CN210817969U - Device for preparing multi-cavity nano powder by evaporating heat arc and laser composite heat source - Google Patents
Device for preparing multi-cavity nano powder by evaporating heat arc and laser composite heat source Download PDFInfo
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- CN210817969U CN210817969U CN201920132539.0U CN201920132539U CN210817969U CN 210817969 U CN210817969 U CN 210817969U CN 201920132539 U CN201920132539 U CN 201920132539U CN 210817969 U CN210817969 U CN 210817969U
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Abstract
The utility model relates to a nanometer powder preparation technical field specifically is hot arc and the compound heat source evaporation multi-chamber nanometer powder preparation facilities of laser. Arranging at least two main cavity powder generating units; each main chamber powder generating unit is connected to a vacuum main pipeline through a vacuum branch pipeline, and the vacuum main pipeline is connected to a vacuum pump unit system; each main chamber powder generating unit is connected to the main exhaust pipeline through a respective exhaust branch pipeline, and each main chamber powder generating unit is connected to the main air inlet pipeline through a respective air inlet branch pipeline; each main chamber powder generating unit is connected to an arc power supply and a control system through a self-heating arc control signal line, a laser signal line and a feeding control signal line. The utility model avoids mutual pollution in the process of preparing the powder and improves the purity of the powder; the simultaneous preparation of a plurality of different component powders is realized; continuous production is realized; the production efficiency is greatly improved and the cost is reduced.
Description
Technical Field
The utility model relates to a nanometer powder preparation technical field specifically is hot arc and the compound heat source evaporation multi-chamber nanometer powder preparation facilities of laser.
Background
The direct current arc plasma is an effective heat source for preparing nano particles, particularly core/shell type metal (alloy) nano composite particles, carbon-related materials and ceramic nano materials, and the method is adopted to preliminarily realize mass production at present, for example, Chinese patent applications: a multi-source direct current arc automated nano-powder production system and a method (201410189518.4), but for large-scale industrial production, a plurality of technical problems exist, which mainly show how to prepare nano-powder with high efficiency, low cost, high purity, no pollution and continuity. Meanwhile, the production of the powder by adopting a laser evaporation mode is beneficial to improving the production efficiency of the powder, reducing pollution and preparing high-purity nano powder.
The existing nano powder preparation equipment mainly aims at the generation, classification, capture and treatment of nano powder in a single cavity, namely a single generation chamber, and the single cavity powder preparation equipment has the following defects:
1. low production efficiency and high cost
At present, in the single-cavity powder preparation equipment and process, in the circulating process of vacuum extraction, powder generation and treatment, vacuum maintenance and the like, most of time is used for vacuumizing, vacuum maintaining and circulating, the equipment vacuumizing needs 3-4 h in one-time preparation process, the time for powder preparation is less than 0.5h, the time for vacuum extraction and vacuum maintaining accounts for 50% -70%, the actual powder production time is 15-20%, and overall speaking, the production efficiency is low, and meanwhile, due to the fact that the process is repeatedly repeated through the vacuum extraction and the vacuum maintaining, a large amount of energy is consumed, and the cost is greatly increased.
2. Low purity and cross contamination
After the preparation of the nano powder of one material is finished, if the powder of other materials is prepared, the residual powder at the copper crucible, the equipment connection part and the like cannot be removed, so that the mutual pollution of at least 2 kinds of powder exists when the next powder is prepared, and the purity of the nano powder is reduced.
3. Can not realize continuous production in the true sense
The existing single-cavity powder preparation equipment and process are limited by the size of an anode material, and have the problem of insufficient continuity in the continuous feeding and supplying process of the material. Meanwhile, the collection process of the powder needs repeated vacuum removal and vacuum pumping processes, so that the requirement on operation time is high, continuous production cannot be realized on the premise of ensuring the product quality in large-scale industrial production, and the powder is gradually eliminated in the near future.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a heat arc and the compound heat source evaporation multi-chamber nanometer powder preparation facilities of laser to solve the problem of proposing among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme:
the device for preparing the multi-cavity nano powder by the evaporation of the heat arc and the laser composite heat source is characterized in that at least two main cavity powder generating units are arranged;
each main chamber powder generating unit is connected to a vacuum main pipeline through a vacuum branch pipeline, and the vacuum main pipeline is connected to a vacuum pump unit system;
each main chamber powder generating unit is connected to the main exhaust pipeline through a respective exhaust branch pipeline, and each main chamber powder generating unit is connected to the main air inlet pipeline through a respective air inlet branch pipeline;
each main chamber powder generating unit is connected to an arc power supply and a control system through a self-heating arc control signal line, a laser signal line and a feeding control signal line;
the device comprises a main chamber, a hot arc device and a laser device, wherein the top of the main chamber is provided with the hot arc device and the laser device, the bottom of the main chamber is provided with a collecting chamber, and the hot arc device comprises a cathode arranged at the top of the main chamber and extending into the main chamber and a cathode control device for controlling the cathode to move in three directions; laser emitted by the laser device irradiates the target material through gallium arsenide glass to generate nano powder;
the X-direction motion transmission device is controlled to be tensioned and loosened through starting and stopping of the X-direction permanent magnet synchronous low-speed motor, so that X-direction rotation of the spherical compensator in semicircular contact is realized, and X-direction movement of the tungsten rod is realized.
Similarly, the Y-direction permanent magnet synchronous low-speed motor and the Y-direction motion transmission device have similar functions as the X-direction permanent magnet synchronous low-speed motor and the X-direction motion transmission device, and the Y-direction movement of the tungsten rod is realized.
The rotation of the threaded rod in the Z-direction motion transmission device is controlled through the forward and reverse rotation of the Z-direction permanent magnet synchronous low-speed motor, so that the up-and-down movement of the support rod is realized, and the Z-direction movement of the tungsten rod is controlled.
The arc conduction device is distributed in the support rod and is connected with the support rod into a whole through the support rod fixing device, and the support rod is connected with the upper half part of the spherical compensator in a bolt fixing mode. The X, Y direction movement of the tungsten rod is realized by the relative position change of the semi-spherical surface of the spherical compensator.
The automatic control of X, Y, Z triaxial six directions of the tungsten rod is realized through the structural design, and the replaceability of cathode materials is realized by clamping the tungsten rod by the cathode clamping device. The electric arc conduction device is distributed inside the support rod, so that the electric arc conduction device is prevented from being in contact with powder in the cavity, the safety of the powder preparation process is ensured, and the powder residue in the cleaning process is avoided.
The positive position below negative pole sets up the positive pole, the positive pole rear end sets up automatic feeding device control positive pole pay-off, the positive pole front end sets up the cooling water installation in order to cool off the positive pole. The feeding device consists of a sealing rubber ring, a propelling screw rod, a servo motor, a transmission device and the like. The head part of the raw material rod is in a conical protrusion shape, and the tail part of the raw material rod is in a conical concave pit shape and is gradually pushed into the main cavity by the pushing screw rod at the speed of 2 mm/min. Wherein the servo motor is connected with the transmission device to provide the propelling force for propelling the screw rod. The raw material rod and the wall of the main cavity are sealed by the sealing rubber ring, so that the vacuum degree in the cavity is ensured.
And each vacuum branch pipeline is respectively provided with a vacuum valve, each exhaust branch pipeline is respectively provided with an exhaust valve, and each air inlet branch pipeline is respectively provided with an air inlet valve. The vacuum valve, the exhaust valve and the intake valve respectively control vacuum extraction, exhaust and intake of the main cavity, so that vacuum, exhaust and intake of the main cavity are respectively and independently controlled.
The cathode control device comprises a support rod fixing device, an electric arc conduction device, a support rod positioning device, a support rod and a cathode clamping device, wherein the support rod fixing device is connected with the support rod and the spherical compensator in a rigid connection mode, the electric arc conduction device is distributed in the support rod, and the tail end of the support rod clamps the tungsten rod through the cathode clamping device to lead out electric arcs.
The anode front end sets up the cooling water device, the cooling water device includes supporting base, condenser tube, cooling bath, and the cooling bath distributes inside the supporting base, and condenser tube links to each other with the supporting base, and the condenser tube gets into the cooling bath circulation flow through condenser tube. The circulating water is led out to cooling system by condenser tube, and the circulating flow of inside circulating water can be realized to inside hollow structural design. The switch of the cooling system is controlled by the condenser. Before the plant is in operation, the condensing system must be switched on.
The main chamber is provided as a cooling wall for cooling water circulation. The hollow cooling wall can obviously improve the cooling area, thereby achieving better cooling effect on the whole cooling of the cavity and prolonging the continuous working time of the equipment.
The collecting chamber upper end is connected with the main chamber through a butterfly valve, the other end of the collecting chamber is connected with a transition bin, and an observation window and collecting gloves are further arranged on the collecting chamber. And after the powder preparation is finished, opening a butterfly valve to enable the nano powder to fall into a collection chamber, collecting the powder by using collection gloves, then loading the powder into a transition bin, taking out the powder, and then vacuumizing the transition bin. The transition bin is used for ensuring the vacuum state of the main chamber and the collecting chamber during the powder taking process in the using process.
Compared with the prior art, the beneficial effects of the utility model are that:
1. greatly improves the production efficiency and reduces the cost
The multiple cavities simultaneously use the same set of vacuum pumping system, and for a single cavity, the vacuum system does not need to be repeatedly opened and closed, so that the vacuum pumping time in production is greatly reduced. In addition, the single cavities are connected in series independently, so that the overhaul and the maintenance of single equipment can be realized, and the large-scale production stop caused by the damage of the equipment is avoided. The production efficiency is improved by at least 30 percent, and the production cost is reduced by at least 20 percent.
2. Realize continuous production
The multi-cavity continuous production process can realize the production effect of continuously switching and continuously evaporating the nano powder among different cavities in the industry, and avoids equipment outage caused by the damage and maintenance of single cavity equipment. The production line type equipment connection mode can realize continuous production on the premise that the vacuum system meets continuous work.
3. Realizes the simultaneous preparation of a plurality of different component powders
The different independent cavities are mutually independent, and the nano-powder with different components can be prepared by evaporation in different cavities, so that the function of simultaneously preparing different powders on one device is realized.
4. Avoiding mutual pollution in the process of preparing the powder and improving the purity of the powder
The hidden positions such as a device connecting port and a valve cannot be efficiently cleaned in the cleaning process of single cavity equipment, so that the cross contamination of powder can be caused by the preparation of different kinds of powder by using a single cavity, and the purity is reduced. The equipment can prepare nano powder with the same component in each independent cavity, thereby preventing mutual pollution caused by preparation of different powders in one cavity and improving the purity of the powder to 99.9 percent.
Drawings
FIG. 1 is a schematic structural diagram of a multi-cavity nano-powder preparation device by evaporation with a heat arc and laser combined heat source.
Fig. 2 is a schematic structural diagram of the powder generating unit in the main chamber in fig. 1.
Fig. 3 is a schematic view of the structure of the thermal arc apparatus of fig. 1.
Fig. 4 is a top view of fig. 3.
In the figure: 1. an arc power supply and control system, 2, a main exhaust pipe, 3, a main intake pipe, 4, a branch exhaust pipe, 5, an exhaust valve, 6, a thermal arc device, 7, a branch intake pipe, 8, an intake valve, 9, a main chamber, 10, an automatic feeding device, 11, a vacuum valve, 12, a transition bin, 13, a main vacuum pipe, 14, a branch vacuum pipe, 15, a thermal arc control signal line, 16, a feeding control signal line, 17, a vacuum pump set system, 18, a collection chamber, 19, a laser device, 20, a cooling wall, 21, a crucible, 22, a supporting base, 23, a cooling water pipe, 24, a cooling tank, 25, an intake port, 26, a cathode, 27, an exhaust port, 28, a butterfly valve, 29, an observation window, 30, a collection glove, 31, an anode, 32, an X-direction permanent magnet synchronous low speed motor, 33, an X-direction motion transmission device, 34, a Z-direction motion transmission device, 35, a support rod fixing device, 36. the device comprises an arc conducting device, a spherical compensator, a supporting rod, a cathode clamping device, a Y-direction permanent magnet synchronous low-speed motor, a 41-Y-direction motion transmission device and a 42-Z-direction permanent magnet synchronous low-speed motor, wherein the arc conducting device is arranged on the arc conducting device, and the spherical compensator is arranged on the arc conducting device.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Example 1
As shown in FIGS. 1-4, the device for preparing multi-cavity nano powder by evaporation of heat arc and laser composite heat source is provided with at least two main units
A chamber powder generating unit;
each main chamber powder generating unit is respectively connected to a main vacuum pipeline 13 through a respective vacuum branch pipeline 14, and the main vacuum pipeline is connected to a vacuum pump unit system 17;
each main chamber powder generating unit is connected to the main exhaust pipeline 2 through a respective exhaust branch pipeline 4, and each main chamber powder generating unit is connected to the main intake pipeline 3 through a respective intake branch pipeline 7;
each main chamber powder generating unit is respectively connected to the arc power supply and control system 1 through each self-heating arc control signal line and each feeding control signal line;
the main chamber powder generating unit comprises a main chamber 9, a thermal arc device 6 and a laser device 19, wherein the top of the main chamber is provided with the thermal arc device and the laser device 19, the bottom of the main chamber is provided with a collecting chamber 18, and the thermal arc device comprises a cathode 26 and a cathode control device, wherein the cathode 26 is arranged at the top of the main chamber and extends into the main chamber, and the cathode control device controls the cathode to move in three directions; laser emitted by the laser device 19 irradiates the target material through gallium arsenide glass to generate nano powder;
the X-direction motion transmission device 33 is controlled to be tensioned and loosened through starting and stopping of the X-direction permanent magnet synchronous low-speed motor 32, so that X-direction rotation of the spherical compensator half 37 in circular contact is realized, and X-direction movement of the tungsten rod 31 is realized.
Similarly, the Y-direction permanent magnet synchronous low-speed motor 40 and the Y-direction motion transmission device 41 function similarly to the X-direction permanent magnet synchronous low-speed motor 32 and the X-direction motion transmission device 33, and realize the Y-direction movement of the tungsten rod 31.
The rotation of the threaded rod in the Z-direction motion transmission device 34 is controlled by the positive and negative rotation of the Z-direction permanent magnet synchronous low-speed motor 42, so that the up-and-down movement of the support rod 38 is realized, and the Z-direction movement of the tungsten rod 31 is controlled.
The arc conducting device 36 is distributed inside the support rod 38 and is connected with the support rod 38 into a whole through the support rod fixing device 35, and the support rod 38 is connected with the upper half part of the spherical compensator 37 through a bolt fixing mode. The X, Y-direction movement of the tungsten rod 31 is realized by the relative position change of the hemispherical surface of the spherical compensator 37.
The automatic control of X, Y, Z three-axis six directions of the tungsten rod is realized through the structural design, and the replaceability of cathode materials is realized by clamping the tungsten rod 31 by the cathode clamping device 39. The electric arc conduction device 36 is distributed inside the support rod 38, so that the electric arc conduction device 36 is prevented from being in contact with powder in the cavity, the safety of the powder preparation process is ensured, and the powder residue in the cleaning process is avoided.
An anode 31 is arranged at the positive position below the cathode, an automatic feeding device 10 is arranged at the rear end of the anode to control feeding of the anode, and a cooling water device is arranged at the front end of the anode to cool the anode; the feeding device comprises a sealing rubber ring, a propelling screw rod, a servo motor and a transmission device, the head part of the feeding device is in a conical protrusion shape, a cylindrical raw material rod with a conical pit at the tail part of the feeding device is gradually propelled into the main cavity at the speed of 2mm/min by the propelling screw rod, the servo motor is connected with the transmission device to provide propelling force for propelling the screw rod, the raw material rod and the wall of the main cavity are sealed by the sealing rubber ring, and the vacuum degree inside the cavity is guaranteed.
The vacuum branch pipelines are respectively provided with a vacuum valve 11, the exhaust branch pipelines are respectively provided with an exhaust valve 5, the air inlet branch pipelines are respectively provided with an air inlet valve 8, and the vacuum valves, the exhaust valves and the air inlet valves respectively control vacuum extraction, exhaust and air inlet of the main cavities, so that vacuum, exhaust and air inlet of the main cavities are respectively and independently controlled.
The cathode control device comprises a support rod fixing device 35, an arc conducting device 36, a spherical compensator 37, a support rod 38 and a cathode clamping device 39, wherein the support rod fixing device 35 is connected with the support rod 38 and the spherical compensator 37 in a rigid connection mode, the arc conducting device 36 is distributed in the support rod 38, and the tail end of the support rod clamps the tungsten rod 31 through the cathode clamping device 39 to lead out an arc.
The front end of the anode is provided with a cooling water device, the cooling water device comprises a supporting base 22, a cooling water pipe 23 and a cooling tank 24, the cooling tank 24 is distributed inside the supporting base 22, the cooling water pipe 23 is connected with the supporting base 22, and cooling water enters the cooling tank 24 through the cooling water pipe 23 to flow circularly.
The main chamber is provided as a cooling wall 20 for cooling water circulation.
The collecting chamber upper end is connected with the main chamber through a butterfly valve 28, the collecting chamber other end is connected with a transition bin, and the collecting chamber is further provided with an observation window and collecting gloves.
Example 2
The method for continuously producing the metal nano powder by the heat arc and laser composite heat source evaporation by using the device in the embodiment 1 comprises the following steps:
(1) and placing a target material: installing single metal and metal alloy target materials with the same or different components on the anode holders of the independent cavities as anodes, taking tungsten, platinum or molybdenum with the melting point higher than 3000 ℃ as cathodes, sealing and installing gallium arsenide glass with the thickness of 3-5mm at an upper opening of the inner wall of the cavity above the target materials, and cooling the gallium arsenide glass;
(2) and vacuumizing: closing the hatch door of each independent cavity, opening the vacuum valve of each independent cavity, and vacuumizing all the cavities until the vacuum degree is not higher than 10-4Pa, closing the vacuum valve of each independent cavity;
(3) filling working gas: opening the air inlet valve of each independent cavity, introducing a mixed gas of argon and hydrogen as a working gas, wherein the pressure of the argon is 0.1 atmosphere, and the pressure of the hydrogen is 0.2-0.3 atmosphere;
(4) and arcing: introducing 50-180V direct current voltage between the cathode and the anode, and melting and evaporating the anode;
(5) and introducing laser: introducing an external laser light source into the cavity through the gallium arsenide glass, adjusting the laser power to 300-;
(6) and (3) evaporating the heat source combining the thermal arc and the laser, namely increasing the laser power to 3000W for the target evaporation power, increasing the arc power to 500W for 600W at the same time, starting the evaporation of the target, and changing the evaporation efficiency of the anode by controlling the power of the heat source combining the thermal arc and the laser, wherein the evaporation efficiency is defined as η -P/P0η ranges from 0.6 to 0.95 depending on the metal, wherein magnesium, aluminum, calcium, zinc is 0.9 to 0.95, iron, cobalt, nickel is 0.8 to 0.9, molybdenum, niobium, tantalum is 0.6 to 0.8;
(7) and forming powder: the temperature gradient in the cavity is controlled by controlling the flow of cooling water or placing a liquid nitrogen cooling pipe in the cavity. The central temperature is 12000-17000K, the temperature of the cavity wall is 300K, the temperature gradient is 25000-37000K/m, the diameters of the nanoparticles are different under different temperature gradients, the 25000-27000K/m particle size is 60-90nm, the 27000-30000K/m particle size is 30-60nm, the 30000-37000K/m particle size is 5-30 nm;
(8) and collecting metal nano powder: the method comprises the following specific steps of collecting passivated metal nano powder: when any one of the anode target materials is consumed, closing the corresponding laser light source of the cavity, closing electric arcs in the cavity, opening an air release valve, filling 2-5% of air into the cavity, then closing the air release valve, standing for 4-6 hours to form an oxide protective layer with the thickness of 2-5 nanometers on the metal surface, after passivation, opening the air release valve, filling air to atmospheric pressure, opening a cabin door of the cavity, and taking out powder;
(9) and target material replacement: cleaning the cavity with the powder taken out, putting a single metal or metal alloy target material with the same component as the target material put in the cavity before as an anode, closing the door of the cavity, opening the vacuum valve of the cavity, and vacuumizing the cavity until the vacuum degree is not higher than 10-4Pa, closing a vacuum valve of the cavity, opening an air inlet valve of the cavity, introducing a mixed gas of argon and hydrogen as a working gas, introducing direct-current voltage between a cathode and an anode, and melting and evaporating the anode;
(10) and continuous production: repeating the process steps (4) to (9) to realize continuous production.
Example 3
The steps of the method for continuously producing the carbon nano powder by the heat arc and laser composite heat source evaporation by using the device in the embodiment 1 are the same as those in the embodiment 1, and the difference is as follows:
the anode target in the step (1) is a mixture of different types of carbon and a catalyst, the carbon material is graphite, carbon black or activated carbon, the catalyst is transition metal or yttrium oxide, when the catalyst is the transition metal, the obtained carbon nanotubes are multiwall carbon nanotubes, when the catalyst is the yttrium oxide, the obtained carbon nanotubes are single-wall carbon nanotubes, and the atomic ratio of carbon atoms to metal atoms in the mixture of the carbon material and the catalyst is 80-100;
when the carbon nanotubes and carbon nanospheres are prepared in the step (4) or the step (9), the introduced direct current voltage is 50-180V; the direct current voltage introduced during the preparation of the nano graphite is 40-60V, and the discharge current is 90-120A;
the grain diameter of the carbon nano-tube in the step (7) is 5-90 nm; the grain diameter of the nano carbon spheres is 60-100 nm; the thickness of the nano graphite is 3-6nm, and the maximum size is 200-2000 nm;
the carbon nano powder collection in the step (8) comprises the following specific steps of in-situ carbon nano powder collection: and when any one of the anode target materials is consumed, closing the cavity corresponding to the laser light source, closing the electric arc in the cavity, introducing argon to one atmosphere, opening a valve between the cavity and the treatment chamber, naturally settling the nano powder into a collection tank of the treatment chamber, sealing and packaging, and taking out.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (6)
1. The device for preparing the multi-cavity nano powder by the evaporation of the heat arc and the laser composite heat source is characterized in that at least two main cavity powder generating units are arranged;
each main chamber powder generating unit is respectively connected to a main vacuum pipeline (13) through a respective vacuum branch pipeline (14), and the main vacuum pipeline is connected to a vacuum pump unit system (17);
each main chamber powder generating unit is connected to the main exhaust pipeline (2) through a respective exhaust branch pipeline (4), and each main chamber powder generating unit is connected to the main intake pipeline (3) through a respective intake branch pipeline (7);
each main chamber powder generating unit is respectively connected to an arc power supply and a control system (1) through each self-heating arc control signal line and each feeding control signal line;
the main chamber powder generating unit comprises a main chamber (9), a thermal arc device (6) and a laser device (19), wherein the top of the main chamber is provided with the thermal arc device (6) and the laser device (19), the bottom of the main chamber is provided with a collecting chamber (18), and the thermal arc device comprises a cathode (31) which is arranged at the top of the main chamber and extends into the main chamber, and a cathode control device which controls the cathode to move in three directions; laser emitted by the laser device irradiates the target material through gallium arsenide glass to generate nano powder;
an anode (26) is arranged at the positive position below the cathode, an automatic feeding device (10) is arranged at the rear end of the anode to control feeding of the anode, and a cooling water device is arranged at the front end of the anode to cool the anode; the feeding device comprises a sealing rubber ring, a propelling screw rod, a servo motor and a transmission device, the head part of the feeding device is in a conical protrusion shape, a cylindrical raw material rod with a conical pit at the tail part of the feeding device is gradually propelled into the main cavity at the speed of 2mm/min by the propelling screw rod, the servo motor is connected with the transmission device to provide propelling force for propelling the screw rod, the raw material rod and the wall of the main cavity are sealed by the sealing rubber ring, and the vacuum degree inside the cavity is guaranteed.
2. The device for preparing the multi-cavity nano powder through evaporation by using the thermal arc and laser composite heat source as claimed in claim 1, wherein each vacuum branch pipe is provided with a vacuum valve (11), each exhaust branch pipe is provided with an exhaust valve (5), each air inlet branch pipe is provided with an air inlet valve (8), and each vacuum valve, each exhaust valve and each air inlet valve respectively control vacuum extraction, exhaust and air inlet of each main cavity, so that vacuum, exhaust and air inlet of each main cavity are respectively and independently controlled.
3. The device for preparing the multi-cavity nano-powder through the evaporation of the heat arc and laser combined heat source according to claim 1, wherein the cathode control device comprises a support rod fixing device (35), an arc conducting device (36), a spherical compensator (37), a support rod (38) and a cathode clamping device (39), the support rod fixing device (35) is connected with the support rod (38) and the spherical compensator (37) in a rigid connection mode, the arc conducting device (36) is distributed inside the support rod (38), and the cathode (31) is clamped at the tail end of the support rod through the cathode clamping device (39) to extract an arc.
4. The device for preparing the multi-cavity nano-powder by the evaporation of the heat arc and the laser composite heat source according to claim 1, wherein a cooling water device is arranged at the front end of the anode, the cooling water device comprises a supporting base (22), a cooling water pipe (23) and cooling tanks (24), the cooling tanks (24) are distributed in the supporting base (22), the cooling water pipe (23) is connected with the supporting base (22), and cooling water enters the cooling tanks (24) through the cooling water pipe (23) to flow in a circulating manner.
5. The apparatus for preparing multi-cavity nanopowder by evaporation from a combined heat source of thermal arc and laser according to claim 1, wherein the main chamber is provided as a cooling wall (20) for cooling water circulation.
6. The device for preparing the multi-cavity nano powder by the evaporation of the hot arc and the laser composite heat source according to claim 1, wherein the upper end of the collection chamber is connected with the main chamber through a butterfly valve (28), the other end of the collection chamber is connected with a transition bin, and the collection chamber is further provided with an observation window and collection gloves.
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| CN201920132539.0U CN210817969U (en) | 2019-01-25 | 2019-01-25 | Device for preparing multi-cavity nano powder by evaporating heat arc and laser composite heat source |
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| CN201920132539.0U CN210817969U (en) | 2019-01-25 | 2019-01-25 | Device for preparing multi-cavity nano powder by evaporating heat arc and laser composite heat source |
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