CN203700496U - Device for coating diamond-like carbon films - Google Patents
Device for coating diamond-like carbon films Download PDFInfo
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- CN203700496U CN203700496U CN201320862753.4U CN201320862753U CN203700496U CN 203700496 U CN203700496 U CN 203700496U CN 201320862753 U CN201320862753 U CN 201320862753U CN 203700496 U CN203700496 U CN 203700496U
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Abstract
The utility model relates to a device for coating diamond-like carbon films. The coating device comprises a coating chamber, a planet rotary workpiece holder, a magnetic filtration arc source, a molecular pump and a vacuum system, wherein the coating chamber is a vertical cylinder and is of an integral double-layer water-cooled structure, a feeding door is arranged in the front of the coating chamber, a tubular heater and a thermocouple joint are arranged at the top of the coating chamber, the bottom of the coating chamber is provided with an air inlet and the planet rotary workpiece holder, the magnetic filtration arc source is mounted on the side wall of the coating chamber, and the molecular pump and the vacuum system are mounted at the rear part of the coating chamber. Due to adoption of the magnetic filtration function and the high vacuum multi-arc target structure, the device has stable and reliable production quality, can be used in mass production and is beneficial to the reduction of the production cost.
Description
Technical field
The utility model relates to a kind of diamond-film-like coating apparatus.
Background technology
Quasi-diamond film coating (Diamond-like Carbon) is called for short DLC coating.Quasi-diamond (DLC) film is the film of the metastable class of the one amorphous carbon that contains a certain amount of diamond key (sp2 and sp3).The main component of film is carbon, because carbon can exist with three kinds of different hybrid form sp3, sp2 and sp1, so carbon can form different crystal and unordered structure.This also makes the research of carbon-base film become complicated.In sp3 hybrid structure, four valence electrons of a carbon atom are assigned in the directed sp3 track with tetrahedral structure, and carbon atom and adjacent atom form very strong ♂ key, and we are also referred to as diamond key conventionally this bonding mode.In sp2 hybrid structure, in four valence electrons of carbon three enter in the sp2 track of leg-of-mutton orientation, and in one plane form ♂ key, and the 4th electronics is positioned at the p π track of a plane of same ♂ key.Same or the multiple adjacent atoms of π track form weak π key.And in sp1 structure, after in four valence electrons two enter π track, each leisure forms ♂ key in the direction of x axle, the p π track that two other valence electron enters y axle and z axle forms π key.DLC carbon film can be doped different elements and obtain DLC (N-DLC) film adulterating.C in them exists in the bonding mode of sp3, sp2 and sp1, thereby has many performances similar to diamond film.
Quasi-diamond (DLC) film has many premium propertiess similar or close to diamond, as high in hardness, Young's modulus is high, frictional coefficient is low, Bc is good, acoustical behavior is good, electric property is good etc.DLC film develops into today, is known and pays close attention to by increasing investigator and industry member, has great application prospect in the each field of industry.DLC film is widely used in multiple fields such as aerospace, precision optical machinery, microelectromechanicdevices devices, multiple head unit, automobile component, optical equipment and biomedicines at present, is the high performance inorganic non-metallic thin-film material with important application prospect.
The U.S. is one of strategic material using diamond like carbon film material as 21 century.The research of diamond-film-like at present, exploitation, preparation and application advance just both in depth and in breadth.Method prepared by quasi-diamond is a lot: as ion beam assisted depositing, magnetron sputtering, vacuum cathode arc deposited, plasma enhanced chemical vapor deposition, ion implantation etc.But different preparation methods, composition, structure and the performance of DLC film have very large difference.Realize the application of in enormous quantities, big area, DLC film of fine quality, also have many problems.As: most depositing device or device all belong to the equipment of laboratory use principle type, high, the single heat output of preparation cost is little, can not produce continuously.Can not do industrial enterprise and produce in enormous quantities, realize the equipment of industrialization.
The coating quality of legacy equipment or device preparation is unstable at present, and coating adhesion is poor, thicknesses of layers extremely meagre (1 μ m left and right) etc.Can not meet practical application particularly at high kinematic pair, the specification of quality of the narrow surface coating DLC of high frequency friction.
Utility model content
The utility model is in order to overcome the deficiencies in the prior art, provides a kind of and be produced on a large scale, realize industrialization and can realize the coating apparatus of the diamond-film-like of high adhesive force, high rigidity, low-friction coefficient.
The utility model is achieved by the following technical programs:
Diamond-film-like coating apparatus, it comprises coating chamber, planetary rotation work rest, magnetic filtered arc source, molecular pump, vacuum system, described coating chamber is vertical type cylinder shape, entirety Double-layer water cold type structure, front portion, described coating chamber is provided with feeding gate, the top of described coating chamber is provided with tubular heater, thermopair interface, the bottom of described coating chamber is provided with inlet mouth and planetary rotation work rest, described planetary rotation work rest bottom is connected with drive system, the sidewall of described coating chamber is provided with magnetic filtered arc source, the rear portion of described coating chamber is provided with molecular pump and vacuum system.
Further, described magnetic filtered arc source by arc electrode, cathode anchor, target, push away arc solenoid, focus on solenoid, elbow and form, described target is arranged on cathode anchor, the external striking power supply of described arc electrode and described cathode anchor, described in push away arc solenoid and described focusing solenoid and be arranged on the periphery that described arc electrode and cathode anchor produce electric arc place.
Further, described elbow is that 2 ° of crooked radians of tapering are the tapering elbow of 100 °, and the outside surface of described tapering elbow is provided with multiple arc of curvature solenoids, forms the bent magnetic field that intensity is 0～20 mT in tapering elbow.
Principle of work of the present utility model: the external striking power supply of the arc electrode in magnetic filtered arc source and cathode anchor, the impellent that focuses on solenoid generation is pushed electric arc to front, suitably regulate the coil current that pushes away arc solenoid and focus on solenoid, all right control cathode spot is in the scope of cathode surface motion, make negative electrode carry out even etching, obtain the cold plasma electric arc of a stable burning.Tapering elbow is the pipeline that plasma body passes through, and arc of curvature solenoid can produce the bent magnetic field that intensity is 0～20 mT, plays bending electric arc and filters the effect that the macroscopic particles such as neutral particle are rolled into a ball.Finally, cathode material ion enters coating chamber by the outlet of tapering elbow.Indoor in coating, set Heating temperature, vacuum tightness according to processing requirement, then be filled with N, C, H, O
2, CH
4deng gas, the ion after magnetic filters carries out plated film at workpiece surface.
The utlity model has following technique effect:
(1) the utility model adopts magnetic filtering function and high vacuum multiple arc target separately to add powerful ion source combination coating, multi beam arc source makes to produce vacuum arc discharge between its multi-faceted trigger electrode and graphite cathode, inspire the carbon plasma of high ionization level, adopt magnetic to filter coil filtering and fall macrobead and the neutral atom that arc source produces, what can make to arrive substrate is all almost carbon ion, prepare high quality by higher sedimentation rate, fine and close in hydrogen film.
(2) the utility model arranges multiple magnetic filtered arc source for depositing DLC coating, and multiple magnetic filtered arc source apportion is distributed in vacuum chamber sidewall and gate, and each target position has interchangeability, facilitates Function Extension and depositing operation adjustment; This device vacuum system configuration molecular pump is that master takes out pump, avoids the contamination phenomenon of vacuum pump oil in coating process; The utility model adopts PLC+ industry control tractor driver, automatic integrated control mode, man-machine interface touch screen operation modes.
(3) feature of the present utility model is to adopt tapering elbow (boring 2 ° curved 100 °) can overcome the right angle resistance that target is drawn, and can give full play to the suction and the effect that pushes away arc of striking, target is introduced to coating chamber smoothly and be deposited on workpiece.Target utilization of the present utility model reaches more than 60%.
The utility model coating apparatus quality of production is reliable and stable, can be applicable to produce in enormous quantities, is conducive to reduce production costs, and realizes industrialization.
Brief description of the drawings
Fig. 1 is vertical view of the present utility model.
Fig. 2 is left view of the present utility model.
Fig. 3 is the structural representation in magnetic filtered arc source.
Fig. 4 is the Raman spectrogram that adopts quasi-diamond film coating prepared by the utility model equipment.
Fig. 5 is the frictional coefficient detection figure that adopts quasi-diamond film coating prepared by the utility model equipment.
In accompanying drawing: 1-magnetic filtered arc source, 2-coating chamber, 3-vacuum system, 4-frame, 5-molecular pump, 6-planetary rotation work rest, 7-feeding gate, 8-thermopair interface, 9-tubular heater, 10-drive system, 11-inlet mouth, 12-cathode anchor, 13-arc electrode, 14-push away arc solenoid, 15-target, 16-elbow, 17-arc of curvature solenoid, 18-focusing solenoid.
Embodiment
Below in conjunction with accompanying drawing, the utility model is further elaborated.
As shown in Figure 1 and Figure 2, diamond-film-like coating apparatus, comprises coating chamber 2, planetary rotation work rest 6, magnetic filtered arc source 1, molecular pump 5, frame 4.
Coating chamber 2 is fixedly mounted in frame 4, and coating chamber 2 adopts vertical type cylinder shape structure Ф 900 × 900mm, stainless steel, and overall Double-layer water cold type structure, button fly front structure, is convenient to change sample, target 15 and routine maintenance.After vacuum chamber integral solder, heat-treat elimination welding stress and prevent post welding distortion.2 front portions, coating chamber have feeding gate 7 and viewing window, and the top of coating chamber 2 is provided with tubular heater 9, thermopair interface 8, inflation valve and reserved CF35 flange-interface.The rear portion of described coating chamber 2 is provided with molecular pump 5 and vacuum system 3.
The bottom of coating chamber 2 is provided with inlet mouth 11 and planetary rotation work rest 6, described planetary rotation work rest 6 bottoms are connected with drive system 10, described planetary rotation work rest 6 passes to planetary gears (planetary gears is made up of sun wheel, sun and planet gear and internal wheel) by direct-current machine by rotary power, drive the work hanger being connected with sun and planet gear to do rotation, drive again the big disk being connected with internal wheel to revolve round the sun simultaneously, thereby realize workpiece " rotation " and " revolution " in deposition process and ensure that workpiece is comprehensive, DLC films deposited layer uniformly.Planetary rotation work rest 6 aims in enormous quantities, industrialization Production design, and station is many, and substrate load scope is large, and speed of rotation is that 0～20RPM is adjustable, loading capacity: with 130 calculating of φ, can fill 2000/stove.
The sidewall of coating chamber 2 is provided with multiple magnetic filtered arc source 1, as shown in Figure 3, described magnetic filtered arc source 1 by arc electrode 13, cathode anchor 12, target 15, push away arc solenoid 14, focus on solenoid 18, elbow 16 and form.Described target 15 is arranged on cathode anchor 12, the external striking power supply of described arc electrode 13 and described cathode anchor 12, this striking power supply has can be identified the burning of electric arc or extinguish status bit, send as required striking pulse, restarting automatically after the arc automatic starting while startup and blow-out.Described arc solenoid 14 and the described focusing solenoid 18 of pushing away is arranged on the periphery that described arc electrode 13 and cathode anchor 12 produce electric arc place.Push away the surface that is transitioned into rapidly negative electrode after arc solenoid 14 can make electric arc ignite, also can prevent the electric arc backward water-cooled cathode support 12 roots burnings of igniting.The impellent that focusing solenoid 18 produces is pushed electric arc to front, suitably regulate the coil current that pushes away arc solenoid 14 and focus on solenoid 18, all right control cathode spot is in the scope of cathode surface motion, make negative electrode carry out even etching, obtain the cold plasma electric arc of a stable burning.Two coils all can produce the electromagnetic field of 0～40 mT.
As shown in Figure 3, described elbow 16 is that 2 ° of crooked radians of tapering are the tapering elbow 16 of 100 °, described tapering elbow 16, the outside surface of described tapering elbow 16 is provided with multiple arc of curvature solenoids 17, the bent magnetic field that is 0～20 mT in the interior formation intensity of tapering elbow 16, plays bending electric arc and filters the effect that the macroscopic particles such as neutral particle are rolled into a ball.The arc plating power supply open circuit voltage that system adopts is 65 V, and rated current is 25～300 A.Negative electrode connects the negative polarity end of arc plating power supply, the plus earth of arc plating power supply by cathode anchor 12.In whole device, do not adopt special anode, anode is made up of the tapering elbow 16 of ground connection, has simplified the structure of curved arc magnetic filter.High vacuum multi sphere ionic coating is a kind of ionization level the highest (70%～100%), high ion energy (40～100 eV) ［ 1 ］, high-speed, high efficiency new coatings technology.It is taking coated material as negative electrode, produces in a vacuum arc discharge, utilizes plasma body to carry out a kind of technology of deposition plating.
In discharge process, because electric arc has very high current density at cathode spot place, up to 106～108 A/cm2 ［ 2,3 ］, thereby, still there is very high temperature at cathode spot place.If this temperature is far away higher than the fusing point of negative electrode, there are single or multiple little molten baths (1～20 μ m ［ Isosorbide-5-Nitrae ］) in cathode surface, evaporates cathode material steam, and air pressure increases suddenly.Like this, cathode spot place produce with around the pressure gradient of vacuum, under the effect of this pressure gradient, can make molten metal spot break into include the electric arc stream of the compositions such as metal ion, metal vapors, macroscopic particle group.If this macroscopic particle group arrives coated workpieces surface, above just may being attached to, both caused workpiece surface coarse, again may be in film use procedure flake-off first, the initiating accident sequence of formation film rupture.In addition, in the electric arc of high-melting-point cathode material, (cathode material forming as sintering such as graphite), is being mingled with a large amount of blocky-shaped particles.Behind the surface of these particles arrival films, come off or adhere to, the film that attaching particles is grown subsequently covers, and causes the inclusion of film, becomes the defect of film, reduces the quality of film.Thereby, the arc source of Deposited By Vacuum Cathodic Arc is improved, to eliminate coarse grained particle cluster.Except adopting how much baffle plates, utilize the lorentz's force of magnetic field to charged particle, change the path of plasma body arrival workpiece surface, reach the object that electric arc is filtered, obtain high-quality film.The utility model adopts the method for 100 ° of tapering elbow 16 formula magnetic filters, adopts the structure without supplementary anode, has obtained good effect.
The utility model adopts magnetic filtering function and high vacuum multiple arc target separately to add powerful ion source combination coating, multi beam arc source makes to produce vacuum arc discharge between its multi-faceted trigger electrode and graphite cathode, inspire the carbon plasma of high ionization level, adopt magnetic to filter coil filtering and fall macrobead and the neutral atom that arc source produces, what can make to arrive substrate is all almost carbon ion, prepare high quality by higher sedimentation rate, fine and close in hydrogen film.
The actual effect of the quasi-diamond film coating that employing the utility model is made is as follows:
Fig. 4 is the Raman spectrogram that detects sample surfaces, can find out from detected result, and the coating of two positions detecting all demonstrates out two characteristic peaks of quasi-diamond, i.e. near graphite G peak near decolorizing carbon D peak and 1580cm-1 1350cm-1.Coating is typical quasi-diamond, and coating quality is good.
Fig. 5 be detect coating under unlubricated condition with the friction curve figure of silicon nitride ceramic ball to when mill, its average friction coefficient is about 0.13 as can be seen from Figure.
Claims (3)
1. diamond-film-like coating apparatus, it is characterized in that: it comprises coating chamber, planetary rotation work rest, magnetic filtered arc source, molecular pump, vacuum system, described coating chamber is vertical type cylinder shape, entirety Double-layer water cold type structure, front portion, described coating chamber is provided with feeding gate, the top of described coating chamber is provided with tubular heater, thermopair interface, the bottom of described coating chamber is provided with inlet mouth and planetary rotation work rest, described planetary rotation work rest bottom is connected with drive system, the sidewall of described coating chamber is provided with magnetic filtered arc source, the rear portion of described coating chamber is provided with molecular pump and vacuum system.
2. diamond-film-like coating apparatus according to claim 1, it is characterized in that: described magnetic filtered arc source by arc electrode, cathode anchor, target, push away arc solenoid, focus on solenoid, elbow and form, described target is arranged on cathode anchor, the external striking power supply of described arc electrode and described cathode anchor, described in push away arc solenoid and described focusing solenoid and be arranged on the periphery that described arc electrode and cathode anchor produce electric arc place.
3. diamond-film-like coating apparatus according to claim 2, it is characterized in that: described elbow is that 2 ° of crooked radians of tapering are the tapering elbow of 100 °, the outside surface of described tapering elbow is provided with multiple arc of curvature solenoids, forms the bent magnetic field that intensity is 0～20 mT in tapering elbow.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320862753.4U CN203700496U (en) | 2013-12-25 | 2013-12-25 | Device for coating diamond-like carbon films |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320862753.4U CN203700496U (en) | 2013-12-25 | 2013-12-25 | Device for coating diamond-like carbon films |
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| CN203700496U true CN203700496U (en) | 2014-07-09 |
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| CN201320862753.4U Expired - Fee Related CN203700496U (en) | 2013-12-25 | 2013-12-25 | Device for coating diamond-like carbon films |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106637207A (en) * | 2016-12-30 | 2017-05-10 | 纳峰真空镀膜（上海）有限公司 | Method for coating high temperature-resistant diamond on graphite substrate |
| CN103668061B (en) * | 2013-12-25 | 2018-12-14 | 湖南中航超强金刚石膜高科技有限公司 | A kind of coating apparatus of high adhesion force high rigidity low-friction coefficient diamond-film-like |
| CN112376026A (en) * | 2020-11-13 | 2021-02-19 | 深圳市鑫承诺环保产业股份有限公司 | Cathode magnetic filtration vacuum coating equipment |
-
2013
- 2013-12-25 CN CN201320862753.4U patent/CN203700496U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103668061B (en) * | 2013-12-25 | 2018-12-14 | 湖南中航超强金刚石膜高科技有限公司 | A kind of coating apparatus of high adhesion force high rigidity low-friction coefficient diamond-film-like |
| CN106637207A (en) * | 2016-12-30 | 2017-05-10 | 纳峰真空镀膜（上海）有限公司 | Method for coating high temperature-resistant diamond on graphite substrate |
| CN106637207B (en) * | 2016-12-30 | 2019-08-23 | 纳峰真空镀膜（上海）有限公司 | A kind of high temperature resistant diamond-like coating method in graphite substrate |
| CN112376026A (en) * | 2020-11-13 | 2021-02-19 | 深圳市鑫承诺环保产业股份有限公司 | Cathode magnetic filtration vacuum coating equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Chen Yuanda Inventor after: Yang Zhongkai Inventor after: Wang Shengyun Inventor after: He Jing Inventor after: Yang Yi Inventor after: Shen Jun Inventor before: Chen Yuanda Inventor before: Wang Shengyun Inventor before: He Jing |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170720 Address after: 430040 No. 999, future city, East Lake New Technology Development Zone, Hubei, Wuhan Patentee after: WUHAN CENTURY ZHONGHANG SUPERPOWER DIAMOND FILM HIGH-TECH CO., LTD. Address before: Changde Hunan City Industrial Park 415200 Anfu county of Linli Province Patentee before: HUNAN ZHONGHANG SUPER DIAMOND FILM HIGH-TECH CO., LTD. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140709 Termination date: 20201225 |