CN109913823A - A kind of light water reactor zirconium pipe coating - Google Patents
A kind of light water reactor zirconium pipe coating Download PDFInfo
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- CN109913823A CN109913823A CN201910269731.9A CN201910269731A CN109913823A CN 109913823 A CN109913823 A CN 109913823A CN 201910269731 A CN201910269731 A CN 201910269731A CN 109913823 A CN109913823 A CN 109913823A
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Abstract
A kind of method that the present invention proposes light-water reactor zirconium pipe coating, it specifically includes that and utilizes High pulse power technology and Magnetic filter deposition technique alternating deposit CrAlSi and MoNbZr circular nanometer coating, for CrAlSi and MoNbZr nano coating with a thickness of 0-15nm, total coating thickness is 0-15 μm in the unit period.Antioxygenic property of the zirconium pipe in autoclave under high temperature and pressure is remarkably reinforced after deposition nanometer alternate coatings; by implementing the present invention; the deposition alternately good inside diffusion for protecting oxygen element under high temperature of nanometer circulation composite construction (the especially addition of Al, Cr and Si element) on zirconium pipe; because of the mutual synergistic effect of its multiple element; the falling off of film layer under high temperature and pressure can effectively be prevented, cracked and the dispersal behavior of oxygen atom, the security and reliability of fault tolerant fuel is improved.
Description
Technical field
Zirconium water reaction when occurring the present invention be directed to nuclear accident in light water reactor.The Special safety of present invention raising nuclear reactor
Property, it proposes to carry out surface modified coat in high temperature and high pressure environment zirconium pipe, zirconium pipe is prevented to be reacted under the high temperature and high pressure environment with water.
The present invention relates to a kind of composite coatings and preparation method thereof.Particular technique is Magnetic filter depositing system and high power pulse magnetic
Control technology.
Technical background
Nuclear energy has the characteristics that efficient, safe and economical as clean energy resource generally acknowledged in the world, is to alleviate current water resource
With the valuable source of coal electricity shortage.Zircaloy is because thermal neutron absorption cross section is small, mechanical property and fine corrosion resistance and conduct
Material in the cladding materials of nuclear power plant reactor element and other heaps.After Fukushima, Japan Nuclear Power Accident, the safety of nuclear power is again
Pendulum in face of all core workers, how to further increase safety of the light water reactor nuclear fuel element under accident conditions and
Reliability is at a urgent problem to be solved.It is one of effective mode that zirconium cladding, which carries out coating cladding,.Coating zirconium packet
The key benefit of shell application is economy, this is because the sustainable use of the production capacity of existing equipment, it is easy to accomplish zirconium base applies
The commercial applications of layer involucrum.The technological challenge that coating zirconium cladding faces is that the various performances of fuel can and component to be met are wanted
It asks, and coating involucrum does not change the size of fuel can, this is most important to performance in heap, especially in the condition of normal operation
Under.In During Process of Long-term Operation, coating should all have certain stability under burn into creep and abrasive condition.Therefore, it is necessary to
It constantly explores, optimize Zr alloy surface coat preparing technology.New technology answers coating quality easier to control, especially painting thickness
Degree, zirconium cladding surface covering should be able to stable for extended periods of time under environment in heap.Currently, in the world about zirconium alloy cladding surface
Coating was studied also in exploratory stage early period, and a series of screening operation of coating candidates and coating process has been carried out,
Also coating performance characterization has been carried out, some achievements are achieved.The U.S. has been primarily upon MAX phase and ceramic coating material, South Korea and
France has been primarily upon metal Cr coating material, but including both at home and abroad in terms of ATF coating without reliable and effective technical matters
Method and route, because environment involved in coating is thermal extremes, hyperbaric environment.
Summary of the invention
In view of this, the present invention is based on ion beam technologies to utilize Magnetic filter deposition (FCVA) and high power pulse magnetic control system
Controlling for multi-cycle unit nano-composite coating.The advantage of comprehensive deposition technique, the film layer of deposition has high compactness, in height
Temperature has very strong antioxygen diffusion and oxidation resistance under high pressure, has in the safety coatings as ATF fuel very big excellent
Gesture.
For further, which includes:
1, metal ion cleaning is carried out to zirconium pipe surface using high power pulse magnetic control deposition technique, total beam is when cleaning
2-6A, negative pressure 500-1000V, high power pulse power 0-1MW, 300-550 DEG C of temperature, air pressure 1 × 10-2- 10Pa is passed through gas
For Ar, rotation mode is revolution+rotation, revolution speed 0-5r/min；
2, metallic diaphragm deposition is carried out to zirconium pipe surface using Magnetic filter technology and high power pulse magnetic control deposition technique, sunk
Long-pending total beam 2-4A, negative pressure 200-500V, 300-550 DEG C of temperature, air pressure 1 × 10-3-1×10-1Pa, rotation mode be revolution+
Rotation, revolution speed 10r/min；
3, zirconium pipe coating is prepared, Magnetic filter technology cathode targets are CrAlSi, striking current 50-120A, and line is
100-1000mA；High pulse power technology cathode targets are MoNbZr, pulse power 0-1MW, pulsewidth 0-30ms, and beam intensity is
0-3A；Zirconium pipe coating is to replace nanometer circulation composite construction, periodic unit amounts 0-500,0-10 μm of overall film thickness.
In some embodiments, the substrate surface cleaning process includes: using high power pulse magnetic control system to described
Zirconium pipe substrate carries out metal ion bombardment, and for the gas used for Ar, work negative pressure is 500-1000V, beam intensity 2-6A, bangs
300-550 DEG C of environment temperature is hit, bombardment time 30-120min.
High power pulse magnetic control technology is the deposition technique in current forward position, the metal ion ionization level of the technology 96% with
On, while bulky grain is substantially not present, peak power is up to 1MW.Zirconium pipe can be greatly reduced when carrying out the cleaning of zirconium pipe substrate
The artificial defect that surface leaves by machining greatly improves and ensures the high quality of subsequent metal film layer.In the process of cleaning
Cleaning is collided in the participation of existing heavy metal ion, and has the collision of inert gas ion to clean.The present invention is utilized than traditional approach
Pure gas ion source has more cleaning effect.
In some embodiments, circular nanometer composite alloy film deposition is carried out on zirconium pipe after cleaning includes: to utilize institute
Magnetic filtered vacuum arc deposition (FCVA) system and high power pulse magnetic control system are stated, on the zirconium pipe, Magnetic filter is deposited
Alloy firm layer；Wherein, the alloying element is Cr, Al, Si, Mo, Nb and Zr, with a thickness of 0-15 μm.
Magnetic filter deposition technique and high power pulse magnetic control technology are ionization level highest in present PVD technique, and film forming causes
Two kinds of best technologies of close property.It is able to achieve the mutual supplement with each other's advantages of technology by the combination of two kinds of technologies, while being during the deposition process
It works at the same time, wherein MoNbZr film layer, CrAlSi film layer and CrAlSiMoNbZr high-entropy alloy film layer can be respectively formed；Pass through
The additive fusion of film layer of different scale can be realized by controlling public rotational velocity, substantially increase structure variability and equipment can
Usability.Can have that good antioxygen is spread and oxidability, main cause have under the high temperature and high pressure environment of light water reactor: Cr and
It is oxygen-impermeable to matrix transmission that Al forms fine and close oxide layer resistance, while Mo and Nb element is rock-steady structure effect, promotes film layer not
Form crackle and corrugation；High-entropy alloy layer mainly plays a part of to improve bond strength and the further effect of resistance oxygen in hot environment；
Si atom is that minor radius atom occurs inwardly or outwardly to spread under high temperature environment, blocks diffusion admittance during diffusion,
It obstructs oxygen and further diffusion occurs.At this it should be noted that, although element species are more, many nanometer crystal boundaries are also formed, but
These crystal boundaries play the role of under high temperature environment very well it is oxygen-impermeable, easily occurs with traditional polycrystalline circle oxygen diffusion theory just
On the contrary, Bulk coat, in 18.7Mpa, temperature is phenomena such as 0-60 days film layers do not fall off, cracks, removing in 360 ° of pure water,
Oxygen diffusion depth is no more than 6 μm.
Compared with the existing technology, various embodiments of the present invention have the advantage that
1, the embodiment of the present invention proposes zirconium pipe coating, has much by carrying out high-power impulse magnetron sputtering bombardment to substrate
The effect of aspect: 1) surface compact degree is improved, flash removed is removed；2) can activated substrate surface, remove adsorbed gas；3) metal into
Enter sub-surface and forms chemical bond raising surface strength.So that the structural painting that subsequent Magnetic filter and high power pulse magnetic control deposit
The binding force of layer is all very good, is able to maintain high peel strength at high temperature under high pressure；
2, compared to PVD depositions method, magnetically filter arc deposition technology and high power pulses such as magnetron sputtering, electron beam evaporations
Magnetic control technology atom ionization level is very high, about 90% or more.In this way, plasma can be made close since atom ionization level is high
Degree increases, and bulky grain is reduced when film forming, is conducive to improve film hardness, wearability, compactness, film-substrate cohesion etc.；
3, Magnetic filter and the high ionization level of high power pulse magnetic control equipment are very beneficial for nanocrystalline formation and regulation, this
It is other well-known techniques such as magnetically controlled DC sputtering, rf magnetron sputtering and the bottleneck of chemical vapor deposition；
4, since transition metal Cr, Al and Si are used as target simultaneously: 1) Si and Al can substantially reduce the interior of film forming formation
Stress improves the binding force of coating and substrate；2) compactness of coating is further increased when forming a film, while plasma can be promoted
The degree of ionization of middle gas increases rate of film build；3) it can further promote nanocrystalline formation, improve its nucleation efficiencies；
5, known theory knows that film layer crystal boundary is mostly more easy to happen the corrosion of crystal boundary in the water environment of high temperature and pressure, this
Because of the presence of multiple element in invention, in film forming procedure inevitably there is a large amount of nanometers of crystal boundaries, exactly these crystal boundaries
In the presence of so that film layer film layer does not occur crackle and to fall off under high temperature environment.
It should be noted that for the aforementioned method embodiment, for simple description, therefore, it is stated as a series of
Combination of actions, but those skilled in the art should understand that, the present invention is not limited by the sequence of acts described, because according to
According to the present invention, some steps may be performed in other sequences or simultaneously.Secondly, those skilled in the art should also know that,
The embodiments described in the specification are all preferred embodiments, and related movement is not necessarily essential to the invention.
The above description is only an embodiment of the present invention, is not intended to limit the invention, it is all in spirit of the invention and
Within principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
More features and advantages of the embodiment of the present invention will be explained in specific embodiment later.
Detailed description of the invention
The attached drawing for constituting a part of the embodiment of the present invention is used to provide to further understand the embodiment of the present invention, the present invention
Illustrative embodiments and their description be used to explain the present invention, do not constitute improper limitations of the present invention.In the accompanying drawings:
Fig. 1 is the equipment of the embodiment of the present invention structural schematic diagram；
Fig. 2 is zirconium pipe coating structural schematic diagram provided in an embodiment of the present invention；
Fig. 3 is that high power pulse of the present invention and common magnetron power are composed；
Fig. 4 is 360 DEG C of 1-5 of the embodiment of the present invention and unmodified matrix zirconium pipe itself, the lower 60 days endoplasms of 18.6MPa pure water
Amount weight gain map.
Fig. 5 is the zirconium pipe coating section SEM figure that the embodiment of the present invention 5 provides；
Fig. 6 is that 5 coating binding force of the embodiment of the present invention tests scratch；
Fig. 7 is 5 coating ball edging edge optical morphology of the embodiment of the present invention；
Fig. 8 is 360 DEG C of 5 coating of the embodiment of the present invention, the lower 60 days rear surface figures of 18.6MPa pure water
Fig. 9 is 360 DEG C of 5 coating of the embodiment of the present invention, sectional view after 18.6MPa pure water lower 60 days；
Description of symbols
101 Magnetic filter system groups 2
102 vacuum-pumping systems
103 vacuum chamber doors
104 observation windows
105 Magnetic filter system groups 1
106 high power pulse system groups 1
107 Magnetic filter system groups 3 (top view)
108 vacuum-pumping systems (top view)
109 observation windows (top view)
110 Magnetic filter system groups 1 (top view)
111 high power pulse system groups 1 (top view)
112 Magnetic filter system groups 2 (top view)
113 high power pulse system groups 2 (top view)
114 high power pulse system groups 3 (top view)
115 heating systems (top view)
Embodiment of the method
In the present embodiment, alternately nanometer recycles composite coating for preparation on light reactor zirconium pipe basal layer, referring to Fig.1 with 2,
It illustrates the present embodiment zirconium pipe coating structures and methods, the preparation method specifically includes the following steps:
A, metal ion cleaning is carried out to zirconium pipe surface using high power pulse magnetic control deposition technique, total beam is when cleaning
2-6A, negative pressure 500-1000V, high power pulse power 0-1MW, 300-550 DEG C of temperature, air pressure 1 × 10-2- 10Pa is passed through gas
For Ar, bombardment time 30-120min.
High power and high negative pressure in deposition process have apparent advantage compared to traditional process route: embodying
: 1) big line bombard zirconium pipe, improves substrate temperature rapidly；2) gas of matrix absorption is removed；3) organic matter is removed
And burr；3) metal oxide film layer for sputtering away surface exposes free of contamination atomic layer.Rotation mode is revolution+rotation, public
Rotary speed is 0-5r/min, and rotational velocity is 1-10 times of revolution speed, and speed high energy greatly improves the uniformity of depositional coating,
It is simultaneously ceramic heatproof bearing in public rotation bearing, high reliability and stability is able to maintain under high temperature environment, than common
Magnetic control and electric arc uniformity and reliability are higher by two
B, metallic diaphragm deposition is carried out to zirconium pipe surface using Magnetic filter technology and high power pulse magnetic control deposition technique, sunk
Long-pending total beam 2-4A, negative pressure 200-500V, 300-550 DEG C of temperature, air pressure 1 × 10-3-1×10-1Pa, rotation mode be revolution+
Rotation, revolution speed 10r/min；Magnetic filter technology cathode targets are CrAlSi, striking current 50-120A, line 100-
1000mA；High pulse power technology cathode targets are MoNbZr, pulse power 0-1MW, pulsewidth 0-30ms, beam intensity 0-
3A；Zirconium pipe coating is to replace nanometer circulation composite construction, periodic unit amounts 0-500,0-15 μm of overall film thickness.
Coupling cross-over design is carried out in device space structure simultaneously in conjunction with high power magnetic control and Magnetic filter deposition technique,
It can easily realize that the coupling of the thin film layer of one high-entropy alloy one of thickness in unit deposits in deposition process.It is different from traditional
Technology and structure, the present invention can easily realize different units week by rotation speed, the design of the macroparameters such as deposition line
Phase, the deposition of different molecular layers thicks in unit week.
Embodiment 1
1, it opens high power pulse magnetic control depositing system and metal ion cleaning is carried out to zirconium pipe surface, total beam is when cleaning
2-6A, negative pressure 500-1000V, high power pulse power 30KW, 300-550 DEG C of temperature, air pressure 1 × 10-1- 1Pa, being passed through gas is
Ar, bombardment time 30-120min.
2, Magnetic filter technology and high power pulse magnetic control deposition technique are opened and metallic diaphragm deposition is carried out to zirconium pipe surface, sunk
Long-pending total beam 2-4A, negative pressure 200-500V, 300-550 DEG C of temperature, air pressure 1 × 10-3-1×10-1Pa, rotation mode be revolution+
Rotation, revolution speed 10r/min；Magnetic filter technology cathode targets are CrAlSi, striking current 80A, line 800mA；It is high
Power pulse technology cathode targets are MoNbZr, pulse power 30KW, pulsewidth 0-30ms, beam intensity 0-3A；Zirconium pipe coating
For alternately nanometer recycle composite construction, periodic unit amounts 0-500,12 μm of overall film thickness.
Embodiment 2
1, it opens high power pulse magnetic control depositing system and metal ion cleaning is carried out to zirconium pipe surface, total beam is when cleaning
2-6A, negative pressure 500-1000V, high power pulse power 100KW, 300-550 DEG C of temperature, air pressure 1 × 10-1- 1Pa is passed through gas
For Ar, bombardment time 30-120min.
2, Magnetic filter technology and high power pulse magnetic control deposition technique are opened and metallic diaphragm deposition is carried out to zirconium pipe surface, sunk
Long-pending total beam 2-4A, negative pressure 200-500V, 300-550 DEG C of temperature, air pressure 1 × 10-3-1×10-1Pa, rotation mode be revolution+
Rotation, revolution speed 10r/min；Magnetic filter technology cathode targets are CrAlSi, striking current 75A, line 750mA；It is high
Power pulse technology cathode targets are MoNbZr, pulse power 100KW, pulsewidth 0-30ms, beam intensity 0-3A；Zirconium pipe coating
For alternately nanometer recycle composite construction, periodic unit amounts 0-500,12 μm of overall film thickness.
Embodiment 3
1, it opens high power pulse magnetic control depositing system and metal ion cleaning is carried out to zirconium pipe surface, total beam is when cleaning
2-6A, negative pressure 500-1000V, high power pulse power 300KW, 300-550 DEG C of temperature, air pressure 1 × 10-1- 1Pa is passed through gas
For Ar, bombardment time 30-120min.
2, Magnetic filter technology and high power pulse magnetic control deposition technique are opened and metallic diaphragm deposition is carried out to zirconium pipe surface, sunk
Long-pending total beam 2-4A, negative pressure 200-500V, 300-550 DEG C of temperature, air pressure 1 × 10-3-1×10-1Pa, rotation mode be revolution+
Rotation, revolution speed 10r/min；Magnetic filter technology cathode targets are CrAlSi, striking current 70A, line 700mA；It is high
Power pulse technology cathode targets are MoNbZr, pulse power 300KW, pulsewidth 0-30ms, beam intensity 0-3A；Zirconium pipe coating
For alternately nanometer recycle composite construction, periodic unit amounts 0-500,12 μm of overall film thickness.
Embodiment 4
1, it opens high power pulse magnetic control depositing system and metal ion cleaning is carried out to zirconium pipe surface, total beam is when cleaning
2-6A, negative pressure 500-1000V, high power pulse power 800KW, 300-550 DEG C of temperature, air pressure 1 × 10-1- 1Pa is passed through gas
For Ar, bombardment time 30-120min.
2, Magnetic filter technology and high power pulse magnetic control deposition technique are opened and metallic diaphragm deposition is carried out to zirconium pipe surface, sunk
Long-pending total beam 2-4A, negative pressure 200-500V, 300-550 DEG C of temperature, air pressure 1 × 10-3-1×10-1Pa, rotation mode be revolution+
Rotation, revolution speed 10r/min；Magnetic filter technology cathode targets are CrAlSi, striking current 65A, line 650mA；It is high
Power pulse technology cathode targets are MoNbZr, pulse power 800KW, pulsewidth 0-30ms, beam intensity 0-3A；Zirconium pipe coating
For alternately nanometer recycle composite construction, periodic unit amounts 0-500,12 μm of overall film thickness.
Embodiment 5
1, it opens high power pulse magnetic control depositing system and metal ion cleaning is carried out to zirconium pipe surface, total beam is when cleaning
2-6A, negative pressure 500-1000V, high power pulse power 1000KW, 300-550 DEG C of temperature, air pressure 1 × 10-1- 1Pa is passed through gas
For Ar, bombardment time 30-120min.
2, Magnetic filter technology and high power pulse magnetic control deposition technique are opened and metallic diaphragm deposition is carried out to zirconium pipe surface, sunk
Long-pending total beam 2-4A, negative pressure 200-500V, 300-550 DEG C of temperature, air pressure 1 × 10-3-1×10-1Pa, rotation mode be revolution+
Rotation, revolution speed 10r/min；Magnetic filter technology cathode targets are CrAlSi, striking current 50A, line 500mA；It is high
Power pulse technology cathode targets are MoNbZr, pulse power 1000KW, pulsewidth 0-30ms, beam intensity 0-3A；Zirconium pipe applies
Layer is to replace nanometer circulation composite construction, periodic unit amounts 0-500,12 μm of overall film thickness.
Fig. 1 is the device structure schematic diagram of high-volume zirconium pipe surface processing in Figure of description.Fig. 2 is the knot of zirconium pipe coating
Structure schematic diagram, respectively cleaning layer, MoNbZr layers (binder course), high-entropy alloy layer (High entropy alloy, HEA),
CrAlSi layers, wherein MoNbZr layers (binder course), high-entropy alloy layer (HEA), CrAlSi layers are periodic unit.Fig. 3 is the present invention
The power comparison diagram of middle High pulse power technology and normal pulsed technology and common magnetron technology, can be with the discovery of very little
The peak power of high power pulse is very suitable to the preparation of high bond strength, low internal stress and high-densit coating up to 1MW.
Fig. 4 is five embodiments and unmodified zirconium pipe in 18.7Mpa, and temperature is the weight gain curve spectrum in 360 ° of pure water in 60 days；1 generation
The unmodified zirconium pipe weight gain curve of table, 2 to 6 respectively represent the weight gain curve of embodiment 1 to 5；Discovery that can be apparent, in total film
In the case that thickness degree is constant, gain in weight is decreased obviously with the increase of the peak power of high power pulse, in the process
Magnetic filter deposition only changes striking current size.In embodiment 5, the weight gain of peak pulse power zirconium pipe band coating when being 1MW
Amount is unmodified 1/10, and the inoxidizability and high temperature and pressure stability inferior of film layer greatly improved.Fig. 5 is 5 zirconium pipe of embodiment
Coating cross sections SEM figure, the compactness of 5 depositional coating of discovery embodiment that can be apparent is good, and thicknesses of layers is in 12 microns.
Fig. 6 is that the binding force of embodiment 5 tests scratch figure, it was obvious that at binding force LC2, film layer is still without falling off and shell
From bond strength is excellent.Fig. 7 is the optical morphology figure of coating after 5 ball milling of embodiment, it was obvious that the boundary of each layer
Face is clear, and without obviously falling off and removing, bond strength is high between layers.Fig. 8 is embodiment 5 in 18.7Mpa, and temperature is 360 °
Surface topography map in pure water after 60 days, what can be apparent sees film layer without removing and slight crack, and film layer still keeps complete well
Whole property, nanocrystalline size at high temperature are slightly grown；Fig. 9 is embodiment 5 in 18.7Mpa, and temperature is in 360 ° of pure water after 60 days
Sectional view, it is flawless it was obvious that internal between layers without falling off in coating, remain to see nano combined painting
The interface of layer.Therefore, have very in conjunction with High pulse power technology and Magnetic filter deposition technique in the coating that zirconium pipe surface deposits
Good anti-oxidant, high temperature resistant property, there is good application prospect in ATF.
Claims (7)
1. a kind of light water reactor zirconium pipe coating characterized by comprising
Technology of preparing is the coupling of Magnetic filter technology and high power pulse magnetic control technology；
Magnetic filter technology cathode targets are CrAlSi, striking current 50-120A, line 100-1000mA；
High pulse power technology cathode targets are MoNbZr, pulse power 0-1MW, pulsewidth 0-30ms, beam intensity 0-6A；
Zirconium pipe coating is to replace nanometer circulation composite construction, periodic unit amounts 0-500,0-15 μm of overall film thickness.
2. a kind of light water reactor zirconium pipe coating characterized by comprising
Magnetic filter system is 90 degree of filtration systems, three groups of Magnetic filter systems is arranged in vacuum chamber, every group of geometric center angle is
70 °, 110 ° and 180 °；Every group is made of three sets of Magnetic filter systems, and every Zu Zhong top layer Magnetic filter system is vertical arrangement, under
Two sets are arranged horizontally；
High power pulse system is strip plane target type, length 100-500mm, width 50-100mm；High power pulse system
Unified totally 3 groups, every group be it is a set of, every group of geometric center angle is respectively 30 °, 90 °, 120 °；
Equipment is able to achieve the processing of high-volume zirconium pipe, treating capacity 0-200 under three groups of Magnetic filters and two groups of high power pulse topology layouts
Root/furnace.
3. light water reactor zirconium pipe coating according to claim 1, wherein Magnetic filter target Cr10-30%, Al30-70%, Si0-
10%, the atomic ratio of Al and Cr is not less than 1.5 in depositional coating.
4. light water reactor zirconium pipe coating according to claim 1, wherein high power pulse cathode targets Mo10-30%, Nb10-
30%, Zr40-60%, the atomic ratio of Zr and Mo+Nb is not less than 1 in depositional coating.
5. light water reactor zirconium pipe coating according to claim 1, unit period inner coating is from bottom successively sequence are as follows: MoNbZr is thick
Thickness degree 5-10nm, CrAlSiMoNbZr high-entropy alloy thick-layer thickness 5-12nm, CrAlSi thickness of thin layer 5-10nm,
CrAlSiMoNbZr high-entropy alloy thickness of thin layer 0-6nm, CrAlSi thick-layer thickness 5-10nm,.
6. feature includes: high power pulse system and Magnetic filter deposition according to light water reactor zirconium pipe coating described in claims 2
System intersects and cooperation works at the same time, air pressure 1 × 10 when work-3- 10Pa, be passed through gas be Ar, flow 0-500sccm,
Rotation mode is revolution+rotation, and revolution speed 10r/min, revolution and rotation gear ratio are 1-10.
7. according to light water reactor zirconium pipe coating described in claims 1, it is characterized in that: in 18.7Mpa, temperature is 0- in 360 ° of pure water
Phenomena such as film layer did not fell off, and cracked, removing in 60 days, oxygen diffusion depth are no more than 6 μm.
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| CN113293354A (en) * | 2021-05-27 | 2021-08-24 | 重庆文理学院 | High-temperature oxidation resistant coating for cladding substrate and preparation process |
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| CN113293354A (en) * | 2021-05-27 | 2021-08-24 | 重庆文理学院 | High-temperature oxidation resistant coating for cladding substrate and preparation process |
| CN113293354B (en) * | 2021-05-27 | 2022-11-25 | 重庆文理学院 | High-temperature oxidation resistant coating for cladding substrate and preparation process |
| CN118222993A (en) * | 2024-05-23 | 2024-06-21 | 顺束科技(天津)合伙企业(有限合伙) | High-entropy alloy coating preparation device |
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