CN108507597A - Optical fiber Fabry-Perot sensor demodulating equipment and method - Google Patents
Optical fiber Fabry-Perot sensor demodulating equipment and method Download PDFInfo
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- CN108507597A CN108507597A CN201810312549.2A CN201810312549A CN108507597A CN 108507597 A CN108507597 A CN 108507597A CN 201810312549 A CN201810312549 A CN 201810312549A CN 108507597 A CN108507597 A CN 108507597A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 67
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
- G01D5/30—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication the beams of light being detected by photocells
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
Abstract
The present invention relates to optical fiber Fabry-Perot sensor demodulating equipment and method, optical fiber Fabry-Perot sensor demodulating equipment is made of two SLED light sources, wavelength division multiplexer, fiber coupler, optical fiber collimator, cylindrical lens, wedge, line array CCD, AD conversion module and signal processing unit；Two different-waveband SLED light sources are connected by wavelength division multiplexer with one end in two entry port of fiber coupler, exit ports are connected with optical fiber Fabry-Perot sensor, another entry port of fiber coupler is connected with optical fiber collimator, cylindrical lens, wedge, line array CCD are sequentially placed after optical fiber collimator, CCD is by the optical signal detected with electric signal output, and digital signal is converted to for signal processing unit analyzing processing via AD conversion module, obtain chamber long value.The demodulating equipment is used as light source using the SLED of two different-wavebands, significantly improves the contrast of correlation interference signal, and signal waveform is more convenient for the extraction of correlation interference signal peak position, to which accurately resolving chamber is long.
Description
Technical field
The present invention relates to technical field of optical fiber sensing, and in particular to a kind of optical fiber Fabry-Perot sensor demodulating equipment and method.
Background technology
Optical fiber Fabry-Perot sensor is due to its light-weight, small, high sensitivity, responding range is big and electromagnetism interference
The features such as ability is strong has become one of important research direction of sensory field of optic fibre, especially strong electromagnetic, high temperature,
Application under the adverse circumstances such as high pressure is even more with the incomparable advantage of traditional sensors.It is mainly manifested in bridge surface stress
The fields such as monitoring, turbogenerator pressure monitoring.Currently, the demodulation method for optical fiber Fabry-Perot sensor mainly has intensity demodulation
And phase demodulating.Intensity demodulation method is more simple on detection method and signal processing, but measurement accuracy depends on light intensity test
Precision and light path system stability, disturbance, optical path loss of light source etc. can cause the fluctuation of light intensity, and precision is low, stability
Difference.And phase method is divided into spectroscopic methodology and correlation method.
It is wherein more extensive with correlation method application, mostly with list in the existing Non-scanning mode correlation demodulation system using correlation method
A SLED (super-radiance light emitting diode) inputs as light source.And currently on the market the bandwidth of SLED light sources based on 20nm,
The correlation interference fringe contrast of narrower bandwidth, output is relatively low, to obtain higher demodulation accuracy, needs single SLED light sources
Bandwidth accomplish hundred nanometers or more, but capital equipment is extremely high.
Invention content
For optical fiber Fabry-Perot sensor Non-scanning mode correlation demodulation technology problem encountered, the present invention proposes a kind of double SLED
Optical fiber Fabry-Perot sensor demodulating equipment and method are inputted as light source using the SLED of two different-wavebands, obtain and be different from list
Correlation interference signal under SLED light conditions, improves fringe contrast, and signal waveform is more favorable to correlation interference signal
The extraction of peak value realizes that high-precision, high-resolution chamber length resolve, and cost substantially reduces.
In order to achieve the above object, technical scheme is as follows：
A kind of optical fiber Fabry-Perot sensor demodulating equipment, including fiber coupler, optical fiber Fabry-Perot sensor, optical fiber collimator,
Cylindrical lens or cylindrical mirror, wedge, line array CCD, AD conversion module and signal processing unit further include two different-wavebands
SLED light sources and wavelength division multiplexer, described two SLED light sources are connected with two input ports of wavelength division multiplexer respectively, wave
A port in two entry ports of the output port of division multiplexer and fiber coupler is connected, the exit end of fiber coupler
Mouth is connected with optical fiber Fabry-Perot sensor, another port in two entry ports of fiber coupler is connected with optical fiber collimator,
Cylindrical lens or cylindrical mirror are placed after optical fiber collimator, and wedge is set after cylindrical lens or cylindrical mirror, line is set after wedge
Battle array CCD, line array CCD are followed by signal processing unit through AD conversion module, are connected by single mode optical fiber between component；
Described two SLED source emissioning lights spectrum three dB bandwidths are more than or equal to 20nm, and centre wavelength interval is more than or equal to
100nm；
Double-colored broadband anti-reflection film is plated in outer surface in two surfaces of the wedge, and inner surface plates the double-colored width of certain reflectivity
Two SLED are completely covered simultaneously in band reflectance coating, the anti-reflection wave band of double-colored broadband anti-reflection film and the reflected waveband of broadband reflection film
The emission spectrum of light source.
Further, the optical fiber collimator is compound lens type heavy caliber optical fiber collimator.
Further, the wedge is close to line array CCD receiving plane, and wedge is located at cylindrical lens or column with line array CCD receiving surface
At the reflector focal point of face.
A kind of optical fiber Fabry-Perot sensor demodulating equipment demodulation method, the broadband of two SLED light source outputs, two groups of different-wavebands
Light closes the input port that beam is coupled into a fiber coupler by wavelength division multiplexer, closes the broadband light of beam by optical fiber
The output port of coupler enters optical fiber Fabry-Perot sensor, and multiple-beam interference occurs, and carries the part broadband light of chamber long message
It is reflected and is returned along original optical path, after fiber coupler, be partly optically coupled to optical fiber collimator, collimated by optical fiber collimator
The large scale collimated light beam of one fixed width is converted to later, which focuses via cylindrical lens, is converted to linear hot spot, should
Linear hot spot passes through wedge, and multiple-beam interference occurs again due to the reflection of wedge former and later two reflectings surface, after wedge,
The light intensity of linear hot spot is modulated, obtains the multimodal correlation interference signal of a high contrast, modulated Line of light is by line
Battle array CCD is received, and after being converted to digital signal using AD conversion module, by signal processing unit analyzing processing, is extracted related dry
Signal peak position is related to, and resolves and obtains chamber long value this moment.
Compared with the prior art, the advantages of this method is：
1, the present invention using the SLED light sources of two different-wavebands as light source input, compared to single SLED light sources, by
Occur multiple oscillation in the use of two different-waveband light waves, correlation interference signal, multiple interference zeros occurs so that signal
Contrast higher is also beneficial to obtain correlation interference signal peak position additionally, due to the presence of multiple interference zeros, realizes high
Precision, high-resolution chamber length resolve.
2, at low cost：To obtain higher fringe contrast, single SELD light sources bandwidth must accomplish 150nm, price
130,000 or so, and the present invention improves contrast with two SLED light sources, and bandwidth 20nm can be met the requirements, and price is two
Ten thousand or so, in contrast, cost significantly reduces.
Description of the drawings
Fig. 1 is the structural schematic diagram of the embodiment of the present invention；
When Fig. 2 is that single SLED light sources 1 input, correlation interference signal on obtained wedge corresponding to different location
The curve of light distribution；
When Fig. 3 is that double SLED are inputted as light source, the correlation interference signal on obtained wedge corresponding to different location
The curve of light distribution；
In figure, the SLED light sources of 1- centre wavelengths 850nm, the SLED light sources of 2- centre wavelengths 750nm, 3- wavelength-division multiplex
Device, 4- fiber couplers, 5- optical fiber Fabry-Perot sensors, 6- optical fiber collimators, 7- cylindrical lens, 8- wedges, 9- line array CCDs, 10-AD
Conversion module, 11- signal processing units.
Specific implementation mode
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing to the present invention make into
It is described in detail to one step, it is clear that described embodiments are only a part of the embodiments of the present invention, rather than whole implementation
Example.Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts
All other embodiment, shall fall within the protection scope of the present invention.
The present invention will in conjunction with the accompanying drawings and embodiments be described in detail the present invention.
A kind of basic principle of optical fiber Fabry-Perot sensor demodulating equipment demodulation method of the present invention is：When external physical quantity acts on
When optical fiber Fabry-Perot sensor, the chamber for changing Fa-Po cavity is long, causes the variation of optical path difference.According to cavity length matching principle, use is non-
Scanning element wedge realizes the spacescan of optical fiber Fabry-Perot sensor optical path difference, when the chamber of wedge thickness and optical fiber Fabry-Perot sensor
When long equal, correlation interference signal output intensity is maximum.Therefore, the output intensity maximum point of correlation interference signal need to be only determined,
The corresponding wedge thickness of the point is chamber long value this moment.The present invention is inputted using the SLED of two different-wavebands as light source,
The fringe contrast of correlation interference signal is effectively improved, to easily obtain the exact position at correlation interference signal peak.It is this
The optical fiber Fabry-Perot sensor demodulation method of double SLED has the advantages that long measurement range of high certainty of measurement, chamber is big, demodulation rate is high.
As shown in Figure 1, a kind of optical fiber Fabry-Perot sensor demodulating equipment of embodiment offer and method, specially：Two centers
Wavelength is respectively 850nm, 750nm, and bandwidth is the SLED light source 1 and SLED light sources 2 of 20nm, by wavelength division multiplexer 3 and 2 ×
One entry port of 1 fiber coupler 4 connects.
The exit ports of 2 × 1 fiber couplers 4 are connect by single mode optical fiber with the tail optical fiber of optical fiber Fabry-Perot sensor 5, and 2 × 1
Another entry port of fiber coupler 4 is connect by single mode optical fiber with the tail optical fiber of optical fiber collimator 6.In the present embodiment, respectively
A discrete fiber optic component and device passes through flanged joint；But in other embodiments, they can also use the mode of welding to connect.
The cylindrical lens 7 used in the present embodiment are arranged after optical fiber collimator 6, and cylindrical lens 7 use the plano-convex of focal length 50mm
Cylindrical lens, 35 × 35 × 2mm of hem width.
Wedge 8 is arranged near the focal position of cylindrical lens 7, and is built using two pieces of flat glass, and outer surface plating is wide
Band anti-reflection film, inner surface plate 50% broadband reflection film, the anti-reflection wave band of broadband anti-reflection film and the reflected waveband of broadband reflection film
The emission spectrum of two SLED light sources is completely covered simultaneously.
Line array CCD 9 is arranged after wedge 8, for detecting relevant interference light signal, and with electric signal output.
AD conversion module 10 is arranged after line array CCD 9, is used for signal acquisition and conversion.
Signal processing unit 11 is arranged after AD conversion module 10, for doing analyzing processing to transformed digital signal,
Obtain the chamber long value at this moment.
Two SLED light sources 1 and 2 export the broadband light of two groups of different-wavebands, and close beam by wavelength division multiplexer 3 and be coupled into
An input port for entering 2 × 1 fiber couplers 4, close the broadband light of beam by 2 × 1 fiber couplers 4 output port into
Enter optical fiber Fabry-Perot sensor 5, and multiple-beam interference occurs, the part broadband light for carrying chamber long message is reflected and returned along original optical path
It returns, after 2 × 1 fiber couplers 4, is partly optically coupled to optical fiber collimator 6, by being converted to after the collimation of optical fiber collimator 6
The large scale collimated light beam of one fixed width, the collimated light beam are focused via cylindrical lens 7, are converted to linear hot spot, the threadiness hot spot
Across wedge 8, multiple-beam interference occurs again due to the reflection of 8 former and later two reflectings surface of wedge, it is linear after wedge 8
The light intensity of hot spot is modulated, and modulated light is received by line array CCD 9, and digital signal is converted to using AD conversion module 10
Afterwards, finally by 11 analyzing processing of signal processing unit, chamber long value this moment is obtained.
Assuming that using single SLED light sources 1 as input, due to using wideband light source, and light source has on spatially and spectrally
Gaussian Profile, therefore the output intensity detected on CCD is：
In formula, first item is the Gaussian Profile of SLED light sources 1 spatially, and Section 2 is the reflection of optical fiber Fabry-Perot sensor
Output item, Section 3 are the transmission output item of wedge, and Section 4 is the Gaussian Profile of SLED light sources 1 spectrally.Wherein, R1、R2
The respectively end face reflection rate of air chamber proximal end face, distal face；L is that the chamber of Fa-Po cavity is long, R3For the reflectivity of wedge inner surface；
X is any position on wedge short side；θ is the angle for constituting two plane of wedge；It is 1 light intensity of SLED light sources with λ1What is be distributed is normal
Amount；λP1For the centre wavelength of 1 spectrum of SLED light sources；Bλ1The Gaussian function halfwidth determined by 1 spectral bandwidth of SLED light sources
Degree；xp1For the center of SLED light sources 1；Bx1By the halfwidth degree for the Gaussian function that 1 spatial bandwidth of SLED light sources determines.
For mathematical angle, above-mentioned formula and cross-correlation function formula are closely similar, when wedge thickness and Fa-Po cavity chamber
When long equal：As xtan θ=L, will occur correlation interference signal light intensity maximum value at wedge x position.So, it demodulates
When, a demand draws the corresponding wedge thickness of correlation interference signal light intensity maximum value, can obtain chamber long value L this moment, realizes non-
Scan-type correlation demodulation.
For this formula, emulated using Matlab.As illustrated in fig. 2, it is assumed that the end of optical fiber Fabry-Perot sensor Fa-Po cavity
Face reflectivity is 4%, and chamber is L=80 μm long, and wedge one end thickness is 0, when 125 μm of the other end, the centre wavelength of SLED light sources 1
850nm, bandwidth 20nm, the curve of light distribution of the correlation interference signal on obtained wedge corresponding to different location.
When two SLED are inputted as light source, similarly, the output intensity detected on CCD is：
In formula,It is 2 light intensity of SLED light sources with λ1The constant of distribution；λP2For the centre wavelength of 2 spectrum of SLED light sources；Bλ2
The Gaussian function halfwidth degree determined by 2 spectral bandwidth of SLED light sources；xp2For the center of SLED light sources 2；Bx2For SLED
The halfwidth degree for the Gaussian function that 2 spatial bandwidth of light source is determined.Remaining parameter indicates that parameter is consistent with above formula.
Similarly, it for the formula, is emulated using Matlab, keeps consistent with above formula, obtain wedge difference position
The curve of light distribution of corresponding correlation interference signal is set, as shown in Figure 3.
It can be seen that from two width figures and the SLED of two different-wavebands used to input for light source when other conditions are constant,
Correlation interference signal is different from when single SLED light sources input as a result, occurring multiple interference zeros (button in correlation interference signal
Except basal signal), cause the contrast of striped to significantly increase, the peak position of correlation interference signal is more easy to obtain, in addition this
Waveform is also beneficial to take new calculation method, accurate to obtain correlation interference signal peak position, to accurately resolve Fiber Optic Sensor
The chamber long value of amber sensor.
It should be noted that in the present embodiment, fiber coupler 4 uses 2 × 1 couplers, in other embodiment
In, 2 × 2 fiber couplers can also be used.Optical fiber Fabry-Perot sensor 5 can use the extrinsic type Fabry-perot optical fiber of diaphragm type to pass
Sensor can also use the extrinsic type and Intrinsical optical fiber Fabry-Perot sensor of other structures form.Optical fiber collimator 6 uses
Compound lens type heavy caliber optical fiber collimator.Realize that the wedge 8 of computing cross-correlation is built using two pieces of flat glass, outer surface plating
Broadband anti-reflection film, inner surface plate 50% broadband reflection film, and 8 angle of wedge is changeable with thickness, can also be real using voussoir
It is existing.
Use above specific case is illustrated the present invention, is merely used to help understand the present invention, not limiting
The system present invention.For those skilled in the art, according to the thought of the present invention, can also make several simple
It deduces, deform or replaces.
Claims (4)
1. optical fiber Fabry-Perot sensor demodulating equipment, including fiber coupler (4), optical fiber Fabry-Perot sensor (5), optical fiber collimator
(6), cylindrical lens (7) or cylindrical mirror, wedge (8), line array CCD (9), AD conversion module (10) and signal processing unit
(11), which is characterized in that further include the SLED light sources and wavelength division multiplexer (3) of two different-wavebands, described two SLED light sources
It is connected respectively with two input ports of wavelength division multiplexer (3), output port and the fiber coupler (4) of wavelength division multiplexer (3)
A port in two entry ports is connected, and the exit ports of fiber coupler (4) are connected with optical fiber Fabry-Perot sensor (5),
Another port in (4) two entry ports of fiber coupler is connected with optical fiber collimator (6), and optical fiber collimator is put after (6)
Cylindrical lens (7) or cylindrical mirror are set, wedge (8) is set after cylindrical lens (7) or cylindrical mirror, linear array is arranged in wedge (8) afterwards
CCD (9), line array CCD (9) are followed by signal processing unit (11) through AD conversion module (10), pass through single-mode optics between component
Fibre connection；
Described two SLED source emissioning lights spectrum three dB bandwidths are more than or equal to 20nm, and centre wavelength interval is more than or equal to 100nm；
Double-colored broadband anti-reflection film is plated in outer surface in (8) two surfaces of the wedge, and inner surface plates the double-colored width of certain reflectivity
Two SLED are completely covered simultaneously in band reflectance coating, the anti-reflection wave band of double-colored broadband anti-reflection film and the reflected waveband of broadband reflection film
The emission spectrum of light source.
2. optical fiber Fabry-Perot sensor demodulating equipment according to claim 1, which is characterized in that the optical fiber collimator
(6) it is compound lens type heavy caliber optical fiber collimator.
3. optical fiber Fabry-Perot sensor demodulating equipment according to claim 1, which is characterized in that the wedge (8) is close to line
Battle array CCD (9) receiving plane, wedge (8) are located at cylindrical lens (7) or cylindrical mirror focal point with line array CCD (9) receiving surface.
4. optical fiber Fabry-Perot sensor demodulating equipment demodulation method according to claim 1, which is characterized in that two SLED light
Source exports the broadband light of two groups of different-wavebands, and closing beam by wavelength division multiplexer (3) is coupled into the one of a fiber coupler (4)
A input port, the broadband light for closing beam enters optical fiber Fabry-Perot sensor (5) by the output port of fiber coupler (4), and occurs
Multiple-beam interference, the part broadband light for carrying chamber long message is reflected and is returned along original optical path, after fiber coupler (4),
Part is optically coupled to optical fiber collimator (6), by the large scale directional light for being converted to one fixed width after optical fiber collimator (6) collimation
Beam, the collimated light beam are focused via cylindrical lens (7), are converted to linear hot spot, which passes through wedge (8), due to wedge
(8) reflection of former and later two reflectings surface and multiple-beam interference occurs again, after wedge (8), the light intensity of linear hot spot by
Modulation obtains the multimodal correlation interference signal of a high contrast, and modulated Line of light is received by line array CCD (9), using
After AD conversion module (10) is converted to digital signal, by signal processing unit (11) analyzing processing, correlation interference signal peak is extracted
It is worth position, and resolves and obtain chamber long value this moment.
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Cited By (6)
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| CN109141492A (en) * | 2018-10-22 | 2019-01-04 | 西安光微科技有限公司 | A kind of optical fiber Fabry-Perot sensor cavity length demodulating system and demodulation method |
| CN109470387A (en) * | 2018-11-09 | 2019-03-15 | 中国核动力研究设计院 | A kind of load cell and system for restraining the impact force between support plate |
| CN109520429A (en) * | 2018-11-26 | 2019-03-26 | 重庆大学 | The few spectrum sample point high-speed measuring system and method for white light interference type optical fiber Fabry-Perot sensor |
| CN113325574A (en) * | 2021-05-31 | 2021-08-31 | 西安工业大学 | Double-light-source cavity length matching demodulation method of optical fiber Fabry-Perot sensor |
| WO2021212266A1 (en) * | 2020-04-20 | 2021-10-28 | 北京佰为深科技发展有限公司 | Fabry-perot sensor cavity length demodulation system and fabry-perot sensor cavity length demodulation method |
| CN114777833A (en) * | 2022-04-29 | 2022-07-22 | 西安和其光电科技股份有限公司 | System and method for adjusting cavity length consistency of extrinsic Fabry-Perot optical fiber sensing probe |
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| CN113325574A (en) * | 2021-05-31 | 2021-08-31 | 西安工业大学 | Double-light-source cavity length matching demodulation method of optical fiber Fabry-Perot sensor |
| CN113325574B (en) * | 2021-05-31 | 2022-12-27 | 西安工业大学 | Double-light-source cavity length matching demodulation method of optical fiber Fabry-Perot sensor |
| CN114777833A (en) * | 2022-04-29 | 2022-07-22 | 西安和其光电科技股份有限公司 | System and method for adjusting cavity length consistency of extrinsic Fabry-Perot optical fiber sensing probe |
| CN114777833B (en) * | 2022-04-29 | 2023-11-28 | 西安和其光电科技股份有限公司 | System and method for adjusting cavity length consistency of extrinsic Fabry-Perot optical fiber sensing probe |
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