CN108751184A - A kind of carbonization of graphite guide hotting mask and graphitization continuous process system and method - Google Patents
A kind of carbonization of graphite guide hotting mask and graphitization continuous process system and method Download PDFInfo
- Publication number
- CN108751184A CN108751184A CN201810953128.8A CN201810953128A CN108751184A CN 108751184 A CN108751184 A CN 108751184A CN 201810953128 A CN201810953128 A CN 201810953128A CN 108751184 A CN108751184 A CN 108751184A
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- CN
- China
- Prior art keywords
- graphitization
- cabin
- carbonization
- hotting mask
- graphite guide
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/20—Graphite
- C01B32/205—Preparation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/05—Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
Abstract
The invention discloses a kind of carbonizations of graphite guide hotting mask and graphitization continuous process system and method, since the graphite guide hotting mask carbonization in the present invention is connected with graphitization continuous process system carbonization cabin with graphitization cabin by transfer chamber, it can be directly pushed under the action of propulsive mechanism in graphitization cabin after carbonization treatment and carry out graphitization processing, compared with prior art, centre is handled without cooling, the time is greatly saved, improves the production efficiency of graphite guide hotting mask.In addition, due to that need not come out of the stove, converter, shove charge operation also avoids the generation of web breakage phenomenon during executing aforesaid operations, ensure that the final product quality of graphite guide hotting mask.
Description
Technical field
The present invention relates to graphite guide hotting mask processing technique field, more specifically to a kind of carbonization of graphite guide hotting mask and
It is graphitized continuous process system and method.
Background technology
Graphite guide hotting mask is a kind of novel heat-conducting heat sink material, by PI films by chemical method through high temperature cabonization and graphitization
It is made after processing.
In graphite guide hotting mask production process, PI film coiled materials carry out carburizing reagent processing first in carbide furnace, then turn
It is sent in graphitizing furnace and carries out graphitization reaction treatment.Since carbonization heating is generally at 1000 DEG C or more, terminate in carbonization heating
After need to be cooled to 100 DEG C or less just come out of the stove and be transferred in graphitizing furnace.And temperature-fall period just needs more than ten hour time,
PI film coiled materials go out carbide furnace, transhipment, graphitizing furnace loading furnace process take and also compare more, cause the production of artificial synthesized graphite film to be imitated
Rate is low.
In addition, manual operation of the PI film coiled materials in going out carbide furnace, transhipment, graphitizing furnace loading furnace process will also result in coiled material
There is breakage, influences the final product quality of graphite guide hotting mask.
Therefore, the production efficiency for how improving graphite guide hotting mask becomes those skilled in the art's technology urgently to be resolved hurrily and asks
Topic.
Invention content
In view of this, the technical problem to be solved by the present invention is to how improve the production efficiency of graphite guide hotting mask, for this purpose,
The present invention provides a kind of carbonizations of graphite guide hotting mask and graphitization continuous process system and method.
To achieve the above object, the present invention provides the following technical solutions:
A kind of carbonization of graphite guide hotting mask and graphitization continuous process system, including:
Shell, the enclosure interior, which is disposed with, can carry out the carbonization cabin of carburizing reagent, can carry out being graphitized instead
The graphitization cabin answered and transfer chamber;
To the vacuum device in the carbonization cabin and the graphitization cabin vacuumize process;
It is arranged to be used to completely cut off in the transfer chamber and seals the carbonization cabin and the sealing isolation mechanism for being graphitized cabin;
Positioned at the enclosure interior, and the carrying transfer device of pending part can be carried;And
It is arranged in one end of the shell, and the carrying transfer device can be pushed into graphitization cabin from carbonization cabin
Propulsive mechanism.
Preferably, it is carbonized and is graphitized in continuous process system in above-mentioned graphite guide hotting mask, the carbonization cabin includes carbonization
The matched heating room in heating room and carbonization heating room and the heat preservation being arranged between the carbonization heating room and shell
Layer, first fire door of the heating room door close to the shell.
Preferably, it is carbonized and is graphitized in continuous process system in above-mentioned graphite guide hotting mask, the graphitization cabin includes stone
Inkization crucible and the induction coil for being graphitized the matched crucible cover of crucible and being arranged on the graphitization crucible,
Second fire door of the crucible cover close to the shell.
Preferably, it is carbonized and is graphitized in continuous process system in above-mentioned graphite guide hotting mask, sealing isolation mechanism packet
The first gate valve and the second gate valve are included, first gate valve can close the carbonization cabin close to the one of the transfer chamber
End, second gate valve can close the graphitization cabin close to one end of the transfer chamber.
Preferably, it is carbonized and is graphitized in continuous process system in above-mentioned graphite guide hotting mask, sealing isolation mechanism is also
Including the third gate valve being arranged between first gate valve and second gate valve.
Preferably, it is carbonized and is graphitized in continuous process system, the carbonization cabin, the graphite in above-mentioned graphite guide hotting mask
Change cabin and the bottom surface of the transfer chamber are in same level.
Preferably, it is carbonized and is graphitized in continuous process system in above-mentioned graphite guide hotting mask, the carrying transfer device is
Graphite trolley.
Preferably, it is carbonized and is graphitized in continuous process system in above-mentioned graphite guide hotting mask, the propulsive mechanism is pneumatic
Mandril.
The invention also discloses a kind of carbonizations of graphite guide hotting mask and graphitization continuous producing method, using such as any of the above-described
The carbonization of graphite guide hotting mask and graphitization continuous process system, the method includes:
Pending part is placed on the carrying transfer device in carbonization cabin;
Sealing isolation mechanism closes the carbonization cabin, is carried out at carbonization to the pending part after vacuumize process
Reason;
After carbonization treatment, the graphitization cabin is vacuum-treated;
Sealing isolation mechanism is opened, and the carrying transfer device for carrying pending part is pushed by the propulsive mechanism
To in the graphitization cabin;
Sealing isolation mechanism closes the graphitization cabin, and graphitization processing is carried out to the pending part;
Go out cabin after graphitization processing.
It can be seen from the above technical scheme that the graphite guide hotting mask carbonization using the present invention and graphitization continuous production system
When system, pending part is placed on the carrying transfer device in carbonization cabin;Described in the closing of sealing isolation mechanism
Be carbonized cabin, and carbonization treatment is carried out to the pending part after vacuumize process;It is true to the graphitization cabin after carbonization treatment
It manages in vacancy;Sealing isolation mechanism is opened, and the carrying transfer device for carrying pending part is pushed by the propulsive mechanism
To in the graphitization cabin;Sealing isolation mechanism closes the graphitization cabin, is carried out at graphitization to the pending part
Reason;Go out cabin after graphitization processing.Since the graphite guide hotting mask in the present invention is carbonized and is graphitized continuous process system carbonization
Cabin is connected with graphitization cabin by transfer chamber, can directly be pushed into graphitization cabin after carbonization treatment under the action of propulsive mechanism
Middle carry out graphitization processing, compared with prior art, centre are handled without cooling, and the time is greatly saved, improves graphite guide
The production efficiency of hotting mask.In addition, due to that need not come out of the stove, converter, shove charge operation also avoids executing aforesaid operations process
The generation of middle web breakage phenomenon, ensure that the final product quality of graphite guide hotting mask.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
Obtain other attached drawings according to these attached drawings.
Fig. 1 is carbonized and is graphitized the structure of continuous process system by a kind of graphite guide hotting mask that the embodiment of the present invention provides
Schematic diagram;
Wherein, 100 be shell, 101 be the first fire door, 102 be the second fire door, 200 be carbonization cabin, 201 carbonization heating rooms,
202 it is insulating layer, 203 be heating room door, 300 be graphitization cabin, 301 be graphitization crucible, 302 be crucible cover, 303 is induction
Coil, 400 be sealing isolation mechanism, 401 be the first gate valve, 402 be the second gate valve, 403 be third gate valve, 500 be
Carrying transfer device, 600 are propulsive mechanism.
Specific implementation mode
For this purpose, core of the invention is to provide a kind of graphite guide hotting mask carbonization and graphitization continuous process system, to carry
The production efficiency of high graphite guide hotting mask.
In addition, embodiments illustrated below does not play any restriction effect to the invention described in the claims content.In addition,
The full content of composition represented by following example is not limited to must as the solution of the invention described in the claims
It needs.
Referring to Fig. 1, the graphite guide hotting mask carbonization disclosed in the embodiment of the present invention and graphitization continuous process system, packet
It includes:
Shell 100, the carbonization cabin 200 of carburizing reagent can be carried out, can carry out graphite by being disposed with inside shell 100
Change graphitization cabin 300 and the transfer chamber of reaction;
To the vacuum device in carbonization cabin 200 and graphitization 300 vacuumize process of cabin;
It is arranged and completely cuts off mechanism 400 in the sealing that transfer chamber is used to completely cut off sealing carbonization cabin 200 and is graphitized cabin 300;
Inside shell 100, and the carrying transfer device 500 of pending part can be carried;And
It is arranged in one end of shell 100, and carrying transfer device 500 can be pushed into graphitization cabin from carbonization cabin 200
300 propulsive mechanism 600.
When being carbonized using the graphite guide hotting mask of the present invention and be graphitized continuous process system, pending part is placed on and is located at
It is carbonized on the carrying transfer device 500 in cabin 200;Sealing isolation mechanism 400 closes carbonization cabin 200, and place is treated after vacuumize process
It manages part and carries out carbonization treatment;After carbonization treatment, graphitization cabin 300 is vacuum-treated;Sealing isolation mechanism 400 is opened, and is pushed away
The carrying transfer device 500 for carrying pending part is pushed into graphitization cabin 300 into mechanism 600;400 envelope of sealing isolation mechanism
Graphitization cabin 300 is closed, handling member is treated and carries out graphitization processing;Go out cabin after graphitization processing.
Since the graphite guide hotting mask in the present invention is carbonized and is graphitized continuous process system carbonization cabin 200 and graphitization cabin
300 are connected by transfer chamber, can be directly pushed under the action of propulsive mechanism 600 in graphitization cabin 300 after carbonization treatment
Graphitization processing is carried out, compared with prior art, centre is handled without cooling, and the time is greatly saved, improves graphite heat conducting
The production efficiency of film.
In addition, due to that need not come out of the stove, converter, shove charge operation saves the time for executing aforesaid operations, into one accordingly
The production efficiency for improving graphite guide hotting mask of step.
Simultaneously as need not come out of the stove, converter, shove charge operation also avoids coiled material during executing aforesaid operations
The generation of disrepair phenomenon ensure that the final product quality of graphite guide hotting mask.
It should be noted that the technological principle and prior art phase of the carbonization treatment in the cabin 200 that is carbonized in the embodiment of the present invention
Together, the technological principle of the graphitization processing in graphitization cabin 300 is same as the prior art, and core improvement is, by the cabin that is carbonized
200 are attached with graphitization cabin 300 by transfer chamber, and realize 200 He of cabin that is carbonized by the way that sealing isolation mechanism 400 is arranged
It is graphitized the independent sealed of cabin 300.The effect of vacuum device carries out vacuumizing work to carbonization cabin 200 and graphitization cabin 300
Industry.The effect of propulsive mechanism 600 is that the pending part after carbonization treatment is pushed into graphitization cabin 300
A kind of structure in carbonization cabin 200 is simply described in the embodiment of the present invention, which includes carbonization heating room
201, it heats the matched heating room door 203 in room 201 with carbonization and is arranged in the guarantor being carbonized between heating room 201 and shell 100
Warm layer 202, first fire door 101 of the heating room door 203 close to shell 100.When carburizing reagent, 101 He of the first fire door is opened successively
Room door 203 is heated, pending part is placed on carrying transfer device 500, sealing isolation mechanism 400 closing carbonization cabin 200 is taken out true
Empty mechanism carries out vacuumize process to carbonization cabin 200, and the cabin 200 that is finally carbonized treats handling member and carries out carbonization treatment,
A kind of structure in graphitization cabin 300 is simply described in the embodiment of the present invention, which includes graphitization
Crucible 301 and graphitization 301 matched crucible cover 302 of crucible and the induction coil being arranged on graphitization crucible 301
303, second fire door 102 of the crucible cover 302 close to shell 100.Vacuum device takes out graphitization cabin 300 after carbonization treatment
It is vacuum-treated, then sealing isolation mechanism 400 is opened, and propulsive mechanism 600 will carry transfer device 500 and be pushed into graphitization cabin
In 300, sealing isolation mechanism 400 closing graphitization cabin 300 carries out graphitization processing, after the completion of processing, opens crucible cover 302
With the second fire door 102, treated pending part is taken out.
There are many kinds of the structures that above-mentioned realization carbonization cabin 200 and graphitization cabin 300 seal, and is specifically situated between in the embodiment of the present invention
Continued one of which, specifically, sealing isolation mechanism 400 includes the first gate valve 401 and the second gate valve 402, first inserts
Plate valve 401 can close carbonization cabin 200 close to one end of transfer chamber, and it is close that the second gate valve 402 can close graphitization cabin 300
One end of transfer chamber.
In order to improve sealing reliability, sealing isolation mechanism 400 further includes that setting is inserted in the first gate valve 401 and second
Third gate valve 403 between plate valve 402.
Further, in order to enable carrying transfer device 500 smoothly can enter graphite from carbonization cabin 200 through transfer chamber
Change in cabin 300, the bottom surface in carbonization cabin 200, graphitization cabin 300 and transfer chamber is in same level.
The carrying transfer device 500 has the characteristics such as high temperature resistant, it is preferred that carrying transfer device 500 is graphite trolley.
In order to realize that the automatic business processing of whole system, propulsive mechanism 600 are Pneumatic top bar.
The invention also discloses a kind of carbonizations of graphite guide hotting mask and graphitization continuous producing method, using such as any of the above-described
The carbonization of graphite guide hotting mask and graphitization continuous process system, method includes:
Pending part is placed on the carrying transfer device 500 in carbonization cabin 200;
Sealing isolation mechanism 400 closes carbonization cabin 200, and treating handling member after vacuumize process carries out carbonization treatment;
After carbonization treatment, graphitization cabin 300 is vacuum-treated;
Sealing isolation mechanism 400 is opened, and the carrying transfer device 500 for carrying pending part is pushed by propulsive mechanism 600
It is graphitized in cabin 300;
Sealing isolation mechanism 400 closing graphitization cabin 300, treats handling member and carries out graphitization processing;
Go out cabin after graphitization processing.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest range caused.
Claims (9)
1. a kind of graphite guide hotting mask carbonization and graphitization continuous process system, which is characterized in that including:
Shell, the enclosure interior, which is disposed with, can carry out the carbonization cabin of carburizing reagent, can carry out graphitization reaction
It is graphitized cabin and transfer chamber;
To the vacuum device in the carbonization cabin and the graphitization cabin vacuumize process;
It is arranged to be used to completely cut off in the transfer chamber and seals the carbonization cabin and the sealing isolation mechanism for being graphitized cabin;
Positioned at the enclosure interior, and the carrying transfer device of pending part can be carried;And
It is arranged in one end of the shell, and the carrying transfer device can be pushed into the propulsion in graphitization cabin from carbonization cabin
Mechanism.
2. graphite guide hotting mask carbonization as described in claim 1 and graphitization continuous process system, which is characterized in that the carbonization
Cabin includes carbonization heating room, heats room and shell in the carbonization with the matched heating room door in carbonization heating room and setting
Between insulating layer, it is described heating room door close to the shell the first fire door.
3. graphite guide hotting mask carbonization as claimed in claim 2 and graphitization continuous process system, which is characterized in that the graphite
Change cabin to include graphitization crucible and the matched crucible cover of the graphitization crucible and be arranged on the graphitization crucible
Induction coil, second fire door of the crucible cover close to the shell.
4. graphite guide hotting mask carbonization as described in claim 1 and graphitization continuous process system, which is characterized in that the sealing
It includes the first gate valve and the second gate valve to completely cut off mechanism, and first gate valve can close the carbonization cabin close to the mistake
The one end in cabin is crossed, second gate valve can close the graphitization cabin close to one end of the transfer chamber.
5. graphite guide hotting mask carbonization as claimed in claim 4 and graphitization continuous process system, which is characterized in that the sealing
It further includes the third gate valve being arranged between first gate valve and second gate valve to completely cut off mechanism.
6. the carbonization of graphite guide hotting mask and graphitization continuous process system, feature as described in any one of claim 1 to 5 exist
In the bottom surface in the carbonization cabin, the graphitization cabin and the transfer chamber is in same level.
7. the carbonization of graphite guide hotting mask and graphitization continuous process system, feature as described in any one of claim 1 to 5 exist
In the carrying transfer device is graphite trolley.
8. the carbonization of graphite guide hotting mask and graphitization continuous process system, feature as described in any one of claim 1 to 5 exist
In the propulsive mechanism is Pneumatic top bar.
9. a kind of graphite guide hotting mask carbonization and graphitization continuous producing method, which is characterized in that in application such as claim 1 to 8
Any one of them graphite guide hotting mask is carbonized and graphitization continuous process system, the method includes:
Pending part is placed on the carrying transfer device in carbonization cabin;
Sealing isolation mechanism closes the carbonization cabin, and carbonization treatment is carried out to the pending part after vacuumize process;
After carbonization treatment, the graphitization cabin is vacuum-treated;
Sealing isolation mechanism is opened, and the carrying transfer device for carrying pending part is pushed into institute by the propulsive mechanism
It states in graphitization cabin;
Sealing isolation mechanism closes the graphitization cabin, and graphitization processing is carried out to the pending part;
Go out cabin after graphitization processing.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113774604A (en) * | 2021-09-17 | 2021-12-10 | 安徽弘昌新材料有限公司 | Preparation process of viscose-based carbon fiber composite graphite felt and prepared graphite felt |
CN114195133A (en) * | 2021-12-07 | 2022-03-18 | 东莞市鸿亿导热材料有限公司 | Graphene-containing graphite flake production process and heat dissipation graphite flake |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01272827A (en) * | 1988-04-21 | 1989-10-31 | Nikkiso Co Ltd | Method for carrying out continuous graphitization treatment and apparatus therefor |
US20140127124A1 (en) * | 2011-05-31 | 2014-05-08 | IHI (IHI Corporation) | Graphitization furnace and method for producing graphite |
CN104555990A (en) * | 2013-10-22 | 2015-04-29 | 凯尔凯德新材料科技泰州有限公司 | Continuous high-temperature furnace for carbonization and graphitization and application method |
CN105347833A (en) * | 2015-12-11 | 2016-02-24 | 湖南顶立科技有限公司 | Continuous carbonization and graphitization equipment |
CN105692603A (en) * | 2016-03-14 | 2016-06-22 | 苏州金禾新材料股份有限公司 | Heat conductive graphite film preparation method and graphite crucible |
CN206783321U (en) * | 2016-12-31 | 2017-12-22 | 南京新月材料科技有限公司 | A kind of superhigh temperature graphitizing furnace |
-
2018
- 2018-08-21 CN CN201810953128.8A patent/CN108751184A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01272827A (en) * | 1988-04-21 | 1989-10-31 | Nikkiso Co Ltd | Method for carrying out continuous graphitization treatment and apparatus therefor |
US20140127124A1 (en) * | 2011-05-31 | 2014-05-08 | IHI (IHI Corporation) | Graphitization furnace and method for producing graphite |
CN104555990A (en) * | 2013-10-22 | 2015-04-29 | 凯尔凯德新材料科技泰州有限公司 | Continuous high-temperature furnace for carbonization and graphitization and application method |
CN105347833A (en) * | 2015-12-11 | 2016-02-24 | 湖南顶立科技有限公司 | Continuous carbonization and graphitization equipment |
CN105692603A (en) * | 2016-03-14 | 2016-06-22 | 苏州金禾新材料股份有限公司 | Heat conductive graphite film preparation method and graphite crucible |
CN206783321U (en) * | 2016-12-31 | 2017-12-22 | 南京新月材料科技有限公司 | A kind of superhigh temperature graphitizing furnace |
Non-Patent Citations (3)
Title |
---|
姜洪舟 等: "无机非金属材料热工设备 第3版", 武汉理工大学出版社, pages: 527 - 528 * |
李东风,王浩静,朱星明,王心葵: "碳纤维石墨化设备的研究与进展", no. 02, pages 168 - 172 * |
陈文仲;李小坤: "连续式石墨化技术", no. 06, pages 822 - 825 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113774604A (en) * | 2021-09-17 | 2021-12-10 | 安徽弘昌新材料有限公司 | Preparation process of viscose-based carbon fiber composite graphite felt and prepared graphite felt |
CN114195133A (en) * | 2021-12-07 | 2022-03-18 | 东莞市鸿亿导热材料有限公司 | Graphene-containing graphite flake production process and heat dissipation graphite flake |
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