CN109502541B - 一种压电mems超声波传感器及其制造方法 - Google Patents
一种压电mems超声波传感器及其制造方法 Download PDFInfo
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- CN109502541B CN109502541B CN201811542027.8A CN201811542027A CN109502541B CN 109502541 B CN109502541 B CN 109502541B CN 201811542027 A CN201811542027 A CN 201811542027A CN 109502541 B CN109502541 B CN 109502541B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00158—Diaphragms, membranes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00166—Electrodes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
- G01S7/521—Constructional features
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0292—Sensors not provided for in B81B2201/0207 - B81B2201/0285
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- Transducers For Ultrasonic Waves (AREA)
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Abstract
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CN201811542027.8A CN109502541B (zh) | 2018-12-17 | 2018-12-17 | 一种压电mems超声波传感器及其制造方法 |
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CN201811542027.8A CN109502541B (zh) | 2018-12-17 | 2018-12-17 | 一种压电mems超声波传感器及其制造方法 |
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CN109502541A CN109502541A (zh) | 2019-03-22 |
CN109502541B true CN109502541B (zh) | 2023-10-10 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109945966A (zh) * | 2019-03-29 | 2019-06-28 | 中北大学 | AlN双层薄膜的单电极水听器 |
CN110508473A (zh) * | 2019-07-10 | 2019-11-29 | 杭州电子科技大学 | 一种基于双层压电薄膜的双频压电式微机械超声换能器 |
CN111599914B (zh) * | 2020-05-25 | 2024-01-30 | 中国电子科技集团公司第十三研究所 | 基于弹性梁结构的mems压电声压传感芯片的制备方法 |
CN111988006A (zh) * | 2020-08-18 | 2020-11-24 | 武汉衍熙微器件有限公司 | 薄膜体声波谐振器及其制作方法 |
CN114095845B (zh) * | 2021-10-28 | 2023-11-17 | 中国电子科技集团公司第三研究所 | 低频mems矢量传声器及其制备方法 |
Citations (8)
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---|---|---|---|---|
CN101071170A (zh) * | 2006-05-08 | 2007-11-14 | 株式会社电装 | 超声波传感器 |
CN102143422A (zh) * | 2010-01-29 | 2011-08-03 | 柳杨 | 圆形薄膜压电超声换能器 |
CN102353610A (zh) * | 2011-06-10 | 2012-02-15 | 西安交通大学 | 一种用于密度测量的电容微加工超声传感器及其制备方法 |
JP2013080786A (ja) * | 2011-10-03 | 2013-05-02 | Rohm Co Ltd | シリコン装置 |
CN104271264A (zh) * | 2012-05-01 | 2015-01-07 | 富士胶片戴麦提克斯公司 | 具有双电极的超宽带换能器 |
WO2018155276A1 (ja) * | 2017-02-24 | 2018-08-30 | 京セラ株式会社 | 超音波センサ |
CN108918662A (zh) * | 2018-05-16 | 2018-11-30 | 西安交通大学 | 一种CMUTs流体密度传感器及其制备方法 |
CN209383383U (zh) * | 2018-12-17 | 2019-09-13 | 智驰华芯(无锡)传感科技有限公司 | 一种压电mems超声波传感器 |
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2018
- 2018-12-17 CN CN201811542027.8A patent/CN109502541B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101071170A (zh) * | 2006-05-08 | 2007-11-14 | 株式会社电装 | 超声波传感器 |
CN102143422A (zh) * | 2010-01-29 | 2011-08-03 | 柳杨 | 圆形薄膜压电超声换能器 |
CN102353610A (zh) * | 2011-06-10 | 2012-02-15 | 西安交通大学 | 一种用于密度测量的电容微加工超声传感器及其制备方法 |
JP2013080786A (ja) * | 2011-10-03 | 2013-05-02 | Rohm Co Ltd | シリコン装置 |
CN104271264A (zh) * | 2012-05-01 | 2015-01-07 | 富士胶片戴麦提克斯公司 | 具有双电极的超宽带换能器 |
WO2018155276A1 (ja) * | 2017-02-24 | 2018-08-30 | 京セラ株式会社 | 超音波センサ |
CN108918662A (zh) * | 2018-05-16 | 2018-11-30 | 西安交通大学 | 一种CMUTs流体密度传感器及其制备方法 |
CN209383383U (zh) * | 2018-12-17 | 2019-09-13 | 智驰华芯(无锡)传感科技有限公司 | 一种压电mems超声波传感器 |
Non-Patent Citations (1)
Title |
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富迪 ; 陈豪 ; 杨轶 ; 任天令 ; 刘理天 ; .MEMS压电超声换能器二维阵列的制备方法.微纳电子技术.2011,(08),第523-627页. * |
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