CN108615548A - Novel three freedom meek parallel precise locating platform - Google Patents
Novel three freedom meek parallel precise locating platform Download PDFInfo
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- CN108615548A CN108615548A CN201810217567.2A CN201810217567A CN108615548A CN 108615548 A CN108615548 A CN 108615548A CN 201810217567 A CN201810217567 A CN 201810217567A CN 108615548 A CN108615548 A CN 108615548A
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- differential
- movable beam
- moving platform
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- enlarger
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B9/00—Housing or supporting of instruments or other apparatus
- G12B9/08—Supports; Devices for carrying
- G12B9/10—Instruments boards; Panels; Desks; Racks
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
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Abstract
The present invention discloses a kind of novel three freedom meek parallel precise locating platform, and precisely locating platform is integrally formed for plank wire cutting, including, matrix；Centre is formed with moving platform in the base, and moving platform is connected with the differential enlarger of corresponding symmetrical expression respectively by six groups of in-parallel sheet-like flexible linkages, and precisely locating platform is axially symmetric structure.Advantageous effect is that entire locating platform is that Wire EDM carries out overall processing, avoids Automatic manual transmission；Nano-positioning stage using six symmetrical flexible differential enlargers is in parallel, is not only able to realize moving platform high-precision translation in X/Y plane, and can realize the rotation of moving platform about the z axis；Piezoelectric ceramics avoids piezoelectric ceramics from bearing moment of flexure and torque with flexible amplification mechanism contact surface semicircular in shape contact surface, prevents piezoelectric ceramics from destroying；With moving platform be connected six groups of parallel sheet flexible hinges can realize nano-positioning stage to moving platform X to and Y-direction translational decoupling, improve moving platform kinematic accuracy.
Description
Technical field
The present invention relates to a kind of field of micro-Na manufacture；It is positioned more particularly to a kind of novel three freedom meek parallel precise
Platform.
Background technology
With the development of science and technology, micro ＆ nano technology is rapidly developed, and carries the complicated micro-nano structure of nano-precision
Demand is more and more extensive, but high-precision mini positioning platform restricts always the development of micro ＆ nano technology, is based on piezoelectric-type flexible
Hinge mini positioning platform has been achieved for great breakthrough, but the precisely locating platform of two degrees of freedom is in the majority at present, and three freely
The demand for spending precisely locating platform is more and more urgent.Currently, the most common structure of three freedom precision positioning platform is：X is to flat
Dynamic, Y-direction translation and Z-direction rotation series connection, but this mode structure is not compact, volume is bigger, and intrinsic frequency is caused to reduce.
Invention content
The technical problem to be solved by the present invention is to overcome prior art disadvantage, provide a kind of flat to translation, Y-direction with X
The dynamic three freedom meek parallel precise locating platform low with Z-direction rotation Three Degree Of Freedom, high-precision, manufacturing cost.
The technical scheme is that novel three freedom meek parallel precise locating platform, precisely locating platform are plate
Material wire cutting is integrally formed, including, matrix；It is formed with moving platform in described matrix center, moving platform is in parallel flat by six groups
Row sheet-like flexible linkage is connected with the differential enlarger of corresponding symmetrical expression respectively, and precisely locating platform is axial symmetry knot
Structure.
Along X 1 group or 2 groups of differential enlargers are symmetrically arranged with to the side with moving platform described in Y-direction.
Along X 1 group of differential enlarger, the differential amplification of symmetrical expression of arbitrary side are symmetrically arranged with to the moving platform both sides
The front end setting of mechanism is equipped with piezoelectric ceramic actuator, and symmetrical differential enlarger is driven by the first piezoelectric ceramic actuator
It is dynamic；First piezoelectric ceramic actuator passes through the differential enlarger band moving platform of the coupled symmetrical expression along X to setting
Along X to translation.
Moving platform both sides described in Y-direction are provided with 2 groups of symmetrical differential enlargers, two of arbitrary homonymy are symmetrical poor
The front end setting of dynamic enlarger is equipped with piezoelectric ceramic actuator, and two differential enlargers of symmetrical expression are respectively by the second piezoelectricity
Ceramic driver and the driving of third piezoelectric ceramic actuator；Piezoelectric ceramic actuator passes through coupled pair along Y-direction arrangement
The differential enlarger band moving platform of title formula is translatable along Y-direction.
The differential enlarger of symmetrical expression includes the first movable beam, the second movable beam, the first force transmitting link, third
Movable beam, the 4th movable beam and the second force transmitting link；The piezoelectric ceramic actuator side by tools for bolts ' pretension one end with
Substrate contact, the output end of piezoelectric ceramic actuator are contacted with the first movable beam；First movable beam is respectively with second
Movable beam is connected with the second force transmitting link；Second movable beam is connect with fixing base, the output of the second movable beam
End is connect with the first force transmitting link；The other end of first force transmitting link is connect with third movable beam；Second power transmission
Connecting rod end is connect with the 4th movable beam, and the 4th movable beam is connect with third movable beam, third movable beam output end
End and sheet-like flexible hinge connection.
The parallel sheet flexure hinge mechanism includes two parallel sheet-like flexible hinges, parallel sheet-like flexible hinge
It is connect with moving platform, realizes the decoupling that nano-positioning stage is translatable to moving platform X to translation and Y-direction.
The contact surface of first movable beam and piezoelectric ceramics is semicircle.
It is formed the invention has the advantages that entire locating platform carries out overall processing using Electric Discharge Wire-cutting Technology,
Avoid assembly mechanically；Nano-positioning stage using six symmetrical flexible differential enlargers is in parallel, is not only able to reality
Existing moving platform high-precision translation in X/Y plane, and can realize the rotation of moving platform about the z axis；X is to Y-direction nano-positioning stage
It is compact-sized, it can make platform that there is higher intrinsic frequency；It being capable of eliminating machine using symmetrical flexible differential enlarger
Coupling error caused by transmission, and this flexible hinge structure has bigger displacement equations ratio so that and moving platform is in X
There is larger stroke to the translation of, Y-direction；Piezoelectric ceramics and flexible amplification mechanism contact surface be designed to semi-circular contact face to avoid
Piezoelectric ceramics bears moment of flexure and torque, prevents the destruction of piezoelectric ceramics；Six groups of parallel sheet flexible hinges being connected with moving platform
It can realize the decoupling that nano-positioning stage is translatable to moving platform X to translation and Y-direction, improve the kinematic accuracy of moving platform.
Description of the drawings
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the part-structure enlarged diagram of the present invention.
In figure：
1, matrix 2, pretension bolt 3, the first piezoelectric ceramic actuator
4, symmetrical differential displacement enlarger 5, the first parallel sheet flexure hinge mechanism
6, the second piezoelectric ceramic actuator 7, the second parallel sheet flexure hinge mechanism
8, third piezoelectric ceramic actuator 9, moving platform.
Specific implementation mode
Invention is further described in detail with reference to the accompanying drawings and detailed description：
As depicted in figs. 1 and 2, the novel three freedom meek parallel precise locating platform of the present invention, precisely locating platform is plank
Wire cutting is integrally formed, including, matrix 1；It is formed with moving platform 9 in 1 center of described matrix, moving platform 9 is in parallel by six groups
Parallel sheet flexible hinge is connected with the differential enlarger 4 of corresponding symmetrical expression respectively, and precisely locating platform is X-axis, Y-axis axis pair
Claim structure.It is worth noting that parallel sheet flexure hinge mechanism includes two parallel sheet-like flexible hinges, and as one group, two
A parallel sheet-like flexible hinge is connected in parallel.
Along X to and Y-direction, the side of moving platform 9 be symmetrically arranged with 1 group or 2 groups of differential enlargers 4, X is to the difference with Y-direction
It is connected in parallel between dynamic enlarger；Wherein, the front end of the symmetrical differential enlarger in symmetrical side 4 is equipped with piezoelectricity pottery
Porcelain driver, the symmetrical differential enlarger in the other side of symmetrical side 4 do not install piezoelectric ceramic actuator.
Embodiment：
Along X 1 group of differential enlarger 4, the differential enlarger of symmetrical expression of arbitrary side are symmetrically arranged with to 9 both sides of the moving platform
The front end setting of structure 4 is equipped with piezoelectric ceramic actuator, and symmetrical differential enlarger 4 is driven by the first piezoelectric ceramic actuator 3
It is dynamic；First piezoelectric ceramic actuator 3 is put down by coupled driven to the differential enlarger 4 of symmetrical expression of setting along X
Platform 9 is along X to translation.
9 both sides of moving platform described in Y-direction are provided with 2 groups of symmetrical differential enlargers 4, two symmetrical expressions of arbitrary homonymy
The front end setting of differential enlarger 4 is equipped with piezoelectric ceramic actuator, and the differential enlarger of two symmetrical expressions 4 is respectively by second
Piezoelectric ceramic actuator 6 and third piezoelectric ceramic actuator 8 drive；Piezoelectric ceramic actuator is by coupled along Y-direction cloth
The differential enlarger 4 of symmetrical expression set is translatable with moving platform 9 along Y-direction.
The differential enlarger 4 of symmetrical expression includes the first movable beam 41, the second movable beam 42, the first force transmitting link
43, third movable beam 44, the 4th movable beam 45 and the second force transmitting link 46；First movable beam 41 and piezoelectric ceramics
It is movable semicircle with flexible amplification mechanism contact surface, piezoelectric ceramic actuator side pre-tightens one end and matrix 1 by bolt 2
Contact, the output end of piezoelectric ceramic actuator are contacted with the first movable beam 41；First movable beam 41 is respectively with second
Movable beam 42 and the connection of the second force transmitting link 46；Second movable beam 42 is connect with fixing base 1, the second movable beam
42 output end is connect with the first force transmitting link 43；The other end of first force transmitting link 43 connects with third movable beam 44
It connects；Second force transmitting link, 46 end is connect with the 4th movable beam 45, the 4th movable beam 45 and third movable beam 44
Connection, third movable beam 44 export end and connect with the first sheet-like flexible linkage 5 or the second sheet-like flexible linkage 7
It connects.
Parallel with the third sheet flexure hinge mechanism of the first parallel sheet flexure hinge mechanism 57 respectively includes two
Parallel sheet-like flexible hinge, parallel sheet-like flexible hinge are connect with moving platform 9, the other side of parallel sheet-like flexible hinge
It connects third movable beam 44 and exports end, realize the decoupling that nano-positioning stage is translatable to moving platform X to translation and Y-direction.
The operation principle of the present invention：
By changing the voltage on the first piezoelectric ceramic actuator 3, the first piezoelectric ceramic actuator 3 is made to pass through coupled edge
The differential enlarger 4 of symmetrical expression from X to arrangement with moving platform 9 along X to translation.
By giving the second piezoelectric ceramic actuator 6 and third piezoelectric ceramic actuator 8 identical voltage simultaneously, make second
Piezoelectric ceramic actuator 6 and third piezoelectric ceramic actuator 8 are put by the way that the coupled symmetrical expression along Y-direction arrangement is differential respectively
Great institutions 4 are translatable with moving platform 9 along Y-direction simultaneously.
By inputting an initial voltage to the second piezoelectric ceramic actuator 6 and third piezoelectric ceramic actuator 8 first, so
Input the opposite voltage increment in direction equal in magnitude again afterwards so that the second piezoelectric ceramic actuator 6 and third Piezoelectric Ceramic
Device 8 generates elongation and shortens respectively, can get rotation of the platform 9 along the center line of its vertical X/Y plane.
In conclusion the moving platform 9 of the present invention is not only able to realize X to translation and Y-direction translation, moreover it is possible to realize vertical along it
The center rotating of X/Y plane.
It is worth noting that protection scope of the present invention is not limited to above-mentioned specific example mode, it is according to the present invention
Basic fundamental is conceived, it is also possible to which the purpose of the present invention may be implemented in basically same structure, as long as those of ordinary skill in the art
Need not move through creative work, you can the embodiment associated all belongs to the scope of protection of the present invention.
Claims (7)
1. a kind of novel three freedom meek parallel precise locating platform, which is characterized in that precisely locating platform is that plank line is cut
Integrated molding is cut, including, matrix（1）；In described matrix（1）Center is formed with moving platform（9）, moving platform（9）Simultaneously by six groups
Connection parallel sheet flexure hinge mechanism respectively with the corresponding differential enlarger of symmetrical expression（4）Connection, precisely locating platform are
Axially symmetric structure.
2. novel three freedom meek parallel precise locating platform according to claim 1, which is characterized in that along X to and Y
To the moving platform（9）Side be symmetrically arranged with 1 group or 2 groups of differential enlargers 4.
3. novel three freedom meek parallel precise locating platform according to claim 2, which is characterized in that along X to institute
State moving platform（9）Both sides are symmetrically arranged with 1 group of differential enlarger（4）, the differential enlarger of symmetrical expression of arbitrary side（4）'s
Front end setting is equipped with piezoelectric ceramic actuator, symmetrical differential enlarger（4）By the first piezoelectric ceramic actuator（3）It drives
It is dynamic；First piezoelectric ceramic actuator（3）By it is coupled along X to the differential enlarger of symmetrical expression of setting（4）Band
Moving platform（9）Along X to translation.
4. novel three freedom meek parallel precise locating platform according to claim 2, which is characterized in that along Y-direction institute
State moving platform（9）Both sides are provided with 2 groups of symmetrical differential enlargers（4）, two differential enlargers of symmetrical expression of arbitrary homonymy
Structure（4）Front end setting piezoelectric ceramic actuator, two differential enlargers of symmetrical expression are installed（4）It is made pottery respectively by the second piezoelectricity
Porcelain driver and the driving of third piezoelectric ceramic actuator；Piezoelectric ceramic actuator is by coupled along the symmetrical of Y-direction arrangement
The differential enlarger of formula（4）Band moving platform（9）It is translatable along Y-direction.
5. the novel three freedom meek parallel precise locating platform according to any claim in Claims 1-4,
It is characterized in that, the differential enlarger of symmetrical expression（4）Including the first movable beam（41）, the second movable beam（42）, first
Force transmitting link（43）, third movable beam（44）, the 4th movable beam（45）With the second force transmitting link（46）；The piezoelectric ceramics
Driver side passes through tools for bolts ' pretension one end and matrix（1）Contact, the output end of piezoelectric ceramic actuator and the first movable beam
（41）Contact；First movable beam（41）Respectively with the second movable beam（42）With the second force transmitting link（46）Connection；Institute
State the second movable beam（42）With fixing base（1）Connection, the second movable beam（42）Output end and the first force transmitting link
（43）Connection；First force transmitting link（43）The other end and third movable beam（44）Connection；Second force transmitting link
（46）End and the 4th movable beam（45）Connection, the 4th movable beam（45）With third movable beam（44）Connection, third can
Dynamic crossbeam（44）Export end and sheet-like flexible hinge（5）Connection.
6. novel three freedom meek parallel precise locating platform according to claim 1, which is characterized in that described parallel
Sheet-like flexible linkage includes two parallel sheet-like flexible hinges, parallel sheet-like flexible hinge and moving platform（9）Connection,
Realize the decoupling that nano-positioning stage is translatable to moving platform X to translation and Y-direction.
7. novel three freedom meek parallel precise locating platform according to claim 5, which is characterized in that described first
Movable beam（41）Contact surface with piezoelectric ceramics is semicircle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810217567.2A CN108615548A (en) | 2018-03-16 | 2018-03-16 | Novel three freedom meek parallel precise locating platform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810217567.2A CN108615548A (en) | 2018-03-16 | 2018-03-16 | Novel three freedom meek parallel precise locating platform |
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| CN108615548A true CN108615548A (en) | 2018-10-02 |
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ID=63658748
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| CN201810217567.2A Pending CN108615548A (en) | 2018-03-16 | 2018-03-16 | Novel three freedom meek parallel precise locating platform |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109765842A (en) * | 2019-01-17 | 2019-05-17 | 湖北工程学院 | A kind of micro-positioning table |
| CN109795981A (en) * | 2019-01-18 | 2019-05-24 | 宁波大学 | The parallel micromotion platform of multistage linking output |
| CN109857163A (en) * | 2019-03-25 | 2019-06-07 | 中国科学院长春光学精密机械与物理研究所 | A kind of plane and straight line displacement monitoring control system |
| CN110010189A (en) * | 2019-04-23 | 2019-07-12 | 山东理工大学 | A kind of big stroke two dimension precise jiggle platform of achievable mobile decoupling |
| CN112447262A (en) * | 2019-08-27 | 2021-03-05 | 天津大学 | Three-translation decoupling micro positioner based on rotary lever half-bridge amplifier |
| CN112865592A (en) * | 2020-12-31 | 2021-05-28 | 天津理工大学 | Parallel three-degree-of-freedom precision micro-motion mechanism of composite differential branched chain and working method thereof |
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| CN201413642Y (en) * | 2009-06-08 | 2010-02-24 | 上海理工大学 | TDOF (three degrees of freedom) integrated flexible precision positioning table |
| CN101770182A (en) * | 2010-01-22 | 2010-07-07 | 天津大学 | Three-degree of freedom flexible precision positioning workbench |
| CN106251909A (en) * | 2016-08-19 | 2016-12-21 | 天津大学 | A kind of high accuracy, big stroke freedom degree parallel connection mini positioning platform |
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| CN2466769Y (en) * | 2001-02-23 | 2001-12-19 | 北京远泰通达科技开发有限责任公司 | Three-freedom super-precision automatic location platform |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109765842A (en) * | 2019-01-17 | 2019-05-17 | 湖北工程学院 | A kind of micro-positioning table |
| CN109795981A (en) * | 2019-01-18 | 2019-05-24 | 宁波大学 | The parallel micromotion platform of multistage linking output |
| CN109795981B (en) * | 2019-01-18 | 2020-12-25 | 宁波大学 | Multi-stage linkage output parallel micro-motion platform |
| CN109857163A (en) * | 2019-03-25 | 2019-06-07 | 中国科学院长春光学精密机械与物理研究所 | A kind of plane and straight line displacement monitoring control system |
| CN110010189A (en) * | 2019-04-23 | 2019-07-12 | 山东理工大学 | A kind of big stroke two dimension precise jiggle platform of achievable mobile decoupling |
| CN110010189B (en) * | 2019-04-23 | 2022-02-15 | 山东理工大学 | Large-stroke two-dimensional precise micro-motion platform capable of realizing motion decoupling |
| CN112447262A (en) * | 2019-08-27 | 2021-03-05 | 天津大学 | Three-translation decoupling micro positioner based on rotary lever half-bridge amplifier |
| CN112865592A (en) * | 2020-12-31 | 2021-05-28 | 天津理工大学 | Parallel three-degree-of-freedom precision micro-motion mechanism of composite differential branched chain and working method thereof |
| CN112865592B (en) * | 2020-12-31 | 2022-06-24 | 天津理工大学 | Parallel three-degree-of-freedom precision micro-motion mechanism of composite differential branched chain and working method thereof |
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Application publication date: 20181002 |