CN110863186B - Laser Gaussian lens coating tool and coating method - Google Patents
Laser Gaussian lens coating tool and coating method Download PDFInfo
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- CN110863186B CN110863186B CN201911249126.1A CN201911249126A CN110863186B CN 110863186 B CN110863186 B CN 110863186B CN 201911249126 A CN201911249126 A CN 201911249126A CN 110863186 B CN110863186 B CN 110863186B
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- gear
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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Abstract
The invention relates to the technical field of Gaussian reflector lens coating, in particular to a laser Gaussian lens coating tool and a coating method, which comprises the following steps: the gear disc is in meshed connection with the driving gear, and the driving gear is in key connection with an output shaft of the first motor; the driving gear is arranged at the central position of the bottom of the gear disc, an output shaft of a second motor arranged on the upper side of the gear disc penetrates through the gear disc to be connected with the driving gear in a key mode, and an output shaft of the second motor is in sliding fit with a central hole of the gear disc; the driven gears comprise a plurality of mutually meshed driven gears and are arranged on the lower surface of the gear disc, and the driving gear is meshed with the adjacent driven gear; the lens clamping device comprises a clamping sleeve arranged on the lower side of the driven gear, and a diffraction projectile steel sheet, a gasket, a Gaussian lens and a compression spring steel sheet are sequentially arranged between a baffle table at the bottom of the clamping sleeve and the driven gear from bottom to top. The product has the advantages of large quantity of platable products, good uniformity, high yield and low cost.
Description
The technical field is as follows:
the invention relates to the technical field of Gaussian reflector lens coating, in particular to a laser Gaussian lens coating tool and a laser Gaussian lens coating method.
Background art:
the Gaussian mirror is a variable reflectivity mirror and is also a gradient reflectivity mirror, can provide a more stable laser mode in an unstable cavity, controls fundamental mode oscillation and eliminates a high-order mode, and can effectively improve the quality of a laser beam, and particularly the quality of the laser beam is changed more obviously under the condition of low magnification.
When the Gaussian lens is used, the surface of the Gaussian lens is generally coated by a vacuum coating machine, and the principle is as follows: the evaporation coating is generally to heat a target material to evaporate surface components in the form of atomic groups or ions, and deposit the surface components on a substrate to form a thin film through a film forming process (scattering-island structure-labyrinth structure-layer growth). In the sputtering type coating, it can be simply understood that electrons or high-energy laser is utilized to bombard a target material, and surface components are sputtered out in the form of atomic groups or ions and finally deposited on the surface of a substrate, and subjected to a film forming process to finally form a thin film.
The existing Gauss lens coating tool has the advantages of low yield, small number of products plated at each time, poor uniformity and high cost, one set of tool can only plate one appointed product, and different products need to be replaced by different tools, so that each product is very high in price and cannot be put into market for application in large quantity.
In conclusion, the existing processing mode seriously restricts the application and development of the Gaussian lens, and becomes a technical problem to be solved urgently in the industry.
The invention content is as follows:
the invention provides the laser Gaussian lens coating tool and the coating method for making up the defects of the prior art, the number of the products to be coated is large, the uniformity is good, the yield is high, the cost is low, and the problems in the prior art are solved.
The technical scheme adopted by the invention for solving the technical problems is as follows:
the utility model provides a laser gauss lens coating film frock, includes:
the gear disc is in meshed connection with the driving gear, and the driving gear is in key connection with an output shaft of the first motor;
the driving gear is arranged at the central position of the bottom of the gear disc, an output shaft of a second motor arranged on the upper side of the gear disc penetrates through the gear disc to be connected with the driving gear in a key mode, and an output shaft of the second motor is in sliding fit with a central hole of the gear disc;
the driven gears comprise a plurality of mutually meshed driven gears and are arranged on the lower surface of the gear disc, and the driving gear is meshed with the adjacent driven gear;
the lens clamping device comprises a clamping sleeve arranged on the lower side of the driven gear, a diffraction projectile steel sheet, a gasket, a Gaussian lens and a compression spring steel sheet are sequentially arranged between a baffle table at the bottom of the clamping sleeve and the driven gear from bottom to top, and a diffraction hole is formed in the center of the diffraction spring steel sheet.
The clamping sleeve is fixedly connected with the driven gear through threads.
The diffraction holes are horn-shaped holes with wide upper parts and narrow lower parts.
A coating method of a laser Gaussian lens comprises the following steps:
s1: starting a vacuum coating machine;
s2: starting a film material evaporator to evaporate the film material, and observing the gasification degree of the film coating material through a glass observation window;
s3: starting a film coating tool, driving a plurality of driven gears at the bottom of the film coating tool to revolve around a central shaft through a rotating gear disc, simultaneously, driving the driven gears to rotate under the driving of a driving gear, and installing a lens clamping device at the lower side of each driven gear to realize the revolution and rotation of the lens clamping device in the film coating process;
s4: after the film material is gasified, the film material upwards passes through the lens clamping device and is attached to the surface of the Gaussian lens to form a film layer from inside to outside and from dense to sparse;
s5: and after the coating is finished, stopping the vacuum coating machine, and taking out the Gaussian lens from the lens clamping device to obtain the required finished product.
By adopting the scheme, the invention has the following beneficial effects:
the lens clamping device revolves and rotates in the film coating process, the uniformity of the film layer is good, the yield is high, the cost is low, and one set of tool can meet the requirements of different product film layers by changing the diffraction aperture and distance.
Description of the drawings:
FIG. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic sectional enlarged view of the driven gear and lens holding device.
FIG. 3 is a schematic view of the installation structure of the present invention in a vacuum coater.
Fig. 4 is a schematic structural diagram of a film layer of the present invention.
In the figure, the lens clamping device comprises a gear plate 1, a gear plate 2, a driving gear 3, a first motor 4, a driving gear 5, a second motor 6, a driven gear 7, a lens clamping device 8, a clamping sleeve 9, a diffraction elastic steel sheet 10, a gasket 11, a Gaussian lens 12, a compression elastic steel sheet 13, diffraction holes 14, a vacuum coating machine 15, a coating evaporator 16 and a film layer.
The specific implementation mode is as follows:
in order to clearly explain the technical features of the present invention, the following detailed description of the present invention is provided with reference to the accompanying drawings.
As shown in fig. 1-4, a laser gaussian lens coating tool comprises:
the gear disc 1 is meshed with the driving gear 2, and the driving gear 2 is in key connection with an output shaft of the first motor 3;
the driving gear 4 is arranged at the center of the bottom of the gear disc 1, an output shaft of a second motor 5 arranged on the upper side of the gear disc 1 penetrates through the gear disc to be connected with the driving gear 4 in a key mode, and an output shaft of the second motor 5 is in sliding fit with a center hole of the gear disc 1; the second motor 5 is arranged in the vacuum coating machine, an output shaft of the second motor 5 supports the gear disc 1, the first motor 3 drives the gear disc 1 to horizontally rotate around the output shaft of the second motor 5 through the driving gear 2, and meanwhile, the output shaft of the second motor 5 also drives the driving gear 4 to horizontally rotate;
the driven gears 6 are arranged on the lower surface of the gear disc 1, the driven gears 6 are meshed with each other, the driving gear 4 is meshed with the driven gear 6 adjacent to the driving gear 4, the driving gear 4 drives the driven gear 6 adjacent to the driving gear to rotate horizontally, and the driven gears 6 sequentially drive other driven gears 6 to rotate horizontally, so that revolution and rotation of the driven gears 6 are realized;
the lens clamping device 7 comprises a clamping sleeve 8 installed on the lower side of the driven gear, a diffraction projectile steel sheet 9, a gasket 10, a Gaussian lens 11 and a compression spring steel sheet 12 are sequentially arranged between a stop table at the bottom of the clamping sleeve 8 and the driven gear 6 from bottom to top, and a diffraction hole 13 is formed in the center of the diffraction spring steel sheet 9. The diffraction elastic steel sheet 9 and the compression elastic steel sheet 12 play a role in clamping and fixing the Gaussian lens 11, so that the Gaussian lens 11 is prevented from deviating in the rotation process, and the film layer 16 is just plated at the center of the Gaussian lens 11. For different Gaussian lenses 11 requirements, the lens clamping device 7 is only required to be detached, the gasket 10 and the diffraction elastic steel sheet 9 are replaced, the gasket 10 with different thicknesses is selected to adjust the distance between the diffraction holes 13 and the Gaussian lenses 11, the diffraction elastic steel sheet 9 with the diffraction holes 13 with different aperture sizes is selected, and the distance and the aperture are matched to diffract to form a required film layer.
The clamping sleeve 8 is fixedly connected with the driven gear 6 through threads, so that the connection is stable, and the disassembly and assembly are convenient.
The diffraction holes 13 are flared holes with wide upper parts and narrow lower parts, the membrane material passes through the holes to form a diffraction effect, and the diffraction effect is attached to the Gaussian lens 11 to form a membrane layer 16 from inside to outside and from dense to sparse. When the laser is used, because the light beam emitted by the laser is also strong in central light beam and relatively weak in peripheral light beam, the Gauss lens plated with the film layer can be just matched with the characteristics of the light beam, the film layer with a dense middle corresponds to the center of the light beam, the film layer with a sparse periphery corresponds to the periphery of the light beam, and the quality of the laser beam can be effectively improved after reflection.
A coating method of a laser Gaussian lens comprises the following steps:
s1: starting the vacuum coating machine 14;
s2: the film material evaporator 15 is started to evaporate the film material, and the gasification degree of the film coating material is observed through a glass observation window;
s3: starting a film coating tool, driving a plurality of driven gears at the bottom of the film coating tool to revolve around a central shaft through a rotating gear disc, simultaneously, driving the driven gears to rotate under the driving of a driving gear, and installing a lens clamping device at the lower side of each driven gear to realize the revolution and rotation of the lens clamping device in the film coating process;
s4: after the film material is gasified, the film material upwards passes through the lens clamping device and is attached to the surface of the Gaussian lens to form a film layer from inside to outside and from dense to sparse;
s5: after the coating is finished, the vacuum coating machine 14 is stopped, and the gauss lens is taken out from the lens clamping device to obtain the required finished product.
The above-described embodiments should not be construed as limiting the scope of the invention, and any alternative modifications or alterations to the embodiments of the present invention will be apparent to those skilled in the art.
The present invention is not described in detail, but is known to those skilled in the art.
Claims (4)
1. The utility model provides a laser gauss lens coating film frock which characterized in that: the method comprises the following steps:
the gear disc is in meshed connection with the driving gear, and the driving gear is in key connection with an output shaft of the first motor;
the driving gear is arranged at the central position of the bottom of the gear disc, an output shaft of a second motor arranged on the upper side of the gear disc penetrates through the gear disc to be connected with the driving gear in a key mode, and an output shaft of the second motor is in sliding fit with a central hole of the gear disc;
the driven gears comprise a plurality of mutually meshed driven gears and are arranged on the lower surface of the gear disc, and the driving gear is meshed with the adjacent driven gear;
the lens clamping device comprises a clamping sleeve arranged on the lower side of the driven gear, a diffraction projectile steel sheet, a gasket, a Gaussian lens and a compression spring steel sheet are sequentially arranged between a baffle table at the bottom of the clamping sleeve and the driven gear from bottom to top, and a diffraction hole is formed in the center of the diffraction spring steel sheet.
2. The laser Gaussian lens coating tool of claim 1 is characterized in that: the clamping sleeve is fixedly connected with the driven gear through threads.
3. The laser Gaussian lens coating tool of claim 1 is characterized in that: the diffraction holes are horn-shaped holes with wide upper parts and narrow lower parts.
4. A coating method of a laser Gaussian lens is characterized by comprising the following steps: the method comprises the following steps:
s1: starting a vacuum coating machine;
s2: starting a film material evaporator to evaporate the film material, and observing the gasification degree of the film coating material through a glass observation window;
s3: starting a film coating tool, driving a plurality of driven gears at the bottom of the film coating tool to revolve around a central shaft through a rotating gear disc, simultaneously, driving the driven gears to rotate under the driving of a driving gear, and installing a lens clamping device at the lower side of each driven gear to realize the revolution and rotation of the lens clamping device in the film coating process;
s4: after the film material is gasified, the film material upwards passes through the lens clamping device and is attached to the surface of the Gaussian lens to form a film layer from inside to outside and from dense to sparse;
s5: and after the coating is finished, stopping the vacuum coating machine, and taking out the Gaussian lens from the lens clamping device to obtain the required finished product.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911249126.1A CN110863186B (en) | 2019-12-09 | 2019-12-09 | Laser Gaussian lens coating tool and coating method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911249126.1A CN110863186B (en) | 2019-12-09 | 2019-12-09 | Laser Gaussian lens coating tool and coating method |
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| CN110863186A CN110863186A (en) | 2020-03-06 |
| CN110863186B true CN110863186B (en) | 2020-07-14 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10308471A1 (en) * | 2003-02-20 | 2004-09-16 | Hensoldt Ag | Coating installation for medium and small diameter optical components with curved surfaces, e.g. lenses, mirrors, etc. for photobjective lenses of consumer optics |
| CN101122640A (en) * | 2007-09-21 | 2008-02-13 | 中国科学院上海光学精密机械研究所 | Coating device and coating method for gradient reflectivity mirror |
| CN109267013A (en) * | 2018-09-19 | 2019-01-25 | 南京格奥光电科技有限公司 | High-precision optical machining eyeglass technique and its coating apparatus |
| CN208869654U (en) * | 2018-08-23 | 2019-05-17 | 苏州市唯嘉光学有限公司 | A kind of coating of optical lens jig |
| CN209178466U (en) * | 2018-10-19 | 2019-07-30 | 信阳市图展光电有限公司 | A kind of coating of optical lens machine |
-
2019
- 2019-12-09 CN CN201911249126.1A patent/CN110863186B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10308471A1 (en) * | 2003-02-20 | 2004-09-16 | Hensoldt Ag | Coating installation for medium and small diameter optical components with curved surfaces, e.g. lenses, mirrors, etc. for photobjective lenses of consumer optics |
| CN101122640A (en) * | 2007-09-21 | 2008-02-13 | 中国科学院上海光学精密机械研究所 | Coating device and coating method for gradient reflectivity mirror |
| CN208869654U (en) * | 2018-08-23 | 2019-05-17 | 苏州市唯嘉光学有限公司 | A kind of coating of optical lens jig |
| CN109267013A (en) * | 2018-09-19 | 2019-01-25 | 南京格奥光电科技有限公司 | High-precision optical machining eyeglass technique and its coating apparatus |
| CN209178466U (en) * | 2018-10-19 | 2019-07-30 | 信阳市图展光电有限公司 | A kind of coating of optical lens machine |
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| CN110863186A (en) | 2020-03-06 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A coating tooling and coating method for laser Gaussian lens Effective date of registration: 20220127 Granted publication date: 20200714 Pledgee: Ji'nan rural commercial bank Limited by Share Ltd. high tech branch Pledgor: JINAN JINGZHONG OPTOELECTRONICS TECHNOLOGY CO.,LTD. Registration number: Y2022980001156 |
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Date of cancellation: 20230111 Granted publication date: 20200714 Pledgee: Ji'nan rural commercial bank Limited by Share Ltd. high tech branch Pledgor: JINAN JINGZHONG OPTOELECTRONICS TECHNOLOGY CO.,LTD. Registration number: Y2022980001156 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
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Denomination of invention: A coating tooling and coating method for laser Gaussian lens Effective date of registration: 20230129 Granted publication date: 20200714 Pledgee: Ji'nan rural commercial bank Limited by Share Ltd. high tech branch Pledgor: JINAN JINGZHONG OPTOELECTRONICS TECHNOLOGY CO.,LTD. Registration number: Y2023980031737 |
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