CN110379787A - Power semiconductor modular structure - Google Patents

Power semiconductor modular structure Download PDF

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Publication number
CN110379787A
CN110379787A CN201910659270.6A CN201910659270A CN110379787A CN 110379787 A CN110379787 A CN 110379787A CN 201910659270 A CN201910659270 A CN 201910659270A CN 110379787 A CN110379787 A CN 110379787A
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CN
China
Prior art keywords
phase
change material
metalwork
semiconductor chip
modular structure
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Pending
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CN201910659270.6A
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Chinese (zh)
Inventor
蒋华平
冉立
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Chongqing University
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Chongqing University
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Priority to CN201910659270.6A priority Critical patent/CN110379787A/en
Publication of CN110379787A publication Critical patent/CN110379787A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/427Cooling by change of state, e.g. use of heat pipes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49568Lead-frames or other flat leads specifically adapted to facilitate heat dissipation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/06Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
    • H01L2224/0601Structure
    • H01L2224/0603Bonding areas having different sizes, e.g. different heights or widths
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/34Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
    • H01L2224/39Structure, shape, material or disposition of the strap connectors after the connecting process
    • H01L2224/40Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
    • H01L2224/401Disposition
    • H01L2224/40151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/40221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/40225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4911Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
    • H01L2224/49111Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting two common bonding areas, e.g. Litz or braid wires
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73221Strap and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

The invention proposes a kind of power semiconductor modular structure, the power semiconductor modular structure includes insulating substrate, semiconductor chip, metalwork and phase-change material;Phase-change material and semiconductor chip can carry out heat exchange by metalwork, and due to the heat absorption and exothermic effects of phase-change material, in circuit the start-up period, the temperature rise of semiconductor chip and rate of temperature fall all can be retarded;The method have the benefit that: propose a kind of power semiconductor modular structure, the program can effectively reduce in circuit the start-up period, the temperature difference of semiconductor chip.

Description

Power semiconductor modular structure
Technical field
The present invention relates to a kind of technology of regulation power semiconductor modular operational difference more particularly to a kind of power semiconductors Modular structure.
Background technique
The structure of power semiconductor modular common in the art is as shown in Figure 1, 2, and power semiconductor modular is usually made For in peripheral circuit a device, play a part of control voltage and current.When circuit works, in power semiconductor modular half Conductor chip can generate heat, and temperature is caused to rise, when circuit stops working, semiconductor chip fever stop, temperature again can gradually under Drop;In circuit the start-up period, the difference T of the maximum temperature Tjmax and minimum temperature Tjmin of semiconductor chip will have a direct impact on function The service life of rate semiconductor module, the temperature difference is bigger, and the service life is shorter, and the temperature difference smaller service life is longer, in order to extend power semiconductor mould The service life of block, it is necessary to reduce the numerical value of T by corresponding means.
Summary of the invention
For the problems in background technique, the invention proposes a kind of power semiconductor modular structure, innovation is: institute Stating power semiconductor modular structure includes insulating substrate, semiconductor chip, metalwork and phase-change material;
The insulating substrate is made of dielectric panel, metal layer on back and multiple front metal layers;The metal layer on back is set It sets at the back side of dielectric panel;The front of dielectric panel is arranged in the front metal layer;The front of dielectric panel is set It is equipped with and the matched bonding pad of semiconductor chip;
The back side of the semiconductor chip is connect by the first layer with bonding pad;The front of semiconductor chip is provided with pad, The edge of pad and the edge of semiconductor chip are spaced;
The bottom of the metalwork is connect by the second layer with the pad;Cavity, the top of metalwork are provided in metalwork Portion is provided with two or more through-holes, and the cavity is connected to by through-hole with external environment;
The value range of the phase transformation temperature points of the phase-change material is 50 ~ 200 DEG C;The cavity of metalwork is arranged in phase-change material It is interior.When production, heating makes phase-change material liquefy, and is injected the phase-change material of liquid in cavity by the through-hole;The phase transformation The phase transformation temperature points of material are located between the maximum junction temperature and minimum junction temperature of semiconductor chip.
The principle of the present invention is: based on the prior art it is found that phase-change material has determining phase transformation temperature points, working as phase-change material Temperatures span phase transformation temperature points when, phase-change material will be undergone phase transition: when phase-change material from be lower than phase transformation temperature points phase transformation When turning to the phase higher than phase transformation temperature points, phase-change material can absorb heat, when phase-change material from the phase transformation higher than phase transformation temperature points When turning to the phase lower than phase transformation temperature points, phase-change material can discharge heat;Specific to the present invention, due to being filled with phase in metalwork Become material, heat exchange can be carried out by metalwork between phase-change material and semiconductor chip, when semiconductor chip adstante febre, partly The heat that conductor chip issues can be transmitted on phase-change material and largely be absorbed by phase-change material, make the temperature rise of semiconductor chip Rate is retarded, and when semiconductor chip stops adstante febre, the heat on phase-change material understands reverse conduction to semiconductor chip again On, keep the rate of temperature fall of semiconductor chip retarded, since the phase transformation temperature points of phase-change material are located at semiconductor chip most Between high junction temperature and minimum junction temperature, in circuit the start-up period, the heat absorption and exothermic effects of phase-change material can make the numerical value of T Effectively reduced, so that the service life of power semiconductor modular be made to be extended.
Preferably, the phase-change material is solid-solid phase transition material.
Preferably, the volume that the phase-change material occupies in the cavity is the 60% ~ 95% of cavity volume.
Preferably, the metalwork is made of copper or molybdenum.
The method have the benefit that: a kind of power semiconductor modular structure is proposed, the program can effectively reduce In circuit the start-up period, the temperature difference of semiconductor chip.
Detailed description of the invention
The top view of Fig. 1, the prior art;
The side view of Fig. 2, the prior art;
Fig. 3, structural schematic diagram one of the invention;
Fig. 4, structural schematic diagram two of the invention;
Title corresponding to each label is respectively as follows: semiconductor chip 1, the first layer 2, the second layer 3, metalwork 4, phase in figure Become material 5, plate-like extending portion 6, third layer 7, front metal layer 8, lead 9, pad 10, dielectric panel 11, back metal Layer 12.
A kind of power semiconductor modular structure, it is characterised in that: the power semiconductor modular structure include insulating substrate, Semiconductor chip 1, metalwork 4 and phase-change material 5;
The insulating substrate is made of dielectric panel 11, metal layer on back 12 and multiple front metal layers 8;The back metal The back side of dielectric panel 11 is arranged in layer 12;The front of dielectric panel 11 is arranged in the front metal layer 8;Insulating materials The front of plate 11 is provided with and the matched bonding pad of semiconductor chip 1;
The back side of the semiconductor chip 1 is connect by the first layer 2 with bonding pad;The front of semiconductor chip 1 is provided with weldering The edge of disk 10, the edge and semiconductor chip 1 of pad 10 is spaced;
The bottom of the metalwork 4 is connect by the second layer 3 with the pad 10;Cavity, metalwork are provided in metalwork 4 4 top is provided with two or more through-holes, and the cavity is connected to by through-hole with external environment;
The value range of the phase transformation temperature points of the phase-change material 5 is 50 ~ 200 DEG C;The sky of metalwork 4 is arranged in phase-change material 5 It is intracavitary;The phase transformation temperature points of the phase-change material 5 are located between the maximum junction temperature and minimum junction temperature of semiconductor chip 1.
Further, the phase-change material 5 is solid-solid phase transition material.
Further, the volume that the phase-change material 5 occupies in the cavity is the 60% ~ 95% of cavity volume.
Further, the metalwork 4 is made of copper or molybdenum.
It will be apparent to those skilled in the art that being there are also several leads 9 for electrical connection on power semiconductor modular The structural stability of the lead 9 on semiconductor chip 1 is improved, referring to fig. 4, plate extension can be set on the side wall of metalwork 4 Portion 6 substitutes respective lead 9, and the outer end of plate-like extending portion 6 connected by the front metal layer 8 on third layer 7 and insulating substrate It connects.
Those skilled in the art in carrying out the present invention, can make device of the invention by following preferred fabrication mode Part:
1) make insulating substrate, and on insulating substrate front metal layer 8 and metal layer on back 12 be patterned processing;
2) at bonding pad semiconductor chip 1 being welded on insulating substrate with solder (solder be formed the first layer 2);
3) it is prefabricated component by metalwork 4(metalwork 4 with solder (solder forms the second layer 3)) it is welded on semiconductor chip 1 Pad 10 on;
It 4), will be in the cavity of the phase-change material injection metalwork 4 of liquid by the through-hole on metalwork 4;
5) bonding of lead 9 realizes electric interconnection (as used 6 scheme of plate-like extending portion, in weld metal pieces 4 and semiconductor chip 1 When, it is synchronous that the outer end of plate-like extending portion 6 is welded on corresponding site).
Technique involved by preceding method is all common technology in the prior art, when it is implemented, art technology Personnel both can implement the present invention by preceding method, can also be used on a selective basis in other existing techniques according to physical condition.

Claims (4)

1. a kind of power semiconductor modular structure, it is characterised in that: the power semiconductor modular structure includes insulating substrate, half Conductor chip, metalwork and phase-change material;
The insulating substrate is made of dielectric panel, metal layer on back and multiple front metal layers;The metal layer on back is set It sets at the back side of dielectric panel;The front of dielectric panel is arranged in the front metal layer;The front of dielectric panel is set It is equipped with and the matched bonding pad of semiconductor chip;
The back side of the semiconductor chip is connect by the first layer with bonding pad;The front of semiconductor chip is provided with pad, The edge of pad and the edge of semiconductor chip are spaced;
The bottom of the metalwork is connect by the second layer with the pad;Cavity, the top of metalwork are provided in metalwork Portion is provided with two or more through-holes, and the cavity is connected to by through-hole with external environment;
The value range of the phase transformation temperature points of the phase-change material is 50 ~ 200 DEG C;The cavity of metalwork is arranged in phase-change material It is interior;The phase transformation temperature points of the phase-change material are located between the maximum junction temperature and minimum junction temperature of semiconductor chip.
2. power semiconductor modular structure according to claim 1, it is characterised in that: the phase-change material is solid-solid phase Become material.
3. power semiconductor modular structure according to claim 1 or 2, it is characterised in that: the phase-change material is described The volume occupied in cavity is the 60% ~ 95% of cavity volume.
4. power semiconductor modular structure according to claim 3, it is characterised in that: the metalwork uses copper or molybdenum system Make.
CN201910659270.6A 2019-07-22 2019-07-22 Power semiconductor modular structure Pending CN110379787A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910659270.6A CN110379787A (en) 2019-07-22 2019-07-22 Power semiconductor modular structure

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Application Number Priority Date Filing Date Title
CN201910659270.6A CN110379787A (en) 2019-07-22 2019-07-22 Power semiconductor modular structure

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112968007A (en) * 2021-02-03 2021-06-15 重庆大学 Power semiconductor structure and circuit breaker transfer branch assembly
FR3112241A1 (en) * 2020-07-02 2022-01-07 Safran Cooling device implemented in a power electronics application

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3112241A1 (en) * 2020-07-02 2022-01-07 Safran Cooling device implemented in a power electronics application
CN112968007A (en) * 2021-02-03 2021-06-15 重庆大学 Power semiconductor structure and circuit breaker transfer branch assembly

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Application publication date: 20191025