CN204857687U - Silicon chip is graphite boat for coating film - Google Patents
Silicon chip is graphite boat for coating film Download PDFInfo
- Publication number
- CN204857687U CN204857687U CN201520549348.6U CN201520549348U CN204857687U CN 204857687 U CN204857687 U CN 204857687U CN 201520549348 U CN201520549348 U CN 201520549348U CN 204857687 U CN204857687 U CN 204857687U
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- CN
- China
- Prior art keywords
- graphite boat
- silicon chip
- boat piece
- stuck point
- coating film
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model relates to a silicon chip is graphite boat for coating film, include the graphite boat piece, go up electrode support, bottom electrode seat, graphite boat piece bottom is equipped with the supporting seat, graphite boat piece tip upper end is equipped with the electrode baffle, graphite boat piece tip bottom is equipped with the bottom electrode baffle, be equipped with the stuck point on the graphite boat piece, at least two stuck point and the marginal chucking of the silicon chip by the coating film, the stuck point include with the graphite boat piece is connected places the seat, set up in place the jack catch of a both sides, the jack catch is described for the round platform and the bilateral symmetry is equipped with an inclined plane. The utility model discloses set up cambered surface and inclined plane in the jack catch of stuck point side and make stuck point and silicon chip point contact, the stuck point that produces when effectively reducing coating film seal, expansion coating film area, the outward appearance seems homogeneous more, the stuck point is mellow and full arc design with the contact surface of silicon chip, can reduce the silicon chip and insert the probability of getting the in -process and producing spring point, improves the yield of outward appearance.
Description
Technical field
The utility model relates to silicon chip film-coated equipment, particularly the silicon chip film-coated graphite boat of one.
Background technology
In photovoltaic industry, tubular type PECVD coating process requires silicon chip will insert in graphite boat, is fixed by silicon chip by the graphite stuck point on graphite boat blade.The design shape of stuck point not only can have impact to the size of plated film stuck point print, also because of its robustness and fastness and then can affect plated film aberration, jump the ratio put.Traditional stuck point has two kinds: one is circular stuck point, and plated film stuck point print is comparatively large, affects outward appearance, and blocks insecure after long-time use, affects aberration ratio; Another kind is rhombus stuck point, be conducive to improving aberration, but robustness is poor.
Utility model content
For the deficiencies in the prior art, the purpose of this utility model is to provide a kind of silicon chip film-coated graphite boat.
The utility model solves the technical scheme that its technical problem adopts: a kind of silicon chip film-coated graphite boat, comprise the some graphite boat piece, upper electrode holder, the lower electrode holder that are interspersed successively, supporting seat is provided with bottom described graphite boat piece, upper end, described graphite boat piece end is provided with top electrode dividing plate, bottom, described graphite boat piece end is provided with bottom electrode dividing plate, described graphite boat piece is provided with stuck point, at least two described stuck points with clamped by the silicon chip edge of plated film; Described stuck point comprises the placement rack be connected with described graphite boat piece, the claw being arranged at described placement rack both sides, and described claw is round table-like and bilateral symmetry is provided with an inclined-plane, and namely described claw side is made up of a pair cambered surface, the inclined-plane that connects two cambered surfaces.
Arrange cambered surface in the claw side of stuck point in above-mentioned design and inclined-plane makes stuck point and silicon chip point cantact, the stuck point produced when effectively reducing plated film prints, and expand plated film area, outward appearance seems more homogeneous; The contact-making surface of stuck point and silicon chip is mellow and full cambered design, can reducing silicon chip inserting the probability got in process and produce the point that jumps, improving the yield of outward appearance.
As the further improvement of the design, described graphite boat piece is provided with putting hole, and described placement rack coordinates or interference fits with described putting hole small―gap suture, takes into account installation convenience and the stuck point stability of stuck point.
As the further improvement of the design, three described stuck points and silicon chip edge clamp, and described silicon chip slant setting is in graphite boat piece side, and described graphite boat piece bottom surface and horizontal plane angle are 3-5 °.Silicon chip tilts, and is convenient to stuck point and silicon chip Full connected after placement, improves silicon chip stability, is convenient to place or silicon chip of taking.
The beneficial effects of the utility model are: the utility model arranges cambered surface in the claw side of stuck point and inclined-plane makes stuck point and silicon chip point cantact, and the stuck point produced when effectively reducing plated film prints, and expand plated film area, outward appearance seems more homogeneous; The contact-making surface of stuck point and silicon chip is mellow and full cambered design, can reducing silicon chip inserting the probability got in process and produce the point that jumps, improving the yield of outward appearance.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is further illustrated.
Fig. 1 is Facad structure schematic diagram of the present utility model.
Fig. 2 is side structure schematic diagram of the present utility model.
Fig. 3 is stuck point structural representation of the present utility model.
Fig. 4 is stuck point of the present utility model and graphite boat piece connection diagram.
1. lower electrode holders, 2. upper electrode holder, 3. graphite boat piece, 4. silicon chip, 5. supporting seat, 6. stuck point in the drawings, 7. bottom electrode dividing plate, 8. top electrode dividing plate, 9. placement rack, 10. cambered surface, 11. inclined-planes, 12. claws, 13. putting holes.
Embodiment
The utility model is described in detail, illustrative examples wherein and illustrate and be only used for explaining the utility model below in conjunction with accompanying drawing and specific embodiment, but not as to restriction of the present utility model.
Embodiment: a kind of silicon chip 4 plated film graphite boat, comprise the some graphite boat piece 3, upper electrode holder 2, the lower electrode holder 1 that are interspersed successively, supporting seat 5 is provided with bottom described graphite boat piece 3, upper end, described graphite boat piece 3 end is provided with top electrode dividing plate 8, bottom, described graphite boat piece 3 end is provided with bottom electrode dividing plate 7, described graphite boat piece 3 is provided with stuck point 6, at least two described stuck points 6 with clamped by silicon chip 4 edge of plated film; Described stuck point 6 comprises the placement rack 9 be connected with described graphite boat piece 3, the claw 12 being arranged at described placement rack 9 both sides, described claw 12 is for round table-like and bilateral symmetry is provided with an inclined-plane 11, and namely described claw 12 side is made up of a pair cambered surface 10, the inclined-plane 11 that connects two cambered surfaces 10.
Arrange cambered surface 10 and inclined-plane 11 in above-mentioned design in claw 12 side of stuck point 6 and make stuck point 6 and silicon chip 4 point cantact, the stuck point 6 produced when effectively reducing plated film prints, and expand plated film area, outward appearance seems more homogeneous; Stuck point 6 is mellow and full cambered design with the contact-making surface of silicon chip 4, can reducing silicon chip 4 inserting the probability got in process and produce the point that jumps, improving the yield of outward appearance.
As the further improvement of the design, described graphite boat piece 3 is provided with putting hole 13, and described placement rack 9 coordinates or interference fits with described putting hole 13 small―gap suture, takes into account installation convenience and stuck point 6 stability of stuck point 6.
As the further improvement of the design, three described stuck points 6 clamp with silicon chip 4 edge, and described silicon chip 4 slant setting is in graphite boat piece 3 side, and described graphite boat piece 3 bottom surface and horizontal plane angle are 3-5 °.Silicon chip 4 tilts, and is convenient to stuck point 6 and silicon chip 4 Full connected after placement, improves silicon chip 4 stability, is convenient to place or silicon chip 4 of taking.
The foregoing is only embodiment of the present utility model; not thereby the scope of the claims of the present utility model is limited; every utilize the utility model specification and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present utility model.
Claims (3)
1. a silicon chip film-coated graphite boat, comprise the some graphite boat piece, upper electrode holder, the lower electrode holder that are interspersed successively, supporting seat is provided with bottom described graphite boat piece, it is characterized in that, upper end, described graphite boat piece end is provided with top electrode dividing plate, bottom, described graphite boat piece end is provided with bottom electrode dividing plate, and described graphite boat piece is provided with stuck point, at least two described stuck points with clamped by the silicon chip edge of plated film; Described stuck point comprises the placement rack be connected with described graphite boat piece, the claw being arranged at described placement rack both sides, and described claw is round table-like and bilateral symmetry is provided with an inclined-plane, and namely described claw side is made up of a pair cambered surface, the inclined-plane that connects two cambered surfaces.
2. the silicon chip film-coated graphite boat of one according to claim 1, is characterized in that, described graphite boat piece is provided with putting hole, and described placement rack coordinates or interference fits with described putting hole small―gap suture.
3. the silicon chip film-coated graphite boat of one according to claim 1, is characterized in that, three described stuck points and silicon chip edge clamp, and described silicon chip slant setting is in graphite boat piece side, and described graphite boat piece bottom surface and horizontal plane angle are 3-5 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520549348.6U CN204857687U (en) | 2015-07-28 | 2015-07-28 | Silicon chip is graphite boat for coating film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520549348.6U CN204857687U (en) | 2015-07-28 | 2015-07-28 | Silicon chip is graphite boat for coating film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204857687U true CN204857687U (en) | 2015-12-09 |
Family
ID=54748214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520549348.6U Expired - Fee Related CN204857687U (en) | 2015-07-28 | 2015-07-28 | Silicon chip is graphite boat for coating film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204857687U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107622962A (en) * | 2017-09-11 | 2018-01-23 | 苏州阿特斯阳光电力科技有限公司 | A kind of labeling method of silicon cell |
| CN109148343A (en) * | 2018-08-15 | 2019-01-04 | 横店集团东磁股份有限公司 | A kind of silicon chip of solar cell plated film graphite boat |
| CN109244020A (en) * | 2018-11-06 | 2019-01-18 | 通威太阳能（安徽）有限公司 | A kind of novel pipe PECD graphite boat stuck point |
| CN110137119A (en) * | 2019-05-21 | 2019-08-16 | 常州时创能源科技有限公司 | A kind of graphite boat |
-
2015
- 2015-07-28 CN CN201520549348.6U patent/CN204857687U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107622962A (en) * | 2017-09-11 | 2018-01-23 | 苏州阿特斯阳光电力科技有限公司 | A kind of labeling method of silicon cell |
| CN107622962B (en) * | 2017-09-11 | 2019-11-15 | 苏州阿特斯阳光电力科技有限公司 | A kind of labeling method of silicon cell |
| CN109148343A (en) * | 2018-08-15 | 2019-01-04 | 横店集团东磁股份有限公司 | A kind of silicon chip of solar cell plated film graphite boat |
| CN109244020A (en) * | 2018-11-06 | 2019-01-18 | 通威太阳能（安徽）有限公司 | A kind of novel pipe PECD graphite boat stuck point |
| CN110137119A (en) * | 2019-05-21 | 2019-08-16 | 常州时创能源科技有限公司 | A kind of graphite boat |
| CN110137119B (en) * | 2019-05-21 | 2024-02-13 | 常州时创能源股份有限公司 | Graphite boat |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151209 Termination date: 20180728 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |