CN108761137A - Afm tip wear measuring method - Google Patents
Afm tip wear measuring method Download PDFInfo
- Publication number
- CN108761137A CN108761137A CN201810720887.XA CN201810720887A CN108761137A CN 108761137 A CN108761137 A CN 108761137A CN 201810720887 A CN201810720887 A CN 201810720887A CN 108761137 A CN108761137 A CN 108761137A
- Authority
- CN
- China
- Prior art keywords
- afm
- nanometer
- needle point
- measured
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q40/00—Calibration, e.g. of probes
Abstract
The present invention provides a kind of afm tip wear measuring methods, belong to the probe calibration technique field of atomic force microscope.Include the following steps, the AFM based on known tip dimensions obtains the step width L of nanometer step1；AFM based on tip dimensions to be measured obtains the step width L of identical nanometer step2；According to the step width L1And L2Difference, obtain the radius size of needle point to be measured.Afm tip wear measuring method provided by the invention, identical nanometer step structure is measured by the AFM of AFM and tip dimensions to be measured based on known tip dimensions, and the dimensional parameters for obtaining needle point to be measured are calculated according to the structural parameters that can be directly acquired, it is easy to operate, it can measure in real time, accurate needle point structure data are provided for the measurement and analysis of experimental results of AFM, measurement result is true and reliable.
Description
Technical field
The invention belongs to the probe calibration technique fields of atomic force microscope, are to be related to a kind of afm tip mill more specifically
Loss measurement method.
Background technology
With the development of the sophisticated technologies such as space flight, national defence, it is desirable that part have high-performance, high quality, high stability and
The understanding of the characteristics of miniaturization, people gradually enter micro-scale from macro-scale, promote going out for Ultraprecision Machining
It is existing.Precision of Super-finishing is subject to processing the influence of the factors such as mechanism, rapidoprint, processing method, processing technology, judges superfinishing
Whether the processing quality of close processing part is up to standard, and to the precision of survey tool, more stringent requirements are proposed.
Atomic force microscope (atomic force microscopes abbreviation AFM) is detected as a kind of ultraprecise of practicality
Tool, without the requirement of vacuum environment, sample conduction, compared with light microscope, electron microscope, AFM can be obtained really
Three-dimensional appearance information, so microstructure height, the Roughness Information at side inclination angle and Ultra-precision Turning surface can be measured
It is one of the best means of current characterization nano surface microstructure Deng, AFM.
AFM scan image is the knot of probe tip and sample surface morphology convolution, from image-forming principle, the probe of AFM
The geometric dimension at needle point tip is smaller, and measurement accuracy is higher.It can lead to probe tip due to polluting, wearing during AFM scan
Tip size become larger, reduce the lateral resolution of AFM, and the accurate measurement of nano-scale structure, mechanics characterization and coarse
Degree, which measures, requires the accurate tip dimensions information of acquisition, so grasping needle point cutting-edge structure has very analysis experimental result
Important function.
Invention content
The present invention provides a kind of afm tip wear measuring methods, it is intended to solve cross after afm tip abrasion in the prior art
The technical issues of being distorted to resolution ratio reduction, measurement data, the method can measure the abrasion condition of needle point in real time, be following
Measurement and analysis of experimental results accurate needle point structure data are provided, ensure that measurement result is true and reliable.
To achieve the above object, the technical solution adopted by the present invention is to provide a kind of afm tip wear measuring method, including
Following steps,
AFM based on known tip dimensions obtains the step width L of nanometer step1；
AFM based on tip dimensions to be measured obtains the step width L of identical nanometer step2；
According to the step width L1And L2Difference, obtain the radius size of needle point to be measured.
Further, the AFM based on known tip dimensions obtains the step width L of nanometer step1And the base
The step width L of identical nanometer step is obtained in the AFM of tip dimensions to be measured2Calculating process it is as follows：
Wherein,
R1For the needle point arc radius of known dimensions；
R2For the needle point arc radius of size to be measured；
H is the height of nanometer step；
L0For the edge shoulder width of nanometer step；
α is the angle that track and nanometer step are scanned when probe enters nanometer step；
β is the angle that track and nanometer step are scanned when probe leaves nanometer step.
Further, described according to the step width L1And L2Difference, obtain the calculating of the radius size of needle point to be measured
Process is as follows：
Further, the nanometer step structure is 2D lattice structures.
Further, it is known that the needle point arc radius of size and the needle point arc radius of size to be measured are respectively less than nanometer step
Width between adjacent cells.
Further, it is known that the needle point arc radius of size and the needle point arc radius of size to be measured are respectively less than nanometer step
Height dimension.
Afm tip wear measuring method advantageous effect provided by the invention is that this method passes through known tip dimensions
The AFM of AFM and tip dimensions to be measured measure identical nanometer step structure, according to survey of the two based on identical nanometer step width
The difference of magnitude obtains the needle point arc radius of size to be measured, i.e. blunt round radius after tip wear, in this method calculating process
Parameter used can be measured directly and accurately, ensure afm tip dimensional parameters data accuracy, and this method only with
The mode of AFM scan nanometer step measures, and does not need other survey tools, easy to operate and can carry out in real time.This hair
The afm tip wear measuring method of bright offer is measured by the AFM of AFM and tip dimensions to be measured based on known tip dimensions
Identical nanometer step structure, and the dimensional parameters for obtaining needle point to be measured are calculated according to the structural parameters that can be directly acquired, operation
Simply, it can measure in real time, provide accurate needle point structure data for the measurement and analysis of experimental results of AFM, measure knot
Fruit is true and reliable.
Description of the drawings
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to embodiment or description of the prior art
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description be only the present invention some
Embodiment for those of ordinary skill in the art without creative efforts, can also be attached according to these
Figure obtains other attached drawings.
Fig. 1 is the geometrical model of nanometer step；
Fig. 2 is the actual size figure of nanometer step；
Fig. 3 is the geometrical model of afm tip；
Fig. 4 is the step block diagram of afm tip wear measuring method provided in an embodiment of the present invention；
Practical geometry mould when Fig. 5 is known probe tip dimensions AFM scan nanometer step provided in an embodiment of the present invention
Type figure.
Wherein, each reference numeral：
The probe of 1-known tip dimensions；2-nanometer steps；The edge shoulder width L of 3-nanometer steps0；4-nanometers
The height h of step；The needle point arc radius R of 5-known dimensions1；Scanning track and nanometer platform when 6- probes enter nanometer step
The angle α of rank；7- probes scan the angle β of track and nanometer step when leaving nanometer step；8- step height measurement width；9- is to be measured
The probe of tip dimensions；The needle point arc radius R of 10- sizes to be measured2。
Specific implementation mode
In order to make technical problems, technical solutions and advantages to be solved be more clearly understood, tie below
Accompanying drawings and embodiments are closed, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only
To explain the present invention, it is not intended to limit the present invention.
It should be noted that when element is referred to as " being fixed on " or " being set to " another element, it can be directly another
On one element or it is connected on another element.When an element is known as " being connected to " another element, it can
To be directly to another element or be indirectly connected on another element.
It is to be appreciated that term " length ", " width ", "upper", "lower", "front", "rear", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "top", "bottom", "inner", "outside" is that orientation based on ... shown in the drawings or position are closed
System, is merely for convenience of description of the present invention and simplification of the description, not indicating or implying the indicated device or element must have
Specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
In addition, term " first ", " second " are used for description purposes only, it is not understood to indicate or imply relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more this feature.In the description of the present invention, " multiple ", " several " be meant that two or
Two or more, unless otherwise specifically defined.
Also referring to Fig. 1, Fig. 4 and Fig. 5, now afm tip wear measuring method provided by the invention is illustrated,
Middle A includes the following steps to the scanning direction for AFM：
In step S101, the AFM based on known tip dimensions obtains the step width L of nanometer step1；
In step s 102, the AFM based on tip dimensions to be measured obtains the step width L of identical nanometer step2；
In step s 103, according to the step width L1And L2Difference, obtain the radius size of needle point to be measured.
Nanometer step 2 is that scale covers nanometer to the High-precision standard model of micron, and nanometer step 2 is as a high-precision
Nanosize criterion substance, be widely used in effective calibration of high-precision nanoprocessing measuring apparatus.It is selected in this method
Use 2 model of nanometer step of standard as calibration and survey tool.
Specifically, the needle point of AFM probe is a semiglobe, and the centrum side of the hemisphere and probe is tangent.Nanometer step 2
Height h be more than the radius of needle point, then when AFM probe enters and leaves nanometer step, the edge shoulder and probe of nanometer step 2
Seamed edge contact, needle point contacts with the bottom surface of nanometer step 2.
In practical application, the AFM scan nanometer step 2 of known tip dimensions is first passed through, preferably just manufacture is by calibration
AFM equipment, obtain multiple step structure step width size L on nanometer step 21And record, it is then based on needle point ruler to be measured
Very little AFM obtains the step width L of identical nanometer step2；It should be understood that the quantity of nanometer step 2 is not required, it is optional
Multiple nanometers of steps 2 are taken to measure and demarcate.Finally according to the step width L1And L2Difference, calculate obtain wait for stylus
The radius size of point.
Afm tip wear measuring method advantageous effect provided by the invention is that this method passes through known tip dimensions
The AFM of AFM and tip dimensions to be measured measure identical nanometer step structure, according to survey of the two based on identical nanometer step width
The difference of magnitude obtains the needle point arc radius of size to be measured, i.e. blunt round radius after tip wear, in this method calculating process
Parameter used can be measured directly and accurately, ensure afm tip dimensional parameters data accuracy, and this method only with
The mode of AFM scan nanometer step measures, and does not need other survey tools, easy to operate and can carry out in real time.This hair
The afm tip wear measuring method of bright offer is measured by the AFM of AFM and tip dimensions to be measured based on known tip dimensions
Identical nanometer step structure, and the dimensional parameters for obtaining needle point to be measured are calculated according to the structural parameters that can be directly acquired, operation
Simply, it can measure in real time, provide accurate needle point structure data for the measurement and analysis of experimental results of AFM, measure knot
Fruit is true and reliable.
Further, it please refers to Fig.1 and Fig. 2, one kind as afm tip wear measuring method provided by the invention is specific
Embodiment, the AFM based on known tip dimensions obtain the step width L of nanometer step1And it is described based on waiting for stylus
The AFM of sharp size obtains the step width L of identical nanometer step2Calculating process it is as follows：
Wherein,
R1For the needle point arc radius of known dimensions；
R2For the needle point arc radius of size to be measured；
H is the height of nanometer step；
L0For the edge shoulder width of nanometer step；
α is the angle that track and nanometer step are scanned when probe enters nanometer step；
β is the angle that track and nanometer step are scanned when probe leaves nanometer step.
Specifically, Fig. 3 and Fig. 5 are please referred to, A is to the scanning direction for AFM, when AFM probe enters and leaves nanometer step,
The edge shoulder of nanometer step 2 is contacted with the seamed edge of probe, and the seamed edge of probe is extended and is intersected with the bottom surface of nanometer step 2, i.e.,
It can get the angle α and angle β that track and nanometer step 2 are scanned when the probes 1 of known dimensions enters and leaves nanometer step 2.
The seamed edge of AFM probe and needle point hemisphere are tangent, and when needle point enters nanometer step 2, then the seamed edge of the probe of tip dimensions extends
The angle of the bottom surface crosspoint 6 (m in Fig. 5) of line and nanometer step 2 and needle point circle center line connecting and perpendicular be α two/
One, when needle point leaves nanometer step 2, then the seamed edge extended line of the probe of known tip dimensions intersects with the bottom surface of nanometer step 2
The half that the angle of 7 (n in Fig. 5) of point and needle point circle center line connecting and perpendicular is β.
According to the geometrical model of Fig. 5, the platform of the nanometer step 2 calculated based on known dimensions needle point arc radius 5 can be obtained
Rank measures width 8, i.e. L1, it is specifically shown in formula (1).The geometrical model of the probe 9 of tip dimensions to be measured and known tip dimensions
Geometrical model figure when 1 scanning nano step 2 of probe is identical, therefore the nanometer step 2 calculated based on the probe of tip dimensions to be measured 9
Step height measurement width L2See formula (2), α and β is that needle point circular arc connects with 2 bottom surface of nanometer step in formula (1) and formula (2)
It touches and obtains, can be directly acquired by the scanning profile track of AFM.
Further, Fig. 2, Fig. 3 and Fig. 5 are please referred to, one kind as afm tip wear measuring method provided by the invention
Specific implementation mode, it is described according to the step width L1And L2Difference, obtain the calculating process of the radius size of needle point to be measured
It is as follows：
Specifically, Fig. 2, Fig. 3 and Fig. 5 are please referred to, when AFM probe enters and leaves nanometer step, the edge of nanometer step 2
Shoulder is contacted with the seamed edge of probe, and due to the step edge shoulder not instead of right angle of nanometer step 2, there are one section of circular arcs, and
AFM scan track is also a semiglobe close to the needle point of step edge shoulder, so standard can not be obtained from scanning track
Really obtain the numerical value of the edge shoulder width 3 of nanometer step 2.
In this method, same nanometer is scanned using the probe 1 of known tip dimensions and the probe 9 of tip dimensions to be measured
It is poor that the lattice structure of step 2, then contrast scans track, formula (1) and formula (2) are made, and can obtain formula (3), can eliminate
The nanometer step edge shoulder width 3 that can not be accurately obtained from scanning track.R1For given data, thus it is straight according to formula (3)
Obtain to obtain R2, i.e., the needle point arc radius R of size to be measured2, 10 in figure.Preferably, multi-group data comparative analysis can be carried out, is made
It is more accurate to obtain measurement data.
Further, it please refers to Fig.1 and Fig. 5, one kind as afm tip wear measuring method provided by the invention is specific
Embodiment, the nanometer step structure are 2D lattice structures.Specifically, the step structure of nanometer step 2 includes with arrow
Fine structure, the linear of different in width, 1D lattice structures and the 2D lattice structures of head instruction, preferably 2D grid in this method
Lattice structure can obtain the step width L dimension of multigroup nanometer of step 2 along A into scanning process, in AFM single pass, be convenient for
It is carried out at the same time the comparative analysis of multi-group data.
Further, referring to Fig. 5, a kind of specific implementation as afm tip wear measuring method provided by the invention
Mode, it is known that the needle point arc radius 5 of size and the needle point arc radius 10 of size to be measured are respectively less than 2 adjacent cells of nanometer step
Between width.The abrasion of needle point is generally in the minimum point of needle point, specifically, the radius size of needle point is less than 2 grid of nanometer step
Spacing between lattice, therefore the minimum point of needle point can directly scan each surface for touching nanometer step 2, therefore use the method can be with
Ensure that AFM scan image is the measurement data of the minimum point based on needle point.
Further, referring to Fig. 5, a kind of specific implementation as afm tip wear measuring method provided by the invention
Mode, it is known that the height gauge of the needle point arc radius 5 of size and the needle point arc radius 10 of size to be measured respectively less than nanometer step 2
Very little 4.When ensureing that AFM probe enters and leaves nanometer step 2, the edge shoulder of nanometer step 2 is contacted with the seamed edge of probe, needle point
It is contacted with the bottom surface of nanometer step 2.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
All any modification, equivalent and improvement etc., should all be included in the protection scope of the present invention made by within refreshing and principle.
Claims (6)
1.AFM tip wear measurement methods, which is characterized in that include the following steps：
AFM based on known tip dimensions obtains the step width L of nanometer step1；
AFM based on tip dimensions to be measured obtains the step width L of identical nanometer step2；
According to the step width L1And L2Difference, obtain the radius size of needle point to be measured.
2. afm tip wear measuring method as described in claim 1, which is characterized in that described based on known tip dimensions
AFM obtains the step width L of nanometer step1And the AFM based on tip dimensions to be measured obtains identical nanometer step
Step width L2Calculating process it is as follows：
Wherein,
R1For the needle point arc radius of known dimensions；
R2For the needle point arc radius of size to be measured；
H is the height of nanometer step；
L0For the edge shoulder width of nanometer step；
α is the angle that track and nanometer step are scanned when probe enters nanometer step；
β is the angle that track and nanometer step are scanned when probe leaves nanometer step.
3. afm tip wear measuring method as claimed in claim 2, which is characterized in that described according to the step width L1With
L2Difference, the calculating process for obtaining the radius size of needle point to be measured is as follows：
4. afm tip wear measuring method as described in claim 1, which is characterized in that the nanometer step structure is 2D grid
Lattice structure.
5. afm tip wear measuring method as claimed in claim 4, which is characterized in that the needle point arc radius of known dimensions
And the needle point arc radius of size to be measured is respectively less than the width between nanometer step adjacent cells.
6. afm tip wear measuring method as described in claim 1, which is characterized in that the needle point arc radius of known dimensions
The height dimension of nanometer step is respectively less than with the needle point arc radius of size to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810720887.XA CN108761137B (en) | 2018-07-04 | 2018-07-04 | Afm tip wear measuring method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810720887.XA CN108761137B (en) | 2018-07-04 | 2018-07-04 | Afm tip wear measuring method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108761137A true CN108761137A (en) | 2018-11-06 |
| CN108761137B CN108761137B (en) | 2019-10-22 |
Family
ID=63975762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810720887.XA Active CN108761137B (en) | 2018-07-04 | 2018-07-04 | Afm tip wear measuring method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108761137B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114088979A (en) * | 2021-12-20 | 2022-02-25 | 百及纳米科技(上海)有限公司 | Probe calibration method, surface measurement method, and probe control apparatus |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0882632A (en) * | 1994-09-12 | 1996-03-26 | Nippon Telegr & Teleph Corp <Ntt> | Method for measurement of structure dimensions of fine structure |
| CN1648635A (en) * | 2005-02-06 | 2005-08-03 | 哈尔滨工业大学 | Method for measuring atomic force microscope needle type radius using single wall carbon nano tube |
| US20070040117A1 (en) * | 2005-08-16 | 2007-02-22 | National Institute Of Advanced Industrial Science And Technology | Standard specimen for probe shape evaluation and method for evaluating probe shape |
| CN101256070B (en) * | 2008-04-17 | 2010-09-29 | 复旦大学 | Method for lossless measuring shape parameter of atomic force microscope probe |
| CN103196411A (en) * | 2012-01-10 | 2013-07-10 | 精工电子纳米科技有限公司 | Probe shape evaluation method for a scanning probe microscope |
| CN104515872A (en) * | 2014-12-24 | 2015-04-15 | 哈尔滨工业大学 | Method for measuring radius of tip of atomic force microscope through frequency spectrum of nanometer step |
| CN105115467A (en) * | 2015-08-18 | 2015-12-02 | 哈尔滨工业大学 | Method for accurately evaluating curvature radius of diamond Berckvich indenter tip |
| JP2017219454A (en) * | 2016-06-09 | 2017-12-14 | 住友金属鉱山株式会社 | Evaluation method of probe for atomic force microscope |
-
2018
- 2018-07-04 CN CN201810720887.XA patent/CN108761137B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0882632A (en) * | 1994-09-12 | 1996-03-26 | Nippon Telegr & Teleph Corp <Ntt> | Method for measurement of structure dimensions of fine structure |
| CN1648635A (en) * | 2005-02-06 | 2005-08-03 | 哈尔滨工业大学 | Method for measuring atomic force microscope needle type radius using single wall carbon nano tube |
| US20070040117A1 (en) * | 2005-08-16 | 2007-02-22 | National Institute Of Advanced Industrial Science And Technology | Standard specimen for probe shape evaluation and method for evaluating probe shape |
| CN101256070B (en) * | 2008-04-17 | 2010-09-29 | 复旦大学 | Method for lossless measuring shape parameter of atomic force microscope probe |
| CN103196411A (en) * | 2012-01-10 | 2013-07-10 | 精工电子纳米科技有限公司 | Probe shape evaluation method for a scanning probe microscope |
| CN104515872A (en) * | 2014-12-24 | 2015-04-15 | 哈尔滨工业大学 | Method for measuring radius of tip of atomic force microscope through frequency spectrum of nanometer step |
| CN105115467A (en) * | 2015-08-18 | 2015-12-02 | 哈尔滨工业大学 | Method for accurately evaluating curvature radius of diamond Berckvich indenter tip |
| JP2017219454A (en) * | 2016-06-09 | 2017-12-14 | 住友金属鉱山株式会社 | Evaluation method of probe for atomic force microscope |
Non-Patent Citations (1)
| Title |
|---|
| 薛勃: "AFM单晶硅探针磨损的实验研究", 《中国优秀硕士学位论文全文数据库》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114088979A (en) * | 2021-12-20 | 2022-02-25 | 百及纳米科技(上海)有限公司 | Probe calibration method, surface measurement method, and probe control apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108761137B (en) | 2019-10-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103234481B (en) | High-efficiency and high-precision detection device for circular arc roundness of cutter point of diamond cutter | |
| CN109520421A (en) | A kind of the adjustment device and its method of adjustment of image gauge head posture | |
| CN102607977B (en) | Abrasion in-situ measuring device based on digital image processing and method | |
| US20080276696A1 (en) | Atomic force microscopy of scanning and image processing | |
| CN109458958A (en) | A kind of scaling method of turntable center position in four axis vision measurement device | |
| Dove et al. | A method for measuring geomembrane surface roughness | |
| CN107990856B (en) | Spatial position error detection method for over-range workpiece | |
| CN100543448C (en) | Scanning tunnel microscope and scanning microelectrode coupling measuring system and measuring technique thereof | |
| Zhu et al. | On-machine measurement of a slow slide servo diamond-machined 3D microstructure with a curved substrate | |
| CN105865389B (en) | A kind of micro-and nanoscale standard and its tracking method | |
| CN106769276B (en) | Three-dimensional structure face aliquot part choosing method based on Dice similarity measure | |
| CN103954220B (en) | Hit ship motion status number image measuring method in bridge test | |
| CN108761137B (en) | Afm tip wear measuring method | |
| CN105486240A (en) | Corrosion morphology quantitative detection method of outer wall of pipeline | |
| CN106225718A (en) | Contour detecting gauge head, detector and detection method | |
| CN102507985A (en) | Incline measuring method for STM (Scanning Tunneling Microscope) with vertical side wall micro structure | |
| CN207846171U (en) | A kind of pavement flatness checking device | |
| Geng et al. | An AFM-based methodology for measuring axial and radial error motions of spindles | |
| Seah | Nanoscale roughness and bias in step height measurements by atomic force microscopy | |
| Frühauf et al. | Development of Si-chips with anisotropic rough surface | |
| CN107421440A (en) | A kind of method of three dimensional optical measuring square hole vertical difference | |
| Zhao et al. | An image stitching method to eliminate the distortion of the sidewall in linewidth measurement | |
| CN107144219B (en) | A kind of confocal laser measurement method | |
| RU2522724C2 (en) | Method of metallographic analysis | |
| CN110196026A (en) | A kind of method of quick measuring and calculating surface roughness and measurement scale relationship |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |