CN104422276A

CN104422276A - Heat treatment furnace and heat treatment method

Info

Publication number: CN104422276A
Application number: CN201410411951.8A
Authority: CN
Inventors: 桥本孝彦; 新井诚
Original assignee: NGK Insulators Ltd; NGK Kilntech Corp
Current assignee: NGK Insulators Ltd; NGK Kilntech Corp
Priority date: 2013-08-26
Filing date: 2014-08-20
Publication date: 2015-03-18
Anticipated expiration: 2034-08-20
Also published as: TWI637141B; JP6192493B2; JP6186039B2; CN104422276B; JP2016156612A; TW201525395A; KR20150024260A; JP2015064189A

Abstract

In a heat treatment furnace (10), the atmosphere inside a first space (11a) is heated through a first heater (21a). The atmosphere in a second space (11) is heated through a second heater (21b). The atmospheric temperature of the second space (11b) is made to be higher than that of the first space (11a). Under the state, a processed object (96) in the first space (11a) is conveyed through a first conveying roller (20a), and passes through a conveying path (11c) before being conveyed to a second conveying roller (20b) through a variable-speed conveying roller (20c) in a specified speed higher than the speeds of the first conveying roller and the second conveying roller (20a) (20b) and within a variable-speed range. The clearance height (H) of the conveying path (11c) ranges from 25 mm to 35 mm. The length of the conveying path (11c) along the conveying direction is more than three times the clearance height (H).

Description

Heat-treatment furnace and heat treatment method

Technical field

The present invention relates to a kind of heat-treatment furnace and heat treatment method.

Background technology

In the prior art, the heat-treatment furnace of heat-treating treated object is known to people.Such as in patent document 1, describe be made up of matrix material and electrode with the transfer of multiple roller by the roller kilns of heat-treating while burning till product.And describe: in these roller kilns, burnt till in the process in usual carrying region of product with usual speed carrying, be provided with and burnt till the high speed carrying region of product with the speed carrying higher than usual speed.In addition, describe: carrying in the furnace chamber in region at a high speed, be provided with the heating source for exporting the output being greater than carrying region usually.Accordingly, can make to be burnt till product at a high speed carrying region and heat up rapidly, can make by the contraction of the matrix material that burns till in product and electrode close for opportunity.

Prior art document

Patent document 1: Japanese Laid-Open 2009-229013 publication

Summary of the invention

The problem that invention will solve

But, when making treated object heat up rapidly, be necessary the suitable value being arranged to the temperature difference of front and back of heating up to correspond to treated object.But from the side in space to the impact of opposite side radiation etc. before and after heating up, the temperature difference before and after heating up can not increase, and there is the situation of the suitable temperature difference that can not be formed corresponding to treated object thus.In addition, even if when making treated object rapid cooling, the temperature difference before and after cooling can not form the suitable temperature difference corresponding to treated object equally.So, pursue a kind of temperature difference in space, front and back that can make and become larger, can realize corresponding to the intensification rapidly of various treated object or the heat-treatment furnace of rapid cooling (rapidly heating and cooling).

The present invention makes in view of above-mentioned actual conditions, and its main purpose is the heating and cooling rapidly that can realize corresponding to various treated object.

The method of dealing with problems

Heat-treatment furnace of the present invention is, to the heat-treatment furnace that treated object is heat-treated, it possesses:

Body of heater, it has for the formation of the outer wall of inner space, to be separated described inner space be the next door in the first space and second space, be formed with the gap that the height (H) of vertical is more than 25mm below 35mm in described next door, described gap is formed and this first space is communicated with this second space and carrying path for carrying described treated object;

Thermostat unit, it is for making described first room atmosphere different with described second space atmosphere temperature; And

Handling unit, it carries described treated object according to the order in described first space, in described carrying path, described second space.

In heat-treatment furnace of the present invention, under the state making the first room atmosphere different with the temperature of second space atmosphere, according to the order carrying treated object in the first space, in carrying path, second space.Accordingly, treated object is carried to the different second space of temperature, thus by heating and cooling rapidly from the first space through in carrying path.Then, the clearance height H carrying the vertical of path is set as more than 25mm below 35mm.By making clearance height H be set as below 35mm, suppressing being radiated through carrying path of side from the first space and second space thus and arriving opposite side.Accordingly, the temperature difference of the first room atmosphere and second space atmosphere is easily made to become large.Therefore, easily make the temperature difference before and after heating and cooling be formed as corresponding to the suitable value of treated object, thus the heating and cooling rapidly corresponding to various treated object can be realized.In addition, by making clearance height H be set as more than 25mm, the gap that treated object passes fully can be guaranteed thus.Herein, clearance height H is, the gap length of vertical when carrying path is observed in the carrying direction along handling unit.In addition, when when carrying path is observed in the carrying direction along handling unit, the gap length of vertical exists different places, using minimum of a value as clearance height H.Herein, described treated object is, the component carried by described handling unit under the state that it is placed in load bearing board (setter).

In heat-treatment furnace of the present invention, described thermostat unit can be possess for heat or cool described first room atmosphere temperature the first thermostat unit and for heating or cooling the unit of at least one in the second thermostat unit of described second space atmosphere.In addition, for described first thermostat unit, can be the first heating unit for heating described first room atmosphere, also can be the first cooling unit for cooling the first room atmosphere.For described second thermostat unit, can be the second heating unit for heating described second space atmosphere, also can be the second cooling unit cooling described second space atmosphere.When possessing described first heating unit, for described second heating unit, can be by the heating temperatures of described second space atmosphere to the unit higher than described first space temperature, also can be to the unit lower than described first space temperature by the heating temperatures of described second space atmosphere.When possessing the first heating unit, for described second cooling unit, can be that the temperature of described second space atmosphere is cooled to the unit lower than described first space temperature.When possessing described first cooling unit, to described second heating unit, can be to the unit higher than described first space temperature by the heating temperatures of described second space atmosphere.When possessing described first cooling unit, for described second cooling unit, can be that the temperature of described second space atmosphere is cooled to the unit higher than described first space temperature, also can be that the temperature of described second space atmosphere is cooled to the unit lower than the temperature in described first space.In addition, for described first heating unit, can be described first room atmosphere is heated to the unit of 500 DEG C-850 DEG C.For described second heating unit, can be described second space atmosphere is heated to the unit of 1000 DEG C-1350 DEG C.In addition, for described thermostat unit, in the mode making the temperature difference of described first room atmosphere and described second space atmosphere be formed as 400 DEG C-600 DEG C, can heat or cool at least one in this first space and this second space.

In heat-treatment furnace of the present invention, the carrying direction length L of described carrying path can be more than 3 times of described clearance height H.By making carrying direction length L be arranged to more than 3 times of clearance height H, suppressing being radiated through carrying path of side from the first space and second space and arriving opposite side.Accordingly, easily make the temperature difference of the first room atmosphere and second space atmosphere become large, thus the heating and cooling rapidly corresponding to more eurypalynous treated object can be realized.

In heat-treatment furnace of the present invention, described handling unit can have: the first handling unit, and it for carrying described treated object in described first space; Second handling unit, it for carrying described treated object in described second space; Variable-ratio handling unit, its for will by described first handling unit carrying described treated object, carrying direction along regulation is carried to described second handling unit through in described carrying path, and in the variable-ratio region that speed is greater than the speed of described first handling unit and described second handling unit, described transporting velocity can be changed.For the warming and cooling rate (temperature changing speed) of treated object, although change according to the transporting velocity in carrying path, this transporting velocity can change in the scope in variable-ratio region.Therefore, it is possible to correspond to treated object and change warming and cooling rate, thus the heating and cooling rapidly corresponding to various treated object can be realized.Herein, described variable-ratio region can be, in the mode that the warming and cooling rate made through described treated object during described carrying path at least can change in the scope of 150 DEG C/min-750 DEG C/min, and the region of setting, also can be at least can change in the scope of 150 DEG C/min-1000 DEG C/min, and the region of setting.In addition, for described treated object, can be carried by first, second handling unit described and described variable-ratio handling unit under the state being placed in load bearing board.In addition, when variable-ratio region is identical number range, the temperature difference in first, second space is larger, and the transformable scope of warming and cooling rate becomes larger.In addition, when the temperature difference in first, second space is identical value, the number range in variable-ratio region is larger, and the transformable scope of warming and cooling rate becomes larger.

In addition, in heat-treatment furnace of the present invention, can possess: speed acquiring unit, it is for obtaining the fixing speed in described variable-ratio region when carrying out described heat treatment; With variable-ratio carrying control unit, it makes to carry described treated object with described fixing speed for controlling described variable-ratio handling unit.In this case, described speed acquiring unit can be that user is for inputting the unit of described fixing speed.In addition, for described speed acquiring unit, can be according to the information of user's input and be stored in advance in the information of memory cell at least any one and derive the unit of described fixing speed.

In heat-treatment furnace of the present invention, described handling unit has multiple carrying roller, and the plurality of carrying roller carries described treated object along the horizontal direction as carrying direction in described carrying path; Described next door also can have the next door, top on the upside of the vertical being positioned at described carrying path and be positioned at the next door, bottom on the downside of the vertical of described carrying path; The more than one upper end in next door, described bottom, in described carrying direction between described multiple carrying roller, and is positioned at the position identical or closer to the top with the lower end of described multiple carrying roller in vertical and also can.Accordingly, when to observe carrying path along carrying direction, roller lower end and next door, bottom gap up and down can be eliminated.Accordingly, suppress being radiated through this gap of side from the first space and second space and arrive opposite side.Therefore, easily make the temperature difference of the first room atmosphere and second space atmosphere become large, thus the heating and cooling rapidly corresponding to more eurypalynous treated object can be realized.In addition, " along horizontal direction carrying " comprising: the meaning of the situation along approximate horizontal carrying of the situation that the mounting position of the situation or heat-treatment furnace that produce distortion because of the foozle of heat-treatment furnace or use tilts from horizontal direction etc.

In this case, next door, described bottom possesses the more than one convex shaped part with described upper end, the shape that the width that this convex shaped part can be formed as carrying described in it direction more more diminishes towards described upper end on the upside of vertical.That is, convex shaped part, can be formed as following shape: when observing from the direction vertical with the carrying direction the carrying path of handling unit and vertical, towards the shape that top, upper end comes to a point.Accordingly, in carrying direction, the upper end in next door, bottom is configured between multiple carrying roller, in the situations such as next door, bottom thermal expansion, easily avoids roller to contact with next door, bottom (convex shaped part) simultaneously.

Heat treatment method of the present invention, it is to the heat treatment method that treated object is heat-treated in heat-treatment furnace, described heat-treatment furnace possesses body of heater, described body of heater has the first space, second space, formation carrying path and separate the next door of this first space and this second space, wherein, described carrying path this first space is communicated with and path for carrying treated object, and the clearance height H of its vertical is more than 25mm below 35mm, wherein

Described heat treatment method comprises: under the state making described first room atmosphere different with the temperature of described second space atmosphere, carry the technique of described treated object according to the order in described first space, in described carrying path, described second space.

In heat treatment method of the present invention, treated object is carried to the different second space of temperature, thus by heating and cooling rapidly from the first space through in carrying path.Further, the clearance height H-shaped of carrying the vertical of path becomes more than 25mm below 35mm.By clearance height H is set as below 35mm, suppresses being radiated through carrying path of side from the first space and second space thus and arrive opposite side.Accordingly, the temperature difference of the first room atmosphere and second space atmosphere is easily made to become large.Therefore, easily make the temperature difference before and after heating and cooling be formed as corresponding to the suitable value of treated object, thus the heating and cooling rapidly corresponding to various treated object can be realized.In addition, by clearance height H is set as more than 25mm, the gap that treated object passes fully can be guaranteed thus.

In heat treatment method of the present invention, the carrying direction length L of described carrying path can be more than 3 times of described clearance height H.By making carrying direction length L be arranged to more than 3 times of clearance height H, suppressing being radiated through carrying path of side from the first space and second space thus and arriving opposite side.Accordingly, easily make the temperature difference of the first room atmosphere and second space atmosphere become large, thus the heating and cooling rapidly corresponding to more eurypalynous treated object can be realized.

In heat treatment method of the present invention, described heat-treatment furnace possesses: the first handling unit, and it for carrying described treated object in described first space, second handling unit, it for carrying described treated object in described second space, variable-ratio handling unit, its for will by described first handling unit carrying described treated object, carrying direction along regulation is carried to described second handling unit through in described carrying path, and in the variable-ratio region that speed is greater than the speed of described first handling unit and described second handling unit, this transporting velocity can be changed, in the process, can under the state making described first room atmosphere different with the temperature of described second space atmosphere, by the treated object be carried to by described first handling unit in described first space, described second handling unit is carried to the fixing speed in described variable-ratio region through in described carrying path by described variable-ratio handling unit.For the warming and cooling rate (temperature changing speed) of treated object, although change according to the transporting velocity in carrying path, this transporting velocity can be able to change in the scope in variable-ratio region.Therefore, it is possible to correspond to treated object and change warming and cooling rate, thus the heating and cooling rapidly corresponding to various treated object can be realized.

In heat treatment method of the present invention, described variable-ratio region is, in the mode that the temperature changing speed made through described treated object during described carrying path at least can change in the scope of 150 DEG C/min-1000 DEG C/min, and the region of setting, in the process, described treated object is handled upside down under the state being placed in load bearing board, as the physics value under the normal temperature of described load bearing board, can respectively: bending strength is 100MPa-250MPa, Young's modulus is 200GPa-350GPa, thermal coefficient of expansion is 4ppm/K-5ppm/K, pyroconductivity is 50W/mK-200W/mK.The temperature changing speed (warming and cooling rate) of treated object is when above-mentioned scope can change, meet the load bearing board of above-mentioned number range by using, thus in the scope of the warming and cooling rate that can change the heat resistance of load bearing board and temperature following (temperature following capacity) very abundant.Accordingly, same load bearing board also can be used to heat-treat even if warming and cooling rate changes, without the need to preparing the polytype load bearing board corresponding to warming and cooling rate.Herein, the bending strength of load bearing board is four-point bending intensity.

In this case, described load bearing board can be made up of in conjunction with SiC or recrystallization SiC Si.The load bearing board be made up of in conjunction with SiC or recrystallization SiC Si, its bending strength, Young's modulus, thermal coefficient of expansion and thermal conductivity ratio are easier to meet above-mentioned number range, are therefore suitable for heat treatment method of the present invention.

In heat treatment method of the present invention, described handling unit has multiple carrying roller, and the plurality of carrying roller is used for carrying described treated object along the horizontal direction as carrying direction in described carrying path; Described next door also can have the next door, top on the upside of the vertical being positioned at described carrying path and be positioned at the next door, bottom on the downside of the vertical of described carrying path; The more than one upper end in next door, described bottom, in described carrying direction between described multiple carrying roller, and is positioned at the position identical or closer to the top with the lower end of described multiple carrying roller in vertical and also can.Accordingly, when to observe carrying path along carrying direction, roller lower end and next door, bottom gap up and down can be eliminated.Accordingly, suppress being radiated through this gap of side from the first space and second space and arrive opposite side.Therefore, easily make the temperature difference of the first room atmosphere and second space atmosphere become large, thus the intensification rapidly corresponding to more eurypalynous treated object can be realized.

In this case, next door, described bottom possesses the more than one convex shaped part with described upper end, the shape that the width that this convex shaped part can be formed as carrying described in it direction more more diminishes towards described upper end on the upside of vertical.Accordingly, in carrying direction, the upper end in next door, bottom is configured between multiple carrying roller, in the situations such as next door, bottom thermal expansion, easily avoids roller to contact with next door, bottom (convex shaped part) simultaneously.

Accompanying drawing explanation

Fig. 1 is the profilograph of the heat-treatment furnace 10 of the first embodiment.

Fig. 2 be observe Fig. 1 from front carrying path 11c around A view.

Fig. 3 is the stereogram around carrying path 11c.

Fig. 4 is the profilograph of the heat-treatment furnace 110 of the second embodiment.

Description of reference numerals

10,110: heat-treatment furnace; 10a, 110a: body of heater; 11,111: outer wall; 11a, 11b: first, second space; 11c, 111c: carrying path; 12: front end face; 13,113: rear end face; 14,15,115: opening; 16,17,117: gas supply opening; 18,19,119: flow export; 20a, 20b: first, second carries roller; 20c: variable-ratio carrying roller; 21a, 21b: first, second heater; 22,24,124: gas supply device; 26,28,128: flow control valve; 30,130: wall part; 31,131: next door, top; 32,132 main parts; 33,133: crossbeam; 35,135: next door, bottom; 36,136: main part; 37a, 37b, 137a, 137b: convex shaped part; 38a, 38b, 138a, 138b: upper end; 80: controller; 81:CPU; 82: flash memory; 83: corresponding relation data; 84:RAM; 85: speed acquisition unit; 86: carrying control part; 88: guidance panel; 95: load bearing board; 96: treated object; 111b: the three space; 120b: the three carrying roller; 140: cooling tube; 142,144: air cooling sleeve pipe; 146,148: refrigerant source of supply.

Detailed description of the invention

[the first embodiment]

Then, accompanying drawing is used to be described embodiment of the present invention.Fig. 1 is the profilograph of the heat-treatment furnace 10 of first embodiment of the invention.Fig. 2 be observe Fig. 1 from front carrying path 11c around A view.Fig. 3 is the stereogram around carrying path 11c.In addition, the diagram of outer wall 11 is eliminated in figure 3.Heat-treatment furnace 10 possesses: body of heater 10a; First, second carrying roller 20a, 20b; Variable-ratio carrying roller 20c; First, second heater 21a, 21b; Gas supply device 22,24; Flow control valve 26,28; And controller 80.This heat-treatment furnace 10 as: in the inside of body of heater 10a, carrying is placed with the load bearing board 95 of multiple treated object 96, roller kilns of simultaneously heat-treating treated object 96 and forming.

Body of heater 10a possesses outer wall 11 and is configured in the wall part 30 in outer wall 11.Outer wall 11 is the insulated structures forming roughly cuboid, has as the first space 11a, the second space 11b of inner space, carrying path 11c.In addition, outer wall 11 has: opening 14, and its front end face 12 (left side of Fig. 1) at outer wall 11 is formed, and becomes the entrance externally to the first space 11a; With opening 15, its rear end face 13 (right side of Fig. 1) at outer wall 11 is formed, and becomes from second space 11b outlet externally.First space 11a is the space surrounded by outer wall 11 and wall part 30.Second space 11b is the space surrounded by outer wall 11 and wall part 30.Carrying path 11c is the space that the first space 11a is communicated with second space 11b, and is formed by wall part 30.First space 11a, carrying path 11c, second space 11b, formed on fore-and-aft direction (left and right directions of Fig. 1) successively from opening 14 towards opening 15.

Wall part 30 is the insulated structures for separating the first space 11a and second space 11b, and possesses the next door, top 31 be positioned on the upside of vertical and the next door, bottom 35 be positioned on the downside of vertical.The carrying path 11c as the space of clamping from vertical above-below direction is formed by this next door, top 31 and next door, bottom 35.Next door, top 31 possesses main part 32 and crossbeam (beam) 33 (amplifier section with reference to dotted line frame S shown on the left of Fig. 1).Main part 32 is the components of the roughly cuboid such as formed by brick etc., and upper end and left and right end contact with outer wall 11.Main part 32 can be integrally formed, also can combine multiple component and be formed.Crossbeam 33 is such as formed by metal etc., is the tabular component using long dimensional directions as left and right directions.Crossbeam 33 is supported by the left and right end of outer wall 11, with the lower end in contact of main part 32 and from below supportive body portion 32 above it.Next door, bottom 35 is the components formed by brick etc., and possesses main part 36, convex shaped part 37a, 37b.Main part 36 is components of roughly cuboid.Convex shaped part 37a, 37b are the parts on the upside of the vertical in next door, bottom 35, and its lower end contacts with main part 36.Convex shaped part 37a, 37b are in the adjacent configuration of fore-and-aft direction.Convex shaped part 37a, 37b be, the triangle cylindrical component (with reference to Fig. 3) that the section vertical with left and right directions is triangular in shape.Therefore, for convex shaped part 37a, 37b, more on the upside of vertical, the width of fore-and-aft direction is less.Further, as upper end 38a, the 38b on the top, top (when observing from the section vertical with left and right directions, becoming the part of vertex of a triangle) of convex shaped part 37a, 37b, the upper end in next door, bottom 35 is formed as.In addition, main part 36 and convex shaped part 37a, convex shaped part 37b respectively can be integrally formed, also can combine multiple component and be formed.In addition, next door, bottom 35 entirety can be integrally formed.Wall part 30 is preferably formed by the material that pyroconductivity is low.

First carrying roller 20a is, the carrying roller along carrying direction configuration multiple (being eight in the present embodiment) of regulation and for carrying load bearing board 95 in the first space 11a.In addition, in the present embodiment, the carrying direction of the first carrying roller 21a is horizontal direction, is to face rearward direction (from the left side of Fig. 1 towards the direction on right side) in the past.By making the first carrying roller 20a rotate, the load bearing board 95 being placed with multiple treated object 96 is carried in the first space 11a from opening 14 along carrying direction.

Second carrying roller 20b is, the carrying roller along carrying direction configuration multiple (being eight in the present embodiment) of regulation and for carrying load bearing board 95 in second space 11b.In addition, in the present embodiment, to carry the carrying direction of roller 20a identical in the carrying direction and first of the second carrying roller 20b.By making the second carrying roller 20b rotate, the load bearing board 95 being placed with multiple treated object 96 is carried to opening 15 along carrying direction in second space 11b.

Variable-ratio carrying roller 20c is, to be configured between the first carrying roller 20a and second carrying roller 20b and carrying roller for carrying load bearing board 95.Variable-ratio carrying roller 20c from the first space 11a via carrying path 11c in second space 11b, the carrying direction along regulation is configured with multiple (being ten in the present embodiment).In addition, in the present embodiment, to carry the carrying direction of roller 20a identical in the carrying direction and first of variable-ratio carrying roller 20c.Carry roller 20c by making variable-ratio to rotate, the load bearing board 95 being placed with multiple treated object 96 is carried on carrying path 11c along carrying direction.In addition, be arranged in variable-ratio carrying roller 20c, the roller of the most upstream side in carrying direction, be configured in be arranged in the first carrying roller 20a, the side of the roller of the most downstream side in carrying direction, and the distance between two rollers is formed as the distance can carrying out mutually the handing-over of load bearing board 95.Similarly, be arranged in variable-ratio carrying roller 20c, the roller of the most downstream side in carrying direction, be configured in be arranged in the second carrying roller 20b, the side of the roller of the most upstream side in carrying direction, and the distance between two rollers is formed as the distance can carrying out mutually the handing-over of load bearing board 95.Accordingly, variable-ratio carrying roller 20c, makes the load bearing board 95 carried by the first carrying roller 20a be carried to the second carrying roller 20b through carrying path 11c.In addition, in the present embodiment, first, second carrying roller 20a, 20b, variable-ratio carrying roller 20c are identical diameter, and from opening 14 to opening 15 in the longitudinal direction to configure at equal intervals.In addition, this variable-ratio carrying roller 20c can be rotated with the speed being greater than first, second carrying roller 20a, 20b by not shown motor, and can regulate rotary speed.Accordingly, variable-ratio carrying roller 20c is greater than in the variable-ratio region of the transporting velocity of first, second carrying roller 20a, 20b in speed, can change the transporting velocity of load bearing board 95.Although be not particularly limited, in the present embodiment, variable-ratio region is the scope of 90mm/min-600mm/min.

Primary heater 21a is configured in the first space 11a.This primary heater 21a with from the mode of clamping the first carrying roller 20a and variable-ratio carrying roller 20c up and down, is configured with at the top of outer wall 11 and bottom multiple (in the present embodiment, up and down each four).The mode (left and right directions) that primary heater 21a intersects vertically with its long dimensional directions and carrying direction configures, and is configured with multiple along carrying direction.Primary heater 21a heats the atmosphere through the treated object 96 in the first space 11a or the first space 11a, such as, form as ceramic heaters such as SiC heaters.

Secondary heater 21b is configured in second space 11b.This secondary heater 21b with from the mode of clamping the second carrying roller 20b and variable-ratio carrying roller 20c up and down, is configured with at the top of outer wall 11 and bottom multiple (in the present embodiment, up and down each six).The mode (left and right directions) that secondary heater 21b intersects vertically with its long dimensional directions and carrying direction configures, and is configured with multiple along carrying direction.Secondary heater 21b heats the atmosphere through the treated object 96 in second space 11b or second space 11b, makes its temperature higher than the temperature of the first space 11a, such as, forms as ceramic heaters such as SiC heaters.

Gas supply device 22,24, respectively to first, second space 11a, 11b supply such as the inert gas such as nitrogen of atmosphere gas.This gas supply device 22,24 can be the device of the atmosphere gas directly supplying set point of temperature (such as normal temperature etc.), also can be the device carrying out after being heated by atmosphere gas supplying.Rear end face 13 side of the first space 11a in the bottom of outer wall 11, is formed with the gas supply opening 16 be connected with gas supply device 22.Via this gas supply opening 16, the atmosphere gas from gas supply device 22 is supplied to the first space 11a.Similarly, rear end face 13 side of the second space 11b in the bottom of outer wall 11, is formed with the gas supply opening 17 be connected with gas supply device 24.Via this gas supply opening 17, the atmosphere gas from gas supply device 24 is supplied to second space 11b.

Flow control valve 26,28 is, for regulating the device of the flow of the atmosphere gas flowed out in body of heater 10a.Front end face 12 side of the first space 11a in the top section of outer wall 11, is formed with the flow export 18 be connected with flow control valve 26.Flow control valve 26, flow when regulating the atmosphere making the first space 11a to flow out via this flow export 18.Similarly, front end face 12 side of the second space 11b in the top section of outer wall 11, is formed with the flow export 19 be connected with flow control valve 28.Flow control valve 28, flow when regulating the atmosphere making second space 11b to flow out via this flow export 19.In addition, through the atmosphere gas in the body of heater 10a of flow control valve 26,28, can being discharged, circulating as the air-breathing of gas supply device 22,24 after also can not needing composition removing such as oxygen, water etc.

Herein, variable-ratio carrying roller 20c and the position relationship in next door, bottom 35 and the clearance height H of carrying path 11c and carrying direction length L are described.First, the position relationship in variable-ratio carrying roller 20c and next door, bottom 35 is described.As shown in Figure 1,3, upper end 38a, the 38b in next door, above-mentioned bottom 35, between two that lay respectively in variable-ratio carrying roller 20c in carrying direction adjacent rollers.In addition, the height (position of vertical) of upper end 38a, upper end 38b is identical mutually, and is positioned at the identical height in the roller lower end of carrying roller 20c with variable-ratio.

Then, the clearance height H of carrying path 11c is described.Preferably, the clearance height H (with reference to Fig. 1,2) carrying the vertical of path 11c is 25mm-35mm.Herein, clearance height H is, the gap length of the vertical of (A be equivalent in Fig. 1 looks) when the carrying direction along variable-ratio carrying roller 20c is observed and carried path 11c.As shown in Figure 2, when carrying path 11c is observed in the carrying direction along variable-ratio carrying roller 20c, the gap as carrying path 11c can be observed, from the gap of upper end to the lower end in next door, top 31 of variable-ratio carrying roller 20c.Therefore, the size of the vertical in this gap is formed as clearance height H.In addition, in the present embodiment, the bottom in next door, top 31 is parallel with carrying direction, is the straight line of the left and right directions can seen in Fig. 2.Suppose, the straight line that the bottom in next door, top 31 can not be counted as the left and right directions of Fig. 2 (has concavo-convex, from left and right directions inclination etc.) etc. situation, under the position of left and right directions makes the unfixed situation of clearance height of carrying path 11c, using the minimum of a value of the clearance height in Fig. 2 as clearance height H.That is, when gap length when carrying the carrying direction observation carrying path 11c of roller 20c along variable-ratio, vertical exists different places, using minimum of a value as clearance height H.In addition, in the present embodiment, as mentioned above, because upper end 38a, upper end 38b are positioned at the identical height in the roller lower end of carrying roller 20c with variable-ratio, therefore very close to each other between next door, bottom 35 and variable-ratio carrying roller 20c.Suppose, both have gap, next door, top 31 and variable-ratio are carried height (minimum of a value) sum in the height (minimum of a value) in the gap of roller 20c and the gap of next door, bottom 35 and variable-ratio carrying roller 20c, as clearance height H.In this wise, when carrying path 11c is observed in carrying direction along variable-ratio carrying roller 20c, when the position of vertical exists different multiple gaps, using the clearance height H of height (minimum of a value) sum in each gap as carrying path 11c.

Then, the carrying direction length L of carrying path 11c is described.Preferably, the carrying direction length L of carrying path 11c is more than 3 times of clearance height H, is more preferably more than 4 times.Herein, as shown in the figure, carrying direction length L is, from wall part 30, the opening of the upstream side in the carrying direction of variable-ratio carrying roller 20c is to the distance of the opening of downstream side.In addition, in the present embodiment, the length (thickness) in the carrying direction in next door, top 31 and next door, bottom 35 is fixed at vertical above-below direction, and the length (thickness) in the carrying direction of wall part 30 is identical with carrying direction length L from the top of outer wall 11 to bottom.

In addition, the length (length in the direction vertical with carrying direction of horizontal direction) of carrying the left and right directions of path 11c is such as 300mm-1500mm.

Controller 80, formed as the microprocessor centered by CPU81, it is possessed flash memory 82 for storing various handling procedure or various data etc., for the RAM84 of temporary storage data and carry out with guidance panel 88 etc. the not shown internal communications interface (I/F) that communicates.Flash memory 82 is for storing corresponding relation data 83.Corresponding relation data 83 are, reflect the temperature of first, second space 11a, load bearing board 95 through programming rate during carrying path 11c, variable-ratio carrying roller 20c transporting velocity the data of corresponding relation.

This controller 80 exports control signal to gas supply device 22,24, controls respectively thus via gas supply opening 16, gas supply opening 17 and to the supply of the inert gas of body of heater 10a inside or supply temperature.Controller 80 exports control signal to flow control valve 26,28, controls the amount of the atmosphere gas flowed out from flow export 18,19 thus respectively.Further, controller 80, export control signal to first, second heater 21a, 21b and regulate the temperature of the first space 11a, second space 11b respectively, or to the not shown motor output drive signal of first, second carrying roller 20a, 20b and variable-ratio carrying roller 20c, make first, second carrying roller 20a, 20b and variable-ratio carrying roller 20c rotate thus.In addition, controller 80, the operation of input respective operations panel 88 and the operation signal that produces, or to the instruction of guidance panel 88 output display.

In addition, as shown in Figure 1, controller 80 possesses the speed acquisition unit 85, carrying control part 86 etc. as functional block.Speed acquisition unit 85 has following function: that input via guidance panel 88 based on user to information that the is temperature correlation of first, second space 11a, 11b, treated object 96 through the relevant information of programming rate when carry path 11c and corresponding relation data 83, the variable-ratio when temperature of acquisition and first, second space 11a, 11b of inputting and heat treatment corresponding to programming rate carries the function of the relevant value of the transporting velocity of roller 20c.Carrying control part 86 has the function of the rotary speed of the not shown motor controlling variable-ratio carrying roller 20c, makes load bearing board 95 pass carrying path 11c with the transporting velocity that speed acquisition unit 85 obtains.In addition, speed acquisition unit 85 and carrying control part 86, can be formed as hardware, also can play the software of function as being performed by CPU81 the program being stored in flash memory 82 and form.

The operating portion that guidance panel 88 possesses display part and comprises this display part and form.Display part, form as touch panel formula liquid crystal display, and display be used for choice menus or project selection/setting button, for input various numerical value digital button, start the start button of heat-treating etc. and accept touch operation, and the operation signal based on touch operation is sent to controller 80.In addition, when receiving the idsplay order of self-controller 80, in display part display based on the image of idsplay order or word, numerical value etc.

Load bearing board 95 is for loading treated object 96.Load bearing board 95, under the state having loaded treated object 96, as long as can be carried roller 20a, 20b by first, second and variable-ratio carrying roller 20c carries, can be such as tabular, also can be netted.In addition, load bearing board 95, such as, to separate between these flat boards and the supporting member supported and forming by multiple flat board with at above-below direction, also can have multiple face loading treated object 96.In the present embodiment, the length in the carrying direction of load bearing board 95 is greater than the carrying direction length L of carrying path 11c.In addition, preferably, load bearing board 95 is made up of the material with highly corrosion resistant or heat resistance, to stand the heat treatment to treated object 96 in body of heater 10a.In addition, preferably, load bearing board 95 is made up of, can more uniformly heat-treat multiple treated object 96 material self being not easy to produce Temperature Distribution (temperature following is high).More specifically, preferably, the bending strength of load bearing board 95 is 100MPa-250MPa, Young's modulus is 200GPa-350GPa, thermal coefficient of expansion is 4ppm/K-5ppm/K, pyroconductivity is 50W/mK-200W/mK.In addition, the physics value under these values difference normal temperature.The bending strength of load bearing board 95 is four-point bending intensity.Load bearing board 95 is such as made up of pottery etc., preferably, is made up of in conjunction with SiC (Si-SiC) or recrystallization SiC Si.If load bearing board 95 is made up of in conjunction with SiC or recrystallization SiC Si, then its bending strength, Young's modulus, thermal coefficient of expansion and pyroconductivity easily meet above-mentioned number range.

In addition, meet the load bearing board 95 be made up of in conjunction with SiC Si of above-mentioned number range, such as, can manufacture as follows.First, the matrix material raw material being main component are mixed with the molding material comprising adhesive and water, make its shape being configured as load bearing board 95 and be formed into body with SiC powder.Then, under metal Si atmosphere, in the inert gas atmosphere that this formed body is placed on decompression or vacuum, and metallic silicon is made to be immersed in (such as until the porosity is formed as less than 1%) in formed body, form the sintered body of Si in conjunction with SiC thus, and as load bearing board 95.In addition, matrix material raw material can be the materials comprising C powder, preferably, contain Al, Fe, Co as micro constitutent.In addition, the manufacture method of this load bearing board be made up of in conjunction with SiC Si, such as, be recorded in Japanese Laid-Open 2012-56831 publication.

Treated object 96, when passing in body of heater 10a by carrying out from the heat of first, second heater 21a, 21b heat treatments such as such as burning till.Although be not particularly limited, in the present embodiment, treated object 96 is, the duplexer of laminated ceramic dielectric (matrix material) and electrode is (for size, such as length and width are within 1mm), become the chip of ceramic capacitor after burning till.In addition, in the present embodiment, treated object 96 before heat-treatment furnace 10 is heat-treated, such as, is heat-treated with 800 DEG C-900 DEG C etc. in advance, thus carries out removing and half sintering of the adhesive of treated object 96 in advance.

Then, the heat treated situation using the heat-treatment furnace 10 formed like this to carry out treated object 96 is described.First, user operation guidance panel 88 and heat-treat the input of the various setting values such as condition, and press start button.In addition, for guidance panel 88, the various setting values of user's input such as comprise: to the temperature of first, second space 11a, 11b or load bearing board 95 through the relevant information of programming rate when carrying path 11c.In addition, various setting value comprises: with supply (supply rate) and the temperature of the atmosphere gas from gas supply device 22,24; Flow through the information that the flow of the atmosphere gas of flow control valve 26,28 etc. is correlated with.

When input these values when pressing start button, controller 80, according to the operation signal from guidance panel 88, inputs the various setting values etc. from user and is stored in RAM84, then starting to carry out the heat treatment based on stored various setting values.Particularly, controller 80 according to the supply (supply rate) and temperature of the inputted atmosphere gas from gas supply device 22,24, flow through the relevant information of the flow etc. of the atmosphere gas of flow control valve 26,28, export control signal to gas supply device 22,24 and flow control valve 26,28.In addition, according to the information of the temperature correlation with inputted first, second space 11a, 11b, export control signal to first, second heater 21a, 21b.Accordingly, the atmosphere of first, second space 11a, 11b is formed as inert gas atmosphere, and the atmosphere of the first space 11a, second space 11b is heated.In addition, as mentioned above, second space 11b is heated to the temperature of temperature higher than the first space 11a.In the present embodiment, the first space 11a is heated to 700 DEG C, second space 11b is heated to 1200 DEG C.In addition, in the present embodiment, by based on gas supply device 22, gas supply device 24 and the influx sum of the atmosphere gas supplied in body of heater 10a, with the discharge sum from the atmosphere gas in body of heater 10a based on flow control valve 26, flow control valve 28, be set as identical value, further, the discharge flowed out from flow control valve 28 is set as that the influx than flowing into from gas supply device 24 is little.Accordingly, a part for the atmosphere gas in second space 11b is through carrying path 11c and the first space 11a and flowing out from flow export 18.Therefore, the part being heated to the atmosphere gas of high temperature at second space 11b also can be used in heating first space 11a, thus effectively can heat the first space 11a.

Terminate like this first space 11a, second space 11b atmosphere adjustment after, controller 80 exports control signal to not shown motor, makes the first carrying roller 20a, the second carrying roller 20b, variable-ratio carrying roller 20c rotates.Then, by user or not shown Handling device, treated object 96 is moved into in body of heater 10a from opening 14.The treated object 96 moved into is carried successively by the first carrying roller 20a, variable-ratio carrying roller 20c and second carrying roller 20b, and is taken out of from opening 15 in the first space 11a, carrying path 11c, second space 11b.Carry out the heat treatment of treated object 96 in the meantime.In addition, in heat-treatment furnace 10, the load bearing board 95 being placed with treated object 96 is moved into successively, progressively carries out the heat treatment of treated object 96.In addition, the not shown space for cooling treated object 96 is formed in the position being close to carrying direction downstream side from opening 15, the treated object 96 taken out of from opening 15 is carried to this space, simultaneously with the cooling of the cooling rate of regulation (such as from the temperature of second space 11b to normal temperature).

In addition, for the transporting velocity of the first carrying roller 20a when heat-treating, the second carrying roller 20b, preset into identical speed in the present embodiment, and preset into the speed lower than the variable-ratio region of above-mentioned variable-ratio carrying roller 20c.In addition, the transporting velocity of variable-ratio carrying roller 20c controls as follows.First, speed acquisition unit 85 reads and is stored in the temperature of first, second space 11a, 11b of RAM84 and treated object 96 through programming rate during carrying path 11c.Then, speed acquisition unit 85 based on read data and corresponding relation data 83, obtain to for making treated object 96 carry the relevant value of the transporting velocity (transporting velocity in the scope in above-mentioned variable-ratio region) of roller 20c with the variable-ratio that the programming rate that user inputs carries out heating up.Then, carrying control part 86 controls the rotary speed of the not shown motor of variable-ratio carrying roller 20c, passes carrying path 11c to make load bearing board 95 with the transporting velocity that speed acquisition unit 85 obtains.In addition, the corresponding relation shown by corresponding relation data 83 can be form, also can be calculating formula.These corresponding relation data 83 such as can be obtained by experiment in advance.

In addition, in the present embodiment, when the first space 11a be 700 DEG C, second space 11b be 1200 DEG C, changed in the scope in above-mentioned variable-ratio region by the transporting velocity making variable-ratio carry roller 20c, the programming rate through the treated object 96 during carrying path 11c can be made thus at least can to change in the scope of 150 DEG C/min-1000 DEG C/min.User inputs the suitable programming rate of the material corresponding to treated object 96 etc. in the scope of this programming rate.By programming rate is set to suitable value, the temperature of treated object 96 is warming up to second space 11b rapidly from the first space 11a, the contraction of the matrix material of treated object 96 and electrode can be made thus close for opportunity, and can suppress to cause because programming rate is too low, the generation of crackle or stripping etc. when burning till.In addition, uneven the burning till caused because programming rate is too high can be suppressed.In addition, if the temperature (especially, the temperature difference in two spaces) of first, second space 11a, 11b is set to other values, even if in identical variable-ratio region, adjustable programming rate also can change.Such as, the mode that can be formed as 400 DEG C-600 DEG C with the temperature difference of the first space 11a and second space 11b sets the temperature in two spaces.

Herein, the inscape of the first embodiment and the corresponding relation of inscape of the present invention is illustrated.The first space 11a of the present embodiment is equivalent to the first space of the present invention, second space 11b is equivalent to second space, carrying path 11c is equivalent to carry path, wall part 30 is equivalent to next door, body of heater 10a is equivalent to body of heater, first, secondary heater 21a, 21b is equivalent to thermostat unit, primary heater 21a is equivalent to the first thermostat unit and the first heating unit, secondary heater 21b is equivalent to the second thermostat unit and the second heating unit, first, second carrying roller 20a, 20b and variable-ratio carrying roller 20c is equivalent to handling unit, first carrying roller 20a is equivalent to the first handling unit, second carrying roller 20b is equivalent to the second handling unit, variable-ratio carrying roller 20c is equivalent to variable-ratio handling unit.In addition, speed acquisition unit 85 is equivalent to speed acquiring unit, and carrying control part 86 is equivalent to carry control unit.

In the heat-treatment furnace 10 of the first embodiment described above, the atmosphere of the first space 11a is heated by primary heater 21a, and make the temperature of second space 11b higher than the temperature of the first space 11a by the atmosphere of secondary heater 21b heating second space 11b, in this condition, by the treated object 96 be carried to by the first carrying roller 20a in the first space 11a, by variable-ratio carrying roller 20c to be greater than first, second carrying roller 20a, fixing speed in the variable-ratio region of the speed of 20b, the second carrying roller 20b is carried to through in carrying path 11c.Accordingly, treated object 96, is heated up from the first space 11a thus rapidly through the second space 11b being carried at a high speed high temperature in carrying path 11c.Then, programming rate now corresponds to the transporting velocity in carrying path 11c and changes, but this transporting velocity can change in the scope in variable-ratio region.Therefore, it is possible to change programming rate according to treated object 96, thus the intensification rapidly corresponding to various treated object 96 can be realized.In addition, for suitable programming rate when heating up rapidly for making treated object 96, size of the material comprised according to treated object 96 or treated object 96 etc. and different.Then, such as, when programming rate is too low, the difference in shrinkage between existing because of the different material in treated object 96 and cracking or the situation of stripping etc.In addition, when programming rate is too high, the surface that there is only treated object 96 is first burnt till etc. burns till uneven situation.In the heat-treatment furnace 10 of the first embodiment, by suppressing this situation, the intensification rapidly corresponding to various treated object 96 can be realized.

In addition, by the clearance height H of carrying path 11c is set as below 35mm, suppresses from being radiated through carrying path 11c of second space 11b and arrive the first space 11a.Accordingly, the temperature difference of the atmosphere of the first space 11a and the atmosphere of second space 11b is easily made to become large.In addition, when variable-ratio region is identical number range, the temperature difference of first, second space 11a, 11b is larger, and the transformable scope of programming rate is larger.In addition, in order to make treated object 96 suitably heat up rapidly, being not only programming rate and there is a need to the temperature difference of front and back of heating up also to be set to suitable value.Therefore, by making the temperature difference of first, second space 11a, 11b easily become large, the intensification rapidly corresponding to more eurypalynous treated object 96 can be realized.In addition, by clearance height H is set to more than 25mm, the gap that treated object 96 or load bearing board 95 pass fully can be guaranteed.In addition, in clearance height H, the height of load bearing board 95 or treated object 96 is not considered.But when load bearing board 95 or treated object 96 are through carrying path 11c, the gap of the vertical of actual carrying path 11c, only narrows with the height of load bearing board 95, treated object 96.Therefore, the existence of load bearing board 95 or treated object 96, makes the temperature difference of the atmosphere of the first space 11a and the atmosphere of second space 11b easily become large.Thus, even if do not consider in clearance height H that these are also no problem.

Further, by more than 3 times that the carrying direction length L of carrying path 11c is set to described clearance height H, suppress from being radiated through carrying path 11c of second space 11b and arrive the first space 11b.Accordingly, easily make the temperature difference of the atmosphere of the first space 11a and the atmosphere of second space 11b become large, thus the intensification rapidly corresponding to more eurypalynous treated object 96 can be realized.

Further, variable-ratio carrying roller 20c has for the multiple rollers by treated object 96 level carrying in carrying path 11c; Wall part 30 has the next door, top 31 on the upside of the vertical being positioned at carrying path 11c and is positioned at the next door, bottom 35 on the downside of the vertical of carrying path 11c.Further, upper end 38a, the 38b in next door, bottom 35, in carrying direction between multiple variable-ratio carrying roller 20c, and be positioned at the identical height in the lower end of carrying roller 20c with multiple variable-ratio in vertical.Accordingly, when to observe carrying path 11c along carrying direction, the lower end of variable-ratio carrying roller 20c and the gap up and down in next door, bottom 35 can be eliminated.Accordingly, suppress from being radiated through this gap of second space 11b and arrive the first space 11a.Therefore, easily make the temperature difference of the atmosphere of the first space 11a and the atmosphere of second space 11b become large, thus the intensification rapidly corresponding to more eurypalynous treated object 96 can be realized.

In addition, next door, bottom 35 possesses convex shaped part 37a, the 37b with upper end 38a, 38b, the shape that the width that convex shaped part 37a, 37b are formed as its carrying direction more more diminishes towards upper end 38a, 38b on the upside of vertical.Accordingly, in carrying direction, upper end 38a, the 38b in next door, bottom 35 are configured between multiple variable-ratio carrying roller 20c, in the situations such as next door, bottom 35 thermal expansion, easily avoid variable-ratio to carry roller 20c simultaneously contact with next door, bottom 35 (particularly convex shaped part 37a, 37b).

In addition, the variable-ratio region of variable-ratio carrying roller 20c is the region set as follows: make the region that the programming rate through the treated object 96 during carrying path 11c at least can change in the scope of 150 DEG C/min-1000 DEG C/min.Then, in heat treatment, treated object 96 is handled upside down under the state being placed in load bearing board 95.Now, as the physics value under the normal temperature of load bearing board 95, respectively: bending strength is 100MPa-250MPa, Young's modulus is 200GPa-350GPa, thermal coefficient of expansion is 4ppm/K-5ppm/K, pyroconductivity is 50W/mK-200W/mK, accordingly, in the transformable scope of programming rate the heat resistance of load bearing board and temperature following very abundant.Thus, same load bearing board 95 also can be used to heat-treat even if programming rate changes, without the need to preparing the multiple load bearing board 95 corresponding to programming rate.In addition, if load bearing board 95 is made up of in conjunction with SiC or recrystallization SiC Si, then its bending strength, Young's modulus, thermal coefficient of expansion, pyroconductivity can be made easily to meet above-mentioned number range.In addition, in the present embodiment, the length in the carrying direction of load bearing board 95 is greater than the carrying direction length L of carrying path 11c.When this load bearing board 95 is through carrying path 11c, even if a part for the upstream side in the carrying direction in load bearing board 95 arrives second space 11b, a part for the downstream side in its carrying direction is still present in the first space 11a.In this situation, load bearing board 95 easily produces the temperature difference at upstream side and downstream side, and self easily produces Temperature Distribution.By load bearing board 95 in above-mentioned number range especially pyroconductivity meet 50W/mK-200W/mK, also suppress the Temperature Distribution of load bearing board 95 in this case, thus can more uniformly heat-treat treated object 96.

[the second embodiment]

Then, the second embodiment is described.Fig. 4 is the profilograph of the heat-treatment furnace 110 of the second embodiment.Heat-treatment furnace 110 also possesses the 3rd space 111b except the downstream side (rear) in the carrying direction at second space 11b and possesses except the next door 130 for separating second space 11b and the 3rd space 111b, has identical structure with heat-treatment furnace 10.In addition, in the diagram, eliminate than in heat-treatment furnace 110, carrying path 11c is closer to the diagram of the structure (such as the first space 11a etc.) of carrying direction upstream side.In addition, about heat-treatment furnace 110, identical Reference numeral is used to the inscape identical with above-mentioned heat-treatment furnace 10, and omits the description, below different inscapes is described.

Heat-treatment furnace 110 possesses body of heater: 110a; 3rd carrying roller 120b; Gas supply device 124; Flow control valve 128; Cooling tube 140; Air cooling sleeve pipe 142,144; And refrigerant source of supply 146,148.Body of heater 110a possesses outer wall 111 and is configured in the wall part 130 in outer wall 111.Outer wall 11 is rearward expanded and is formed by outer wall 111 further, at the rear of second space 11b, has the carrying path 111c as inner space and the 3rd space 111b successively.In addition, outer wall 111 has opening 115, and it is formed at the rear end face 113 of outer wall 111, and becomes from the 3rd space 111b outlet externally.3rd space 111b is the space surrounded by outer wall 111 and wall part 130.Carrying path 111c is the space that second space 11b is communicated with the 3rd space 111b, and is formed by wall part 130.

Wall part 130 possesses: upper wall part 131, and it possesses main part 132 and crossbeam 133; With lower wall part 135, it possesses main part 136 and convex shaped part 137a, 137b (amplifier section with reference to dotted line frame S2 shown on the left of Fig. 4).Convex shaped part 137a, 137b possess upper end 138a, 138b as top, top.This wall part 130, except separating second space 11b and the 3rd space 111b and replacing variable-ratio to carry roller 20c by the 3rd carrying roller 120b and be configured in except carrying path 111c, has identical structure with wall part 30.

3rd carrying roller 120b is, in carrying path 111c and in the 3rd space 111b along horizontal direction configuration multiple (being 14 in the present embodiment) in the carrying direction as regulation its for carrying the carrying roller of load bearing board 95.By making the 3rd carrying roller 120b rotate, be carried to opening 115 along carrying direction through in carrying path 111c and the 3rd space 111b by the load bearing board 95 of the second carrying roller 20b carrying.

Gas supply device 124 has the structure identical with gas supply device 24, via the gas supply opening 117 being formed in rear end face 113 side in the bottom of outer wall 111, the 3rd space 111b, supplies atmosphere gas to the 3rd space 111b.In addition, in the present embodiment, the atmosphere gas that gas supply device 124 such as supplies 20 DEG C makes the 3rd space 111b cool.

Flow control valve 128 has the structure identical with flow control valve 28, with in the top section being formed in outer wall 111, the flow export 119 of front end face 12 side (front) of the 3rd space 111b is connected.Flow control valve 128 is for regulating flow when making the atmosphere of the 3rd space 111b flow out via this flow export 119.

Cooling tube 140 to clamp the mode of the 3rd carrying roller 120b up and down, the top of the outer wall 111 in the 3rd space 111b and bottom configuration multiple (in the present embodiment, up and down each three).For cooling tube, refrigerant (such as air etc.) can be inner through it, and by this refrigerant cooling the 3rd space 111b.

Air cooling sleeve pipe 142,144 is the components for cooling the 3rd space 111b, and is configured in top and the bottom of outer wall 111 respectively.For this air cooling sleeve pipe 142,144, in the 3rd space 111b, its surface is exposed, and can be inner through it from the refrigerant (air) of refrigerant source of supply 146,148.Air cooling sleeve pipe 142,144 by this refrigerant via surface cool the 3rd space 111b exposed at the 3rd space 111b.In addition, the exposed surface in the 3rd space 111b of air cooling sleeve pipe 142,144 is formed multiple concavo-convex, increases thus and the contact area of the 3rd space 111b and improve cooling effectiveness.

In the heat-treatment furnace 110 formed like this, if the heat treatment of treated object 96 starts, then controller 80 controls: from supply and the temperature of the atmosphere gas of gas supply device 124; Flow through the flow of the atmosphere gas of flow control valve 128; And through the supply of refrigerant (air) of cooling tube 140, air cooling sleeve pipe 142,144 and temperature etc.Accordingly, the atmosphere of the 3rd space 111b forms inert gas atmosphere, cools the 3rd space 111b, to make the temperature (such as 1200 DEG C) of temperature (such as 500 DEG C-650 DEG C) lower than second space 11b of the 3rd space 111b simultaneously.In addition, the adjustment of the atmosphere of the first space 11a, second space 11b is identical with heat-treatment furnace 10.

And, at end first space 11a, second space 11b, after the adjustment of the atmosphere of the 3rd space 111b, controller 80 exports control signal to not shown motor, makes the first carrying roller 20a, the second carrying roller 20b, variable-ratio carry roller 20c and the 3rd carrying roller 120b and rotates.Afterwards, by user or not shown Handling device, treated object 96 is moved into in body of heater 110a from opening 14.The treated object 96 moved into is carried successively by the first carrying roller 20a, variable-ratio carrying roller 20c and second carrying roller 20b, and is carried out the heat treatment (burning till) of treated object 96 in the meantime in the first space 11a, carrying path 11c and second space 11b.Then, the treated object 96 after burning till, is carried successively by the 3rd carrying roller 120b in carrying path 111c and the 3rd space 111b.Now, treated object 96 according to the temperature difference of second space 11b and the 3rd space 111b, with the cooling rate rapid cooling specified.Afterwards, treated object 96 takes out of from opening 115, and is cooled to outer temperature degree (such as normal temperature).In addition, the temperature (with the temperature difference of second space 11b or outer gas) of the 3rd space 111b is preset in the mode that suitably can cool the treated object 96 after burning till.Such as, the mode that can be formed as 400 DEG C-600 DEG C with the temperature difference of second space 11b and the 3rd space 111b sets the temperature of the 3rd space 111b.

Herein, the inscape of the second embodiment and the corresponding relation of inscape of the present invention is illustrated.In addition, in this second embodiment, include the corresponding relation identical with the first above-mentioned embodiment, but omit the record relevant with identical corresponding relation, as follows about the corresponding relation (mainly with three space 111b relevant inscape and of the present invention corresponding relation) different from the first embodiment: the second space 11b of the present embodiment is equivalent to the first space of the present invention, 3rd space 111b is equivalent to second space, carrying path 111c is equivalent to carry path, wall part 130 is equivalent to next door, body of heater 110a is equivalent to body of heater, secondary heater 21b, gas supply device 124, flow control valve 128, cooling tube 140, air cooling sleeve pipe 142, 144, refrigerant source of supply 146, 148 are equivalent to thermostat unit, and secondary heater 21b is equivalent to the first thermostat unit and the first heating unit, gas supply device 124, flow control valve 128, cooling tube 140, air cooling sleeve pipe 142, 144, refrigerant source of supply 146, 148 are equivalent to the second thermostat unit and the second cooling unit, and the second carrying roller 20b and the 3rd carrying roller 120b is equivalent to handling unit.

In the heat-treatment furnace 110 of the second embodiment described above, obtain identical effect by the structure identical with the first embodiment.Such as, by the clearance height H of carrying path 111c is set as below 35mm, easily makes the temperature difference of second, third space 11b, 111b become large, thus the rapid cooling corresponding to more eurypalynous treated object 96 can be realized.In addition, by clearance height H is set to more than 25mm, the gap that treated object 96 or load bearing board 95 pass fully can be guaranteed.Further, by the carrying direction length L of carrying path 111c being set to more than 3 times of clearance height H, the temperature difference of the atmosphere of second space 11b and the atmosphere of the 3rd space 111b is easily made to become large.

Further, in addition, upper end 138a, the 138b in next door, bottom 135, in carrying direction between multiple 3rd carrying roller 120b, and be positioned at the identical height in the lower end of carrying roller 120b with the multiple 3rd in vertical.Therefore, it is possible to eliminate when to observe carrying path 111c along carrying direction, the lower end of the 3rd carrying roller 120b and the gap up and down in next door, bottom 135.

Further, in addition, next door, bottom 135 possesses convex shaped part 137a, the 137b with upper end 138a, 138b, the shape that the width that convex shaped part 137a, 137b are formed as its carrying direction more more diminishes towards upper end 138a, 138b on the upside of vertical.Therefore, in carrying direction, upper end 138a, the 138b in next door, bottom 135 are configured between multiple 3rd carrying roller 120b, in the situations such as next door, bottom 135 thermal expansion, easily avoid the 3rd carrying roller 120b to contact with next door, bottom 135 (particularly convex shaped part 137a, 137b) simultaneously.

Further, by load bearing board 95 being set to the physics value identical with the first embodiment (bending strength under normal temperature is 100MPa-250MPa, Young's modulus is 200GPa-350GPa, thermal coefficient of expansion is 4ppm/K-5ppm/K, pyroconductivity be 50W/mK-200W/mK), to through the temperature difference of cooling of the load bearing board 95 when second space 11b, carrying path 111c, the 3rd space 111b or the heat resistance of cooling rate and temperature following very abundant.Such as, the same with programming rate, in the cooling rate of the scope of 150 DEG C/min-1000 DEG C/min, the heat resistance of load bearing board 95 and temperature following are very abundant.

In addition, the present invention is not limited to any above-mentioned embodiment, certainly also can implement various scheme in technical scope of the present invention.

Such as, in the above-described embodiment, upper end 38a, 38b are positioned at the identical height in the lower end of carrying roller 20c with variable-ratio, but upper end 38a, 38b also can be positioned at the position more closer to the top than the lower end of variable-ratio carrying roller 20c.Upper end 138a, 138b for the second embodiment are also identical.

In the above-described embodiment, the section vertical with left and right directions of convex shaped part 37a, 37b is triangular in shape, and the shape that the width forming its fore-and-aft direction more more diminishes on the upside of vertical, but be not limited to as section is leg-of-mutton situation along with on the upside of vertical, the shape that fore-and-aft direction width diminishes continuously also can be the shape reduced with step function.Such as, the section vertical with left and right directions of convex shaped part 37a, 37b can be stepped.The shape that the width that convex shaped part 37a, 37b are not limited to its fore-and-aft direction more more diminishes on the upside of vertical, such as vertical with left and right directions section also can be quadrangle.In this situation, if the width in the carrying direction of convex shaped part 37a, 37b to be set to the interval in the carrying direction being less than variable-ratio carrying roller 20c, then also the upper end in next door, bottom 35 can be configured between variable-ratio carrying roller 20c and the height of more than the lower end of variable-ratio carrying roller 20c can be configured in.Convex shaped part 137a, 137b for the second embodiment are also identical.

In the above-described embodiment, although heated first, second space 11a, 11b by first, second heater 21a, 21b, as long as the unit heated first, second space 11a, 11b, other heating unit just can be used.Such as, gas burner etc. can be used to replace heater.Or, as the device of the atmosphere from gas supply device 22,24 supplying high temperature, by this atmosphere gas first, second space 11a, 11b heated and also can.

In the above-described embodiment, although the atmosphere temperature of the second space 11b separated by wall part 30 is higher than the temperature of the first space 11a, be not limited thereto.As long as the first room atmosphere separated by next door is different with the temperature of second space atmosphere.In addition, as long as the atmosphere temperature in two spaces separated by next door is different, just any combination is used for the unit of heating space and also can for the unit of cooling space.

In above-mentioned second embodiment, although carry out rapid cooling by the temperature difference of the second space 11b that separated by next door 130 and the 3rd space 111b to the treated object 96 after burning till, be not limited thereto.Such as, after annealing in process (such as the heat treatment etc. of 1000 DEG C) is carried out to the treated object 96 after burning till, carry out rapid cooling and also can.Namely, to the space of this annealing in process be carried out as the first space of the present invention, the space of being carried by following treated object 96 is as second space of the present invention, and separate two spaces by next door 130, the temperature of this second space is adjusted to and lower than the temperature in the first space, rapid cooling is carried out to the treated object after annealing in process and also can.

In above-mentioned second embodiment, although use the 3rd carrying roller 120b to carry out the carrying of the treated object 96 in carrying path 111c, instead of variable-ratio carrying roller, also can equally with carrying path 11c use variable-ratio to carry roller and carry.Like this, the cooling rate of rapid cooling can be made to correspond to the transporting velocity in carrying path 111c and change, thus the rapid cooling corresponding to more polymorphic type treated object 96 can be realized.

In the above-described embodiment, although wall part 30,130 is the components for separating two spaces in body of heater, also also can configure in the position moved into mouth or take out of mouth becoming body of heater and wall part 30,130 the same wall parts.That is, with wall part 30,130 the same wall parts, the space in body of heater and space outerpace can also be separated.

[embodiment]

[embodiment 1]

As the heat-treatment furnace of embodiment 1, make heat-treatment furnace 10 as Figure 1-3.In this heat-treatment furnace 10, clearance height H is set as 30.0mm, and carrying direction length L is set as 100mm.In addition, be 700mm by the length setting of the left and right directions of carrying path 11c.In addition, the variable-ratio region of variable-ratio being carried roller 20c is set as 90mm/min-600mm/min.

[comparative example 1]

Except clearance height H is set as 36mm, carrying direction length L is set as outside 50mm, has made heat-treatment furnace 10 in the same manner as in Example 1, in this, as comparative example 1.

[embodiment 2]

As the heat-treatment furnace of embodiment 2, make heat-treatment furnace 110 as shown in Figure 4.In this heat-treatment furnace 110, the clearance height H of carrying path 111c is set as 30.0mm, and carrying direction length L is set as 100mm.In addition, the length setting carrying the left and right directions of path 111c is 700mm.

In the heat-treatment furnace 10 of embodiment 1, the atmosphere of first, second space 11a, 11b is made to be formed as nitrogen atmosphere by gas supply device 22,24.Afterwards, define from the supply of the gas of gas supply device 22,24 and the state that all do not have from the outflow of the gas of flow control valve 26, flow control valve 28.In this condition, the temperature (target temperature) of the first space 11a during heat treatment is formed as 700 DEG C, the temperature (target temperature) of second space 11b is formed as 1200 DEG C, the power output of first, second heater 21a, 21b is controlled by controller 80, now, the atmosphere temperature of first, second space 11a, 11b also all can be adjusted to target temperature.In addition, the atmosphere temperature of first, second space 11a, 11b is the temperature that the center in space is measured.

In the heat-treatment furnace 10 of comparative example 1, the atmosphere of first, second space 11a, 11b is made to be formed as nitrogen atmosphere by gas supply device 22,24.Afterwards, define from the supply of the gas of gas supply device 22,24 and the state that all do not have from the outflow of the gas of flow control valve 26, flow control valve 28.In this condition, the temperature (target temperature) of the first space 11a during heat treatment is formed as 800 DEG C, the temperature (target temperature) of second space 11b is formed as 1200 DEG C, is controlled the power output of first, second heater 21a, 21b by controller 80.Although the temperature of second space 11b can be adjusted to target temperature 1200 DEG C, even if the power output of primary heater 21a is formed as 0%, the temperature of the first space 11a is only formed as 900 DEG C and fails to reach 800 DEG C of target temperature.That is, in comparative example 1, the temperature difference of first, second space 11a, 11b is not more than 300 DEG C.

In the heat-treatment furnace 110 of embodiment 2, the atmosphere of second, third space 11b, 111b is made to be nitrogen atmosphere by gas supply device 24,124.Afterwards, define from the supply of the gas of gas supply device 24,124 and the state that all do not have from the outflow of the gas of flow control valve 28,128.In this condition, the temperature (target temperature) of second space 11b during heat treatment is formed as 1000 DEG C, the temperature (target temperature) of the 3rd space 111b is formed as 300 DEG C, by controller 80 control secondary heater 21b power output and through the flow of the air of cooling tube 140 and air cooling sleeve pipe 142,144 and temperature.Its result, the atmosphere temperature of second, third space 11b, 111b is all adjusted to target temperature.In addition, the atmosphere temperature of second, third space 11b, 111b is the temperature that the center in space is measured.

In summary, in embodiment 1, clearance height H is set as more than 25mm below 35mm, carrying direction length L is set as more than 3 times of clearance height H, the temperature difference of first, second space 11a, 11b can reach 500 DEG C that are greater than comparative example 1 thus.

In addition, in example 2, clearance height H is set as more than 25mm below 35mm, carrying direction length L is set as more than 3 times of clearance height H, the temperature difference of second, third space 11b, 111b can reach 700 DEG C thus.

In the heat-treatment furnace 10 of embodiment 1, the temperature of the first space 11a during heat treatment is adjusted to 700 DEG C, the temperature of second space 11b is adjusted to 1200 DEG C, in this condition, the load bearing board 95 being placed with treated object 96 is carried to opening 15 from opening 14.Now, the programming rate through transporting velocity during carrying path 11c and treated object 96 is measured.Particularly, load bearing board 95 is Si load bearing boards in conjunction with SiC, and it is that anterior-posterior length (length in carrying direction) is 250mm, left and right length is 250mm, thickness is the load bearing board of 4mm.As the physics value under the normal temperature of load bearing board 95, bending strength is 250MPa, and Young's modulus is 350GPa, and thermal coefficient of expansion is 4.5ppm/K, and pyroconductivity is 150W/mK.Treated object 96, becomes the chip of ceramic capacitor after burning till, and is placed in the central authorities of the upper surface of load bearing board 95.In addition, in body of heater 10a from wall part 30 apart from the position of the upstream side 100mm in carrying direction with from wall part 30 apart from the position of downstream side 150mm in carrying direction, be configured with the noncontacting proximity sensor for detecting load bearing board 95.Then, carrying load bearing board 95, measures when the sensor of upstream side detects load bearing board 95 (the dirty end of=load bearing board 95 moves to the position of the upstream side 100mm in distance carrying direction during from wall part 30) and the temperature of (when the dirty end of=load bearing board 95 moves to the position of distance carrying direction downstream side 150mm from wall part 30) this treated object of 2 96 and moment when the sensor of downstream side detects load bearing board 95.From the temperature difference and the time difference of this treated object of 2 96, calculate the programming rate of treated object 96.Change the transporting velocity of variable-ratio carrying roller 20c, carry out repeatedly calculating of this programming rate.The transporting velocity changing variable-ratio carrying roller 20c in the scope of 100mm/min-600mm/min measures repeatedly programming rate, and now, the programming rate of treated object 96 changes in the scope of 167 DEG C/min-1000 DEG C/min.In addition, the load bearing board 95 carried in all measurements all employs identical load bearing board, but does not crack.

The application is using No. 2013-174887th, the Japan's patent application submitted on August 26th, 2013 and Japan's patent application No. 2013-229630 basis as CLAIM OF PRIORITY of submitting on November 5th, 2013, and its full content includes this description in by way of reference.

[utilizability in industry]

The present invention can be used in the heat-treatment furnace of heat-treating treated object to the process that the duplexer becoming ceramic capacitor chip burns till etc.

Claims

1. a heat-treatment furnace, it is the heat-treatment furnace of heat-treating treated object, and it possesses:

2. heat-treatment furnace according to claim 1, wherein,

Carrying direction length (L) of described carrying path is more than 3 times of described clearance height (H).

3. heat-treatment furnace according to claim 1 and 2, wherein,

Described handling unit has:

First handling unit, it for carrying described treated object in described first space;

Second handling unit, it for carrying described treated object in described second space; And

Variable-ratio handling unit, its for will by described first handling unit carrying described treated object, carrying direction along regulation is carried to described second handling unit through in described carrying path, and in the variable-ratio region that speed is greater than the speed of described first handling unit and described second handling unit, described transporting velocity can be changed.

4. the heat-treatment furnace according to any one of claim 1-3, wherein,

Described handling unit has multiple carrying roller, and the plurality of carrying roller is used for carrying described treated object along the horizontal direction as carrying direction in described carrying path;

Described next door has the next door, top on the upside of the vertical being positioned at described carrying path and is positioned at the next door, bottom on the downside of the vertical of described carrying path;

The more than one upper end in next door, described bottom, in described carrying direction between described multiple carrying roller, and is positioned at the position identical or closer to the top with the lower end of described multiple carrying roller in vertical.

5. heat-treatment furnace according to claim 4, wherein,

Next door, described bottom possesses the more than one convex shaped part with described upper end, the shape that the width that described convex shaped part is formed as carrying described in it direction more more diminishes towards described upper end on the upside of vertical.

6. a heat treatment method, it is to the heat treatment method that treated object is heat-treated in heat-treatment furnace, described heat-treatment furnace possesses body of heater, described body of heater has the first space, second space, formation carrying path and separate the next door of this first space and this second space, wherein, described carrying path this first space is communicated with and path for carrying treated object, and the clearance height of its vertical (H) is more than 25mm below 35mm, wherein

Described heat treatment method comprises: under the state making described first room atmosphere different with described second space atmosphere temperature, carry the technique of described treated object according to the order in described first space, in described carrying path, described second space.

7. heat treatment method according to claim 6, wherein,

8. the heat treatment method according to claim 6 or 7, wherein,

Described heat-treatment furnace possesses:

Second handling unit, it for carrying described treated object in described second space;

Variable-ratio handling unit, its for will by described first handling unit carrying described treated object, carrying direction along regulation is carried to described second handling unit through in described carrying path, and in the variable-ratio region that speed is greater than the speed of described first handling unit and described second handling unit, this transporting velocity can be changed

In the process, under the state making described first room atmosphere different with described second space atmosphere temperature, by the treated object be carried to by described first handling unit in described first space, be carried to described second handling unit with the fixing speed in described variable-ratio region through in described carrying path by described variable-ratio handling unit.

9. heat treatment method according to claim 8, wherein,

Variable-ratio region is, the mode that at least can change in the scope of 150 DEG C/min-1000 DEG C/min with the temperature changing speed made through described treated object during described carrying path, and the region of setting,

In the process, described treated object is handled upside down under the state being placed in load bearing board, as the physics value under the normal temperature of described load bearing board, respectively: bending strength is 100MPa-250MPa, Young's modulus is 200GPa-350GPa, thermal coefficient of expansion is 4ppm/K-5ppm/K, pyroconductivity is 50W/mK-200W/mK.

10. heat treatment method according to claim 9, wherein,

Described load bearing board is made up of in conjunction with SiC or recrystallization SiC Si.

11. heat treatment methods according to any one of claim 6-10, wherein,

Described next door has next door, top on the upside of the vertical being positioned at described carrying path, be positioned at next door, bottom on the downside of the vertical of described carrying path;

The more than one upper end in next door, described bottom, in described carrying direction between described multiple carrying roller, and is positioned at or also position by the top identical with the lower end of described multiple carrying roller in vertical.

12. heat treatment methods according to claim 11, wherein,