CN107321977A - A kind of rare earth permanent magnet vacuum sintering method and vacuum-sintering Equipment for Heating Processing - Google Patents
A kind of rare earth permanent magnet vacuum sintering method and vacuum-sintering Equipment for Heating Processing Download PDFInfo
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- CN107321977A CN107321977A CN201610275462.3A CN201610275462A CN107321977A CN 107321977 A CN107321977 A CN 107321977A CN 201610275462 A CN201610275462 A CN 201610275462A CN 107321977 A CN107321977 A CN 107321977A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/003—Apparatus, e.g. furnaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/02—Compacting only
- B22F3/04—Compacting only by applying fluid pressure, e.g. by cold isostatic pressing [CIP]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
Abstract
The present invention provides a kind of rare earth permanent magnet vacuum sintering method and vacuum-sintering Equipment for Heating Processing, equipment includes vacuum furnace body, vacuum heat-insulation push-pull valve, vacuum heat-insulation room, heater, vacuum gas cooling system, one end of vacuum heat-insulation push-pull valve is connected with vacuum furnace body, heat-insulated gear air valve is provided with two sides of vacuum heat-insulation room, vacuum gas cooling system is provided with heat exchanger and vacuum blower；The gas outlet of heat exchanger is connected with the air entry of vacuum blower, and air inlet is communicated by the adapter on vacuum furnace body one side with the side cooled gas path；The exhaust outlet of vacuum blower is communicated by the adapter on vacuum furnace body another side with the side cooled gas path.Vacuum sintering method includes：Vacuum heat-insulation push-pull valve is opened, blank is put into vacuum-sintering Equipment for Heating Processing, is heated after vacuumizing；Argon gas is filled with during cooling, the heat-insulated gear air valve of vacuum heat-insulation room both sides is opened, alternately starts two cooling blowers, be either alternatively or simultaneously opened and closed the heat-insulated gear air valve of both sides.
Description
Technical field
The present invention relates to a kind of rare earth permanent magnet vacuum sintering method and vacuum-sintering Equipment for Heating Processing, belong to rare earth permanent magnet manufacturing technology field.The vacuum-sintering Equipment for Heating Processing is in addition to for rare earth permanent-magnetic material sintering or timeliness, it may also be used for vacuum-sintering, heat treatment, soldering of other metal materials etc..
Background technology
Nd-Fe-B rare earth permanent magnetic material is the new rare-earth permanent magnetic material found nineteen eighty-three, more and more applied with the magnetic property that its is excellent, it is widely used in the Magnetic resonance imaging of medical treatment, computer hard disc driver, the vibrating motor of mobile phone, electroacoustic apparatus, motor of hybrid power automobile, wind-driven generator etc..
It is widely used in three-zone heating before, during and after neodymium iron boron vacuum-sintering is used along along uniform temperature zone length direction more with the vacuum drying oven of heat treatment in the arrangement of heater at home at present.Using the vacuum heat treatment equipment of this heater arrangement; when heating under vacuum; in-furnace temperature uniformity is fine; but when process gas or protective atmosphere are filled with the need for according to Technology for Heating Processing into vacuum drying oven; because gas can produce convection current; the gas of heat is flowed up, and can raise the temperature of stove internal upper part, the temperature homogeneity in uniform temperature zone is deteriorated.
On the other hand, for using for gas-cooled vacuum heat treatment equipment, cooling uniformity is the key for determining heat treated article quality.It is general to use airduct array gas cooling mode in existing ventilation type vacuum heat treatment equipment, it is difficult to ensure that the cooling uniformity of workpiece in technical process, it is difficult to meet the process requirements of high-quality heat treated article.
The content of the invention
In view of the above problems, the present invention is by the heater point area of upper, middle and lower three arrangement, and the two ends of uniform temperature zone are respectively arranged with independent heater, overcome the shortcoming that temperature homogeneity declines after existing equipment is loaded.In addition, by setting multiple heat-insulated gear air valves respectively on two side walls of vacuum heat-insulation room, multiple heat-insulated gear air valve alternation switches allow gas to produce uniform vortex cyclone in uniform temperature zone, realize the uniform cooling to workpiece, overcome the shortcoming of existing equipment.
The present invention provides a kind of vacuum-sintering Equipment for Heating Processing, mainly includes vacuum fire door, vacuum furnace body, vacuum heat-insulation push-pull valve, vacuum heat-insulation room, vacuum heat-insulation door, heater, vacuum gas cooling system and vacuum pump set, it is characterised in that：Observation window is provided with described vacuum fire door, vacuum furnace body is horizontal Double water-cooled wall construction, and vacuum furnace body is provided at both ends with forward flange and rear flange；Vacuum heat-insulation push-pull valve is provided with valve body, vacuum sealing valve plate, pneumatic valve opening hold-down mechanism；Thermal insulation layer is carried on vacuum sealing valve plate；Vacuum fire door is in contact with the forward flange of vacuum furnace body；One end of the valve body of vacuum heat-insulation push-pull valve is connected by flange with the rear flange of vacuum furnace body；Vacuum fire door, vacuum furnace body and vacuum heat-insulation push-pull valve constitute closed vacuum tank；The thermal insulation layer of vacuum heat-insulation room, vacuum heat-insulation door and vacuum sealing valve plate is arranged in described vacuum tank；Vacuum heat-insulation room is horizontal box structure, and the front end of vacuum heat-insulation room is contacted with vacuum heat-insulation door, and rear end is contacted with the thermal insulation layer of vacuum sealing valve plate；Vacuum heat-insulation room is provided with framework and heat-insulation layer；Heat-insulation layer is arranged on the inner side of framework；The heat-insulated gear air valve of more than 1 is respectively arranged with two sides of vacuum heat-insulation room, cooled gas path is respectively arranged with two sides of framework, described heat-insulated gear air valve is enclosed in cooled gas path；In a preferred embodiment, described heat-insulated gear air valve is respectively arranged with 2 on each side of vacuum heat-insulation room；Described heater is arranged on the inwall of vacuum heat-insulation room；Described vacuum gas cooling system is provided with heat exchanger and vacuum blower；The gas outlet of heat exchanger is connected with the air entry of vacuum blower, and the air inlet of heat exchanger is connected with the adapter on vacuum furnace body one side, and adapter is communicated through vacuum furnace body with the cooled gas path of vacuum heat-insulation room the same side；The exhaust outlet of vacuum blower is connected with the adapter on vacuum furnace body another side, and adapter is communicated through vacuum furnace body with the cooled gas path of vacuum heat-insulation room opposite side；It is additionally provided with described vacuum furnace body and vacuumizes interface, vacuum pump set is connected with vacuumizing interface.
Described vacuum gas cooling system is provided with a heat exchanger and two vacuum blowers, the air entry of two vacuum blowers is connected with the air inlet of heat exchanger and gas outlet respectively, and the exhaust outlet of two vacuum blowers is each passed through vacuum furnace body and communicated with the cooled gas path of vacuum heat-insulation room both sides.
Described vacuum gas cooling system is additionally provided with another vacuum blower between the adapter on the air inlet and vacuum furnace body one side of heat exchanger, the air entry of another vacuum blower is connected with the air inlet of heat exchanger, exhaust outlet is connected with the adapter on vacuum furnace body one side, and adapter is communicated through vacuum furnace body with the cooled gas path of vacuum heat-insulation room the same side.
The gear ring for the hinge of vacuum stove door switch and for vacuum drying oven door locking is additionally provided with described vacuum fire door, sealing ring is additionally provided between the forward flange of described vacuum fire door and vacuum furnace body；Vacuum heat-insulation door is connected with vacuum fire door, is switched together with vacuum fire door.
The gear ring for the hinge of vacuum stove door switch and for vacuum drying oven door locking is additionally provided with described vacuum fire door, the cylinder of driven gear ring rotation is provided between gear ring and vacuum furnace body, the cylinder for driving vacuum fire door to rotate is also equipped between vacuum fire door and vacuum furnace body, sealing ring is additionally provided between the forward flange of described vacuum fire door and vacuum furnace body；Vacuum heat-insulation door is connected with vacuum fire door, is switched together with vacuum fire door.
Temperature thermocouple is additionally provided with described vacuum furnace body and heater power source introduces electrode, described temperature thermocouple there are more than 3；Described heater power source introduces in electrode and is connected with cooling water.
Cooling water is connected with described vacuum sealing valve plate, sealing ring is provided between vacuum sealing valve plate and valve body, vacuum sealing valve plate is connected through the hinge with pneumatic valve opening hold-down mechanism, and pneumatic valve opening hold-down mechanism drives vacuum sealing valve plate to move up and down and compress sealing ring.
Described vacuum heat-insulation room is symmetrical octagon low boy cabinet, and upper and lower and two sides the length of side is more than the length of side of 4 hypotenuses；Gusset is welded with the outside of the framework of vacuum heat-insulation room, the height of gusset is less than 200mm.
Molybdenum sheet is provided with the inside of described heat-insulation layer, framework, heat-insulation layer and molybdenum sheet are linked together by molybdenum rod；The material of described heat-insulation layer be ceramic fibre and carbon fiber more than one.
The material of described heat-insulation layer is hard carbon felt.
Described heater is made up of preceding heater, post-heater, upper heater, lower heater and 2 side heaters, preceding heater and post-heater are all loop configuration, the front-end and back-end of vacuum heat-insulation room are separately positioned on, upper heater, lower heater and 2 side heaters are separately positioned on above vacuum heat-insulation room, following and two sides；Described heater material is molybdenum or graphite.
Inner side, which is provided with below siege, siege, below described vacuum heat-insulation room is connected with column, and column is supported on the inwall of vacuum furnace body through heat-insulation layer；Lower heater is between the inwall on the downside of siege and vacuum heat-insulation room；The top of siege is uniform temperature zone, and uniform temperature zone is located in the space that upper heater, lower heater and 2 side heaters are constituted；The workpiece for being sintered or being heat-treated is placed on siege, is placed in uniform temperature zone；The width of described uniform temperature zone is in the range of 400-1200mm, highly in the range of 400-1200mm, and length is in the range of 800-3500mm；The maximum temperature of described uniform temperature zone is in the range of 500-1400 DEG C.
The flange of the other end of described valve body is connected with glove box；Described glove box is provided with Glove box body, stack pallet, transmission device, elevating mechanism, discharge door；Observation window and gloves are provided with Glove box body.
The flange of the other end of described valve body is connected with another plate valve without thermal insulation layer, and the other end of plate valve is connected with a movable case, and stack pallet, transmission device, elevating mechanism are provided with movable case；Movable case and plate valve are moved on guide rail together.
Described vacuum pump set includes oily diffusion vacuum pump, Roots vaccum pump and oil-sealed rotary pump；Final vacuum is higher than 5 × 10-1Pa。
A kind of rare earth permanent magnet vacuum sintering method, it is characterised in that：Described rare earth permanent magnet vacuum sintering method is first turned on the vacuum heat-insulation push-pull valve of vacuum-sintering Equipment for Heating Processing; the pressing under magnetic field blank of rare earth permanent magnet is sent on the siege of vacuum heat-insulation room under protective atmosphere, vacuum 5 × 10 is evacuated to after closing vacuum heat-insulation push-pull valve-1More than Pa, continue to vacuumize and begin to warm up, heat time 1-30 hour, maximum heating temperature is in the range of 450-1100 DEG C, stop heating afterwards, close vacuum-pumping valve, be filled with argon gas, open the heat-insulated gear air valve of vacuum heat-insulation room both sides respectively after gas pressure is more than 4000KPa and alternately start two cooling blowers, the heat-insulated gear air valve of both sides is either alternatively or simultaneously opened or closed afterwards；Stop cooling blower afterwards.
Before the vacuum heat-insulation push-pull valve of rare earth permanent magnet vacuum-sintering Equipment for Heating Processing is opened; first the blank of pressing under magnetic field blank is packed under nitrogen protection; afterwards isostatic cool pressing is carried out in feeding isostatic pressing machine; isostatic cool pressing pressure is in 150-300MPa; after isostatic cool pressing; send into the glove box being connected with the flange of the other end of vacuum heat-insulation push-pull valve; nitrogen protection is gone down to exchange and filled in glove box; blank is loaded into material to close; open vacuum heat-insulation push-pull valve again afterwards, blank is sent on the siege of vacuum heat-insulation room under protective atmosphere.
In another embodiment; before the vacuum heat-insulation push-pull valve of rare earth permanent magnet vacuum-sintering Equipment for Heating Processing is opened; the blank of pressing under magnetic field is first sent into a movable case being connected with the plate valve without thermal insulation layer under nitrogen protection; mobile movable case is docked with the vacuum heat-insulation push-pull valve of rare earth permanent magnet vacuum-sintering Equipment for Heating Processing, is opened vacuum heat-insulation push-pull valve again afterwards and is sent to blank on the siege of vacuum heat-insulation room.
Described heat time 1-30 hour, maximum heating temperature is in the range of 450-1100 DEG C, first by blank heating is to 400-600 DEG C and is incubated in 1-9 hours, then blank is heated to 800-900 DEG C from 400-600 DEG C in 1-9 hours and be incubated, then blank is heated to 1010-1090 DEG C from 800-900 DEG C in 1-5 hours and be incubated, then heating is stopped, the heat-insulated gear air valve for starting a cooling blower after argon gas and alternately opening vacuum heat-insulation room both sides is filled with, per two cooling blower alternation switches of 3-15 minutes once afterwards.
Described heat time 1-30 hour, maximum heating temperature is then interior at 1-20 hour that blank is heated into 1010-1090 DEG C from 300-600 DEG C and is incubated by blank heating is to 300-600 DEG C and is incubated first in 1-9 hours in the range of 450-1100 DEG C；Then stop heating and cool the temperature to less than 800 DEG C, afterwards again by blank heating is to 800-950 DEG C and is incubated；Then heating is stopped, it is filled with the heat-insulated gear air valve for starting a cooling blower after argon gas and alternately opening vacuum heat-insulation room both sides, per two cooling blower alternation switches of 3-15 minutes once afterwards, stop cooling down with ShiShimonoseki cooling blower until temperature is cooled into 400 DEG C, then continue to heat after vacuumizing, by blank heating is to 460-640 DEG C and is incubated in 1-9 hours, stop heating again afterwards, it is filled with the heat-insulated gear air valve for starting a cooling blower after argon gas and alternately opening vacuum heat-insulation room both sides, per two cooling blower alternation switches of 3-15 minutes once afterwards, stop cooling down with ShiShimonoseki cooling blower until temperature is cooled into 100 DEG C.
Beneficial effects of the present invention：
1. the heater point area of upper, middle and lower three arrangement, the two ends of uniform temperature zone are respectively arranged with independent heater, make vacuum heat treatment furnace heating-up temperature in the case of loading uniform, overcome existing equipment load after, the shortcoming that especially temperature homogeneity declines after inflation.
2nd, by setting multiple heat-insulated gear air valves respectively on two side walls of vacuum heat-insulation room, multiple heat-insulated gear air valve alternation switches allow gas to produce uniform vortex cyclone in uniform temperature zone, realize the uniform cooling to workpiece, overcome the shortcoming of existing equipment；In heating, heat-insulated gear air valve is closed, homogeneous heating, the few efficiency high of leakage heat, energy-conservation；Heat-insulated gear air valve alternation switch reduces windage during cooling, improves cooling effectiveness and cooling velocity.
3rd, two fans realize the positive and negative flowing of air-flow, solve the cooling uniformity in width of the workpiece direction.
4th, the design of movable case; on the one hand it can make blank under nitrogen protection in vacuum drying oven; avoid oxidation; on the other hand; movable case can neatly be docked by vacuum gate valve between vacuum drying oven and press; so as to realize the non-oxidation connection from die mould to sintering, there is significant effect to improving magnet performance.
Brief description of the drawings
Fig. 1 is a kind of schematic front view of embodiment of vacuum heat agglomerating plant in the present invention.
Fig. 2 is a kind of schematic top plan view of embodiment of vacuum heat agglomerating plant in the present invention.
Fig. 3 connects the left view schematic diagram of the vacuum heat agglomerating plant of glove box for the vacuum heat-insulation push-pull valve other end in the present invention.
The plate valve and the left view schematic diagram of movable case without thermal insulation layer that Fig. 4 is connected for the vacuum heat-insulation push-pull valve other end in the another embodiment of vacuum heat agglomerating plant of the present invention.
Embodiment
The present invention will be further described with reference to the accompanying drawings and examples.
As shown in Figure 1-Figure 3, the present invention provides a kind of vacuum-sintering Equipment for Heating Processing, mainly includes vacuum fire door 1, vacuum furnace body 2, vacuum heat-insulation push-pull valve 32, vacuum heat-insulation room 3, vacuum heat-insulation door 16, heater, vacuum gas cooling system 21 and vacuum pump set 7；Observation window 15 is provided with vacuum fire door 1, vacuum furnace body 2 is horizontal Double water-cooled wall construction, and vacuum furnace body 2 is provided at both ends with forward flange 19 and rear flange 35；Vacuum heat-insulation push-pull valve 32 is provided with valve body 33, vacuum sealing valve plate 28, pneumatic valve opening hold-down mechanism 34；Thermal insulation layer 27 is carried on vacuum sealing valve plate 28；Vacuum fire door 1 is in contact with the forward flange 19 of vacuum furnace body 2；One end of the valve body 33 of vacuum heat-insulation push-pull valve 32 is connected by flange 36 with the rear flange 35 of vacuum furnace body；Vacuum fire door 1, vacuum furnace body 2 and vacuum heat-insulation push-pull valve 32 constitute closed vacuum tank；The thermal insulation layer 27 of vacuum heat-insulation room 3, vacuum heat-insulation door 16 and vacuum sealing valve plate is arranged in described vacuum tank；Vacuum heat-insulation room 3 is horizontal box structure, and the front end of vacuum heat-insulation room 3 is contacted with vacuum heat-insulation door 16, and rear end is contacted with the thermal insulation layer 27 of vacuum sealing valve plate；Vacuum heat-insulation room 3 is provided with framework 4 and heat-insulation layer 5；Heat-insulation layer 5 is arranged on the inner side of framework 4；The heat-insulated gear air valve 11 of more than 1 is respectively arranged with two sides of vacuum heat-insulation room 3, cooled gas path 29,6 is respectively arranged with two sides of framework 4, heat-insulated gear air valve 11 is enclosed in cooled gas path 29,6；In a preferred embodiment, heat-insulated gear air valve 11 is respectively arranged with 2 on each side of vacuum heat-insulation room 3.Heater is arranged on the inwall of vacuum heat-insulation room 3；Vacuum gas cooling system 21 is provided with heat exchanger 22 and vacuum blower 23；The gas outlet of heat exchanger 22 is connected with the air entry of vacuum blower 23, and the air inlet of heat exchanger 22 is connected with the adapter 31 on the one side of vacuum furnace body 2, and adapter 31 is communicated through vacuum furnace body 2 with the cooled gas path 29 of the same side of vacuum heat-insulation room 3；The exhaust outlet of vacuum blower 23 is connected with the adapter 52 on the another side of vacuum furnace body 2, and adapter 52 is communicated through vacuum furnace body 2 with the cooled gas path 6 of the opposite side of vacuum heat-insulation room 3；It is additionally provided with vacuum furnace body 2 and vacuumizes interface, vacuum pump set 7 is connected with vacuumizing interface.
The present invention it is a kind of preferred embodiment in, described vacuum gas cooling system 21 is provided with a heat exchanger 22 and two vacuum blowers 23 and 30, the air entry of two vacuum blowers 23 and 30 is connected with the air inlet of heat exchanger 22 and gas outlet respectively, and the exhaust outlet of two vacuum blowers 23 and 30 is each passed through vacuum furnace body 2 and communicated with the cooled gas path 29 and 6 of the both sides of vacuum heat-insulation room 3.
Further, vacuum gas cooling system 21 is additionally provided with another vacuum blower 30 between the adapter 31 on the air inlet and the one side of vacuum furnace body 2 of heat exchanger 22, exhaust outlet is connected with the adapter 31 on the one side of vacuum furnace body 2, and adapter is communicated through vacuum furnace body 2 with the cooled gas path 29 of the same side of vacuum heat-insulation room 3.
The gear ring 18 for the hinge 17 of the switch of vacuum fire door 1 and for vacuum drying oven door locking is additionally provided with vacuum fire door 1, sealing ring 20 is additionally provided between vacuum fire door 1 and the forward flange of vacuum furnace body 19；Vacuum heat-insulation door 16 is connected with vacuum fire door 1, is switched together with vacuum fire door 1.The cylinder of the rotation of driven gear ring 18 is provided between gear ring 18 and vacuum furnace body 2, the cylinder for driving vacuum fire door 1 to rotate is also equipped between vacuum fire door 1 and vacuum furnace body 2.Temperature thermocouple 9 is additionally provided with vacuum furnace body 2 and heater power source introduces electrode 8, described temperature thermocouple 9 there are more than 3；Heater power source introduces in electrode 8 and is connected with cooling water.Cooling water is connected with vacuum sealing valve plate 28, sealing ring 37 is provided between vacuum sealing valve plate 28 and valve body 33, vacuum sealing valve plate 28 is connected with pneumatic valve opening hold-down mechanism 34 by hinge 38, and pneumatic valve opening hold-down mechanism 34 drives vacuum sealing valve plate 28 to move up and down and compress sealing ring 37.Vacuum heat-insulation room 3 is symmetrical octagon low boy cabinet, and upper and lower and two sides the length of side is more than the length of side of 4 hypotenuses；The outside of framework 4 of vacuum heat-insulation room 3 is welded with gusset, and the height of gusset is less than 200mm.The inner side of heat-insulation layer 5 is provided with molybdenum sheet, and framework 4, heat-insulation layer 5 and molybdenum sheet are linked together by molybdenum rod.
Heater is made up of preceding heater 24, post-heater 26, upper heater 10, lower heater 14 and 2 side heaters 25, preceding heater 24 and post-heater 26 are all loop configuration, the front-end and back-end of vacuum heat-insulation room 3 are separately positioned on, upper heater 10, lower heater 14 and 2 side heaters 25 are separately positioned on above vacuum heat-insulation room 3, following and two sides；Described heater material is molybdenum or graphite.
Inner side, which is provided with below siege 12, siege 12, below vacuum heat-insulation room 3 is connected with column 13, and column 13 is supported on the inwall of vacuum furnace body 2 through heat-insulation layer 5；The top of siege 12 is uniform temperature zone, and uniform temperature zone is located in the space that upper heater 10, lower heater 14 and 2 side heaters 25 are constituted；The workpiece for being sintered or being heat-treated is placed on siege 12, is placed in uniform temperature zone；The width of described uniform temperature zone is in the range of 400-1200mm, highly in the range of 400-1200mm, and length is in the range of 800-3500mm；The maximum temperature of described uniform temperature zone is in the range of 500-1400 DEG C.
In one embodiment of the invention, the flange 39 of the other end of valve body 33 is connected with glove box 41；Described glove box 41 is provided with Glove box body 40, stack pallet 43, transmission device 44, elevating mechanism 45, discharge door 42；Observation window and gloves are provided with Glove box body 40.
In another embodiment of the invention, the flange 39 of the other end of valve body 33 is connected with another plate valve 46 without thermal insulation layer, the other end of plate valve 46 is connected with a movable case 47, and stack pallet 48, transmission device 49, elevating mechanism 50 are provided with movable case 47；Movable case 47 and plate valve 46 are moved on guide rail 51 together.
Embodiment 1
Permanent-magnet rare-earth NdFeB alloy is prepared first, and alloy is broken and air-flow is milled into alloy powder by hydrogen, shaping is carried out to alloy powder using press rare earth permanent magnet blank is made, then rare earth permanent magnet blank is sent in vacuum heat treatment furnace of the present invention, carries out following vacuum-sintering process：
It is evacuated to vacuum 5 × 10-1Begun to warm up during more than Pa, first with 1 hour by blank heating to 440 DEG C, insulation 2 hours, then with 3 hours by blank heating to 850 DEG C, insulation 2 hours, then with 2.5 hours by blank heating to 1070 DEG C, insulation 2.5 hours, then heating is stopped, argon gas is filled with, when furnace pressure is more than 4000Pa, starts a vacuum blower and alternately opens the heat-insulated gear air valve of vacuum heat-insulation room both sides, 5 minutes afterwards two vacuum blower alternation switches once, stop cooling down until temperature is cooled into 100 DEG C with ShiShimonoseki vacuum blower.
After the completion of sintering, sintering briquette is taken out from vacuum heat treatment furnace, common vacuum heat treatment furnace is put into（The areas of Zhong Hou tri- before heater, wind pipe type is air-cooled）Middle 900 DEG C of progress insulation 2 hours and 500 DEG C insulation vacuum aging processing in 3 hours, carries out the air-cooled step of applying argon gas after terminating after 900 DEG C of insulations terminate with 500 DEG C of insulations, Nd-Fe-B rare earth permanent magnetic material P1 is made respectively.
Embodiment 2
Permanent-magnet rare-earth NdFeB alloy is prepared first, and alloy is broken and air-flow is milled into alloy powder by hydrogen, shaping is carried out to alloy powder using press rare earth permanent magnet blank is made, then rare earth permanent magnet blank is sent in vacuum heat treatment furnace of the present invention, the following vacuum-sintering of progress and heat treatment step：
It is evacuated to vacuum 5 × 10-1Begun to warm up during more than Pa, first with 1 hour by blank heating to 440 DEG C, insulation 2 hours, then with 2.5 hours by blank heating to 1070 DEG C, insulation 5 hours, then stop heating and cool the temperature to less than 800 DEG C, afterwards again by blank heating to 900 DEG C, insulation 2 hours, then heating is stopped, it is filled with argon gas, when furnace pressure is more than 4000Pa, start a vacuum blower and alternately open the heat-insulated gear air valve of vacuum heat-insulation room both sides, 5 minutes afterwards two vacuum blower alternation switches are once, vacuum blower is closed when temperature is cooled into 300 DEG C and stops cooling, then continue to heat after vacuumizing, by blank heating to 500 DEG C, insulation 3 hours, stop heating again afterwards, it is filled with the heat-insulated gear air valve for starting a vacuum blower after argon gas and alternately opening vacuum heat-insulation room both sides, 5 minutes afterwards two vacuum blower alternation switches are once, stop cooling down with ShiShimonoseki vacuum blower until temperature is cooled into 100 DEG C, Nd-Fe-B rare earth permanent magnetic material P2 is made.
Embodiment 3
Prepare permanent-magnet rare-earth NdFeB alloy first, and alloy is broken and air-flow is milled into alloy powder by hydrogen, and carrying out shaping to alloy powder using press is made rare earth permanent magnet blank, is then sent to rare earth permanent magnet blank and is put into common vacuum sintering furnace（The areas of Zhong Hou tri- before heater, wind pipe type is air-cooled）In, carry out following vacuum-sintering process：
It is evacuated to vacuum 5 × 10-1Begun to warm up during more than Pa, first with 1 hour by blank heating to 440 DEG C, be incubated 2 hours, then with 2.5 hours by blank heating to 1070 DEG C, be incubated 5 hours, it is air-cooled to be filled with argon gas, stop cooling down with ShiShimonoseki vacuum blower until temperature is cooled into 100 DEG C.
Then sintering briquette is taken out to be put into the vacuum heat treatment furnace of the present invention and carries out vacuum aging processing：By blank heating to 900 DEG C, insulation 2 hours, then heating is stopped, it is filled with argon gas, when furnace pressure is more than 4000Pa, start a vacuum blower and alternately open the heat-insulated gear air valve of vacuum heat-insulation room both sides, 5 minutes afterwards two vacuum blower alternation switches are once, vacuum blower is closed when temperature is cooled into 300 DEG C and stops cooling, then continue to heat after vacuumizing, by blank heating to 500 DEG C, insulation 3 hours, stop heating again afterwards, it is filled with the heat-insulated gear air valve for starting a vacuum blower after argon gas and alternately opening vacuum heat-insulation room both sides, 5 minutes afterwards two vacuum blower alternation switches are once, stop cooling down with ShiShimonoseki vacuum blower until temperature is cooled into 100 DEG C, Nd-Fe-B rare earth permanent magnetic material P3 is made.
Comparative example：
Prepare permanent-magnet rare-earth NdFeB alloy first, and alloy is broken and air-flow is milled into alloy powder by hydrogen, and carrying out shaping to alloy powder using press is made rare earth permanent magnet blank, is then sent to rare earth permanent magnet blank and is put into common vacuum sintering furnace（The areas of Zhong Hou tri- before heater, wind pipe type is air-cooled）In, carry out following vacuum-sintering process：
It is evacuated to vacuum 5 × 10-1Begun to warm up during more than Pa, first with 1 hour by blank heating to 440 DEG C, insulation 2 hours, then with 2.5 hours by blank heating to 1070 DEG C, be incubated 5 hours, then stop heating and cool the temperature to less than 800 DEG C, afterwards again by blank heating to 900 DEG C, 2 hours are incubated, then stops heating, it is filled with argon gas air-cooled, stops cooling down with ShiShimonoseki vacuum blower until temperature is cooled into 100 DEG C.
Then by sintering briquette take out be put into common vacuum heat treatment furnace carry out be heated to 500 DEG C be incubated 3 hours, then applying argon gas it is air-cooled vacuum aging processing, Nd-Fe-B rare earth permanent magnetic material C1 is made.
After testing, under the premise of alloying component identical, coercivity 940Oe and 560Oe higher than C1 respectively are grasped in P2, P3, maximum magnetic energy product 2MGOe and 0.8MGOe higher than C1 respectively, coercivity 300Oe higher than C1 is grasped in P1, maximum magnetic energy product 1.2MGOe higher than C1, and the P2 of completion vacuum-sintering and vacuum aging processing consistency of performance will be significantly better than C1, P1 and P3 in vacuum heat treatment equipment of the present invention.
Claims (19)
1. a kind of vacuum-sintering Equipment for Heating Processing, mainly includes vacuum fire door, vacuum furnace body, vacuum heat-insulation push-pull valve, vacuum heat-insulation room, vacuum heat-insulation door, heater, vacuum gas cooling system and vacuum pump set, it is characterised in that：Observation window is provided with described vacuum fire door, vacuum furnace body is horizontal Double water-cooled wall construction, and vacuum furnace body is provided at both ends with forward flange and rear flange；Vacuum heat-insulation push-pull valve is provided with valve body, vacuum sealing valve plate, pneumatic valve opening hold-down mechanism；Thermal insulation layer is carried on vacuum sealing valve plate；Vacuum fire door is in contact with the forward flange of vacuum furnace body；One end of the valve body of vacuum heat-insulation push-pull valve is connected by flange with the rear flange of vacuum furnace body；Vacuum fire door, vacuum furnace body and vacuum heat-insulation push-pull valve constitute closed vacuum tank；The thermal insulation layer of vacuum heat-insulation room, vacuum heat-insulation door and vacuum sealing valve plate is arranged in described vacuum tank；Vacuum heat-insulation room is horizontal box structure, and the front end of vacuum heat-insulation room is contacted with vacuum heat-insulation door, and rear end is contacted with the thermal insulation layer of vacuum sealing valve plate；Vacuum heat-insulation room is provided with framework and heat-insulation layer；Heat-insulation layer is arranged on the inner side of framework；The heat-insulated gear air valve of more than 1 is respectively arranged with two sides of vacuum heat-insulation room, cooled gas path is respectively arranged with two sides of framework, described heat-insulated gear air valve is enclosed in cooled gas path；Described heater is arranged on the inwall of vacuum heat-insulation room；Described vacuum gas cooling system is provided with heat exchanger and vacuum blower；The gas outlet of heat exchanger is connected with the air entry of vacuum blower, and the air inlet of heat exchanger is connected with the adapter on vacuum furnace body one side, and adapter is communicated through vacuum furnace body with the cooled gas path of vacuum heat-insulation room the same side；The exhaust outlet of vacuum blower is connected with the adapter on vacuum furnace body another side, and adapter is communicated through vacuum furnace body with the cooled gas path of vacuum heat-insulation room opposite side；It is additionally provided with described vacuum furnace body and vacuumizes interface, vacuum pump set is connected with vacuumizing interface.
2. a kind of vacuum-sintering Equipment for Heating Processing according to claim 1, it is characterised in that：Described vacuum gas cooling system is provided with a heat exchanger and two vacuum blowers, the air entry of two vacuum blowers is connected with the air inlet of heat exchanger and gas outlet respectively, and the exhaust outlet of two vacuum blowers is each passed through vacuum furnace body and communicated with the cooled gas path of vacuum heat-insulation room both sides.
3. a kind of vacuum-sintering Equipment for Heating Processing according to claim 1, it is characterised in that：Described heat-insulated gear air valve is respectively arranged with 2 on each side of vacuum heat-insulation room.
4. a kind of vacuum-sintering Equipment for Heating Processing according to claim 1, it is characterised in that：Described vacuum gas cooling system is additionally provided with another vacuum blower between the adapter on the air inlet and vacuum furnace body one side of heat exchanger, the air entry of another vacuum blower is connected with the air inlet of heat exchanger, exhaust outlet is connected with the adapter on vacuum furnace body one side, and adapter is communicated through vacuum furnace body with the cooled gas path of vacuum heat-insulation room the same side.
5. a kind of vacuum-sintering Equipment for Heating Processing according to claim 1, it is characterised in that：The gear ring for the hinge of vacuum stove door switch and for vacuum drying oven door locking is additionally provided with described vacuum fire door, sealing ring is additionally provided between the forward flange of described vacuum fire door and vacuum furnace body；Vacuum heat-insulation door is connected with vacuum fire door, is switched together with vacuum fire door.
6. a kind of vacuum-sintering Equipment for Heating Processing according to claim 1, it is characterised in that：Temperature thermocouple is additionally provided with described vacuum furnace body and heater power source introduces electrode, described temperature thermocouple there are more than 3；Described heater power source introduces in electrode and is connected with cooling water.
7. a kind of vacuum-sintering Equipment for Heating Processing according to claim 1, it is characterised in that：Cooling water is connected with described vacuum sealing valve plate, sealing ring is provided between vacuum sealing valve plate and valve body, vacuum sealing valve plate is connected through the hinge with pneumatic valve opening hold-down mechanism, and pneumatic valve opening hold-down mechanism drives vacuum sealing valve plate to move up and down and compress sealing ring.
8. a kind of vacuum-sintering Equipment for Heating Processing according to claim 1, it is characterised in that：Described vacuum heat-insulation room is symmetrical octagon low boy cabinet, and upper and lower and two sides the length of side is more than the length of side of 4 hypotenuses；Gusset is welded with the outside of the framework of vacuum heat-insulation room, the height of gusset is less than 200mm.
9. a kind of vacuum-sintering Equipment for Heating Processing according to claim 1, it is characterised in that：Molybdenum sheet is provided with the inside of described heat-insulation layer, framework, heat-insulation layer and molybdenum sheet are linked together by molybdenum rod；The material of described heat-insulation layer be ceramic fibre and carbon fiber more than one.
10. a kind of vacuum-sintering Equipment for Heating Processing according to claim 1, it is characterised in that：The material of described heat-insulation layer is hard carbon felt.
11. a kind of vacuum-sintering Equipment for Heating Processing according to claim 1, it is characterised in that：Described heater is made up of preceding heater, post-heater, upper heater, lower heater and 2 side heaters, preceding heater and post-heater are all loop configuration, the front-end and back-end of vacuum heat-insulation room are separately positioned on, upper heater, lower heater and 2 side heaters are separately positioned on the upside, downside and two sides of vacuum heat-insulation room；Described heater material is molybdenum or graphite.
12. a kind of vacuum-sintering Equipment for Heating Processing according to claim 1, it is characterised in that：Inner side, which is provided with below siege, siege, below described vacuum heat-insulation room is connected with column；The top of siege is uniform temperature zone, and uniform temperature zone is located in the space that upper heater, lower heater and 2 side heaters are constituted；The workpiece for being sintered or being heat-treated is placed on siege, is placed in uniform temperature zone；The width of described uniform temperature zone is in the range of 400-1200mm, highly in the range of 400-1200mm, and length is in the range of 800-3500mm；The maximum temperature of described uniform temperature zone is in the range of 500-1400 DEG C.
13. a kind of vacuum-sintering Equipment for Heating Processing according to claim 1, it is characterised in that：The flange of the other end of described valve body is connected with glove box；Described glove box is provided with Glove box body, stack pallet, transmission device, elevating mechanism, discharge door.
14. a kind of vacuum-sintering Equipment for Heating Processing according to claim 1, it is characterised in that：The flange of the other end of described valve body is connected with another plate valve without thermal insulation layer, and the other end of plate valve is connected with a movable case, and stack pallet, transmission device, elevating mechanism are provided with movable case；Movable case and plate valve are moved on guide rail together.
15. a kind of rare earth permanent magnet vacuum sintering method, comprises the following steps：
Heating process：The vacuum heat-insulation push-pull valve of vacuum-sintering Equipment for Heating Processing is opened, the pressing under magnetic field blank of rare earth permanent magnet is sent on the siege of vacuum heat-insulation room under protective atmosphere, vacuum 5 × 10 is evacuated to after closing vacuum heat-insulation push-pull valve-1More than Pa, continues to vacuumize and begins to warm up, heat time 1-30 hour, and then maximum heating temperature stops heating in the range of 450-1100 DEG C；
Refrigerating work procedure：Argon gas is filled with, when gas pressure is more than 4000Pa, the heat-insulated gear air valve of vacuum heat-insulation room both sides is opened respectively, alternately starts two cooling blowers, the heat-insulated gear air valve of both sides is then either alternatively or simultaneously opened and closed.
16. a kind of rare earth permanent magnet vacuum sintering method according to claim 15, it is characterised in that：Before the vacuum heat-insulation push-pull valve of vacuum-sintering Equipment for Heating Processing is opened; first the blank of pressing under magnetic field blank is packed under nitrogen protection; afterwards isostatic cool pressing is carried out in feeding isostatic pressing machine; isostatic cool pressing pressure is in 150-300MPa; after isostatic cool pressing; in the glove box of feeding and the vacuum heat-insulation push-pull valve other end; nitrogen protection is gone down to exchange and filled in glove box; blank is loaded into magazine; open vacuum heat-insulation push-pull valve again afterwards, the magazine that blank is will be equipped with protective atmosphere is sent on the siege of vacuum heat-insulation room.
17. a kind of rare earth permanent magnet vacuum sintering method according to claim 15, it is characterised in that：Before the vacuum heat-insulation push-pull valve of vacuum-sintering Equipment for Heating Processing is opened; first the blank of pressing under magnetic field is sent into a movable case being connected with plate valve under nitrogen protection; then movable case is docked with the vacuum heat-insulation push-pull valve of vacuum-sintering Equipment for Heating Processing; vacuum heat-insulation push-pull valve is opened again afterwards, on the siege that blank is sent to vacuum heat-insulation room.
18. a kind of rare earth permanent magnet vacuum sintering method according to claim 15, it is characterised in that：In described heating process, first by blank heating is to 400-600 DEG C and is incubated in 1-9 hours, then blank is heated to 800-900 DEG C from 400-600 DEG C in 1-9 hours and be incubated, then blank is heated to 1010-1090 DEG C from 800-900 DEG C in 1-5 hours and be incubated, then stop heating；In described refrigerating work procedure, one cooling blower of startup after argon gas is filled with, the heat-insulated gear air valve of vacuum heat-insulation room both sides is alternately opened, per two cooling blower alternation switches of 3-15 minutes once afterwards.
19. a kind of rare earth permanent magnet vacuum sintering method according to claim 15, it is characterised in that：It is then interior at 1-20 hour that blank is heated to 1010-1090 DEG C from 300-600 DEG C and is incubated by blank heating is to 300-600 DEG C and is incubated first in 1-9 hours in described heating process；Then stop heating and cool the temperature to less than 800 DEG C, afterwards again by blank heating is to 800-950 DEG C and is incubated, then stop heating；In described refrigerating work procedure, it is filled with one cooling blower of startup after argon gas, the heat-insulated gear air valve of vacuum heat-insulation room both sides is alternately opened, per two cooling blower alternation switches of 3-15 minutes once afterwards, stops cooling down with ShiShimonoseki cooling blower until temperature is cooled into 400 DEG C；
Then heated after vacuumizing again, by blank heating is to 460-640 DEG C and is incubated in 1-9 hours, stop heating again afterwards, it is filled with the heat-insulated gear air valve for starting a cooling blower after argon gas and alternately opening vacuum heat-insulation room both sides, per two cooling blower alternation switches of 3-15 minutes once afterwards, stop cooling down with ShiShimonoseki cooling blower until temperature is cooled into 100 DEG C.
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| CN112414141A (en) * | 2020-11-26 | 2021-02-26 | 东莞市中汉磁材科技有限公司 | Sintering furnace for producing strong magnetic products and using method thereof |
| CN112857057A (en) * | 2019-11-28 | 2021-05-28 | 岛津产业机械***株式会社 | Heat treatment furnace |
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