CN110137119B - Graphite boat - Google Patents
Graphite boat Download PDFInfo
- Publication number
- CN110137119B CN110137119B CN201910421197.9A CN201910421197A CN110137119B CN 110137119 B CN110137119 B CN 110137119B CN 201910421197 A CN201910421197 A CN 201910421197A CN 110137119 B CN110137119 B CN 110137119B
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- Prior art keywords
- graphite boat
- pair
- point
- points
- piece
- Prior art date
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 101
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 101
- 239000010439 graphite Substances 0.000 title claims abstract description 101
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 40
- 239000010703 silicon Substances 0.000 claims abstract description 40
- 239000000919 ceramic Substances 0.000 claims abstract description 22
- 235000012431 wafers Nutrition 0.000 description 34
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a graphite boat, comprising: a row of vertically arranged graphite boat sheets connected together in series through ceramic rods; the graphite boat piece is provided with: a clamping point group capable of bearing a single vertical silicon wafer; the stuck points in the same stuck point group comprise: the bottom clamping points are arranged at the bottom of the graphite boat piece, the pair of lower clamping points are arranged at the lower part of the graphite boat piece, the middle clamping point is arranged at the vertical middle part of the graphite boat piece, and the pair of upper clamping points are arranged at the upper part of the graphite boat piece; the graphite boat piece is also provided with: a bar hole for mounting a snap-in point; the middle clamping point is arranged in the strip hole, and the middle clamping point can slide along the strip hole. The graphite boat can bear the whole silicon wafer and the half silicon wafer divided by the whole silicon wafer.
Description
Technical Field
The invention relates to a graphite boat.
Background
The silicon wafer used for the solar cell needs to be coated, and the silicon wafer needs to be carried by a graphite boat during coating, the graphite boat comprises a row of graphite boat sheets connected in series by ceramic rods, and clamping points for carrying the silicon wafer are arranged on the graphite boat sheets.
With the development of solar cell technology, the whole silicon wafer is divided into two half pieces, so that the efficiency of the solar module can be improved. However, the position of the clamping point of the existing graphite boat is designed according to the shape of the whole silicon wafer, so that the half silicon wafer needs to be additionally and independently designed, and the production cost of enterprises is increased.
Disclosure of Invention
The invention aims to provide a graphite boat which can bear a whole silicon wafer and a half silicon wafer divided by the whole silicon wafer.
In order to achieve the above object, the present invention provides a graphite boat comprising: a row of vertically arranged graphite boat sheets connected together in series through horizontally arranged ceramic rods; the graphite boat piece is provided with: a clamping point group capable of bearing a single vertical silicon wafer;
the stuck points in the same stuck point group comprise: the bottom clamping points are arranged at the bottom of the graphite boat piece, the pair of lower clamping points are arranged at the lower part of the graphite boat piece, the middle clamping point is arranged at the vertical middle part of the graphite boat piece, and the pair of upper clamping points are arranged at the upper part of the graphite boat piece;
the pair of lower clamping points are respectively arranged at two sides of the bottom clamping point, the pair of upper clamping points are in one-to-one correspondence with the pair of lower clamping points, and the upper clamping points are positioned right above the corresponding lower clamping points;
the graphite boat piece is also provided with: a bar hole for mounting a snap-in point; the strip holes penetrate through the two side surfaces of the graphite boat piece, and extend along the transverse direction of the graphite boat piece; one end of the strip hole is positioned outside a quadrangle, the other end of the strip hole is positioned inside the quadrangle, and the quadrangle is a quadrangle with the pair of lower clamping points and the pair of upper clamping points as four endpoints; the middle clamping point is arranged in the strip hole, and the middle clamping point can slide along the strip hole.
Preferably, the pair of lower snap points are located at the same height.
Preferably, the pair of upper snap points are located at the same height.
Preferably, the pair of lower clip points are symmetrically arranged with respect to the bottom clip point.
Preferably, the other end of the strip hole is located right above the bottom clamping point.
Preferably, the medium stuck point includes: a support post extending through and slidably engaging the corresponding slot; the support column is perpendicular to the graphite boat sheet, a pair of annular grooves for inserting silicon wafer edge lines are arranged on the support column, the pair of annular grooves and the support column are coaxial, and the pair of annular grooves are respectively arranged on two sides of the graphite boat sheet.
Preferably, the bottom clip point, the lower clip point and the upper clip point respectively include: a support column extending through the graphite boat sheet; the support column is perpendicular to the graphite boat sheet, a pair of annular grooves for inserting silicon wafer edge lines are arranged on the support column, the pair of annular grooves and the support column are coaxial, and the pair of annular grooves are respectively arranged on two sides of the graphite boat sheet.
Preferably, the number of the clamping point groups is multiple, and the clamping point groups are sequentially arranged at equal intervals along the transverse direction of the graphite boat sheet; the plurality of strip holes are sequentially arranged at equal intervals along the transverse direction of the graphite boat piece, and the plurality of strip holes are in one-to-one correspondence with the plurality of clamping point groups.
Preferably, the ceramic rods are two pairs, and the ceramic rods are parallel to each other; the graphite boat sheets are mutually parallel, and are sequentially arranged at equal intervals along the extending direction of the ceramic rod; the single graphite boat sheet is penetrated by the two pairs of ceramic rods, wherein one pair of ceramic rods are respectively arranged at the transverse two sides of the top end of the graphite boat sheet, and the other pair of ceramic rods are respectively arranged at the transverse two sides of the bottom end of the graphite boat sheet.
The invention has the advantages and beneficial effects that: a graphite boat is provided which can carry both a whole silicon wafer and a half of the silicon wafer divided from the whole silicon wafer.
The middle clamping point can slide along the strip hole, and when the graphite boat is used for bearing the vertical silicon wafer, the middle clamping point needs to slide to the outside of a quadrilateral, and the quadrilateral is a quadrilateral with a pair of lower clamping points and a pair of upper clamping points as four endpoints; after the middle clamping point slides to the outside of the quadrangle, the whole silicon wafer can be vertically inserted, a pair of vertical edges of the whole silicon wafer are respectively assembled with a pair of upper clamping points and a pair of lower clamping points, and the bottom edge of the whole silicon wafer is supported by the bottom clamping points.
When the graphite boat is used for bearing two half pieces formed by dividing the whole silicon wafer, the middle clamping point is slid to the outside of a quadrilateral, and the quadrilateral is a quadrilateral with a pair of lower clamping points and a pair of upper clamping points as four endpoints; after the middle clamping point slides to the outside of the quadrangle, a first half piece is vertically inserted, a pair of vertical edges of the first half piece are respectively assembled with a pair of lower clamping points, the bottom edge of the first half piece is supported by the bottom clamping point, and the top edge of the first half piece is positioned below the strip hole; after the first half piece is inserted, the middle clamping point is slid into the quadrilateral, namely, the middle clamping point is positioned right above the first half piece, then the second half piece is vertically inserted, a pair of vertical edges of the second half piece are assembled with a pair of upper clamping points respectively, and the bottom edge of the second half piece is supported by the middle clamping point.
Drawings
FIG. 1 is a schematic view of a graphite boat;
FIG. 2 is a schematic diagram of a graphite boat carrying an entire wafer of silicon wafers;
FIG. 3 is a schematic view of a graphite boat carrier half.
Detailed Description
The following describes the embodiments of the present invention further with reference to the drawings and examples. The following examples are only for more clearly illustrating the technical aspects of the present invention, and are not intended to limit the scope of the present invention.
As shown in fig. 1, the present invention provides a graphite boat comprising: a row of vertically arranged graphite boat sheets 2 connected in series through two pairs of horizontally arranged ceramic rods 11, 12; the ceramic rods are parallel to each other; the graphite boat pieces 2 are mutually parallel, and the graphite boat pieces 2 are sequentially arranged at equal intervals along the extending direction of the ceramic rod; the single graphite boat sheet 2 is penetrated by the two pairs of ceramic rods 11 and 12, wherein one pair of ceramic rods 11 are respectively arranged at the transverse two sides of the top end of the graphite boat sheet 2, and the other pair of ceramic rods 12 are respectively arranged at the transverse two sides of the bottom end of the graphite boat sheet 2; the graphite boat piece 2 is provided with: a clamping point group capable of bearing a single vertical silicon wafer;
the stuck points in the same stuck point group comprise: a bottom clamping point 31 arranged at the bottom of the graphite boat piece 2, a pair of lower clamping points 32 arranged at the lower part of the graphite boat piece 2, a middle clamping point 33 arranged at the vertical middle part of the graphite boat piece 2 and a pair of upper clamping points 34 arranged at the upper part of the graphite boat piece 2;
the pair of lower clamping points 32 are respectively arranged at two sides of the bottom clamping point 31, the pair of upper clamping points 34 are in one-to-one correspondence with the pair of lower clamping points 32, and the upper clamping points 34 are positioned right above the corresponding lower clamping points 32; the pair of lower clip points 32 are located at the same height; the pair of upper clamping points 34 are located at the same height; the pair of lower clamping points 32 are symmetrically arranged with the bottom clamping point 31;
the graphite boat piece 2 is also provided with: a strip hole 4 for mounting the middle snap point 33; the strip holes 4 penetrate through the two side surfaces of the graphite boat piece 2, and the strip holes 4 extend along the transverse direction of the graphite boat piece 2; one end of the strip hole 4 is positioned outside a quadrangle, and the other end of the strip hole 4 is positioned inside the quadrangle, wherein the quadrangle takes the pair of lower clamping points 32 and the pair of upper clamping points 34 as four endpoints; the middle clamping point 33 is arranged in the strip hole 4, and the middle clamping point 33 can slide along the strip hole 4; the other end of the strip hole 4 is positioned right above the bottom clamping point 31;
the middle stuck point 33 includes: a support column penetrating the corresponding bar hole 4 and slidably fitted with the bar hole 4; the support column is vertical to the graphite boat piece 2, a pair of annular grooves for inserting silicon wafer edge lines are arranged on the support column, the pair of annular grooves and the support column are coaxial, and the pair of annular grooves are respectively arranged on two sides of the graphite boat piece 2;
the bottom clip point 31, the lower clip point 32, and the upper clip point 34, which respectively include: a support column penetrating the graphite boat sheet 2; the support column is vertical to the graphite boat piece 2, a pair of annular grooves for inserting silicon wafer edge lines are arranged on the support column, the pair of annular grooves and the support column are coaxial, and the pair of annular grooves are respectively arranged on two sides of the graphite boat piece 2;
the clamping point groups are multiple, and the clamping point groups are sequentially arranged at equal intervals along the transverse direction of the graphite boat piece 2; the plurality of strip holes 4 are arranged in sequence at equal intervals along the transverse direction of the graphite boat piece 2, and the plurality of strip holes 4 are in one-to-one correspondence with the plurality of clamping point groups.
When the middle clamping point 33 can slide along the strip hole 4 and the vertical silicon wafer whole piece 5 is carried by a graphite boat (the silicon wafer whole piece 5 is square, the width of the silicon wafer whole piece 5 is matched with the horizontal interval of the pair of lower clamping points 32), the middle clamping point 33 needs to slide to the outside of a quadrilateral, and the quadrilateral takes the pair of lower clamping points 32 and the pair of upper clamping points 34 as four endpoints; after the middle clamping point 33 slides to the outside of the quadrangle, the whole silicon wafer 5 can be vertically inserted and placed, the whole silicon wafer 5 is inserted and placed at one side of the graphite boat piece 2, a pair of vertical edges of the whole silicon wafer 5 are respectively inserted into annular grooves of a pair of upper clamping points 34 and a pair of lower clamping points 32, the bottom edge of the whole silicon wafer 5 is inserted into the annular groove of the bottom clamping point 31, and the bottom edge of the whole silicon wafer 5 is supported by the bottom clamping point 31.
As shown in fig. 3, when the graphite boat is used to carry the two halves 51, 52 (both halves 51, 52 are rectangular) of the silicon wafer, the middle clip point 33 is slid to the outside of a quadrangle with a pair of lower clip points 32 and a pair of upper clip points 34 as four ends; after the middle clamping point 33 slides to the outside of the quadrangle, a first half piece 51 is vertically inserted, the first half piece 51 is inserted at one side of the graphite boat piece 2, a pair of vertical edges (namely a pair of wide edges of the rectangular half piece) of the first half piece 51 are respectively inserted into annular grooves of a pair of lower clamping points 32, the bottom edge (namely one long edge of the rectangular half piece) of the first half piece 51 is inserted into the annular groove of the bottom clamping point 31, the bottom edge of the first half piece 51 is supported by the bottom clamping point 31, and the top edge (namely the other long edge of the rectangular half piece) of the first half piece 51 is positioned below the strip hole 4; after the first half piece 51 is inserted, the middle clamping point 33 is slid into the quadrilateral, namely, the middle clamping point 33 is positioned right above the first half piece 51, the second half piece 52 is inserted vertically, the second half piece 52 is inserted on the same side of the graphite boat piece 2, a pair of vertical edges (i.e. a pair of wide edges of the rectangular half piece) of the second half piece 52 are respectively inserted into annular grooves of the pair of upper clamping points 34, the bottom edge (i.e. one long edge of the rectangular half piece) of the second half piece 52 is inserted into the annular groove of the middle clamping point 33, and the bottom edge of the second half piece 52 is supported by the middle clamping point 33.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that it will be apparent to those skilled in the art that several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the scope of the invention.
Claims (9)
1. A graphite boat, comprising: a row of vertically arranged graphite boat sheets connected together in series through horizontally arranged ceramic rods; the graphite boat piece is provided with: a clamping point group capable of bearing a single vertical silicon wafer; the method is characterized in that:
the stuck points in the same stuck point group comprise: the bottom clamping points are arranged at the bottom of the graphite boat piece, the pair of lower clamping points are arranged at the lower part of the graphite boat piece, the middle clamping point is arranged at the vertical middle part of the graphite boat piece, and the pair of upper clamping points are arranged at the upper part of the graphite boat piece;
the pair of lower clamping points are respectively arranged at two sides of the bottom clamping point, the pair of upper clamping points are in one-to-one correspondence with the pair of lower clamping points, and the upper clamping points are positioned right above the corresponding lower clamping points;
the graphite boat piece is also provided with: a bar hole for mounting a snap-in point; the strip holes penetrate through the two side surfaces of the graphite boat piece, and extend along the transverse direction of the graphite boat piece; one end of the strip hole is positioned outside a quadrangle, the other end of the strip hole is positioned inside the quadrangle, and the quadrangle is a quadrangle with the pair of lower clamping points and the pair of upper clamping points as four endpoints; the middle clamping point is arranged in the strip hole, and the middle clamping point can slide along the strip hole.
2. The graphite boat of claim 1, wherein said pair of lower snap points are located at the same height.
3. The graphite boat of claim 1, wherein said pair of upper stuck points are located at the same height.
4. The graphite boat of claim 1, wherein the pair of lower clamping points are symmetrically arranged with respect to the bottom clamping point.
5. The graphite boat of claim 1, wherein the other end of the strip hole is located directly above the bottom clip point.
6. The graphite boat of claim 1, wherein the middle stuck point comprises: a support post extending through and slidably engaging the corresponding slot; the support column is perpendicular to the graphite boat sheet, a pair of annular grooves for inserting silicon wafer edge lines are arranged on the support column, the pair of annular grooves and the support column are coaxial, and the pair of annular grooves are respectively arranged on two sides of the graphite boat sheet.
7. The graphite boat of claim 1, wherein the bottom clip point, and the top clip point each comprise: a support column extending through the graphite boat sheet; the support column is perpendicular to the graphite boat sheet, a pair of annular grooves for inserting silicon wafer edge lines are arranged on the support column, the pair of annular grooves and the support column are coaxial, and the pair of annular grooves are respectively arranged on two sides of the graphite boat sheet.
8. The graphite boat of claim 1, wherein the plurality of stuck point groups are arranged in sequence at equal intervals in the transverse direction of the graphite boat sheet; the plurality of strip holes are sequentially arranged at equal intervals along the transverse direction of the graphite boat piece, and the plurality of strip holes are in one-to-one correspondence with the plurality of clamping point groups.
9. The graphite boat of claim 1, wherein the ceramic rods are in two pairs and each ceramic rod is parallel to the other; the graphite boat sheets are mutually parallel, and are sequentially arranged at equal intervals along the extending direction of the ceramic rod; the single graphite boat sheet is penetrated by the two pairs of ceramic rods, wherein one pair of ceramic rods are respectively arranged at the transverse two sides of the top end of the graphite boat sheet, and the other pair of ceramic rods are respectively arranged at the transverse two sides of the bottom end of the graphite boat sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910421197.9A CN110137119B (en) | 2019-05-21 | 2019-05-21 | Graphite boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910421197.9A CN110137119B (en) | 2019-05-21 | 2019-05-21 | Graphite boat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110137119A CN110137119A (en) | 2019-08-16 |
| CN110137119B true CN110137119B (en) | 2024-02-13 |
Family
ID=67571633
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910421197.9A Active CN110137119B (en) | 2019-05-21 | 2019-05-21 | Graphite boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110137119B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111816595A (en) * | 2020-07-28 | 2020-10-23 | 通威太阳能(眉山)有限公司 | Graphite boat suitable for photovoltaic super large silicon chip |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203013698U (en) * | 2013-01-28 | 2013-06-19 | 浙江波力胜新能源科技有限公司 | Novel quartz boat with double-layer structure |
| CN204257602U (en) * | 2014-12-05 | 2015-04-08 | 中节能太阳能科技（镇江）有限公司 | A kind of graphite boat boat sheet unpicks and washes grip device |
| CN204857687U (en) * | 2015-07-28 | 2015-12-09 | 张家港国龙光伏科技有限公司 | Silicon chip is graphite boat for coating film |
| CN204857684U (en) * | 2015-07-16 | 2015-12-09 | 奥特斯维能源（太仓）有限公司 | Tubular PECVD graphite boat structure |
| CN206502866U (en) * | 2017-02-22 | 2017-09-19 | 广东爱康太阳能科技有限公司 | A kind of adjustable graphite boat in stuck point position |
| JP2018011011A (en) * | 2016-07-15 | 2018-01-18 | クアーズテック株式会社 | Vertical wafer boat |
| CN207199584U (en) * | 2017-05-27 | 2018-04-06 | 江西展宇新能源股份有限公司 | A kind of saturation protection structure of tubular type PECVD graphite boats stuck point half |
| CN207425824U (en) * | 2017-11-14 | 2018-05-29 | 南通苏民新能源科技有限公司 | A kind of graphite boat for half battery |
| CN109524336A (en) * | 2018-11-14 | 2019-03-26 | 湖南红太阳光电科技有限公司 | A kind of tubular type PECVD graphite boat structure |
| CN209641635U (en) * | 2019-05-21 | 2019-11-15 | 常州时创能源科技有限公司 | Graphite boat |
-
2019
- 2019-05-21 CN CN201910421197.9A patent/CN110137119B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203013698U (en) * | 2013-01-28 | 2013-06-19 | 浙江波力胜新能源科技有限公司 | Novel quartz boat with double-layer structure |
| CN204257602U (en) * | 2014-12-05 | 2015-04-08 | 中节能太阳能科技（镇江）有限公司 | A kind of graphite boat boat sheet unpicks and washes grip device |
| CN204857684U (en) * | 2015-07-16 | 2015-12-09 | 奥特斯维能源（太仓）有限公司 | Tubular PECVD graphite boat structure |
| CN204857687U (en) * | 2015-07-28 | 2015-12-09 | 张家港国龙光伏科技有限公司 | Silicon chip is graphite boat for coating film |
| JP2018011011A (en) * | 2016-07-15 | 2018-01-18 | クアーズテック株式会社 | Vertical wafer boat |
| CN206502866U (en) * | 2017-02-22 | 2017-09-19 | 广东爱康太阳能科技有限公司 | A kind of adjustable graphite boat in stuck point position |
| CN207199584U (en) * | 2017-05-27 | 2018-04-06 | 江西展宇新能源股份有限公司 | A kind of saturation protection structure of tubular type PECVD graphite boats stuck point half |
| CN207425824U (en) * | 2017-11-14 | 2018-05-29 | 南通苏民新能源科技有限公司 | A kind of graphite boat for half battery |
| CN109524336A (en) * | 2018-11-14 | 2019-03-26 | 湖南红太阳光电科技有限公司 | A kind of tubular type PECVD graphite boat structure |
| CN209641635U (en) * | 2019-05-21 | 2019-11-15 | 常州时创能源科技有限公司 | Graphite boat |
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| Title |
|---|
| 石墨舟上下料机的研制;岳军;;电子工艺技术(第06期);全文 * |
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| Publication number | Publication date |
|---|---|
| CN110137119A (en) | 2019-08-16 |
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Address after: Liyang City, Jiangsu province 213300 Li Cheng Zhen Wu Changzhou city Tandu Road No. 8 Applicant after: Changzhou Shichuang Energy Co.,Ltd. Address before: Liyang City, Jiangsu province 213300 Li Cheng Zhen Wu Changzhou city Tandu Road No. 8 Applicant before: CHANGZHOU SHICHUANG ENERGY TECHNOLOGY Co.,Ltd. |
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