CN205115661U - Probe processing equipment - Google Patents
Probe processing equipment Download PDFInfo
- Publication number
- CN205115661U CN205115661U CN201520915036.2U CN201520915036U CN205115661U CN 205115661 U CN205115661 U CN 205115661U CN 201520915036 U CN201520915036 U CN 201520915036U CN 205115661 U CN205115661 U CN 205115661U
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- Prior art keywords
- probe
- processed
- corrosive fluid
- processing units
- head
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Abstract
The utility model discloses a probe processing equipment, corrode circuit and corrosive liquid device including mechanical device, preparation, wherein, the corrosive liquid device includes electrode and corrosive liquid, and this corrosive liquid is used for corroding waits to process the probe, mechanical device is used for the fixed processing probe of treating to the drive should treat that the processing probe removed, the electrode that the circuit is used for output corruption voltage to corrosive liquid device is corroded in the preparation. The utility model provides a probe processing equipment improves through structure to control circuit and connected mode to the cooperation can realize the accurate control to important parameter such as the corruption voltage in the probe corrosion process, probe submergence, probe hoist speed with mechanical device's etc. Other part, and processing obtains high accuracy, nanometer probe stand wear and tear, recoverable, with low costs.
Description
Technical field
The utility model belongs to technical field of measurement and test, more specifically, relates to a kind of probe processing units.
Background technology
At present, accurate development in science and technology is rapid, and has an immense impact on to current Technological research, social production, daily life.Probe is widely used in accurate sciemtifec and technical sphere, such as scanning tunnel microscope, Measurement of Semiconductors instrument, nano-manipulation arm etc.The conventional precision probe preparation method of prior art comprises ultravacuum ion field microscope, grinding, shearing, field cause (electrostatic) transmitting, galvanic corrosion etc.Wherein, electrochemical erosion method is prepared reproducible, cheap, the simple feature of structure with it and is obtained increasing favor.
Although electrochemical erosion method has above-mentioned advantage, but the equipment of electrochemical etching method of the prior art and correspondence thereof generally adopts manual control, according to the experience of operator, processing treatment is carried out to probe often, poor stability, and the unfairness of detecting head surface pattern, be difficult to carry out high-precision processing to probe, the surface quality of impact probe, the probe obtained often can only be used for the occasion not high to probe precision requirement.
Utility model content
For above defect or the Improvement requirement of prior art, the purpose of this utility model is to provide a kind of probe processing units, wherein improved by the structure of the pilot circuit to its key and mode of connection, and coordinate with the miscellaneous part of mechanism etc., can realize the corrosion potentials in probe corrosion process, probe submergence, the accurate control of the important parameters such as probe pulling speed, it is good that processing obtains surface quality, wear-resistant, recyclable, the probe that cost is low, and this processing units is adopt portable mode when carrying out corrosion treatment to probe to be processed, the probe after processing is made to have longer needle point section, the needle point radius-of-curvature of smooth change and large length-to-diameter ratio.
For achieving the above object, according to an aspect of the present utility model, provide a kind of probe processing units, it is characterized in that, comprise mechanism, prepare open circuit potential and corrosive fluid device, wherein,
Described corrosive fluid device comprises electrode and corrosive fluid, and this corrosive fluid is for corroding probe to be processed;
Described mechanism is used for fixing described probe to be processed, and drives this probe to be processed mobile;
Described open circuit potential of preparing is for exporting the electrode of corrosion potentials to described corrosive fluid device.
As of the present utility model preferred further, when described probe to be processed is driven the described corrosive fluid certain depth of immersion by described mechanism, this probe to be processed is at the uniform velocity upwards promoted by described mechanism, and the probe course of processing starts; When described probe to be processed departs from described corrosive fluid, this probe to be processed is accelerated upwards to promote to depart from described corrosive fluid fast by described mechanism, and the probe course of processing terminates.
As of the present utility model further preferably, when the described corrosive fluid of described probe disengaging to be processed, described to prepare the corrosion potentials that open circuit potential exports described corrosive fluid device electrode to be 0; Described mechanism accelerates upwards to promote described probe to be processed, makes this probe to be processed away from described corrosive fluid.
As of the present utility model preferred further, described mechanism comprises driving mechanism, electric motor, shaft coupling, bearing, ball-screw, nut, flexible hinge, support, mobile working plate and probe gripper, and described driving mechanism is for driving described electric motor; The main shaft of described electric motor is fixedly connected with by the inboardend of described shaft coupling with described ball-screw; This ball-screw is fixing on the bracket by described bearing; Described nut is fixed on described ball-screw, and described mobile working plate is fixedly connected with this nut by described flexible hinge; Described mobile working plate is also fixedly connected described probe gripper, and this probe gripper is for clamping described probe to be processed.
As of the present utility model preferred further, described bearing comprises the head bearing being positioned at described ball-screw upper end and the lower bearing being positioned at described ball-screw lower end; Described head bearing is fixed bearing, and described lower bearing is swimming type bearing.
As of the present utility model preferred further, described probe gripper comprises row's pin and row is female, and described row's pin is fixed on described mobile working plate, and described probe to be processed is arranged on described row mother.
As of the present utility model preferred further, the electrode of described corrosive fluid device adopts probe to be processed as anode.
As of the present utility model preferred further, this probe processing units also comprises timing register, for calculating the etching time of described probe to be processed.
As of the present utility model preferred further, when described probe to be processed immerses described corrosive fluid to the degree of depth preset, described timing register starts timing; When described probe to be processed departs from described corrosive fluid, described timing register stops timing.
By the above technical scheme that the utility model is conceived, compared with prior art, there is following beneficial effect:
1, the probe processing units in the utility model, probe just ceaselessly slowly mentions probe after immersion corrosive fluid, no longer allow probe static corrosion in corrosive fluid, thus formed there is longer needle point section, needle point radius-of-curvature smooth change and the large the new detector of length-to-diameter ratio.And because diameter change is slow, still can continue to use after most advanced wearing and tearing, the more important thing is, even if after larger length-to-diameter ratio makes points wear, can also reclaim and carry out essence corrosion, the probe obtaining small curvature radius re-uses, and significantly reduces use cost.
2, the probe processing units in the utility model can determine the submergence of probe according to probe specification requirement, and further according to the closed loop relation between submergence and pulling speed, corrosion potentials, accurate calculation determination pulling speed, corrosion potentials, and pass through the accurate control of corrosion potentials, pulling speed, obtain having the probe needing specification, realize the fine controllability of probe.
3, the probe processing units in the utility model prepares open circuit potential by arranging, ensure that in corrosion process, corrosion potentials keeps constant, experiment prove the corrosion potentials change of the utility model probe preparation facilities in corrosion process slowly and difference range within 0.1V, corrosion potentials is very constant, thus obtained probe constant curvature, morphologic criteria.
4, the probe processing units in the utility model prepares halt circuit by arranging, controller receiver voltage variable signal, judge and control to cut off corrosion potentials, while cut-out corrosion potentials, control electric motor accelerates to mention to pop one's head in and departs from corrosive fluid, is conducive to forming more excellent probe form.
5, the probe processing units in the utility model is by arranging special mechanical driver unit, make the pulling speed after probe shaping disengaging corrosive fluid higher, be generally the probe maximal velocity obtained by experiment, probe needle point is not easily passivated, and is conducive to obtaining the probe compared with small curvature radius.The utility model preferably adopts the micro-displacement apparatus be made up of structures such as three-dimensional asynchronous machine, ball-screw, shaft coupling, connection bearings, and connection is reliable, displacement is accurate, easy to use.
6, the probe preparation facilities that provides of the utility model, by the setting of controller and automatic control circuit, achieves the full automatic control of probe preparation process, easy to operate, control precisely, level of automation is high.
To sum up, the probe processing units in the utility model, be particularly useful for processing nano level probe (width of point of namely popping one's head in nanometer range, as hundreds of nanometer or tens nanometers, even 1 or several atom), working accuracy is high, and simple operation is reliable.
Accompanying drawing explanation
Fig. 1 is the structural representation of the utility model probe processing units;
In figure, the implication of each Reference numeral is as follows: 1 is industrial computer, and 11 is upper computer, and 12 is controller, 2 is mechanism, and 21 is driving mechanism, and 22 is electric motor, 23 is shaft coupling, and 24 is bearing, and 25 is ball-screw, 26 is nut, and 27 is flexible hinge, and 28 is support, 29 is mobile working plate, and 30 is probe gripper, and 3 for preparing open circuit potential, 4 for preparing halt circuit, and 5 is decision circuitry.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.In addition, if below in described each embodiment of the utility model involved technical characteristic do not form conflict each other and just can mutually combine.
Embodiment 1
As shown in Figure 1, the probe processing units in the utility model, comprises industrial computer 1, mechanism 2 and pilot circuit; Wherein, industrial computer 1 comprises upper computer 11 and controller 12, and controller 12 is connected with mechanism 2 and moves for controlling mechanism; Mechanism 2 is for static probe and drive probe to move up and down; Pilot circuit comprise be connected with controller 12 prepare open circuit potential 3, prepare halt circuit 4 and decision circuitry 5, wherein: prepare the corrosion potentials signal instruction that open circuit potential 3 sends for receiving controller 12, and according to instruction export preset corrosion potentials and keep corrosion potentials constant; Prepare halt circuit 4 collection and prepare open circuit potential 3 current changing signal, and variable signal is sent to controller 12; Decision circuitry 5 immerses for detection probe, depart from corrosion liquid level, and probe immersion signal, probe separating signal are sent to controller 12.
When corrosion starts, prepare the current signal that halt circuit 4 starts to gather open circuit potential, and be converted into voltage signal, namely judge voltage.When being near completion by disengaging liquid level, corrosion process when popping one's head in, the resistance of whole open circuit potential sharply increases, cause corrosion current and judge that voltage also sharply reduces, judge that voltage is decreased to rapidly lower than threshold voltage, the output terminal preparing halt circuit 4 becomes high level from lower level, controller 12 cuts off corrosion potentials after this signal intensity being detected immediately, and corrosion process stops.Control mechanism 2 with Time Controller 12 to accelerate upwards to promote probe disengaging corrosive fluid according to probe second cosmic velocity.By preparing the setting of halt circuit 4, can the stopping of accurate control corrosion rate process, and probe is mentioned fast while stopping, being conducive to being formed form of better popping one's head in.
The processing units of the high-accuracy probe that the utility model provides, mechanism 2 comprises driving mechanism 21, electric motor 22, shaft coupling 23, bearing 24, ball-screw 25, set screw nut 26, flexible hinge 27, support 28, mobile working plate 29 and probe gripper 30.Wherein, the input terminus connection control device 12 of driving mechanism 21, output terminal connects electric motor 22, the instruction that driving mechanism sends for receiving controller 12, and operates according to order-driven electric motor 22.The main shaft of electric motor 22 is fixedly connected with by the inboardend of shaft coupling 23 with ball-screw 25, and ball-screw 25 is fixed on support 28 by bearing 24.Ball-screw 25 is fixed with nut 26, mobile working plate 29 is fixedly connected with nut 26 by flexible hinge 27, mobile working plate 29 is fixedly connected with probe gripper 30.During use, under the instruction of controller 12, driving mechanism 21 controls electric motor 22 and rotates, electric motor 22 drives ball-screw 25 to rotate by shaft coupling 23, the nut 26 be engaged with ball-screw 25 along the axial translational motion of ball-screw, and drives mobile working plate 29, probe gripper 30 and probe along the axial moving linearly of ball-screw.
The processing units of the high-accuracy probe that the utility model provides, preferably the bearing 24 of mechanism is set to head bearing and lower bearing, lay respectively at the top and bottom of ball-screw 25, preferably arranging head bearing is fixed bearing, and lower bearing is swimming type bearing.
The processing units of the high-accuracy probe that the utility model provides, probe gripper 30 adopts row's pin and row's parent structure, and row's pin is fixed on mobile working plate 29, on the probe row of being arranged on mother.The row's of employing faller gill parent structure installs static probe, not only can realize conduction connection but also facilitate mounting or dismounting, and the reactive force be subject in corrosion process owing to popping one's head in is very little, this kind connects also enough firm stable, the reliable round translational motion realizing probe in the vertical direction.
In corrosive fluid system, when probe to be processed is about to depart from etching fluid (length that namely probe immerses in corrosive fluid is less than certain value), preparing the current changing signal that halt circuit 4 collection prepares open circuit potential 3 will increase rapidly; By presetting threshold value, when this current changing signal is greater than the threshold value preset, then show that probe to be processed carries out departing from stage of corrosive fluid, such as, can take to reduce corrosion potentials, make mechanism accelerate upwards to promote probe to be processed this probe is departed from fast measure that corrosive fluid etc. stops corrosion.
The processing units of the high-accuracy probe that the utility model provides, can according to corrosion potentials, quantitative relationship between submergence and pulling speed (speed is mentioned in submergence of namely popping one's head in), determine the relevant preparation parameter meeting probe specification requirement, realize the exact controllability of the high-accuracy probe of preparation.
From electrochemical kinetics theory, when corrosive fluid concentration is certain, corrosion potentials is directly proportional to probe erosion rate, so for the certain probe of diameter, required etching time is also directly proportional to corrosion potentials, this direct ratio numerical relation specifically can obtain by testing, thus can according to corrosion potentials determination etching time.Again according to the etching time determined and submergence, determine pulling speed further.The processing units of the high-accuracy probe that the utility model provides, can adopt any two values in input corrosion potentials, submergence and pulling speed, is calculated determine another value by aforementioned quantitative relationship.Preferably, select to input corrosion potentials and submergence to upper computer 11, calculate and determine pulling speed.
The processing units of the high-accuracy probe that the utility model provides, controller 12 is also provided with timing software, and when dropping to default submergence when popping one's head in, etching time timing starts, and when probe rises to disengaging corrosive fluid, etching time timing stops.Controller 12 is arranged timing software, the time used can be corroded by record in probe corrosion experiment, to obtain the proportional relation corroding required time and corrosion potentials, when formal preparation probe according to corrosion potentials determination etching time, and to determine that the important parameters such as speed are mentioned in submergence further.Probe processing units in the utility model, in the probe course of processing, it (can be at the uniform velocity upwards promote that probe to be processed both upwards can promote under the drive of mechanism, also can right and wrong at the uniform velocity upwards promote), also can keep static, the movement of adjustment corrosion potentials and probe flexibly can be required according to the pattern of probe.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all do within spirit of the present utility model and principle any amendment, equivalent to replace and improvement etc., all should be included within protection domain of the present utility model.
Claims (9)
1. a probe processing units, is characterized in that, comprises mechanism (2), prepares open circuit potential (3) and corrosive fluid device, wherein,
Described corrosive fluid device comprises electrode and corrosive fluid, and this corrosive fluid is for corroding probe to be processed;
Described mechanism (2) for fixing described probe to be processed, and drives this probe to be processed mobile;
Described open circuit potential (3) of preparing is for exporting the electrode of corrosion potentials to described corrosive fluid device.
2. to pop one's head in as claimed in claim 1 processing units, it is characterized in that, when described probe to be processed is driven the described corrosive fluid certain depth of immersion by described mechanism (2), this probe to be processed is at the uniform velocity upwards promoted by described mechanism (2), and the probe course of processing starts; When described probe to be processed departs from described corrosive fluid, this probe to be processed is accelerated upwards to promote to depart from described corrosive fluid fast by described mechanism (2), and the probe course of processing terminates.
3. to pop one's head in as claimed in claim 1 processing units, it is characterized in that, when described probe to be processed departs from described corrosive fluid, described to prepare the corrosion potentials that open circuit potential (3) exports described corrosive fluid device electrode to be 0; Described mechanism (2) accelerates upwards to promote described probe to be processed, makes this probe to be processed away from described corrosive fluid.
4. to pop one's head in as claimed in claim 1 processing units, it is characterized in that, described mechanism (2) comprises driving mechanism (21), electric motor (22), shaft coupling (23), bearing (24), ball-screw (25), nut (26), flexible hinge (27), support (28), mobile working plate (29) and probe gripper (30), and described driving mechanism (21) is for driving described electric motor (22); The main shaft of described electric motor (22) is fixedly connected with by the inboardend of described shaft coupling (23) with described ball-screw (25); This ball-screw (25) is fixed on described support (28) by described bearing (24); Described nut (26) is fixed on described ball-screw (25), and described mobile working plate (29) is fixedly connected with this nut (26) by described flexible hinge (27); Described mobile working plate (29) is also fixedly connected described probe gripper (30), and this probe gripper (30) is for clamping described probe to be processed.
5. to pop one's head in as claimed in claim 4 processing units, it is characterized in that, described bearing (24) comprises the head bearing being positioned at described ball-screw (25) upper end and the lower bearing being positioned at described ball-screw (25) lower end; Described head bearing is fixed bearing, and described lower bearing is swimming type bearing.
6. to pop one's head in as claimed in claim 4 processing units, it is characterized in that, described probe gripper (30) comprises row's pin and row is female, and described row's pin is fixed on described mobile working plate (29), and described probe to be processed is arranged on described row mother.
7. to pop one's head in as claimed in claim 1 processing units, it is characterized in that, the electrode of described corrosive fluid device adopts probe to be processed as anode.
8. pop one's head in as claimed in claim 1 processing units, it is characterized in that, this probe processing units also comprises timing register, for calculating the etching time of described probe to be processed.
9. to pop one's head in as claimed in claim 8 processing units, it is characterized in that, when described probe to be processed immerses described corrosive fluid to the degree of depth preset, described timing register starts timing; When described probe to be processed departs from described corrosive fluid, described timing register stops timing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520915036.2U CN205115661U (en) | 2015-11-17 | 2015-11-17 | Probe processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520915036.2U CN205115661U (en) | 2015-11-17 | 2015-11-17 | Probe processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205115661U true CN205115661U (en) | 2016-03-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520915036.2U Expired - Fee Related CN205115661U (en) | 2015-11-17 | 2015-11-17 | Probe processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205115661U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105239148A (en) * | 2015-11-17 | 2016-01-13 | 襄阳宏伟航空器有限责任公司 | Probe machining equipment |
| CN113862674A (en) * | 2021-11-09 | 2021-12-31 | 贵州航天南海科技有限责任公司 | Upward-spraying corrosion processing system and processing method thereof |
-
2015
- 2015-11-17 CN CN201520915036.2U patent/CN205115661U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105239148A (en) * | 2015-11-17 | 2016-01-13 | 襄阳宏伟航空器有限责任公司 | Probe machining equipment |
| CN113862674A (en) * | 2021-11-09 | 2021-12-31 | 贵州航天南海科技有限责任公司 | Upward-spraying corrosion processing system and processing method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160330 Termination date: 20191117 |