JPH04361870A - Reflow apparatus - Google Patents

Reflow apparatus

Info

Publication number
JPH04361870A
JPH04361870A JP13113591A JP13113591A JPH04361870A JP H04361870 A JPH04361870 A JP H04361870A JP 13113591 A JP13113591 A JP 13113591A JP 13113591 A JP13113591 A JP 13113591A JP H04361870 A JPH04361870 A JP H04361870A
Authority
JP
Japan
Prior art keywords
substrate
zone
heating zones
heating
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13113591A
Other languages
Japanese (ja)
Inventor
Teruo Okano
輝男 岡野
Kazuo Sotono
外野 一夫
Junichi Onozaki
純一 小野崎
Yasuo Miyamoto
宮本 康夫
Toshiya Uchida
俊也 内田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tamura Corp
Original Assignee
Tamura Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tamura Corp filed Critical Tamura Corp
Priority to JP13113591A priority Critical patent/JPH04361870A/en
Publication of JPH04361870A publication Critical patent/JPH04361870A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To secure the prescribed temp. profile by arranging separating parts among plural heating zones and providing contracting parts communicated only with work conveying part between each of heating zones to each separating part. CONSTITUTION:Atmosphere of air or nitrogen gas, etc., heated with a heater 16 in each preheating zone 13 and reflow zone 14 is made to circulate with a fan 15 and injected to a substrate P. Then, in plural preheating zones 13, the substrate P is preheated with the heat contained in the atmosphere and in the reflow zone 14, solder paste on the substrate P is reflowed by the heat contained in further higher temp. atmosphrere. At this time, as each part among the heating zones, is perfectly separated with the separating part 21, heat insulation can be secured and heat conduct at each among the heating zones, is efficiently restrained. In such a way, by preventing heat interference at each among the heating zones, the independent atmosphere temp. set at each heating zone can be effectively held an the prescribed temp. profile of the substrate can be obtd.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】〔発明の目的〕[Object of the invention]

【0002】0002

【産業上の利用分野】本発明は、エアリフロー、窒素リ
フローまたは赤外線リフロー等に使用されるはんだ付け
用のリフロー装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a soldering reflow apparatus used for air reflow, nitrogen reflow, infrared reflow, or the like.

【0003】0003

【従来の技術】図2に示されるように、炉体11の内部
に仕切板12により複数のプリヒートゾーン13a ,
13b ,13c およびリフローゾーン14が形成さ
れ、これらの各加熱ゾーン13a ,13b ,13c
 ,14にファン15およびヒータ16が設けられたリ
フロー装置がある。そうして、基板搬入口17から基板
搬出口18にわたって炉体内を貫通した基板コンベヤ1
9によって表面実装基板Pを搬送しながら、各プリヒー
トゾーン13a ,13b ,13c およびリフロー
ゾーン14にて、ファン15によりヒータ16で加熱さ
れたエアまたは窒素ガス等の雰囲気を対流させ、その雰
囲気が有する熱で基板Pのソルダペーストをリフローす
る。
2. Description of the Related Art As shown in FIG. 2, a plurality of preheat zones 13a,
13b, 13c and a reflow zone 14 are formed, and each of these heating zones 13a, 13b, 13c
, 14 are equipped with a fan 15 and a heater 16. Then, the substrate conveyor 1 passes through the furnace body from the substrate loading port 17 to the substrate loading port 18.
While conveying the surface mount board P by the fan 15, an atmosphere such as air or nitrogen gas heated by the heater 16 is caused to circulate in each preheat zone 13a, 13b, 13c and the reflow zone 14, and the atmosphere is The solder paste on the board P is reflowed using heat.

【0004】0004

【発明が解決しようとする課題】この種のリフロー装置
の炉体11は、炉全体と外部との間では断熱を考慮した
構造となっているが、炉体内の各加熱ゾーン間の断熱は
あまり考慮されておらず、各加熱ゾーン間に設けられた
仕切板(金属板)12のみでは、各加熱ゾーン13a 
,13b ,13c ,14ごとに独立した温度状態を
設定しにくい。
[Problems to be Solved by the Invention] The furnace body 11 of this type of reflow apparatus has a structure that takes into consideration heat insulation between the entire furnace and the outside, but the heat insulation between each heating zone within the furnace body is insufficient. This is not taken into account, and with only the partition plate (metal plate) 12 provided between each heating zone, each heating zone 13a
, 13b, 13c, and 14 are difficult to set independent temperature states.

【0005】すなわち、従来の仕切板12では各加熱ゾ
ーン間での雰囲気の移動および熱伝導を効果的に防止で
きなかったので、図3に実線で示されるような基板温度
プロファイルを得ようとしても、各加熱ゾーン間の相互
熱干渉により2点鎖線で示されるような基板温度プロフ
ァイルとなってしまう。これでは、熱容量の大きな基板
の場合は、所定のプリヒート温度(150 ℃)が得ら
れなくなるおそれもある。
That is, since the conventional partition plate 12 could not effectively prevent the movement of atmosphere and heat conduction between the heating zones, even if an attempt was made to obtain a substrate temperature profile as shown by the solid line in FIG. , mutual thermal interference between the heating zones results in a substrate temperature profile as shown by the two-dot chain line. In this case, in the case of a substrate with a large heat capacity, there is a possibility that the predetermined preheat temperature (150° C.) cannot be obtained.

【0006】本発明は、このような点に鑑みなされたも
ので、各加熱ゾーン間の断熱性を高めることにより、所
定の温度プロファイルを確保できるようにすることを目
的とするものである。
[0006] The present invention was devised in view of these points, and an object of the present invention is to make it possible to ensure a predetermined temperature profile by increasing the heat insulation between each heating zone.

【0007】〔発明の構成〕[Configuration of the invention]

【0008】[0008]

【課題を解決するための手段】本発明は、ワーク搬送方
向に複数の加熱ゾーン13a ,13b ,13c ,
14が形成されたリフロー装置において、各加熱ゾーン
13a ,13b ,13c ,14の間に分離部21
が設けられるとともに、この各分離部21に各加熱ゾー
ン間をワーク搬送部分のみで連通する絞り部22が設け
られたリフロー装置である。
[Means for Solving the Problems] The present invention provides a plurality of heating zones 13a, 13b, 13c,
In the reflow apparatus in which the heating zone 14 is formed, a separating section 21 is provided between each heating zone 13a, 13b, 13c, and 14.
This is a reflow apparatus in which each separation section 21 is provided with a constriction section 22 that communicates between each heating zone only through the workpiece conveyance section.

【0009】[0009]

【作用】本発明は、分離部21によって各加熱ゾーン間
の熱伝導を抑制するとともに、絞り部22の管路抵抗に
よって各加熱ゾーン間の雰囲気の移動を抑制する。
[Operation] In the present invention, the separation section 21 suppresses heat conduction between the heating zones, and the conduit resistance of the constriction section 22 suppresses the movement of atmosphere between the heating zones.

【0010】0010

【実施例】以下、本発明を図1に示される実施例を参照
して詳細に説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be explained in detail below with reference to an embodiment shown in FIG.

【0011】複数の炉体11がワーク搬送方向に配列さ
れ、その各炉体内にそれぞれ加熱ゾーンが設けられてい
る。すなわち、三つの炉体内にそれぞれ加熱ゾーンとし
てのプリヒートゾーン13a ,13b ,13c が
設けられ、最後の炉体内に加熱ゾーンとしてのリフロー
ゾーン14が設けられている。この各加熱ゾーン13a
 ,13b ,13c ,14にはファン15およびヒ
ータ16が設けられている。
[0011] A plurality of furnace bodies 11 are arranged in the workpiece conveyance direction, and a heating zone is provided in each of the furnace bodies. That is, preheat zones 13a, 13b, and 13c are provided as heating zones in each of the three furnace bodies, and a reflow zone 14 as a heating zone is provided in the last furnace body. Each heating zone 13a
, 13b, 13c, and 14 are provided with a fan 15 and a heater 16.

【0012】各プリヒートゾーン13a ,13b ,
13c の間および最後のプリヒートゾーン13cとリ
フローゾーン14との間には、それぞれ10mm以上の
分離部21が設けられ、この各分離部21に各加熱ゾー
ン間をワーク搬送部分のみで連通する絞り部22が設け
られている。
[0012] Each preheat zone 13a, 13b,
13c and between the last preheat zone 13c and the reflow zone 14, separation sections 21 of 10 mm or more are provided, and each separation section 21 has a constriction section that communicates between each heating zone only through the workpiece conveyance section. 22 are provided.

【0013】最初および最後の炉体には基板搬入口17
および基板搬出口18が設けられ、基板搬入口17から
基板搬出口18にわたって各炉体内を貫通した基板コン
ベヤ19が設けられている。
[0013] A substrate loading port 17 is provided in the first and last furnace bodies.
A substrate conveyor 19 is provided that extends from the substrate carry-in port 17 to the substrate carry-out port 18 and penetrates through each furnace body.

【0014】次に、この実施例の作用を説明する。Next, the operation of this embodiment will be explained.

【0015】基板搬入口17から基板コンベヤ19によ
り炉体内に表面実装基板Pを搬入し、各プリヒートゾー
ン13a ,13b ,13c およびリフローゾーン
14にて、ヒータ16で加熱されたエアまたは窒素ガス
等の雰囲気をファン15により対流させて基板Pに吹付
ける。そして、複数のプリヒートゾーン13a ,13
b ,13c では雰囲気が有する熱で基板Pを予加熱
し、リフローゾーン14ではさらに高温の雰囲気が有す
る熱で基板Pのソルダペーストをリフローする。
The surface mounting board P is carried into the furnace through the board conveyor 19 through the board loading port 17, and is heated with air or nitrogen gas heated by the heater 16 in each of the preheat zones 13a, 13b, 13c and the reflow zone 14. The atmosphere is convected by a fan 15 and blown onto the substrate P. And a plurality of preheat zones 13a, 13
In b and 13c, the substrate P is preheated with the heat of the atmosphere, and in the reflow zone 14, the solder paste on the substrate P is reflowed with the heat of the high temperature atmosphere.

【0016】このとき、分離部21によって各加熱ゾー
ン間が完全に分離されているから、断熱性を確保でき、
各加熱ゾーン間の熱伝導が効果的に抑制される。また、
絞り部22は管路抵抗を持つので、この絞り部22によ
って各加熱ゾーン間での雰囲気の移動が効果的に抑制さ
れる。
At this time, since each heating zone is completely separated by the separating section 21, heat insulation can be ensured.
Heat conduction between each heating zone is effectively suppressed. Also,
Since the constricted portion 22 has conduit resistance, the constricted portion 22 effectively suppresses movement of the atmosphere between the heating zones.

【0017】このようにして、各加熱ゾーン間の熱干渉
を防止すると、各加熱ゾーンごとに設定した独立の雰囲
気温度を効果的に保つことができ、図3に実線で示され
るような基板温度プロファイルを得ることが可能である
By preventing thermal interference between the heating zones in this way, it is possible to effectively maintain an independent ambient temperature set for each heating zone, and the substrate temperature as shown by the solid line in FIG. 3 can be maintained effectively. It is possible to obtain a profile.

【0018】[0018]

【発明の効果】本発明によれば、複数の加熱ゾーンの間
に分離部が設けられるとともに、この各分離部に各加熱
ゾーン間をワーク搬送部分のみで連通する絞り部が設け
られたから、前記分離部および絞り部によって各加熱ゾ
ーン間の熱伝導および雰囲気の移動を効果的に抑制でき
、各加熱ゾーンごとに独立した温度状態を設定できるこ
とから、所定の温度プロファイルを確保できる。
According to the present invention, a separation section is provided between a plurality of heating zones, and each separation section is provided with a constriction section that communicates between each heating zone only through the workpiece conveyance section. The separation section and the constriction section can effectively suppress heat conduction and atmospheric movement between the heating zones, and since independent temperature conditions can be set for each heating zone, a predetermined temperature profile can be ensured.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明のリフロー装置の一実施例を示す断面図
である。
FIG. 1 is a sectional view showing an embodiment of a reflow apparatus of the present invention.

【図2】従来のリフロー装置を示す断面図である。FIG. 2 is a sectional view showing a conventional reflow apparatus.

【図3】本発明のリフロー装置と従来のリフロー装置と
で相違する基板温度プロファイルを示すグラフである。
FIG. 3 is a graph showing different substrate temperature profiles between the reflow apparatus of the present invention and a conventional reflow apparatus.

【符号の説明】[Explanation of symbols]

13a ,13b ,13c     加熱ゾーンとし
てのプリヒートゾーン 14    加熱ゾーンとしてのリフローゾーン21 
   分離部 22    絞り部
13a, 13b, 13c Preheat zone 14 as a heating zone Reflow zone 21 as a heating zone
Separation section 22 Squeezing section

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】  ワーク搬送方向に複数の加熱ゾーンが
形成されたリフロー装置において、各加熱ゾーンの間に
分離部が設けられるとともに、この各分離部に各加熱ゾ
ーン間をワーク搬送部分のみで連通する絞り部が設けら
れたことを特徴とするリフロー装置。
Claim 1: In a reflow apparatus in which a plurality of heating zones are formed in the workpiece conveyance direction, a separation part is provided between each heating zone, and each heating zone is connected to the separation part only by the workpiece conveyance part. A reflow apparatus characterized by being provided with a constriction section.
JP13113591A 1991-06-03 1991-06-03 Reflow apparatus Pending JPH04361870A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13113591A JPH04361870A (en) 1991-06-03 1991-06-03 Reflow apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13113591A JPH04361870A (en) 1991-06-03 1991-06-03 Reflow apparatus

Publications (1)

Publication Number Publication Date
JPH04361870A true JPH04361870A (en) 1992-12-15

Family

ID=15050811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13113591A Pending JPH04361870A (en) 1991-06-03 1991-06-03 Reflow apparatus

Country Status (1)

Country Link
JP (1) JPH04361870A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018169137A (en) * 2017-03-30 2018-11-01 日本碍子株式会社 Heat treatment furnace

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018169137A (en) * 2017-03-30 2018-11-01 日本碍子株式会社 Heat treatment furnace

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