JP7110127B2 - heat treatment furnace - Google Patents

heat treatment furnace Download PDF

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JP7110127B2
JP7110127B2 JP2019005478A JP2019005478A JP7110127B2 JP 7110127 B2 JP7110127 B2 JP 7110127B2 JP 2019005478 A JP2019005478 A JP 2019005478A JP 2019005478 A JP2019005478 A JP 2019005478A JP 7110127 B2 JP7110127 B2 JP 7110127B2
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space
furnace body
temperature
processed
heat treatment
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JP2020112336A (en
JP2020112336A5 (en
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智明 大山
和彦 有馬
浩治 山田
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NGK Insulators Ltd
NGK Kilntech Corp
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NGK Insulators Ltd
NGK Kilntech Corp
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Priority to JP2019005478A priority Critical patent/JP7110127B2/en
Priority to CN201911373754.0A priority patent/CN111442641B/en
Priority to TW109101011A priority patent/TWI839439B/en
Publication of JP2020112336A publication Critical patent/JP2020112336A/en
Publication of JP2020112336A5 publication Critical patent/JP2020112336A5/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
    • F27B9/028—Multi-chamber type furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/24—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor
    • F27B9/2407—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace being carried by a conveyor the conveyor being constituted by rollers (roller hearth furnace)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/36—Arrangements of heating devices

Description

本明細書に開示する技術は、被処理物を熱処理する熱処理炉に関する。 The technology disclosed in this specification relates to a heat treatment furnace for heat-treating an object to be treated.

熱処理炉（例えば、ローラーハースキルン等）を用いて、被処理物を熱処理することがある。この種の熱処理炉では、炉体の内部空間を複数の空間に分割し、これらの空間を順に被処理物が搬送される。炉体内部の各空間の雰囲気温度を調整することで、被処理物の熱処理に必要な各工程（例えば、脱バインダー工程、焼成工程等）が実施される。複数の空間は、各工程に合わせてそれぞれ異なる雰囲気温度に調整される。例えば、特許文献１には、熱処理炉の一例が開示されている。 A heat treatment furnace (for example, a roller hearth kiln or the like) may be used to heat treat an object to be treated. In this type of heat treatment furnace, the internal space of the furnace body is divided into a plurality of spaces, and the objects to be treated are conveyed in order through these spaces. By adjusting the atmospheric temperature of each space inside the furnace body, each process (for example, binder removal process, firing process, etc.) necessary for heat treatment of the object to be processed is performed. The plurality of spaces are adjusted to different ambient temperatures for each process. For example, Patent Literature 1 discloses an example of a heat treatment furnace.

特開２０１６－１５６６１２号公報JP 2016-156612 A

被処理物を所望の温度プロファイルで熱処理するためには、炉体内部の各空間の雰囲気温度を個別に制御し、各空間の雰囲気温度を適切に維持する必要がある。しかしながら、各空間において、雰囲気温度が異なる他の空間と隣接する領域近傍では、隣接する一方の空間から他方の空間への熱伝導等の影響によって、当該空間の雰囲気温度を所望の温度に適切に維持できないことがある。このため、隣接する雰囲気温度が異なる２つの空間の境界の近傍においては、被処理物が所望の温度プロファイルに制御することが難しいという問題が生じる。本明細書は、熱処理炉内の各空間の雰囲気温度を適切に維持する技術を開示する。 In order to heat-treat an object to be processed with a desired temperature profile, it is necessary to individually control the ambient temperature of each space inside the furnace body and maintain the ambient temperature of each space appropriately. However, in each space, in the vicinity of the area adjacent to other spaces with different ambient temperatures, due to the influence of heat conduction from one adjacent space to the other space, the ambient temperature of the space can be appropriately adjusted to the desired temperature. may not be maintained. Therefore, in the vicinity of the boundary between two adjacent spaces with different atmospheric temperatures, it is difficult to control the temperature profile of the object to be processed to a desired one. This specification discloses a technique for appropriately maintaining the ambient temperature of each space in the heat treatment furnace.

本明細書に開示する熱処理炉は、被処理物を熱処理する。熱処理炉は、被処理物を第１の温度で熱処理する第１空間と、被処理物を第１の温度と異なる第２の温度で熱処理する第２空間と、第１空間と第２空間とを隔離する隔壁と、を備える炉体と、第１空間の一端から第２空間の他端まで被処理物を搬送する搬送装置と、を備えている。隔壁は、第１空間と第２空間とを連通させる連通通路と、隔壁内に設けられ、隔壁によって第１空間及び第２空間から隔離されると共に連通通路と連通する第３空間と、を備えている。 The heat treatment furnace disclosed in this specification heat-treats an object to be treated. The heat treatment furnace includes a first space for heat-treating an object to be treated at a first temperature, a second space for heat-treating an object to be treated at a second temperature different from the first temperature, the first space and the second space. a furnace body provided with a partition wall that isolates the two, and a transfer device that transfers the object to be processed from one end of the first space to the other end of the second space. The partition includes a communication passage that communicates the first space and the second space, and a third space that is provided in the partition and is isolated from the first space and the second space by the partition and communicates with the communication passage. ing.

上記の熱処理炉では、第１空間と第２空間とを隔離する隔壁内に第３空間が設けられている。これによって、第１空間と第２空間のうちの一方の空間から他方の空間への熱伝達の影響を抑制することができる。このため、第１空間内の雰囲気温度と第２空間内の雰囲気温度をそれぞれ適切に維持することができる。 In the above heat treatment furnace, the third space is provided inside the partition separating the first space and the second space. This can suppress the influence of heat transfer from one of the first space and the second space to the other space. Therefore, the ambient temperature in the first space and the ambient temperature in the second space can be appropriately maintained.

実施例に係る熱処理炉の概略構成を示す図であり、被処理物の搬送方向に平行な平面で熱処理炉を切断したときの縦断面図。FIG. 2 is a diagram showing a schematic configuration of a heat treatment furnace according to an embodiment, and is a vertical cross-sectional view when the heat treatment furnace is cut along a plane parallel to the conveying direction of the workpiece. 図１のＩＩ－ＩＩ線における断面図。Sectional drawing in the II-II line of FIG. 隔壁の搬送方向の寸法を説明するための図。The figure for demonstrating the dimension of the conveyance direction of a partition.

以下に説明する実施例の主要な特徴を列記しておく。なお、以下に記載する技術要素は、それぞれ独立した技術要素であって、単独であるいは各種の組合せによって技術的有用性を発揮するものであり、出願時請求項記載の組合せに限定されるものではない。 The main features of the embodiments described below are listed. It should be noted that the technical elements described below are independent technical elements, and exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims as of the filing. do not have.

（特徴１）本明細書が開示する熱処理炉は、炉体に設けられ、その一端が第３空間と連通する一方でその他端が炉体の外部に連通し、第３空間内のガスを炉体の外部に排出する排気流路をさらに備えていてもよい。このような構成によると、排気流路によって、連通通路を介して第３空間内に流れ込む第１空間内のガス及び第２空間内のガスが炉体の外部に排気される。これによって、連通通路を介して第１空間と第２空間との間をガスが移動することを抑制することができる。 (Feature 1) The heat treatment furnace disclosed in the present specification is provided in a furnace body, one end of which communicates with the third space and the other end communicates with the outside of the furnace body, and the gas in the third space is discharged into the furnace. An exhaust channel for discharging to the outside of the body may be further provided. According to such a configuration, the gas in the first space and the gas in the second space flowing into the third space through the communication passage are exhausted to the outside of the furnace body by the exhaust passage. Thereby, it is possible to suppress the gas from moving between the first space and the second space via the communication passage.

（特徴２）本明細書が開示する熱処理炉は、炉体に設けられ、その一端が第３空間と連通する一方でその他端が炉体の外部に連通し、炉体の外部から第３空間内にガスを供給する給気流路をさらに備えていてもよい。このような構成によると、給気流路から供給されるガスによって、第３空間内の温度を調整することができる。このため、第３空間の温度を第１空間の雰囲気温度及び第２空間の雰囲気温度に対して適切な温度に調整することで、連通通路を介して第１空間と第２空間との間をガスが移動することを抑制することができる。 (Feature 2) The heat treatment furnace disclosed in the present specification is provided in a furnace body, one end of which communicates with the third space and the other end communicates with the outside of the furnace body, and the third space is connected to the outside of the furnace body. It may further comprise an air supply channel for supplying gas therein. According to such a configuration, the temperature in the third space can be adjusted by the gas supplied from the air supply passage. Therefore, by adjusting the temperature of the third space to an appropriate temperature with respect to the ambient temperature of the first space and the ambient temperature of the second space, the first space and the second space can be communicated through the communication passage. Gas movement can be suppressed.

（特徴３）本明細書が開示する熱処理炉では、隔壁は、第１空間と第３空間とを隔離する第１部分と、第２空間と第３空間とを隔離する第２部分と、をさらに備えていてもよい。第３空間の搬送方向の寸法は、第１の温度が第２の温度より高いときは第１部分の搬送方向の寸法より小さくされており、第２の温度が第１の温度より高いときは第２部分の搬送方向の寸法より小さくされていてもよい。このような構成によると、第１部分と第２部分と第３空間の搬送方向の寸法が好適に調整され、第１空間と第２空間を熱的に隔離しながら、被処理物の加熱を目的としない第３空間の搬送方向の寸法を小さくすることができる。これによって、隔壁全体の搬送方向の寸法を小さくすることができ、熱処理工程が実行されない連通通路を被処理物が搬送される時間を短くすることができる。 (Feature 3) In the heat treatment furnace disclosed in this specification, the partition has a first portion that separates the first space from the third space and a second portion that separates the second space from the third space. You may have more. The dimension of the third space in the conveying direction is smaller than the dimension of the first portion in the conveying direction when the first temperature is higher than the second temperature, and when the second temperature is higher than the first temperature It may be smaller than the dimension of the second portion in the conveying direction. According to such a configuration, the dimensions of the first portion, the second portion, and the third space in the conveying direction are preferably adjusted, and the object to be processed is heated while the first space and the second space are thermally isolated. The size of the unintended third space in the conveying direction can be reduced. As a result, it is possible to reduce the dimension of the entire partition wall in the transport direction, and to shorten the time during which the object to be processed is transported through the communication passage in which the heat treatment process is not performed.

（特徴４）本明細書が開示する熱処理炉では、炉体には、第１空間内に配置され、第１空間内を第１の温度に調整可能な第１ヒータと、第２空間内に配置され、第２空間内を第２の温度に調整可能な第２ヒータと、が設けられている一方、第３空間内にはヒータが設けられていなくてもよい。隔壁は、第１空間と第２空間とを熱的に隔離するものであるため、隔壁に設けられた第３空間で被処理物を加熱する必要はなく、第３空間にヒータを設ける必要はない。また、第３空間にヒータが設けられていないことによって、第３空間の搬送方向の寸法を小さくすることができ、熱処理工程が実行されない連通通路を被処理物が搬送される時間を短くすることができる。 (Feature 4) In the heat treatment furnace disclosed in this specification, the furnace body includes a first heater arranged in the first space and capable of adjusting the inside of the first space to a first temperature; A second heater is disposed and is capable of adjusting the inside of the second space to the second temperature. Since the partition thermally isolates the first space and the second space, there is no need to heat the object to be processed in the third space provided in the partition, and there is no need to provide a heater in the third space. do not have. In addition, since the third space is not provided with a heater, the dimension of the third space in the transport direction can be reduced, and the time during which the object to be processed is transported through the communication passage in which the heat treatment process is not performed can be shortened. can be done.

以下、実施例に係る熱処理炉１０について説明する。図１に示すように、熱処理炉１０は、炉体２０と、被処理物１２を搬送する搬送装置（５２、５４、５６、５８）を備えている。熱処理炉１０は、搬送装置によって被処理物１２が炉体２０内を搬送される間に、被処理物１２を熱処理する。 The heat treatment furnace 10 according to the embodiment will be described below. As shown in FIG. 1, the heat treatment furnace 10 includes a furnace body 20 and transport devices (52, 54, 56, 58) for transporting the object 12 to be processed. The heat treatment furnace 10 heat-treats the workpiece 12 while the workpiece 12 is transported through the furnace body 20 by the transport device.

被処理物１２としては、例えば、セラミックス製の誘電体（基材）と電極とを積層した積層体や、リチウムイオン電池の正極材や負極材等が挙げられる。熱処理炉１０を用いてセラミック製の積層体を熱処理する場合には、これらを平板状のセッターに載置して炉内を搬送することができる。また、熱処理炉１０を用いてリチウムイオン電池の正極材や負極材を熱処理する場合には、これらを箱状の匣鉢に収容して炉内を搬送することができる。本実施例の熱処理炉１０では、搬送ローラ５２（後述）上に複数のセッターや匣鉢を搬送方向に並んだ状態で載置して搬送することができる。以下、本実施例においては、熱処理する物質と、その熱処理する物質を載置したセッターや収容した匣鉢を合わせた全体を「被処理物１２」という。 Examples of the object 12 to be processed include a laminate obtained by laminating a ceramic dielectric (base material) and an electrode, and a positive electrode material and a negative electrode material of a lithium ion battery. When heat-treating ceramic laminates using the heat treatment furnace 10, they can be placed on flat setters and transported in the furnace. When the heat treatment furnace 10 is used to heat-treat the positive electrode material and the negative electrode material of the lithium ion battery, they can be placed in a box-shaped sagger and transported within the furnace. In the heat treatment furnace 10 of the present embodiment, a plurality of setters and saggers can be placed and conveyed in a state of being aligned in the conveying direction on conveying rollers 52 (described later). Hereinafter, in this embodiment, the substance to be heat-treated and the setter on which the substance to be heat-treated and the sagger containing the substance are collectively referred to as the "object to be treated 12".

図１及び図２に示すように、炉体２０は、天井壁２２と、底壁２４と、側壁２６ａ～２６ｄによって囲まれており、内部に隔壁（３０ａ、３０ｂ）を備えている。炉体２０は、略直方形であり、天井壁２２は、底壁２４に対して平行に（すなわち、ＸＹ平面と平行に）配置されている。図１に示すように、側壁２６ａは、搬送経路の入口端に配置されており、搬送方向に対して垂直に（すなわち、ＹＺ平面と平行に）配置されている。側壁２６ｂは、搬送経路の出口端に配置されており、側壁２６ａに対して平行に（すなわち、ＹＺ平面と平行に）配置されている。図２に示すように、側壁２６ｃ、２６ｄは、搬送方向に対して平行、かつ、天井壁２２及び底壁２４に対して垂直に（すなわち、ＸＺ平面と平行に）配置されている。 As shown in FIGS. 1 and 2, the furnace body 20 is surrounded by a ceiling wall 22, a bottom wall 24, and side walls 26a to 26d, and has partition walls (30a, 30b) inside. The furnace body 20 is substantially rectangular, and the ceiling wall 22 is arranged parallel to the bottom wall 24 (that is, parallel to the XY plane). As shown in FIG. 1, the side wall 26a is located at the entrance end of the transport path and is arranged perpendicular to the transport direction (that is, parallel to the YZ plane). The side wall 26b is arranged at the exit end of the transport path and is arranged parallel to the side wall 26a (that is, parallel to the YZ plane). As shown in FIG. 2, the side walls 26c and 26d are arranged parallel to the transport direction and perpendicular to the ceiling wall 22 and the bottom wall 24 (that is, parallel to the XZ plane).

図１に示すように、炉体２０の内部空間は、隔壁（３０ａ、３０ｂ）によって、第１空間４０と第２空間４２に分割されている。具体的には、隔壁３０ａは、側壁２６ａ、２６ｂの間の略中間の位置で天井壁２２に固定されており、天井壁２２から垂直下方に延びている。隔壁３０ｂは、隔壁３０ａに対応する位置で底壁２４に固定されており、底壁２４から垂直上方に延びている。炉体２０の内部は、隔壁（３０ａ、３０ｂ）を境界として、第１空間４０と第２空間４２に分けられている。隔壁３０ａと隔壁３０ｂの間は上下方向（Ｚ方向）に離間しており、離間した間の空間には連通通路３６が設けられている。炉体２０の側壁２６ａには開口２８ａが形成され、側壁２６ｂには開口２８ｂが形成されている。被処理物１２は、搬送装置によって開口２８ａから熱処理炉１０内に搬送され、連通通路３６を通り、開口２８ｂから熱処理炉１０の外へ搬送される。すなわち、開口２８ａは搬入口として用いられ、開口２８ｂは搬出口として用いられる。 As shown in FIG. 1, the internal space of the furnace body 20 is divided into a first space 40 and a second space 42 by partition walls (30a, 30b). Specifically, the partition wall 30a is fixed to the ceiling wall 22 at a substantially intermediate position between the side walls 26a and 26b and extends vertically downward from the ceiling wall 22. As shown in FIG. The partition 30b is fixed to the bottom wall 24 at a position corresponding to the partition 30a and extends vertically upward from the bottom wall 24. As shown in FIG. The interior of the furnace body 20 is divided into a first space 40 and a second space 42 with partition walls (30a, 30b) as boundaries. The partition wall 30a and the partition wall 30b are spaced apart in the vertical direction (Z direction), and a communication passage 36 is provided in the space between them. An opening 28a is formed in the side wall 26a of the furnace body 20, and an opening 28b is formed in the side wall 26b. The workpiece 12 is conveyed into the heat treatment furnace 10 through the opening 28a by the conveying device, passes through the communication passage 36, and is conveyed out of the heat treatment furnace 10 through the opening 28b. That is, the opening 28a is used as a carry-in port, and the opening 28b is used as a carry-out port.

第１空間４０は、天井壁２２と、底壁２４と、側壁２６ａ、２６ｃ、２６ｄと、隔壁（３０ａ、３０ｂ）によって囲まれている。第１空間４０は、炉体２０内において隔壁（３０ａ、３０ｂ）によって第２空間４２と遮断されることによって、第２空間４２とは異なる雰囲気温度を維持することができる。第１空間４０は、側壁２６ａに設けられた開口２８ａにより熱処理炉１０の外に連通し、隔壁３０ａと隔壁３０ｂの間の連通通路３６により第２空間４２に連通している。第１空間４０には、複数の搬送ローラ５２と、複数のヒータ４４ａ、４４ｂが配置されている。ヒータ４４ａは、搬送ローラ５２の上方の位置に搬送方向に等間隔で配置され、ヒータ４４ｂは搬送ローラ５２の下方の位置に搬送方向に等間隔で配置されている。ヒータ４４ａ、４４ｂが発熱することで、第１空間４０内が加熱される。 The first space 40 is surrounded by a ceiling wall 22, a bottom wall 24, side walls 26a, 26c, 26d, and partition walls (30a, 30b). The first space 40 can maintain an ambient temperature different from that of the second space 42 by being separated from the second space 42 by partition walls (30a, 30b) inside the furnace body 20 . The first space 40 communicates with the outside of the heat treatment furnace 10 through an opening 28a provided in the side wall 26a, and communicates with the second space 42 through a communication passage 36 between the partition walls 30a and 30b. A plurality of transport rollers 52 and a plurality of heaters 44 a and 44 b are arranged in the first space 40 . The heaters 44a are arranged above the conveying roller 52 at equal intervals in the conveying direction, and the heaters 44b are arranged below the conveying roller 52 at equal intervals in the conveying direction. The inside of the first space 40 is heated by the heat generated by the heaters 44a and 44b.

第２空間４２は、天井壁２２と、底壁２４と、側壁２６ｂ、２６ｃ、２６ｄと、隔壁（３０ａ、３０ｂ）によって囲まれている。第２空間４２は、炉体２０内において隔壁（３０ａ、３０ｂ）によって第１空間４０と遮断されることによって、第２空間４２とは異なる雰囲気温度を維持することができる。第２空間４２は、側壁２６ｂに設けられた開口２８ｂにより熱処理炉１０の外に連通し、隔壁３０ａと隔壁３０ｂの間の連通通路３６により第１空間４０に連通している。第２空間４２には、複数の搬送ローラ５２と、複数のヒータ４４ｃ、４４ｄが配置されている。ヒータ４４ｃは、搬送ローラ５２の上方の位置に搬送方向に等間隔で配置され、ヒータ４４ｄは搬送ローラ５２の下方の位置に搬送方向に等間隔で配置されている。ヒータ４４ｃ、４４ｄが発熱することで、第２空間４２内が加熱される。第２空間４２は、第１空間４０と異なる雰囲気温度となるように設定されており、本実施例では、第２空間４２の雰囲気温度は、第１空間４０の雰囲気温度より高くされる。 The second space 42 is surrounded by a ceiling wall 22, a bottom wall 24, side walls 26b, 26c, 26d, and partition walls (30a, 30b). The second space 42 can maintain an ambient temperature different from that of the second space 42 by being separated from the first space 40 by partition walls (30a, 30b) inside the furnace body 20 . The second space 42 communicates with the outside of the heat treatment furnace 10 through an opening 28b provided in the side wall 26b, and communicates with the first space 40 through a communication passage 36 between the partition walls 30a and 30b. A plurality of transport rollers 52 and a plurality of heaters 44 c and 44 d are arranged in the second space 42 . The heaters 44c are arranged above the conveying roller 52 at equal intervals in the conveying direction, and the heaters 44d are arranged below the conveying roller 52 at equal intervals in the conveying direction. The inside of the second space 42 is heated by the heat generated by the heaters 44c and 44d. The second space 42 is set to have an ambient temperature different from that of the first space 40 , and in this embodiment, the ambient temperature of the second space 42 is higher than the ambient temperature of the first space 40 .

炉体２０には、炉体２０内にガスを供給する複数の給気流路４６ａ～４６ｃと、炉体２０内のガスを排出する複数の排気流路４８ａ～４８ｃが設けられている。具体的には、給気流路４６ａは、底壁２４に設けられ、側壁２６ａと隔壁３０ｂの間であって隔壁３０ｂの近傍に配置されている。すなわち、給気流路４６ａは、第１空間４０内の搬送方向の下流側に設けられている。給気流路４６ａは、第１空間４０と連通し、炉体２０の外部から第１空間４０内に雰囲気ガスを供給する。給気流路４６ａから第１空間４０に雰囲気ガスが供給されることによって、第１空間４０内のガス雰囲気が制御される。給気流路４６ｂは、底壁２４に設けられ、隔壁３０ｂと側壁２６ｂの間であって側壁２６ｂの近傍に配置されている。すなわち、給気流路４６ｂは、第２空間４２内の搬送方向の下流側に設けられている。給気流路４６ｂは、第２空間４２と連通し、炉体２０の外部から第２空間４２内に雰囲気ガスを供給する。給気流路４６ｂから第２空間４２に雰囲気ガスが供給されることによって、第２空間４２内のガス雰囲気が制御される。給気流路４６ｃは、底壁２４に設けられ、隔壁３０ｂの第１部分３２ｂと第２部分３４ｂ（後述）の間に配置されている。給気流路４６ｃは、第３空間３８（後述）と連通し、第３空間３８内にガスを供給する。給気流路４６ａ～４６ｃには、炉体２０の外部に配置されたガス供給源（図示省略）からガスが供給される。給気流路４６ａ～４６ｃのそれぞれに供給されるガスの流量は、制御装置６０によって制御される。 The furnace body 20 is provided with a plurality of air supply passages 46 a to 46 c for supplying gas into the furnace body 20 and a plurality of exhaust passages 48 a to 48 c for discharging gas from the furnace body 20 . Specifically, the air supply passage 46a is provided in the bottom wall 24, and is arranged between the side wall 26a and the partition wall 30b and in the vicinity of the partition wall 30b. That is, the air supply flow path 46a is provided downstream in the transport direction within the first space 40 . The air supply passage 46 a communicates with the first space 40 and supplies atmospheric gas from the outside of the furnace body 20 into the first space 40 . The gas atmosphere in the first space 40 is controlled by supplying the atmosphere gas to the first space 40 from the air supply passage 46a. The air supply channel 46b is provided in the bottom wall 24 and is arranged between the partition wall 30b and the side wall 26b and in the vicinity of the side wall 26b. That is, the air supply flow path 46b is provided downstream in the transport direction within the second space 42 . The air supply passage 46 b communicates with the second space 42 and supplies atmospheric gas into the second space 42 from the outside of the furnace body 20 . The gas atmosphere in the second space 42 is controlled by supplying the atmosphere gas to the second space 42 from the air supply channel 46b. The air supply channel 46c is provided in the bottom wall 24 and arranged between a first portion 32b and a second portion 34b (described later) of the partition wall 30b. The air supply passage 46c communicates with the third space 38 (described later) and supplies gas into the third space 38 . Gas is supplied to the air supply passages 46a to 46c from a gas supply source (not shown) arranged outside the furnace body 20. As shown in FIG. A controller 60 controls the flow rate of the gas supplied to each of the air supply passages 46a to 46c.

排気流路４８ａは、天井壁２２に設けられ、側壁２６ａと隔壁３０ａの間であって側壁２６ａの近傍に配置されている。すなわち、排気流路４８ａは、第１空間４０内の搬送方向の上流側に設けられている。排気流路４８ａは、第１空間４０と連通し、第１空間４０内の雰囲気ガスを炉体２０の外部に排出する。排気流路４８ｂは、天井壁２２に設けられ、隔壁３０ａと側壁２６ｂの間であって隔壁３０ａの近傍に配置されている。すなわち、排気流路４８ｂは、第２空間４２内の搬送方向の上流側に設けられている。排気流路４８ｂは、第２空間４２と連通し、第２空間４２内の雰囲気ガスを炉体２０の外部に排出する。排気流路４８ｃは、天井壁２２に設けられ、隔壁３０ａの第１部分３２ａと第２部分３４ａ（後述）の間に配置されている。排気流路４８ｃは、第３空間３８（後述）と連通し、第３空間３８内のガスを炉体２０の外部に排出する。排気流路４８ａ～４８ｃからそれぞれ排出されるガスの流量は、給気流路４６ａ～４６ｃからそれぞれ供給されるガスの流量と対応するように制御装置６０によって制御される。 The exhaust flow path 48a is provided in the ceiling wall 22 and is arranged near the side wall 26a between the side wall 26a and the partition wall 30a. That is, the exhaust flow path 48a is provided on the upstream side in the transport direction within the first space 40 . The exhaust flow path 48 a communicates with the first space 40 and exhausts the atmosphere gas in the first space 40 to the outside of the furnace body 20 . The exhaust flow path 48b is provided in the ceiling wall 22 and is arranged near the partition 30a between the partition 30a and the side wall 26b. That is, the exhaust flow path 48b is provided on the upstream side in the transport direction within the second space 42 . The exhaust flow path 48 b communicates with the second space 42 and exhausts the atmosphere gas in the second space 42 to the outside of the furnace body 20 . The exhaust flow path 48c is provided in the ceiling wall 22 and arranged between a first portion 32a and a second portion 34a (described later) of the partition wall 30a. The exhaust flow path 48 c communicates with a third space 38 (described later) and discharges the gas in the third space 38 to the outside of the furnace body 20 . The flow rate of gas discharged from each of the exhaust channels 48a-48c is controlled by the controller 60 so as to correspond to the flow rate of gas supplied from each of the air supply channels 46a-46c.

なお、本実施例では、各空間４０、４２内の搬送方向の上流側に排気流路４８ａ、４８ｂが設けられ、各空間４０、４２内の搬送方向の下流側に給気流路４６ａ、４６ｂが設けられている。また、各空間４０、４２、３８を囲む底壁２４に給気流路４６ａ～４６ｃが設けられ、各空間４０、４２、３８を囲む天井壁２２に排気流路４８ａ～４８ｃが設けられている。しかしながら、給気流路と排気流路の配置位置や配置する数は、本実施例の構成に限定されるものではなく、熱処理条件等に応じて適宜変更することができる。 In this embodiment, exhaust flow paths 48a and 48b are provided on the upstream side in the transport direction within the spaces 40 and 42, and air supply flow paths 46a and 46b are provided on the downstream side in the transport direction within the spaces 40 and 42. is provided. The bottom wall 24 surrounding each of the spaces 40, 42, 38 is provided with air supply channels 46a-46c, and the ceiling wall 22 surrounding each of the spaces 40, 42, 38 is provided with exhaust channels 48a-48c. However, the arrangement position and the number of the air supply passages and the exhaust passages are not limited to the configuration of the present embodiment, and can be appropriately changed according to the heat treatment conditions and the like.

次に、隔壁（３０ａ、３０ｂ）の構成について説明する。隔壁３０ａは、第１空間４０と隣接する位置に配置される第１部分３２ａと、第２空間４２と隣接する位置に配置される第２部分３４ａを備えている。第１部分３２ａと第２部分３４ａは、搬送方向に離間しており、第１部分３２ａと第２部分３４ａの間には、第３空間３８の一部が設けられている。隔壁３０ｂは、第１空間４０と隣接する位置に配置される第１部分３２ｂと、第２空間４２と隣接する位置に配置される第２部分３４ｂを備えている。第１部分３２ｂは、第１部分３２ａに対応する位置に配置されており、第２部分３４ｂは、第２部分３４ａに対応する位置に配置されている。第１部分３２ｂと第２部分３４ｂは、搬送方向に離間しており、第１部分３２ｂと第２部分３４ｂの間には、第３空間３８の他の部分が設けられている。すなわち、第３空間３８は、天井壁２２と、底壁２４と、隔壁３０ａの第１部分３２ａ及び第２部分３４ａと、隔壁３０ｂの第１部分３２ｂ及び第２部分３４ｂによって囲まれており、連通通路３６と連通している。 Next, the configuration of the partition walls (30a, 30b) will be described. The partition wall 30a has a first portion 32a arranged adjacent to the first space 40 and a second portion 34a arranged adjacent to the second space 42 . The first portion 32a and the second portion 34a are spaced apart in the transport direction, and a portion of the third space 38 is provided between the first portion 32a and the second portion 34a. The partition 30b has a first portion 32b arranged adjacent to the first space 40 and a second portion 34b arranged adjacent to the second space 42 . The first portion 32b is arranged at a position corresponding to the first portion 32a, and the second portion 34b is arranged at a position corresponding to the second portion 34a. The first portion 32b and the second portion 34b are spaced apart in the transport direction, and another portion of the third space 38 is provided between the first portion 32b and the second portion 34b. That is, the third space 38 is surrounded by the ceiling wall 22, the bottom wall 24, the first portion 32a and the second portion 34a of the partition 30a, and the first portion 32b and the second portion 34b of the partition 30b, It communicates with the communication passage 36 .

図３に示すように、第３空間３８の搬送方向（すなわち、Ｘ方向）の寸法Ｌ１は、第２部分３４ａ、３４ｂの搬送方向（すなわち、Ｘ方向）の寸法Ｌ２より小さくされている。すなわち、第２空間４２側から第１空間４０側への熱伝導の影響を抑制するためには、第２部分３４ａ、３４ｂの搬送方向の寸法をある程度長くする必要がある。そこで、第３空間３８の搬送方向の寸法Ｌ１を第２部分３４ａ，３４ｂの搬送方向の寸法より小さくすることで、被処理物１２の熱処理に寄与しない隔壁（３０ａ，３０ｂ）の搬送方向の寸法が長くなることを抑制している。同様に、第１空間４０側から第２空間４２側への熱伝導の影響を抑制するためには、第１部分３２ａ、３２ｂの搬送方向の寸法をある程度長くする必要がある。第３空間３８の搬送方向の寸法Ｌ１を、第１部分３２ａ、３２ｂの搬送方向（すなわち、Ｘ方向）の寸法Ｌ３より小さくすることで、隔壁（３０ａ、３０ｂ）の搬送方向の寸法が長くなることを抑制している。また、図１に示すように、第３空間３８には、第１空間４０及び第２空間４２と異なり、ヒータが配置されていない。 As shown in FIG. 3, the dimension L1 of the third space 38 in the transport direction (that is, the X direction) is smaller than the dimension L2 of the second portions 34a and 34b in the transport direction (that is, the X direction). That is, in order to suppress the influence of heat conduction from the second space 42 side to the first space 40 side, it is necessary to increase the dimension of the second portions 34a and 34b in the transport direction to some extent. Therefore, by making the transport direction dimension L1 of the third space 38 smaller than the transport direction dimension of the second portions 34a and 34b, the transport direction dimension of the partition walls (30a and 30b) that do not contribute to the heat treatment of the workpiece 12 is reduced. lengthening is suppressed. Similarly, in order to suppress the influence of heat conduction from the first space 40 side to the second space 42 side, it is necessary to increase the dimension of the first portions 32a and 32b in the transport direction to some extent. By making the dimension L1 in the transport direction of the third space 38 smaller than the dimension L3 in the transport direction (that is, the X direction) of the first portions 32a and 32b, the dimension in the transport direction of the partition walls (30a and 30b) is increased. It is restrained. Further, unlike the first space 40 and the second space 42, no heater is arranged in the third space 38, as shown in FIG.

例えば、隔壁（３０ａ、３０ｂ）に第３空間３８が設けられていない場合、第１空間４０の雰囲気温度と第２空間４２の雰囲気温度が異なると、雰囲気温度が高い空間から雰囲気温度が低い空間に向かって雰囲気ガスが移動しやすくなる。例えば、本実施例のように第２空間４２の雰囲気温度が第１空間４０の雰囲気温度より高く設定されている場合には、第２空間４２内の雰囲気ガスが連通通路３６を通って第１空間４０内に流入し易くなる。本実施例の熱処理炉１０では、隔壁（３０ａ、３０ｂ）に、第１空間４０及び第２空間４２と隔離されると共に連通通路３６と連通する第３空間３８が設けられている。このため、第１空間４０より雰囲気温度が高い第２空間４２内の雰囲気ガスが、第２空間４２から連通通路３６を通って第３空間３８に移動したとしても、第３空間３８内に移動した雰囲気ガスがさらに連通通路３６を通って第１空間４０まで移動し難くなる。したがって、第２空間４２内の雰囲気ガスが第１空間４０内に流入することを抑制することができる。 For example, when the partition walls (30a, 30b) are not provided with the third space 38, if the ambient temperature of the first space 40 and the ambient temperature of the second space 42 are different, a space with a high ambient temperature will be separated from a space with a low ambient temperature. Atmosphere gas easily moves toward For example, when the ambient temperature of the second space 42 is set higher than the ambient temperature of the first space 40 as in this embodiment, the ambient gas in the second space 42 passes through the communication passage 36 to the first space. It becomes easy to flow into the space 40 . In the heat treatment furnace 10 of the present embodiment, the partition walls (30a, 30b) are provided with a third space 38 isolated from the first space 40 and the second space 42 and communicating with the communication passage 36 . Therefore, even if the atmospheric gas in the second space 42 whose atmospheric temperature is higher than that in the first space 40 moves from the second space 42 to the third space 38 through the communication passage 36, it does not move into the third space 38. It becomes more difficult for the atmosphere gas to move to the first space 40 through the communication passage 36 . Therefore, it is possible to suppress the atmosphere gas in the second space 42 from flowing into the first space 40 .

また、第３空間３８には、空間内を加熱するヒータが設けられていないため、第３空間３８内の温度は、空間内が加熱される第１空間４０内の温度及び第２空間４２内の温度より高くなり難い。このため、第１空間４０内の雰囲気ガスが第３空間３８内に移動したとしても、第３空間３８内に移動した雰囲気ガスは、第３空間３８内の温度より高い第２空間４２に移動し難い。同様に、第２空間４２内の雰囲気ガスが第３空間３８内に移動したとしても、第３空間３８内に移動した雰囲気ガスは、第３空間３８内の温度より高い第１空間４０に移動し難い。したがって、第１空間４０内に第２空間４２の雰囲気ガスが流入することを抑制できると共に、第２空間４２内に第１空間４０の雰囲気ガスが流入することを抑制できる。 In addition, since the third space 38 is not provided with a heater for heating the inside of the space, the temperature inside the third space 38 is the temperature inside the first space 40 where the inside of the space is heated and the inside the second space 42 . It is difficult to get higher than the temperature of Therefore, even if the atmospheric gas in the first space 40 moves into the third space 38, the atmospheric gas that has moved into the third space 38 moves to the second space 42 whose temperature is higher than that in the third space 38. hard to do Similarly, even if the atmospheric gas in the second space 42 moves into the third space 38, the atmospheric gas that has moved into the third space 38 moves to the first space 40 whose temperature is higher than that in the third space 38. hard to do Therefore, it is possible to suppress the atmospheric gas of the second space 42 from flowing into the first space 40 and to suppress the atmospheric gas of the first space 40 from flowing into the second space 42 .

また、上述したように、第３空間３８は、給気流路４６ｃ及び排気流路４８ｃと連通している。給気流路４６ｃから供給されるガスは、第１空間４０内において加熱された雰囲気ガスや、第２空間４２内において加熱された雰囲気ガスより温度が低い。このため、給気流路４６ｃから第３空間３８内に供給されるガスによって、第３空間３８内の温度を第１空間４０及び第２空間４２より低くなるように調整することができる。これによって、第３空間３８内のガスが第１空間４０や第２空間４２に移動し難くなり、第１空間４０と第２空間４２との間をガスが移動することを抑制することができる。また、排気流路４８ｃが設けられることによって、第３空間３８内のガスが排出される。このため、第１空間４０内の雰囲気ガスが第３空間３８内に移動したとしても、第３空間３８内に移動した雰囲気ガスは、第３空間３８から排気流路４８ｃを介して炉体２０の外部に排出され、第３空間３８から第２空間４２に移動し難くなる。同様に、第２空間４２内の雰囲気ガスが第３空間３８内に移動したとしても、第３空間３８内に移動した雰囲気ガスは、第３空間３８から排気流路４８ｃを介して炉体２０の外部に排出され、第３空間３８から第１空間４０に移動し難くなる。これによって、第１空間４０と第２空間４２との間をガスが移動することを抑制することができる。 Further, as described above, the third space 38 communicates with the air supply channel 46c and the exhaust channel 48c. The temperature of the gas supplied from the air supply passage 46 c is lower than that of the atmospheric gas heated in the first space 40 and the atmospheric gas heated in the second space 42 . Therefore, the temperature in the third space 38 can be adjusted to be lower than that in the first space 40 and the second space 42 by the gas supplied into the third space 38 from the air supply passage 46c. This makes it difficult for the gas in the third space 38 to move to the first space 40 or the second space 42, and it is possible to suppress the gas from moving between the first space 40 and the second space 42. . Moreover, the gas in the third space 38 is discharged by providing the exhaust flow path 48c. Therefore, even if the atmospheric gas in the first space 40 moves into the third space 38, the atmospheric gas that has moved into the third space 38 is discharged from the third space 38 through the exhaust passage 48c to the furnace body 20. and is difficult to move from the third space 38 to the second space 42 . Similarly, even if the atmospheric gas in the second space 42 moves into the third space 38, the atmospheric gas that has moved into the third space 38 is discharged from the third space 38 through the exhaust passage 48c to the furnace body 20. and is difficult to move from the third space 38 to the first space 40 . Thereby, it is possible to suppress the gas from moving between the first space 40 and the second space 42 .

搬送装置は、複数の搬送ローラ５２と、第１駆動装置５４と、第２駆動装置５６と、第３駆動装置５８と、制御装置６０を備えている。搬送装置は、第１空間４０の開口２８ａ側の一端から、連通通路３６を介して、第２空間４２の開口２８ｂ側の他端まで被処理物１２を搬送する。被処理物１２は、搬送ローラ５２によって搬送される。 The conveying device includes a plurality of conveying rollers 52 , a first drive device 54 , a second drive device 56 , a third drive device 58 and a control device 60 . The conveying device conveys the workpiece 12 from one end of the first space 40 on the side of the opening 28 a to the other end of the second space 42 on the side of the opening 28 b via the communication passage 36 . The workpiece 12 is transported by the transport rollers 52 .

搬送ローラ５２は円筒状であり、第１空間４０内と連通通路３６内と第２空間４２内に設置され、その軸線は搬送方向と直交する方向に（すなわち、Ｙ方向に）伸びている。複数の搬送ローラ５２は、全て同じ直径を有しており、搬送方向に一定のピッチで等間隔に配置されている。搬送ローラ５２は、その軸線回りに回転可能に支持されており、駆動装置の駆動力が伝達されることによって回転する。 The conveying roller 52 is cylindrical, and is installed in the first space 40, the communication passage 36, and the second space 42, and its axis extends in a direction perpendicular to the conveying direction (that is, in the Y direction). The plurality of conveying rollers 52 all have the same diameter and are arranged at regular intervals in the conveying direction. The conveying roller 52 is rotatably supported about its axis, and is rotated by transmission of the driving force of the driving device.

第１駆動装置５４は、第１空間４０内に配置された搬送ローラ５２を駆動する駆動装置（例えば、モータ）である。第１駆動装置５４は、動力伝達機構を介して、第１空間４０内に配置された搬送ローラ５２に接続されている。第１駆動装置５４の駆動力が動力伝達機構を介して第１空間４０内の搬送ローラ５２に伝達されると、第１空間４０内の搬送ローラ５２は回転するようになっている。同様に、第２駆動装置５６は、第２空間４２内に配置された搬送ローラ５２を駆動する駆動装置（例えば、モータ）である。第２駆動装置５６は、動力伝達機構を介して、第２空間４２内に配置された搬送ローラ５２に接続されている。第２駆動装置５６の駆動力が動力伝達機構を介して第２空間４２内の搬送ローラ５２に伝達されると、第２空間４２内の搬送ローラ５２は回転するようになっている。動力伝達機構としては、公知のものを用いることができ、例えば、スプロケットとチェーンによる機構が用いられている。第１駆動装置５４と第２駆動装置５６は、第１空間４０内の搬送ローラ５２と第２空間４２内の搬送ローラ５２が略同一の速度で回転するように、対応する搬送ローラ５２を駆動する。第１駆動装置５４及び第２駆動装置５６は、それぞれ制御装置６０によって制御されている。 The first driving device 54 is a driving device (for example, a motor) that drives the conveying rollers 52 arranged in the first space 40 . The first driving device 54 is connected to the conveying rollers 52 arranged in the first space 40 via a power transmission mechanism. When the driving force of the first driving device 54 is transmitted to the conveying rollers 52 in the first space 40 through the power transmission mechanism, the conveying rollers 52 in the first space 40 rotate. Similarly, the second driving device 56 is a driving device (for example, a motor) that drives the transport rollers 52 arranged in the second space 42 . The second driving device 56 is connected to the conveying rollers 52 arranged in the second space 42 via a power transmission mechanism. When the driving force of the second driving device 56 is transmitted to the conveying rollers 52 in the second space 42 through the power transmission mechanism, the conveying rollers 52 in the second space 42 rotate. A known power transmission mechanism can be used, and for example, a mechanism using a sprocket and a chain is used. The first drive device 54 and the second drive device 56 drive the corresponding transport rollers 52 so that the transport rollers 52 in the first space 40 and the transport rollers 52 in the second space 42 rotate at substantially the same speed. do. The first drive device 54 and the second drive device 56 are each controlled by a control device 60 .

第３駆動装置５８は、連通通路３６内に配置された搬送ローラ５２と、第１空間４０内の連通通路３６側に配置された搬送ローラ５２と、第２空間４２内の連通通路３６側に配置された搬送ローラ５２を駆動する駆動装置（例えば、モータ）である。第３駆動装置５８は、動力伝達機構を介して、連通通路３６と第１空間４０の一部と第２空間４２の一部に配置された搬送ローラ５２に接続されている。第３駆動装置５８の駆動力が動力伝達機構を介して搬送ローラ５２に伝達されると、搬送ローラ５２は回転するようになっている。動力伝達機構としては、公知のものを用いることができ、例えば、スプロケットとチェーンによる機構が用いられている。第３駆動装置５８は、出力を調整することによって、搬送ローラ５２の回転速度を変更することができる構成となっている。第３駆動装置５８の出力を調整することによって、第３駆動装置５８に接続される搬送ローラ５２は、第１駆動装置５４又は第２駆動装置５６に接続される搬送ローラ５２と略同一の速度で回転したり（以下、低速回転ともいう）、第１駆動装置５４又は第２駆動装置５６に接続される搬送ローラ５２より高速で回転したり（以下、高速回転ともいう）する。第３駆動装置５８は、それぞれ制御装置６０によって制御されている。 The third driving device 58 includes the conveying roller 52 arranged in the communicating passage 36, the conveying roller 52 arranged in the first space 40 on the communicating passage 36 side, and the conveying roller 52 arranged in the second space 42 on the communicating passage 36 side. It is a driving device (for example, a motor) that drives the conveying rollers 52 that are arranged. The third driving device 58 is connected to the communication passage 36 and the conveying rollers 52 arranged in a portion of the first space 40 and a portion of the second space 42 via a power transmission mechanism. When the driving force of the third driving device 58 is transmitted to the conveying roller 52 via the power transmission mechanism, the conveying roller 52 rotates. A known power transmission mechanism can be used, and for example, a mechanism using a sprocket and a chain is used. The third driving device 58 is configured to change the rotation speed of the conveying roller 52 by adjusting the output. By adjusting the output of the third drive device 58, the transport rollers 52 connected to the third drive device 58 will have substantially the same speed as the transport rollers 52 connected to the first drive device 54 or the second drive device 56. (hereinafter also referred to as low-speed rotation), or rotates at a higher speed than the conveying rollers 52 connected to the first driving device 54 or the second driving device 56 (hereinafter also referred to as high-speed rotation). The third drive devices 58 are each controlled by a control device 60 .

本実施例では、第１空間４０内の搬送ローラ５２が第１駆動装置５４に接続されており、第２空間４２内の搬送ローラ５２が第２駆動装置５６に接続されているが、このような構成に限定されない。例えば、第１空間４０内の搬送ローラ５２と第２空間４２内の搬送ローラ５２は１つの駆動装置に接続されていてもよい。また、第３駆動装置５８は出力を調整可能な構成となっているが、このような構成に限定されない。第３駆動装置５８の出力を切替えることなく、連通通路３６と第１空間４０の一部と第２空間４２の一部に配置される搬送ローラ５２が、低速回転したり、高速回転したりすることができる構成としてもよい。例えば、搬送装置は、第１駆動装置５４及び第２駆動装置５６より搬送ローラ５２を高速回転させるように駆動する第４駆動装置を備えていてもよい。このような場合には、連通通路３６に配置される搬送ローラ５２は、搬送ローラ５２を低速回転させる駆動装置（すなわち、第１駆動装置５４又は第２駆動装置５６）と高速回転させる駆動装置（すなわち、第４駆動装置）とにクラッチ機構によって切り換え可能に接続されていてもよい。 In this embodiment, the conveying rollers 52 in the first space 40 are connected to the first driving device 54, and the conveying rollers 52 in the second space 42 are connected to the second driving device 56. configuration. For example, the transport rollers 52 in the first space 40 and the transport rollers 52 in the second space 42 may be connected to one driving device. Further, although the third driving device 58 has a configuration in which the output can be adjusted, it is not limited to such a configuration. Without switching the output of the third driving device 58, the conveying rollers 52 arranged in the communication passage 36, part of the first space 40 and part of the second space 42 rotate at low speed or at high speed. It is good also as a structure which can do it. For example, the conveying device may include a fourth driving device that drives the conveying rollers 52 to rotate faster than the first driving device 54 and the second driving device 56 . In such a case, the conveying rollers 52 arranged in the communication passage 36 are driven by a driving device (that is, the first driving device 54 or the second driving device 56) that rotates the conveying rollers 52 at low speed and a driving device (that is, the first driving device 54 or the second driving device 56) that rotates at high speed. That is, it may be switchably connected to the fourth driving device by a clutch mechanism.

次に、被処理物１２を熱処理する際の熱処理炉１０の動作について説明する。被処理物１２を熱処理するためには、まず、ヒータ４４ａ～４４ｄを作動させて、第１空間４０と第２空間４２の雰囲気温度を設定した温度とする。次いで、搬送ローラ５２上に被処理物１２を載せる。次いで、第１駆動装置５４、第２駆動装置５６、第３駆動装置５８を作動させて、熱処理炉１０の開口２８ａから、第１空間４０、連通通路３６及び第２空間４２を通って、熱処理炉１０の開口２８ｂまで被処理物１２を搬送する。これによって、被処理物１２が熱処理される。なお、図２に示すように、実施例では、被処理物１２を搬送ローラ５２の軸線方向（すなわち、Ｙ方向）に１つ載置して熱処理炉１０内を搬送しているが、このような構成に限定されない。例えば、熱処理炉は、被処理物１２を搬送ローラ５２の軸線方向に複数並べた状態で被処理物１２を搬送するように構成されていてもよい。 Next, the operation of the heat treatment furnace 10 when heat-treating the workpiece 12 will be described. In order to heat-treat the workpiece 12, first, the heaters 44a to 44d are operated to set the atmospheric temperatures of the first space 40 and the second space 42 to the set temperatures. Next, the object to be processed 12 is placed on the transport rollers 52 . Next, the first driving device 54, the second driving device 56, and the third driving device 58 are operated to drive the heat treatment from the opening 28a of the heat treatment furnace 10 through the first space 40, the communication passage 36, and the second space 42. The object 12 to be processed is conveyed to the opening 28b of the furnace 10 . Thereby, the workpiece 12 is heat-treated. As shown in FIG. 2, in the embodiment, one object 12 to be treated is placed in the axial direction (that is, the Y direction) of the conveying roller 52 and conveyed through the heat treatment furnace 10. configuration. For example, the heat treatment furnace may be configured to transport the workpieces 12 in a state in which a plurality of workpieces 12 are arranged in the axial direction of the transport rollers 52 .

被処理物１２の搬送についてさらに詳細に説明する。まず、被処理物１２は、開口２８ａから搬入された後、第１空間４０を搬送される。第１空間４０では、第１駆動装置５４の作動によって搬送ローラ５２が回転し、被処理物１２が搬送される。このとき、第３駆動装置５８は第１駆動装置５４と略同一の出力で駆動しており、第３駆動装置５８に接続される搬送ローラ５２は、第１駆動装置５４に接続される搬送ローラ５２と略同一の速度で回転する。このため、被処理物１２は、開口２８ａから第１空間４０を搬送され、第１空間４０から搬出されるまでの間、略同一の速度で搬送される。被処理物１２は、第１空間４０を搬送される間、第１空間４０内の雰囲気温度で熱処理される。 A more detailed description will be given of the transport of the object 12 to be processed. First, the object 12 to be processed is conveyed through the first space 40 after being carried in through the opening 28a. In the first space 40, the conveying roller 52 is rotated by the operation of the first driving device 54, and the workpiece 12 is conveyed. At this time, the third driving device 58 is driven with substantially the same output as the first driving device 54, and the conveying rollers 52 connected to the third driving device 58 are driven by the conveying rollers connected to the first driving device 54. It rotates at substantially the same speed as 52 . Therefore, the workpiece 12 is conveyed through the first space 40 through the opening 28 a and is conveyed at substantially the same speed until it is unloaded from the first space 40 . The workpiece 12 is heat-treated at the ambient temperature in the first space 40 while being transported through the first space 40 .

被処理物１２が第１空間４０の下流側まで搬送されると、第３駆動装置５８は搬送ローラ５２を高速回転させる出力で駆動する。第３駆動装置５８の出力は、隔壁３０ａの第１部分３２ａの第１空間４０側に設置されるセンサ６２ａが被処理物１２を検出することによって変更される。例えば、センサ６２ａ及び後述のセンサ６２ｂには、光学式のセンサを用いることができ、センサ６２ａ、６２ｂは、被処理物１２が光路を遮るか否かを検出することができる。センサ６２ａが被処理物１２の前端を検出すると、制御装置６０は、第３駆動装置５８の出力を大きくする。すると、被処理物１２は、第１空間４０から連通通路３６まで高速で搬送される。 When the workpiece 12 is conveyed to the downstream side of the first space 40, the third driving device 58 drives the conveying roller 52 with an output to rotate it at high speed. The output of the third driving device 58 is changed by detecting the object 12 to be processed by the sensor 62a installed on the first space 40 side of the first portion 32a of the partition wall 30a. For example, an optical sensor can be used for the sensor 62a and a sensor 62b described later, and the sensors 62a and 62b can detect whether or not the object 12 blocks the optical path. When the sensor 62a detects the front end of the workpiece 12, the control device 60 increases the output of the third driving device 58. As shown in FIG. Then, the workpiece 12 is conveyed from the first space 40 to the communication passage 36 at high speed.

上述したように、隔壁３０ａ、３０ｂは第１空間４０の雰囲気温度と第２空間４２の雰囲気温度を分離するために設けられており、隔壁３０ａ、３０ｂの間に形成される連通通路３６は被処理物１２を第１空間４０から第２空間４２に搬送するために設けられている。このため、連通通路３６を搬送される間、被処理物１２は熱処理されない。被処理物１２が連通通路３６を高速搬送されることによって、被処理物１２の熱処理に寄与しない連通通路３６内を短時間で搬送することができる。また、被処理物１２を熱処理する温度を変化させるときには、温度変化の前後において温度差を被処理物１２に応じた温度にすることが好ましい。連通通路３６において被処理物１２を高速搬送することによって、被処理物１２を、第１空間４０の雰囲気温度から第２空間４２の雰囲気温度まで急速に昇温することができる。 As described above, the partition walls 30a and 30b are provided to separate the ambient temperature of the first space 40 and the ambient temperature of the second space 42, and the communication passage 36 formed between the partition walls 30a and 30b is covered. It is provided for transporting the workpiece 12 from the first space 40 to the second space 42 . Therefore, the workpiece 12 is not heat-treated while being conveyed through the communication passage 36 . Since the object 12 to be processed is conveyed through the communication passage 36 at high speed, the object 12 to be processed can be conveyed in a short time through the communication passage 36 which does not contribute to the heat treatment. Moreover, when changing the temperature for heat-treating the object 12 to be processed, it is preferable to set the temperature difference before and after the temperature change according to the object 12 to be processed. By conveying the workpiece 12 at high speed in the communication passage 36 , the temperature of the workpiece 12 can be rapidly raised from the ambient temperature of the first space 40 to the ambient temperature of the second space 42 .

また、上述したように、第３空間３８には、ヒータが配置されていない。このため、第３空間３８の搬送方向の寸法は、ヒータを設置可能な大きさにする必要がなく、小さくすることができる。また、第３空間３８の搬送方向の寸法は、第１部分３２ａ、３２ｂ及び第２部分３４ａ、３４ｂの搬送方向の寸法より小さくされている。このような寸法にすることによって、第１部分３２ａ、３２ｂ及び第２部分３４ａ、３４ｂの搬送方向の寸法（厚さ）を確保すると共に、隔壁３０ａ、３０ｂ全体の搬送方向の寸法（すなわち、連通通路３６の搬送方向の寸法）を小さくすることができる。本実施例では、第２空間４２の雰囲気温度が第１空間４０の雰囲気温度より高く設定されているため、特に、第２部分３４ａ、３４ｂの搬送方向の厚さを十分に確保する必要がある。第２空間４２側に配置される第２部分３４ａ、３４ｂの搬送方向の寸法Ｌ２を第３空間３８の搬送方向の寸法Ｌ１より大きくすることによって、第２部分３４ａ、３４ｂの搬送方向の厚さを十分に確保できると共に、隔壁３０ａ、３０ｂの搬送方向の寸法を小さくすることができる。このように、連通通路３６の搬送方向の寸法を小さくすることによって、被処理物１２を熱処理に寄与しない連通通路３６内を短時間で搬送することができる。 Further, as described above, no heater is arranged in the third space 38 . Therefore, the dimension of the third space 38 in the transport direction does not need to be large enough to install the heater, and can be made small. Also, the dimension of the third space 38 in the transport direction is smaller than the dimension of the transport direction of the first portions 32a, 32b and the second portions 34a, 34b. By setting such dimensions, the dimension (thickness) in the transport direction of the first portions 32a, 32b and the second portions 34a, 34b is ensured, and the dimension (thickness) of the entire partition walls 30a, 30b in the transport direction (that is, the communication dimension of the passage 36 in the conveying direction) can be reduced. In this embodiment, since the ambient temperature of the second space 42 is set higher than the ambient temperature of the first space 40, it is particularly necessary to ensure a sufficient thickness in the transport direction of the second portions 34a and 34b. . By making the transport direction dimension L2 of the second portions 34a and 34b arranged on the second space 42 side larger than the transport direction dimension L1 of the third space 38, the thickness of the second portions 34a and 34b in the transport direction can be sufficiently ensured, and the dimensions of the partition walls 30a and 30b in the transport direction can be reduced. By reducing the dimension of the communication passage 36 in the conveying direction in this way, the workpiece 12 can be conveyed in a short time through the communication passage 36 that does not contribute to the heat treatment.

被処理物１２が連通通路３６を搬送されると、第３駆動装置５８の出力は第２駆動装置５６と略同一の出力に切替えられる。すると、第３駆動装置５８に接続される搬送ローラ５２は、第２駆動装置５６に接続される搬送ローラ５２と略同一の速度で回転する。第３駆動装置５８の出力は、隔壁３０ａの第２部分３４ａの第２空間４２側に設置されるセンサ６２ｂが被処理物１２を検出することによって変更される。具体的には、センサ６２ｂが被処理物１２の後端を検出すると、制御装置６０は、第３駆動装置５８の出力を小さくする。すると、被処理物１２は、第２空間４２を低速で搬送される。被処理物１２は、第２空間４２を搬送される間、第２空間４２内の雰囲気温度で熱処理される。被処理物１２は、第２空間４２を搬送され、開口２８ｂから熱処理炉１０の外部へ搬出される。 When the workpiece 12 is conveyed through the communication passage 36 , the output of the third driving device 58 is switched to substantially the same output as that of the second driving device 56 . Then, the conveying rollers 52 connected to the third driving device 58 rotate at substantially the same speed as the conveying rollers 52 connected to the second driving device 56 . The output of the third driving device 58 is changed when the object 12 to be processed is detected by the sensor 62b installed on the second space 42 side of the second portion 34a of the partition wall 30a. Specifically, when the sensor 62b detects the rear end of the workpiece 12, the control device 60 reduces the output of the third driving device 58. As shown in FIG. Then, the workpiece 12 is conveyed through the second space 42 at a low speed. The workpiece 12 is heat-treated at the ambient temperature in the second space 42 while being transported through the second space 42 . The object 12 to be processed is conveyed through the second space 42 and carried out of the heat treatment furnace 10 through the opening 28b.

以上、本明細書に開示の技術の具体例を詳細に説明したが、これらは例示に過ぎず、特許請求の範囲を限定するものではない。特許請求の範囲に記載の技術には、以上に例示した具体例を様々に変形、変更したものが含まれる。また、本明細書または図面に説明した技術要素は、単独であるいは各種の組合せによって技術的有用性を発揮するものであり、出願時請求項記載の組合せに限定されるものではない。 Although specific examples of the technology disclosed in this specification have been described above in detail, these are merely examples and do not limit the scope of the claims. The technology described in the claims includes various modifications and changes of the specific examples illustrated above. In addition, the technical elements described in this specification or in the drawings exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing.

１０：熱処理炉
１２：被処理物
２０：炉体
２２：天井壁
２４：底壁
２６ａ、２６ｂ、２６ｃ、２６ｄ：側壁
２８ａ、２８ｂ：開口
３０ａ、３０ｂ：隔壁
３６：連通通路
４０：第１空間
４２：第２空間
４４ａ、４４ｂ、４４ｃ、４４ｄ：ヒータ
４６ａ、４６ｂ、４６ｃ、４６ｄ：給気流路
４８ａ、４８ｂ、４８ｃ、４８ｄ：排気流路
５２：搬送ローラ
５４：第１駆動装置
５６：第２駆動装置
５８：第３駆動装置
６０：制御装置 10: Heat Treatment Furnace 12: Workpiece 20: Furnace Body 22: Ceiling Wall 24: Bottom Walls 26a, 26b, 26c, 26d: Side Walls 28a, 28b: Openings 30a, 30b: Partition 36: Communication Passage 40: First Space 42 : Second spaces 44a, 44b, 44c, 44d: Heaters 46a, 46b, 46c, 46d: Air supply channels 48a, 48b, 48c, 48d: Exhaust channel 52: Conveying rollers 54: First driving device 56: Second driving Device 58: Third drive device 60: Control device

Claims (3)

被処理物を熱処理する熱処理炉であって、
前記被処理物を第１の温度で熱処理する第１空間と、前記被処理物を前記第１の温度と異なる第２の温度で熱処理する第２空間と、前記第１空間と前記第２空間とを隔離する隔壁と、を備える炉体と、
前記第１空間の一端から前記第２空間の他端まで前記被処理物を搬送する搬送装置と、を備えており、
前記隔壁は、
前記第１空間と前記第２空間とを連通させる連通通路と、
前記隔壁内に設けられ、前記第１空間及び前記第２空間から隔離されると共に前記連通通路と連通する第３空間と、を備えており、
前記隔壁は、前記第１空間と前記第３空間とを隔離する第１部分と、前記第２空間と前記第３空間とを隔離する第２部分と、をさらに備えており、
前記第１の温度は、前記第２の温度より高くされており、
前記第３空間の搬送方向の寸法は、前記第１部分の搬送方向の寸法より小さくされており、
前記炉体に設けられ、その一端が前記第３空間と連通する一方でその他端が前記炉体の外部に連通し、前記第３空間内のガスを前記炉体の外部に排出する排気流路と、
前記炉体に設けられ、その一端が前記第３空間と連通する一方でその他端が前記炉体の外部に連通し、前記炉体の外部から前記第３空間内にガスを供給する給気流路と、をさらに備えており、
前記搬送装置は、前記第３空間を前記被処理物が搬送されるときの搬送速度が、前記第１空間を前記被処理物が搬送されるときの搬送速度より大きく、かつ、前記第２空間を前記被処理物が搬送されるときの搬送速度よりも大きくなるように構成されている、熱処理炉。 A heat treatment furnace for heat-treating an object to be treated,
A first space for heat-treating the object to be processed at a first temperature, a second space for heat-treating the object to be processed at a second temperature different from the first temperature, the first space and the second space A furnace body comprising a partition wall that isolates the
a transport device that transports the object to be processed from one end of the first space to the other end of the second space,
The partition is
a communication passage that connects the first space and the second space;
a third space provided in the partition wall, isolated from the first space and the second space, and communicating with the communication passage;
The partition wall further comprises a first portion that separates the first space and the third space, and a second portion that separates the second space and the third space,
The first temperature is higher than the second temperature,
The dimension of the third space in the conveying direction is smaller than the dimension of the first portion in the conveying direction ,
An exhaust passage provided in the furnace body, one end of which communicates with the third space and the other end of which communicates with the outside of the furnace body, for discharging gas in the third space to the outside of the furnace body When,
An air supply passage provided in the furnace body, one end of which communicates with the third space and the other end of which communicates with the outside of the furnace body, for supplying gas from the outside of the furnace body into the third space. and further comprising
In the transport device, a transport speed when the object to be processed is transported in the third space is higher than a transport speed when the object to be processed is transported in the first space, and the second space is higher than the transport speed at which the object to be processed is transported . 被処理物を熱処理する熱処理炉であって、
前記被処理物を第１の温度で熱処理する第１空間と、前記被処理物を前記第１の温度と異なる第２の温度で熱処理する第２空間と、前記第１空間と前記第２空間とを隔離する隔壁と、を備える炉体と、
前記第１空間の一端から前記第２空間の他端まで前記被処理物を搬送する搬送装置と、を備えており、
前記隔壁は、
前記第１空間と前記第２空間とを連通させる連通通路と、
前記隔壁内に設けられ、前記第１空間及び前記第２空間から隔離されると共に前記連通通路と連通する第３空間と、を備えており、
前記隔壁は、前記第１空間と前記第３空間とを隔離する第１部分と、前記第２空間と前記第３空間とを隔離する第２部分と、をさらに備えており、
前記第２の温度は、前記第１の温度より高くされており、
前記第３空間の搬送方向の寸法は、前記第２部分の搬送方向の寸法より小さくされており、
前記炉体に設けられ、その一端が前記第３空間と連通する一方でその他端が前記炉体の外部に連通し、前記第３空間内のガスを前記炉体の外部に排出する排気流路と、
前記炉体に設けられ、その一端が前記第３空間と連通する一方でその他端が前記炉体の外部に連通し、前記炉体の外部から前記第３空間内にガスを供給する給気流路と、をさらに備えており、
前記搬送装置は、前記第３空間を前記被処理物が搬送されるときの搬送速度が、前記第１空間を前記被処理物が搬送されるときの搬送速度より大きく、かつ、前記第２空間を前記被処理物が搬送されるときの搬送速度よりも大きくなるように構成されている、熱処理炉。 A heat treatment furnace for heat-treating an object to be treated,
A first space for heat-treating the object to be processed at a first temperature, a second space for heat-treating the object to be processed at a second temperature different from the first temperature, the first space and the second space A furnace body comprising a partition wall that isolates the
a transport device that transports the object to be processed from one end of the first space to the other end of the second space,
The partition is
a communication passage that connects the first space and the second space;
a third space provided in the partition wall, isolated from the first space and the second space, and communicating with the communication passage;
The partition wall further comprises a first portion that separates the first space and the third space, and a second portion that separates the second space and the third space,
The second temperature is higher than the first temperature,
The dimension of the third space in the transport direction is smaller than the dimension of the second portion in the transport direction ,
An exhaust passage provided in the furnace body, one end of which communicates with the third space and the other end of which communicates with the outside of the furnace body, for discharging gas in the third space to the outside of the furnace body When,
An air supply passage provided in the furnace body, one end of which communicates with the third space and the other end of which communicates with the outside of the furnace body, for supplying gas from the outside of the furnace body into the third space. and further comprising
In the transport device, a transport speed when the object to be processed is transported in the third space is higher than a transport speed when the object to be processed is transported in the first space, and the second space is higher than the transport speed at which the object to be processed is transported . 前記炉体には、前記第１空間内に配置され、前記第１空間内を前記第１の温度に調整可能な第１ヒータと、前記第２空間内に配置され、前記第２空間内を前記第２の温度に調整可能な第２ヒータと、が設けられている一方、前記第３空間内にはヒータが設けられていない、請求項１又は２に記載の熱処理炉。
The furnace body includes a first heater arranged in the first space and capable of adjusting the inside of the first space to the first temperature; 3. The heat treatment furnace according to claim 1, further comprising a second heater that can be adjusted to the second temperature, while no heater is provided in the third space.
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