CN101786269B - Micrometer-nanometer transmission platform - Google Patents
Micrometer-nanometer transmission platform Download PDFInfo
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- CN101786269B CN101786269B CN2010101011753A CN201010101175A CN101786269B CN 101786269 B CN101786269 B CN 101786269B CN 2010101011753 A CN2010101011753 A CN 2010101011753A CN 201010101175 A CN201010101175 A CN 201010101175A CN 101786269 B CN101786269 B CN 101786269B
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- 230000010355 oscillation Effects 0.000 description 2
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Abstract
The invention discloses a micrometer-nanometer transmission platform. The transmission platform comprises a base, a lower platform component and an upper platform component, wherein by the piezoelectric effect, the lower platform component can perform straight-line movements along the X and Y directions of a coordinate system, the upper platform component can perform straight-line movements along the Z direction of the coordinate system and rotation around the X and Y directions of the coordinate system, and the travels are increased by a displacement magnifying mechanism; an orientating mechanism relatively arranged on the lower platform component can effectively eliminate the displacement coupling between shafts; and simultaneously, the transmission platform is manufactured in one piece, all components are hinged by flexible hinges, the no-gap and no-friction platform transmission is completely realized, the transmission accuracy of the platform is effectively improved; in addition, the piezoelectric ceramic pipe is high in displacement resolution and rapid in response speed; and thus, the micrometer-nanometer transmission platform has the advantages of high accuracy, large travel, big rotation, more degree of freedom, high resolution, high frequency response and the like.
Description
Technical field
The present invention relates to be used for the multi-field superelevation precision drive platform that carries out micro-nano processing, micro-nano operation and micro-nano location such as microelectronics, Aero-Space, bioengineering, medicine equipment, particularly a kind of micrometer-nanometer transmission platform.
Background technology
Nanoprocessing, operation and location are the limit of micro-nano technology, just realize the micro/nano level precision through " micro-nano processing, operation and location ".
In recent years; Along with developing rapidly of subjects such as microelectric technique, Aero-Space, bioengineering; The application of Ultraprecision Machining no longer is confined to minority leading-edge fields such as national defence, Aeronautics and Astronautics; Various civil areas are also brought into use Ultraprecision Machining, and it is used more and more widely, meanwhile; The demand of the positioner of nano-precision, operating means, processing unit (plant) etc. also in quick growth, and is required them to have big stroke, big rigidity, high stability, multiple degrees of freedom, is easy to characteristic such as manufacturing.
At present; The device that is used for nanoprocessing, operation has magnetic suspension workbench and Stewart platform, though these two kinds devices can satisfy the requirement of big stroke, is difficult to reach the nano-precision requirement; Simultaneously, also exist complex structure, shortcoming such as big, wayward takes up room.In the nanoprocessing field; Platform based on piezoelectric ceramic actuator is the focus of current research, and it possesses advantages such as precision height, compact conformation, response speed be fast, in the prior art; Grand, the little two-stage locate mode of mobile employing of big stroke realizes; Have mechanism's complicacy, deficiency such as wayward, and total head electricity drives platform also is confined to the micron order of two dimension and moves, and does not also possess the rotary oscillation function; Freedom of motion is limited, and the ability of its amount of movement and motion all is difficult to satisfy the requirement of complicated processing and operation.
To above-mentioned deficiency, need to explore a kind of simple in structure, high accuracy, high rigidity, be easy to control, possess big stroke, big swing, multivariant, be used for the platform of micro-nano processing, operation and location, to satisfy multi-field demand.
Summary of the invention
In view of this; The present invention provides a kind of micrometer-nanometer transmission platform; This platform can have characteristics such as high accuracy, high rigidity, big stroke, big swing, can be applicable to a plurality of fields such as Aero-Space, ultraprecise processing, precision optics assembling, photoetching technique, medicine equipment, bioengineering.
Micrometer-nanometer transmission platform of the present invention comprises base, lower platform assembly and upper mounting plate assembly, and what get base upper surface is initial point a bit, sets up rectangular coordinate system in space X-Y-Z with the base upper surface for the XY plane;
Said lower platform assembly comprise lower platform, X to orientation assemblies, Y to orientation assemblies, X to driven unit and Y to driven unit;
Said X comprises along Y to I of attitude reference device that is relatively arranged on the lower platform two ends and the II of attitude reference device to orientation assemblies; Said Y comprises along X to III of attitude reference device that is relatively arranged on the lower platform two ends and the IV of attitude reference device to orientation assemblies; Said I of attitude reference device and the III of attitude reference device are by three hinged successively formation of rigid links; The hinged respectively lower platform in its two ends also forms the plane four-bar linkage structure with lower platform jointly; II of attitude reference device and the IV of attitude reference device are fixedly set on the base from the 4th rigid links of any end by seven hinged successively formation of rigid links, and the hinged respectively lower platform in its two ends also forms plane eight bar linkage structures with lower platform jointly;
Said X includes displacement amplifying mechanism I and piezoelectric ceramic tube to driven unit and Y to driven unit; Said displacement amplifying mechanism I is the plane eight-bar linkage; The two ends of piezoelectric ceramic tube are fixedly connected with two little displacement rigid links of eight-bar linkage respectively; In two big displacement rigid links of eight-bar linkage, one is fixedly set on the base, corresponding hinge orientation I of mechanism of another root and the III of attitude reference device;
Said upper mounting plate assembly comprise upper mounting plate and between upper mounting plate and lower platform and be distributed in the circumferential Z of Z axle to driven unit I, Z to driven unit II and Z to driven unit III; Said Z includes displacement amplifying mechanism II and piezoelectric ceramic tube to driven unit II and Z to driven unit III to driven unit I, Z; Said displacement amplifying mechanism II is the plane eight-bar linkage; The two ends of piezoelectric ceramic tube are fixedly connected with two little displacement rigid links of eight-bar linkage respectively; In two big displacement rigid links of eight-bar linkage, one is fixedly connected lower platform, the hinged upper mounting plate of another root.
Further; Said X includes four displacement amplifying mechanism I that are set up in parallel and corresponding piezoelectric ceramic tube to driven unit and Y to driven unit; The big displacement rigid links of adjacent two displacement amplifying mechanism I is fixedly connected; Said Z includes four the displacement amplifying mechanism IIs that are set up in parallel and corresponding piezoelectric ceramic tube to driven unit II and Z to driven unit III to driven unit I, Z, and the big displacement rigid links of adjacent two displacement amplifying mechanism II is fixedly connected;
Further; Said four displacement amplifying mechanism I are set up in parallel with two every layer mode stacked on top of one another; Its big displacement rigid links is fixedly connected sequentially, and said four displacement amplifying mechanism II are set up in parallel with two every layer mode stacked on top of one another, and its big displacement rigid links is fixedly connected sequentially;
Further, the said hinged flexible, hinged of using the sheet flexible hinge that is;
Further, said lower platform assembly and upper mounting plate assembly are processed one.
The beneficial effect of the invention: micrometer-nanometer transmission platform of the present invention; Comprise base, lower platform assembly and upper mounting plate assembly; Utilize piezo-electric effect to make the lower platform assembly realize X and Y traverse line sexual act along coordinate system; The upper mounting plate assembly realizes along the Z traverse line sexual act of coordinate system with around the rotary oscillation action of X, Y axle parallel axes, and increases stroke through displacement amplifying mechanism, makes this platform have big stroke, big swing, multiple degrees of freedom, be easy to make and advantages such as control; The attitude reference device that is oppositely arranged on the lower platform assembly; Also effectively eliminate between centers displacement coupling, simultaneously, passed through the hinged of flexible hinge between each member; No gap, the nothing friction of platform transmission have been realized fully; Effectively improved the transmission accuracy of platform, added that the displacement resolution of piezoelectric ceramic tube is high, response speed is fast, made micrometer-nanometer transmission platform of the present invention also possess advantages such as high accuracy, high-resolution, high frequency sound.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the present invention is further described.
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the plan structure sketch map of lower platform assembly;
Fig. 3 is the structural principle sketch map of lower platform assembly;
Fig. 4 is four range upon range of structural representations that are set up in parallel displacement amplifying mechanism;
Fig. 5 is the left view of Fig. 4;
Fig. 6 is the principle schematic of displacement amplifying mechanism.
The specific embodiment
Fig. 1 is a structural representation of the present invention; Fig. 2 is the plan structure sketch map of lower platform assembly; Fig. 3 is the structural principle sketch map of lower platform assembly, and Fig. 4 is four range upon range of structural representations that are set up in parallel displacement amplifying mechanism, and Fig. 5 is the left view of Fig. 4; Fig. 6 is the principle schematic of displacement amplifying mechanism; As shown in the figure: the micrometer-nanometer transmission platform of present embodiment comprises square base 1, lower platform assembly and the upper mounting plate assembly that sets gradually from the bottom to top, and the center of getting base 1 upper surface is an initial point, is that rectangular coordinate system in space X-Y-Z is set up on the XY plane with base 1 upper surface; The both sides that the X axle is adjacent with base respectively with the Y axle are parallel;
Said lower platform assembly comprise lower platform 2, X to orientation assemblies, Y to orientation assemblies, X to driven unit 3 and Y to driven unit 4;
Said X comprises along Y to I5 of attitude reference device that is relatively arranged on lower platform 2 two ends and the II6 of attitude reference device to orientation assemblies; Said Y comprises along X to III7 of attitude reference device that is relatively arranged on lower platform 2 two ends and the IV8 of attitude reference device to orientation assemblies; Said I5 of attitude reference device and the III7 of attitude reference device are by three hinged successively formation of rigid links; Its two ends are distinguished hinged lower platform 2 and are formed the plane four-bar linkage structures jointly with lower platform 2; II6 of attitude reference device and the IV8 of attitude reference device are by seven hinged successively formation of rigid links; Be fixedly set on the base 1 from the 4th rigid links of any end, the respectively hinged lower platform 2 in II6 of attitude reference device and the IV8 of attitude reference device two ends separately also forms two plane eight bar linkage structures with lower platform 2 respectively jointly;
Said X includes displacement amplifying mechanism I9 and piezoelectric ceramic tube 10 with Y to driven unit 4 to driven unit 3; Said displacement amplifying mechanism I9 is the plane eight-bar linkage, and the two ends of piezoelectric ceramic tube 10 are fixedly connected with two little displacement rigid links of eight-bar linkage respectively, in two big displacement rigid links of eight-bar linkage; One is fixedly set on the base 1; Corresponding hinge orientation I5 of mechanism of another root and the III7 of attitude reference device, as shown in Figure 6, described little displacement rigid links is meant when connecting rod mechanism movement; Minimum two of change in displacement in all motion bars, big displacement rigid links then refers to maximum two of change in displacement in all motion bars;
Said upper mounting plate assembly comprise upper mounting plate 11 and between upper mounting plate 11 and lower platform 2 and be distributed in the circumferential Z of Z axle to driven unit I12, Z to driven unit II13 and Z to driven unit III14; Said Z includes displacement amplifying mechanism II15 and piezoelectric ceramic tube 10 to driven unit II13 and Z to driven unit III14 to driven unit I12, Z; Said displacement amplifying mechanism II15 is the plane eight-bar linkage; The two ends of piezoelectric ceramic tube 10 are fixedly connected with two little displacement rigid links of eight-bar linkage respectively; In two big displacement rigid links of eight-bar linkage, one is fixedly connected lower platform 2, the hinged upper mounting plate 11 of another root.
During use; X can drive lower platform to orientation assemblies and Y to driven unit and Y at X to driven unit and make precise linear motion along directions X and Y direction under the effect of orientation assemblies; In addition; When Z to driven unit I, Z to driven unit II and Z when driven unit III exports equal displacement simultaneously, three's driven in common upper mounting plate is done linear movement along the Z direction; When Z does not export displacement to driven unit I; Z to driven unit II and Z when driven unit III exports the displacement of opposite sign but equal magnitude simultaneously; Upper mounting plate a certain axis parallel with the X axle in the XZ plane rotates; Through elongation of control piezoelectric ceramic tube and shortening, can make upper mounting plate around this reciprocally swinging rotation; When Z to driven unit II and Z to driven unit III simultaneously with Z during to the displacement of driven unit I output opposite sign but equal magnitude; Upper mounting plate a certain axis parallel with the Y axle in the YZ plane rotates; Through elongation of control piezoelectric ceramic tube and shortening, can make upper mounting plate around this reciprocally swinging rotation; This shows; Micrometer-nanometer transmission platform of the present invention can be realized the big mobile transmission that reaches around the big swing 5DOF of XY axle along the XYZ axle; Simultaneously; As shown in Figure 6, the displacement amplifying mechanism of eight bar linkage structures also can make piezoelectric ceramic tube in the drawings the less displacement x of x direction output be enlarged into the big displacement y of y direction output in the drawings, realized the output of big stroke.
Said X includes four the displacement amplifying mechanism Is that are set up in parallel 9 and corresponding piezoelectric ceramic tube 10 with Y to driven unit 4 to driven unit 3; The big displacement rigid links of adjacent two displacement amplifying mechanism I 9 is fixedly connected; Said Z includes four the displacement amplifying mechanism II15s that are set up in parallel and corresponding piezoelectric ceramic tube 10 to driven unit II13 and Z to driven unit III14 to driven unit I12, Z; The big displacement rigid links of adjacent two displacement amplifying mechanism II15 is fixedly connected; It is displacement superposed that four displacement amplifying mechanisms that are set up in parallel are exported, and can increase by 4 times stroke, certainly; Use the displacement amplifying mechanism that other quantity are set up in parallel beyond 4, can realize the object of the invention equally.In the present embodiment; Said four displacement amplifying mechanism I9 are set up in parallel with two every layer mode stacked on top of one another, and its big displacement rigid links is fixedly connected sequentially, and said four displacement amplifying mechanism II15 are set up in parallel with two every layer mode stacked on top of one another; Its big displacement rigid links is fixedly connected sequentially; The piezoelectric ceramic tube of control the upper and lower can obtain the stack of stroke, through range upon range of setting with opposite direction deformation; Can effectively reduce the shared horizontal space of displacement amplifying mechanism, make the transmission platform more compact structure.
In the present embodiment; Saidly hingedly avoid the use of common articulated manner, the driving error of effectively having avoided the factor such as gap, friction of traditional articulated manner to cause all through sheet flexible hinge flexible, hinged; Realize no gap, the nothing friction of platform transmission, effectively improved the precision of transmission platform.
In the present embodiment, said lower platform assembly and upper mounting plate assembly are processed one, are promptly formed by processes such as the whole block material warp cut, bores, mills, and compact conformation, no gap, nothing rub, and can effectively improve the precision of transmission platform.
Explanation is at last; Above embodiment is only unrestricted in order to technical scheme of the present invention to be described; Although with reference to preferred embodiment the present invention is specified, those of ordinary skill in the art should be appreciated that and can make amendment or be equal to replacement technical scheme of the present invention; And not breaking away from the aim and the scope of technical scheme of the present invention, it all should be encompassed in the middle of the claim scope of the present invention.
Claims (5)
1. micrometer-nanometer transmission platform is characterized in that: comprise base (1), lower platform assembly and upper mounting plate assembly, that gets base (1) upper surface a bit is initial point, is that rectangular coordinate system in space X-Y-Z is set up on the XY plane with base (1) upper surface;
Said lower platform assembly comprise lower platform (2), X to orientation assemblies, Y to orientation assemblies, X to driven unit (3) and Y to driven unit (4);
Said X comprises along Y to I of attitude reference device (5) that is relatively arranged on lower platform (2) two ends and the II of attitude reference device (6) to orientation assemblies; Said Y comprises along X to III of attitude reference device (7) that is relatively arranged on lower platform (2) two ends and the IV of attitude reference device (8) to orientation assemblies; Said I of attitude reference device (5) and the III of attitude reference device (7) are by three hinged successively formation of rigid links; Its two ends are distinguished hinged lower platform (2) and are formed the plane four-bar linkage structure jointly with lower platform (2); II of attitude reference device (6) and the IV of attitude reference device (8) are by seven hinged successively formation of rigid links; Be fixedly set on the base (1) from the 4th rigid links of any end, its two ends are distinguished hinged lower platform (2) and are formed plane eight bar linkage structures jointly with lower platform (2);
Said X includes displacement amplifying mechanism I (9) and piezoelectric ceramic tube (10) to driven unit (3) and Y to driven unit (4); Said displacement amplifying mechanism I (9) is the plane eight-bar linkage; The two ends of piezoelectric ceramic tube (10) are fixedly connected with two little displacement rigid links of eight-bar linkage respectively; In two big displacement rigid links of eight-bar linkage, one is fixedly set on the base (1), corresponding hinge orientation I of mechanism (5) of another root and the III of attitude reference device (7);
Said upper mounting plate assembly comprise upper mounting plate (11) and be positioned at upper mounting plate (11) and lower platform (2) between and be distributed in the circumferential Z of Z axle to driven unit I (12), Z to driven unit II (13) and Z to driven unit III (14); Said Z includes displacement amplifying mechanism II (15) and piezoelectric ceramic tube (10) to driven unit II (13) and Z to driven unit III (14) to driven unit I (12), Z; Said displacement amplifying mechanism II (15) is the plane eight-bar linkage; The two ends of piezoelectric ceramic tube (10) are fixedly connected with two little displacement rigid links of eight-bar linkage respectively; In two big displacement rigid links of eight-bar linkage; One is fixedly connected lower platform (2), the hinged upper mounting plate of another root (11).
2. micrometer-nanometer transmission platform according to claim 1; It is characterized in that: said X includes four displacement amplifying mechanism I (9) that are set up in parallel and corresponding piezoelectric ceramic tube (10) to driven unit (3) and Y to driven unit (4); The big displacement rigid links of adjacent two displacement amplifying mechanism I (9) is fixedly connected; Said Z includes four the displacement amplifying mechanism IIs (15) that are set up in parallel and corresponding piezoelectric ceramic tube (10) to driven unit II (13) and Z to driven unit III (14) to driven unit I (12), Z, and the big displacement rigid links of adjacent two displacement amplifying mechanism II (15) is fixedly connected.
3. micrometer-nanometer transmission platform according to claim 2; It is characterized in that: said four displacement amplifying mechanism I (9) are set up in parallel with two every layer mode stacked on top of one another; Its big displacement rigid links is fixedly connected sequentially; Said four displacement amplifying mechanism II (15) are set up in parallel with two every layer mode stacked on top of one another, and its big displacement rigid links is fixedly connected sequentially.
4. according to claim 2 or 3 described micrometer-nanometer transmission platforms, it is characterized in that: the said hinged flexible, hinged of using the sheet flexible hinge that is.
5. micrometer-nanometer transmission platform according to claim 4 is characterized in that: said lower platform assembly and upper mounting plate assembly are processed one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101011753A CN101786269B (en) | 2010-01-26 | 2010-01-26 | Micrometer-nanometer transmission platform |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010101011753A CN101786269B (en) | 2010-01-26 | 2010-01-26 | Micrometer-nanometer transmission platform |
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| CN101786269A CN101786269A (en) | 2010-07-28 |
| CN101786269B true CN101786269B (en) | 2012-05-02 |
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| CN2010101011753A Expired - Fee Related CN101786269B (en) | 2010-01-26 | 2010-01-26 | Micrometer-nanometer transmission platform |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102107370B (en) * | 2010-12-07 | 2012-10-17 | 中国商用飞机有限责任公司 | Compensation mechanism |
| CN102284955A (en) * | 2011-07-22 | 2011-12-21 | 吉林大学 | Six-freedom degree micro robot based on hybrid drive |
| CN102818688B (en) * | 2012-08-27 | 2015-05-20 | 中国矿业大学 | Loading device and method of vibration test of imitating flexible member |
| CN103104793B (en) * | 2013-01-25 | 2015-03-11 | 重庆大学 | Integrated type six degrees of freedom precision positioning platform |
| CN108000486B (en) * | 2017-08-03 | 2024-03-08 | 宁波大学 | Three-degree-of-freedom compliant piezoelectric micro gripper |
| CN107492398A (en) * | 2017-09-12 | 2017-12-19 | 苏州迈客荣自动化技术有限公司 | A kind of one-dimensional micro-displacement platform |
| CN109795981B (en) * | 2019-01-18 | 2020-12-25 | 宁波大学 | Multi-stage linkage output parallel micro-motion platform |
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