12-15 | 北京交通大学 | Electric control permanent magnet formula field generator for magnetic for magnetorheological plane polishing |
| CN107971832B (en) * | 2017-08-04 | 2024-06-18 | 北京交通大学 | Mechanical rotary type pulse magnetic field generator for magnetorheological polishing |
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| CN107617933B (en) * | 2017-11-06 | 2023-05-05 | 广东工业大学 | Dynamic magnetic field magnetorheological polishing device |
| CN107617933A (en) * | 2017-11-06 | 2018-01-23 | 广东工业大学 | A kind of dynamic magnetic field magnetorheological finishing device |
| CN108527016A (en) * | 2018-06-15 | 2018-09-14 | 辽宁科技大学 | It is a kind of to utilize low frequency alternating magnetic field ultraprecise magnetic grinder and method |
| CN108527016B (en) * | 2018-06-15 | 2023-10-13 | 绍兴文理学院 | Ultra-precise magnetic grinding device and method utilizing low-frequency alternating magnetic field |
| CN108857590A (en) * | 2018-06-26 | 2018-11-23 | 南通大学 | A kind of control system of Magnetorheological Polishing equipment |
| CN109318061A (en) * | 2018-10-29 | 2019-02-12 | 曲阜师范大学 | A kind of magnetorheological fluid abrasive polishing method of alternating electromagnetic field control |
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| CN110449997A (en) * | 2019-09-17 | 2019-11-15 | 湖南大学 | A kind of efficient magnetic array magnetic field auxiliary polishing processing method and device |
| CN113172487A (en) * | 2021-04-21 | 2021-07-27 | 华中科技大学 | Vibratory ferrofluid ultra-precision polishing device and method with micron-scale functional structure |
| CN114789378A (en) * | 2022-05-31 | 2022-07-26 | 福建福晶科技股份有限公司 | Polishing device and method with ultrahigh damage threshold on surface |
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Application publication date: 20170711 |