CN209289016U - Polishing disk envelop-type trimming device - Google Patents
Polishing disk envelop-type trimming device Download PDFInfo
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- CN209289016U CN209289016U CN201920038439.1U CN201920038439U CN209289016U CN 209289016 U CN209289016 U CN 209289016U CN 201920038439 U CN201920038439 U CN 201920038439U CN 209289016 U CN209289016 U CN 209289016U
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- Prior art keywords
- guide rail
- screw rod
- polishing disk
- trimmer
- motor
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Abstract
The utility model provides a kind of envelop-type trimming device of the polishing disk high-efficiency high-accuracy finishing of achievable heavy-calibre planar polishing machine, crossbeam is arranged on two support bases, the first guide rail, the first screw rod and first motor are provided on crossbeam, conditioning system includes the second guide rail, the second screw rod, the second motor, finishing axle box and trimmer, second guide rail is arranged on the first screw rod, and drives the rotation of the first screw rod that conditioning system is driven to translate along first guide rail or so by first motor；The second screw rod and the second motor are provided on the second guide rail, finishing axle box is arranged on the second screw rod, and drives finishing axle box to move vertically up and down along the second guide rail by the rotation of second the second screw rod of motor driven；Finishing axle box lower end is provided with trimmer, trimmer passes through the motor driven inside finishing axle box.The utility model is based on ultraprecise Milling Principle, provides a kind of effective trimming device for the face shape convergence of heavy-calibre planar optical elements.
Description
Technical field
The utility model relates to optical processing technology fields more particularly to a kind of polishing disk of heavy-calibre planar polishing machine to repair
Engagement positions.
Background technique
The polishing process of optical element relies primarily on relative motion and chemical erosion effect reality between polishing disk and element
Existing material removal, therefore, the characteristic and form accuracy of polishing disk have conclusive influence to element material removal.With polishing
The phenomenon that constantly progress, the polishing disk of the materials such as polyurethane has surface layer blockage of the micro orifice and glazing, it is unfavorable for polished surface quality
And processing efficiency needs periodically to modify polishing disk for the long period working ability for keeping polishing disk.
The polishing disk dressing method of traditional heavy-calibre planar polishing machine has two classes, one is unified formula dressing method,
Polishing disk is modified using diamond truer equal or slightly large-sized with polishing disk radius, the structure of conditioning system
Rigidity is good, can quickly remove and reach stable finishing effect, but this method is limited to the spatial attitude accuracy of trimmer, modifies
There is intrinsic tilt angle between device and polishing disk, the surface shape precision after finishing is poor, and controllability is low, is unfavorable for engineering
It is further increased using with machining accuracy；Another method is small tool formula dressing method, that is, uses small-bore diamond disk
Local removal is carried out to polishing disk, and passes through the moving interpolation of small tool and polishing disk, realizes that the global certainty of polishing disk is repaired
Whole, the dressing accuracy of this method depends on trajectory planning, improves polishing disk precision relative to the finishing of unified formula, but should
The irregular cunning of method polishing disk distribution of shapes and inefficient.
Utility model content
The technical problem to be solved by the utility model is to provide a kind of polishing disks of achievable heavy-calibre planar polishing machine
The envelop-type trimming device of high-efficiency high-accuracy finishing.
The utility model technical scheme applied to solve the technical problem is: polishing disk envelop-type trimming device, including branch
Seat, crossbeam, the first guide rail, the first screw rod, first motor are supportted, the crossbeam is arranged on two support bases, on the crossbeam
It is provided with the first guide rail, the first screw rod and first motor, further includes conditioning system, the conditioning system includes the second guide rail, the
Two screw rods, the second motor, finishing axle box and trimmer, second guide rail is arranged on the first screw rod, and passes through first motor
Drive the rotation of the first screw rod that conditioning system is driven to translate along first guide rail or so；Second is provided on second guide rail
Bar and the second motor, the finishing axle box are arranged on the second screw rod, and are driven by the rotation of second the second screw rod of motor driven
It modifies axle box and moves vertically up and down along the second guide rail；The finishing axle box lower end is provided with trimmer, the trimmer is logical
Cross the motor driven inside finishing axle box.
Further, multiple diamond particles are provided on the trimmer.
Further, the trimmer diameter is 100mm.
The beneficial effects of the utility model are: the utility model is based on ultraprecise Milling Principle, using repairing for small-bore formula
Whole disk modifies polishing disk, and motion mode combines the excellent of unified formula dressing method and small tool formula dressing method
Point, trimmer are fixed on finishing axle box, and dressing accuracy is mainly related with the precision of lathe and movement control mode；This is practical new
Type realizes the high-precision finishing of meter level plane polishing disk, not only increases dressing accuracy, also improves dressing efficiency, is big mouth
The face shape convergence of diameter planar optical elements provides a kind of effective trimming device；The utility model is for the poly- of diameter 1700mm
Urethane polishing disk can be trimmed to 8 μm within a few hours；The quick finishing of plane polishing disk may be implemented in the utility model, can
The finishing requirement of different size polishing disks is adapted to, finishing operation is simple, and stability is good.
Detailed description of the invention
Fig. 1 is the perspective view of utility model device.
Fig. 2 is the main view of utility model device.
Fig. 3 is the side view of Fig. 2.
Fig. 4 is the original shape figure of the polishing disk of the utility model embodiment.
Fig. 5 is the straightness error for the first guide rail that the step 1 of the utility model embodiment measures
Fig. 6 is the parallelism error for the polishing disk that the step 1 of the utility model embodiment measures
Fig. 7 is the shape graph after step 3 polishing disk of the utility model embodiment is quickly modified.
Fig. 8 is the amount of the moving up and down Z value of step 4 trimmer of the utility model embodiment.
Fig. 9 is the shape graph after the refine of the polishing disk of the utility model embodiment.
Figure 10 is the amount of the moving up and down Z value of step 6 trimmer of the utility model embodiment.
Figure 11 is the shape graph after the completion of the finishing of the polishing disk of the utility model embodiment.
Specific embodiment
As shown in Figure 1-3, the polishing disk envelop-type trimming device of the utility model includes support base 1, crossbeam 2, first leads
Rail 3, the first screw rod 4, first motor 5 and conditioning system, wherein crossbeam 2 is arranged on two support bases 1, is arranged on crossbeam 2
There are the first guide rail 3, the first screw rod 4 and first motor 5；Conditioning system includes the second guide rail 6, the second screw rod 7, the second motor 8, repairs
Bearing case 9 and trimmer 10, wherein the second guide rail 6 is arranged on the first screw rod 4, and drives the first screw rod by first motor 5
4 rotations are to drive conditioning system whole along 3 or so the translational motion of the first guide rail；Second is provided on the second guide rail 6
Bar 7 and the second motor 8, finishing axle box 9 be arranged on the second screw rod 7, and by the second motor 8 drive the second screw rod 7 rotation from
And finishing axle box 9 is driven to move vertically along the second about 6 guide rail, the repetitive positioning accuracy of movement reaches micron order；It is modifying
9 lower end of axle box is provided with trimmer 10, and trimmer 10 is driven by the high-speed motor inside finishing axle box 9, set on trimmer 10
Be equipped with multiple diamond particles, 10 diameter of trimmer is generally 100mm, can the polishing disk 11 to lower section modify.
The above-mentioned trimming device structure high using rigidity, the dressing process of polishing disk 11 are considered as the milling of ultraprecise
Journey, the motion profile enveloping surface of each diamond particles on trimmer 10 are the polishing disk working face after modifying.This is practical new
Type realizes the active control of polishing disk shape by controlling the motion profile of trimmer 10.Each diamond on 10 on trimmer
Dressing track of the grain relative to polishing disk 11 are as follows:
In above formula, r is distance of the diamond particles apart from 10 axis of rotation of trimmer, and s is the revolving speed of trimmer 10, and C is
The revolving speed of polishing disk 11, f are the translation feed speed (speed i.e.: in X direction) of trimmer 10, apIt is trimmer 10 to knife
Value,For the volumetric position error of the first guide rail 3, it may be assumed that the straightness error of the first guide rail 3And first guide rail 3 and polishing
The parallelism error of disk 11The sum of For the form error of polishing disk 11.
The utility model method assumes initially thatIt is 0, biggish cutting data is then selected to carry out fastly polishing disk 11
Speed removal, removes the form error of surface large scale, reaches the surface shape error of polishing disk 11Then
According to the disk shape after finishingIt adjusts the vertical compensation rate of Z axis in dressing process, further increases the shape of polishing disk 11
Shape precision arrivesFine even sliding finishing finally is carried out to 11 surface of polishing disk, and reaches the shape for meeting requirement
Shape precision
The envelop-type dressing method of the utility model the following steps are included:
1) it detects to obtain the polishing disk envelop-type finishing dress of the utility model using two-frequency laser interferometer or other equipment
The straightness error for the first guide rail 3 setAnd first guide rail 3 and polishing disk 11 parallelism error
2) polishing disk 11 is quickly modified, 11 uniform rotation of polishing disk when finishing, uniform rotation speed is preferably 1-
10rpm, and 10 high-speed rotation of trimmer, high-speed rotation speed are preferably 100-200rpm, and slowly translation in X direction, slowly
Translational velocity is that the distance of one circle translation of the rotation of trimmer 10 is less than or equal to the diameter of trimmer 10, and cutting output is generally settable
It is 40-60 μm；
3) form accuracy of polishing disk 11 is obtained using laser displacement sensor measurement
4) refine is carried out to polishing disk 11,11 uniform rotation of polishing disk when refine, uniform rotation speed is preferably 1-
10rpm, 10 high-speed rotation of trimmer, high-speed rotation speed is preferably 100-200rpm, and slowly translation in X direction, slowly flat
The diameter that the distance that speed is one circle translation of the rotation of trimmer 10 is less than or equal to trimmer 10 is moved, trimmer 10 is in the same of translation
When moved up and down along Z-direction, with compensate the first guide rail 3 volumetric position errorWith the form error of polishing disk 11The amount of moving up and downWherein apFor to knife value, apSetting to guarantee cutting output be no more than 10 μ
m；
5) form accuracy of polishing disk 11 is obtained using laser displacement sensor measurementSpecific measurement method can use
Method disclosed in 103954237A；
6) refine is carried out to polishing disk 11,11 uniform rotation of polishing disk when refine, uniform rotation speed is preferably 1-
10rpm, 10 high-speed rotation of trimmer, high-speed rotation speed is preferably 100-200rpm, and slowly translation in X direction, slowly flat
The diameter that the distance that speed is one circle translation of the rotation of trimmer 10 is less than or equal to trimmer 10 is moved, trimmer 10 is in the same of translation
When moved up and down along Z-direction, with compensate the first guide rail 3 volumetric position errorWith the form error of polishing disk 11The amount of moving up and downWherein apFor to knife value, apSetting to guarantee that cutting output does not surpass
Cross 5 μm；
7) form accuracy of polishing disk 11 is obtained using laser displacement sensor measurementAnd judge whether it meets use
It is required that stopping modifying if meeting, if be unsatisfactory for return step 4 carries out refine again.
Embodiment:
Polishing disk 11 is modified using the envelop-type dressing method of the utility model, the original shape of the polishing disk 11
PV be 106 μm, as shown in figure 4, finishing the following steps are included:
1) it detects to obtain the polishing disk envelop-type finishing dress of the utility model using two-frequency laser interferometer or other equipment
The straightness error for the first guide rail 3 setAnd first guide rail 3 and polishing disk 11 parallelism errorAs seen in figs. 5-6；
2) polishing disk 11 is quickly modified, polishing disk 11 is with the speed uniform rotation of 1rpm when finishing, and trimmer
10 with the speed high-speed rotation of 200rpm, and is slowly translated with 80mm/min in X direction, and cutting output is set as 40 μm；
3) form accuracy of polishing disk 11 is obtained using laser displacement sensor measurementIt is 30 μm, as shown in Figure 7；
4) refine is carried out to polishing disk 11, when refine polishing disk 11 with the speed uniform rotation of 1rpm, trimmer 10 with
The speed high-speed rotation of 100rpm, and slowly translated with 60mm/min in X direction, trimmer 10 is while translation along Z-direction
It moves up and down, to compensate the volumetric position error of the first guide rail 3With the form error of polishing disk 11It moves up and down
AmountAs shown in figure 8, wherein apFor to knife value, cutting output is 10 μm；
5) form accuracy of polishing disk 11 is obtained using laser displacement sensor measurementIt is 8 μm, as shown in Figure 9；
6) refine is carried out to polishing disk 11, when refine polishing disk 11 with the speed uniform rotation of 1rpm, trimmer 10 with
The speed high-speed rotation of 100rpm, and slowly translated with 60mm/min in X direction, trimmer 10 is while translation along Z-direction
It moves up and down, to compensate the volumetric position error of the first guide rail 3With the form error of polishing disk 11It moves up and down
AmountAs shown in Figure 10, wherein apFor to knife value, cutting output is 4 μm；
7) form accuracy of polishing disk 11 is obtained using laser displacement sensor measurementIt is 8 μm, as shown in figure 11, meets
Requirement stops finishing.
The utility model provides a kind of envelop-type trimming device of heavy-calibre planar polishing disk, by controlling small-bore repair
The motion profile of whole device realizes the actively controllable of finishing shape, and the dressing accuracy of plane polishing disk, which realizes, to be increased substantially.
Claims (3)
1. polishing disk envelop-type trimming device, including support base (1), crossbeam (2), the first guide rail (3), the first screw rod (4), first
Motor (5), the crossbeam (2) are arranged on two support bases (1), and the first guide rail (3), the are provided on the crossbeam (2)
One screw rod (4) and first motor (5), which is characterized in that further include conditioning system, the conditioning system include the second guide rail (6),
Second screw rod (7), the second motor (8), finishing axle box (9) and trimmer (10), second guide rail (6) are arranged in the first screw rod
(4) on, and drive conditioning system flat along the first guide rail (3) left and right by first motor (5) driving the first screw rod (4) rotation
It moves；It is provided with the second screw rod (7) and the second motor (8) on second guide rail (6), finishing axle box (9) setting is the
On two screw rods (7), and drive finishing axle box (9) along the second guide rail by the second motor (8) driving the second screw rod (7) rotation
(6) it moves vertically up and down；It is provided with trimmer (10) in finishing axle box (9) lower end, the trimmer (10) passes through finishing
The internal motor driven of axle box (9).
2. polishing disk envelop-type trimming device as described in claim 1, which is characterized in that be arranged on the trimmer (10)
There are multiple diamond particles.
3. polishing disk envelop-type trimming device as described in claim 1, which is characterized in that trimmer (10) diameter is
100mm。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920038439.1U CN209289016U (en) | 2019-01-09 | 2019-01-09 | Polishing disk envelop-type trimming device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920038439.1U CN209289016U (en) | 2019-01-09 | 2019-01-09 | Polishing disk envelop-type trimming device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209289016U true CN209289016U (en) | 2019-08-23 |
Family
ID=67641920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920038439.1U Expired - Fee Related CN209289016U (en) | 2019-01-09 | 2019-01-09 | Polishing disk envelop-type trimming device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209289016U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109531424A (en) * | 2019-01-09 | 2019-03-29 | 中国工程物理研究院激光聚变研究中心 | Polishing disk envelop-type dressing method and its device |
-
2019
- 2019-01-09 CN CN201920038439.1U patent/CN209289016U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109531424A (en) * | 2019-01-09 | 2019-03-29 | 中国工程物理研究院激光聚变研究中心 | Polishing disk envelop-type dressing method and its device |
| CN109531424B (en) * | 2019-01-09 | 2024-04-09 | 中国工程物理研究院激光聚变研究中心 | Envelope type dressing method and device for polishing disk |
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|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190823 Termination date: 20210109 |
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| CF01 | Termination of patent right due to non-payment of annual fee |