CN103196411A - Probe shape evaluation method for a scanning probe microscope - Google Patents
Probe shape evaluation method for a scanning probe microscope Download PDFInfo
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- CN103196411A CN103196411A CN2013100088018A CN201310008801A CN103196411A CN 103196411 A CN103196411 A CN 103196411A CN 2013100088018 A CN2013100088018 A CN 2013100088018A CN 201310008801 A CN201310008801 A CN 201310008801A CN 103196411 A CN103196411 A CN 103196411A
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- Prior art keywords
- probe
- shape
- sample
- radius
- evaluation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/10—Shape or taper
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q40/00—Calibration, e.g. of probes
Abstract
The invention relates to a probe shape evaluation method for a scanning probe microscope. The method is used for evaluating a probe tip shape in the scanning probe microscope and includes: measuring the probe tip shape by a probe shape test sample having a needle-like structure; determining radii of cross-sections at a plurality of distances from the apex; and calculating, based on the distances and the radii, a radios of curvature when the probe tip shape is approximated by a circle.
Description
Technical field
The present invention relates to measure the method for the probe radius-of-curvature of the employed cantilever of scanning type probe microscope.
Background technology
In scanning type probe microscope, because the end shape of probe directly relates to the contact condition with sample, thereby for the measuring shape of holding sample surface and the mensuration performance of physical property measurement, must measure the end shape of probe in advance.In addition, in fact, compare with the end shape of probe itself, mostly tips of probes is assumed to semisphere, utilize its radius or diameter to show the sharpness of tips of probes.
All the time, method as the end shape of measuring probe, used based on the observation of electron microscope and by scanning type probe microscope measure sharp-pointed needle-like sample (below, be called probe shape detect use sample) shape and depict the method for the end shape of probe.The latter's use probe shape detects and can measure under the state that cantilever is arranged at scanning type probe microscope with the method for sample Sb, thereby has easy and do not need the advantage of other device, generally speaking often is used.
For example, have two kinds of following methods: such as patent documentation 1 record, according to utilizing probe shape to detect the shape of the probe 2a that measures with sample Sb, and according to the width of the curvature portion on the top of the angle of the side of probe 2a and probe 2a, calculate the radius (generally speaking, being called radius-of-curvature) of the semi-spherical shape of tips of probes; And, such as non-patent literature 1 record, by utilizing scanning type probe microscope and utilizing probe shape to detect the end shape of measuring probe 2a with sample Sb, thereby as shown in Figure 6, the sharp-pointed nadel top of detecting with sample Sb in probe shape utilizes probe shape to detect the end shape that comes measuring probe with the pin of sample, obtain from the diameter (Fig. 8) of the section of certain distance at the top of the end shape of this probe 2a, estimate the end shape of probe 2a thus.
Patent documentation
Patent documentation 1: TOHKEMY 2001-165844 communique;
Non-patent literature 1:JIS R 1683 utilizes atomic force microscope to measure the method for the surfaceness of fine ceramics film.
Summary of the invention
In the evaluation method of the probe shape of patent documentation 1, the side of probe 2a is necessary for linearity, but actual probe 2a is small structure, thereby the side not necessarily is made into linearity.Therefore, can not correctly obtain the boundary of the curvature portion on side and top, be difficult to utilize this method to obtain the radius-of-curvature on top.
In addition, in the evaluation method of the probe shape of non-patent literature 1, also be the cylindric as prerequisite of roughly the same width with the foundation side of the semi-spherical shape on top, with the diameter of columned part as the diameter of the semi-spherical shape on top and estimate.But, therefore, must in order to detect with above-mentioned probe shape the aspect ratio radius-of-curvature foundation sidepiece bigger and semi-spherical shape that can measure shape with sample Sb be divided into can be approximately the certain column type of thickness shape as precondition.But for probe shape, along with purposes is different and have various kinds, the foundation side part that intention makes the semi-spherical shape on the top of probe become the semi-spherical shape of big situation and probe is not that the situation of convergent shape is also a lot of into cylinder.For the probe of so special shape, sometimes can not be suitable for the method for non-patent literature 1.For example, as shown in Figure 7, radius-of-curvature at probe is bigger than the height that probe shape detects the convex shaped part of using sample Sb, namely than under the bigger situation of the height that can measure shape of probe, measure probe shape regional At place probe shape track as shown in Figure 9, detected with sample by probe shape and to carry out in the part of the semi-spherical shape on top.In addition, in this case, such as non-patent literature 1 record, even obtain from the diameter of the section of certain distance at the top of tips of probes shape, also inconsistent with the diameter of the semi-spherical shape on the top of probe.
Therefore, in the present invention, even provide a kind of utilizing probe shape to detect under the littler situation of the radius-of-curvature of the aspect ratio tips of probes that can measure shape with sample Sb, also estimate the method for the end shape of the big probe 2b of radius-of-curvature.
As mentioned above, in the evaluation method of non-patent literature 1, utilizing probe shape to detect under the littler situation of the radius-of-curvature of the aspect ratio probe that can measure shape with sample Sb, can not correctly estimate the diameter of the semi-spherical shape of tips of probes.Therefore, as shown in Figure 2, obtain a plurality of distances (for example, the h among the figure from the top of the shape of tips of probes that has measured
0~ h
4) radius (for example, the r among the figure of the section located
0~ r
4), in these substitution formulas 1, calculating tips of probes shape approximation shown in Figure 2 is the radius of curvature R of bowlder
Tip
Particularly, by near operation, the scanning operation, data obtain operation, data extract operation and calculation process constitute, this top that makes the probe that scanning type probe microscope possesses near operation relatively contacts or approaches to predetermined distance with respect to the evaluation of relative configuration with the surface of sample (probe shape detects and uses sample), this scanning operation makes the top that acts on probe and estimates with the physical quantity between the surface of sample and is scanning certain and that stipulate simultaneously, these data obtain operation and obtain the surface configuration of estimating with sample, this data extract operation for the height (h) of the regulation on the central shaft that descends from tips of probes among the data that obtain and this central shaft highly to the distance (r) of the outer rim of the shape of the mensuration data group as a group, extract behind the change height (h) more than 2 groups, this calculation process utilizes the height (h) of these extractions data and calculates top with probe apart from (r) and is approximately radius-of-curvature (R under the spherical situation
Tip).
According to probe shape evaluation method involved in the present invention, even the side of probe is not the probe of linearity, even perhaps the radius-of-curvature of probe also can be measured the radius-of-curvature of probe than utilizing probe shape to detect the bigger probe 2b of height that measures with sample Sb.
Description of drawings
Fig. 1 is the figure that shows the summary of the scanning type probe microscope that is used for probe shape evaluation method of the present invention.
Fig. 2 is the concept map of the evaluation of the related probe shape of probe shape evaluation method of the present invention.
Fig. 3 is the result's of the related probe shape of the probe shape evaluation method of the present invention figure of an example.
Fig. 4 is the result's of the related probe shape of the probe shape evaluation method of the present invention figure of an example.
Fig. 5 is the result's of the related probe shape of the probe shape evaluation method of the present invention figure of an example.
Fig. 6 utilizes probe shape to detect the key diagram of measuring the shape of probe with sample.
Fig. 7 utilizes probe shape to detect the key diagram of measuring the shape of the big probe of radius-of-curvature with sample.
Fig. 8 is the concept map of the evaluation of the related probe shape of existing probe shape evaluation method.
Fig. 9 is the concept map of the evaluation of the related probe shape of existing probe shape evaluation method.
Embodiment
At first, about being used for the scanning type probe microscope of probe shape evaluation method of the present invention, using Fig. 1 and the one example is described.
In scanning type probe microscope of the present invention, possess cantilever 1, bar is encouraged vibrating device 4 and cantilever displacement detecting portion 5, this cantilever 1 has probe 2a, this probe 2a is configured to needle point towards the surface that is arranged at the determinand Sa on the sample bench 10, and with respect to the surface of this determinand Sa and can relatively be parallel to the surface of determinand Sa X, Y-direction scanning and perpendicular to the movement of the Z direction on the surface of this determinand Sa, this bar is encouraged vibrating device 4 can make this cantilever 1 vibration, and the displacement of cantilever 1 detects in this cantilever displacement detecting portion 5.Sample bench 10 is installed on 3 dimension actuators 9, and can make the surface of probe 2 and determinand Sa relatively mobile along above-mentioned X, Y and Z direction.
In three-dimensional actuator 9, be connected with XY driving mechanism 7 and Z driving mechanism 8, this XY driving mechanism 7 and Z driving mechanism 8 drives 3 dimension actuators 9 and along the surface of X, Y, Z scanning direction determinand Sa.
In addition, XY driving mechanism 7 and Z driving mechanism 8 are connected to control part 6 and by its control.
Then, according to the mensuration order, the embodiment of probe shape evaluation method involved in the present invention is described.
In probe shape evaluation method involved in the present invention, at first, to have desire measures the cantilever of the big probe 2b of the radius-of-curvature of probe shape and is installed on scanning type probe microscope, in the sample maintaining part of scanning type probe microscope, the radius-of-curvature that will have the top is that the probe shape of the structure of the following sharp-pointed needle-like of 10nm detects with sample Sb mounting on wafer (wafer).
Then, as shown in Figure 7, use the big probe 2b of radius-of-curvature of desire evaluation probe shape and measure the shape that sample Sb is used in the probe shape detection.At this moment, being present in probe shape detects with the needle like configuration on the surface of sample Sb 1 and becomes and measure near the regional central authorities, and, be enough to utilize needle like configuration to measure the mode of scope of the shape of the big probe 2b of radius-of-curvature to become, preestablish and measure the zone.
By measuring shape by scanning type probe microscope in this wise, thereby utilize probe shape to detect the end shape of hemisphere portion of measuring the top of the big probe 2b of radius-of-curvature with sample Sb.
Then, according to the shape A of the hemisphere portion on the top of the probe of measuring in this wise, as shown in Figure 2, will be approximately circular from the section of the semi-spherical shape of the tips of probes of the distance h at top and in a plurality of distance h
iThe place measures its radius r.At this, the method for obtaining of the radius r of semi-spherical shape by the area S substitution formula 2 with section, thereby is obtained the radius of a circle that has with the area area identical of section, becomes the radius that section is approximately bowlder.At this, in formula 2, " S " is the sectional area of position arbitrarily, and " r " for section being approximately the radius of bowlder, " π " is circular constant.
Then, with these distance h from the top
iRadius r with the section of each distance
iIn the substitution formula 1, the radius the when end shape of calculating the probe 2b that radius-of-curvature is big is approximately semisphere is with the radius-of-curvature of this radius as probe 2b.At this, in formula 1, " h " is the distance from the top, and " r " is the radius of the section at h place, " R
Tip" be the radius-of-curvature of probe.
The radius-of-curvature on the top by as above calculating probe 2b, thus the shape of probe can be estimated.
(formula 1)
(formula 2)
Fig. 3 uses probe shape to detect and measures the tips of probes shape with sample Sb, has shown the data of measurement result A of it being carried out the probe shape of 3 dimension demonstrations.The top of probe 2 is shown to become protruding mode, the highest the top as probe 2 with this jut, vertically reducing the position of distance arbitrarily from this top, section after along continuous straight runs dissects this shape for lugs is shown (at this by Fig. 4, shown the section after the position of 10nm, 30nm, 60nm is dissectd, but the position of dissecing is a plurality of arbitrarily positions littler than the radius-of-curvature of probe 2).
Fig. 4 has shown the figure that section shape that the height (in the drawings, 10,30,60nm) arbitrarily from the top among the measurement result A of the probe shape of Fig. 3 is located shows as profile.So, section shape needn't be circle, but obtain radius of a circle of the same area by the area S from section, thereby obtains the radius of a circle when section is approximately circle.
If in chart, show the radius of being measured by such method from the section of a plurality of distances arbitrarily on top and this position, then shown in the point of Fig. 5, shown by dotted line and to utilize formula 1 and the each point of Fig. 2 is approximately curve of approximation under the round situation.
Symbol description
1: cantilever
2,2a, 2b: probe
3: bar portion
4: bar is encouraged vibrating device
5: cantilever displacement detecting portion
6: control part
The 7:XY driving mechanism
The 8:Z driving mechanism
9:3 ties up actuator
10: sample bench
11: display part
Sa: determinand (sample)
Sb: probe shape detects uses sample
At: the zone of measuring the shape of probe
As: measure the zone that probe shape is measured the shape of using sample
A: the measurement result of probe shape
Claims (2)
1. probe shape evaluation method is utilized scanning type probe microscope that the end shape of probe is carried out measuring shape and is carried out the evaluation of sharpness on the top of this probe, it is characterized in that, comprising:
Near operation, the top that makes the described probe that described scanning type probe microscope possesses relatively contacts or approaches to predetermined distance with respect to the evaluation of relative configuration with the surface of sample;
The scanning operation makes the top and the described evaluation that act on described probe be scanning certain and that stipulate simultaneously with the physical quantity between the surface of sample;
Data obtain operation, obtain the surface configuration of the sample of described evaluation usefulness;
The data extract operation, for with the height (h) of the regulation on the central shaft that descends from described tips of probes among the described data that obtain and this described central shaft highly to the distance (r) of the outer rim of the shape of the measuring data group as a group, extract change behind the described height (h) more than 2 groups; And
Calculation process utilizes the described height (h) of these extraction data and described distance (r) to calculate top with described probe and is approximately radius-of-curvature (R under the spherical situation
Tip).
2. probe shape evaluation method according to claim 1, described calculating are based on following formula:
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012002366A JP5902485B2 (en) | 2012-01-10 | 2012-01-10 | Method for evaluating the probe shape of a scanning probe microscope |
| JP2012-002366 | 2012-01-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103196411A true CN103196411A (en) | 2013-07-10 |
| CN103196411B CN103196411B (en) | 2017-06-27 |
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ID=48719116
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| Application Number | Title | Priority Date | Filing Date |
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| CN201310008801.8A Active CN103196411B (en) | 2012-01-10 | 2013-01-10 | The probe shape assay method of scanning type probe microscope |
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| Country | Link |
|---|---|
| US (1) | US8621660B2 (en) |
| JP (1) | JP5902485B2 (en) |
| CN (1) | CN103196411B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106018883A (en) * | 2015-03-27 | 2016-10-12 | 株式会社日立高新技术高精细*** | Thermal assisted magnetic head element inspecting device and method |
| CN108761137A (en) * | 2018-07-04 | 2018-11-06 | 燕山大学 | Afm tip wear measuring method |
| CN110531121A (en) * | 2019-09-30 | 2019-12-03 | 燕山大学 | A kind of dressing method of atomic force microscope probe needle point |
| CN111121597A (en) * | 2018-10-31 | 2020-05-08 | 株式会社三丰 | Surface texture measuring method and surface texture measuring device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6515873B2 (en) * | 2016-06-09 | 2019-05-22 | 住友金属鉱山株式会社 | Evaluation method of probe for atomic force microscope |
| US10060948B2 (en) | 2016-08-12 | 2018-08-28 | Tiptek, LLC | Scanning probe and electron microscope probes and their manufacture |
| JP2019105561A (en) * | 2017-12-13 | 2019-06-27 | 大塚電子株式会社 | Measurement instrument and sample holder used for the same |
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| JP7400645B2 (en) | 2020-07-03 | 2023-12-19 | 株式会社島津製作所 | How to obtain the probe tip diameter and SPM |
| CN117471392B (en) * | 2023-12-27 | 2024-03-29 | 矽电半导体设备(深圳)股份有限公司 | Method and system for detecting probe tip, electronic equipment and storage medium |
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| JPH0658754A (en) * | 1992-08-10 | 1994-03-04 | Hitachi Ltd | Measuring method for probe shape |
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| CN101256070A (en) * | 2008-04-17 | 2008-09-03 | 复旦大学 | Method for lossless measuring shape parameter of atomic force microscope probe |
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| JP2011089985A (en) * | 2009-10-19 | 2011-05-06 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Method and structure for characterizing probe of atomic force microscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP4803440B2 (en) * | 2005-08-16 | 2011-10-26 | 独立行政法人産業技術総合研究所 | Standard sample for probe shape evaluation |
-
2012
- 2012-01-10 JP JP2012002366A patent/JP5902485B2/en active Active
-
2013
- 2013-01-09 US US13/737,022 patent/US8621660B2/en active Active
- 2013-01-10 CN CN201310008801.8A patent/CN103196411B/en active Active
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| JPH0658754A (en) * | 1992-08-10 | 1994-03-04 | Hitachi Ltd | Measuring method for probe shape |
| JP2001165844A (en) * | 1999-12-06 | 2001-06-22 | Seiko Instruments Inc | Scan probe microscope |
| US20080078229A1 (en) * | 2001-03-30 | 2008-04-03 | Vladimir Mancevski | Caliper method, system, and apparatus |
| CN1648635A (en) * | 2005-02-06 | 2005-08-03 | 哈尔滨工业大学 | Method for measuring atomic force microscope needle type radius using single wall carbon nano tube |
| CN101473384A (en) * | 2006-02-20 | 2009-07-01 | 威科仪器有限公司 | Method and apparatus for characterizing a probe tip |
| CN101256070A (en) * | 2008-04-17 | 2008-09-03 | 复旦大学 | Method for lossless measuring shape parameter of atomic force microscope probe |
| JP2011089985A (en) * | 2009-10-19 | 2011-05-06 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Method and structure for characterizing probe of atomic force microscope |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106018883A (en) * | 2015-03-27 | 2016-10-12 | 株式会社日立高新技术高精细*** | Thermal assisted magnetic head element inspecting device and method |
| CN108761137A (en) * | 2018-07-04 | 2018-11-06 | 燕山大学 | Afm tip wear measuring method |
| CN108761137B (en) * | 2018-07-04 | 2019-10-22 | 燕山大学 | Afm tip wear measuring method |
| CN111121597A (en) * | 2018-10-31 | 2020-05-08 | 株式会社三丰 | Surface texture measuring method and surface texture measuring device |
| CN111121597B (en) * | 2018-10-31 | 2023-10-20 | 株式会社三丰 | Surface texture measuring method and surface texture measuring device |
| CN110531121A (en) * | 2019-09-30 | 2019-12-03 | 燕山大学 | A kind of dressing method of atomic force microscope probe needle point |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103196411B (en) | 2017-06-27 |
| US20130180019A1 (en) | 2013-07-11 |
| US8621660B2 (en) | 2013-12-31 |
| JP5902485B2 (en) | 2016-04-13 |
| JP2013142586A (en) | 2013-07-22 |
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