CN108549293B - Device and method for preparing micro-nano probes with controllable morphology parameters in batch - Google Patents
Device and method for preparing micro-nano probes with controllable morphology parameters in batch Download PDFInfo
- Publication number
- CN108549293B CN108549293B CN201810479914.9A CN201810479914A CN108549293B CN 108549293 B CN108549293 B CN 108549293B CN 201810479914 A CN201810479914 A CN 201810479914A CN 108549293 B CN108549293 B CN 108549293B
- Authority
- CN
- China
- Prior art keywords
- module
- micro
- converter
- channel
- subdivision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
- G05B19/0423—Input/output
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/20—Pc systems
- G05B2219/25—Pc structure of the system
- G05B2219/25257—Microcontroller
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Micromachines (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Weting (AREA)
- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
Abstract
The invention discloses a micro-nano probe batch preparation device with controllable morphological parameters, wherein a mechanical device part comprises a z-axis motor module, an x-axis motor module, an electrolytic reaction tank, a cleaning tank, an insulation processing tank and a multi-channel micro probe clamping module; the controller comprises a microprocessor, a stepping motor driver, a stepping motor subdivision driver, a dynamic subdivision controller, an electrolysis control module, a multi-channel DA converter and a man-machine interaction controller. The invention gives consideration to the speed and the precision of the motor movement, and can ensure that the motor can move quickly in a long distance and move precisely in a short distance; the process transfer module and the process platform are designed to move separately, so that the preparation of a plurality of micro-nano probes can be completed at a time; and the control precision is improved, and the method has the characteristics of high efficiency, high yield and easiness in use. The invention also designs a voltage prediction control algorithm, and realizes the control of the cut-off time of the loop current in the preparation of the micro-nano probe by the electrochemical corrosion method.
Description
Technical Field
The invention belongs to the field of nanotechnology, and particularly relates to a device and a method for preparing micro-nano probes with controllable morphological parameters in batch.
Background
The micro-nano probe is widely applied to the fields of scanning tunnel microscopes, atomic force microscopes, micro-nano thermocouples and the like, and the application in different fields has different requirements on the morphology of the micro-nano probe, so that the micro-nano probe has important significance in controlling the morphology of the finally prepared micro-nano probe.
Electrochemical corrosion is one of the important means for preparing the micro-nano probe at present, but the problem that the shape of the finally prepared probe cannot be predicted exists, the micro-nano probe with the proper shape can be selected only through multiple times of preparation, only one micro-nano probe can be prepared under the participation of personnel each time, or the batch preparation is carried out but does not have higher control precision, and the overall efficiency is not high.
Disclosure of Invention
The purpose of the invention is as follows: aiming at the problems, the invention provides a device and a method for preparing micro-nano probes with controllable morphological parameters in batches.
The technical scheme is as follows: in order to realize the purpose of the invention, the technical scheme adopted by the invention is as follows: a micro-nano probe batch preparation device with controllable morphological parameters comprises a z-axis motor module, an x-axis motor module, an electrolysis reaction module, a multi-channel micro-probe clamping module and a controller; the controller comprises a microprocessor, and the microprocessor is respectively connected with a stepping motor driver, a stepping motor subdivision driver, a dynamic subdivision controller, an electrolysis control module, a multi-channel DA converter and a human-computer interaction controller; the stepping motor driver is connected with the x-axis motor module, and the x-axis motor module is connected with the multi-channel microprobe clamping module; the dynamic subdivision controller is connected with a subdivision driver of the stepping motor, the subdivision driver of the stepping motor is connected with a z-axis motor module, and the z-axis motor module 1 is connected with the electrolytic reaction module; the multi-channel DA converter is connected with the electrolysis control module through the power amplification module, and the electrolysis control module is connected with the electrolysis reaction module; a user sets required micro-nano probe morphology parameters through a human-computer interaction controller, and the microprocessor converts the morphology parameters into corresponding control quantity.
Furthermore, the multichannel microprobe clamping module consists of a plurality of microprobe clamps.
Furthermore, an electrolytic reaction tank, a cleaning tank and an insulation processing tank are arranged on the electrolytic reaction module.
Further, the microprocessor judges a low subdivision motion mode and a high subdivision motion mode of the z-axis motor module, and the dynamic subdivision controller changes the subdivision mode of the stepping motor subdivision driver through a relay switch.
Further, the electrolysis control module comprises a multi-channel DA converter 1, a multi-channel DA converter 2, a multi-channel AD converter, a power amplification module, a high-speed voltage comparator and a high-speed switching tube; the multichannel DA converter 1, the multichannel DA converter 2 and the multichannel AD converter are connected with the microprocessor; the high-speed voltage comparator is connected with the multi-channel DA converter 2, the multi-channel AD converter and the high-speed switching tube; the multichannel DA converter 1 is connected with the high-speed switching tube through the power amplification module.
A method for preparing micro-nano probes with controllable morphological parameters in batches comprises the following steps:
(1) a user sets required micro-nano probe morphology parameters through a human-computer interaction controller, and a microprocessor converts the morphology parameters into corresponding control quantity;
(2) the x-axis motor module drives the micro-nano probes to be positioned right above the electrolytic reaction tank, and the z-axis motor module controls the corresponding depth of the micro-nano probes immersed into the corrosive liquid; after reaching the corresponding position, the microprocessor controls the multi-channel DA converter to give out electrolysis voltage;
(3) reaction characteristics in the electrolytic process are detected through a multi-channel AD converter, and the most appropriate reference voltage of the high-speed voltage comparator is dynamically given by combining a prediction algorithm and the required loop current cut-off delay size;
(4) reference voltage is output to a high-speed voltage comparator through a multi-channel DA converter 2, the high-speed voltage comparator controls the cut-off of loop current through a high-speed switching tube, and different reference voltages can bring different loop current cut-off delays;
(5) after the microprocessor detects that the reaction is ended, the prepared micro-nano probes are lifted out of the corrosive liquid through the z-axis motor module, and the plurality of micro-nano probes are driven through the x-axis motor module to complete the rest steps.
And further, selecting a dynamic corrosion method in the step (2), improving the moving precision of the z-axis motor module through a dynamic subdivision controller, and slowly lifting the micro-nano probe on a micrometer scale at a corresponding moment when the reaction is carried out.
Has the advantages that: the invention designs the dynamic subdivision controller, takes the speed and the precision of the motor motion into consideration, and can ensure that the motor moves quickly in a long distance and moves in a short distance with high precision; the process transfer module, the process platform discrete moving design and the multi-channel microprobe clamping module are adopted, the multi-dimensional movement of a single module is split, the process platform finishes the movement of the transfer module in the reverse direction of the z axis, the control precision is improved, the system manufacturing difficulty and cost are reduced, the assembly difficulty is reduced, meanwhile, the preparation of a plurality of microprobes can be finished at a time, and the process platform micro-nano probe clamping module has the characteristics of high efficiency, high yield and easiness in use.
The voltage prediction control algorithm provided by the invention can predict the occurrence time point of the broken needle point, so that the circuit current cutting advance or lag can be controlled, the control on the circuit current cutting time in the preparation of the micro-nano probe by an electrochemical corrosion method is realized, and the aim of controlling the final shape of the micro-nano probe is fulfilled.
The invention designs the comprehensive control of the immersion depth of the probe, the static dynamic transformation of the corrosion process, the corrosion voltage value and the loop current cut-off time in the process of preparing the micro-nano probe by an electrochemical method, and compared with the prior art that only a single or a small number of the micro-nano probe can be independently manually or automatically controlled, the invention has comprehensiveness and covers almost all controllable factors.
Drawings
FIG. 1 is a mechanical block diagram of the system of the present invention;
FIG. 2 is a schematic diagram of a multi-channel micro probe clamping module according to the present invention;
FIG. 3 is a functional block diagram of the system of the present invention;
FIG. 4 is a block diagram of the dynamic segment controller of the present invention;
FIG. 5 is a schematic diagram of an electrolytic control module of the present invention;
FIG. 6 is a flow chart of the topographic parameter control software algorithm of the present invention.
Detailed Description
The technical solution of the present invention is further described below with reference to the accompanying drawings and examples.
The method is characterized in that a micro-nano probe is prepared based on a traditional electrochemical method, a set of full-automatic preparation device is designed by combining preparation experience and theoretical analysis, and the finally obtained morphology of the micro-nano probe can be determined by setting corrosion voltage, probe immersion depth and electrolytic loop current cut-off delay. The whole set of device can be arranged and finished without personnel participation, can finish the preparation of a plurality of micro-nano probes at a time, and has the characteristics of controllable appearance, high efficiency, high uniformity and high success rate.
As shown in fig. 1, the micro-nano probe batch preparation device with controllable morphological parameters comprises a z-axis motor module 1, an x-axis motor module 2, an electrolytic reaction module 3, an electrolytic reaction tank 4, a cleaning tank 5, an insulation processing tank 6 and a multi-channel micro-probe clamping module 7; the electrolytic reaction module 3 is provided with an electrolytic reaction tank 4, a cleaning tank 5 and an insulation treatment tank 6. The multi-channel microprojection retainer module 7, as shown in figure 2, is comprised of a plurality of microprojection retainers 8.
As shown in fig. 3, the controller of the device of the present invention comprises a microprocessor, a stepping motor driver, a stepping motor subdivision driver, a dynamic subdivision controller, an electrolysis control module, a multi-channel DA converter, and a human-computer interaction controller; the microprocessor is respectively connected with the stepping motor driver, the stepping motor subdivision driver, the dynamic subdivision controller, the electrolysis control module, the multi-channel DA converter and the human-computer interaction controller; the stepping motor driver is connected with the x-axis motor module 2, and the x-axis motor module 2 is connected with the multi-channel microprobe clamping module 7; the dynamic subdivision controller is connected with a subdivision driver of the stepping motor, the subdivision driver of the stepping motor is connected with the z-axis motor module 1, and the z-axis motor module 1 is connected with the electrolytic reaction module 3; the multi-channel DA converter is connected with the electrolysis control module through the power amplification module, and the electrolysis control module is connected with the electrolysis reaction module 3.
The control algorithm of the stepping motor driver, the stepping motor subdivision driver, the dynamic subdivision controller and the microprocessor is combined to realize the long-distance rapid movement, the short-distance high-precision movement and the switching of the microprobe clamping module 7 among the electrolytic reaction tank 4, the cleaning tank 5 and the insulation processing tank 6. The reaction voltage can be controlled through the multi-channel DA module and the power amplification module. The circuit current cut-off delay can be controlled by the electrolysis control module. The microprobe clamping module 7 can clamp a plurality of probes, and a plurality of probes can be prepared at a time under the control of the electrolysis control module.
After a user sets required micro-nano probe morphology parameters through a human-computer interaction controller, a microprocessor converts the morphology parameters into corresponding control quantities, controls the immersion depth through a stepping motor driver and controls the loop current cut-off delay through an electrolysis control module, and the preparation of the micro-nano probe is completed by means of full automation of a multi-channel micro-probe clamping module.
As shown in fig. 4, the dynamic subdivision controller changes the subdivision mode of the subdivision driver of the stepping motor through the relay switch, and the z-axis motor module 1 can switch the low subdivision motion mode and the high subdivision motion mode under the judgment of the microprocessor. The system can automatically judge and use a high subdivision mode and a low subdivision mode, and the motor can have higher moving speed in the low subdivision mode, so that the multi-channel microprobe clamping module can be quickly switched among the electrolytic reaction tank 4, the cleaning tank 5 and the insulation processing tank 6; under the high subdivision mode, the depth of the raw material of the electrolytic reaction probe immersed into the electrolyte can be accurately controlled.
As shown in fig. 5, the electrolysis control module is composed of a multi-channel DA converter 1, a multi-channel DA converter 2, a multi-channel AD converter, a power amplification module, a high-speed voltage comparator, and a high-speed switching tube; the multichannel DA converter 1, the multichannel DA converter 2 and the multichannel AD converter are connected with the microprocessor; the high-speed voltage comparator is connected with the multichannel DA converter 2, the multichannel AD converter and the high-speed switch tube, and the multichannel DA converter 1 is connected with the high-speed switch tube through the power amplification module.
As shown in fig. 6, the preparation method of the micro-nano probe batch preparation device with controllable morphological parameters comprises the following steps:
(1) a user sets required micro-nano probe morphological parameters including a taper angle, a curvature radius, an aspect ratio, a smooth finish and a needle tip length of a needle tip through a human-computer interaction controller; the microprocessor converts the morphology parameters into corresponding control quantities including electrolytic voltage, immersion depth, dynamic or static reaction control and loop current cut-off delay, and initializes the preparation environment;
(2) when the micro-nano probe preparation is started, the x-axis motor module 2 drives a plurality of micro-nano probe raw materials (usually tungsten needles) to be right above the electrolytic reaction tank 4, and the z-axis motor module 1 controls the raw materials to be immersed into the corrosive liquid (usually sodium hydroxide solution) to a corresponding depth; after reaching the corresponding position, the microprocessor controls the multichannel DA converter to give out electrolysis voltage and controls the preparation reaction to start;
(3) the cut-off time of the current of the preparation reaction loop is controlled by the voltage comparator and the switch tube. Reaction current in the electrolytic process is detected through a multi-channel AD converter, prediction current given by a pre-designed micro-nano probe electrolytic consumption prediction model is combined in a microprocessor, and p-control (such as a Kalman filter) is used for giving out optimal reaction current at corresponding moment. In the case where it is assumed that the loop current needs to be cut off at the next time, the amount of reactive current (converted into the amount of voltage) lower than the present time is given as the reference voltage of the voltage comparator by the multichannel DA converter 2. And (5) circularly performing the process until the reaction current is less than the set reference voltage, and controlling the reaction to be terminated by the voltage comparator. In the process, the reference voltage given at a certain moment is changed, and the voltage comparator can be controlled to turn off the switch tube under different voltage conditions, so that the purpose of controlling the circuit current cut-off time is achieved, and the final shape of the micro-nano probe is controlled;
(4) if a dynamic corrosion method is selected in the process (1), the moving precision of the z-axis motor module 1 is improved through a dynamic subdivision controller, and the micro-nano probe is slowly lifted in a micrometer scale at the corresponding moment when the reaction is carried out;
(5) after the microprocessor detects that the reaction is finished, the prepared micro-nano probes are lifted out of the corrosive liquid through the z-axis motor module 1, and the plurality of micro-nano probes are driven by the x-axis motor module 2 to complete the rest steps.
Claims (5)
1. A micro-nano probe batch preparation device with controllable morphology parameters is characterized in that: the device comprises a z-axis motor module (1), an x-axis motor module (2), an electrolytic reaction module (3), a multi-channel microprobe clamping module (7) and a controller;
the controller comprises a microprocessor, and the microprocessor is respectively connected with a stepping motor driver, a stepping motor subdivision driver, a dynamic subdivision controller, an electrolysis control module, a multi-channel DA converter and a human-computer interaction controller;
the stepping motor driver is connected with the x-axis motor module (2), and the x-axis motor module (2) is connected with the multi-channel microprobe clamping module (7);
the dynamic subdivision controller is connected with a subdivision driver of the stepping motor, the subdivision driver of the stepping motor is connected with a z-axis motor module (1), and the z-axis motor module (1) is connected with the electrolytic reaction module (3); the microprocessor judges a low subdivision motion mode and a high subdivision motion mode of the z-axis motor module (1), and the dynamic subdivision controller changes the subdivision mode of a subdivision driver of the stepping motor through a relay switch;
the multi-channel DA converter is connected with the electrolysis control module through the power amplification module, and the electrolysis control module is connected with the electrolysis reaction module (3);
a user sets required micro-nano probe morphology parameters through a human-computer interaction controller, and a microprocessor converts the morphology parameters into corresponding control quantity;
the electrolysis control module comprises a multi-channel DA converter 1, a multi-channel DA converter 2, a multi-channel AD converter, a power amplification module, a high-speed voltage comparator and a high-speed switching tube; the multichannel DA converter 1, the multichannel DA converter 2 and the multichannel AD converter are connected with the microprocessor; the high-speed voltage comparator is connected with the multi-channel DA converter 2, the multi-channel AD converter and the high-speed switching tube; the multichannel DA converter 1 is connected with the high-speed switching tube through the power amplification module;
reaction characteristics in the electrolytic process are detected through a multi-channel AD converter, and the most appropriate reference voltage of the high-speed voltage comparator is dynamically given by combining a prediction algorithm and the required loop current cut-off delay size; the reference voltage is output to the high-speed voltage comparator through the multi-channel DA converter 2, the high-speed voltage comparator controls the cut-off of the loop current through the high-speed switching tube, and different reference voltages can bring different loop current cut-off delays.
2. The device for preparing the micro-nano probes in batches with controllable morphological parameters according to claim 1 is characterized in that: the multi-channel microprobe clamping module (7) is composed of a plurality of microprobe clamps (8).
3. The device for preparing the micro-nano probes in batches with controllable morphological parameters according to claim 1 is characterized in that: the electrolytic reaction module (3) is provided with an electrolytic reaction tank (4), a cleaning tank (5) and an insulation treatment tank (6).
4. A preparation method of the micro-nano probe batch preparation device with controllable morphological parameters according to any one of claims 1 to 3 is characterized by comprising the following steps: the method comprises the following steps:
(1) a user sets required micro-nano probe morphology parameters through a human-computer interaction controller, and a microprocessor converts the morphology parameters into corresponding control quantity;
(2) the x-axis motor module drives the micro-nano probes to be positioned right above the electrolytic reaction tank, and the z-axis motor module controls the corresponding depth of the micro-nano probes immersed into the corrosive liquid; after reaching the corresponding position, the microprocessor controls the multi-channel DA converter to give out electrolysis voltage;
(3) reaction characteristics in the electrolytic process are detected through a multi-channel AD converter, and the most appropriate reference voltage of the high-speed voltage comparator is dynamically given by combining a prediction algorithm and the required loop current cut-off delay size;
(4) reference voltage is output to a high-speed voltage comparator through a multi-channel DA converter 2, the high-speed voltage comparator controls the cut-off of loop current through a high-speed switch tube, and different reference voltages can delay the cut-off of the loop current in different meters;
(5) after the microprocessor detects that the reaction is ended, the prepared micro-nano probes are lifted out of the corrosive liquid through the z-axis motor module, and the plurality of micro-nano probes are driven through the x-axis motor module to complete the rest steps.
5. The preparation method of the micro-nano probe batch preparation device with controllable morphological parameters according to claim 4, which is characterized by comprising the following steps: and (3) selecting a dynamic corrosion method in the step (2), improving the moving precision of the z-axis motor module through a dynamic subdivision controller, and slowly lifting the micro-scale probe on a micrometer scale at the corresponding moment when the reaction is carried out.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810479914.9A CN108549293B (en) | 2018-05-18 | 2018-05-18 | Device and method for preparing micro-nano probes with controllable morphology parameters in batch |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810479914.9A CN108549293B (en) | 2018-05-18 | 2018-05-18 | Device and method for preparing micro-nano probes with controllable morphology parameters in batch |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108549293A CN108549293A (en) | 2018-09-18 |
| CN108549293B true CN108549293B (en) | 2021-06-11 |
Family
ID=63495161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810479914.9A Active CN108549293B (en) | 2018-05-18 | 2018-05-18 | Device and method for preparing micro-nano probes with controllable morphology parameters in batch |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108549293B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110484962A (en) * | 2019-08-14 | 2019-11-22 | 东南大学 | Automation array nanometer pinpoint electrochemistry prepares platform and preparation method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101119092A (en) * | 2007-09-06 | 2008-02-06 | 哈尔滨工业大学 | High subdivided integration type stepper motor driver |
| CN101324785A (en) * | 2008-07-17 | 2008-12-17 | 浙江大学 | Pure tungsten material micro-nano probe preparation control system for scanning tunnel microscope |
| CN201352778Y (en) * | 2008-12-31 | 2009-11-25 | 深圳易拓科技有限公司 | Control device for a plurality of stepping motors |
| CN102735880A (en) * | 2012-06-20 | 2012-10-17 | 浙江大学 | Scanning probe measuring system and method for large-range micro-nano structure |
| CN102738380A (en) * | 2012-06-05 | 2012-10-17 | 东南大学 | Device for producing micro-nano thermocouple probe |
| CN103700760A (en) * | 2014-01-14 | 2014-04-02 | 东南大学 | Volume preparation device of micro-nano thermocouple probe precursors |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100479779C (en) * | 2006-03-13 | 2009-04-22 | 山东省肿瘤医院 | Phantom model sport platform and method for sport simulating |
| CN101017929B (en) * | 2007-02-13 | 2011-05-04 | 上海理工大学 | Two-dimension automatic positioning control antenna supporter for micro-wave detection |
-
2018
- 2018-05-18 CN CN201810479914.9A patent/CN108549293B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101119092A (en) * | 2007-09-06 | 2008-02-06 | 哈尔滨工业大学 | High subdivided integration type stepper motor driver |
| CN101324785A (en) * | 2008-07-17 | 2008-12-17 | 浙江大学 | Pure tungsten material micro-nano probe preparation control system for scanning tunnel microscope |
| CN201352778Y (en) * | 2008-12-31 | 2009-11-25 | 深圳易拓科技有限公司 | Control device for a plurality of stepping motors |
| CN102738380A (en) * | 2012-06-05 | 2012-10-17 | 东南大学 | Device for producing micro-nano thermocouple probe |
| CN102735880A (en) * | 2012-06-20 | 2012-10-17 | 浙江大学 | Scanning probe measuring system and method for large-range micro-nano structure |
| CN103700760A (en) * | 2014-01-14 | 2014-04-02 | 东南大学 | Volume preparation device of micro-nano thermocouple probe precursors |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108549293A (en) | 2018-09-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108549293B (en) | Device and method for preparing micro-nano probes with controllable morphology parameters in batch | |
| CN102586854B (en) | High-efficiency automatic tungsten needle manufacturing device and method | |
| CN108169518A (en) | Morphology controllable needle tip of scanning tunnel microscope preparation system | |
| CN102658404B (en) | Precision combined electrochemical machining method | |
| CN104493825A (en) | Cooperating device for micro-nano operating robot and operating method for microinjection | |
| CN103116276A (en) | Piezoelectric ceramic objective driver control method | |
| CN102151510B (en) | Mixing device | |
| CN104785871A (en) | Probe manufacturing method and device | |
| CN101324785B (en) | Pure tungsten material micro-nano probe preparation control system for scanning tunnel microscope | |
| CN205032859U (en) | Automatic focusing laser cutting head | |
| CN113186588B (en) | Automatic intelligent polishing equipment for preparing metal nanometer needle point sample | |
| CN110618153A (en) | Preparation method of electropolished titanium alloy large-size rod-shaped or plate-shaped sample | |
| CN1979364A (en) | Precision digital step controller | |
| CN203532182U (en) | Tilted high-speed quantitative fluid injector | |
| CN102534757A (en) | Intelligent crystal growth control system based on industrial bus | |
| CN104962454B (en) | Full-automatic nucleic acid molecular cross instrument | |
| CN102179831B (en) | Micro-channel processing equipment of microfluidic chip | |
| CN103143998A (en) | Can-shaped ferrite core grinding device | |
| CN110777424B (en) | Nanometer needle tip batch production device and preparation method | |
| CN202523803U (en) | Automatic calibration device for needle-bed-type battery formation equipment | |
| CN209407190U (en) | CCD multiple spot micropore is automatically positioned full-automatic multiple groups group microporous spinneret plate perforating press | |
| CN204959680U (en) | Original state soil erodees intelligent automatic thrustor | |
| CN101831678B (en) | Electrochemical deposition device of stratified nano materials | |
| CN203438355U (en) | Wall forming device used for modularized building | |
| CN202861575U (en) | Welding groove mechanism of weldability tester |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |