CN106965133B - A kind of Three Degree Of Freedom locating platform of stiffness variable - Google Patents
A kind of Three Degree Of Freedom locating platform of stiffness variable Download PDFInfo
- Publication number
- CN106965133B CN106965133B CN201710330518.5A CN201710330518A CN106965133B CN 106965133 B CN106965133 B CN 106965133B CN 201710330518 A CN201710330518 A CN 201710330518A CN 106965133 B CN106965133 B CN 106965133B
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- China
- Prior art keywords
- connecting rod
- moving platform
- input connecting
- flexible hinge
- input
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
Abstract
The invention discloses a kind of Three Degree Of Freedom locating platforms of stiffness variable, and including pedestal and moving platform formed therein, moving platform is connected with pedestal by three diamond shape flexible hinges being evenly distributed；There are three the input connecting rods being evenly distributed for moving platform tool, are formed with the small rigidity compliant mechanism of double airfoil type being arranged symmetrically in the input terminal of input connecting rod, the outside of small rigidity compliant mechanism is connect with pedestal；A convex block is respectively provided in the intermediate two sides of input connecting rod；Corresponding two convex blocks are formed with one big rigidity compliant mechanism on the base, big rigidity compliant mechanism is made of two parts for being arranged symmetrically in input connecting rod two sides, each part is being formed with a groove close to the side of input connecting rod, two convex blocks are extended to correspondingly in two grooves, and gap is equipped between the inner sidewall of groove and the side of convex block.Stroke of the present invention is big, and precision is high, simple and compact for structure, at low cost.
Description
Technical field
The present invention relates to micro-nano location technology, the Three Degree Of Freedom locating platform of especially a kind of stiffness variable.
Background technique
With the further development of micro & nano technology, status Precision Machining measurement, medical machinery, space material processing,
Increasingly significant in nanotechnology, micro- location technology is essential wherein, mini positioning platform be widely used in micromechanics, detection,
In the fields such as optics, microelectronics system manufacture.In high precision, big stroke, high bandwidth are the evaluation indexes to mini positioning platform, however
In existing technology, often it is difficult the two with big stroke in high precision and takes into account, it is however generally that, micro- positioning of nano-precision can be reached
System stroke only has more than ten microns, and up to a hundred microns of stroke of micro-positioning its precision is extremely difficult to nanoscale.For having
System of Fine Feed such as nano impression, micro- milling, nanometer delineation, scanning probe system etc., the cutter or probe of system are logical
It is often that the accurate feeding of the fast feed through excessive stroke followed by small stroke and high precision could be contacted with workpiece or sample, in order to
Realize this purpose, the displacement platform that developer generallys use the low precision of big stroke combines doing for the displacement platform of small stroke and high precision
Method makes overall mechanism become complicated and huge, increases cost.
Summary of the invention
The present invention is to solve technical problem present in well-known technique and provide a kind of Three Degree Of Freedom positioning of stiffness variable
Platform, the table stroke is big, and precision is high, simple and compact for structure, at low cost.
The technical scheme adopted by the present invention to solve the technical problems existing in the known art is that a kind of stiffness variable
Three Degree Of Freedom locating platform, including pedestal and moving platform formed therein, the moving platform and the pedestal pass through three edges
Circumferentially uniformly distributed diamond shape flexible hinge is connected；There are three the input connecting rods being evenly distributed for the moving platform tool, described in three
Input connecting rod and three diamond shape flexible hinge intervals are evenly distributed on the outer periphery of the moving platform；It is described defeated
The one end for entering connecting rod is connect with the moving platform by circular arc flexible hinge I, and the other end is as input terminal, with voice coil motor
End in contact is exported, the voice coil motor is placed in the groove of pedestal, and the center line of the input connecting rod neither passes through described
The center of moving platform is not also tangent with the outer periphery of the moving platform；Symmetrical cloth is formed in the input terminal of the input connecting rod
The outside of the small rigidity compliant mechanism of the double airfoil type set, the small rigidity compliant mechanism is connect with the pedestal；Connect in the input
The intermediate two sides of extension bar are respectively provided with a convex block；It is flexible that corresponding two convex blocks are formed with one big rigidity on the pedestal
Mechanism, the big rigidity compliant mechanism are made of two parts for being arranged symmetrically in the input connecting rod two sides, each part
It is being formed with a groove close to the side of the input connecting rod, two convex blocks are extended to correspondingly described in two
In groove, gap is equipped between the inner sidewall of the groove and the side of the convex block.
The moving platform uses cirque structure.
The small rigidity compliant mechanism is arranged symmetrically in I structure of rectangular flexible hinge of the input connecting rod two sides by four
At being arranged in parallel positioned at two ipsilateral rectangular flexible hinges I.
The big rigidity compliant mechanism is arranged symmetrically in the rectangular flexible hinge II of the input connecting rod two sides by eight
It constitutes, is arranged in parallel positioned at four ipsilateral rectangular flexible hinges II.
Circular arc flexible hinge II is equipped in the input connecting rod, the circular arc flexible hinge II convex block more leans on
The nearly moving platform.
The diamond shape flexible hinge is made of four pieces of rectangular flexible hinges III, and the diamond shape flexible hinge is located at the pedestal
Interior angle between the moving platform is 90 °~120 °.
The advantages and positive effects of the present invention are: can be made flat by three uniformly distributed input connecting rods of driving
Platform realizes the three-degree-of-freedom motion of two translations, one rotation；Voice coil motor pushes input connecting rod to pass through small rigidity in initial displacement
Compliant mechanism and diamond shape flexible hinge make moving platform realize the quickly millimetre-sized movement of big stroke, input in connecting rod when being located at
Convex block when driving big rigidity compliant mechanism by groove, the overall stiffness of mechanism increases, and stroke reduces, and realizes moving platform sub-
Nanoscale is accurately positioned.In conclusion the present invention had both been able to achieve, stroke was big, and precision is high, was applied to millimetre-sized positioning
System can also apply to the positioning system of Subnano-class, and need to become the occasion of kinematic accuracy as feed system, application
Prospect is boundless.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the top view of Fig. 1；
Fig. 3 is the portion the I enlarged drawing of Fig. 2.
In figure: 1- voice coil motor, the small rigidity compliant mechanism of 2-, 3- convex block, the big rigidity compliant mechanism of 4-, 5- input connection
Bar, 6- moving platform, 7- diamond shape flexible hinge, 8- location hole, 9- pedestal, 10- circular arc flexible hinge I, 11- circular arc flexible hinge
Ⅱ。
Specific embodiment
In order to further understand the content, features and effects of the present invention, the following examples are hereby given, and cooperate attached drawing
Detailed description are as follows:
Please refer to FIG. 1 to FIG. 3, a kind of Three Degree Of Freedom locating platform of stiffness variable, including pedestal 9 and formed therein
Moving platform 6, the moving platform 6 are connected with the pedestal 9 by three diamond shape flexible hinges 7 being evenly distributed.
The tool of moving platform 6 is to transmit the machine of kinetic energy there are three the input connecting rod 5 being evenly distributed, input connecting rod 5
Structure, three input connecting rods 5 and three intervals of diamond shape flexible hinge 7 are evenly distributed in the outer of the moving platform 6
On periphery.
One end of the input connecting rod 5 is connect with the moving platform 6 by circular arc flexible hinge I 10, other end conduct
Input terminal, the output end in contact with voice coil motor 1, the voice coil motor 1 are placed in the groove of pedestal 9, the input connection
The center line of bar 5 neither passes through the center of the moving platform 6 nor tangent with the outer periphery of the moving platform 6.
It is formed with the small rigidity compliant mechanism 2 of double airfoil type being arranged symmetrically in the input terminal of the input connecting rod 5, it is described small
The outside of rigidity compliant mechanism 2 is connect with the pedestal 9.
A convex block 3 is respectively provided in the intermediate two sides of the input connecting rod 5.
Corresponding two convex blocks 3 are formed with one big rigidity compliant mechanism 4 on the pedestal 9, and the big rigidity is soft
Property mechanism 4 by be arranged symmetrically in it is described input 5 two sides of connecting rod two parts form, each part close to the input company
The side of extension bar 5 is formed with a groove, and two convex blocks 3 are extended to correspondingly in two grooves, described
Gap is equipped between the inner sidewall of groove and the side of the convex block 3.
In the present embodiment, compact-sized in order to make, light weight, the moving platform 6 uses cirque structure.It is described small rigid
The rectangular flexible hinge I that degree compliant mechanism 2 is arranged symmetrically in input 5 two sides of connecting rod by four is constituted, positioned at ipsilateral
Two rectangular flexible hinges I are arranged in parallel.The big rigidity compliant mechanism 4 is arranged symmetrically in the input by eight and connects
The rectangular flexible hinge II of 5 two sides of bar is constituted, and is arranged in parallel positioned at four ipsilateral rectangular flexible hinges II.Described defeated
Enter connecting rod 5 equipped with circular arc flexible hinge II 11, the circular arc flexible hinge II 11 convex block 3 is put down closer to described move
Platform 6.Two concatenated circular arc flexible hinges are arranged in the input connecting rod 5 can increase flexibility.The diamond shape is flexible
Hinge 7 is made of four pieces of rectangular flexible hinges III, and the diamond shape flexible hinge 7 is between the pedestal 9 and the moving platform 6
Interior angle be 90 °~120 °, this structure makes the movement quite flexible of moving platform 6 and is able to carry out the movement of big stroke.
The present invention uses voice coil motor 1 as driver, can be carried out bigger displacement output relative to piezoelectric ceramics, passes through
The input current of control voice coil motor can change the output of power and displacement, so that input connecting rod 5 be driven to carry out different trips
Movement；The width of the convex block 3 is less than the width of the groove on big rigidity compliant mechanism 4, when the leading flank and groove of convex block 3
When inner wall has gap, the moving displacement of moving platform 6 can reach grade；Voice coil motor 1 continues driving input connecting rod 5 and transports forward
Dynamic, convex block 3 also moves forward, and until leading flank and the groove inner wall of convex block 3 contact with each other, convex block 3 drives big rigidity soft
Property mechanism 4 flexible deformation, at this time the overall stiffness of moving platform 6 become small rigidity compliant mechanism 2 rigidity and big rigidity flexible machine
The sum of the rigidity of structure 4, so the stroke of moving platform 6 reduces, precision is greatly increased, and can reach Subnano-class；Convex block 3 is by overcoming
The elastic force of big rigidity compliant mechanism 4, kinetic energy is transmitted on moving platform 6, moving platform 6 is by overcoming diamond shape flexible hinge 7
Elastic force achievees the effect that output displacement, and by controlling the size of current of three voice coil motors 1, control moving platform 6 carries out difference
Track output, be both able to achieve the movement along plane both direction, and be also able to achieve the rotation around vertical axis, and when three voice coils
When the input current size of motor 1 is the same, moving platform 6 can be made to make pure rotation.Therefore the present invention had both been able to achieve big stroke millimeter
The displacement output of grade is also able to achieve the high precision displacement output of Subnano-class.
Although the preferred embodiment of the present invention is described above in conjunction with attached drawing, the invention is not limited to upper
The specific embodiment stated, the above mentioned embodiment is only schematical, be not it is restrictive, this field it is common
Technical staff under the inspiration of the present invention, in the case where not departing from present inventive concept and scope of the claimed protection, goes back
Many forms can be made, within these are all belonged to the scope of protection of the present invention.
Claims (5)
1. a kind of Three Degree Of Freedom locating platform of stiffness variable, which is characterized in that including pedestal and moving platform formed therein,
The moving platform is connected with the pedestal by three diamond shape flexible hinges being evenly distributed；
There are three the input connecting rod being evenly distributed, three input connecting rods and three diamond shapes for the moving platform tool
Flexible hinge interval is evenly distributed on the outer periphery of the moving platform；
One end and the moving platform of the input connecting rod pass through circular arc flexible hinge I and connect, the other end as input terminal, with
The output end in contact of voice coil motor, the voice coil motor are placed in the groove of pedestal, and the center line of the input connecting rod was both
It is also not tangent with the outer periphery of the moving platform by the center of the moving platform；
It is formed with the small rigidity compliant mechanism of double airfoil type being arranged symmetrically in the input terminal of the input connecting rod, the small rigidity is soft
The outside of property mechanism is connect with the pedestal；
A convex block is respectively provided in the intermediate two sides of the input connecting rod；
Corresponding two convex blocks are formed with one big rigidity compliant mechanism on the pedestal, the big rigidity compliant mechanism by
Two parts for being arranged symmetrically in the input connecting rod two sides form, and each part is in the side close to the input connecting rod
It is formed with a groove, two convex blocks are extended to correspondingly in two grooves, in the inner sidewall of the groove
Gap is equipped between the side of the convex block.
2. the Three Degree Of Freedom locating platform of stiffness variable according to claim 1, which is characterized in that the moving platform uses
Cirque structure.
3. the Three Degree Of Freedom locating platform of stiffness variable according to claim 1, which is characterized in that the small rigidity is flexible
The rectangular flexible hinge I that mechanism is arranged symmetrically in the input connecting rod two sides by four is constituted, described in ipsilateral two
Rectangular flexible hinge I is arranged in parallel.
4. the Three Degree Of Freedom locating platform of stiffness variable according to claim 1, which is characterized in that the big rigidity is flexible
The rectangular flexible hinge II that mechanism is arranged symmetrically in the input connecting rod two sides by eight is constituted, described in ipsilateral four
Rectangular flexible hinge II is arranged in parallel.
5. the Three Degree Of Freedom locating platform of stiffness variable according to claim 1, which is characterized in that connected in the input
Bar is equipped with circular arc flexible hinge II, and the circular arc flexible hinge II convex block is closer to the moving platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710330518.5A CN106965133B (en) | 2017-05-11 | 2017-05-11 | A kind of Three Degree Of Freedom locating platform of stiffness variable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710330518.5A CN106965133B (en) | 2017-05-11 | 2017-05-11 | A kind of Three Degree Of Freedom locating platform of stiffness variable |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106965133A CN106965133A (en) | 2017-07-21 |
| CN106965133B true CN106965133B (en) | 2019-04-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710330518.5A Expired - Fee Related CN106965133B (en) | 2017-05-11 | 2017-05-11 | A kind of Three Degree Of Freedom locating platform of stiffness variable |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107464586B (en) * | 2017-08-17 | 2020-02-18 | 天津大学 | Three-degree-of-freedom large-stroke micro-positioning platform with decoupled driving force |
| CN108527334B (en) * | 2018-06-13 | 2023-07-25 | 广东工业大学 | Multi-degree-of-freedom compliant parallel mechanism |
| CN109502542B (en) * | 2018-10-23 | 2020-07-10 | 广东工业大学 | Multi-degree-of-freedom nanometer positioning platform based on compliant parallel mechanism |
| CN112865592B (en) * | 2020-12-31 | 2022-06-24 | 天津理工大学 | Parallel three-degree-of-freedom precision micro-motion mechanism of composite differential branched chain and working method thereof |
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| CN102601794A (en) * | 2012-03-29 | 2012-07-25 | 天津大学 | High-rigidity four-degree-of-freedom parallel mechanism capable of adjusting postures |
| CN103021472A (en) * | 2012-12-03 | 2013-04-03 | 天津大学 | Plane parallel type three-freedom-degree precise positioning work table |
| CN103963033A (en) * | 2014-05-20 | 2014-08-06 | 广东工业大学 | One-dimensional micro-positioning platform with adjustable rigidity frequency based on stress rigidization principle |
| CN105137562A (en) * | 2015-10-15 | 2015-12-09 | 中国科学院长春光学精密机械与物理研究所 | Optical element three-degree-of-freedom micro displacement adjusting device |
| CN105909725A (en) * | 2016-04-14 | 2016-08-31 | 华中科技大学 | Three degree of freedom micro-vibration suppression platform and control method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100275717A1 (en) * | 2009-04-30 | 2010-11-04 | Benoit Poyet | Precision positioning device |
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2017
- 2017-05-11 CN CN201710330518.5A patent/CN106965133B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102601794A (en) * | 2012-03-29 | 2012-07-25 | 天津大学 | High-rigidity four-degree-of-freedom parallel mechanism capable of adjusting postures |
| CN103021472A (en) * | 2012-12-03 | 2013-04-03 | 天津大学 | Plane parallel type three-freedom-degree precise positioning work table |
| CN103963033A (en) * | 2014-05-20 | 2014-08-06 | 广东工业大学 | One-dimensional micro-positioning platform with adjustable rigidity frequency based on stress rigidization principle |
| CN105137562A (en) * | 2015-10-15 | 2015-12-09 | 中国科学院长春光学精密机械与物理研究所 | Optical element three-degree-of-freedom micro displacement adjusting device |
| CN105909725A (en) * | 2016-04-14 | 2016-08-31 | 华中科技大学 | Three degree of freedom micro-vibration suppression platform and control method thereof |
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| CN106965133A (en) | 2017-07-21 |
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Granted publication date: 20190423 Termination date: 20200511 |