CN108692568A - Heat-treatment furnace - Google Patents

Heat-treatment furnace Download PDF

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Publication number
CN108692568A
CN108692568A CN201810198371.3A CN201810198371A CN108692568A CN 108692568 A CN108692568 A CN 108692568A CN 201810198371 A CN201810198371 A CN 201810198371A CN 108692568 A CN108692568 A CN 108692568A
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CN
China
Prior art keywords
space
heat
treated object
treated
size
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Granted
Application number
CN201810198371.3A
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Chinese (zh)
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CN108692568B (en
Inventor
桥本孝彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
NGK Kilntech Corp
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NGK Insulators Ltd
NGK Kilntech Corp
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Publication of CN108692568A publication Critical patent/CN108692568A/en
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Publication of CN108692568B publication Critical patent/CN108692568B/en
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/02Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
    • F27B9/028Multi-chamber type furnaces
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • F27B9/2407Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor the conveyor being constituted by rollers (roller hearth furnace)
    • F27B9/2415Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor the conveyor being constituted by rollers (roller hearth furnace) the charge rotating about an axis transversal to the axis of advancement of the charge
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/04Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity adapted for treating the charge in vacuum or special atmosphere
    • F27B9/045Furnaces with controlled atmosphere
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/06Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
    • F27B9/062Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/3005Details, accessories, or equipment peculiar to furnaces of these types arrangements for circulating gases
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/36Arrangements of heating devices

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Tunnel Furnaces (AREA)
  • Furnace Details (AREA)

Abstract

The present invention can suitably inhibit the atmosphere gas in other spaces to be flowed into the different space of gas atmosphere.Heat-treatment furnace is heat-treated treated object.Heat-treatment furnace includes furnace body and handling device.Furnace body has:Treated object is heat-treated using first gas atmosphere the first space, the second space that treated object is heat-treated using the second gas atmosphere different from first gas atmosphere and the third space for connecting the first space and second space.Treated object is carried to the other end of second space by handling device from the one end in the first space via third space.The sectional area orthogonal with carry direction in third space is less than the sectional area orthogonal with carry direction in the first space, and less than the sectional area orthogonal with carry direction of second space.The size of third space in the height direction is less than the size of the first space in the height direction, and is less than the size of second space in the height direction.

Description

Heat-treatment furnace
Technical field
Technology disclosed in this specification is related to the heat-treatment furnace being heat-treated to treated object.Specifically, it is related to The technology for detaching the atmosphere gas in each space in the heat-treatment furnace for having the different multiple spaces of gas atmosphere.
Background technology
Sometimes treated object is heat-treated using heat-treatment furnace (such as roller bottom stove etc.).It, will in such heat-treatment furnace The inner space of furnace body is divided into multiple spaces, and treated object is carried successively in these spaces.By to each of furnace interior The atmosphere gas ingredient and atmosphere temperature in space are adjusted, and the required each process (example of the heat treatment for implementing treated object Such as, unsticking mixture process, firing process).Multiple spaces are adjusted to respectively different gas atmosphere according to each process.Cause This, is developing the technology that the boundary in adjacent space detaches atmosphere gas.For example, being disclosed directly below heat in patent document 1 Treatment furnace has:Treated object is heat-treated in first gas atmosphere the first space and with first gas The second space that treated object is heat-treated in the different second gas atmosphere of atmosphere.The first space and second space it Between be provided with partition board, partition board from the madial wall of furnace body towards stove in and flatly protrude, thickness is with towards gradual in stove It thickens.The first space side near partition board is configured with by the exhaust flow path of the gas discharge in the first space, near partition board Second space side be configured with by second space gas discharge exhaust flow path.The heat-treatment furnace of patent document 1 due to every Plate thickens and is generated at gas accumulation between partition board and the inner wall of furnace body.The gas being detained at gas accumulation is from being configured at partition board Neighbouring exhaust flow path discharge.
Existing technical literature
Patent document
Patent document 1:Japanese Unexamined Patent Publication 2014-214988 bulletins
Invention content
For the heat-treatment furnace of patent document 1, partition board is made gradually to thicken, also, exhaust flow path is set near partition board, by This, it is suppressed that atmosphere gas is flowed into from the space of an adjacent side to the space of another party.But there are the following problems:Only They are detached with partition board, the atmosphere gas of the atmosphere gas in the first space and second space can not be sufficiently separated.This explanation Book discloses the technology for suitably inhibiting the atmosphere gas in other spaces to be flowed into the different space of gas atmosphere.
The heat-treatment furnace of this disclosure is heat-treated treated object.Heat-treatment furnace includes that furnace body and carrying fill It sets.Furnace body has:Treated object is heat-treated using first gas atmosphere the first space, using with first gas atmosphere The second space and connect the first space and second space that different second gas atmosphere is heat-treated treated object The third space got up.Treated object is carried to second space by handling device from the one end in the first space via third space The other end.The sectional area orthogonal with carry direction in third space is less than the section orthogonal with carry direction in the first space Product, and less than the sectional area orthogonal with carry direction of second space.The size of third space in the height direction is less than first The size of space in the height direction, and it is less than the size of second space in the height direction.
Above-mentioned heat-treatment furnace has third space between the first different space of gas atmosphere and second space, this The sectional area in three spaces is less than the sectional area of the first space and second space, and size in the height direction is less than the first space And the size of second space in the height direction.The present inventor is concentrated on studies, and is as a result distinguished, by first Have such a third space between space and second space, a side between the first space and second space can be avoided Atmosphere gas is flowed into the atmosphere gas of another party or the atmosphere gas of another party is flowed into the atmosphere gas of a side.Cause This can suitably detach the gas atmosphere of the gas atmosphere in the first space and second space according to above-mentioned heat-treatment furnace.
Description of the drawings
Fig. 1 is the sectional view for the schematic configuration for indicating the heat-treatment furnace involved by embodiment (with the carrying with treated object Sectional view when the parallel plane in direction is by heat-treatment furnace cutting).
Fig. 2 is the figure illustrated for the size in the third space to furnace body.
Symbol description
10:Heat-treatment furnace;12:Treated object;20:Furnace body;22a,22b,22c:Roof;24:Bottom wall;26a,26b,26c, 26d:Side wall;30:First space;32:Second space;34:Third space;36,37:Heater;38a,38b:Import flow path; 42:Transport roller.
Specific implementation mode
Enumerate the main feature of embodiment explained below.It should be noted that the technology essential factor recorded below is independently Technology essential factor, individually or by various combinations play the serviceability of technology, be not limited to claim when application Combination described in book.
In the heat-treatment furnace of (feature 1) this disclosure, handling device has the mounting surface loaded for treated object, can The other end of second space is carried to from the one end in the first space in the state that treated object is placed in mounting surface.Third is empty Between size in carry direction can be more than size of the treated object in carry direction.According to such composition, can make Size of the third space in carry direction is size appropriate, can be by the gas of the gas atmosphere in the first space and second space Body atmosphere suitably detaches.
The heat-treatment furnace of (feature 2) this disclosure may further include:First exhaust flow path, is configured at first The position of adjacent one end in space, and the gas in the first space is discharged;And second exhaust flow path, it is configured at second The position of third spatial neighborhood in space, and the gas in second space is discharged.According to such composition, in the first space And in second space, the exhaust flow path of gas is configured in the entrance side of transport path respectively, therefore, gas is easy in each space Entrance side is flowed to from the outlet side of transport path.Therefore, it is possible to inhibit the adhesive etc. generated by treated object in heat treatment It is trapped in the downstream of the carry direction in each space.
(feature 3) for the heat-treatment furnace of this disclosure, without configuration heater in third space, third space exists Size in short transverse, which can be less than in third space, configures the required minimum constructive height of heater.According to such structure At can suitably reduce third space.
(feature 4) for the heat-treatment furnace of this disclosure, handling device is configured to:It is carried in third space Transporting velocity when treated object is more than transporting velocity when carrying treated object in the first space, and more than in second space Transporting velocity when middle carrying treated object.According to such composition, can make in third space carry treated object when Between shorten, which is not the space being heat-treated to treated object.Therefore, it is possible to inhibit to carry in the first space Be warming up in the process the treated object of the atmosphere temperature in the first space temperature carried in third space during decrease.
Embodiment
Hereinafter, being illustrated to the heat-treatment furnace 10 involved by embodiment.As shown in Figure 1, heat-treatment furnace 10 includes:Furnace body 20 and handling device (42,44,46,48), treated object 12 is carried.Heat-treatment furnace 10 is passing through handling device And treated object 12 is heat-treated during being carried to treated object 12 in furnace body 20.As treated object 12, example It can such as enumerate:By the positive material of laminated body, lithium ion battery obtained from dielectric made of ceramics (base material) and electrode stacking Material and negative material etc..It, can be by these in the case where being heat-treated to laminated body made of ceramics using heat-treatment furnace 10 Laminated body is placed in flat load bearing board and is carried in stove.In addition, in use heat-treatment furnace 10 to lithium ion battery Positive electrode and in the case that negative material is heat-treated, these positive electrodes and negative material can be contained in box-like Saggar and carried in stove.It, can be by multiple load bearing boards, saggar in carrying side in the heat-treatment furnace 10 of the present embodiment State side by side is placed in transport roller 42 (aftermentioned) and is carried upwards.Hereinafter, in the present embodiment, by object to be heated Matter and be placed with the load bearing board of the substance to be heated or contain the substance to be heated saggar collectively referred to as " handled Object 12 ".
Furnace body 20 has:Roof 22a, 22b, 22c, bottom wall 24 and side wall 26a, 26b, 26c, 26d.Roof 22a, 22b, 22c with the state parallel with bottom wall 24 (the i.e., face parallel with x/y plane) treated object 12 carry direction (in Fig. 1 For the directions x) on arranged in series, size of the sum of the size of roof 22a, 22b, 22c in the x direction with bottom wall 24 in the x direction It is roughly the same.Roof 22a, 22c are located at the position of (being the directions+z in Fig. 1) more closer to the top than roof 22b.Side wall 26a is configured at The arrival end of transport path, and parallelly configured with yz planes.Side wall 26d is configured at the outlet end of transport path, and flat with yz Face parallelly configures.Side wall 26b, 26c and yz plane parallelly configures, and between side wall 26a, 26d.Side wall 26a, 26d Size in the height direction is roughly the same, and the size of side wall 26b, 26c in the height direction is roughly the same.In addition, side wall The size of 26a, 26d in the height direction is more than the size of side wall 26b, 26c in the height direction.Side wall 26a by roof 22a and Bottom wall 24 connects, and side wall 26d connects roof 22c and bottom wall 24.In addition, side wall 26b connects roof 22a, 22b Get up, side wall 26c connects roof 22b, 22c.By roof 22a, 22b, 22c, bottom wall 24 and side wall 26a, 26b, A pair of sidewalls (not shown) (the i.e., side wall parallel with xz planes) that the space that 26c, 26d are surrounded is extended along carry direction It blocks.
The inner space of furnace body 20 is divided into the first space 30, second space 32 and by the first space 30 and second The third space 34 that space 32 connects.It is formed with opening 28a in the side wall 26a of furnace body 20, opening is formed in side wall 26d 28b.Treated object 12 is transported to from opening 28a in heat-treatment furnace 10 by handling device, by the first space 30, third space 34, the sequence of second space 32 passes through in furnace body 20, is carried except opening 28b heat treateds stove 10.That is, opening 28a is used Mouth is moved in, opening 28b is used as moving out mouth.
First space 30 is surrounded by roof 22a, bottom wall 24, side wall 26a, 26b and a pair of sidewalls (not shown).That is, top Wall 22a determines the top of the gas atmosphere in the first space 30.First space 30 in the furnace body 20 by third space 34 by with the Two spaces 32 completely cut off.The first space 30 is able to maintain that the gas atmosphere and atmosphere temperature different from second space 32 as a result,.First Space 30 by being set to the opening 28a of side wall 26a be connected to except heat-treatment furnace 10, with second by third space 34 Space 32 is connected to.In addition, being provided with spacing board 40a in the first space 30, spacing board 40a is in aftermentioned heater 36 and carrying It is configured along horizontal direction (the i.e., directions x) between roller 42.The material of spacing board 40a is not particularly limited, it may be considered that heat resistance To select.For example, the atmosphere temperature in the first space 30 is 500 DEG C below, between being formed using stainless steel Partition board 40a can form spacing board in the case where the atmosphere temperature in the first space 30 is more than 500 DEG C using refractory material 40a.(below, also referred to as first space 30 is divided into the space 30a of the top configured for heater 36 by spacing board 40a Warmer space 30a) and the space 30b (following, also referred to as carry space 30b) of lower section that is configured for transport roller 42.For Partition board 40a, near side wall 26b (the i.e., sides+x) be provided with slit 41a, space 30a and space 30b by slit 41a company It is logical.In addition, in Fig. 1, spacing board 40a is configured at the position than roof 22b more on the lower, but is not limited to such composition.Between As long as the first space 30 is divided into warmer space 30a and carries this 2 spaces space 30b by partition board 40a, it is arranged Position (position in the directions z) is not particularly limited.
Second space 32 is surrounded by roof 22c, bottom wall 24, side wall 26c, 26d and a pair of sidewalls (not shown).That is, top Wall 22c determines the top of the gas atmosphere of second space 32.Second space 32 in the furnace body 20 by third space 34 by with the One space 30 completely cuts off.Second space 32 is able to maintain that the gas atmosphere and atmosphere temperature different from the first space 30 as a result,.Second Space 32 by being set to the opening 28b of side wall 26d be connected to except heat-treatment furnace 10, with first by third space 34 Space 30 is connected to.In addition, being provided with spacing board 40b in second space 32, spacing board 40b is in aftermentioned heater 37 and carrying It is configured along horizontal direction (the i.e., directions x) between roller 42.The material of spacing board 40b is not particularly limited, can be according to the second sky Between 32 atmosphere temperature consider that heat resistance is selected.Second space 32 is divided by spacing board 40b and is configured for heater 37 Top space 32a (following, also referred to as warmer space 32a) and the lower section configured for transport roller 42 space 32b (with Under, also referred to as carry space 32b).For spacing board 40b, (the i.e., sides+x) is provided with slit 41b, space near side wall 26d 32a is connected to space 32b by slit 41b.In addition, in Fig. 1, spacing board 40b is configured at the position than roof 22b more on the lower It sets, still, as long as second space 32 is divided into warmer space 32a and carries this 2 spaces space 32b i.e. by spacing board 40b Can, its installation position (position in the directions z) is not particularly limited.
The first space 30 configured with multiple transport rollers 42 and multiple heaters 36 (it should be noted that in the following specification, When needing to differentiate multiple heaters 36, recorded using the letter in alphabet as heater 36a, 36b, When need not differentiate multiple heaters 36, it is only recorded as heater 36 sometimes.In addition, for other inscapes, not When the inscape by identical composition being needed to differentiate, the letter in alphabet is omitted as described above sometimes and only with number It is recorded.).In addition, being configured with multiple transport rollers 42 and multiple heaters 37 in second space 32.Heater 36 is in the first sky Between in 30 along carry direction to be configured at the position of the top of transport roller 42, the edge in second space 32 of heater 37 at equal intervals Carry direction to be configured at the position of the top of transport roller 42 at equal intervals.In the present embodiment, 4 are configured in the first space 30 A heater 36a~36d is configured with 4 heater 37a~37d in second space 32.In addition, being configured in each space 30,32 The quantity of heater 36,37 be not particularly limited, can be according to the size in each space 30,32, the target gas in each space 30,32 Atmosphere temperature etc. changes.It heats in pair the first space 30 by heater 36 generates heat, is generated heat by heater 37 And to being heated in second space 32.
The importing flow path 38a for importing atmosphere gas to the first space 30 is provided in the first space 30, in second space 32 are provided with the importing flow path 38b for importing atmosphere gas to second space 32.From import flow path 38a, 38b to each space 30, 32 are directed respectively into atmosphere gas, control the gas atmosphere in each space 30,32 respectively as a result,.It imports flow path 38a and is set to roof Position near the side wall 26a of 22a.In addition, importing flow path 38b is set to the position near the side wall 26c of roof 22c.That is, leading Enter flow path 38a, 38b to be set to the top in each space 30,32 in each space 30,32 respectively and be the carrying side of treated object 12 To upstream side.Atmosphere gas from import flow path 38a, 38b to each space 30,32 top, i.e., each warmer space 30a, It is imported in 32a.The atmosphere gas in each warmer space 30a, 32a is imported into via the slit for being set to spacing board 40a, 40b 41a, 41b and to each carrying space 30b, 32b import.At this point, the upstream side that flow path 38a, 38b are set to carry direction is imported, Slit 41a, 41b are set to the downstream side of carry direction, and the atmosphere gas imported as a result, is from the upstream side of carry direction under Side movement is swum, while being heated up using heater 36.It is partitioned into each warmer space 30a, 32a by spacing board 40a, 40b With each carrying space 30b, 32b, thereby, it is possible to inhibiting in heat treatment the impurity such as adhesive for being generated from treated object 12 to respectively plus It is invaded in hot device space 30a, 32a.It is miscellaneous therefore, it is possible to be supplied from each warmer space 30a, 32a to each carrying space 30b, 32b The less atmosphere gas of matter.
In addition, being provided with the exhaust flow path that the atmosphere gas importeding into the first space 30 is discharged in the first space 30 39a is provided with the exhaust flow path 39b that the atmosphere gas importeding into second space 32 is discharged in second space 32.Exhaust stream Road 39a is set to the position near the side wall 26a of bottom wall 24.In addition, the side wall 26c that exhaust flow path 39b is set to bottom wall 24 is attached Close position.That is, exhaust flow path 39a, 39b are set to the lower section in each space 30,32 in each space 30,32 and are to be located respectively Manage the upstream side of the carry direction of object 12.As described above, atmosphere gas from the slit 41a in the downstream side for being set to carry direction, 41b is imported to each carrying space 30b, 32b.The atmosphere gas in each carrying space 30b, 32b is imported into from being set to carrying side To downstream side exhaust flow path 39a, 39b discharge.Atmosphere gas in space 30b, 32b is carried from carrying side that is, importeding into To downstream side towards upstream side move.Exhaust flow path 39a, 39b are respectively arranged at the treated object 12 in each space 30,32 Carry direction upstream side, as a result, the atmosphere gas in each space 30,32 be easy under the carry direction of treated object 12 Swim effluent to the upstream side.Therefore, it is possible to inhibit the impurity such as the adhesive generated by treated object 12 in heat treatment to be trapped in carrying The downstream side in direction.In addition, the impurity majority such as adhesive generated by treated object 12 is heavier than air.Therefore, by that will be vented Flow path 39a, 39b are set to the lower section in each space 30,32, and impurity expeditiously can be discharged.It should be noted that the present embodiment In, flow path 38a, 38b will be imported and be set to the top in each space 30,32, also, exhaust flow path 39a, 39b are set to each sky Between 30,32 lower section, but be not limited to this composition.For example, can will import flow path 38a, 38b is set to each space 30,32 Lower section, also, exhaust flow path 39a, 39b are set to the top in each space 30,32.In addition, in the present embodiment, in spacing board 40a, 40b are respectively arranged with 1 slit (i.e., slit 41a, 41b) and are still set to the quantity of the slit of spacing board 40a, 40b It is not particularly limited, multiple slits can be provided with.
Third space 34 is surrounded by roof 22b, bottom wall 24, side wall 26b, 26c and a pair of sidewalls (not shown).Third Space 34 is connected in furnace body 20 with the first space 30 and second space 32.It is configured with multiple transport rollers 42 in third space 34. It is different from the first space 30 and second space 32 in third space 34, do not configure heater.
Fig. 2 give third space 34, the part in the first space 30 and second space 32 a part.It should say It is bright, in Fig. 2, transport roller 42, the diagram of heater 36,37 and spacing board 40a, 40b is omitted.As shown in Fig. 2, third space 34 size h3 in the height direction is less than the size h1 of the first space 30 in the height direction, and less than second space 32 in height Spend the size h2 on direction.Specifically, determine that the roof 22b of the top in third space 34 is configured at than determining the first space 30 Top roof 22a and determine the low positions (the i.e., directions-z) the roof 22c of the top of second space 32.In addition, roof 22b is configured at than the 30 interior position configured for heater 36 of the first space and the position configured for heater 37 in second space 32 Low position (the i.e., directions-z).Add that is, the size h3 of third space 34 in the height direction is less than the configuration in third space 34 The hot required minimum constructive height of device.As a result, by not configuring heater in third space 34, third space 34 can be reduced and existed Size in short transverse.In addition, the size h3 of third space 34 in the height direction is less than the first space 30 in short transverse On size h1 and second space 32 size h2 in the height direction, third space 34 is orthogonal with carry direction as a result, The area in section (the i.e., sections yz) is less than the face in the area in the sections yz in the first space 30 and the sections yz less than second space 32 Product.
Herein, in the case where the first space 30 and second space 32 abut (i.e., in the feelings for being not provided with third space 34 Under condition), if the atmosphere temperature in the first space 30 is different with the atmosphere temperature of second space 32, atmosphere gas is easy from atmosphere It is moved towards the lower space of atmosphere temperature in the higher space of temperature.For example, the atmosphere temperature in second space 32 is more empty than first Between 30 atmosphere temperature height in the case of, the atmosphere gas in second space 32 is easy to flow into the first space 30.In this reality Apply and be provided with third space 34 in the heat-treatment furnace 10 of example, be adjusted in third space 34 region abutted with the first space 30 and It is roughly the same with the temperature in region that second space 32 abuts.Therefore, atmosphere gas is not easy from the first space 30 to third space 34 flow into, also, atmosphere gas is not easy to flow into from second space 32 to third space 34.Therefore, the heat-treatment furnace of the present embodiment 10 can prevent the atmosphere gas of second space 32 from being flowed into the first space 30, further, it is possible to prevent the gas in the first space 30 Atmosphere gas is flowed into second space 32.
In addition, as described above, in third space 34 without configuration heater, therefore, in third space 34 in carry direction On it is larger-size in the case of, will produce temperature sometimes in third space 34 than the temperature in the region abutted with the first space 30 Degree or the region low with the temperature in region that second space 32 abuts.In this case, the atmosphere gas in the first space 30 and/or The atmosphere gas of second space 32 is easy to flow into third space 34.But in third space 34, with the adjoining of the first space 30 Region and roughly the same with the temperature in region that second space 32 abuts, therefore, flows from the first space 30 and/or second space 32 Enter to the atmosphere gas in third space 34 and be easy to accumulate in third space 34, is not easy to move to the space of another party.Therefore, Even if larger-size in carry direction in third space 34, the gas of second space 32 also can be suitably prevented Atmosphere gas is flowed into the first space 30, further, it is possible to suitably prevent the atmosphere gas in the first space 30 to second space 32 Interior inflow.
In addition, size L1 of the third space 34 in carry direction be more than size of the treated object 12 in carry direction and In 1800mm or less.For example, being the feelings of the treated object 12 of 150mm having used size of the treated object 12 in carry direction Under condition, size L1 of the third space 34 in carry direction (directions x) is preferably greater than 150mm and is 1800mm or less.By making Size of the third space 34 in carry direction is more than size of the treated object 12 in carry direction, can avoid treated object 12 one end is present in the first space 30 and the other end of treated object 12 is present in such state in second space 32.By This, can suitably be detached the gas atmosphere in the first space 30 and second space 32 by third space 34.In addition, by locating It manages size of the object 12 in carry direction not limit, for example, using size of the treated object 12 in carry direction to be In the case of the treated object 12 of 300mm, size L1 of the third space 34 in carry direction is preferably greater than 300mm and is 1800mm or less.In addition, by make size of the third space 34 in carry direction be 1800mm hereinafter, can prevent from being heat-treated The becoming large-sized in carry direction of stove 10, further, it is possible to which the temperature in third space 34 is inhibited to reduce.As described above, Three spaces 34 are without configuration heater, therefore, if the becoming large-sized in carry direction of third space 34, third space 34 Interior temperature is easy to decline.It, can be by first by making size of the third space 34 in carry direction in above-mentioned range The atmosphere gas in space 30 and the atmosphere gas of second space 32 suitably detach, further, it is possible to expeditiously to treated object 12 are heat-treated.In addition, the experiment that inventor according to the present invention is carried out is (specifically, used in carry direction Size is the experiment of the treated object of 150mm), it confirms:Make size L1 of the third space 34 in carry direction be 500mm or In the heat-treatment furnace 10 of 800mm, the gas atmosphere in the first space 30 and the gas atmosphere of second space 32 are detached.
Handling device has:Multiple transport rollers 42, first driving means 44, the second driving device 46, third driving device 48 and control device 50.Handling device is empty via third by one end of treated object 12 from the sides opening 28a in the first space 30 Between 34 and be carried to the other ends of the opening 28b sides of second space 32.Treated object 12 is handled upside down by transport roller 42.
Transport roller 42 is cylindrical shape, and is set in the first space 30, in second space 32 and third space 34, Its axis extends along the direction orthogonal with carry direction.42 diameter having the same of multiple transport rollers, in carry direction with Certain spacing equally spaced configures.Transport roller 42 is supported for be rotated around its axis, and passes through driving device Driving force transmit and rotated.
First driving means 44 are the driving device (example driven to the transport roller 42 being configured in the first space 30 Such as, motor).First driving means 44 are connected by power transfer mechanism with the transport roller 42 being configured in the first space 30 It connects.If the driving force of first driving means 44 passes to the transport roller 42 in the first space 30 via power transfer mechanism, Then the transport roller 42 in the first space 30 is rotated.Similarly, the second driving device 46 is to being configured in second space 32 The driving device (such as motor) that is driven of transport roller 42.Second driving device 46 by power transfer mechanism and with The transport roller 42 being placed in second space 32 is connected.If the driving force of the second driving device 46 via power transfer mechanism and The transport roller 42 in second space 32 is passed to, then the transport roller 42 in second space 32 is rotated.Machine is transmitted as power Structure can use well known power transfer mechanism, such as use the mechanism using sprocket wheel and chain.First driving means 44 and Two driving devices 46 drive corresponding transport roller 42, so that the transport roller 42 in the first space 30 and second space 32 Interior transport roller 42 is rotated with same speed.First driving means 44 and the second driving device 46 are respectively by controlling Device 50 is controlled.
Third driving device 48 is the driving device (example driven to the transport roller 42 being configured in third space 34 Such as, motor).Third driving device 48 is connected by power transfer mechanism with the transport roller 42 for being configured at third space 34. If the driving force of third driving device 48 passes to transport roller 42 via power transfer mechanism, transport roller 42 is revolved Turn.As power transfer mechanism, well known power transfer mechanism can be used, such as use the mechanism using sprocket wheel and chain. Third driving device 48 is configured to:By adjusting output, the rotary speed of transport roller 42 can be changed.By adjusting The output of three driving devices 48 so that the transport roller 42 being connected with third driving device 48 with first driving means 44 or the 42 same speed of transport roller that two driving devices 46 are connected rotated (following, also referred to as low speed rotation) or It is rotated (below, with the speed higher than the transport roller 42 being connected with first driving means 44 or the second driving device 46 Referred to as high speed rotation).Third driving device 48 is controlled by control device 50.
In the present embodiment, the transport roller 42 in the first space 30 is connected with first driving means 44, in second space 32 Transport roller 42 be connected with the second driving device 46, but be not limited to this composition.For example, the transport roller 42 in the first space 30 It can be connected with 1 driving device with the transport roller 42 in second space 32.In addition, third driving device 48 is that can adjust The composition of output, but it is not limited to this composition.As long as being constructed as follows, that is, the transport roller 42 configured in third space 34 It being capable of low speed rotation or high speed rotation.For example, handling device can have four-drive device, the four-drive device with First driving means 44 and the second driving device 46, which are compared, makes 42 high-speed rotating mode of transport roller be driven.Such case Under, the transport roller 42 configured in third space 34 can be by clutch mechanism can make 42 low speed rotation of transport roller Driving device (i.e., first driving means 44 or the second driving device 46) and make 42 high-speed rotating driving device of transport roller (i.e., Four-drive device) between the mode that switches be connected with them.
Next, the action for the heat-treatment furnace 10 when being heat-treated to treated object 12 illustrates.In order to right Treated object 12 is heat-treated, and first, so that heater 36,37 is worked, to make the gas in the first space 30 and second space 32 Atmosphere temperature is the temperature of setting.Next, the placing treated object 12 in transport roller 42.Next, make first driving means 44, Second driving device 46 and third driving device 48 work, by treated object 12 from the opening 28a of heat-treatment furnace 10 by the One space 30, third space 34 and second space 32 and the opening 28b for being carried to heat-treatment furnace 10.12 quilt of treated object as a result, Heat treatment.
The carrying of treated object 12 is illustrated in further detail.First, treated object 12 is moved to from opening 28a Afterwards, it is carried in the first space 30.In first space 30, transport roller 42 is revolved by the work of first driving means 44 Turn, carries treated object 12.At this point, third driving device 48 is driven with the output roughly the same with first driving means 44 It is dynamic, with the transport roller 42 that third driving device 48 is connected with roughly the same with the transport roller 42 of first driving means 44 is connected to Speed rotated.Therefore, treated object 12 carried in the first space 30 since the 28a that is open, until empty from first Between 30 move out during, carried with same speed.During treated object 12 is carried in the first space 30, It is heat-treated under gas atmosphere and atmosphere temperature in one space 30.
When treated object 12 is moved out from the first space 30 and is moved in third space 34, third driving device 48 is so as to remove Fortune 42 high-speed rotating output of roller is driven.Treated object 12 is detected by the sensor 52a being arranged in third space 34 And the output of third driving device 48 is changed.For example, sensor 52a can use optical sensor, sensor 52a It can detect whether treated object 12 blocks light path.Sensor 52a is set to is at a distance from the entrance away from third space 34 The downstream of the carry direction of size of the treated object 12 in carry direction position (entrance i.e., away from third space 34 away from The position on the directions+x from the size for treated object 12 in the x direction).When sensor 52a detects treated object 12 When front end, then control device 50 makes the output of third driving device 48 increase.Then, the quilt in third space 34 of treated object 12 To carry at a high speed.As described above, third space 34 is to detach the atmosphere of the atmosphere in the first space 30 and second space 32 And be arranged, and be not have helpful space to the heat treatment of treated object 12.By in third space 34 to treated object 12 carry out high speed carrying, can carry treated object 12 in not having helpful third space 34 to heat treatment with the short time.
When treated object 12 is carried to the downstream side in third space 34, the output of third driving device 48 be switched to The roughly the same output of second driving device 46.Then, the transport roller 42 being connected with third driving device 48 with be connected to 42 same speed of transport roller of second driving device 46 is rotated.Pass through the side wall 26c institutes in third space 34 The sensor 52b of setting detects treated object 12 and is changed to the output of third driving device 48.Specifically, when passing When sensor 52b detects the front end of treated object 12, control device 50 reduces the output of third driving device 48.Then, located Reason object 12 is carried with low speed from third space 34 to second space 32, in turn, is carried in second space 32 with low speed.It is handled During object 12 is carried in second space 32, it is heat-treated under the gas atmosphere and atmosphere temperature in second space 32.Quilt Processed material 12 is carried in second space 32, is moved out from the outside of opening 28b heat treateds stove 10.
It, can be by the gas atmosphere in the first space 30 by the way that third space 34 is arranged in the heat-treatment furnace 10 of the present embodiment It is suitably detached with the gas atmosphere of second space 32.Therefore, heat-treatment furnace 10 can be have gas atmosphere it is different first The continuous oven in space 30 and second space 32.In general, the case where carrying out gas atmosphere different heat treatment to treated object 12 Under, it is heat-treated using the different multiple box batch furnaces of gas atmosphere or continuous oven, or in 1 box batch furnace Or after being heat-treated in continuous oven, switches the gas atmosphere in same stove and be heat-treated.But using gas atmosphere In the case that different multiple box batch furnaces or continuous oven are heat-treated, criticized to different boxes making treated object 12 When treatment furnace or continuous oven move, treated object 12 is cooled, and the entire heat treatment procedure required time is elongated.In addition, In the case of switching the gas atmosphere in same stove, need in stove gas atmosphere or time for switching over of atmosphere temperature, The entire heat treatment procedure required time also can be elongated.In addition, box batch furnace is compared with continuous oven, productivity is relatively low, Therefore, the box batch furnace that multiple same gas atmospheres are set is needed in most cases.Therefore, if using box batch processing Stove, then there are the following problems:Manufacturing cost improves, also, what is be heat-treated in each box batch furnace is handled Object 12 generates deviation, and the stability of product is insufficient.In the present embodiment, by having third space 34, heat-treatment furnace 10 can be made To have the continuous oven in the different space of gas atmosphere.Therefore, it is possible to shorten the entire heat treatment procedure required time.Separately Outside, compared with box batch furnace, multiple stoves need not be set, therefore, it is possible to reduce cost, further, it is possible to ensure product Stability.Furthermore, it is not necessary that treated object 12 is taken out and it is made to be moved to different stoves, therefore, it is possible to avoid making to be located It is mixed into foreign matter in treated object 12 when reason object 12 is moved to the different space of gas atmosphere, the bad of product can be reduced.
More than, the concrete example of technology disclosed in this specification is illustrated in detail, still, these concrete examples are only It is not example, is not that claims are defined.The technology recorded in detail in the claims includes to illustrating above Concrete example has carried out scheme obtained from various modifications and changes.In addition, the technology essential factor illustrated in this specification or attached drawing is independent Or the serviceability of technology is played by various combinations, it is not limited to the combination described in claim when application.

Claims (5)

1. a kind of heat-treatment furnace is the heat-treatment furnace being heat-treated to treated object, wherein
The heat-treatment furnace includes:
Furnace body, the furnace body have the first space treated object being heat-treated using first gas atmosphere, using with Second space that the different second gas atmosphere of the first gas atmosphere is heat-treated the treated object and by institute State the first space and third space that the second space connects;And
Handling device, the handling device remove the treated object from the one end in first space via the third space It is transported to the other end of the second space,
The sectional area orthogonal with carry direction in the third space is less than the orthogonal with carry direction of first space and cuts Area, and it is less than the sectional area orthogonal with carry direction of the second space,
The size of the third space in the height direction is less than the size of first space in the height direction, and is less than institute State the size of second space in the height direction.
2. heat-treatment furnace according to claim 1, wherein
The handling device has the mounting surface for loading the treated object, and can be placed in the load in the treated object The other end for being carried to the second space in the state of face from the one end in first space is set,
Size of the third space in carry direction is more than size of the treated object in carry direction.
3. heat-treatment furnace according to claim 1 or 2, wherein further include:
First exhaust flow path, the first exhaust flow arrangement are incited somebody to action in the position of the adjacent one end in first space Gas discharge in first space;And
Second exhaust flow path, the second exhaust flow arrangement in the position of the third spatial neighborhood in the second space, And the gas in the second space is discharged.
4. heat-treatment furnace according to any one of claims 1 to 3, wherein further include:
Primary heater, which is configured at first space, and is adjusted to the temperature in first space It is whole;And
Secondary heater, which is configured at the second space, and is adjusted to the temperature in the second space It is whole,
Without configuration heater in the third space, and the size of the third space in the height direction is less than described the The required minimum constructive height of heater is configured in three spaces.
5. according to the heat-treatment furnace described in any one in Claims 1 to 4, wherein
The handling device is configured to:Transporting velocity when carrying the treated object in the third space is more than described The transporting velocity when treated object is carried in first space, and is more than and is carried the treated object in the second space When transporting velocity.
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