CN109531424B - Envelope type dressing method and device for polishing disk - Google Patents
Envelope type dressing method and device for polishing disk Download PDFInfo
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- CN109531424B CN109531424B CN201910019569.5A CN201910019569A CN109531424B CN 109531424 B CN109531424 B CN 109531424B CN 201910019569 A CN201910019569 A CN 201910019569A CN 109531424 B CN109531424 B CN 109531424B
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- trimming
- guide rail
- polishing disk
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- 238000005498 polishing Methods 0.000 title claims abstract description 132
- 238000000034 method Methods 0.000 title claims abstract description 43
- 238000009966 trimming Methods 0.000 claims abstract description 56
- 229910003460 diamond Inorganic materials 0.000 claims description 12
- 239000010432 diamond Substances 0.000 claims description 12
- 238000006073 displacement reaction Methods 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 10
- 238000007670 refining Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 4
- 238000003801 milling Methods 0.000 abstract description 3
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/02—Devices or means for dressing or conditioning abrasive surfaces of plane surfaces on abrasive tools
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
The invention provides an envelope type dressing method and a device thereof, which can realize the high-efficiency and high-precision dressing of a polishing disk of a large-caliber plane polishing machine, wherein the large cutting dosage is selected to rapidly remove the polishing disk, and the shape error of the large scale of the surface is removed, so that the shape error of the surface of the polishing disk is less than or equal to 30 mu m; then, the vertical compensation amount of the Z axis in the trimming process is regulated according to the shape of the trimmed disc surface, and the shape accuracy of the polishing disc is further improved to be less than or equal to 10 mu m; and finally, carrying out fine smooth finishing on the surface of the polishing disk, and achieving the shape precision meeting the use requirement. The invention adopts the small-caliber type trimming disc to trim the polishing disc based on the ultra-precise milling principle, combines the advantages of a full-caliber type trimming method and a small-tool type trimming method in a motion mode, realizes the high-precision trimming of the meter-level plane polishing disc, improves the trimming precision and the trimming efficiency, and provides an effective control method for the surface shape convergence of a large-caliber plane optical element.
Description
Technical Field
The invention relates to the technical field of optical processing, in particular to a polishing disc trimming method and device of a large-caliber plane polishing machine.
Background
The polishing process of the optical element mainly depends on the relative motion and chemical erosion between the polishing disk and the element to realize material removal, so the characteristics and shape accuracy of the polishing disk have a decisive influence on the material removal of the element. With the continuous progress of polishing, polishing discs made of polyurethane and other materials have the phenomena of surface micropore blocking and glazing, which are unfavorable for polishing surface quality and processing efficiency, and the polishing discs need to be regularly dressed in order to maintain the long-period processing capability of the polishing discs.
The traditional polishing disc trimming method of the large-caliber plane polishing machine is two types, namely a full-caliber trimming method, namely a diamond trimmer with the same radius as the polishing disc or a slightly larger size is adopted to trim the polishing disc, the structural rigidity of a trimming system is good, the trimming system can be quickly removed and a stable trimming effect can be achieved, but the method is limited by the space posture precision of the trimmer, an inherent inclination angle exists between the trimmer and the polishing disc, the shape precision of the trimmed surface is poor, the controllability is low, and the engineering application and the further improvement of the processing precision are not facilitated; the other method is a small tool type trimming method, namely, a small-caliber diamond disk is adopted to locally remove the polishing disk, and global deterministic trimming of the polishing disk is realized through interpolation motion of the small tool and the polishing disk, the trimming precision of the method mainly depends on track planning, and compared with full-caliber trimming, the polishing disk precision is improved, but the shape distribution of the polishing disk is uneven and the efficiency is low.
Disclosure of Invention
The invention aims to solve the technical problem of providing an envelope type dressing method and device capable of realizing efficient and high-precision dressing of a polishing disc of a large-caliber plane polishing machine.
The technical scheme adopted for solving the technical problems is as follows: envelope dressing method of polishing disk, first assume that0, then selecting a larger cutting amount to quickly remove the polishing disk, and removing the shape error of the large surface scale to enable the shape error of the surface of the polishing disk to reach +.>Then according to the shape of the disc after trimming +.>To adjust the vertical compensation amount of the Z axis in the trimming process, and further improve the shape accuracy of the polishing disk to +.>Finally, the surface of the polishing disk is subjected to fine smooth finishing, and the shape precision meeting the use requirement is achieved>
A method of envelope dressing a polishing pad, the method comprising the steps of:
1) Detecting and obtaining the straightness error of the first guide rail of the polishing disc envelope type trimming device by adopting a double-frequency laser interferometer or other equipmentAnd parallelism error of the first guide rail and the polishing disk +.>
2) The polishing disc is rapidly trimmed, the polishing disc rotates at a constant speed during trimming, and the trimmer rotates at a high speed and slowly translates along the X direction;
3) Measuring by using a laser displacement sensor to obtain the shape accuracy of the polishing disk
4) Polishing disk is finished, the polishing disk rotates at a constant speed during finishing, the trimmer rotates at a high speed, andslowly translate along the X direction, and move the trimmer up and down along the Z direction while translating to compensate the space position error of the first guide railAnd shape error of polishing disk->Up-down movement +.>Wherein a is p Is a tool setting value;
5) Measuring by using a laser displacement sensor to obtain the shape accuracy of the polishing disk
6) Polishing disc is refined, the polishing disc rotates at a constant speed during refining, the trimmer rotates at a high speed and slowly translates along the X direction, and the trimmer moves up and down along the Z direction while translating, so as to compensate the space position error of the first guide railAnd shape error of polishing disk->Up-down movement +.>Wherein a is p Is a tool setting value;
7) Measuring by using a laser displacement sensor to obtain the shape accuracy of the polishing diskAnd judging whether the operation requirement is met, stopping finishing if the operation requirement is met, and returning to the step 4 to finish again if the operation requirement is not met.
Further, the constant speed rotation speed in the step 2, the step 4 and the step 6 is 1-10rpm; the high-speed rotation speed is 100-200rpm; the slow translation speed is that the distance of one circle of translation of the trimmer is smaller than or equal to the diameter of the trimmer.
Further, the cutting amount in the step 2 is set to 40-60 μm; the cutting amount in step 4 is set to not more than 10 μm; the cutting amount in step 6 is set to not more than 5 μm.
Further, the dressing track of each diamond particle on the dresser relative to the polishing disk is as follows:
wherein r is the distance between diamond particles and the rotation axis of the trimmer, s is the rotation speed of the trimmer, C is the rotation speed of the polishing disk, f is the translational feeding speed of the trimmer, a p For the tool setting value of the trimmer,for the spatial position error of the first rail, +.>Is the shape error of the polishing disc.
The dressing device of the polishing disc envelope dressing method comprises supporting seats, a cross beam, a first guide rail, a first screw rod and a first motor, wherein the cross beam is arranged on the two supporting seats, the cross beam is provided with the first guide rail, the first screw rod and the first motor, the dressing device further comprises a dressing system, the dressing system comprises a second guide rail, a second screw rod, a second motor, a dressing axle box and a dressing device, the second guide rail is arranged on the first screw rod, and the first motor drives the first screw rod to rotate so as to drive the dressing system to horizontally move along the first guide rail; the second guide rail is provided with a second screw rod and a second motor, the trimming axle box is arranged on the second screw rod, and the second motor drives the second screw rod to rotate to drive the trimming axle box to vertically move up and down along the second guide rail; and a trimmer is arranged at the lower end of the trimming axle box and driven by a high-speed motor in the trimming axle box, and a plurality of diamond particles are arranged on the trimmer.
The beneficial effects of the invention are as follows: the invention is based on the ultra-precise milling principle, adopts a small-caliber trimming disc to trim the polishing disc, combines the advantages of a full-caliber trimming method and a small-tool trimming method in a motion mode, and the trimming device is fixed on a trimming axle box, and the trimming precision is mainly related to the precision and the motion control mode of a machine tool; the envelope type trimming method realizes the high-precision trimming of the meter-level plane polishing disk, improves the trimming precision and the trimming efficiency, and provides an effective control method for the surface shape convergence of the large-caliber plane optical element; the polyurethane polishing disk with the diameter of 1700mm can be trimmed to 8 mu m in a few hours; the invention can realize the rapid trimming of the planar polishing disk, can meet the trimming requirements of polishing disks with different sizes, and has simple trimming operation and good stability.
Drawings
Fig. 1 is a perspective view of the device of the present invention.
Fig. 2 is a front view of the device of the present invention.
Fig. 3 is a side view of fig. 2.
Fig. 4 is a schematic diagram of the method of the present invention.
Fig. 5 is a flow chart of the method of the present invention.
Figure 6 is an initial shape of a polishing pad according to an embodiment of the present invention.
FIG. 7 shows the straightness error of the first guide rail measured in step 1 of the embodiment of the present invention
FIG. 8 is a step of an embodiment of the present inventionParallelism error of polishing disk measured in step 1
Figure 9 is a diagram illustrating the shape of a polishing pad after rapid prototyping in step 3 in accordance with an embodiment of the present invention.
Fig. 10 is a graph showing the up-down movement amount Z of the finisher according to the embodiment of the present invention.
Fig. 11 is a diagram showing a finished shape of a polishing pad according to an embodiment of the present invention.
Fig. 12 is a graph showing the up-down movement amount Z of the finisher according to the embodiment of the present invention.
Fig. 13 is a shape diagram of a finished polishing pad according to an embodiment of the present invention.
Detailed Description
As shown in fig. 1 to 3, the polishing disc envelope dressing device of the present invention comprises a supporting seat 1, a beam 2, a first guide rail 3, a first screw rod 4, a first motor 5 and a dressing system, wherein the beam 2 is arranged on two supporting seats 1, and the beam 2 is provided with the first guide rail 3, the first screw rod 4 and the first motor 5; the trimming system comprises a second guide rail 6, a second screw rod 7, a second motor 8, a trimming axle box 9 and a trimmer 10, wherein the second guide rail 6 is arranged on the first screw rod 4, and the first screw rod 4 is driven to rotate through the first motor 5 so as to drive the trimming system to move horizontally along the first guide rail 3; a second screw rod 7 and a second motor 8 are arranged on the second guide rail 6, a trimming axle box 9 is arranged on the second screw rod 7, and the second motor 8 drives the second screw rod 7 to rotate so as to drive the trimming axle box 9 to vertically move up and down along the second guide rail 6, and the repeated positioning precision of the movement reaches a micron level; a dresser 10 is provided at the lower end of the dresser shaft housing 9, the dresser 10 is driven by a high-speed motor in the dresser shaft housing 9, a plurality of diamond particles are provided on the dresser 10, the diameter of the dresser 10 is generally 100mm, and the lower polishing pad 11 can be dressed.
The above-mentioned dressing device adopts a structure with high rigidity, and the dressing process of the polishing disk 11 can be regarded as an ultra-precise milling process, and the motion track envelope surface of each diamond particle on the dresser 10 is the working surface of the polished disk after dressing. The present invention realizes the active control of the shape of the polishing disk by controlling the motion trajectory of the dresser 10. As shown in fig. 4, the schematic diagram of the method of the present invention is that the dressing track of each diamond particle on the dresser 10 with respect to the polishing disk 11 is:
where r is the distance of diamond particles from the rotational axis of the dresser 10, s is the rotational speed of the dresser 10, C is the rotational speed of the polishing pad 11, f is the translational feed speed (i.e., speed in the X direction) of the dresser 10, a p For the tool setting value of the finisher 10,is the spatial position error of the first rail 3, namely: straightness error of the first rail 3 +.>And parallelism error of the first guide rail 3 and the polishing pad 11 +.>Sum-> Is the shape error of the polishing pad 11.
The method of the invention first assumes that0, then selecting a larger cutting amount to rapidly remove the polishing disk 11, and removing the large-scale shape error of the surface to enable the surface shape error of the polishing disk 11 to reach +.> Then according to the shape of the disc after trimming +.>To adjust the vertical compensation amount of the Z-axis during the dressing process, further improving the shape accuracy of the polishing pad 11 to +.>Finally, the surface of the polishing disk 11 is subjected to fine smooth finishing, and the shape precision meeting the use requirement is achievedAs shown in fig. 5.
The envelope trimming method of the present invention comprises the steps of:
1) The straightness error of the first guide rail 3 of the polishing disc envelope type trimming device is detected by a double-frequency laser interferometer or other equipmentAnd parallelism error of the first guide rail 3 and the polishing pad 11 +.>
2) The polishing disc 11 is rapidly dressed, the polishing disc 11 rotates at a constant speed during dressing, the constant speed rotation speed is preferably 1-10rpm, the dressing 10 rotates at a high speed, the high speed rotation speed is preferably 100-200rpm, and the dressing 10 slowly translates along the X direction, the slow translation speed is that the distance of one circle of translation of the dressing 10 is smaller than or equal to the diameter of the dressing 10, and the cutting amount can be generally set to 40-60 mu m;
3) Measurement of the shape accuracy of the polishing disk 11 by using a laser displacement sensor
4) Polishing disk 11 is finished, polishing disk 11 rotates at a constant speed during finishing, the constant speed rotation speed is preferably 1-10rpm, trimmer 10 rotates at a high speed, the high speed rotation speed is preferably 100-200rpm, and translates slowly in the X direction, the slow translation speed is that the distance of one translation of trimmer 10 rotating for one circle is smaller than or equal to the diameter of trimmer 10, and trimmer 10 moves up and down in the Z direction while translating to compensate the space position error of first guide rail 3And shape error of the polishing disk 11Up-down movement +.>Wherein a is p For the tool setting value, a p Is set to ensure that the cutting amount does not exceed 10 mu m;
5) Measurement of the shape accuracy of the polishing disk 11 by using a laser displacement sensorSpecific measurement methods can be adopted by the method disclosed in 103954237A;
6) Polishing disk 11 is finished, polishing disk 11 rotates at a constant speed during finishing, the constant speed rotation speed is preferably 1-10rpm, trimmer 10 rotates at a high speed, the high speed rotation speed is preferably 100-200rpm, and translates slowly in the X direction, the slow translation speed is that the distance of one translation of trimmer 10 rotating for one circle is smaller than or equal to the diameter of trimmer 10, and trimmer 10 moves up and down in the Z direction while translating to compensate the space position error of first guide rail 3And shape error of the polishing disk 11Up-down movement +.>Wherein a is p For the tool setting value, a p Is set to ensure that the cutting amount does not exceed 5 mu m;
7) Measurement of the shape accuracy of the polishing disk 11 by using a laser displacement sensorAnd judging whether the operation requirement is met, stopping finishing if the operation requirement is met, and returning to the step 4 to finish again if the operation requirement is not met.
Examples:
the polishing pad 11 is dressed by the envelope dressing method of the present invention, and the initial shape PV of the polishing pad 11 is 106 μm, as shown in fig. 6, the dressing comprising the steps of:
1) The straightness error of the first guide rail 3 of the polishing disc envelope type trimming device is detected by a double-frequency laser interferometer or other equipmentAnd parallelism error of the first guide rail 3 and the polishing pad 11 +.>As shown in fig. 7-8;
2) The polishing pad 11 was subjected to rapid dressing, during which the polishing pad 11 was rotated at a constant speed of 1rpm, while the dresser 10 was rotated at a high speed of 200rpm and was slowly translated in the X direction at 80mm/min, the cutting amount was set to 40 μm;
3) Measurement of the shape accuracy of the polishing disk 11 by using a laser displacement sensor30 μm as shown in FIG. 9;
4) Polishing disk 11 is polished, polishing disk 11 rotates at a constant speed of 1rpm during polishing, dresser 10 rotates at a high speed of 100rpm and slowly translates in the X direction at 60mm/min, and dresser 10 moves up and down in the Z direction while translating to compensate for the spatial position error of first rail 3And shape error of polishing disk 11 +.>Up-down movement +.>As shown in fig. 10, wherein a p The cutting amount is 10 μm for the tool setting value;
5) Measurement of the shape accuracy of the polishing disk 11 by using a laser displacement sensor8 μm as shown in FIG. 11;
6) Polishing disk 11 is polished, polishing disk 11 rotates at a constant speed of 1rpm during polishing, dresser 10 rotates at a high speed of 100rpm and slowly translates in the X direction at 60mm/min, and dresser 10 moves up and down in the Z direction while translating to compensate for the spatial position error of first rail 3And shape error of polishing disk 11 +.>Up-down movement +.>As shown in fig. 12, wherein a p The cutting amount is 4 μm for the tool setting value;
7) Measurement of the shape accuracy of the polishing disk 11 by using a laser displacement sensorAs shown in fig. 13, the trimming was stopped when the thickness was 8 μm and the use requirement was satisfied.
The invention provides an envelope type trimming device and method for a large-caliber plane polishing disk, which realize active and controllable trimming shape by controlling the motion track of a small-caliber trimmer, and greatly improve the trimming precision of the plane polishing disk.
Claims (9)
1. A method of envelope dressing a polishing pad, the method comprising the steps of:
1) Detecting and obtaining the straightness error of the first guide rail (3) of the envelope trimming device of the polishing disc by adopting a double-frequency laser interferometer or other equipmentAnd parallelism error of the first guide rail (3) and the polishing disk (11)>
2) The polishing disc (11) is rapidly dressed, the polishing disc (11) rotates at a constant speed during dressing, and the dresser (10) rotates at a high speed and slowly translates along the X direction;
3) Measuring by using a laser displacement sensor to obtain the shape precision of the polishing disk (11)
4) Polishing disc (11) is refined, when in refining, the polishing disc (11) rotates at a constant speed, the trimmer (10) rotates at a high speed and slowly translates along the X direction, and the trimmer (10) moves up and down along the Z direction while translating, so as to compensate the space position error of the first guide rail (3)And shape error of the polishing disk (11)>Up-down movement +.>Wherein a is p Is a tool setting value;
5) Measuring by using a laser displacement sensor to obtain the shape precision of the polishing disk (11)
6) Polishing disc (11) is refined, when in refining, the polishing disc (11) rotates at a constant speed, the trimmer (10) rotates at a high speed and slowly translates along the X direction, and the trimmer (10) moves up and down along the Z direction while translating, so as to compensate the space position error of the first guide rail (3)And shape error of the polishing disk (11)>Up-down movement +.>Wherein a is p Is a tool setting value;
7) Measuring by using a laser displacement sensor to obtain the shape precision of the polishing disk (11)And judging whether the operation requirement is met, stopping finishing if the operation requirement is met, and returning to the step 4 to finish again if the operation requirement is not met.
2. The method of claim 1, wherein the constant speed rotation in step 2, step 4 and step 6 is 1-10rpm.
3. The polishing pad envelope dressing method as claimed in claim 1, wherein said high speed rotation in step 2, step 4 and step 6 is at a speed of 100 to 200rpm.
4. The method as claimed in claim 1, wherein the slow translation speed in step 2, step 4 and step 6 is such that the distance of one translation of the dresser (10) by one rotation is less than or equal to the diameter of the dresser (10).
5. The polishing pad envelope dressing method as claimed in claim 1, wherein the cutting amount of step 2 is set to 40 to 60 μm.
6. The polishing pad envelope dressing method as claimed in claim 1, wherein the cutting amount of step 4 is set to not more than 10 μm.
7. The polishing pad envelope dressing method as claimed in claim 1, wherein the cutting amount of step 6 is set to not more than 5 μm.
8. The polishing pad envelope dressing method according to claim 1, wherein the dressing trace of each diamond particle on the dresser (10) with respect to the polishing pad (11) is:
wherein r is the distance between diamond particles and the rotation axis of the dresser (10), s is the rotation speed of the dresser (10), C is the rotation speed of the polishing disk (11), and f is the translational feeding of the dresser (10)Speed, a p For the tool setting value of the trimmer (10),for the spatial position error of the first guide rail (3, etc.)>Is the shape error of the polishing disk (11).
9. The polishing disc envelope dressing method according to claim 1, characterized in that the polishing disc envelope dressing device comprises a supporting seat (1), a cross beam (2), a first guide rail (3), a first screw rod (4) and a first motor (5), wherein the cross beam (2) is arranged on two supporting seats (1), the first guide rail (3), the first screw rod (4) and the first motor (5) are arranged on the cross beam (2), and the polishing disc envelope dressing device further comprises a dressing system, wherein the dressing system comprises a second guide rail (6), a second screw rod (7), a second motor (8), a dressing axle box (9) and a dressing device (10), the second guide rail (6) is arranged on the first screw rod (4), and the first screw rod (4) is driven to rotate through the first motor (5) to drive the dressing system to move horizontally along the first guide rail (3); a second screw rod (7) and a second motor (8) are arranged on the second guide rail (6), the trimming axle box (9) is arranged on the second screw rod (7), and the second screw rod (7) is driven to rotate through the second motor (8) so as to drive the trimming axle box (9) to vertically move up and down along the second guide rail (6); a trimmer (10) is arranged at the lower end of the trimming axle box (9), the trimmer (10) is driven by a high-speed motor in the trimming axle box (9), and a plurality of diamond particles are arranged on the trimmer (10).
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| CN201910019569.5A CN109531424B (en) | 2019-01-09 | 2019-01-09 | Envelope type dressing method and device for polishing disk |
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| CN201910019569.5A CN109531424B (en) | 2019-01-09 | 2019-01-09 | Envelope type dressing method and device for polishing disk |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111090910B (en) * | 2019-11-26 | 2023-07-25 | 武汉理工大学 | Envelope model compensation method for improving space envelope forming precision of conical thin-wall high-strength member |
| CN112077742A (en) * | 2020-09-21 | 2020-12-15 | 北京烁科精微电子装备有限公司 | Polishing pad dresser and chemical mechanical planarization equipment |
| CN112405215B (en) * | 2020-11-11 | 2022-04-15 | 中国工程物理研究院激光聚变研究中心 | Off-line dressing device and method for polishing disk |
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