CN109267013A - High-precision optical machining eyeglass technique and its coating apparatus - Google Patents

High-precision optical machining eyeglass technique and its coating apparatus Download PDF

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Publication number
CN109267013A
CN109267013A CN201811096671.7A CN201811096671A CN109267013A CN 109267013 A CN109267013 A CN 109267013A CN 201811096671 A CN201811096671 A CN 201811096671A CN 109267013 A CN109267013 A CN 109267013A
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mirror slip
optical mirror
ring
fixture
optical
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CN201811096671.7A
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CN109267013B (en
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崔王斌
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Nanjing Geo Photoelectric Technology Co Ltd
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Nanjing Geo Photoelectric Technology Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The invention discloses a kind of high-precision optical machining eyeglass technique and its coating apparatus, apply in machining eyeglass field, its key points of the technical solution are that: include the following steps: step 1: optical mirror slip is ground into predetermined size by polishing machine;Step 2: ground optical mirror slip being put into supersonic wave cleaning machine and is cleaned, and scavenging period is 5 ~ 10 minutes;Step 3: optical mirror slip is taken out, and whether spot is remained by the surface of artificial observation optical mirror slip, step 2 is re-started if there are residual stains, noresidue spot enters step four;Step 4: optical mirror slip is loaded on fixture, and then fixture is put into vacuum environment and is evaporated plated film;Step 5: detecting completed optical eyeglass, and qualified product storage, rejected product is re-worked or destroyed;What is had has the technical effect that the cleannes that can guarantee optical mirror slip and improves light transmittance, to obtain the optical mirror slip of better quality.

Description

High-precision optical machining eyeglass technique and its coating apparatus
Technical field
The present invention relates to machining eyeglass field, in particular to a kind of high-precision optical machining eyeglass technique and its plated film dress It sets.
Background technique
Currently, high-precision optical mirror slip in the market generally can plated film, to improve the properties of optical mirror slip.
The Chinese patent of Publication No. CN107686971A discloses a kind of durable coating process of high light passing of eyeglass multilayer, packet It includes step: choosing eyeglass, determine refractive index and plated film film structure is A+ (B+C) m+D+E;Wherein A layers be SiO2, B layers, C layers For the oxide or fluoride of metal, D is inner protective layer, and E is external protection;A layers are plated using sputtering method;Vapour deposition method plates respectively B layers and C layers of layer;D layers and E layers are plated with e-beam evaporation.
But this coating process is in implementation process, it will usually occur to lead since optical lens surface is infected with dust Cause that yield rate is low, ropy problem, because needing a kind of processing that optical mirror slip yield rate and quality can be improved in the industry Technique.
Summary of the invention
The object of the present invention is to provide a kind of high-precision optical machining eyeglass technique and its coating apparatus.
Goal of the invention first is that: a kind of high-precision optical machining eyeglass technique is provided.
Goal of the invention second is that: a kind of coating apparatus of high-precision optical machining eyeglass technique is provided.
Goal of the invention one of the invention has the technical scheme that a kind of high-precision optical machining eyeglass Technique includes the following steps:
Step 1: optical mirror slip is ground into predetermined size by polishing machine;
Step 2: ground optical mirror slip being put into supersonic wave cleaning machine and is cleaned, and scavenging period is 5 ~ 10 minutes;
Step 3: taking out optical mirror slip, and whether remain spot by the surface of artificial observation optical mirror slip, if there is residual dirty Stain then re-starts step 2, and noresidue spot then enters step four;
Step 4: optical mirror slip is loaded on fixture, and then fixture is put into vacuum environment and is evaporated plated film;
Step 5: detecting completed optical eyeglass, and qualified product storage, rejected product is re-worked or destroyed.
Through the above technical solutions, optical mirror slip is ground into predetermined size first by operator, it is then clear by ultrasonic wave Washing machine is cleaned, to wash away the spot of optical lens surface, then by artificial observation to guarantee the clear of optical lens surface Cleanliness carries out plated film to optical mirror slip finally by being evaporated in vacuo, and such mode can guarantee the cleannes of optical mirror slip simultaneously Light transmittance is improved, to obtain the optical mirror slip of better quality, improves yield rate;Finally completed optical eyeglass is detected, Qualified product storage, rejected product are then re-worked or are destroyed, it can be ensured that the qualification rate of the optical mirror slip of outbound, to prevent not conforming to Lattice product are mixed into wherein.
The present invention is further arranged to: before implementation steps four, single optical mirror slip is loaded on fixture, it then will folder Tool is put into vacuum environment the quality for being evaporated plated film, and detecting finished product, if reaching requirement carries out batch for optical mirror slip again Evaporation coating.
Through the above technical solutions, operator carries out monolithic experiment first before batch plated film, survey that can be cheer and bright Whether reasonable determine Film Design, if rationally being produced in batches again, causes light because Film Design is unreasonable so as to reduce Learn the underproof possibility of eyeglass batch.
The present invention is further arranged to: in step 4, fixture drives optical mirror slip to revolve around clamp central axis, Optical mirror slip carries out rotation in fixture.
Through the above technical solutions, optical mirror slip revolves while rotation when evaporation coating, thus each optical mirror slip It more uniform can be contacted with steam, and then improve the plated film uniformity of optical mirror slip, reduced between batch optical mirror slip Diversity factor.
Goal of the invention two of the invention has the technical scheme that a kind of coating apparatus, including vacuum Room and be arranged on vacuum chamber for drive fixture revolution driving motor;Fixture: including horizontally disposed disk, Several through-holes being provided on disk, the placement ring for placing optical mirror slip and the synchronization for driving placement ring rotation The center of part, the disk is connected on the output end of driving motor, and the placement ring is rotatably connected on through-hole in the horizontal direction On inner wall.
Through the above technical solutions, optical mirror slip is placed on and places in ring by operator when needing evaporation coating, then control Driving motor work processed, driving motor controls disk rotational at this time, so that optical mirror slip revolves, while ring is placed in synchronous piece control Rotation, so that optical mirror slip rotation;Optical mirror slip revolves while rotation in vacuum chamber, and optical mirror slip can be improved The plated film uniformity.
The present invention is further arranged to: several balls are embedded with along the periphery for placing ring on the through-hole wall, it is described to put It sets ring outer rim and offers the slot rolling being embedded in for ball part.
Be rotatablely connected through the above technical solutions, placing ring by ball and through-hole wall, greatly reduce place ring with Frictional force between through-hole wall, so that placing, ring is more smooth in rotation, reduces the stuck possibility of placement ring.
The present invention is further arranged to: the synchronous piece includes internal tooth torus and rotating gear ring, the internal tooth torus Outer rim is connected to the coaxial arrangement of the output end in vacuum chamber interior walls and with driving motor, and the inner wall of the rotating gear ring coaxially connects It connects and is placing ring outer rim, the marginal tooth of the rotating gear ring is meshed with the interior uncinus of internal tooth torus.
Through the above technical solutions, driving motor is disc-rotated when working, the rotation tooth being connect at this time with placement ring Torus outer rim is meshed with internal tooth torus inner edge, therefore the inner edge of rotating gear around internal tooth torus is walked about, at this time rotation tooth Torus just drives placement ring to generate rotation together, places the optical mirror slip also rotation together in ring;In the process, optical mirror slip Rotation driven completely by the rotation of disk, therefore it is power saving, convenient, when driving motor stops working, optical mirror slip from Turn and revolution is simultaneously stopped again, does not need the stopping for controlling rotation and revolution respectively, therefore it is also very convenient to operate.
The present invention is further arranged to: the synchronous piece includes raceway, rolling ring and Anti-slip cover, the raceway outer rim connection Output end coaxial arrangement in vacuum chamber interior walls and with driving motor, the inner wall of the rolling ring is coaxially connected to be placed outside ring Edge, the Anti-slip cover are set in rolling ring outer rim and inconsistent with raceway inner edge.
Through the above technical solutions, driving motor is disc-rotated when working, at this time with place the rolling ring that connect of ring and Raceway inner edge is inconsistent, so that rolling ring is walked about in raceway inner edge when disk rotational, so that placing ring and optical mirror slip certainly Turn;In the process, the rotation of optical mirror slip is driven by the rotation of disk completely, therefore power saving, convenient, and driving motor stops When only working, the rotation and revolution of optical mirror slip are simultaneously stopped again, do not need the stopping for controlling rotation and revolution respectively, therefore grasp It is also very convenient to make to get up;Anti-slip cover then improves the frictional force between rolling ring and raceway, so that rolling ring can be in raceway Inner edge is stable to walk about, and reduces the possibility skidded between rolling ring and raceway, and can also reduce the mill between rolling ring and raceway Damage reduces the possibility for generating gap between rolling ring and raceway because of abrasion, further increases rolling ring walking about surely in raceway It is qualitative.
The present invention is further arranged to: the output extreme direction of through-hole toward driving motor on the disk be extended with it is multiple simultaneously Form a column, the placement ring outer rim on through-hole described in each column is equipped with rolling ring, between two adjacent rolling ring outer rims of each column Mutually contradict.
Through the above technical solutions, each rolling ring mutually contradicts, so that disk is in rotation, each rolling ring can be mutual Between frictional force act on lower rotation, to drive optical mirror slip rotation;Such setting substantially increases disk to optical frames The useful load of piece improves production efficiency, reduces the energy so that once plated film can be carried out to more optical mirror slips Loss.
The present invention is further arranged to: the vacuum chamber is equipped with flase floor away from the side of driving motor in disk, described The outer rim of flase floor is rotatably connected in vacuum chamber interior walls, and the disk is equipped with the first drive shaft, institute towards the side of flase floor It states and is coaxially connected with the first conical tooth in the first drive shaft, the second drive shaft, second driving are connected on the grid It is coaxially connected with the second conical tooth on axis, is rotatably connected in the vacuum chamber and is nibbled simultaneously with the first conical tooth and the second conical tooth The commutating tooth of conjunction.
Through the above technical solutions, flase floor is in the first conical tooth, the second conical tooth when driving motor drives disk rotational And it is rotated under the matching relationship of commutating tooth, and the rotation direction of flase floor and the rotation direction of disk are on the contrary, grid at this time Plate can be uniform by the indoor Gas Stirring of vacuum, so that film can be more uniform is plated on optical mirror slip, improves The coating quality of optical mirror slip.
The present invention is further arranged to: the grid be equipped with protective cover, first conical tooth, the second conical tooth and Second drive shaft is respectively positioned in protective cover, and first drive shaft is fed through the one end of protective cover far from grid, the commutation Tooth is connected on protective cover inner wall by third drive shaft turns.
Through the above technical solutions, protective cover can play one to the first conical tooth, the second conical tooth and commutating tooth Protective effect improves stability when grid rotation so as to reduce rate of breakdown.
In conclusion the invention has the following advantages:
1, it can guarantee the cleannes of optical mirror slip and improve light transmittance, yield rate be improved, to obtain the optics of better quality Eyeglass;
2, driving motor work can drive optical mirror slip rotation and revolution, thus uniformity when improving coating of optical lens, Improve the coating quality of optical mirror slip.
Detailed description of the invention
Fig. 1 is the process flow chart of embodiment 1.
Fig. 2 is the overall structure diagram of embodiment 2.
Fig. 3 is the structural schematic diagram that embodiment 2 is used to embody synchronous piece.
Fig. 4 is the structural schematic diagram that embodiment 2 is used to embody commutating tooth.
Fig. 5 is the enlarged drawing in the portion A in Fig. 4.
Fig. 6 is the structural schematic diagram that embodiment 3 is used to embody synchronous piece.
Appended drawing reference: 1, vacuum chamber;2, driving motor;3, fixture;31, disk;311, through-hole;32, ring is placed;321, it rolls Pearl;322, slot rolling;4, synchronous piece;41, internal tooth torus;42, rotating gear ring;43, raceway;44, rolling ring;45, Anti-slip cover;5, lattice Screen;51, the second drive shaft;52, the second conical tooth;6, the first drive shaft;61, the first conical tooth;7, commutating tooth;8, it protects Cover.
Specific embodiment
Below in conjunction with attached drawing, invention is further described in detail.
Embodiment 1: optical mirror slip is passed through polishing first by a kind of high-precision optical machining eyeglass technique, such as Fig. 1, operator Machine is ground into predetermined size, and then ground optical mirror slip is put into supersonic wave cleaning machine, starts supersonic wave cleaning machine pair Optical mirror slip carries out cleaning 5 ~ 10 minutes, so that the spot on optical lens surface is cleaned.
Such as Fig. 1, then stop supersonic wave cleaning machine, optical mirror slip and artificial under strong light is taken out out of supersonic wave cleaning machine Observation, checks whether the surface of optical mirror slip remains spot, if just putting back in supersonic wave cleaning machine again there are also residual stains It is cleaned, optical mirror slip is loaded on fixture if noresidue spot, pass through the artificial observation under strong light, it can be ensured that dress The optical lens surface being loaded on fixture is up-to-standard, to prevent the underproof optical mirror slip of surface quality from entering next step work Sequence causes unnecessary time and energy waste.
Such as Fig. 1, after operator loads a piece of optical mirror slip on fixture, fixture is put into vacuum environment and is evaporated plating Film, plated film time and temperature are depending on required Film Design, and since vacuum coating is the prior art, the present embodiment is not It repeats again.After the completion of plated film, operator takes out optical mirror slip, and whether the coating quality for detecting completed optical eyeglass conforms to It asks, if not meeting, designer re-starts Film Design.
Such as Fig. 1, if coating quality meets the requirements, optical mirror slip is fully loaded with fixture by operator, is then put into fixture very Batch plated film is carried out in empty room, to realize efficiently production.In order to improve the uniformity of plated film, when plated film, fixture drives optical frames Piece revolves around clamp central axis, and at the same time, optical mirror slip carries out rotation in fixture, can reduce vacuum chamber in this way Inner membrance vapour it is uneven and caused by same batch optical mirror slip coating film thickness unevenness possibility, improve the plating film quality of optical mirror slip Amount.
Such as Fig. 1, after the completion of coating of optical lens, operator takes out fixture, and carefully takes out the good optical mirror slip of plated film, Operator detects completed optical eyeglass, is just put in storage completed optical eyeglass if qualified, and unqualified judge whether can be with It re-works, it is not possible to then destroy, optical mirror slip then can be re-started into grinding, in order to produce the optical frames of other sizes Piece reduces the wasting of resources.All of above step carries out under dustfree environment, generates pollution to optical mirror slip with dust protection.
Embodiment 2: a kind of coating apparatus of high-precision optical machining eyeglass technique, such as Fig. 2 and Fig. 3, including vacuum chamber 1, Fixture 3 and the driving motor 2 being arranged on vacuum chamber 1, fixture 3 include horizontally disposed disk 31, driving motor 2 Output end be fixed in 31 center of disk, thus driving motor 2 work when disk 31 can be driven around the output of driving motor 2 Hold central axis rotation.
Such as Fig. 4 and Fig. 5, several through-holes 311 are offered along 31 outer rim equal part of disk on disk 31, along level in through-hole 311 Direction, which is equipped with, places ring 32, is embedded with several balls 321 along the periphery for placing ring 32 on 311 inner wall of through-hole, places 32 outer rim of ring The slot rolling 322 being partially submerged into for ball 321 is offered, so that placing ring 32 can smoothly rotate in through-hole 311, disk 31 It is equipped with driving and places the synchronous piece 4 that ring 32 rotates.
Such as Fig. 4 and Fig. 5, synchronous piece 4 include be fixedly connected on the outer rim for placing ring 32 and with place ring 32 it is concentric from Rotating disk ring 42 is welded with internal tooth torus 41 along 31 periphery of disk on the inner wall of vacuum chamber 1, and internal tooth torus 41 is towards disk 31 Side is meshed with all 42 outer rims of rotating gear ring, thus when driving motor 2 drives disk 31 to revolve, rotating gear ring 42 Around walking about for internal tooth torus 41, rotating gear ring 42 just drives placement ring 32 to generate rotation together at this time, therefore operator will After optical mirror slip is placed in placement ring 32, the optical mirror slip in ring 32 is placed also with the rotation together of ring 32 is placed, is realized The purpose of optical mirror slip synchronous rotation and revolution in coating process, to improve the plated film uniformity of optical mirror slip.
Such as Fig. 4, in the process of revolution of optical mirror slip, the rotation of optical mirror slip is completely by the rotation of disk 31 come band Dynamic therefore power saving, convenient, when driving motor 2 stops working, the rotation and revolution of optical mirror slip are simultaneously stopped again, are not needed point Not Kong Zhi rotation and revolution stopping, therefore it is also very convenient to operate.
Such as Fig. 4, disk 31 is installed with the first drive shaft 6 with motor output end coaxial line away from the side of driving motor 2, Vacuum chamber 1 is equipped with flase floor 5 away from the side of driving motor 2 in disk 31, and the outer rim of flase floor 5 is rotatably connected on vacuum chamber 1 On inner wall, the side of grid towards disk 31 is installed with the second drive shaft 51, and the second drive shaft 51 is set with grid coaxial line It sets, is coaxially connected with the first conical tooth 61 and the second conical tooth 52, grid respectively in the first drive shaft 6 and the second drive shaft 51 It is equipped with while being provide with the protective cover 8 of the first conical tooth 61 and the second conical tooth 52, is rotatably connected on the inner wall of protective cover 8 Third drive shaft is coaxially connected with commutating tooth 7, commutating tooth 7 and the first conical tooth 61 and the second conical tooth 52 in third drive shaft It engages simultaneously, so that when disk 31 rotates lattice can be driven by the first conical tooth 61, commutating tooth 7 and the second conical tooth 52 Aperture plate rotates backward, and then the up ascension that the film vapour in vacuum chamber 1 is stirred evenly, to further increase the plating of optical mirror slip The film uniformity.
Action process: when needing to carry out plated film to optical mirror slip, optical mirror slip is loaded in placement by operator one by one first In ring 32, then closing vacuum chamber 1, starts driving motor 2, and driving motor 2 drives disk 31 and optical mirror slip revolution, at this time It is meshed with 42 outer rim of rotating gear ring that ring 32 is connect is placed with 41 inner edge of internal tooth torus, therefore rotating gear ring 42 is around interior The inner edge of gear ring 41 is walked about, and rotating gear ring 42 just drives placement ring 32 to generate rotation together, places the optical frames in ring 32 Piece also rotation together, quickly and easily to realize the revolution and rotation of optical mirror slip in coating process.
Disk 31 can pass through the matching relationship of the first conical tooth 61, the second conical tooth 52 and commutating tooth 7 while rotation Drive grid relative to 31 backwards rotation of disk, flase floor 5 can be uniform by the Gas Stirring in vacuum chamber 1 at this time, thus Allow film is more uniform to be plated on optical mirror slip, improves the coating quality of optical mirror slip.
Embodiment 3: a kind of coating apparatus of high-precision optical machining eyeglass technique, with embodiment 2 the difference is that, Such as Fig. 6, synchronous piece 4 includes the raceway 43 being welded on 1 inner wall of vacuum chamber along 31 periphery of disk, raceway 43 and driving motor 2 Output end coaxial arrangement.Output extreme direction along through-hole 311 toward the driving motor 2 of the setting of 31 periphery of disk is extended with three and shape Cheng Yilie, 32 outer rim of placement ring on each column through-hole 311 are installed with rolling ring 44, are arranged with Anti-slip cover on the outer wall of rolling ring 44 45, mutually contradicted between two adjacent rolling rings 44 in same row, the rolling ring 44 at 31 outer most edge of disk then with raceway 43 Inner edge is inconsistent.
Such as Fig. 6, when driving motor 2 drives disk 31 to rotate, the rolling ring 44 at 31 outer most edge of disk is in raceway 43 Inner edge is walked about, and other rolling rings 44 automatically drive all then by the conflict power synchronous rolling between adjacent rolling ring 44 Place the optical mirror slip rotation in ring 32.It is such to be arranged so that the useful load on a disk 31 greatly improves, to improve Production efficiency, reduces energy consumption.
This specific embodiment is only explanation of the invention, is not limitation of the present invention, those skilled in the art Member can according to need the modification that not creative contribution is made to the present embodiment after reading this specification, but as long as at this All by the protection of Patent Law in the scope of the claims of invention.

Claims (10)

1. a kind of high-precision optical machining eyeglass technique, which comprises the steps of:
Step 1: optical mirror slip is ground into predetermined size by polishing machine;
Step 2: ground optical mirror slip being put into supersonic wave cleaning machine and is cleaned, and scavenging period is 5 ~ 10 minutes;
Step 3: taking out optical mirror slip, and whether remain spot by the surface of artificial observation optical mirror slip, if there is residual dirty Stain then re-starts step 2, and noresidue spot then enters step four;
Step 4: optical mirror slip is loaded on fixture (3), and then fixture (3) is put into vacuum environment and is evaporated plated film;
Step 5: detecting completed optical eyeglass, and qualified product storage, rejected product is re-worked or destroyed.
2. high-precision optical machining eyeglass technique according to claim 1, it is characterised in that:, will before implementation steps four Single optical mirror slip is loaded on fixture (3), and then fixture (3) is put into vacuum environment and is evaporated plated film, and detect at The quality of product, if reaching requirement carries out batch evaporation coating for optical mirror slip again.
3. high-precision optical machining eyeglass technique according to claim 2, it is characterised in that: in step 4, fixture (3) Optical mirror slip is driven to revolve around fixture (3) central axis, optical mirror slip carries out rotation in fixture (3).
4. a kind of for implementing the coating apparatus of high-precision optical machining eyeglass technique as claimed in claim 3, feature exists In: including vacuum chamber (1) and the driving motor (2) to revolve for driving fixture (3) is set on vacuum chamber (1);
Fixture (3): it including horizontally disposed disk (31), several through-holes (311) being provided on disk (31), is used for The placement ring (32) of optical mirror slip and the synchronous piece (4) for driving placement ring (32) rotation are placed, the disk (31) Center is connected on the output end of driving motor (2), and the placement ring (32) is rotatably connected in the horizontal direction in through-hole (311) On wall.
5. coating apparatus according to claim 4, it is characterised in that: along placement ring (32) on through-hole (311) inner wall Periphery be embedded with several balls (321), described placement ring (32) outer rim offers the slot rolling being partially submerged into for ball (321) (322).
6. coating apparatus according to claim 5, it is characterised in that: the synchronous piece (4) include internal tooth torus (41) with And rotating gear ring (42), internal tooth torus (41) outer rim are connected on vacuum chamber (1) inner wall and defeated with driving motor (2) Outlet coaxial arrangement, the inner wall of the rotating gear ring (42) is coaxially connected to place ring (32) outer rim, the rotating gear ring (42) marginal tooth is meshed with the interior uncinus of internal tooth torus (41).
7. coating apparatus according to claim 5, it is characterised in that: the synchronous piece (4) includes raceway (43), rolling ring (44) and Anti-slip cover (45), raceway (43) outer rim is connected on vacuum chamber (1) inner wall and the output with driving motor (2) End coaxial arrangement, the inner wall of the rolling ring (44) is coaxially connected to place ring (32) outer rim, and the Anti-slip cover (45) is set in rolling Ring (44) outer rim is simultaneously inconsistent with raceway (43) inner edge.
8. coating apparatus according to claim 7, it is characterised in that: the past driving of through-hole (311) on the disk (31) The output extreme direction of motor (2) is extended with multiple and forms a column, and placement ring (32) outer rim on through-hole (311) described in each column is equal Equipped with rolling ring (44), mutually contradicted between two adjacent rolling ring (44) outer rims of each column.
9. the coating apparatus according to claim 6 or 8, it is characterised in that: the vacuum chamber (1) is in disk (31) away from drive The side of dynamic motor (2) is equipped with flase floor (5), and the outer rim of the flase floor (5) is rotatably connected on vacuum chamber (1) inner wall, institute It states disk (31) and is equipped with the first drive shaft (6) towards the side of flase floor (5), be coaxially connected on first drive shaft (6) First conical tooth (61) is connected with the second drive shaft (51) on the grid, coaxially connected on second drive shaft (51) Have the second conical tooth (52), is rotatably connected in the vacuum chamber (1) same with the first conical tooth (61) and the second conical tooth (52) When the commutating tooth (7) that engages.
10. coating apparatus according to claim 9, it is characterised in that: the grid is equipped with protective cover (8), described First conical tooth (61), the second conical tooth (52) and the second drive shaft (51) are respectively positioned in protective cover (8), first drive shaft (6) it is fed through the one end of protective cover (8) far from grid, the commutating tooth (7) is connected to protection by third drive shaft turns It covers on (8) inner wall.
CN201811096671.7A 2018-09-19 2018-09-19 High-precision optical lens processing technology and coating device thereof Active CN109267013B (en)

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CN110922063A (en) * 2019-11-26 2020-03-27 江西水晶光电有限公司 Process method for lifting special lens for projector
CN113113557A (en) * 2021-04-09 2021-07-13 深圳市辉中盛科技有限公司 OLED substrate packaging method and device
CN113249681A (en) * 2021-04-26 2021-08-13 南京埃帕克斯光学有限公司 Preparation method of optical lens by vacuum coating
CN114150285A (en) * 2021-12-13 2022-03-08 湖北扬子江光电仪器有限公司 Optical lens piece support for coating machine
CN115386841A (en) * 2022-09-19 2022-11-25 上饶市豪杰光学有限公司 Device for coating optical lens
CN116770257A (en) * 2023-06-25 2023-09-19 广州市博泰光学科技有限公司 Optical lens coating film manufacturing system and manufacturing method thereof

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