CN109702215B - Thermal arc evaporation multi-cavity nano powder preparation device - Google Patents
Thermal arc evaporation multi-cavity nano powder preparation device Download PDFInfo
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- CN109702215B CN109702215B CN201910074813.8A CN201910074813A CN109702215B CN 109702215 B CN109702215 B CN 109702215B CN 201910074813 A CN201910074813 A CN 201910074813A CN 109702215 B CN109702215 B CN 109702215B
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Abstract
A thermal arc evaporation multi-cavity nano powder preparation device relates to the technical field of nano powder preparation. At least two main chamber powder generating units are arranged; each main chamber powder generating unit is connected to an arc power supply and a control system through each thermal arc control signal wire and each feeding control signal wire respectively; the main chamber powder generating unit comprises a main chamber and a thermal arc device, the thermal arc device is arranged at the top of the main chamber, the collecting chamber is arranged at the bottom of the main chamber, and the thermal arc device comprises a cathode arranged at the top of the main chamber and extending into the main chamber, and a cathode control device for controlling the cathode to move in three directions; the positive position below the cathode is provided with an anode, the rear end of the anode is provided with an automatic feeding device for controlling anode feeding, and the front end of the anode is provided with a cooling water device for cooling the anode. The invention greatly improves the production efficiency and reduces the cost; the method realizes the simultaneous preparation and continuous production of various powder with different components, avoids the mutual pollution in the preparation of the powder, and improves the purity of the powder.
Description
Technical Field
The invention relates to the technical field of nano powder preparation, in particular to a thermal arc evaporation multi-cavity nano powder preparation device.
Background
The direct current arc plasma is an effective heat source for preparing nano particles, in particular 'core/shell' metal (alloy) nano composite particles, carbon related materials and ceramic nano materials, and the method is adopted to preliminarily realize mass production at present, such as Chinese patent application: a multi-source direct current arc automatic nano powder production system and method (201410189518.4) have a plurality of technical problems for large-scale industrial production, and mainly show how to prepare nano powder with high efficiency, low cost, high purity, no pollution and continuity.
The existing nano powder preparation equipment mainly aims at generating, classifying, capturing and processing nano powder in a single cavity, namely a single generation chamber, and the powder preparation equipment with the single cavity has the following defects:
1. lower production efficiency and higher cost
At present, in the process of completing circulation processes such as vacuum extraction, powder generation and treatment, vacuum maintenance and the like, most of the time is used for vacuumizing and vacuum maintenance and circulating the process, the equipment vacuumizing in one preparation process needs 3-4h, the time for preparing the powder is less than 0.5h, the time for vacuumizing and vacuum maintenance accounts for 50% -70%, the actual powder production time is 15-20%, the production efficiency is low as a whole, and meanwhile, a large amount of energy sources are consumed due to the fact that the processes are repeatedly performed in vacuum extraction and vacuum maintenance, so that the cost is greatly increased.
2. Low purity and cross contamination
After the nano powder of one material is prepared, if powder of other materials is prepared, powder residues exist at the places such as a copper crucible, a device connection part and the like and cannot be removed, so that at least 2 kinds of powder are mutually polluted when the next powder is prepared, and the purity of the nano powder is reduced.
3. Cannot realize the real continuous production
The existing single-cavity powder preparation equipment and process are limited by the size of anode materials, and the problems of insufficient continuity exist in the continuous feeding and supplying process of the materials. Meanwhile, the repeated vacuum removing and vacuumizing processes are required in the powder collecting process, so that the operation time requirement is high, the continuous production cannot be realized on the premise of ensuring the product quality in large-scale industrial production, and the method is eliminated in the near future.
Disclosure of Invention
The invention aims to provide a continuous production method of thermal arc evaporation multi-cavity metal nano powder, which aims to solve the problems in the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the thermal arc evaporation multi-cavity nano powder preparation device is characterized in that at least two main cavity powder generation units are arranged;
each main chamber powder generating unit is connected to a vacuum main pipeline through a respective vacuum branch pipeline, and the vacuum main pipeline is connected to a vacuum pump set system;
each main chamber powder generating unit is connected to the main exhaust pipeline through a respective exhaust branch pipeline, and each main chamber powder generating unit is connected to the main air inlet pipeline through a respective air inlet branch pipeline;
each main chamber powder generating unit is connected to an arc power supply and a control system through each thermal arc control signal wire and each feeding control signal wire respectively;
the main chamber powder generating unit comprises a main chamber and a thermal arc device, the thermal arc device is arranged at the top of the main chamber, the collecting chamber is arranged at the bottom of the main chamber, and the thermal arc device comprises a cathode arranged at the top of the main chamber and extending into the main chamber, and a cathode control device for controlling the cathode to move in three directions;
the positive position below the cathode is provided with an anode, the rear end of the anode is provided with an automatic feeding device for controlling anode feeding, and the front end of the anode is provided with a cooling water device for cooling the anode.
The automatic feeding device consists of a sealing rubber ring, a propelling screw rod, a servo motor, a transmission device and the like. The head part is conical and convex, and the tail part is conical concave, and the cylindrical raw material rod is gradually pushed into the main chamber by the pushing screw at the speed of 2 mm/min. Wherein the servo motor is connected with the transmission device to provide propulsion force for propelling the screw rod. The raw material rod and the cavity wall of the main cavity are sealed by a sealing rubber ring, so that the vacuum degree inside the cavity is ensured.
The vacuum branch pipes are respectively provided with a vacuum valve, the exhaust branch pipes are respectively provided with an exhaust valve, and the air inlet branch pipes are respectively provided with an air inlet valve. The vacuum valves, the exhaust valves and the air inlet valves respectively control the vacuum extraction, the exhaust and the air inlet of each main chamber, so that the vacuum, the exhaust and the air inlet of each main chamber are respectively and independently controlled. The vacuum extraction of each main chamber, and the exhaust and intake are controlled by separate vacuum valves, exhaust valves and intake valves, respectively. The main chambers are connected in parallel, and the components are independently controlled.
The cathode control device comprises a support rod fixing device, an electric arc conduction device, a spherical compensator, a support rod and a cathode clamping device, wherein the support rod fixing device is connected with the support rod and the spherical compensator in a rigid connection mode, the electric arc conduction device is distributed inside the support rod, and an anode is clamped at the tail end of the support rod through the cathode clamping device so as to lead out an electric arc.
The X-direction motion transmission device is controlled to be tensioned and relaxed by starting and stopping the X-direction permanent magnet synchronous low-speed motor, so that the X-direction rotation of the semicircular contact of the spherical compensator is realized, and the X-direction movement of the tungsten rod is realized.
Similarly, the Y-direction permanent magnet synchronous low-speed motor and the Y-direction motion transmission device act similarly to the X-direction permanent magnet synchronous low-speed motor and the X-direction motion transmission device, so that Y-direction movement of the tungsten rod is realized.
The rotation of the threaded rod in the Z-direction motion transmission device is controlled through the positive and negative rotation of the Z-direction permanent magnet synchronous low-speed motor, so that the up-and-down movement of the support rod is realized, and the Z-direction movement of the tungsten rod is controlled.
The arc conduction devices are distributed in the supporting rod, the arc conduction devices are integrated with the supporting rod through connection, and the supporting rod is connected with the upper half part of the spherical compensator in a bolt fixing mode. The X, Y movement of the tungsten rod is achieved by the relative positional variation of the hemispherical faces of the spherical compensator.
According to the structural design, X, Y, Z three-axis six-direction automatic control of the tungsten rod is realized, and the cathode clamping device is used for clamping the tungsten rod, so that the replaceability of cathode materials is realized. The arc conduction devices are distributed inside the supporting rod, so that the arc conduction devices are prevented from being contacted with powder in the cavity, the safety of the powder preparation process is guaranteed, and the powder residue in the cleaning process is avoided.
The front end of the anode is provided with a cooling water device, the cooling water device comprises a supporting base, cooling water pipes and cooling grooves, the cooling grooves are distributed in the supporting base, the cooling water pipes are connected with the supporting base, and the cooling water enters the cooling grooves through the cooling water pipes to circularly flow. The circulating water is led out to the cooling system through the cooling water pipe, and the internal circulating water can flow in a circulating way through the hollow structural design. The switch of the cooling system is controlled by the condenser. The condensing system must be turned on before the plant is operated.
The main chamber is provided as a cooling wall for circulating cooling water. The hollow cooling wall can obviously improve the cooling area, thereby realizing better cooling effect for the integral cooling of the cavity and prolonging the continuous working time of the equipment.
The upper end of the collecting chamber is connected with the main chamber through a butterfly valve, the other end of the collecting chamber is connected with a transition bin, and the collecting chamber is also provided with an observation window and a collecting glove. After the powder preparation is finished, a butterfly valve is opened to enable the nano powder to fall into a collecting chamber, the powder is collected by utilizing collecting gloves and then is put into a transition bin, and the transition bin is vacuumized after the powder is taken out. The transition bin is used for guaranteeing the vacuum state of the main chamber and the collecting chamber in the powder taking process in the use process.
Compared with the prior art, the invention has the beneficial effects that:
1. greatly improves the production efficiency and reduces the cost
The same set of vacuumizing system is used for a plurality of cavities at the same time, so that the vacuumizing system can be opened and closed repeatedly for a single cavity, and the vacuumizing time in production is greatly reduced. In addition, the single cavity is connected in series independently, so that the overhaul and maintenance of a single device can be realized, and the large-scale production stoppage caused by the damage of the device is avoided. The production efficiency is improved by at least 30%, and the production cost is reduced by at least 20%.
2. Realizing continuous production
The continuous production process of the multiple cavities can realize the continuous switching among different cavities in industry and the continuous evaporation of the nano powder production effect, and avoid the equipment shutdown caused by the damage and overhaul of single cavity equipment. The continuous production can be realized by the equipment connection mode of the production line on the premise that the vacuum system is continuously operated.
3. Realizing the simultaneous preparation of multiple powder with different components
The independent cavities are mutually independent, nano powder with different components can be prepared by evaporation in the independent cavities, and the function of simultaneously preparing different powder on one device is realized.
4. Avoiding the mutual pollution in the powder preparation process and improving the purity of the powder
The device connection port, the valve and other hidden parts cannot be cleaned efficiently in the cleaning process of the single cavity equipment, so that the cross contamination of the powder can be caused by using the single cavity to prepare different kinds of powder, and the purity is reduced. The nanometer powder with the same component can be prepared in each independent cavity of the equipment, so that the mutual pollution caused by preparing different powder in one cavity is prevented, and the purity of the powder can be improved to 99.9%.
Drawings
Fig. 1 is a schematic structural diagram of a thermal arc evaporation multi-cavity nano powder preparation device.
Fig. 2 is a schematic diagram of a main chamber powder generating unit in fig. 1.
Fig. 3 is a schematic view of the thermal arc device in fig. 1.
Fig. 4 is a top view of fig. 3.
In the figure: 1. the arc power supply and control system comprises an arc power supply and control system, 2, a main exhaust pipe, 3, a main air inlet pipe, 4, a branch exhaust pipe, 5, an exhaust valve, 6, a hot arc device, 7, a branch air inlet pipe, 8, an air inlet valve, 9, a main chamber, 10, an automatic feeding device, 11, a vacuum valve, 12, a transition bin, 13, a main vacuum pipe, 14, a branch vacuum pipe, 15, a hot arc control signal line, 16, a feeding control signal line, 17, a vacuum pump system, 18, a collecting chamber, 19, an air outlet, 20, a cooling wall, 21, a crucible, 22, a support base, 23, a cooling water pipe, 24, a cooling tank, 25, an air inlet, 26, a cathode, 27, an air extraction opening, 28, a butterfly valve, 29, an observation window, 30, a collecting glove, 31, an anode, 32, an X-direction permanent magnet synchronous low-speed motor, 33, an X-direction motion transmission device, 34, a Z-direction motion transmission device, 35, a support bar fixing device, 36, a conduction device, 37, a spherical compensator, 38, a support bar, 39, a cathode device, 40, a Y-direction permanent magnet synchronous low-speed motor, 41, a Y-direction permanent magnet synchronous low-speed motor, and a Z-direction arc synchronous motor.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
The thermal arc evaporation multi-cavity nano powder preparation device is provided with at least two main cavity powder generation units;
each main chamber powder generating unit is connected to a vacuum main pipe 13 through a respective vacuum branch pipe 14, which is connected to a vacuum pump system 17;
each main chamber powder generating unit is connected to the main exhaust pipe 2 through a respective branch exhaust pipe 4, and each main chamber powder generating unit is connected to the main intake pipe 3 through a respective branch intake pipe 7;
each main chamber powder generating unit is connected to the arc power supply and the control system 1 through each thermal arc control signal wire and each feeding control signal wire respectively;
the main chamber powder generating unit comprises a main chamber 9 and a thermal arc device 6, wherein the thermal arc device is arranged at the top of the main chamber, the collecting chamber 18 is arranged at the bottom of the main chamber, and the thermal arc device comprises a cathode 26 arranged at the top of the main chamber and extending into the main chamber, and a cathode control device for controlling the cathode to move in three directions;
an anode 31 is arranged at the right position below the cathode, an automatic feeding device 10 is arranged at the rear end of the anode to control anode feeding, and a cooling water device is arranged at the front end of the anode to cool the anode.
The automatic feeding device 10 consists of a sealing rubber ring, a propelling screw, a servo motor, a transmission device and the like. The head part is conical and convex, and the tail part is conical concave, and the cylindrical raw material rod is gradually pushed into the main chamber by the pushing screw at the speed of 2 mm/min. Wherein the servo motor is connected with the transmission device to provide propulsion force for propelling the screw rod. The raw material rod and the cavity wall of the main cavity are sealed by a sealing rubber ring, so that the vacuum degree inside the cavity is ensured.
The vacuum branch pipes are respectively provided with a vacuum valve 11, the exhaust branch pipes are respectively provided with an exhaust valve 5, and the air inlet branch pipes are respectively provided with an air inlet valve 8. The vacuum valves, the exhaust valves and the air inlet valves respectively control the vacuum extraction, the exhaust and the air inlet of each main chamber, so that the vacuum, the exhaust and the air inlet of each main chamber are respectively and independently controlled. The vacuum extraction of each main chamber, and the exhaust and intake are controlled by separate vacuum valves, exhaust valves and intake valves, respectively. The main chambers are connected in parallel, and the components are independently controlled.
The cathode control device comprises a support rod fixing device 35, an arc conduction device 36, a spherical compensator 37, a support rod 38 and a cathode clamping device 39, wherein the support rod fixing device 35 is connected with the support rod 38 and the spherical compensator 37 in a rigid connection mode, the arc conduction device 36 is distributed inside the support rod 38, and the anode 31 is clamped at the tail end of the support rod through the cathode clamping device 39 to lead out an arc.
The X-direction motion transmission device 33 is controlled to be tensioned and relaxed by starting and stopping the X-direction permanent magnet synchronous low-speed motor 32, so that the X-direction rotation of the semicircular contact of the spherical compensator 37 is realized, and the X-direction movement of the tungsten rod 31 is realized.
Similarly, the Y-direction permanent magnet synchronous low-speed motor 40 and the Y-direction motion transmission device 41 function similarly to the X-direction permanent magnet synchronous low-speed motor 32 and the X-direction motion transmission device 33, and realize Y-direction movement of the tungsten rod 31.
The rotation of the threaded rod in the Z-direction motion transmission device 34 is controlled by the forward and reverse rotation of the Z-direction permanent magnet synchronous low-speed motor 42, so that the up-and-down movement of the support rod 38 is realized, and the Z-direction movement of the tungsten rod 31 is controlled.
The arc conduction devices 36 are distributed inside the support rods 38, and are integrated by connection through the support rod fixing devices 35 and the support rods 38, and the support rods 38 are connected with the upper half part of the spherical compensator 37 in a bolt fixing manner. The movement of the tungsten rod X, Y is achieved by the relative positional variation of the hemispherical surfaces of the spherical compensator 37.
By means of the structural design, X, Y, Z of the tungsten rod is automatically controlled in three-axis six directions, and the cathode clamping device 39 is used for clamping the tungsten rod 31, so that the replaceability of cathode materials is achieved. The arc conduction devices 36 are distributed inside the support rods 38, so that the arc conduction devices 36 are prevented from being contacted with powder in the cavity, the safety of the powder preparation process is ensured, and the powder residue in the cleaning process is avoided.
The front end of the anode is provided with a cooling water device, the cooling water device comprises a supporting base 22, a cooling water pipe 23 and cooling grooves 24, the cooling grooves 24 are distributed in the supporting base 22, the cooling water pipe 23 is connected with the supporting base 22, and cooling water enters the cooling grooves 24 through the cooling water pipe 23 to circularly flow. The circulating water is led out from the cooling water pipe 23 to the cooling system, and the internal circulating water can flow circularly due to the hollow structural design. The switch of the cooling system is controlled by the condenser. The condensing system must be turned on before the plant is operated.
The main chamber is provided as a stave 20 for cooling water circulation. The hollow cooling wall 20 can remarkably improve the cooling area, so that the whole cooling of the cavity is realized, the better cooling effect is achieved, and the continuous working time of the equipment is prolonged.
The upper end of the collecting chamber is connected with the main chamber through a butterfly valve 28, the other end of the collecting chamber is connected with a transition bin, and an observation window 29 and a collecting glove 30 are further arranged on the collecting chamber. After the powder preparation is finished, the butterfly valve 28 is opened to enable the nano powder to fall into the collecting chamber, the powder is collected by the collecting glove 30 and then is put into the transition bin 12, and the transition bin 12 is vacuumized after the powder is taken out. The function of the transition bin 12 is to ensure the vacuum of the main chamber 9 and the collection chamber 18 during powder removal during use.
Example 2
The device in the embodiment 1 is used for realizing the continuous production method of the thermal arc evaporation multi-cavity metal nano powder, and the method comprises the following steps of:
(1) Placing a target: single metal or metal alloy targets with the same components or different components are arranged on the anode holders of the independent cavities to serve as anodes, metals with melting points higher than 3000 ℃ are used as cathodes, and the metals are tungsten, platinum or molybdenum;
(2) Vacuumizing: closing the cabin door of each independent cavity, opening the vacuum valve of each independent cavity, and vacuumizing all the cavities until the vacuum degree is not higher than 10 -4 Pa, closing the vacuum valve of each independent cavity;
(3) Arcing: opening the air inlet valve of each independent cavity, introducing 0.2-0.3 atmosphere hydrogen as working gas, introducing 50-180V direct current voltage between the cathode and the anode, and starting melting and evaporating the anode;
(4) And (3) evaporating: the evaporation efficiency of the anode is changed between 0.1 and 0.8 by controlling the direct current power;
(5) Forming powder: controlling the temperature gradient in the cavity by controlling the flow of cooling water or placing a liquid nitrogen cooling pipe in the cavity; the center temperature is 10000-15000K, the temperature of the cavity wall is 300K, the temperature gradient is 25000-37000K/m, the diameters of the nano particles are different under different temperature gradients, the particle size is 60-90nm,27000-30000K/m, the particle size is 30-60nm,30000-37000K/m, and the particle size is 5-30nm;
(6) Metal nano powder collection: the method comprises the following specific steps of collecting passivation metal nano powder: when the consumption of any anode target is completed, closing an electric arc in the cavity, opening a gas release valve, filling 2% -5% of air into the cavity, closing the gas release valve, standing for 4-6 hours, forming an oxide protection layer with the thickness of 2-5 nanometers on the metal surface, opening the gas release valve to fill air to one atmosphere after passivation, opening a cavity door, and taking out powder;
(7) Changing target materials: cleaning the cavity after powder is taken out, putting a single metal or metal alloy target material with the same components as the target material put in front of the cavity as an anode, closing a cavity door, opening a vacuum valve of the cavity, and vacuumizing the cavity until the vacuum degree is not higher than 10 -4 Pa, closing a vacuum valve of the cavity, opening an air inlet valve of the cavity, introducing 0.2-0.3 atmosphere hydrogen as working gas, introducing 50-180V direct current voltage between the cathode and the anode, and starting melting and evaporating the anode;
(8) Continuous production: and (3) repeating the process steps of the steps (4) - (7) to realize continuous production.
Example 3
The steps of the continuous production method of thermal arc evaporation multi-cavity carbon nano powder using the device described in example 1 are the same as in example 2, except that:
the anode target material in the step (1) is a mixture of different types of carbon and a catalyst, the carbon material is graphite, carbon black or active carbon, the catalyst is transition metal or yttrium oxide, when the catalyst is transition metal, the obtained carbon nanotubes are multi-wall carbon nanotubes, when the catalyst is yttrium oxide, the obtained carbon nanotubes are single-wall carbon nanotubes, and the atomic ratio of carbon atoms to metal atoms in the mixture of the carbon material and the catalyst is 80-100;
when the carbon nano-tubes and the carbon nano-spheres are prepared in the step (3) or the step (7), the direct current voltage is 50-180V; the direct current voltage of the nano graphite is 40-60V, and the discharge current is 90-120A;
the particle size of the nano carbon tube in the step (5) is 5-90nm; the particle diameter of the nano carbon sphere is 60-100nm; the thickness of the nano graphite is 3-6nm, and the maximum size is 200-2000nm;
the specific step of collecting the carbon nano powder in the step (6) is that collecting the carbon nano powder in situ: when any anode target is consumed, the arc in the cavity is closed, argon is filled to one atmosphere, a valve between the cavity and the processing chamber is opened, nano powder naturally subsides into a collecting tank of the processing chamber, and the nano powder can be taken out after sealed package.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (4)
1. The thermal arc evaporation multi-cavity nano powder preparation device is characterized in that at least two main cavity powder generation units are arranged;
each main chamber powder generating unit is connected to a vacuum main pipe (13) through a respective vacuum branch pipe (14), and the vacuum main pipe is connected to a vacuum pump set system (17);
each main chamber powder generating unit is connected to the main exhaust pipeline (2) through a respective exhaust branch pipeline (4), and each main chamber powder generating unit is connected to the main air inlet pipeline (3) through a respective air inlet branch pipeline (7);
each main chamber powder generating unit is connected to an arc power supply and a control system (1) through each thermal arc control signal wire and each feeding control signal wire respectively;
the main chamber powder generating unit comprises a main chamber (9) and a thermal arc device (6), wherein the thermal arc device is arranged at the top of the main chamber, a collecting chamber (18) is arranged at the bottom of the main chamber, and the thermal arc device comprises a cathode (26) arranged at the top of the main chamber and extending into the main chamber and a cathode control device for controlling the cathode to move in three directions;
an anode (31) is arranged at the right position below the cathode, an automatic feeding device (10) is arranged at the rear end of the anode to control anode feeding, and a cooling water device is arranged at the front end of the anode to cool the anode;
the cathode control device comprises a support rod fixing device (35), an arc conduction device (36), a spherical compensator (37), a support rod (38) and a cathode clamping device (39), wherein the support rod fixing device (35) is connected with the support rod (38) and the spherical compensator (37) in a rigid connection mode, the arc conduction device (36) is distributed inside the support rod (38), and an anode (31) is clamped at the tail end of the support rod through the cathode clamping device (39) to lead out an arc;
the cooling water device comprises a supporting base (22), cooling water pipes (23) and cooling grooves (24), wherein the cooling grooves (24) are distributed in the supporting base (22), the cooling water pipes (23) are connected with the supporting base (22), and cooling water enters the cooling grooves (24) through the cooling water pipes (23) to circularly flow.
2. The thermal arc evaporation multi-cavity nano powder preparation device according to claim 1, wherein vacuum valves (11) are respectively arranged on the vacuum branch pipelines, exhaust valves (5) are respectively arranged on the exhaust branch pipelines, and air inlet valves (8) are respectively arranged on the air inlet branch pipelines.
3. The thermal arc evaporation multi-cavity nano-powder preparation device according to claim 1, wherein the main chamber is provided as a cooling wall (20) for cooling water circulation.
4. The thermal arc evaporation multi-cavity nano powder preparation device according to claim 1, wherein the upper end of the collecting chamber is connected with the main chamber through a butterfly valve (28), the other end of the collecting chamber is connected with a transition bin, and an observation window and a collecting glove are further arranged on the collecting chamber.
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