CN109855737A - Measuring polarization state device and measurement method - Google Patents
Measuring polarization state device and measurement method Download PDFInfo
- Publication number
- CN109855737A CN109855737A CN201711241317.4A CN201711241317A CN109855737A CN 109855737 A CN109855737 A CN 109855737A CN 201711241317 A CN201711241317 A CN 201711241317A CN 109855737 A CN109855737 A CN 109855737A
- Authority
- CN
- China
- Prior art keywords
- polarization state
- unit
- optical path
- phase delay
- calibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The present invention provides a kind of measuring polarization state devices, it include: the polarization state detection unit of lighting unit and the polarization state for detecting the lighting unit optical path, the polarization state detection unit includes phase delay component, detection unit and calibration unit, the calibration unit is used to calibrate the phase delay error of the phase delay component, and the detection unit detects the polarization state of the optical path under out of phase delaying state after calibration.The invention proposes a kind of measuring polarization state device and measurement method, which carries calibration unit, carries out self calibration before measuring, it is possible to reduce the movement of optical element improves measurement efficiency and precision.
Description
Technical field
The present invention relates to measuring polarization state field, especially a kind of measuring polarization state device and measurement method.
Background technique
The exposure system (main includes lighting unit and projection objective) of litho machine is the important component of litho machine,
Effect be mask image projection be coated with light-sensitive material silicon wafer face on.With the increase of numerical aperture of projection objective, shine
Influence of the polarization state of bright system to image contrast is increasing, therefore the measuring polarization state of lighting system is significant.
In the prior art, polarization of illumination measurement scheme mainly passes through mechanical rotary optical detecting element or switchable optics
The method of detecting element, measurement at least 4 times motion requirements of general each visual field point, can cause vibration, rotating electric machine weight
The adverse effects such as multiple position error, abrasion.
Summary of the invention
The embodiment of the present invention is designed to provide a kind of measuring polarization state device and measurement method, to solve existing test
The problem of making high error and low efficiency in method optical element motion more.
In order to achieve the above object, the present invention provides a kind of measuring polarization state devices, comprising: lighting unit and for examining
The polarization state detection unit of the polarization state of the lighting unit optical path is surveyed, the polarization state detection unit includes phase delay group
Part, detection unit and calibration unit, the calibration unit is used to calibrate the phase delay error of the phase delay component, described
Detection unit detects the polarization state of the optical path under out of phase delaying state after calibration.
Further, the calibration unit includes calibration polarization elements, and the optical path incident light passes through the calibration polarisation
Export polarised light after component, light intensity of the detection unit detection through the phase delay component treated the polarised light.
Further, the phase delay component includes electro-optic crystal and crystal control unit, the crystal control unit
For on the electro-optic crystal on-load voltage to generate phase delay.
Further, the phase delay component includes quarter-wave plate and turntable, and the turntable is for driving
The quarter-wave plate rotation.
Further, the detection unit includes polarization spectroscope and detector, and the optical path is through the phase delay group
It is incident to the polarization spectroscope after part processing, the detector detects the light intensity for the polarised light that the polarization spectroscope separates.
Further, the detector is two, separately detects the P component of polarised light and the light intensity of S component.
It further, further include that optical path draws unit, the optical path draws the light that unit is used to draw the lighting unit
Road is to the polarization state detection unit.
Further, it is reflecting mirror or optical fiber that the optical path, which draws unit,.
It further, further include collimation unit, the optical path of the lighting unit is incident to described inclined through the collimation unit
Polarization state detection unit.
The present invention also provides a kind of measuring polarization state methods, comprising:
S1: the optical path of lighting unit is introduced into the polarization state including calibration unit, phase delay component and detection unit and is examined
Survey unit；
S2: the phase delay error of phase delay component is calibrated by the calibration unit；
S3: the calibration unit is removed；
S4: the polarization state of the optical path under out of phase delaying state is detected by the detection unit.
Further, step S2 includes:
S2.1: introducing calibration polarization elements for the optical path of lighting unit, generates polarised light by calibration polarization elements；
S2.2: the polarised light is received by phase delay component；
S2.3: pass through light intensity of the detection unit detection through the phase delay component treated the polarised light；
S2.4: the light intensity detected under being postponed according to out of phase calibrates the delay error of the phase delay component.
Further, in step sl, setting includes the phase delay component of electro-optic crystal and crystal control unit, is passed through
The crystal control unit on the electro-optic crystal on-load voltage to generate phase delay.Further, in step sl, if
The phase delay component including quarter-wave plate and turntable is set, drives the quarter-wave plate to revolve by the turntable
Turn to generate phase delay.
Further, in step sl, setting includes the detection unit of polarization spectroscope and detector, is prolonged through the phase
Treated that light beam is incident to the polarization spectroscope for slow component, detects what the polarization spectroscope separated by the detector
The light intensity of polarised light.
Further, two detectors are set, the P component of polarised light and the light intensity of S component are separately detected.
Further, in step sl, unit is drawn by optical path and draws the optical path of the lighting unit to the polarization
State detection unit.
Further, it is reflecting mirror or optical fiber that the optical path, which draws unit,.
Further, in step sl, the collimated unit of the optical path of the lighting unit polarization state is incident to examine
Survey unit.
The invention proposes a kind of measuring polarization state device and measurement method, which carries calibration unit, is surveying
Self calibration is carried out before amount, it is possible to reduce the movement of optical element improves measurement efficiency and precision.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the measuring polarization state device that the embodiment of the present invention one provides；
Fig. 2 is the structural schematic diagram for the polarization state detection unit that the embodiment of the present invention one provides.
Fig. 3 is the flow chart for the measuring polarization state method that the embodiment of the present invention one provides；
Fig. 4 is the structural schematic diagram of measuring polarization state device provided by Embodiment 2 of the present invention；
Fig. 5 is the structural schematic diagram that optical path provided by Embodiment 2 of the present invention draws unit；
Fig. 6 is the structural schematic diagram for the polarization state detection unit that the embodiment of the present invention three provides.
In figure, 1: light source, 2: illumination ontology, 3: mask platform, 4: projection objective, 5: work stage, 6: reflecting mirror, 7: polarization state
Detection unit, 8: first movement platform, 9: optical fiber, 70: optical fiber conversion head, 71: small aperture mask, 72: collimation unit, 73: calibration is single
Member, 74: the second mobile stations, 75: phase delay component, 76: polarization spectroscope, 77: the first detectors, 78: the second detectors,
79: quarter-wave plate, 80: turntable.
Specific embodiment
A specific embodiment of the invention is described in more detail below in conjunction with schematic diagram.According to following description and
Claims, advantages and features of the invention will become apparent from.It should be noted that attached drawing is all made of very simplified form and
Using non-accurate ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Embodiment one
As depicted in figs. 1 and 2, the embodiment of the invention provides a kind of measuring polarization state devices, comprising: lighting unit and use
In the polarization state detection unit 7 for the polarization state for detecting the lighting unit optical path, the polarization state detection unit 7 is prolonged including phase
Slow component 75, detection unit and calibration unit 73, the calibration unit are used to calibrate the phase delay of the phase delay component
Error, the detection unit detect the polarization state of the optical path under out of phase delaying state after calibration.
The lighting unit includes light source 1, illumination ontology 2, mask platform 3, projection objective 4 and work stage 5, and light source 1 is by shining
It after bright ontology 2, is radiated on the mask in mask platform 3, is imaged on silicon wafer face through projection objective 4, work stage 5 is for carrying silicon
Piece.The measuring polarization state device further includes first movement platform 8, and first movement platform 8 is for carrying the reflecting mirror 6 and polarization state
Detection unit 7 is mobile, realizes the measurement to different visual field point polarization states.
Further, the calibration unit 73 includes calibration polarization elements and the second mobile station 74, the optical path incident light
Polarised light is exported by the calibration polarization elements, the extinction ratio of the calibration unit 73 can be chosen higher than 1000:1, light beam
By calibration unit 73, transmitted light is the polarised light of a certain polarization state, and purity can be close to 100%, the detection unit detection
Light intensity through the phase delay component 75 treated the polarised light, second mobile station 74 is for carrying calibration polarisation
Component enters or leaves optical path.The polarization state of light can use Stokes parameter representative, be realized by intensity collection to incident light
The measurement of Stokes parameter.
Preferably, the phase delay component 75 includes electro-optic crystal and crystal control unit, the crystal control unit
For on the electro-optic crystal on-load voltage to generate phase delay.Electro-optic crystal 75 can be KDP crystal or other crystal,
Surface is coated with transparent electrode, changes crystal refractive index by control external electric field, is used for phase-modulation.Lateral electric light effect can be used
It answers, longitudinal electro-optic effect can also be used, following analysis is by taking longitudinal electro-optic effect as an example.Due to the voltage of phase-delay quantity and load
It is directly proportional, thus can by change voltage Vi realize different phase-delay quantities, can according to the detection result of detection unit,
The voltage value of KDP crystal is calibrated, and then achievees the purpose that calibrate phase delay.
With continued reference to FIG. 2, the detection unit includes polarization spectroscope 76 and detector, the optical path is through the phase
Be incident to the polarization spectroscope 76 after the processing of Delay Element 75, the detector detect the polarization spectroscope 76 separate it is inclined
The light intensity of vibration light.Detector can be that energy-probe, power meter, photodetector, CCD or CMOS are visited in the present embodiment
Surveying device includes the first detector 77 and the second detector 78, separately detects the light for the different polarization states that polarization spectroscope 76 separates.
In order to draw optical path from lighting unit, the measuring polarization state device further includes that optical path draws unit, the light
Pass goes out unit for drawing the optical path of the lighting unit to the polarization state detection unit.In the present embodiment, continuing with
With reference to Fig. 1, it is reflecting mirror 6 that the optical path, which draws unit,.
Further, the measuring polarization state device further includes collimation unit 72, described in the optical path warp of the lighting unit
Collimation unit 72 is incident to the polarization state detection unit 7.Preferably, the measuring polarization state device further includes small aperture mask
71, the optical path of the lighting unit is incident to the polarization state detection unit 7 through the small aperture mask 71 and collimation unit 72.
As shown in figure 3, the present invention also provides a kind of measuring polarization state methods, comprising:
S1: the optical path of lighting unit is introduced to the polarization including calibration unit 73, phase delay component 75 and detection unit
State detection unit 7；
S2: the phase delay error of phase delay component is calibrated by the calibration unit 73；
S3: the calibration unit 73 is removed；
S4: the polarization state of the optical path under out of phase delaying state is detected by the detection unit.
Further, step S2 includes:
S2.1: introducing calibration polarization elements for the optical path of lighting unit, generates polarised light by calibration polarization elements；
S2.2: the polarised light is received by phase delay component 75；
S2.3: pass through light intensity of the detection unit detection through the phase delay component 75 treated the polarised light；
S2.4: the light intensity detected under being postponed according to out of phase calibrates the delay error of the phase delay component.
Further, in step sl, setting includes the phase delay component 75 of electro-optic crystal and crystal control unit, is led to
Cross the crystal control unit on the electro-optic crystal on-load voltage to generate phase delay.Further, in step sl,
Detection unit including polarization spectroscope 76 and detector is set, and through the phase delay component, treated that light beam is incident to institute
Polarization spectroscope is stated, the light intensity for the polarised light that the polarization spectroscope separates is detected by the detector.Detector can be
Energy-probe, power meter, photodetector, CCD or CMOS, in the present embodiment, detector include 77 He of the first detector
Second detector 78, separately detects the light for the different polarization states that polarization spectroscope 76 separates.
In order to draw optical path from lighting unit, in step sl, unit is drawn by optical path and draws the lighting unit
Optical path to the polarization state detection unit, it is reflecting mirror 6 that the optical path, which draws unit,.
Further, in step sl, the collimated unit 72 of the optical path of the lighting unit is incident to the polarization state
Detection unit 7.Preferably, the optical path of the lighting unit is incident to the polarization state through small aperture mask 71 and collimation unit 72
Detection unit 7.
In step s 2, the phase delay of detection unit is calibrated by the calibration unit 73, principle is calibration unit
Incident light is filtered into the higher polarised light of polarization purity, the phase delay of crystal generation certain angle β is made using crystal pressurization,
Polarization spectroscope 76 separates light beam, and according to Malus' law, the energy of transmitted light meets:
I=I0*(COSβ)2
It can need to calibrate 30 ° according to test respectively, 45 °, 60 °, the corresponding electricity of 90 ° of four different phase-delay quantities
Pressure, can also calibrate the corresponding voltage of any phase delay of different demands according to actual needs.
After completing calibration by above step S2, the process for removing calibration unit 73, the calibration are completed by step S3
Unit 73 includes calibration polarization elements and the second mobile station 74, and calibration polarization elements can be carried by the second mobile station 74 and are left
Optical path, subsequently into step S4 to carry out official testing, according to the electricity of the calibration voltage value setting KDP obtained in calibration process
Pressure, tests the energy value of the detector (the first detector 77 and the second detector 78) under several voltages.
For phase delay component 75, the angle of fast axle and X-axis, δ are indicated with θiIndicate phase-delay quantity, then its Muller square
Battle array may be expressed as:
Polarization spectroscope 76 is used to the P component and S component of polarization project respectively the first detector 77 and the second detection
Device 78.Therefore, for opposite two detectors, 76 equivalent two mutually perpendicular analyzers of polarization spectroscope, Mu of analyzer
Matrix is strangled to be expressed as:
Wherein p is extinction ratio, and α is the angle in light transmission direction and X-direction.For detector 77, α=90 ° in Muller matrix,
Extinction ratio is p1；For detector 78, α=0 ° in Muller matrix, extinction ratio p2.
Incident light polarization state is S with Stokes expressed as parametersIn=[SIn0,SIn1,SIn2,SIn3], then light penetrates phase delay
Polarization state after component 75 and polarization spectroscope 76 are as follows:
SOut=MP·MW·Sin
First parameter S of output polarization Stokes parameterOut0It may be expressed as:
SOut0=0.5 (1+p) SIn0
+0.5(1-p)SIn1[cos2α(cos22θ+sin22θcosδi)+sin2α(1-cosδi)sin2θcos2θ]
+0.5(1-p)SIn2[(cos2α(1-cosδi)sin2θcos2θ+sin2α(sin22θ+cos22θcosδi)]
+0.5(1-p)SIn3(-cos2αsin2θsinδi+sin2αcos2θsinδi)
SOut0Indicate light intensity, be detector can amount measured directly, can be indicated with light intensity I, by phase-modulation,
Electro-optic crystal generates 4 kinds of different phase-delay quantities, and two detectors obtain 4 groups of light intensity, can solve incident light
Stokes parameter.
It is set as 30 ° with θ, phase-modulation δi30 ° are taken, 45 °, 60 °, 90 ° of four different phase-delay quantities are visited with first
Survey the light intensity Ι when measurement phase-delay quantity of device 77 is modulated to 30 °, 45 °p(30 °) and Ιp(45 °) measure phase with the second detector 78
Position retardation is modulated to light intensity Ι at 60 °, 90 °s(60 °) and Ιs(90 °), it may be assumed that
IP(30 °)=0.5 (1+p1) SIn0-0.45(1-p1)SIn1-0.03(1-p1)SIn2+0.217(1-p1)SIn3,
Ip(45 °)=0.5 (1+p1) SIn0-0.39(1-p1)SIn2-0.063(1-p1)SIn2+0.313(1-p1)SIn3,
Is(60 °)=0.5 (1+p2) SIn0+0.3125(1-p2)SIn2+0.108(1-p2)SIn2-0.375(1-p2)SIn3,
Is(90 °)=0.5 (1+p2) SIn0+0.125(1-p2)SIn2+0.2165(1-p2)SIn2-0.433(1-p2)SIn3.
Wherein extinction ratio p1, p2 can be obtained by polarization spectroscope off-line measurement, do not run business into particular one state herein.Therefore, by with
Upper equation can solve the Stokes parameter [S of incident lightIn0,SIn1,SIn2,SIn3]。
Amount of phase modulation listed above and phase retardation, analyzing angle initialization can also use other combinations, herein
It does not constrain.
Embodiment two
As shown in Figure 4 and Figure 5, different from embodiment one, it is optical fiber 9 that the optical path in the present embodiment, which draws unit, and
It does not need to be tested using bending reflecting mirror using optical fiber collection part bias light, it can be in the lens barrel of test station
Upper setting optical fiber interface, when test, facilitate intelligent acess, if optical fiber long enough, polarization state detection unit 7 can be placed on machine
Outside platform, first movement platform 8 can also not used.
Referring to FIG. 5, optic fibre switching head 70 is arranged in small 71 interface of aperture mask, incident optical is adopted using intelligent acess
With polarization maintaining optical fibre, do not change the polarization state of incident beam, prevents from introducing other errors.The present embodiment is connect using polarization maintaining optical fibre interface
Enter optical path, it is possible to reduce space requirement improves test compatibility.
It in the present embodiment, can also be using the electro-optic crystal modulation methods in liquid crystal phase modulator alternate embodiment one
Formula, survey school principle, survey school process and actual test process are similar to Example 1, and details are not described herein.
Embodiment three
As shown in fig. 6, the phase delay component 75 includes quarter-wave plate 79 and turntable 80, the turntable 80
For driving the quarter-wave plate 79 to rotate.Correspondingly, in step sl, setting includes quarter-wave plate 79 and rotation
The phase delay component of platform 80 drives the quarter-wave plate 79 to be rotated to produce phase delay by the turntable 80.
It is similar to Example 1 to survey school principle, survey school process and testing process, the calibration voltage being distinguished as from embodiment one
Become calibrating the rotation angle of wave plate.
The principle for surveying school is that incident light is filtered into the higher polarised light of polarization purity by calibration unit 73, utilizes turntable
80 drive the rotation of quarter-wave plate 79 to generate the phase delay of certain angle β, and polarization spectroscope 76 separates light beam, according to horse
The energy of Lv Si law, transmitted light meets:
I=I0*(COSβ)2
30 ° can be needed to calibrate according to test respectively, 45 °, 60 °, 90 ° four different phase-delay quantity turntables 80 are right
The angle answered can also calibrate the corresponding angle of any phase delay of different demands according to actual needs.
When official testing, calibration polarization elements are carried by the second mobile station 74 and remove optical path, according to being obtained in calibration process
Collimation angle angle value setting turntable 80 angle, test the first detector 77 under several angles and the second detector 78
Energy value.
The invention proposes a kind of measuring polarization state device and measurement method, which carries calibration unit, is surveying
Self calibration is carried out before amount, it is possible to reduce the movement of optical element improves measurement efficiency and precision.
The above is only a preferred embodiment of the present invention, does not play the role of any restrictions to the present invention.Belonging to any
Those skilled in the art, in the range of not departing from technical solution of the present invention, to the invention discloses technical solution and
Technology contents make the variation such as any type of equivalent replacement or modification, belong to the content without departing from technical solution of the present invention, still
Within belonging to the scope of protection of the present invention.
Claims (18)
1. a kind of measuring polarization state device, the polarization of the polarization state including lighting unit and for detecting the lighting unit optical path
State detection unit, it is characterised in that: the polarization state detection unit includes phase delay component, detection unit and calibration unit,
The calibration unit is used to calibrate the phase delay error of the phase delay component, and the detection unit detects not after calibration
The polarization state of the optical path under same-phase delaying state.
2. measuring polarization state device as described in claim 1, which is characterized in that the calibration unit includes calibration polarisation group
Part, the optical path incident light export polarised light after the calibration polarization elements, and the detection unit detection is through the phase
The light intensity of Delay Element treated the polarised light.
3. measuring polarization state device as described in claim 1, which is characterized in that the phase delay component includes electro-optic crystal
With crystal control unit, the crystal control unit be used on the electro-optic crystal on-load voltage to generate phase delay.
4. measuring polarization state device as described in claim 1, which is characterized in that the phase delay component includes a quarter
Wave plate and turntable, the turntable is for driving the quarter-wave plate to rotate.
5. measuring polarization state device as described in claim 1, which is characterized in that the detection unit include polarization spectroscope and
Detector, the optical path are incident to the polarization spectroscope after phase delay component processing, and the detector detects institute
State the light intensity for the polarised light that polarization spectroscope separates.
6. measuring polarization state device as claimed in claim 5, which is characterized in that the detector is two, is separately detected partially
The P component of vibration light and the light intensity of S component.
7. measuring polarization state device as described in claim 1, which is characterized in that further include that optical path draws unit, the optical path
It draws unit and is used to draw the optical path of the lighting unit to the polarization state detection unit.
8. measuring polarization state device as claimed in claim 7, which is characterized in that it is reflecting mirror or light that the optical path, which draws unit,
It is fine.
9. measuring polarization state device as described in claim 1, which is characterized in that it further include collimation unit, the lighting unit
Optical path be incident to the polarization state detection unit through the collimation unit.
10. a kind of measuring polarization state method characterized by comprising
S1: the optical path of lighting unit is introduced into the polarization state including calibration unit, phase delay component and detection unit and detects list
Member；
S2: the phase delay error of phase delay component is calibrated by the calibration unit；
S3: the calibration unit is removed；
S4: the polarization state of the optical path under out of phase delaying state is detected by the detection unit.
11. measuring polarization state method as claimed in claim 10, which is characterized in that step S2 includes:
S2.1: introducing calibration polarization elements for the optical path of lighting unit, generates polarised light by calibration polarization elements；
S2.2: the polarised light is received by phase delay component；
S2.3: pass through light intensity of the detection unit detection through the phase delay component treated the polarised light；
S2.4: the light intensity detected under being postponed according to out of phase calibrates the delay error of the phase delay component.
12. measuring polarization state method as claimed in claim 10, which is characterized in that in step sl, setting includes that electric light is brilliant
The phase delay component of body and crystal control unit, by the crystal control unit on the electro-optic crystal on-load voltage with
Generate phase delay.
13. measuring polarization state method as claimed in claim 10, which is characterized in that in step sl, setting include four/
The phase delay component of one wave plate and turntable drives the quarter-wave plate to be rotated to produce phase by the turntable
Delay.
14. measuring polarization state method as claimed in claim 10, which is characterized in that in step sl, setting includes polarization point
The detection unit of light microscopic and detector, through the phase delay component, treated that light beam is incident to the polarization spectroscope, leads to
Cross the light intensity that the detector detects the polarised light that the polarization spectroscope separates.
15. measuring polarization state method as claimed in claim 14, which is characterized in that two detectors of setting are visited respectively
Survey the P component of polarised light and the light intensity of S component.
16. measuring polarization state method as claimed in claim 10, which is characterized in that in step sl, drawn by optical path single
Member draws the optical path of the lighting unit to the polarization state detection unit.
17. measuring polarization state method as claimed in claim 16, which is characterized in that the optical path draw unit be reflecting mirror or
Optical fiber.
18. measuring polarization state method as claimed in claim 10, which is characterized in that in step sl, by the lighting unit
The collimated unit of optical path be incident to the polarization state detection unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711241317.4A CN109855737A (en) | 2017-11-30 | 2017-11-30 | Measuring polarization state device and measurement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711241317.4A CN109855737A (en) | 2017-11-30 | 2017-11-30 | Measuring polarization state device and measurement method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109855737A true CN109855737A (en) | 2019-06-07 |
Family
ID=66888518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711241317.4A Pending CN109855737A (en) | 2017-11-30 | 2017-11-30 | Measuring polarization state device and measurement method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109855737A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110987366A (en) * | 2019-11-07 | 2020-04-10 | 上海大学 | Polarization parameter measuring system of remote multistage optical fiber system |
| CN112345078A (en) * | 2020-10-27 | 2021-02-09 | 衡阳市智谷科技发展有限公司 | Polarization measurement system based on light wave polarization state |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1455236A (en) * | 2002-04-10 | 2003-11-12 | 特克特朗尼克国际销售有限责任公司 | High-precision calibration for polarizing device |
| US20040239933A1 (en) * | 2001-05-24 | 2004-12-02 | Jon Opsal | Apparatus for optical measurements of nitrogen concentration in thin films |
| CN101021447A (en) * | 2007-03-15 | 2007-08-22 | 中国科学院上海光学精密机械研究所 | Method and device for measuring phase delay and fast axis direction of 1/4 wave plate |
| CN102243104A (en) * | 2011-06-17 | 2011-11-16 | 中国科学院上海技术物理研究所 | Device for measuring properties of polarized light in real time |
| CN103234909A (en) * | 2013-04-26 | 2013-08-07 | 北京理工大学 | Rapid pulse laser polarization degree measurement device |
| CN103267576A (en) * | 2013-05-14 | 2013-08-28 | 西安工业大学 | Device and method for light wave polarization state high-speed static measurement |
| CN103792798A (en) * | 2014-01-28 | 2014-05-14 | 中国科学院上海光学精密机械研究所 | Measurement device and method for pupil polarization state of photoetching machine polarization illumination system |
| CN103900963A (en) * | 2014-04-22 | 2014-07-02 | 中国工程物理研究院激光聚变研究中心 | Device for measuring optical absorption coefficient of large-caliber crystalline material |
| CN104536146A (en) * | 2014-12-17 | 2015-04-22 | 中国科学院长春光学精密机械与物理研究所 | Polarization control method used in fiber point-diffraction interferometer wave surface reference source |
-
2017
- 2017-11-30 CN CN201711241317.4A patent/CN109855737A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040239933A1 (en) * | 2001-05-24 | 2004-12-02 | Jon Opsal | Apparatus for optical measurements of nitrogen concentration in thin films |
| CN1455236A (en) * | 2002-04-10 | 2003-11-12 | 特克特朗尼克国际销售有限责任公司 | High-precision calibration for polarizing device |
| CN101021447A (en) * | 2007-03-15 | 2007-08-22 | 中国科学院上海光学精密机械研究所 | Method and device for measuring phase delay and fast axis direction of 1/4 wave plate |
| CN102243104A (en) * | 2011-06-17 | 2011-11-16 | 中国科学院上海技术物理研究所 | Device for measuring properties of polarized light in real time |
| CN103234909A (en) * | 2013-04-26 | 2013-08-07 | 北京理工大学 | Rapid pulse laser polarization degree measurement device |
| CN103267576A (en) * | 2013-05-14 | 2013-08-28 | 西安工业大学 | Device and method for light wave polarization state high-speed static measurement |
| CN103792798A (en) * | 2014-01-28 | 2014-05-14 | 中国科学院上海光学精密机械研究所 | Measurement device and method for pupil polarization state of photoetching machine polarization illumination system |
| CN103900963A (en) * | 2014-04-22 | 2014-07-02 | 中国工程物理研究院激光聚变研究中心 | Device for measuring optical absorption coefficient of large-caliber crystalline material |
| CN104536146A (en) * | 2014-12-17 | 2015-04-22 | 中国科学院长春光学精密机械与物理研究所 | Polarization control method used in fiber point-diffraction interferometer wave surface reference source |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110987366A (en) * | 2019-11-07 | 2020-04-10 | 上海大学 | Polarization parameter measuring system of remote multistage optical fiber system |
| CN112345078A (en) * | 2020-10-27 | 2021-02-09 | 衡阳市智谷科技发展有限公司 | Polarization measurement system based on light wave polarization state |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8009292B2 (en) | Single polarizer focused-beam ellipsometer | |
| US10831010B2 (en) | Optical measurement method and device | |
| US9739993B2 (en) | Optical measurement method and device | |
| CN102621072B (en) | Polarization and birefringence measuring system | |
| CN103477206B (en) | Optical anisotropy's parameter measuring apparatus, measuring method and measurement system | |
| CN102162791B (en) | Real-time on-line adsorption detection system | |
| CN108871579A (en) | A kind of scaling method of polarized imaging system | |
| CN105492889A (en) | Optical element rotation type mueller-matrix ellipsometer and method for measuring mueller-matrix of sample using the same | |
| CN106525242B (en) | A kind of device can be used for sun polarization Stokes vector real-time measurement | |
| KR20190118603A (en) | Systems and Methods for Use in Ellipsometry with High Spatial Resolution | |
| JP3507319B2 (en) | Optical property measurement device | |
| CN107764520A (en) | Optical lens residual polarization test device | |
| CN109856058A (en) | A kind of high-resolution real-time polarization spectral analysis device and method | |
| CN109855737A (en) | Measuring polarization state device and measurement method | |
| CN102607819B (en) | Full-light-field polarization aberration detection device and detection method | |
| CN110530821B (en) | Measuring device and measuring method for refractive index of optical material | |
| CN203259473U (en) | Refractivity measuring device | |
| KR100258172B1 (en) | Birefringent member cell gap measurement method and instrument | |
| KR100205671B1 (en) | Apparatus and method for measuring optical anisotropy | |
| CN205607626U (en) | Measure device of remote sensing instrument's linear polarization sensitivity | |
| KR20100135121A (en) | Ellipsometer using half mirror | |
| JPS62266439A (en) | Spectral temporary optical analyzer | |
| Wang et al. | Polarized angle-resolved spectral reflectometry for real-time ultra-thin film measurement | |
| US3481671A (en) | Apparatus and method for obtaining optical rotatory dispersion measurements | |
| CN103884684A (en) | Optical system of high-accuracy digital V-prism refractometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20190607 |
|
| WD01 | Invention patent application deemed withdrawn after publication |