CN108549293A - A kind of micro-nano probe batch preparation facilities that structural parameters are controllable and method - Google Patents
A kind of micro-nano probe batch preparation facilities that structural parameters are controllable and method Download PDFInfo
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- CN108549293A CN108549293A CN201810479914.9A CN201810479914A CN108549293A CN 108549293 A CN108549293 A CN 108549293A CN 201810479914 A CN201810479914 A CN 201810479914A CN 108549293 A CN108549293 A CN 108549293A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
- G05B19/0423—Input/output
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/20—Pc systems
- G05B2219/25—Pc structure of the system
- G05B2219/25257—Microcontroller
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- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
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- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
Abstract
The invention discloses a kind of micro-nano probe batch preparation facilities that structural parameters are controllable, mechanical machine parts include z-axis motor module, x-axis motor module, cell reaction module, cell reaction slot, rinse bath, insulation processing slot, multichannel microprobe clamping module；Controller includes microprocessor, stepper motor driver, Stepping Motor Subdivision Driver, dynamic subdivision controller, electrolysis control module, multichannel D/A converter, human-computer interactive control device.The present invention has taken into account the speed and precision of motor movement, and motor can be allowed quickly to move and short distance high precision movement over long distances；Module and the discrete mobile design of technique platform are shifted using process, single can complete the preparation of more micro-nano probes；And control accuracy is improved, have the characteristics that efficient, high finished product rate and ease for use.A kind of voltage prediction control algolithm has also been devised in the present invention, realizes the control that loop current break time in micro-nano probe is prepared to electrochemical erosion method.
Description
Technical field
The invention belongs to field of nanometer technology more particularly to a kind of micro-nano probe batch preparation facilities that structural parameters are controllable
And method.
Background technology
Micro-nano probe is widely used in the fields such as scanning tunneling microscope, atomic force microscope, micro-nano thermocouple, different
The application in field has the pattern of micro-nano probe different requirements, therefore is controlled to the micro-nano probe pattern being finally prepared
Fixture is significant.
Electrochemical corrosion is to prepare one of the important means of micro-nano probe at present, but there is the spies to being finally prepared
The unforeseen problem of aciculiform looks can only pick out the suitable micro-nano probe of pattern by multiple preparation, and exist every time
Personnel can only make a micro-nano probe under participating in or batch prepares but do not have higher control accuracy, and overall efficiency is not
It is high.
Invention content
Goal of the invention：In view of the above problems, the present invention proposes that a kind of micro-nano probe that structural parameters are controllable batch prepares dress
It sets and method.
Technical solution：To achieve the purpose of the present invention, the technical solution adopted in the present invention is：A kind of structural parameters are controllable
Micro-nano probe batch preparation facilities, including z-axis motor module, x-axis motor module, cell reaction module, multichannel microprobe
Module and controller is clamped；The controller includes microprocessor, and microprocessor is separately connected stepper motor driver, stepping electricity
Machine subdivision driver, dynamic subdivision controller, electrolysis control module, multichannel D/A converter, human-computer interactive control device；Stepping electricity
Machine driver is connected with x-axis motor module, and x-axis motor module is connected with multichannel microprobe clamping module；Dynamic subdivision
Controller connects Stepping Motor Subdivision Driver, and Stepping Motor Subdivision Driver connects z-axis motor module, and z-axis motor module 1 connects
Connect cell reaction module；Multichannel D/A converter is connected by power amplifier module with electrolysis control module, electrolysis control mould
Block is connected with cell reaction module；User passes through the micro-nano probe structural parameters needed for the setting of human-computer interactive control device, micro- place
Structural parameters are converted to corresponding controlled quentity controlled variable by reason device.
Further, the multichannel microprobe clamping module is made of several microprobe fixtures.
Further, cell reaction slot, rinse bath and insulation processing slot are set in the cell reaction module.
Further, the microprocessor judges the low subdivision motor pattern of z-axis motor module and high subdivision motor pattern,
The dynamic subdivision controller changes the subdivision pattern of Stepping Motor Subdivision Driver by relay switch.
Further, the electrolysis control module includes multichannel D/A converter 1, multichannel D/A converter 2, multichannel AD
Converter, power amplifier module, high speed voltage comparator and high speed switch tube；Multichannel D/A converter 1, multichannel D/A converter
2, multichannel AD converter is connected with microprocessor；High speed voltage comparator and multichannel D/A converter 2, multichannel AD conversion
Device, high speed switch tube are connected；Multichannel D/A converter 1 is connected by power amplifier module with high speed switch tube.
A kind of micro-nano probe batch preparation that structural parameters are controllable, including step：
(1) user is joined pattern by the micro-nano probe structural parameters needed for the setting of human-computer interactive control device, microprocessor
Number is converted to corresponding controlled quentity controlled variable；
(2) x-axis motor module drives right over more micro-nano probes to cell reaction slot, the control submergence of z-axis motor module
Enter corrosive liquid respective depth；After reaching corresponding position, microprocessor control multichannel D/A converter provides decomposition voltage；
(3) response feature in electrolytic process is detected by multichannel AD converter, in conjunction with prediction algorithm and required
Loop current cut-out delay size, dynamically provides the most suitable reference voltage of high speed voltage comparator；
(4) reference voltage is output to high speed voltage comparator by multichannel D/A converter 2, and high speed voltage comparator passes through
High speed switch tube carrys out the cut-out of control loop electric current, and different reference voltages can bring different loop currents to cut off delay；
(5) after microprocessor detects reaction terminating, the micro-nano probe prepared is proposed by corruption by z-axis motor module
Liquid is lost, drives more micro-nano probes to complete remaining step by x-axis motor module.
Further, Dynamic Corrosion method is selected in step (2), and z-axis motor module is improved by dynamic subdivision controller
Mobile accuracy, at the corresponding moment that reaction carries out slowly to lift micro-nano probe on micro-meter scale.
Advantageous effect：The present invention devises dynamic subdivision controller, has taken into account the speed and precision of motor movement, Neng Gourang
Motor is quickly moving and short distance high precision movement over long distances；Module and the discrete mobile design of technique platform are shifted using process
And module is clamped in multichannel microprobe, has split the multi-dimensional movement of individual module, and technique platform is allowed to complete transfer module in z-axis
Reversed movement, improves control accuracy, reduces system manufacture difficulty and cost, reduces the difficulty of assembly, while also can
Enough singles complete the preparation of more micro-nano probes, have the characteristics that efficient, high finished product rate and ease for use.
Voltage prediction control algolithm proposed by the present invention can predict broken needle point time of origin point, so as to control loop
Failure of current lead or hysteresis, it is achieved that preparing loop current break time in micro-nano probe to electrochemical erosion method
Control, thus achieved the purpose that the final micro-nano probe pattern of control.
The present invention devises electrochemical process and prepares micro-nano probe process middle probe submergence, the static dynamic of corrosion process
Transformation, corrosion potentials numerical value and loop current break time Comprehensive Control, can only be to wherein single or few compared to prior art
Measure it is several carry out it is independent manually control or automatically control, the present invention have it is comprehensive and comprehensive, cover almost all of
Controllable factor.
Description of the drawings
Fig. 1 is the system mechanics structure chart of the present invention；
Fig. 2 is the multichannel microprobe clamping modular structure figure of the present invention；
Fig. 3 is the systematic functional structrue figure of the present invention；
Fig. 4 is the dynamic subdivision controller architecture figure of the present invention；
Fig. 5 is the electrolysis control module structure chart of the present invention；
Fig. 6 is the structural parameters control software algorithm flow chart of the present invention.
Specific implementation mode
Technical scheme of the present invention is further described with reference to the accompanying drawings and examples.
Micro-nano probe is prepared based on traditional electrochemical process, one is devised in conjunction with the experience of preparation and theory analysis, the present invention
The full-automatic preparation facilities of set, and can be by the way that corrosion potentials, probe submergence, electrolysis loop current cut-out delay is arranged
To determine the micro-nano probe pattern finally obtained.Package unit can be not necessarily to personnel and participate in completing to prepare after the setup, and
And more micro-nano probes can be completed with single and prepared, the spy with morphology controllable, high efficiency, high homogeneity and high success rate
Point.
As shown in Figure 1, the controllable micro-nano probe batch preparation facilities of structural parameters of the present invention include z-axis motor module 1,
Mould is clamped in x-axis motor module 2, cell reaction module 3, cell reaction slot 4, rinse bath 5, insulation processing slot 6, multichannel microprobe
Group 7；Cell reaction slot 4, rinse bath 5 and insulation processing slot 6 are set in cell reaction module 3.The micro- spy of multichannel as shown in Figure 2
Needle clamping module 7 is made of several microprobe fixtures 8.
As shown in figure 3, the controller of apparatus of the present invention includes microprocessor, stepper motor driver, Design of Stepper Motor Subdivision
Driver, dynamic subdivision controller, electrolysis control module, multichannel D/A converter, human-computer interactive control device；Microprocessor is distinguished
It is converted with stepper motor driver, Stepping Motor Subdivision Driver, dynamic subdivision controller, electrolysis control module, multichannel DA
Device, human-computer interactive control device are connected；Stepper motor driver is connected with x-axis motor module 2, x-axis motor module 2 with it is mostly logical
Road microprobe clamping module 7 is connected；Dynamic subdivision controller connects Stepping Motor Subdivision Driver, micro-stepping driving of stepping motor
Device connects z-axis motor module 1, and z-axis motor module 1 connects cell reaction module 3；Multichannel D/A converter passes through power amplification mould
Block is connected with electrolysis control module, and electrolysis control module is connected with cell reaction module 3.
Pass through the control of stepper motor driver, Stepping Motor Subdivision Driver, dynamic subdivision controller combination microprocessor
Algorithm processed realizes that long range fast moves, short distance high precision movement and microprobe clamping module 7 are in cell reaction slot 4, cleaning
Switching between slot 5 and insulation processing slot 6.By multichannel D/A module and power amplifier module, response voltage can be carried out
Control.By being electrolysed control module, delay can be cut off to loop current and controlled.Microprobe clamping module 7 can be clamped
More probes can prepare more probes under the control of electrolysis control module with single.
After user sets required micro-nano probe structural parameters by human-computer interactive control device, microprocessor joins pattern
Number is converted to corresponding controlled quentity controlled variable, controls submergence by stepper motor driver and is controlled back by being electrolysed control module
Road failure of current delay, by the full automatic preparation for completing micro-nano probe of multichannel microprobe clamping module.
As shown in figure 4, dynamic subdivision controller changes the subdivision mould of Stepping Motor Subdivision Driver by relay switch
Formula, z-axis motor module 1 can switch low subdivision motor pattern and high subdivision motor pattern under microprocessor judgement.System can
High and low subdivision pattern is used with the judgement of automation, motor there can be higher movement speed under low subdivision pattern, make more
Channel microprobe clamping module can be switched fast between cell reaction slot 4, rinse bath 5 and insulation processing slot 6；It is segmented in height
Under pattern, the depth that cell reaction probe raw material are submerged into electrolyte can be accurately controlled.
As shown in figure 5, electrolysis control module is by multichannel D/A converter 1, multichannel D/A converter 2, multichannel AD conversion
Device, power amplifier module, high speed voltage comparator, high speed switch tube composition；Multichannel D/A converter 1, multichannel D/A converter
2, multichannel AD converter is connected with microprocessor；High speed voltage comparator and multichannel D/A converter 2, multichannel AD conversion
Device, high speed switch tube are connected, and multichannel D/A converter 1 is connected by power amplifier module with high speed switch tube.
As shown in fig. 6, the preparation method of the controllable micro-nano probe batch preparation facilities of structural parameters of the present invention, including step
Suddenly：
(1) user passes through the micro-nano probe structural parameters needed for the setting of human-computer interactive control device, including the cone angle of needle point, song
Rate radius, aspect ratio, finish and length of needlepoint；Structural parameters are converted to corresponding controlled quentity controlled variable, including electricity by microprocessor
It solves voltage swing, submergence, dynamic or static reaction control and loop current cut-out delay, initialization prepares environment；
(2) when starting micro-nano probe preparation, x-axis motor module 2 drives more micro-nano probe raw material (being usually tungsten needle)
To right over cell reaction slot 4, z-axis motor module 1 controls raw material and is submerged into corrosive liquid (being usually sodium hydroxide solution) phase
Answer depth；After reaching corresponding position, microprocessor control multichannel D/A converter provides decomposition voltage, and control prepares reaction and opens
Begin；
(3) break time for preparing response circuit electric current passes through voltage comparator and switch controlled.Pass through multichannel AD
Converter detects the kinetic current in electrolytic process, combines pre-designed micro-nano probe electrolysis pre- in the microprocessor
The predicted current that model provides is surveyed, the peak optimization reaction electric current at corresponding moment is provided using p- controls (such as Kalman filter).
Assuming that in the case that subsequent time needs cut-off loop electric current, provided by multichannel D/A converter 2 anti-less than current time
Reference voltage of the induced current amount (being converted to voltage) as voltage comparator.Cycle proceeds as described above until kinetic current is small
In the reference voltage of setting, voltage comparator controls reaction terminating.In this process, to reference voltage that certain moment provides
It is changed, voltage comparator on-off switching tube under different voltage conditions can be controlled, circuit electricity is controlled to reach
The purpose of break time is flowed, the control to final micro-nano probe pattern is completed；
(4) if having selected Dynamic Corrosion method in process (1), z-axis motor mould is improved by dynamic subdivision controller
1 mobile accuracy of group, at the corresponding moment that reaction carries out slowly to lift micro-nano probe on micro-meter scale；
(5) after microprocessor detects reaction terminating, the micro-nano probe prepared is proposed by z-axis motor module 1
Corrosive liquid drives more micro-nano probes to complete remaining step by x-axis motor module 2.
Claims (7)
1. a kind of micro-nano probe batch preparation facilities that structural parameters are controllable, it is characterised in that：Including z-axis motor module (1), x
Spindle motor module (2), cell reaction module (3), multichannel microprobe clamping module (7) and controller；
The controller includes microprocessor, microprocessor be separately connected stepper motor driver, Stepping Motor Subdivision Driver,
Dynamic subdivision controller, electrolysis control module, multichannel D/A converter, human-computer interactive control device；
Stepper motor driver is connected with x-axis motor module (2), and module is clamped with multichannel microprobe in x-axis motor module (2)
(7) it is connected；
Dynamic subdivision controller connects Stepping Motor Subdivision Driver, and Stepping Motor Subdivision Driver connects z-axis motor module
(1), z-axis motor module 1 connects cell reaction module (3)；
Multichannel D/A converter is connected by power amplifier module with electrolysis control module, and control module and cell reaction are electrolysed
Module (3) is connected；
User is converted to structural parameters by the micro-nano probe structural parameters needed for the setting of human-computer interactive control device, microprocessor
Corresponding controlled quentity controlled variable.
2. the controllable micro-nano probe batch preparation facilities of structural parameters according to claim 1, it is characterised in that：It is described more
Channel microprobe clamping module (7) is made of several microprobe fixtures (8).
3. the controllable micro-nano probe batch preparation facilities of structural parameters according to claim 1, it is characterised in that：The electricity
Solve setting cell reaction slot (4), rinse bath (5) and insulation processing slot (6) on reaction module (3).
4. the controllable micro-nano probe batch preparation facilities of structural parameters according to claim 1, it is characterised in that：It is described micro-
Processor judges that the low subdivision motor pattern of z-axis motor module (1) and high subdivision motor pattern, the dynamic subdivision controller are logical
Cross the subdivision pattern that relay switch changes Stepping Motor Subdivision Driver.
5. the controllable micro-nano probe batch preparation facilities of structural parameters according to claim 1, it is characterised in that：The electricity
It includes multichannel D/A converter 1, multichannel D/A converter 2, multichannel AD converter, power amplifier module, height to solve control module
Fast voltage comparator and high speed switch tube；Multichannel D/A converter 1, multichannel D/A converter 2, multichannel AD converter and Wei Chu
Reason device is connected；High speed voltage comparator is connected with multichannel D/A converter 2, multichannel AD converter, high speed switch tube；It is more
Channel D/A converter 1 is connected by power amplifier module with high speed switch tube.
6. a kind of preparation method of the controllable micro-nano probe batch preparation facilities of structural parameters described in claim 1-5, special
Sign is：Including step：
(1) user is turned structural parameters by the micro-nano probe structural parameters needed for the setting of human-computer interactive control device, microprocessor
It is changed to corresponding controlled quentity controlled variable；
(2) x-axis motor module drives right over more micro-nano probes to cell reaction slot, and the control of z-axis motor module is submerged into corruption
Lose liquid respective depth；After reaching corresponding position, microprocessor control multichannel D/A converter provides decomposition voltage；
(3) response feature in electrolytic process is detected by multichannel AD converter, in conjunction with prediction algorithm and required circuit
Failure of current delay size, dynamically provides the most suitable reference voltage of high speed voltage comparator；
(4) reference voltage is output to high speed voltage comparator by multichannel D/A converter 2, and high speed voltage comparator passes through high speed
Switching tube carrys out the cut-out of control loop electric current, and different reference voltages can bring different loop currents to cut off delay；
(5) after microprocessor detects reaction terminating, the micro-nano probe prepared is proposed to corrode by z-axis motor module
Liquid drives more micro-nano probes to complete remaining step by x-axis motor module.
7. the controllable micro-nano probe batch preparation of structural parameters according to claim 6, it is characterised in that：Step
(2) Dynamic Corrosion method is selected in, and z-axis motor module mobile accuracy is improved by dynamic subdivision controller, is carried out in reaction
The corresponding moment on micro-meter scale slowly to lift micro-nano probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810479914.9A CN108549293B (en) | 2018-05-18 | 2018-05-18 | Device and method for preparing micro-nano probes with controllable morphology parameters in batch |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810479914.9A CN108549293B (en) | 2018-05-18 | 2018-05-18 | Device and method for preparing micro-nano probes with controllable morphology parameters in batch |
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| Publication Number | Publication Date |
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| CN108549293A true CN108549293A (en) | 2018-09-18 |
| CN108549293B CN108549293B (en) | 2021-06-11 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110484962A (en) * | 2019-08-14 | 2019-11-22 | 东南大学 | Automation array nanometer pinpoint electrochemistry prepares platform and preparation method |
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