CN104457726B - A kind of three axis microelectromechanicdevice gyroscopes - Google Patents
A kind of three axis microelectromechanicdevice gyroscopes Download PDFInfo
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Abstract
The present invention relates to a kind of three axis microelectromechanicdevices gyroscope, including：Centrally located annular detection electric capacity；Two groups of driving electric capacity, positioned at the annular detection outside of electric capacity and symmetrical in the both sides of origin along y-axis；Two group of second detection electric capacity, positioned at the annular detection outside of electric capacity and symmetrical in the both sides of origin along x-axis；Linkage portion, respectively the outer with the movable driving electrodes, the movable detecting electrode and the annular top crown be connected.Three axis microelectromechanicdevices gyroscope of the invention is designed using single structure, and condenser type electrostatic drive and differential capacitor detect that type of drive is simple, compact conformation, be conducive to reducing gyroscope volume, batch production be adapted in technique, and good certainty of measurement and sensitivity can be realized.
Description
Technical field
The present invention relates to a kind of micro-electro-mechanical gyroscope, and in particular to a kind of axis microelectromechanicdevice of single structure three with Decoupling Characteristics
Gyroscope.
Background technology
Microelectromechanical systems (Micro Electro Mechanical System), abbreviation MEMS is in microelectronics skill
Grow up on the basis of art integrate micromachine, microsensor, microactrator, signal transacting, one of Based Intelligent Control
Emerging science and technology.
Micro-electro-mechanical gyroscope is the inertia device based on MEMS technology, the angular speed for measuring object of which movement.It has
Small volume, reliability is high, with low cost, is adapted to the characteristics of producing in enormous quantities, therefore with wide market prospects, can be applied to
Including the wide spectrum including consumer electronics, Aero-Space, automobile, Medical Devices and weapon.
Microelectromechanicgyroscope gyroscope instrument system generally includes drive part and detection part, and its design has certain complexity, especially
It is the micro-electro-mechanical gyroscope for being related to three axles to measure simultaneously when.Current three-axis gyroscope mainly by by three single axis gyroscopes or
One Z axis gyroscope and plane monitoring-network gyroscope are carried out the design of orthogonal configuration to realize by person, but this group
The mode of conjunction is unfavorable for the miniaturization of device, therefore the three-axis gyroscope of exploitation single structure has become micro-electro-mechanical gyroscope now
Design the important directions of research and development.
The content of the invention
It is an object of the invention to provide a kind of three axis microelectromechanicdevice gyroscopes of single structure design of good performance, to realize
Above-mentioned purpose, the present invention is adopted the following technical scheme that：
A kind of three axis microelectromechanicdevice gyroscopes, including：
Substrate；
Positioned at the annular detection electric capacity of substrate center position, its center is origin；
The annular detection electric capacity include being fixed on four bottom crowns on substrate and just to four bottom crowns simultaneously
And it is suspended in the annular top crown above the bottom crown；Four bottom crowns are divided into two groups：First group of bottom crown exists along x-axis
The both sides of origin are symmetrical, and the annular top crown of the corresponding part of first group of bottom crown is engaged one group first of composition
Detection electric capacity；Second group of bottom crown is symmetrical in the both sides of origin along y-axis, the corresponding part of second group of bottom crown
Annular top crown is engaged another group first detection electric capacity of composition；The annular top crown at the origin is fixed by the first anchor point
In on substrate；
Two groups of driving electric capacity, positioned at the annular detection outside of electric capacity and symmetrical in the both sides of origin along y-axis；Often
Group is described to drive electric capacity all including the movable driving electrodes worked in coordination and fixed drive electrode；
Two group of second detection electric capacity, symmetrically divides positioned at the outside of the annular detection electric capacity and along x-axis in the both sides of origin
Cloth；The second detection electric capacity all includes the movable detecting electrode and fixed test electrode worked in coordination described in every group；
Linkage portion, it is outer with the movable driving electrodes, the movable detecting electrode and the annular top crown respectively
Along connection；Wherein, it is described to drive electric capacity for providing driving force along the y-axis direction, and driven by the linkage portion described
Movable detecting electrode does line motion and drives the annular top crown to be rotated motion around first anchor point along the y-axis direction.
Further preferred technical scheme, the movable driving electrodes and fixed drive electrode are comb-like electrode.
Further preferred technical scheme, the movable detecting electrode and fixed test electrode are comb-like electrode.
Further preferred technical scheme, the annular top crown is toroidal or square ring-shaped.
Further preferred technical scheme, two bottom crown shapes in first group of bottom crown group are identical, and described
Two bottom crown shapes in two groups of bottom crown groups are identical.
Further preferred technical scheme, the linkage portion includes rectangular outer frame and inside the rectangular outer frame
The first linkage portion；The rectangular outer frame surrounds the annular detection electric capacity, and the rectangular outer frame passes through the first linkage portion
Outer with the annular top crown is connected；Two groups of driving electric capacity is symmetrically distributed in the rectangular outer frame parallel to x-axis
Both sides, side of the movable driving electrodes with the rectangular outer frame parallel to x-axis is connected；Described two group second is detected electricity
Appearance is symmetrically distributed in both sides of the rectangular outer frame parallel to y-axis, and the movable detecting electrode is flat with the rectangular outer frame
Row is connected in the side of y-axis；Wherein, the driving electric capacity drives the rectangular outer frame to do line motion along the y-axis direction, along y-axis
The rectangular outer frame that line motion is done in direction drives the annular top crown to be done around first anchor point by first linkage portion
Rotational motion.
Further preferred technical scheme, first linkage portion includes the first linkage beam, two lever beams, two second
Linkage beam, the 3rd linkage beam；It is described first linkage beam and it is described second linkage beam each parallel to y-axis set, the lever beam and
3rd linkage beam is set each parallel to x-axis；One end of two lever beams is connected to be formed with the described first linkage beam respectively
The frame structure of one end open, the annular detection electric capacity is located between two lever beams；The second linkage beam is on x
Axial symmetry and between the lever beam and the rectangular outer frame, one end of the second linkage beam connects neighbouring one
Lever beam, the other end connects the rectangular outer frame；The middle part of one end connection the first linkage beam of the 3rd linkage beam,
The other end is connected with the outer of the annular top crown.
Further preferred technical scheme, the other end of the lever beam is support end, the support of two lever beams
End is respectively fixed on the substrate by one second anchor point.
Further preferred technical scheme, first linkage portion also includes two support beams, and two support beams are equal
Set parallel to y-axis；Two support beams on x-axis it is symmetrical and positioned at the frame structure and the annular detection electric capacity it
Between, one end connects a neighbouring lever beam, and the other end is respectively fixed on the substrate by one the 3rd anchor point.
Further preferred technical scheme, the second linkage beam is located at the support of lever beam with the link position of lever beam
In the middle of the tie point of end and lever beam and support beam.
Further preferred technical scheme, first linkage portion also includes rectangular inner frames and the second linkage portion；It is described
Rectangular inner frames are located in the rectangular outer frame and surround the frame structure, and the rectangular outer frame is by the second linkage
Portion is connected with the rectangular inner frames；The second linkage beam is located between the lever beam and the rectangular inner frames, described
Second linkage beam is connected by the rectangular inner frames with the rectangular outer frame；Wherein, the rectangle of line motion is done along the y-axis direction
Outer framework drives the rectangular inner frames to make line along the y-axis direction and moves by the second linkage portion.
Further preferred technical scheme, second linkage portion is that Z-type decouples beam, and one end of the Z-type decoupling beam connects
Side of the rectangular inner frames parallel to y-axis is connect, the other end connects side of the rectangular outer frame parallel to y-axis.
Further preferred technical scheme, the Z-type decoupling beam is four, is respectively distributed to the four of the rectangular inner frames
Around individual angle.
Further preferred technical scheme, also including support beam group；The support beam group is located at the annular detection electric capacity
In annular distance and interior along being connected with the annular top crown, the support beam group at the origin is fixed on by first anchor point
On substrate.
Further preferred technical scheme, the support beam group includes concentric interior annular and outer toroid, two inner ring branch
Support beam, two inner and outer ring tie-beams and four outer shroud tie-beams；One end of four outer shroud tie-beams respectively with outer toroid
Connection, the other end is connected with the interior edge of the annular top crown respectively；The outer shroud tie-beam is divided into two one groups, one of which
It is distributed along x-axis, another group is distributed along y-axis；One end of two inner ring support beams is connected with interior annular respectively, and the other end passes through
First anchor point is fixed on the substrate；One end of two inner and outer ring tie-beams is connected with interior annular respectively, another
End is connected with outer toroid respectively；The inner ring support beam is distributed along y-axis and the inner and outer ring tie-beam is distributed along x-axis, or, institute
Inner ring support beam is stated to be distributed along y-axis along x-axis distribution and the inner and outer ring tie-beam.
Three axis microelectromechanicdevices gyroscope of the invention is designed using single structure, and condenser type electrostatic drive and differential capacitor are detected,
Type of drive is simple, compact conformation, is conducive to reducing gyroscope volume, batch production is adapted in technique, and can realize good
Good certainty of measurement and sensitivity.
Brief description of the drawings
Fig. 1,2 are the schematic perspective view of three axis microelectromechanicdevices gyroscope first embodiment of the invention.
Fig. 3,4 are the floor map of three axis microelectromechanicdevices gyroscope first embodiment of the invention.
Fig. 5 is the structural representation of support beam group first embodiment of the present invention.
Fig. 6 is the structural representation of support beam group second embodiment of the present invention.
Fig. 7 is the structural representation of support beam group 3rd embodiment of the present invention.
Fig. 8 is the structural representation of linkage portion embodiment of the present invention.
Fig. 9 is the floor map of three axis microelectromechanicdevices gyroscope second embodiment of the invention.
Figure 10 is the floor map of three axis microelectromechanicdevices gyroscope 3rd embodiment of the invention.
Figure 11 is the floor map of three axis microelectromechanicdevices gyroscope fourth embodiment of the invention.
Description of reference numerals
1 substrate；
8 annular top crowns, first group of bottom crown of 6a, second group of bottom crown of 6b；
16 movable driving electrodes, 4 fixed drive electrodes；
17 movable detecting electrodes, 3 fixed test electrodes；
13 rectangular inner frames, 14 rectangular outer frames, 15Z types decoupling beam, 18 support beam groups；
9 first linkage beams, 10 lever beams, 11 second linkage beams, 12 support beams, 24 the 3rd linkage beams；
19 interior annulars, 20 outer toroids, 21 inner ring support beams, 22 inner and outer ring tie-beams, 23 outer shroud tie-beams；
101 tie-beams, 102 support beams, 103 annulus；
The anchor points of 5a first, the anchor points of 5b second, the anchor points of 5c the 3rd.
Specific embodiment
Below with reference to shown in Fig. 1~11, embodiments of the invention are described in detail, the example of the embodiment is shown in the accompanying drawings
Go out, wherein same or similar label represents same or similar element or the unit with same or like function from start to finish
Part.Embodiment below with reference to Description of Drawings is exemplary, is only used for explaining the present invention, and can not be construed to this hair
Bright limitation.
Referring to the first embodiment that Fig. 1-Fig. 4 is three axis microelectromechanicdevices gyroscope of the invention, including：
Substrate 1, the central position of substrate 1 has an annular detection electric capacity, and definition detects that the center of electric capacity is origin with annular
O, the place plane of substrate 1 for x/y plane rectangular coordinate system in space, the z-axis of rectangular coordinate system in space perpendicular to substrate 1, such as Fig. 1
It is shown.
With reference to shown in Fig. 3 and Fig. 5, annular detection electric capacity includes four bottom crowns being fixed on substrate and just to four
Bottom crown and the annular top crown 8 above bottom crown is suspended in, the shape of bottom crown arrangement composition and the shape of annular top crown 8
Shape matches.
Four bottom crowns can be divided into two groups：First group of bottom crown 6a along x-axis the both sides of origin are symmetrical and group in
Two bottom crown shapes are identical, and the annular top crown of first group of corresponding part of bottom crown 6a is engaged one group first of composition and examines
Survey electric capacity A；Second group of bottom crown 6b along y-axis the both sides of origin are symmetrical and group in two bottom crown shapes it is identical,
The annular top crown of two groups of corresponding parts of bottom crown 6b is engaged composition first and detects electric capacity B.
Annular top crown 8 is suspended in the top of bottom crown by supporting construction, and supporting construction is located at annular detection electric capacity
It is connected in annular distance and with the interior edge of annular top crown 8, supporting construction at the origin is fixed on substrate by the first anchor point 5a,
Because supporting construction only center is fixed, therefore annular top crown 8 can do angular oscillation around any one axles of xyz under external force.
The first embodiment of supporting construction is shown with reference to Fig. 5, supporting construction includes 103, three tie-beams of an annulus
101 and a support beam 102；Wherein, two tie-beams 101 are distributed along y-axis, and the 3rd tie-beam 101 is distributed and position along x-axis
In the positive direction of x-axis, one end of tie-beam 101 is connected with annulus 103, and the other end is connected with the interior edge of annular top crown 8；Support
Beam 102 is distributed and positioned at the negative direction of x-axis along x-axis, and one end connection annulus 103, other end at the origin passes through the first anchor point 5a
It is fixed on substrate.It is of course also possible to be that Article 3 tie-beam 101 is located at the negative direction and support beam 102 of x-axis positioned at x-axis
Positive direction.
Show the second embodiment of supporting construction with reference to Fig. 6, supporting construction include an annulus 103, two tie-beams 101,
And two support beams 102；Wherein, two tie-beams 101 are distributed along y-axis, and one end of tie-beam 101 is connected with annulus 103, separately
One end is connected with the interior edge of annular top crown 8；Two support beams 102 are distributed along x-axis, one end connection annulus 103, and the other end is in original
It is fixed on substrate by the first anchor point 5a at point.
It show the 3rd embodiment of supporting construction with reference to Fig. 4 and 7, supporting construction is support beam group 18, including concentric
Interior annular 19 and the inner and outer ring tie-beam 22 of inner ring support beam 21, two of outer toroid 20, two and four outer shroud tie-beams 23；
Four one end of outer shroud tie-beam 23 is connected with outer toroid 20 respectively, and the other end is connected with the interior edge of annular top crown 8 respectively；Outward
Ring tie-beam 23 is divided into two one group, and one of which is distributed along x-axis, and another group is distributed along y-axis, and four outer shroud tie-beams 23 are uniform
Split the periphery of outer toroid 20；Two one end of inner ring support beam 21 is connected with interior annular 19 respectively, and the other end passes through the first anchor
Point 5a is fixed on substrate 1；Two one end of inner and outer ring tie-beam 22 is connected with interior annular 19 respectively, the other end respectively with it is cylindrical
Ring 20 is connected；Inner ring support beam 21 is distributed along y-axis and inner and outer ring tie-beam 22 is distributed along x-axis.In other embodiments, it is also possible to
Inner and outer ring tie-beam 22 is distributed along y-axis along x-axis distribution to set inner ring support beam 21.
From the cross sectional portion of Fig. 2, it can be seen that the annular interior edge of top crown 8 is connected with the support beam group 18 in annular distance, prop up
The at the origin of support beam group 18 is fixed on substrate by the first anchor point 5a, and annular top crown 8 hangs by the support of the first anchor point 5a
It is placed in bottom crown top.Because support beam group only center is fixed and very thin with certain elasticity, therefore annular top crown 8 is in external force
Angular oscillation can be done under effect around any one axles of xyz.
Wherein, step 8 is toroidal in the annular in above example, but should be noted that the present invention not
It is defined in toroidal." annular " refers to the structure that center is provided with hole in the present invention, such as interior is all circular circle along outer
Ring-shaped, it is interior be all along outer square square ring-shaped, outer be circular and interior edge for square shape, outer are square and interior
Along being circular shape, cross-like shape of center drilling etc., these belong to equivalent embodiment in protection of the invention
In the range of.
Wherein, annular top crown 8 and supporting construction can directly be structure as a whole, such as etch shape after being integrated composition
Into.
Wherein, the annular variable capacitance being made up of annular detection electric capacity and supporting construction：First group of bottom crown 6a exists along x-axis
The both sides of origin are symmetrical, and second group of bottom crown 6b is symmetrical in the both sides of origin along y-axis, so that each with annular top crown
One group of detection electric capacity is formed, annular top crown is fixed and suspended by the anchor point of center allows its own any one around xyz
Axle does angular oscillation.This variable capacitance design can measure the deformation in both direction, at the same also have deformation when resistance it is small and
The big advantage of deformation space, can realize good certainty of measurement and sensitivity.Annular variable capacitor structure of the invention is simple
It is compact, be conducive to reducing the volume of MEMS, batch production is adapted in technique, except being applied to three axis accelerometer of the invention
On instrument, can be also used for making plane double shaft gyroscope, z-axis gyroscope and micro-actuator part, such as microswitch.
With reference to shown in Fig. 8, as the micro electronmechanical deformable structure of linkage portion, including：Rectangular inner frames 13, rectangular outer frame
14th, four articles of Z-types decoupling beam 15, first, 9, two articles of beam of linkage, 10, two article second of lever beam linkage beam, 11, two articles of support beams 12, the
Three linkage beams 24.
The area-encasing rectangle inner frame 13 of rectangular outer frame 14, the center of rectangular outer frame 14 and the center of rectangular inner frames 13 are just
To origin,
Rectangular inner frames 13 decouple beam 15 and are connected with rectangular outer frame 14 by 4 Z-types, and Z-type decoupling beam 15 is distributed respectively
Around four angles of rectangular inner frames 13 and it is symmetrically distributed in both sides of the rectangular inner frames 13 parallel to y-axis；Z-type decouples beam
15 one end connects side of the rectangular inner frames 13 parallel to y-axis, and the other end connects side of the rectangular outer frame 14 parallel to y-axis
Side.
, wherein it is desired to explanation, Z-type decoupling beam 15 can be other quantity, it is only necessary to which one end of Z-type decoupling beam 15 connects
Side of the rectangular inner frames 13 parallel to y-axis is connect, the other end connects side of the rectangular outer frame 14 parallel to y-axis.It is preferred that
, Z-type decoupling beam is divided into two groups, is symmetrically distributed in both sides of the rectangular inner frames 13 parallel to y-axis.
The first linkage linkage of beam 9, second beam 11, support beam 12 are set each parallel to y-axis, the linkage beam of lever beam 10 and the 3rd
24 are set parallel to x-axis.
Two lever beams 10 are symmetrical on x-axis, and two one end of lever beam 10 are connected to be formed with the first linkage beam 9 respectively
The frame structure of one end open, frame structure is located inside rectangular inner frames 13, and annular detection electric capacity is located at two lever beams 10
Between；
Second linkage beam 11 is symmetrical and between lever beam 10 and rectangular inner frames 13 on x-axis, the second linkage beam 11
One end connect a neighbouring lever beam 10, the other end is connected to rectangular inner frames 13, thus by rectangular inner frames 13 with
Rectangular outer frame 14 is connected；
The middle part of one end connection the first linkage beam 9 of the 3rd linkage beam 24, the other end connects with the outer of annular top crown 8
Connect.
Two support beams 12 are on x-axis symmetrically and between frame structure and annular detection electric capacity, and one end connection is neighbouring
A lever beam 10, the other end is respectively fixed on substrate 1 by one the 3rd anchor point 5c.
Wherein, the other end of lever beam 10, i.e., the one end not being connected with the first linkage beam 9, is support end, two lever beams
10 support end is respectively fixed on substrate 1 by one second anchor point 5b.
Wherein, the link position of the second linkage beam 11 and lever beam 10 be located at the support end and lever beam 10 of lever beam 10 with
In the middle of the tie point of support beam 12.
Wherein, two the second anchor point 5b are symmetrical arranged on x-axis, and two the 3rd anchor point 5c are symmetrical arranged on x-axis, this
Symmetrical fixed setting is more uniformly stressed rectangle internal and external frame.
Micro electronmechanical deformable structure of the invention, when being acted on by external force, outer framework, inner frame and frame structure
The effect of distortion can be deformed, while also having the advantages that deformation drag small deformation space is big such that it is able to realize good
Certainty of measurement and sensitivity.Micro electronmechanical deformable structure of the invention is simply compact, is conducive to reducing the body of MEMS
Product, is adapted to batch production in technique.Except being applied on three-axis gyroscope of the invention, can also be real in mechanical structure aspect
The amplification of existing micro-displacement, is conducive to improving the detection sensitivity and signal to noise ratio of sensor, and reduces sensitive structure to electricity
The requirement of road system.
Two groups of driving electric capacity, are symmetrically distributed in both sides of the rectangular outer frame 14 parallel to x-axis；Every group of driving electric capacity all includes
The movable driving electrodes 16 and fixed drive electrode 4 worked in coordination, movable driving electrodes 16 are with rectangular outer frame 14 parallel to x-axis
Side connection, fixed drive electrode 4 is fixed on substrate 1.
Two group of second detection electric capacity, is symmetrically distributed in both sides of the rectangular outer frame 14 parallel to y-axis；Every group second is detected electricity
Holding all includes the movable detecting electrode 17 and fixed test electrode 3 worked in coordination, movable detecting electrode 17 and rectangular outer frame 14
Parallel to the side connection of y-axis, fixed test electrode 3 is fixed on substrate 1.
Wherein, the movable driving electrodes 16 and fixed drive electrode 4 in the present embodiment, and movable detecting electrode 17 and solid
Determine detecting electrode 3 and be comb-like electrode.
The operation principle of three axis microelectromechanicdevice gyroscope first embodiments of the invention is as follows：
It is described to drive electric capacity for providing driving force along the y-axis direction, when being driven by the external world, rectangular outer frame 14,
Movable driving electrodes 16 and movable detecting electrode 17 do line motion along the y-axis direction, and Z-shaped decoupling beam 15 drives rectangular inner frames 13
Line motion is done along the y-axis direction, while the second linkage dragging lever of beam 11 beam 10 does line motion along the y-axis direction, lever beam 10 is suitable
In lever, therefore the first linkage beam 9 can be driven to do line motion in y-axis direction, wherein the direction of motion and second of the first linkage beam 9
Linkage beam 11 is opposite.Because the first linkage beam 9 is connected by the 3rd linkage beam 24 with the outer of annular top crown 8, and in annular
Pole plate 8 is fixed on substrate 1 by the at the origin of support beam group 18 through the first anchor point 5a, therefore annular top crown 8 can be first
Rotated around the first anchor point 5a under the dragging of linkage beam 9, i.e., do angular oscillation around z-axis.Therefore powered motion includes rectangle internal and external frame
The angular oscillation of line motion along the y-axis direction and annular top crown 8 around z-axis.
When gyroscope is rotated around x-axis, due to the effect of coriolis force, annular top crown 8 can do angular oscillation around y-axis, thus
Cause the change of first group of bottom crown 6a and the spacing of annular top crown 8, cause the change of the first detection electric capacity A, the electric capacity becomes
Change is directly proportional to gyroscope around the angular speed that x-axis is rotated, therefore can be used to measure x-axis angular speed.Now first detection electric capacity B and
Second detection electric capacity is unaffected, or influence very little can be ignored.
When gyroscope is rotated around y-axis, due to the effect of coriolis force, annular top crown 8 can do angular oscillation around x-axis, thus
Cause the change of second group of bottom crown 6b and the spacing of annular top crown 8, cause the change of the first detection electric capacity B, the electric capacity becomes
Change is directly proportional to gyroscope around the angular speed that y-axis is rotated, therefore can be used to measure y-axis angular speed.Now first detection electric capacity A and
Second detection electric capacity is unaffected, or influence very little can be ignored.
When gyroscope is rotated around z-axis, the annular top crown 8 itself for doing angular oscillation around z-axis is unaffected.Due to coriolis force
Effect, rectangular outer frame 14 and rectangular inner frames 13 are subject to the active force in x-axis direction, but because lever beam 10 is rigidity and one
End is securing, so motion of the rectangular inner frames 13 in x-axis direction is limited, does not also interfere with annular top crown 8, because
This annular detection electric capacity is unaffected.Due to the decoupling function of Z-shaped decoupling beam 15, the Z-shaped decoupling beam of rectangle internal and external frame is connected
15 will not to rectangular outer frame 14 x-axis to motion cause limitation, therefore, rectangular outer frame 14 can along the x-axis direction line motion,
Cause the change of the second detection electric capacity (being made up of movable detecting electrode 17 and fixed test electrode 3), the capacitance variations are reflection
Angular speed of the gyroscope around z-axis, therefore can be used for detecting z-axis angular speed.
In the present embodiment, lever beam 10 is gone back in addition to being connected with support beam 12 with the first linkage linkage beam 11 of beam 9, second
Fixed on substrate 1 (i.e. the second anchor point 5b at) by support end, and the second linkage beam 11 and lever beam 10 link position
In the middle of the support end and lever beam 10 of lever beam 10 and the tie point of support beam 12, such case is to rectangle internal and external frame
Motion is good, because：After the free end of the script of lever beam 10 is fixed as into support end, in the second anchor point 5b and branch
Equivalent to beam on two supports, this section of deformation pattern of lever beam 10 is what intermediate drum two ends were fixed to lever beam 10 between support beam 12
Form, it will not become perpendicular to the state of y-axis, if at this moment the second linkage beam 11 is in intermediate position, the second linkage beam
11 will not be subject to moment of torsion and then cause to rotate, therefore can be further ensured that rectangular inner frames 13 only do y-axis motion, and if partially
From centre position, lever beam 10 can then change perpendicular to the state of y-axis, and this deflection can influence the fortune of rectangle internal and external frame
Dynamic model state.
Referring to the floor map of Fig. 9 three axis microelectromechanicdevice gyroscope second embodiments of the present invention, it can be seen that and
The difference of first embodiment essentially consists in the difference of linkage portion, specifically eliminates rectangular inner frames.
Referring to the floor map that Figure 10 is three axis microelectromechanicdevices gyroscope 3rd embodiment of the invention, can from figure
Go out, essentially consisted in the difference of second embodiment and drive the structure of electric capacity and the second detection electric capacity different：Driven in second embodiment
Dynamic condenser and the second detection electric capacity are comb teeth-shaped electric capacity, and the change based on overlapping length between pole plate is detected；3rd implements
It is special-shaped tabular electric capacity that electric capacity and the second detection electric capacity are driven in example, and the change based on gap between pole plate is detected.
With reference to the floor map that Figure 11 is three axis microelectromechanicdevices gyroscope fourth embodiment of the invention, can from figure
Go out, it is different with the structure that the difference of 3rd embodiment essentially consists in linkage portion：Electric capacity is driven to rely on a square in 3rd embodiment
Shape outer framework transmits drive force to the second detection electric capacity；Driving electric capacity will by an octagon outer framework in fourth embodiment
Driving force passes to the second detection electric capacity.
As can be seen that driving electric capacity of the invention and the second inspection from the second to four embodiment of three axis microelectromechanicdevice gyroscopes
Survey electric capacity and be not limited to comb teeth-shaped electric capacity, the structure of linkage portion is also not limited to the concrete structure in embodiment.For the present invention
For, when driving electric capacity to be driven along the y-axis direction, as long as can realize driving movable detecting electrode along y by linkage portion
Direction of principal axis does line motion and drives annular top crown to be rotated motion around the first anchor point, can realize the connection of this function
Dynamic portion's design should all belong in protection scope of the present invention.
Three axis microelectromechanicdevices gyroscope of the invention is designed using single structure, and condenser type electrostatic drive and differential capacitor are detected,
Type of drive is simple, compact conformation, is conducive to reducing gyroscope volume, batch production is adapted in technique, and can realize good
Good certainty of measurement and sensitivity.
Construction of the invention, feature and action effect is described in detail according to the embodiment shown in schema above, the above is only
It is presently preferred embodiments of the present invention, but the present invention is not to limit practical range shown in drawing, it is every according to conception institute of the invention
The change of work, or be revised as the Equivalent embodiments of equivalent variations, still without departing from specification and diagram covered it is spiritual when, all should
Within the scope of the present invention.
Claims (15)
1. a kind of three axis microelectromechanicdevices gyroscope, it is characterised in that including：
Substrate；
Positioned at the annular detection electric capacity of substrate center position, its center is origin；
The annular detection electric capacity includes four bottom crowns being fixed on substrate and just to four bottom crowns and hangs
The annular top crown being placed in above the bottom crown；Four bottom crowns are divided into two groups：First group of bottom crown is along x-axis in origin
Both sides it is symmetrical, the annular top crown of the corresponding part of first group of bottom crown is engaged one group first of composition and detects
Electric capacity；Second group of bottom crown is symmetrical in the both sides of origin along y-axis, the annular of the corresponding part of second group of bottom crown
Top crown is engaged another group first detection electric capacity of composition；The annular top crown at the origin is fixed on base by the first anchor point
On plate；
Two groups of driving electric capacity, positioned at the annular detection outside of electric capacity and symmetrical in the both sides of origin along y-axis；Every group of institute
State and drive electric capacity all including the movable driving electrodes worked in coordination and fixed drive electrode；
Two group of second detection electric capacity, positioned at the annular detection outside of electric capacity and symmetrical in the both sides of origin along x-axis；Often
Group the second detection electric capacity all includes the movable detecting electrode and fixed test electrode worked in coordination；
Linkage portion, respectively with the outer company of the movable driving electrodes, the movable detecting electrode and the annular top crown
Connect；Wherein, it is described to drive electric capacity for providing driving force along the y-axis direction, and driven by the linkage portion described movable
Detecting electrode does line motion and drives the annular top crown to be rotated motion around first anchor point along the y-axis direction.
2. three axis microelectromechanicdevices gyroscope as claimed in claim 1, it is characterised in that：
The movable driving electrodes and fixed drive electrode are comb-like electrode.
3. three axis microelectromechanicdevices gyroscope as claimed in claim 1, it is characterised in that：
The movable detecting electrode and fixed test electrode are comb-like electrode.
4. three axis microelectromechanicdevices gyroscope as claimed in claim 1, it is characterised in that：
The annular top crown is toroidal or square ring-shaped.
5. three axis microelectromechanicdevices gyroscope as claimed in claim 1, it is characterised in that：
Two bottom crown shapes in first group of bottom crown group are identical, two bottom crowns in second group of bottom crown group
Shape is identical.
6. three axis microelectromechanicdevices gyroscope as claimed in claim 1, it is characterised in that：
The linkage portion includes rectangular outer frame and the first linkage portion inside the rectangular outer frame；
The rectangular outer frame surrounds the annular detection electric capacity, and the rectangular outer frame passes through the first linkage portion and the annular
The outer connection of top crown；
Two groups of driving electric capacity is symmetrically distributed in both sides of the rectangular outer frame parallel to x-axis, the movable driving electrodes
Side with the rectangular outer frame parallel to x-axis is connected；
Two group of second detection electric capacity is symmetrically distributed in both sides of the rectangular outer frame parallel to y-axis, the movable detection
Side of the electrode with the rectangular outer frame parallel to y-axis is connected；
Wherein, the driving electric capacity drives the rectangular outer frame to do line motion along the y-axis direction, and line motion is done along the y-axis direction
Rectangular outer frame drives the annular top crown to be rotated motion around first anchor point by first linkage portion.
7. three axis microelectromechanicdevices gyroscope as claimed in claim 6, it is characterised in that：
First linkage portion includes the first linkage beam, two articles of lever beams, two article of second linkage beam, the 3rd linkage beams；
The first linkage beam and the second linkage beam are each parallel to y-axis setting, the lever beam and the 3rd linkage Liang Junping
Row is set in x-axis；
One end of two lever beams is connected to form the frame structure of one end open with the described first linkage beam respectively, described
Annular detection electric capacity is located between two lever beams；
The second linkage beam is symmetrical and between the lever beam and the rectangular outer frame on x-axis, and described second
One end of dynamic beam connects a neighbouring lever beam, and the other end connects the rectangular outer frame；
The middle part of one end connection the first linkage beam of the 3rd linkage beam, the outer of the other end and the annular top crown
Connection.
8. three axis microelectromechanicdevices gyroscope as claimed in claim 7, it is characterised in that：
The other end of the lever beam is support end, and the support end of two lever beams is respectively fixed on institute by one second anchor point
State on substrate.
9. three axis microelectromechanicdevices gyroscope as claimed in claim 7, it is characterised in that：
First linkage portion also includes two support beams, and two support beams are set each parallel to y-axis；
On x-axis symmetrically and between the frame structure and the annular detection electric capacity, one end connects two support beams
An adjoining near lever beam, the other end is respectively fixed on the substrate by one the 3rd anchor point.
10. three axis microelectromechanicdevices gyroscope as claimed in claim 9, it is characterised in that：
The other end of the lever beam is support end, and the support end of two lever beams is respectively fixed on institute by one second anchor point
State on substrate；
The second linkage beam is located at the support end and lever beam of lever beam and the connection of support beam with the link position of lever beam
In the middle of point.
11. three axis microelectromechanicdevices gyroscopes as claimed in claim 7, it is characterised in that：
First linkage portion also includes rectangular inner frames and the second linkage portion；
The rectangular inner frames are located in the rectangular outer frame and surround the frame structure, and the rectangular outer frame passes through
Second linkage portion is connected with the rectangular inner frames；
The second linkage beam is located between the lever beam and the rectangular inner frames, and the second linkage beam passes through the square
Shape inner frame is connected with the rectangular outer frame；
Wherein, the rectangular outer frame that line motion is done along the y-axis direction drives the rectangular inner frames along y-axis side by the second linkage portion
Moved to line is made.
12. three axis microelectromechanicdevices gyroscopes as claimed in claim 11, it is characterised in that:
Second linkage portion is that Z-type decouples beam, and one end of the Z-type decoupling beam connects the rectangular inner frames parallel to y-axis
Side, the other end connects the side of the rectangular outer frame parallel to y-axis.
13. three axis microelectromechanicdevices gyroscopes as claimed in claim 12, it is characterised in that：
The Z-type decoupling beam is four, is respectively distributed to around four angles of the rectangular inner frames.
14. three axis microelectromechanicdevices gyroscopes as claimed in claim 1, it is characterised in that：
Also include support beam group；
The support beam group is located in the annular detection electric capacity annular distance and is connected with the interior edge of the annular top crown, the branch
Support beam group at the origin is fixed on substrate by first anchor point.
15. three axis microelectromechanicdevices gyroscopes as claimed in claim 14, it is characterised in that：
The support beam group include concentric interior annular and outer toroid, two inner ring support beams, two inner and outer ring tie-beams and
Four outer shroud tie-beams；
One end of four outer shroud tie-beams is connected with outer toroid respectively, the other end respectively with the interior edge of the annular top crown
Connection；The outer shroud tie-beam is divided into two one group, and one of which is distributed along x-axis, and another group is distributed along y-axis；
One end of two inner ring support beams is connected with interior annular respectively, and the other end is fixed on described by first anchor point
On substrate；
One end of two inner and outer ring tie-beams is connected with interior annular respectively, and the other end is connected with outer toroid respectively；
The inner ring support beam is distributed along y-axis and the inner and outer ring tie-beam is distributed along x-axis, or, the inner ring support beam is along x
Axle is distributed and the inner and outer ring tie-beam is distributed along y-axis.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410710065.5A CN104457726B (en) | 2014-11-27 | 2014-11-27 | A kind of three axis microelectromechanicdevice gyroscopes |
| EP19180147.1A EP3561451B1 (en) | 2014-11-27 | 2015-07-23 | Triaxial micro-electromechanical gyroscope |
| EP15863686.0A EP3217146B1 (en) | 2014-11-27 | 2015-07-23 | Tri-axial micro-electro-mechanical gyroscope |
| US15/529,491 US10330471B2 (en) | 2014-11-27 | 2015-07-23 | Triaxial micro-electromechanical gyroscope |
| PCT/CN2015/084973 WO2016082571A1 (en) | 2014-11-27 | 2015-07-23 | Tri-axial micro-electro-mechanical gyroscope |
| KR1020177014294A KR101927647B1 (en) | 2014-11-27 | 2015-07-23 | Tri-axial micro-electro-mechanical gyroscope |
| JP2017528429A JP6448793B2 (en) | 2014-11-27 | 2015-07-23 | 3-axis MEMS gyro |
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| CN201410710065.5A CN104457726B (en) | 2014-11-27 | 2014-11-27 | A kind of three axis microelectromechanicdevice gyroscopes |
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| CN104457726B true CN104457726B (en) | 2017-07-04 |
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| WO2016082571A1 (en) * | 2014-11-27 | 2016-06-02 | 歌尔声学股份有限公司 | Tri-axial micro-electro-mechanical gyroscope |
| FI127203B (en) * | 2015-05-15 | 2018-01-31 | Murata Manufacturing Co | Vibrating micromechanical sensor of the angular velocity |
| CN104897147B (en) * | 2015-06-29 | 2017-12-29 | 歌尔股份有限公司 | A kind of MEMS three-axis gyroscopes |
| CN104985529A (en) * | 2015-07-28 | 2015-10-21 | 安徽工程大学 | Silicon wafer grinding force dynamic signal detection device |
| CN106441261B (en) * | 2016-10-21 | 2019-05-10 | 厦门大学 | A kind of micro-mechanical gyroscope |
| CN110702088B (en) * | 2018-07-09 | 2023-08-22 | 北京大学 | Wheel type double-shaft micromechanical gyroscope |
| CN109163717B (en) * | 2018-11-03 | 2020-04-24 | 中北大学 | Single-chip triaxial MEMS gyroscope based on wheel-ring form |
| US11193770B2 (en) * | 2019-09-10 | 2021-12-07 | Sensortek Technology Corp. | Microelectromechanical systems gyroscope |
| CN113607975A (en) * | 2021-07-16 | 2021-11-05 | 杭州电子科技大学 | Position detection and calibration device for MEMS sensor |
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